CN100337092C - Long-distance 2D polarized photoelectric autocollimation device and method for drift quantity returned from feedback of target drone - Google Patents

Abstract

The present invention belongs to the technical field of precision instrument manufacture and precision measurement and metering, particularly to a long-distance high precision two-dimensional polarization photoelectric auto-collimation device and a method for drift amount returned from the feedback of a target. A two-dimensional photoelectric auto-collimation light tube uses the combination of a polarization laser source, a polarization light splitting mirror and a lambda/4 wave plate, and the polarization characteristic of laser is used for avoiding measurement beams feeding back the laser source so as to avoid the further angle drift amount of the measurement beams. A light splitting target detector acquires the measurement signals of two-dimensional minor angle variation, and simultaneously separates and feeds back feedback beams of an inherent angle drift component of the laser source, wherein the characteristics of the measurement light beams are completely the same as those of the feedback beams. The drift amount monitoring device conducts real-time monitoring to the angle drift amount, and a computer conducts real-time control to a two-dimensional beam deflection device according to the monitored and obtained angle drift amount, adjusts the measurement beams according to the reverse direction of the angle drift amount, and suppresses and eliminates the angle drift amount coupled in the measurement beams in a transmission path of the measurement beams.

Description

The long-distance 2 D polarized electric autocollimation and the method for drift amount target feedback

Technical field

The invention belongs to exact instrument manufacturing and precision measurement field of measuring techniques, particularly a kind of length of drift amount target feedback is apart from high-precision two-dimensional polarization photoelectricity autocollimation and method.

Background technology

Along with the updating and improve of measuring technique, the development of modernized high-acruracy survey technology and azimuth aiming tracker has proposed more and more higher requirement to low-angle measuring accuracy.Photoelectric auto-collimator is in the low-angle precision measurement, the high precision aiming has irreplaceable effect with the aspect, location, can be used as the ingredient of optical metrological instruments such as angular instrument, optical comparator, can be used for separately also that surveying instrument is used for optical measurement, aero-space instrument is debug and aspects such as military spacecraft attitude measurement.

In the high precision small angle measurement, laser beam is because advantages such as its good single direction, high brightness and high stabilities, often be used as measuring basis and be widely used in ultraprecise process equipment and the measuring equipment, many scientific research institutions develop the photoelectric auto-collimator that adopts LASER Light Source and high precision ccd image sensor to measure two dimension angular (1. Wu is beautiful. Laser Autocollimator. 08 phase of ray machine electrical information .1994: 11-13; Jiang this and, Chen Wenyi, Hu Wenfei, Hu Qingrong. the small angle measurement system that detects with laser alignment and CCD. laser and infrared .1998,28 (4): 233-234+243; 3. Lin Yu pond, Zhang Ping, Zhao Meirong, Hong Xin. the open-air semiconductor laser autocollimator that uses. the accurate manufacturing technology .2001 of aviation, 37 (3): 35-37; 4. open Yao Yu, Zhang Minghui, Qiao Yanfeng. a kind of high precision CCD laser auto-collimation Research on Measurement System. photoelectron laser .2003,14 (2): 168-170; 5. Ma Fulu, Zhang Zhi's profit, Zhou Zhaofa. based on single line array CCD linearity collimator of M type graduation silk. optical technology .2002,28 (3): 224-225+227).

Be better than 0.5 for uncertainty of measurement " photoelectric auto-collimator, measuring distance usually less than 6m (1. military Shanxi is mediate. the geometric sense Technology of Precision Measurement. the .1989 of publishing house of Harbin Institute of Technology September; 2. the German M  LLER-WEDEL ELCOMAT vario of company twin shaft autocollimator Chinese operation manual .2004; 3. Chinese shipbuilding industry the 6354th SZY-99 of Jiujiang Precision Measuring Technology Research Institute of research institute type digital display autocollimator Chinese operation manual .2004; 4. Britain Taylor Hobson company's T A51, DA20, DA400 type optical-autocollimator Chinese operation manual .2002).In the application scenario of long distance, the angle drift value of laser beam is the main source of photoelectric auto-collimator measuring error.Cause the main cause of beam drift to have: (1) LASER Light Source self-heating causes the angle drift of the laser beam that resonator cavity internal reflector modification causes; (2) because laser beam feedback LASER Light Source, and then the angle drift of the laser beam that causes of the resonator cavity interior resonance instability that causes; (3) randomized jitter of the big entraining air stream in the beam propagation approach causes the random perturbation of laser beam and bending of light that the atmospheric gradient change of refractive causes etc.Theoretical analysis shows: square being directly proportional of bending of light and distance, randomized jitter is directly proportional with 1.5 powers of distance.Increase along with distance, the randomized jitter of the big entraining air stream in the beam propagation approach causes the influence of the random perturbation of laser beam and the bending of light that the atmospheric gradient change of refractive causes will cause the angle drift of light beam considerably beyond LASER Light Source resonator cavity internal reflector modification, simultaneously the influence of the angle drift of laser beam feedback LASER Light Source and then the laser beam that causes is not allowed to ignore because the high resolving power characteristic of 2 D photoelectric autocollimator makes, therefore improves just difficulty more of collimation precision.In growing apart from laser collimation system, the interference that employing zone plate, phase board, binary optical device, double slit etc. produce and the space line of diffraction fringe are as datum line, utilize them to insensitive these characteristics of drift value, reach the purpose of collimation, typical method has Phase Plate Alignment in Large-scale Measurement method, binary optical collimation method, twin-beam compensation collimation method etc., and this class methods collimation precision is generally 10 ^-6Rad, promptly 0.2 " about magnitude.(1. ten thousand Deans. laser datum high-acruracy survey technology. the .1999 of National Defense Industry Press June; 2. square Zhong Yan, Yin Chunyong, Liang Jinwen. the research of high-precision laser collimation technique (one). aviation instrumentation technology .1997,17 (1): 3-6; 3. rich auspicious in, Wang Shipeng, Liu Xiaochun, Gong Zhiben. the experimental study of laser beam drift in the turbulent atmosphere. Chinese laser .2000,27 (11): 1011-1015; 4. Yang You hall, Ceng Lijiang, Yin Chunyong. the applied research of auto-adaptive noise removal technology in laser alignment. Chinese journal of scientific instrument .1995,16 (4): 370-374).

