CN101281126B - Optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis apparatus - Google Patents
Optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis apparatus Download PDFInfo
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- CN101281126B CN101281126B CN2008100602068A CN200810060206A CN101281126B CN 101281126 B CN101281126 B CN 101281126B CN 2008100602068 A CN2008100602068 A CN 2008100602068A CN 200810060206 A CN200810060206 A CN 200810060206A CN 101281126 B CN101281126 B CN 101281126B
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Abstract
The invention relates to an optical fiber type optical heterodyne evanescent wave cavity ring-down spectral analysis installment. The structure of the prior art is complicate, has a high precision requirement on optical elements, and can not test the thin film, the interface, and nanometer materials, etc. The detection component of the invention uses a cylinder or a hemispheroid with a symmetric structure, the interior forms a light reflection cavity, the outer surface is plated with a high reflection film. A detection component optical fiber coupling collimator and the detection component are in positional combining. A laser source and a spectroscope optical fiber coupling collimator are arranged on the both sides of a spectroscope respectively. A photoelectric detector and the spectroscope optical fiber coupling collimator are arranged at the same side of the working face of the spectroscope, and are arranged along the direction of the reflected light. The detection component optical fiber coupling collimator is connected with the spectroscope optical fiber coupling collimator through an optical fiber. The structure of the fine cavity of the invention is sample; the fine cavity has only one optical component, whose structure is sample and stable so as to has a low mechanical positioning requirement; and the object of the spectrum analysis and test can be expanded to the thin film, the interface, nanometer materials and the fluid.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of spectral analysis device, particularly a kind of optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device, the trace concentration that is mainly used in form materials such as fluid, film, interface, nano-substance is tested.
Technical background
Exist a large amount of trace amounts of substances to measure demand in many fields such as environmental analysis, life science, medical, national defense safety, advanced process industries, and more and more higher to the requirement of detection sensitivity.Cavity ringdown spectroscopy becomes one of trace materials measuring technique development trend owing to have detection sensitivity height, absolute measurement, good selective.The cavity ringdown spectroscopy technology is used for analyzing trace gas concentration and component more, in the last few years, the researcher is applied to the flowing material analysis with the cavity ringdown spectroscopy technology, formerly in the technology, a kind of cavity ringdown spectroscopy system is arranged (referring to United States Patent (USP) " Cavityring down arrangement for non-cavity filing samples ", the patent No.: US6,452,680 B1).This cavity ringdown spectroscopy system has suitable advantage, although the cavity ringdown spectroscopy technical functionality can be expanded, substance is carried out analytical test,, still come with some shortcomings:
1) this cavity ringdown spectroscopy system can only be used for the test analysis flowing material, can not be to the trace concentration test of form materials such as film, interface, nano-substance;
2) this cavity ringdown spectroscopy system is to the machining and the positioning requirements height of system architecture, when laser beam incident and outgoing sample cell, in order to make luminous energy loss not occur at the interface, all to so just increase the sample cell mechanical positioning and require and provide the beam direction control accuracy with Brewster angle incidence and outgoing;
3) in this test macro, transmission and reflection take place during the first incident high precision of laser beam chamber mirror, transmitted light takes place to come and go in high-fineness cavity to be propagated, photodetector is surveyed this and is transmitted to light in the chamber and declines at the shoot laser energy of a certain chamber mirror and swing variation, so luminous energy is very low, require detector to have high detection sensitivity, system's photoelectric detection part is proposed high request;
When 4) convection cell is measured, need filling sample pond at least, need detected fluid to have certain volume quantity, can't detect having a spot of detected fluid;
5) high-fineness cavity in this cavity ringdown spectroscopy system has two or more high reflectivity mirror optical elements to constitute, complex structure, and the optical element relative position had the hi-Fix requirement.
Summary of the invention
The problem to be solved in the present invention has been to overcome the deficiency of above-mentioned technology formerly, a kind of optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device is provided, it is in extensive range to have measurement of species, the measured matter aequum is few, required detection optical signalling is strong, but the optical fiber long-distance transmissions, meticulous chamber constitutes characteristics such as simple.
