CN206724892U - Spectral Confocal displacement transducer system - Google Patents
Spectral Confocal displacement transducer system Download PDFInfo
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- CN206724892U CN206724892U CN201720607833.3U CN201720607833U CN206724892U CN 206724892 U CN206724892 U CN 206724892U CN 201720607833 U CN201720607833 U CN 201720607833U CN 206724892 U CN206724892 U CN 206724892U
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- optical fiber
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- displacement transducer
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Abstract
The utility model discloses Spectral Confocal displacement transducer system, sensing system is by halogen light source, y-type optical fiber, Spectral Confocal lens group, confocal aperture and spectrometer composition, halogen light source connects y-type optical fiber, spectrometer connects y-type optical fiber one end by confocal aperture, the y-type optical fiber other end connects Spectral Confocal lens group, Spectral Confocal lens group includes lid, box body, two biconvex spherical mirrors, sleeve and a meniscus lens, path channels are provided with box body, stopper slot and loophole, the first neck and the second neck are disposed with path channels from left to right, two biconvex spherical mirrors are spacing in two the first necks respectively, meniscus lens is spacing in the second neck.The utility model uses cheap y-type optical fiber and Spectral Confocal lens group, with stronger practicality, reduce the volume of sensor probe, light source transmitting and reception same light path, suitable for being measured with high-aspect-ratio, the defective glass spaces surface of precipitous inner wall surface.
Description
Technical field
The utility model belongs to optical non-contact accurate displacement measurement sensor field, more particularly to a kind of Spectral Confocal
Displacement transducer system.
Background technology
Developed rapidly with accurate and super hot investment casting industry, to high-accuracy detection demand also more and more higher, therefore it is high
Accurate displacement transducer also arises at the historic moment.The displacement transducer precision of ultraprecise can reach micro-nano rank；Traditional contact
Although formula measurement also has higher precision, because it may scratch testee surface, and when testee is weak
When rigidity or light and soft material, contact type measurement will also result in elastic deformation, introduce the error of measurement, and contact type measurement speed
Degree is slower, it is difficult to automatic measurement is realized, based on many deficiencies existing for contact type measurement, therefore non-contact displacement transducer
Receive bigger concern.
Nowadays non-contact measurement mainly has electromagnetic type and the class of photo-electric two, and electromagnetic type displacement transducer is to testee
Material type requires, therefore does not have wide applicability, and the interference of extraneous electromagnetic signal also can be to the essence of measurement
Degree impacts；High-accuracy optical displacement sensor, currently used is the displacement transducer based on laser triangulation, and it is surveyed
Amount principle is that LASER Light Source is beaten and passes through light receiving microscopy cylinder in testee surface, the light of reflection, be imaged on photodetector CCD,
The displacement of testee can be extrapolated by algorithm demarcation.Laser triangulation technology is although simple in construction, easy to use,
But its measurement accuracy is had a great influence by speckle and extraneous spuious spot, and during installation and debugging, light meeting
It is blocked, so being not suitable for the measurement to objects such as aperture and grooves.
Current Spectral Confocal displacement transducer using spectroscope and the method for line array CCD collection interference fringe, leads to mostly
Cross two-beam source and produce interference, the width information of interference fringe can reflect the displacement measurement information of measured object, such a scheme
Complicated, cost is of a relatively high；Traditional laser triangulation light path is easily blocked, and causes to receive reflected light difficulty, right
Dimpled material of clear glass or surface etc. is even more to be difficult to measure.
Utility model content
The utility model purpose is the deficiency present in prior art and provides Spectral Confocal displacement transducer system
The technical scheme of system, it is simple in construction using cheap y-type optical fiber and Spectral Confocal lens group, it is easy to use, have stronger
Practicality, realize the miniaturization of sensor probe, light source transmitting and receive same light path, the light wave using spectrometer to collection
Analysis is acquired, measurement accuracy is high, suitable for entering with high-aspect-ratio, the defective glass spaces surface of precipitous inner wall surface
Row measurement.
In order to solve the above-mentioned technical problem, the utility model adopts the following technical scheme that：
Spectral Confocal displacement transducer system, it is characterised in that：Sensing system is by halogen light source, y-type optical fiber, spectrum
Confocal lens group, confocal aperture and spectrometer composition, halogen light source connection y-type optical fiber, spectrometer connect Y by confocal aperture
Type optical fiber one end, y-type optical fiber other end connection Spectral Confocal lens group, Spectral Confocal lens group include lid, box body, two it is double
Convex spherical mirror, sleeve and a meniscus lens, path channels, stopper slot and loophole are provided with box body, path channels are located at
Two the first necks being parallel to each other and one are disposed between stopper slot and loophole, in path channels from left to right
Two draw-in groove, two biconvex spherical mirrors are spacing in two the first necks respectively, and meniscus lens is spacing in the second neck, Y type light
Fibre is connected by SMA905 plugs with box body.