In the data acquisition process of 2 D photoelectric autocollimator, because the influence of beam drift, if adopt the Facula Center Location method then spot center that receiver receives is drifted about with beam drift; If adopt profile centralized positioning method, then owing to beam drift, the center of energy of the hot spot that receiver receives and the geometric center of profile do not overlap the skew that causes the profile center, directly produce the deviations at profile center.If this angle drift value is not revised or is compensated, with directly feeding back to the measurement of angle deviation that low-angle measurement result causes, cause the instrument data poor repeatability, stability is bad, even make spot drift arrive outside the reception visual field, influence the operate as normal of instrument.If will further improve measurement stability and measuring accuracy, only rely on the collimation precision that improves light beam self, all be to be difficult to realize on still being technological and manufacturing level from prior art.

Adopt the polarization characteristic and the close-loop feedback control technology of laser, thereby angle drift error for the measuring beam avoiding laser beam feedback LASER Light Source further to avoid causing thus, compensate simultaneously and revise and in the measuring beam route of transmission, be coupling in the measurement of angle deviation that the angle drift value in the measuring beam causes, realize that high-precision small angle measurement provides a kind of otherwise effective technique approach.In order to improve the directional stability of laser beam, many domestic and international experts and scholars are at different application scenarios at present, (1. Zhao Wei is modest to have proposed many laser alignment methods based on the close-loop feedback control technology, Tan Jiubin, Ma Hongwen, Zou Limin. drift value feedback control type laser alignment method. optics journal .2004,24 (3): 373-377; 2. in Da Ren, Zhang Zhiqiang, Xu Jiyu, Su Jiexian. the light path automatic compensating method that disturbs in the laser measurement. Chinese journal of scientific instrument .2003,24 (2): 123-126; 3. deep in the hall, Guo Yanzhen. improve a kind of method of laser alignment precision. oil instrument .1999,13 (6): 18-20; 4. Li Yan, Meng Xiangwang, Zhang Enyao. the big workpiece hole of a kind of new pattern laser scan-type-hole axiality measuring apparatus. laser and infrared .2000,30 (5): 280-282).

Though above-mentioned as can be known in actual applications measurement scheme has suppressed the angle drift value of light beam to a certain extent, above-mentioned measurement scheme only at be the application scenario of specific laser linear datum, control to as if the center of laser beam.And in the practical application of 2 D photoelectric autocollimator, especially in the application scenario of growing distance, requirement can also accurately measure the variable quantity of Bidimensional small angle in the angle drift value of introducing the FEEDBACK CONTROL measuring beam, simultaneously the influence of laser beam feedback LASER Light Source and then the angle drift that causes is not allowed to ignore because the high resolving power characteristic of 2 D photoelectric autocollimator makes, difficult point is that the object of FEEDBACK CONTROL is exactly the variable quantity of the Bidimensional small angle that need measure of 2 D photoelectric autocollimator, the not intellectual of object of control directly causes and can't introduce FEEDBACK CONTROL in the measuring process of 2 D photoelectric autocollimator, simultaneously since the angle drift value of laser beam feedback LASER Light Source and then the laser beam that causes be difficult to eliminate by the close-loop feedback control technology of outside.The angle drift value of measuring beam is not eliminated in measuring process, be blended at last and cause the measurement of angle deviation in the measurement result, cause photoelectric auto-collimator in the application of long distance, measurement stability and poor repeatability, uncertainty of measurement is difficult to further raising, limited the range of application of photoelectric auto-collimator greatly, this also is a unsolved major issue in the practical application of current photoelectric auto-collimator.

Summary of the invention

The objective of the invention is to overcome the deficiency that exists in the above-mentioned existing photoelectric auto-collimator measurement scheme, a kind of long-distance 2 D polarized electric autocollimation and method of drift amount target feedback are provided, 2 D photoelectric autocollimation light pipe adopts polarization laser light source, polarization spectroscope and λ/4 wave plate combined, utilizes the polarization characteristic of laser to avoid measuring beam feedback LASER Light Source and then avoid the further angle of measuring beam drift value; Beam splitting type target detector separates in the measuring-signal that obtains its Bidimensional small angle variable quantity and feeds back to the angle drift component feedback beam intrinsic with the identical LASER Light Source of measuring beam characteristic, the drift value monitoring device is monitored in real time to its angle drift value, computing machine is controlled the two-dimentional light beam inflector assembly in real time according to the angle drift value that its monitoring obtains, measuring beam is adjusted according to the opposite direction of angle drift value, and inhibition and elimination are coupling in the angle drift value in the measuring beam in the measuring beam route of transmission.Dynamic compensation and suppress the angle measurement error that the angle drift value of measuring beam causes, monitoring distance is long, and the monitoring sensitivity height of diagonal angle drift value can significantly improve measuring distance, measurement stability and the measuring accuracy of 2 D photoelectric autocollimator.