Basic design of the present invention is: near field optic sensing, the long propagation of optical fiber and optical heterodyne beam split electrical resistivity survey survey technology are applied to the cavity ringdown spectroscopy technology.Optical fiber partly is connected the sensor measuring part with information processing, can realize Distance Test, the optical fiber distributed type test macro.During optical heterodyne is divided detector survey light intensity signal be direct current light field amplitude and useful weak varying light fields amplitude get and the back mould square, cross term contains the using light signal, contain direct current light field amplitude parameter in this signal amplitude simultaneously, can realize the effect that required detection light signal strengthens.It is high meticulous strong to adopt optical element degree highly reflecting films to form, and adopts near field of light disappearance ripple domain test material, and the desired substance amount is little, and measurement range is wide.
Technical solution of the present invention is:
The optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device comprises exploring block, optical fiber, photodetector, spectroscope and LASER Light Source.Described exploring block is cylinder or hemisphere, and the cross section of described cylinder is semicircle or isosceles triangle; The inside of exploring block is light reflection cavity, and outside surface is coated with highly reflecting films.Exploring block optical fiber coupling collimating apparatus cooperates with the exploring block position.LASER Light Source and spectroscopic fiber coupling collimating apparatus are separately positioned on spectroscopical both sides, and the emission light direction of LASER Light Source and the angle of spectroscopical workplace are 45 °, and spectroscopic fiber coupling collimating apparatus is arranged on the emission light direction.Photodetector and spectroscopic fiber coupling collimating apparatus are arranged on the same side of spectroscopical workplace, and are arranged on spectroscopical reflected light direction.Exploring block optical fiber coupling collimating apparatus is connected by optical fiber with spectroscopic fiber coupling collimating apparatus.
Described exploring block is the cylinder of cross section semicircular in shape, and the cambered surface of cylinder is coated with highly reflecting films.
Exploring block optical fiber coupling collimating apparatus is arranged in the radial direction semicircular.
Described exploring block is the cylinder that the cross section is isosceles triangle, and the central plane that waits of cylinder is coated with highly reflecting films.Exploring block optical fiber coupling collimating apparatus and isosceles triangle waist on one side be arranged in parallel.
The cambered surface of described hemispheroidal exploring block is coated with highly reflecting films.Exploring block optical fiber coupling collimating apparatus is arranged in the radial direction hemispheroidal.
Described spectroscope is an Amici prism; Optical fiber is a kind of in single-mode fiber, multimode optical fiber, the fibre bundle.
Described spectroscope is a polarization splitting prism, is provided with quarter-wave plate between polarization splitting prism and the spectroscopic fiber coupling collimating apparatus, and the angle of the emergent light polarization direction of the optical axis direction of quarter-wave plate and polarization splitting prism is 45 °; Described optical fiber is polarization maintaining optical fibre.
Described photodetector is a kind of in photodiode, snowslide pipe, the photomultiplier.
The course of work of apparatus of the present invention is the linearly polarized light beam that LASER Light Source is sent, and through spectroscope, enters optical fiber by spectroscopic fiber coupling collimating apparatus.In optical fiber, propagate into exploring block, be converted into laser beam through exploring block optical fiber coupling collimating apparatus, see through the incident working surface of exploring block, total reflection takes place on the total reflection workplace, total reflection disappearance ripple zone is for detecting the zone of measured matter, and the total reflection light beam propagates into the reflective operation face and reflects.Because incident working surface and reflective operation face all are coated with highly reflecting films, so formed high-fineness cavity, light beam comes and goes in high-fineness cavity and propagates, each when on the total reflection workplace total reflection taking place through and measured matter have an effect, have absorption, luminous energy has loss to form absorption peak, and luminous energy absorption intensity and measured matter are measured proportional.When laser beam is passed through incident working surface at every turn, have part light generation transmission.The signal transmitted light beam propagates into optical fiber by exploring block optical fiber coupling collimating apparatus again through incident working surface.The signal transmitted light beam incides spectroscope at the optical fiber other end through spectroscopic fiber coupling collimating apparatus.Reflect in the top beam split of spectroscopical light splitting surface, reach on the photodetector.Photodetector is converted into the light signal that detects and passes to backstage signal Processing control system behind the electric signal and carry out optical heterodyne method signal Processing, obtains the measured object quality.