Further, sleeve is spacing in stopper slot, and matches with stopper slot, is provided with sleeve for optical fiber connection
Screwed hole.
Further, the convex side of two biconvex spherical mirrors is symmetrical arranged inwardly.
Further, the spacing between two biconvex spherical mirrors is 2.5~5.5mm.
Further, the spacing between the biconvex spherical mirror and meniscus lens of centre is 3.5~6.0mm.
Further, the spectral band scope of halogen light source is 360nm~2500nm.
Spectral Confocal displacement transducer is a kind of non-contact displacement transducer with superhigh precision and ultrastability.
Compared with laser triangulation, Spectral Confocal has higher resolution ratio, and because same light path is launched and received to light, is not in
Laser triangulation light path is easily blocked or measured target surface is excessively smooth and do not receive the situation of target reflecting light, to quilt
Object strong adaptability is surveyed, suitable for the detection of mobile phone glass, pit, the measurement of aperture and the scanning of surface topography recover.
Spectral confocal sensor is a kind of non-contact displacement transducer based on optical dispersion principle, it is therefore an objective to establish away from
From the corresponding relation between wavelength.Traditional laser triangulation technology comparative maturity, with also than wide, but by
The limitation of reflection optical range is received in CCD camera, it is impossible to be used in there can be pit defect glass with the transparent material and surface of printing opacity
Measurement.Spectral Confocal displacement transducer uses the optical fiber of same light path due to it, as long as the region of luminous energy irradiation just can be along original
Road returns, the field that can have solved traditional laser triangulation not, to some high reflections, high-aspect-ratio, precipitous inwall
The defective glass spaces in surface measure, and measurement accuracy can reach sub-micron rank.
The utility model is by adopting the above-described technical solution, have the advantages that：
1st, the system uses cheap y-type optical fiber and Spectral Confocal lens group, simple in construction, easy to use, has
Stronger practicality, the miniaturization of sensor probe, light source transmitting and reception same light path are realized, using spectrometer come to collection
Light wave be acquired analysis；
2nd, the system architecture is simple, is easy to industrialization, and measurement accuracy is high, can be to dimpled material and special with high reflection
The glass of property measures；
3rd, Spectral Confocal has higher resolution ratio, and is not in laser three because same light path is launched and received to light
Horn cupping light path is easily blocked or measured target surface is excessively smooth and do not receive the situation of target reflecting light, and measured object is fitted
Ying Xingqiang, recover suitable for pit, the measurement of aperture and the scanning of surface topography；
4th, the field that can have solved traditional laser triangulation not, to some high reflections, high-aspect-ratio, it is precipitous in
The defective glass spaces of wall surface measure, and measurement accuracy can reach sub-micron rank.
The utility model is simple in construction, practical, not only realizes the miniaturization of sensor probe, is advantageous to improve and surveys
Accuracy of measurement, and suitable for being measured with high-aspect-ratio, the defective glass spaces of precipitous inner wall surface.
Brief description of the drawings
The utility model is described in further detail below in conjunction with the accompanying drawings：
Fig. 1 is the structural representation of the utility model Spectral Confocal displacement transducer system；
Fig. 2 is schematic diagram of the present utility model；
Fig. 3 is the structural representation of Spectral Confocal lens group in the utility model.
In figure：1- halogen light sources；2-Y type optical fiber；3- Spectral Confocal lens groups；4-SMA905 plugs；5- spectrometers；6-
Confocal aperture；7- box bodys；8- path channels；9- biconvex spherical mirrors；10- loopholes；11- meniscus lens；12- sleeves；13- is spacing
Groove.