The technical solution that the present invention adopts is: a kind of long-distance 2 D polarized electric autocollimation of drift amount target feedback, comprise 2 D photoelectric autocollimation light pipe and computing machine, also comprise the drift value monitoring device, beam splitting type target detector and two-dimentional light beam inflector assembly, said 2 D photoelectric autocollimation light pipe is by the polarization laser light source of placing successively, graticule, polarization spectroscope, λ/4 wave plates, ccd image sensor and collimator objective constitute, wherein graticule is positioned at the focus place of collimator objective, and ccd image sensor is positioned at the conjugate position place of collimator objective focus with respect to the polarization spectroscope light splitting surface; Said two-dimentional light beam inflector assembly is made up of drive power supply for piezoelectric ceramics, piezoelectric ceramics shifter, two-dimentional micro-displacement work table and deflection mirror; Polarization laser light source, polarization spectroscope and λ/4 wave plate combined in the 2 D photoelectric autocollimation light pipe utilize the polarization characteristic of laser to avoid measuring beam feedback laser instrument and then avoid the further angle of measuring beam drift value; Beam splitting type target detector separates in the measuring-signal that obtains the Bidimensional small angle variable quantity and feeds back to the angle drift component feedback beam intrinsic with the identical laser instrument of measuring beam characteristic, the angle drift value of drift value monitoring device diagonal angle drift component feedback beam is monitored in real time, computing machine is controlled the two-dimentional light beam inflector assembly in real time according to the angle drift value that its monitoring obtains, measuring beam is adjusted according to the opposite direction of angle drift value, and inhibition and elimination are coupling in the angle drift value in the measuring beam in the measuring beam route of transmission.

Polarization laser light source in the 2 D photoelectric autocollimation light pipe adopts the LASER Light Source of the laser beam or the circularly polarized laser beam that send linear polarization.

λ in the 2 D photoelectric autocollimation light pipe/4 wave plates be positioned between polarization spectroscope and the collimator objective or be positioned over collimator objective and beam splitting type target detector between.

Beam splitting type target detector is connected by two right-angle prisms staggered relatively and forms, a vertical working surface plating spectro-film of one of them right-angle prism, and measuring beam is by the vertical working surface incident of the right-angle prism of plating spectro-film.

The drift value monitoring device is connected by deflection mirror, focusing objective len and 4 quadrant detector and forms, and 4 quadrant detector is positioned at the place, focal plane of focusing objective len.

The present invention also provides the measuring method of the long-distance 2 D polarized electric autocollimation of drift amount target feedback, and this measuring method may further comprise the steps:

1. 2 D photoelectric autocollimation light pipe sends the measuring beam with polarization characteristic;

2. beam splitting type target detector receives measuring beam and is separated into folded light beam and transmitted light beam;

3. after folded light beam is obtained the Bidimensional small angle variable quantity of beam splitting type target detector,, receive, become measuring-signal by ccd image sensor through reflection fully behind the polarization spectroscope;

4. transmitted light beam is isolated the angle drift component feedback beam intrinsic with the identical LASER Light Source of measuring beam characteristic, feeds back to the drift value monitoring device, and the line focus object lens are received by 4 quadrant detector, the angle drift value of monitoring angle of departure drift component feedback beam:

$\mathrm{\ϵ}=\arctan \left(\frac{\mathrm{\Δd}}{f_0}\right)$

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector, f ₀Focal length for focusing objective len.

5. the angle drift value of the computing machine angle drift component feedback beam that monitoring obtains according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, makes measuring beam according to the opposite direction adjustment of angle drift value, and the adjustment amount size is:

φ＝ε

Wherein: φ is the adjustment amount of two-dimentional light beam inflector assembly to the space angle of measuring beam, and ε monitors the angle drift value of the angle drift component feedback beam that obtains for the drift value monitoring device.

6. adjust repeatedly according to step 4 and step 5, suppress in real time and eliminate the angle drift value that in the measuring beam route of transmission, is coupling in the measuring beam, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector by measuring-signal:

$\mathrm{\&theta;}=\frac{{\mathrm{<figure-callout\; id="1"\; label="d"\; filenames="C20051011726300181.png,C20051011726300191.png"\; state="\{\{state\}\}">d</figure-callout>}}_1}{2f}$

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector, d ₁The variable quantity of the spot center position that forms on ccd image sensor for measuring-signal, f is the equivalent focal length of collimator objective.

The present invention has following characteristics and good result:

1. adopt the 2 D photoelectric autocollimation light pipe of polarization spectroscope and λ/4 wave plate combined to send measuring beam with polarization characteristic, return by original optical path after obtaining the Bidimensional small angle variable quantity of beam splitting type target detector, after the collimator objective convergence, polarization characteristic by laser is known, reflect fully through measuring beam behind the polarization spectroscope, receive by ccd image sensor, utilize the polarization characteristic of laser to avoid measuring beam feedback LASER Light Source, and then avoid the further angle of measuring beam drift value, this is one of innovative point that is different from existing photoelectric auto-collimation measuring technique;

2. adopt novel beam splitting type target detector to improve optical measuring system, the angle drift value of measuring beam is separated from the Bidimensional small angle variable quantity of beam splitting type target detector, obtain the angle drift component feedback beam intrinsic in real time with the identical LASER Light Source of measuring beam characteristic, monitor the angle drift value of angle of departure drift component feedback beam in real time by the 4 quadrant detector of drift value monitoring device, this be different from existing photoelectric auto-collimation measuring technique innovative point two;

3. in design, in the measuring beam route of transmission, be coupling in the angle drift value in the light beam, the angle drift value of light beam changes in measuring beam and in the drift component feedback beam of angle simultaneously, the angle drift value of the computing machine angle drift component feedback beam that monitoring obtains according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, measuring beam is adjusted according to the opposite direction of angle drift value, can suppress and eliminate the angle drift value that in the measuring beam route of transmission, is coupling in the measuring beam, this be different from existing photoelectric auto-collimation measuring technique innovative point three;