For improving laser light energy utilization ratio, spectroscope adopts polarization splitting prism, for the transmission of light inlet polarizing beam, the polarization direction is perpendicular to the beam reflection of incident beam polarization direction, between polarization splitting prism and spectroscopic fiber coupling collimating apparatus, add quarter-wave plate simultaneously, the quarter-wave plate optical axis direction becomes miter angle with the emergent light polarization direction of polarization splitting prism, or being coated with the quarter-wave optical thin film near optical fiber coupling collimating apparatus one side at spectroscope, optical fiber adopts polarization maintaining optical fibre.The linearly polarized light beam that LASER Light Source is sent can the flash of light preceding an earthquake can the loss transmission, be converted into the disk polarized light through behind the quarter-wave plate, pass to exploring block through polarization maintaining optical fibre, the folded light beam that contains measured matter information is through behind the quarter-wave plate, can be converted into linearly polarized light, the polarization direction of this moment reaches on the photodetector so be polarized the reflection of Amici prism high-level efficiency perpendicular to the incident beam polarization direction.Photodetector is converted into the light signal that detects and passes to backstage signal Processing control system behind the electric signal and carry out optical heterodyne method signal Processing, obtains the measured object quality.
Compare advantage of the present invention with technology formerly:
1) the cavity ringdown spectroscopy measuring object is extended to film, interface, nano-substance, fluid;
Required measured object quality is few when 2) measuring;
3) meticulous chamber constitutes simply, has only an optical element;
4) simple and stable structure requires low to mechanical positioning;
5) required detection light signal is strong;
6) optical fiber long-distance transmissions can constitute the optical fiber distributed type test macro.
Description of drawings
Fig. 1 is a first embodiment of the present invention synoptic diagram;
Fig. 2 is a second embodiment of the present invention synoptic diagram.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Embodiment 1:
The optical fiber type optical heterodyne method evanscent wave cavity declining spectroscopic analysis system of present embodiment, concrete structure as shown in Figure 1.The optical fiber type optical heterodyne method evanscent wave cavity declining spectroscopic analysis system is made of exploring block 1, optical fiber 3, photodetector 5, spectroscope 6 and LASER Light Source 7.Exploring block 1 is the hemisphere of symmetrical structure, and outside surface is coated with highly reflecting films, the inner light reflection cavity that forms.Exploring block optical fiber coupling collimating apparatus 2 cooperates with exploring block 1 position, and it is in the radial direction hemispherical that exploring block optical fiber coupling collimating apparatus 2 is arranged on exploring block 1.LASER Light Source 7 and spectroscopic fiber coupling collimating apparatus 4 are separately positioned on the both sides of spectroscope 6, and the angle of the emission light direction of LASER Light Source 7 and the workplace of spectroscope 6 is 45 °, and spectroscopic fiber coupling collimating apparatus 4 is arranged on the emission light direction.Photodetector 5 is arranged on the same side of the workplace of spectroscope 6 with spectroscopic fiber coupling collimating apparatus 4, and is arranged on the reflected light direction of spectroscope 6.Exploring block optical fiber coupling collimating apparatus 2 is connected by optical fiber 3 with spectroscopic fiber coupling collimating apparatus 4, and optical fiber is multimode optical fiber.Photodetector 5 is a photomultiplier.