Embodiment
As shown in Figure 1 to Figure 3, it is the utility model Spectral Confocal displacement transducer system, sensing system is by Halogen lamp LED
Light source 1, y-type optical fiber 2, Spectral Confocal lens group 3, confocal aperture 6 and spectrometer 5 form, and halogen light source 1 connects y-type optical fiber
2, the spectral band scope of halogen light source 1 is 360nm~2500nm, and spectrometer 5 connects y-type optical fiber 2 one by confocal aperture 6
End, the other end of y-type optical fiber 2 connection Spectral Confocal lens group 3, Spectral Confocal lens group 3 includes 7, two lid, box body biconvex balls
Face mirror 9, sleeve 12 and a meniscus lens 11, path channels 8, stopper slot 13 and loophole 10 are provided with box body 7, light path is led to
Road 8 be disposed with from left to right between stopper slot 13 and loophole 10, in path channels 8 two be parallel to each other first
Neck and second neck, two biconvex spherical mirrors 9 are spacing in two the first necks respectively, two biconvex spherical mirrors 9
Convex side is symmetrical arranged inwardly, and the spacing between two biconvex spherical mirrors 9 is 2.5~5.5mm, and meniscus lens 11 is spacing second
In neck, the spacing between the biconvex spherical mirror and meniscus lens of centre is 3.5~6.0mm, and y-type optical fiber 2 passes through
SMA905 plugs 4 are connected with box body 7, and sleeve 12 is spacing in stopper slot 13, and match with stopper slot 13, are set on sleeve 12
There is the screwed hole for optical fiber connection.
Spectral Confocal displacement transducer is a kind of non-contact displacement transducer with superhigh precision and ultrastability.
Compared with laser triangulation, Spectral Confocal has higher resolution ratio, and because same light path is launched and received to light, is not in
Laser triangulation light path is easily blocked or measured target surface is excessively smooth and do not receive the situation of target reflecting light, to quilt
Object strong adaptability is surveyed, suitable for the detection of mobile phone glass, pit, the measurement of aperture and the scanning of surface topography recover.
Spectral confocal sensor is a kind of non-contact displacement transducer based on optical dispersion principle, it is therefore an objective to establish away from
From the corresponding relation between wavelength.Traditional laser triangulation technology comparative maturity, with also than wide, but by
The limitation of reflection optical range is received in CCD camera, it is impossible to be used in there can be pit defect glass with the transparent material and surface of printing opacity
Measurement.Spectral Confocal displacement transducer uses the optical fiber of same light path due to it, as long as the region of luminous energy irradiation just can be along original
Road returns, the field that can have solved traditional laser triangulation not, to some high reflections, high-aspect-ratio, precipitous inwall
The defective glass spaces in surface measure, and measurement accuracy can reach sub-micron rank.
Operation principle of the present utility model is as follows：
1) light that halogen light source is sent, after y-type optical fiber, one end is irradiated to tested after Spectral Confocal lens group
Body surface, the light that different wave length is bought after Spectral Confocal lens group produce the dispersion of spectrum.
2) after light source is by Spectral Confocal lens group, the testee of a certain position is irradiated to, it is anti-through testee surface
The monochromatic light for a certain wavelength penetrated, the other end of y-type optical fiber is reversed back to, monochromatic light reaches confocal aperture, due to pin-hole filter-ing
Effect, the only reflection of testee surface the wavelength monochromatic light, by entering spectrometer after confocal aperture, collection spectrum is believed
Breath；And by adjusting the position of testee, the spectral information of light is reflected to collect using spectrometer.
3) normalized of light intensity is carried out to the spectral information collected, and denoising is carried out to original spectroscopic data and put down
After the pretreatment such as sliding, fit one and meet smooth curve, peak spectrum positioning is then carried out using the algorithm of Gauss curve fitting, it is high
The peak of this function is the zero point of its first derivative, it is believed that the first derivative zero point that have found Gaussian function is just found
The peak spectral position of Gaussian function.
4) motion control stage of ultraprecise is utilized, to demarcate spectrum spectrum peak corresponding to diverse location, finds out one-to-one corresponding
Relation；After the completion of demarcation, by the size for reading software superiors's spectrum, it is possible to measure exact position of the measured object from light source.
Specific embodiment of the utility model is these are only, but the technical characteristics of the utility model is not limited thereto.Appoint
How based on the utility model, to realize essentially identical technique effect, made ground simple change, equivalent substitution or repair
Decorations etc., are all covered by among the scope of protection of the utility model.
Claims (6)
1. Spectral Confocal displacement transducer system, it is characterised in that：The sensing system is by halogen light source, y-type optical fiber, light
Compose confocal lens group, confocal aperture and spectrometer composition, the halogen light source and connect the y-type optical fiber, the spectrometer leads to
Cross the confocal aperture and connect described y-type optical fiber one end, the y-type optical fiber other end connects the Spectral Confocal lens group, institute
Stating Spectral Confocal lens group includes lid, box body, two biconvex spherical mirrors, sleeve and a meniscus lens, is set in the box body
Path channels, stopper slot and loophole are equipped with, the path channels are between the stopper slot and the loophole, the light
Two the first necks being parallel to each other and second neck, two biconvex balls are disposed with paths from left to right
Face mirror is spacing in two first necks respectively, and the meniscus lens is spacing in second neck, the y-type optical fiber
It is connected by SMA905 plugs with the box body.