4. present design has been introduced polarisation of light technology and close-loop feedback control technology when accurately measuring the Bidimensional small angle variable quantity, in light path, add polarization laser light source, polarization spectroscope, λ/4 wave plates, beam splitting type target detector, drift value monitoring device and two-dimentional light beam inflector assembly, can utilize the polarization characteristic of laser to avoid measuring beam feedback LASER Light Source and then avoid the further angle of measuring beam drift value, also can suppress and eliminate the angle drift value that in the measuring beam route of transmission, is coupling in the measuring beam simultaneously; The angle measurement error that the angle drift value of dynamic inhibition and compensating measure light beam causes, solved in the long distance applications occasion because the measurement stability that the angle drift value of light beam causes is poor, even the instrument that drifts about out receives the difficult problem of visual field, in the measuring distance that increases the 2 D photoelectric autocollimator, improved measurement stability, satisfied the long needs of measuring apart from high precision two-dimensional narrow angle, and measuring distance is long more, precision is improved remarkable more, the reliability height, practical.

Description of drawings

Fig. 1 is the structural representation of apparatus of the present invention;

Fig. 2 is that the beam splitting type target detector in apparatus of the present invention separates the structural representation that obtains with the intrinsic angle drift component feedback beam of the identical LASER Light Source of measuring beam characteristic when obtaining the Bidimensional small angle variable quantity;

Fig. 3 is the measuring principle figure of the angle drift value of the drift value monitoring device monitoring angle drift component feedback beam in apparatus of the present invention;

Fig. 4 is the two-dimentional light beam inflector assembly in apparatus of the present invention carries out real-time FEEDBACK CONTROL to the angle drift value of measuring beam a structural representation;

Fig. 5 be in apparatus of the present invention in the 2 D photoelectric autocollimation light pipe λ/4 wave plates be positioned over structural representation between collimator objective and the beam splitting type target detector;

Fig. 6 is that the beam splitting type target detector in apparatus of the present invention is made of two right-angle prisms staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism, measuring beam is by the structural representation of the vertical working surface incident of the right-angle prism of plating spectro-film.

Embodiment

Be described in detail below in conjunction with the long-distance 2 D polarized electric autocollimation and the method for accompanying drawing drift amount target feedback of the present invention:

As shown in Figure 1, the inventive system comprises the 2 D photoelectric autocollimation light pipe of forming by polarization laser light source 2, graticule 3, polarization spectroscope 4, λ/4 wave plates 5, ccd image sensor 6, collimator objective 71, the drift value monitoring device of forming by 4 quadrant detector 9, focusing objective len 10 and deflection mirror 11 8, beam splitting type target detector 12, computing machine 13, two-dimentional light beam inflector assembly 18 of being made up of drive power supply for piezoelectric ceramics 14, piezoelectric ceramics shifter 15, two-dimentional micro-displacement work table 16 and deflection mirror 17 etc. constitutes.The path of its light is as follows:

The polarized laser beam that the polarization laser light source 2 of 2 D photoelectric autocollimation light pipe 1 sends illuminates the graticule 3 at the focus place that is positioned at collimator objective 7, become linearly polarized light P light through laser beam after polarization spectroscope 4 transmissions, P light rotates 45 ° and becomes circularly polarized light through λ/4 wave plates, the 5 back P polarisation of light direction that are placed between polarization spectroscope 4 and the collimator objective 7, after assembling, collimator objective 7 becomes the measuring beam of collimate in parallel, through inciding the beam splitting type target detector 12 that is placed on the measured object after 18 reflections of two-dimentional light beam inflector assembly, beam splitting type target detector 12 is divided into two bundles with incident beam:

After folded light beam is obtained the Bidimensional small angle variation of beam splitting type target detector 12, through 18 reflections of two-dimentional light beam inflector assembly, after collimator objective 7 convergences, λ/4 wave plates 5 make the polarization direction of circularly polarized light rotate 45 ° again, become linearly polarized light S light with P polarisation of light direction quadrature, know that by polarization characteristic linearly polarized light S light is again through reflection fully behind the polarization spectroscope 4, received by ccd image sensor 6, become measuring-signal, utilize the polarization characteristic of laser to avoid measuring beam feedback LASER Light Source 2, and then avoid the further angle of measuring beam drift value;

Transmitted light beam becomes the angle drift component feedback beam intrinsic with the identical LASER Light Source of measuring beam characteristic, feed back to drift value monitoring device 8, through deflection mirror 11 reflections, focusing objective len 10 focuses on 4 quadrant detector 9 receptions of back by the place, focal plane that is positioned at focusing objective len 10, the angle drift value of separation and monitoring angle of departure drift component feedback beam.Computing machine 13 is controlled two-dimentional light beam inflector assembly 18 in real time according to the angle drift value of the angle drift component feedback beam of monitoring out, carry out the adjustment of the space angle of measuring beam, make measuring beam according to the opposite direction adjustment of angle drift value, the step of monitoring repeatedly and adjusting can suppress and eliminate the angle drift value that is coupling in the measuring beam in real time in the measuring beam route of transmission.By Fig. 1 and Fig. 2, and, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector 12 by measuring-signal in conjunction with geometrical optics and optical autocollimating principle:

$\mathrm{\&theta;}=\frac{{\mathrm{<figure-callout\; id="1"\; label="d"\; filenames="C20051011726300181.png,C20051011726300191.png"\; state="\{\{state\}\}">d</figure-callout>}}_1}{2f}$

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector 12, d ₁The variable quantity of the spot center position that forms on ccd image sensor 6 for measuring-signal, f is the equivalent focal length of collimator objective 7.