The optical fiber type optical heterodyne method evanscent wave cavity declining spectroscopic analysis system of present embodiment is structure as mentioned above, and the course of work is the linearly polarized light beam that LASER Light Source 7 is sent, and through spectroscope 6, enters optical fiber 3 by spectroscopic fiber coupling collimating apparatus 4.In optical fiber 3, propagate into exploring block 1, be converted into laser beam through exploring block optical fiber coupling collimating apparatus 2, see through the incident working surface of exploring block 1, total reflection takes place on the total reflection workplace, total reflection disappearance ripple zone is for detecting the zone of measured matter, and the total reflection light beam propagates into the reflective operation face and reflects.Because the spherical outside surface workplace of exploring block 1 all is coated with highly reflecting films, so formed high-fineness cavity, light beam comes and goes in high-fineness cavity and propagates, each when on the total reflection workplace total reflection taking place through and measured matter have an effect, have absorption, luminous energy has loss to form absorption peak, and luminous energy absorption intensity and measured matter are measured proportional.When laser beam is passed through incident working surface at every turn, have part light generation transmission.The signal transmitted light beam propagates into optical fiber 3 by exploring block optical fiber coupling collimating apparatus 2 again through incident working surface.The signal transmitted light beam incides spectroscope 6 at optical fiber 3 other ends through spectroscopic fiber coupling collimating apparatus 4.Light splitting surface top beam split at spectroscope 6 is reflected, and reaches on the photodetector 5.Photodetector 5 is converted into the light signal that detects and passes to backstage signal Processing control system behind the electric signal and carry out optical heterodyne method signal Processing, obtains the measured object quality.
Embodiment 2:
The second specific embodiment structure as shown in Figure 2.Described optical fiber type optical heterodyne method evanscent wave cavity declining spectroscopic analysis system is made of exploring block 1, optical fiber 3, photodetector 5, quarter-wave plate 8, spectroscope 6 and LASER Light Source 7.Exploring block 1 is the cylinder of isosceles triangle for the cross section, and the central plane that waits of cylinder is coated with highly reflecting films, the inner light reflection cavity that forms.Exploring block optical fiber coupling collimating apparatus 2 cooperates with exploring block 1 position, and it is in the radial direction hemispherical that exploring block optical fiber coupling collimating apparatus 2 is arranged on exploring block 1.LASER Light Source 7 and spectroscopic fiber coupling collimating apparatus 4 are separately positioned on the both sides of spectroscope 6, and the angle of the emission light direction of LASER Light Source 7 and the workplace of spectroscope 6 is 45 °, and spectroscopic fiber coupling collimating apparatus 4 is arranged on the emission light direction.Photodetector 5 is arranged on the same side of the workplace of spectroscope 6 with spectroscopic fiber coupling collimating apparatus 4, and is arranged on the reflected light direction of spectroscope 6.Exploring block optical fiber coupling collimating apparatus 2 is connected by optical fiber 3 with spectroscopic fiber coupling collimating apparatus 4, and optical fiber 3 adopts polarization maintaining optical fibre, and photodetector 5 is a photomultiplier.Spectroscope 6 adopts polarization spectroscope, for the transmission of light inlet polarizing beam, the polarization direction is perpendicular to the beam reflection of incident beam polarization direction, between spectroscope 6 and spectroscopic fiber coupling collimating apparatus 4, add quarter-wave plate 8 simultaneously, quarter-wave plate 8 optical axis directions become miter angle with spectroscope 6 light beam emergent light polarization directions, or are coated with the quarter-wave optical thin film at spectroscope 6 near spectroscopic fiber coupling collimating apparatus 4 one sides.Exploring block optical fiber coupling collimating apparatus 4 be arranged in parallel with isosceles triangle waist on one side.