2. Spectral Confocal displacement transducer system according to claim 1, it is characterised in that：The sleeve is spacing described
In stopper slot, and match with the stopper slot, the screwed hole for optical fiber connection is provided with the sleeve.
3. Spectral Confocal displacement transducer system according to claim 1, it is characterised in that：Two biconvex spherical mirrors
Convex side be symmetrical arranged inwardly.
4. Spectral Confocal displacement transducer system according to claim 1, it is characterised in that：Two biconvex spherical mirrors
Between spacing be 2.5~5.5mm.
5. Spectral Confocal displacement transducer system according to claim 1, it is characterised in that：The biconvex positioned at centre
Spacing between spherical mirror and the meniscus lens is 3.5~6.0mm.
6. Spectral Confocal displacement transducer system according to claim 1, it is characterised in that：The light of the halogen light source
Spectrum wavelength band is 360nm~2500nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720607833.3U CN206724892U (en) | 2017-05-27 | 2017-05-27 | Spectral Confocal displacement transducer system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720607833.3U CN206724892U (en) | 2017-05-27 | 2017-05-27 | Spectral Confocal displacement transducer system |
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| CN206724892U true CN206724892U (en) | 2017-12-08 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109163662A (en) * | 2018-08-31 | 2019-01-08 | 天津大学 | Spectral Confocal displacement measurement method and device based on length scanning |
| CN109357623A (en) * | 2018-11-16 | 2019-02-19 | 中国科学院光电技术研究所 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
| CN109781015A (en) * | 2019-01-03 | 2019-05-21 | 西安交通大学 | A kind of method of Spectral Confocal line scanning rapid survey body surface step |
| CN113175884A (en) * | 2021-04-26 | 2021-07-27 | 合肥多彩谱色科技有限公司 | Calibration device and calibration method of spectrum confocal measurement system |
| CN113175883A (en) * | 2021-04-26 | 2021-07-27 | 合肥多彩谱色科技有限公司 | Light source normalization processing method of spectrum confocal measurement system |
-
2017
- 2017-05-27 CN CN201720607833.3U patent/CN206724892U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109163662A (en) * | 2018-08-31 | 2019-01-08 | 天津大学 | Spectral Confocal displacement measurement method and device based on length scanning |
| CN109357623A (en) * | 2018-11-16 | 2019-02-19 | 中国科学院光电技术研究所 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
| CN109781015A (en) * | 2019-01-03 | 2019-05-21 | 西安交通大学 | A kind of method of Spectral Confocal line scanning rapid survey body surface step |
| CN109781015B (en) * | 2019-01-03 | 2020-04-28 | 西安交通大学 | Method for quickly measuring surface steps of object by spectral confocal line scanning |
| CN113175884A (en) * | 2021-04-26 | 2021-07-27 | 合肥多彩谱色科技有限公司 | Calibration device and calibration method of spectrum confocal measurement system |
| CN113175883A (en) * | 2021-04-26 | 2021-07-27 | 合肥多彩谱色科技有限公司 | Light source normalization processing method of spectrum confocal measurement system |
| CN113175884B (en) * | 2021-04-26 | 2022-04-26 | 合肥多彩谱色科技有限公司 | Calibration device and calibration method of spectrum confocal measurement system |
| CN113175883B (en) * | 2021-04-26 | 2022-04-26 | 合肥多彩谱色科技有限公司 | Light source normalization processing method of spectrum confocal measurement system |
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Legal Events
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Wang Mengzhe Inventor after: Liang Zhengnan Inventor after: Zhao Bin Inventor after: Zhang Zhonghu Inventor after: Zheng Qingqiu Inventor after: Hu Yongtao Inventor after: Wang Jian Inventor before: Liang Zhengnan Inventor before: Zhao Bin Inventor before: Zhang Zhonghu Inventor before: Zheng Qingqiu Inventor before: Hu Yongtao Inventor before: Wang Jian |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220121 Address after: 518103 B301, No. 44-1, Xintang Road, Xintian community, Fuhai street, Bao'an District, Shenzhen, Guangdong Patentee after: Guangdong jiuzong Intelligent Technology Co.,Ltd. Address before: 315399 Building 5, foreign student entrepreneurship Park, No. 438, Huchong Road, Cixi City, Zhejiang Province Patentee before: NINGBO JIUZONG INTELLIGENT TECHNOLOGY Co.,Ltd. |