Separate when obtaining the Bidimensional small angle variable quantity and obtain the angle drift component feedback beam intrinsic with the identical LASER Light Source of measuring beam characteristic by beam splitting type target detector 12, and the measuring principle of being monitored by the angle drift value of drift value monitoring device 8 diagonal angle drift component feedback beam as shown in Figures 2 and 3, the photosurface of the 4 quadrant detector 9 of the angle drift value of monitoring angle drift component feedback beam is centered close to the focus place of focusing objective len 10 in the drift value monitoring device 8, when measuring beam produces angle drift value ε, angle drift component feedback beam focuses on the focal plane of focusing objective len 10 and produces displacement d, and the angle drift value of monitoring angle of departure drift component feedback beam thus is:

$\mathrm{\&epsiv;}=\arctan \left(\frac{\mathrm{\&Delta;d}}{f_0}\right)$

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is the displacement that the focusing center of angle drift component feedback beam departs from the photosurface center of 4 quadrant detector 9, f ₀Focal length for focusing objective len 10.

The structural representation that the angle drift value of 18 pairs of measuring beams of two-dimentional light beam inflector assembly carries out the real-time closed-loop FEEDBACK CONTROL as shown in Figure 4, in the close-loop feedback control system, in order to make two-dimentional light beam inflector assembly 18 reach very high driving resolution characteristic and to drive precision, employing is by drive power supply for piezoelectric ceramics 14, piezoelectric ceramics shifter 15, the two-dimentional light beam inflector assembly 18 that two dimension micro-displacement work table 16 and deflection mirror 17 are formed, the angle drift value of the computing machine 13 angle drift component feedback beam that 8 monitorings obtain according to the drift value monitoring device is controlled two-dimentional light beam inflector assembly 18 in real time, carry out the adjustment of the space angle of measuring beam, the adjustment amount size is:

φ＝ε

Wherein: φ is the adjustment amount of the space angle of 18 pairs of measuring beams of two-dimentional light beam inflector assembly, and ε is the angle drift value of the 4 quadrant detector 9 angle drift component feedback beam of monitoring out; 13 pairs of measuring beams of computing machine are according to the opposite direction adjustment of angle drift value, two-dimentional light beam inflector assembly 18 corner resolving powers are better than 0.002 "; angle range is greater than 2 ", the step of monitoring repeatedly and adjusting, the angle drift value that can will be coupling in the measuring beam route of transmission in the measuring beam in real time is suppressed at 0.01 " in the scope, has guaranteed high-precision Bidimensional small angle measurement when improving 2 D photoelectric autocollimator measuring distance.

Referring to Fig. 5, λ in the 2 D photoelectric autocollimation light pipe 1 in apparatus of the present invention/4 wave plates 5 are positioned between collimator objective 7 and the beam splitting type target detector 12.

Referring to Fig. 6, beam splitting type target detector 12 in apparatus of the present invention is made of two right- angle prisms 19 and 20 staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism 20, measuring beam is by the vertical working surface incident of the right-angle prism 20 of plating spectro-film.

Describe method of the present invention below in detail:

The present invention also provides the measuring method of the long-distance 2 D polarized electric autocollimation of drift amount target feedback, and this measuring method may further comprise the steps:

1. at first 2 D photoelectric autocollimation light pipe 1 is adjusted, laser beam became linearly polarized light P light after the polarized laser beam that makes polarization laser light source 2 send passed through polarization spectroscope 4 transmissions, then drift value monitoring device 8 is adjusted, guarantee that the photosurface of 4 quadrant detector 9 is centered close to the focus place of focusing objective len 10, drift value monitoring device 8 should be connected with 2 D photoelectric autocollimation light pipe 1 after adjustment finished, then 2 D photoelectric autocollimation light pipe 1 is calibrated, finish in the use of back polarization laser light source 2 and drift value monitoring device 7 of calibration no longer adjusted; The laser beam that the polarization laser light source 2 of 2 D photoelectric autocollimation light pipe 1 sends, illuminate the graticule 3 at the focus place that is positioned at collimator objective 7, become linearly polarized light P light through laser beam after polarization spectroscope 4 transmissions, P light rotates 45 ° and becomes circularly polarized light through λ/4 wave plates, the 5 back P polarisation of light direction that are placed between polarization spectroscope 4 and the collimator objective 7, after assembling, collimator objective 7 becomes the measuring beam of collimate in parallel, through inciding on the beam splitting type target detector 12 that is placed on the measured object after 18 reflections of two-dimentional light beam inflector assembly;

2. beam splitting type target detector 12 receives measuring beam and is separated into folded light beam and transmitted light beam;

3. after folded light beam is obtained the Bidimensional small angle variable quantity of beam splitting type target detector 12, through 18 reflections of two-dimentional light beam inflector assembly, after collimator objective 7 convergences, λ/4 wave plates 5 make the polarization direction of circularly polarized light rotate 45 ° again, become linearly polarized light S light with P polarisation of light direction quadrature, know that by polarization characteristic linearly polarized light S light is again through reflection fully behind the polarization spectroscope 4, received by ccd image sensor 6, become measuring-signal, the variable quantity of the spot center position that forms on ccd image sensor 5 is d ₁, utilize the polarization characteristic of laser to avoid measuring beam feedback LASER Light Source 2 simultaneously, and then avoid the further angle of measuring beam drift value;

4. transmitted light beam becomes the angle drift component feedback beam intrinsic with the identical LASER Light Source of measuring beam characteristic, feed back to drift value monitoring device 8, line focus object lens 10 focus on 4 quadrant detector 9 receptions of back by the place, focal plane that is positioned at focusing objective len 10, the angle drift value of monitoring angle of departure drift component feedback beam.When measuring beam produced angle drift value ε, angle drift component feedback beam focused on the focal plane of focusing objective len 10 and produces displacement d, and the angle drift value of monitoring angle of departure drift component feedback beam thus is:

$\mathrm{\&epsiv;}=\arctan \left(\frac{\mathrm{\&Delta;d}}{f_0}\right)$

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector 9, f ₀Focal length for focusing objective len 10.