The optical fiber type optical heterodyne method evanscent wave cavity declining spectroscopic analysis system of present embodiment is structure as mentioned above, the course of work is the linearly polarized light beam that LASER Light Source 7 is sent, behind spectroscope 6 and quarter-wave plate 8, be converted into circularly polarized light by linearly polarized light, enter optical fiber 3 by spectroscopic fiber coupling collimating apparatus 4 again.In optical fiber 3, propagate into exploring block 1, be converted into laser beam through exploring block optical fiber coupling collimating apparatus 2, see through the incident working surface of exploring block 1, total reflection takes place on the total reflection workplace, total reflection disappearance ripple zone is for detecting the zone of measured matter, and the total reflection light beam propagates into the reflective operation face and reflects.Because exploring block 1 is the cylinder of isosceles triangle for the cross section, the central plane that waits of cylinder is coated with highly reflecting films, the inner high-fineness cavity that forms, light beam comes and goes in high-fineness cavity and propagates, each when on the total reflection workplace total reflection taking place through and measured matter have an effect, have absorption, luminous energy has loss to form absorption peak, and luminous energy absorption intensity and measured matter are measured proportional.When laser beam is passed through incident working surface at every turn, have part light generation transmission.The signal transmitted light beam propagates into optical fiber 3 by exploring block optical fiber coupling collimating apparatus 2 again through incident working surface.The signal transmitted light beam is in 4 outgoing of optical fiber 3 other ends process spectroscopic fiber coupling collimating apparatus, pass through quarter-wave plate 8 once more, because quarter-wave plate 8 optical axis directions become miter angle with spectroscope 6 light beam emergent light polarization directions, light beam is converted into linearly polarized light by circularly polarized light, the polarization direction is vertical with the polarization direction of LASER Light Source 7 emergent lights, so reflected on the light splitting surface of spectroscope 6 expeditiously, reflected light reaches on the photodetector 5.Photodetector 5 is converted into the light signal that detects and passes to backstage signal Processing control system behind the electric signal and carry out optical heterodyne method signal Processing, promptly obtains the measured object quality.
Claims (7)
1. optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device, comprise exploring block, optical fiber, photodetector, spectroscope and LASER Light Source, it is characterized in that described exploring block is cylinder or hemisphere, the cross section of described cylinder is semicircle or isosceles triangle; The inside of exploring block is light reflection cavity, and outside surface is coated with highly reflecting films, and exploring block optical fiber coupling collimating apparatus cooperates with the exploring block position; LASER Light Source and spectroscopic fiber coupling collimating apparatus are separately positioned on spectroscopical both sides, and the emission light direction of LASER Light Source and the angle of spectroscopical workplace are 45 °, and spectroscopic fiber coupling collimating apparatus is arranged on the emission light direction; Photodetector and spectroscopic fiber coupling collimating apparatus are arranged on the same side of spectroscopical workplace, and are arranged on spectroscopical reflected light direction; Exploring block optical fiber coupling collimating apparatus is connected by optical fiber with spectroscopic fiber coupling collimating apparatus.
2. optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device as claimed in claim 1 is characterized in that described exploring block is the cylinder of cross section semicircular in shape, and the cambered surface of cylinder is coated with highly reflecting films; Exploring block optical fiber coupling collimating apparatus is arranged in the radial direction semicircular.
3. optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device as claimed in claim 1 is characterized in that described exploring block is the cylinder that the cross section is isosceles triangle, and the central plane that waits of cylinder is coated with highly reflecting films; Exploring block optical fiber coupling collimating apparatus and isosceles triangle waist on one side be arranged in parallel.
4. optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device as claimed in claim 1 is characterized in that the cambered surface of described hemispheroidal exploring block is coated with highly reflecting films; Exploring block optical fiber coupling collimating apparatus is arranged in the radial direction hemispheroidal.
5. optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device as claimed in claim 1 is characterized in that described spectroscope is an Amici prism; Optical fiber is a kind of in single-mode fiber, multimode optical fiber, the fibre bundle.
6. optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device as claimed in claim 1, it is characterized in that described spectroscope is a polarization splitting prism, be provided with quarter-wave plate between polarization splitting prism and the spectroscopic fiber coupling collimating apparatus, the angle of the emergent light polarization direction of the optical axis direction of quarter-wave plate and polarization splitting prism is 45 °; Described optical fiber is polarization maintaining optical fibre.
7. optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis device as claimed in claim 1 is characterized in that described photodetector is a kind of in photodiode, snowslide pipe, the photomultiplier.
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| CN2008100602068A CN101281126B (en) | 2008-03-31 | 2008-03-31 | Optical fiber type optical heterodyne method evanscent wave cavity declining spectral analysis apparatus |
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| CN108007869B (en) * | 2018-01-23 | 2024-03-19 | 荆楚理工学院 | Measuring device for measuring evanescent wave |
| CN113740214B (en) * | 2021-11-08 | 2022-01-25 | 深圳大学 | Intelligent analysis method and device based on holographic evanescent wave optical tweezers |
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