5. the angle drift value of the computing machine 13 angle drift component feedback beam of monitoring out according to drift value monitoring device 8 is controlled two-dimentional light beam inflector assembly 18 in real time, in order to make two-dimentional light beam inflector assembly 18 reach very high driving resolution characteristic and to drive precision, employing is by drive power supply for piezoelectric ceramics 14, piezoelectric ceramics shifter 15, the two-dimentional light beam inflector assembly 18 that two dimension micro-displacement work table 16 and deflection mirror 17 are formed, computing machine 13 is controlled two-dimentional light beam inflector assembly 18 in real time according to the angle drift value of the angle drift component feedback beam that drift value monitoring device 8 is monitored out, carry out the adjustment of the space angle of measuring beam, the adjustment amount size is:

φ＝ε

Wherein: φ is the adjustment amount of the space angle of 18 pairs of measuring beams of two-dimentional light beam inflector assembly, and ε is the angle drift value that drift value monitoring device 8 is monitored the angle drift component feedback beam that obtains;

6. according to step 4 and step 5,13 pairs of measuring beams of computing machine are according to the opposite direction adjustment of angle drift value, suppress and eliminate the angle drift value of measuring beam in the measuring beam route of transmission in real time, by Fig. 1 and Fig. 2, and, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector 12 by measuring-signal in conjunction with the autocollimation principle of geometrical optics and optics:

$\mathrm{\&theta;}=\frac{{\mathrm{<figure-callout\; id="1"\; label="d"\; filenames="C20051011726300181.png,C20051011726300191.png"\; state="\{\{state\}\}">d</figure-callout>}}_1}{2f}$

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector 12, d ₁The variable quantity of the spot center position that forms on ccd image sensor 6 for measuring-signal, f is the equivalent focal length of collimator objective 7.

As seen, adopt polarization laser light source 2, polarization spectroscope 4 and λ/improved 2 D photoelectric autocollimation light pipe 1 of 4 wave plates, 5 combinations to send measuring beam with polarization characteristic, after obtaining the Bidimensional small angle variable quantity of beam splitting type target detector 12, polarization characteristic by laser is known, through reflection fully behind the polarization spectroscope 4, receive by ccd image sensor 6, utilize the polarization characteristic of laser to avoid measuring beam feedback LASER Light Source 2 and then avoid the further angle of measuring beam drift value; Simultaneously, after adopting novel beam splitting type target detector 12 improvement optical measuring systems and introducing the close-loop feedback control technology, separate when can guarantee to obtain the Bidimensional small angle variable quantity and obtain the angle drift component feedback beam intrinsic with the identical LASER Light Source of measuring beam characteristic by beam splitting type target detector 12, and monitor by the angle drift value of drift value monitoring device 8 diagonal angle drift component feedback beam, the angle drift value that computing machine 13 is monitored out according to the drift value monitoring device is controlled two-dimentional light beam inflector assembly 18 in real time, measuring beam is adjusted according to the opposite direction of angle drift value, inhibition in real time and elimination are coupling in the angle drift value in the measuring beam in the measuring beam route of transmission, the angle measurement error that angle drift value that can the dynamic compensation measuring beam causes, solved in the long distance applications occasion because the measurement stability that the angle drift value of measuring beam causes is poor, even the difficult problem of the visual field of the instrument that drifts about out, improved measurement stability in the measuring distance that increases the 2 D photoelectric autocollimator, high-precision Bidimensional small angle is measured thereby this measurement scheme has realized long distance.

Embodiment 1:

2 D polarized electric autocollimation as shown in Figure 1, polarization laser light source 2 sends the linearly polarized laser light beam in the 2 D photoelectric autocollimation light pipe 1, and λ/4 wave plates 5 are positioned between polarization spectroscope 4 and the collimator objective 7; Beam splitting type target detector 12 is made of two right-angle prisms 19 and 20 staggered relatively as shown in Figure 6, a vertical working surface plating spectro-film of one of them right-angle prism 20, and measuring beam is by the vertical working surface incident of the right-angle prism 20 of plating spectro-film; Drift value monitoring device 8 is connected by deflection mirror 11, focusing objective len 10 and 4 quadrant detector 9 and forms.At first 2 D photoelectric autocollimation light pipe 1 is adjusted, the polarization direction of the linearly polarized laser light beam that adjustment polarization laser light source 2 sends, laser beam became linearly polarized light P light after the linearly polarized laser light beam that makes polarization laser light source 2 send passed through polarization spectroscope 4 transmissions, drift value monitoring device 8 is adjusted, guarantee that the photosurface of 4 quadrant detector 9 is centered close to the focus place of focusing objective len 10, drift value monitoring device 8 should be connected with 2 D photoelectric autocollimation light pipe 1 after adjustment finished, then 2 D photoelectric autocollimation light pipe 1 is calibrated, finish in the use of back polarization laser light source 2 and drift value monitoring device 8 of calibration no longer adjusted;

When measuring, the linearly polarized laser light beam that the polarization laser light source 2 of 2 D photoelectric autocollimation light pipe 1 sends illuminates the graticule 3 at the focus place that is positioned at collimator objective 7, become linearly polarized light P light through laser beam after polarization spectroscope 4 transmissions, P light rotates 45 ° and becomes circularly polarized light through λ/4 wave plates, the 5 back P polarisation of light direction that are placed between polarization spectroscope 4 and the collimator objective 7, after assembling, collimator objective 7 becomes the measuring beam of collimate in parallel, through inciding the beam splitting type target detector 12 that is placed on the measured object after 18 reflections of two-dimentional light beam inflector assembly, beam splitting type target detector 12 is divided into two bundles with incident beam:

After folded light beam is obtained the Bidimensional small angle variation of beam splitting type target detector 12, through 18 reflections of two-dimentional light beam inflector assembly, after collimator objective 7 convergences, λ/4 wave plates 5 make the polarization direction of circularly polarized light rotate 45 ° again, become linearly polarized light S light with P polarisation of light direction quadrature, know that by polarization characteristic linearly polarized light S light is again through reflection fully behind the polarization spectroscope 4, received by ccd image sensor 6, become measuring-signal, utilize the polarization characteristic of laser to avoid measuring beam feedback LASER Light Source 2, and then avoid the further angle of measuring beam drift value;

Transmitted light beam becomes the angle drift component feedback beam intrinsic with the identical LASER Light Source of measuring beam characteristic, feed back to drift value monitoring device 8, line focus object lens 10 focus on 4 quadrant detector 9 receptions of back by the place, focal plane that is positioned at focusing objective len 10, the angle drift value of monitoring angle of departure drift component feedback beam.When measuring beam produced angle drift value ε, angle drift component feedback beam focused on the focal plane of focusing objective len 10 and produces displacement d, and the angle drift value of monitoring angle of departure drift component feedback beam thus is:

$\mathrm{\&epsiv;}=\arctan \left(\frac{\mathrm{\&Delta;d}}{f_0}\right)$

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector 9, f ₀Focal length for focusing objective len 10.The real-time FEEDBACK CONTROL two-dimentional light beam of the angle drift value inflector assembly 18 of the angle drift component feedback beam that computing machine 13 is monitored out according to drift value monitoring device 8 carries out the adjustment of the space angle of measuring beam, and the adjustment amount size is:

φ＝ε

Wherein: φ is the adjustment amount of the space angle of 18 pairs of measuring beams of two-dimentional light beam inflector assembly, and ε is the angle drift value that drift value monitoring device 8 is monitored the angle drift component feedback beam that obtains;

13 pairs of measuring beams of computing machine are according to the opposite direction adjustment of angle drift value, inhibition in real time and elimination are coupling in the angle drift value of the measuring beam in the measuring-signal, by Fig. 1 and Fig. 2, and, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector 12 by measuring-signal in conjunction with the autocollimation principle of geometrical optics and optics:

$\mathrm{\&theta;}=\frac{{\mathrm{<figure-callout\; id="1"\; label="d"\; filenames="C20051011726300181.png,C20051011726300191.png"\; state="\{\{state\}\}">d</figure-callout>}}_1}{2f}$

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector 12, d ₁The variable quantity of the spot center position that forms on ccd image sensor 6 for measuring-signal, f is the equivalent focal length of collimator objective 7.

In the present embodiment, the polarization laser light source 2 in the 2 D photoelectric autocollimation light pipe 1 adopts the LASER Light Source of sending the linearly polarized laser light beam, and the length of side of polarization spectroscope 4 is 12.7mm, and the diameter of λ/4 wave plates 5 is Φ 50mm; Beam splitting type target detector 12 is that two right-angle prisms 19 and 20 of 50mm constitute by the length of side staggered relatively, a vertical working surface plating spectro-film of one of them right-angle prism 20, measuring beam is by the vertical working surface incident of the right-angle prism 20 of plating spectro-film, and the splitting ratio of the spectro-film that is plated is: T/R=50/50@632.8nm; Drift value monitoring device 8 is connected by deflection mirror 11, focusing objective len 10 and 4 quadrant detector 9 and forms, and 4 quadrant detector 9 is positioned at the place, focal plane of focusing objective len 10.Deflection mirror 11 constitutes for plane mirror plating highly reflecting films, and the plane mirror diameter is Φ 50mm, highly reflecting films reflectivity factor: R 〉=99%@632.8nm; The focal length of focusing objective len 10 is 150mm, and bore is Φ 50mm; 4 quadrant detector 9 is selected the S1557 type 4 quadrant detector of the loose company in Japanese shore, single quadrant photosurface area 0.2mm for use ²Two-dimentional light beam inflector assembly 18 is made up of drive power supply for piezoelectric ceramics 14, piezoelectric ceramics shifter 15, two-dimentional micro-displacement work table 16 and deflection mirror 17, the important technological parameters of drive power supply for piezoelectric ceramics 14 is: input voltage range is ± 6V, output voltage range is ± 600V, the minimum resolving power of output voltage is 0.226V, nonlinearity erron is less than 0.8%, and stability error is less than 0.01%; Piezoelectric ceramics shifter 15 select for use Chinese Academy of Sciences's Chengdu photoelectricity the telescopic piezoelectric ceramic driver, flexible scope is :-6 μ m～+ 6 μ m; Two dimension micro-displacement work table 16 adopts the two-dimension flexible hinge work bench of no mechanical gear train; Deflection mirror 17 constitutes for plane mirror plating highly reflecting films, plane mirror 10 diameters are Φ 50mm, highly reflecting films reflectivity factor: R 〉=99%@632.8nm, the corner resolving power of two-dimentional light beam inflector assembly 18 is better than 0.002 "; angle range is greater than 10 ", the step of monitoring repeatedly and adjusting, can be in real time the angle drift value of measuring beam be suppressed at 0.01 " in the scope; experimental result shows; this 2 D polarized electric autocollimation reaches 0.01 in measurement resolution ", measuring distance is under the situation of 20m, and measurement stability is better than 0.04 "/h; uncertainty of measurement is better than 0.04 ", has realized longly measuring apart from high precision two-dimensional narrow angle.

Embodiment 2:

2 D polarized electric autocollimation as shown in Figure 1, here, as shown in Figure 5, polarization laser light source 2 sends the linearly polarized laser light beam in the 2 D photoelectric autocollimation light pipe 1, and λ/4 wave plates 5 are positioned between collimator objective 7 and the beam splitting type target detector 12.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 3:

2 D polarized electric autocollimation as shown in Figure 1, here, as shown in Figure 7, polarization laser light source 2 sends the circularly polarized laser light beam in the 2 D photoelectric autocollimation light pipe 1.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Embodiment 4:

2 D polarized electric autocollimation as shown in Figure 1, here, drift value monitoring device 8 does not add deflection mirror 11, is made up of focusing objective len 10 and 4 quadrant detector 9, and 4 quadrant detector 9 is positioned at the place, focal plane of focusing objective len 10.The miscellaneous part of present embodiment and principle of work are all identical with embodiment 1.

Claims (6)

1. the long-distance 2 D polarized electric autocollimation of drift amount target feedback, comprise 2 D photoelectric autocollimation light pipe and computing machine, it is characterized in that also comprising drift value monitoring device, beam splitting type target detector and two-dimentional light beam inflector assembly, said 2 D photoelectric autocollimation light pipe by the polarization laser light source of placing successively, graticule, polarization spectroscope, ^λ/ ₄Wave plate, ccd image sensor and collimator objective constitute, and wherein graticule is positioned at the focus place of collimator objective, and ccd image sensor is positioned at the conjugate position place of collimator objective focus with respect to the polarization spectroscope light splitting surface; Said two-dimentional light beam inflector assembly is made up of drive power supply for piezoelectric ceramics, piezoelectric ceramics shifter, two-dimentional micro-displacement work table and deflection mirror; Polarization laser light source in the 2 D photoelectric autocollimation light pipe, polarization spectroscope and ^λ/ ₄Wave plate combined utilizes the polarization characteristic of laser to avoid measuring beam feedback laser instrument and then avoid the further angle of measuring beam drift value; Beam splitting type target detector separates in the measuring-signal that obtains the Bidimensional small angle variable quantity and feeds back to the angle drift component feedback beam intrinsic with the identical laser instrument of measuring beam characteristic, the angle drift value of drift value monitoring device diagonal angle drift component feedback beam is monitored in real time, computing machine is controlled the two-dimentional light beam inflector assembly in real time according to the angle drift value that its monitoring obtains, measuring beam is adjusted according to the opposite direction of angle drift value, and inhibition and elimination are coupling in the angle drift value in the measuring beam in the measuring beam route of transmission.

2. device according to claim 1 is characterized in that polarization laser light source in the said 2 D photoelectric autocollimation light pipe adopts the LASER Light Source of laser beam or the circularly polarized laser beam send linear polarization.

3. device according to claim 1 is characterized in that in the said 2 D photoelectric autocollimation light pipe ^λ/ ₄Wave plate is positioned between collimator objective and the beam splitting type target detector.

4. device according to claim 1, it is characterized in that said beam splitting type target detector is connected by two right-angle prisms staggered relatively forms, a vertical working surface plating spectro-film of one of them right-angle prism, measuring beam is by the vertical working surface incident of the right-angle prism of plating spectro-film.

5. according to any described device among the claim 1-4, it is characterized in that said drift value monitoring device is connected by deflection mirror, focusing objective len and 4 quadrant detector to form, 4 quadrant detector is positioned at the place, focal plane of focusing objective len.

6. the measuring method of the long-distance 2 D polarized electric autocollimation of drift amount target feedback is characterized in that said measuring method may further comprise the steps:

(1). 2 D photoelectric autocollimation light pipe sends the measuring beam with polarization characteristic;

(2). beam splitting type target detector receives measuring beam and is separated into folded light beam and transmitted light beam;

(3). after folded light beam is obtained the Bidimensional small angle variable quantity of beam splitting type target detector,, receive, become measuring-signal by ccd image sensor through reflection fully behind the polarization spectroscope;

(4). transmitted light beam is isolated the angle drift component feedback beam intrinsic with the identical laser instrument of measuring beam characteristic, feeds back to the drift value monitoring device, and the line focus object lens are received by 4 quadrant detector, the angle drift value of monitoring angle of departure drift component feedback beam:

$\mathrm{\&epsiv;}=\arctan \left(\frac{\mathrm{\&Delta;d}}{f_0}\right)$

Wherein: ε is the angle drift value of angle drift component feedback beam, and Δ d is that the focusing center of angle drift component feedback beam departs from the displacement at the center of 4 quadrant detector, f ₀Focal length for focusing objective len;

(5). the angle drift value of the computing machine angle drift component feedback beam that monitoring obtains according to the drift value monitoring device is controlled the two-dimentional light beam inflector assembly in real time, makes measuring beam according to the opposite direction adjustment of angle drift value, and the adjustment amount size is:

φ＝ε

Wherein: φ is the adjustment amount of two-dimentional light beam inflector assembly to the space angle of measuring beam, and ε monitors the angle drift value of the angle drift component feedback beam that obtains for the drift value monitoring device;

(6). adjust repeatedly according to step 4 and step 5, suppress in real time and eliminate the angle drift value that is coupling in the measuring beam, can accurately measure the variable quantity of the Bidimensional small angle of beam splitting type target detector by measuring-signal:

$\mathrm{\&theta;}=\frac{d_1}{2f}$

Here: θ is the variable quantity of the Bidimensional small angle of beam splitting type target detector, d ₁The variable quantity of the spot center position that forms on ccd image sensor for measuring-signal, f is the equivalent focal length of collimator objective.

Images