CN108489388A - A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology - Google Patents
A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology Download PDFInfo
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- CN108489388A CN108489388A CN201810288293.6A CN201810288293A CN108489388A CN 108489388 A CN108489388 A CN 108489388A CN 201810288293 A CN201810288293 A CN 201810288293A CN 108489388 A CN108489388 A CN 108489388A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention discloses a kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology, include by white light source 1,90 degree of confocal displacement measurement systems of light spectrum of rotary type that fiber coupler 2,3,90 degree of optical fiber slip ring goes out optical dispersion object lens 4, spectrometer 5 forms, the three-dimensional machinery scanning system be made of straight-line displacement platform controller 6, straight-line displacement platform 7, rotation stage controller 8, rotating platform 9 and computer 10.It is obtained by systematic survey head apart from internal surface of hole single-point radial displacement information by the confocal displacement measurement system of 90 degree of light spectrums of rotary type, realize that displacement measurement system obtains internal surface of hole three-dimensional point cloud information by three-dimensional machinery scanning system simultaneously, through computer Point Cloud Processing, realization aperture high-precision, non-contact, automatized three-dimensional is imaged and the information measurements such as aperture, hole finish, hole circularity.
Description
Technical field
The present invention relates to keyhole detection fields, more particularly to table in a kind of aperture based on Spectral Confocal displacement measuring technology
Face three-dimensional imaging detecting system.
Background technology
The development in the fields such as mechanical industry, aerospace, national defense industry proposes Precision Machining requirement to small hole size part
While, also to its high-precision detection, more stringent requirements are proposed.Development suitable for small-bore, high depth than high-precision,
The Mini Hole Inspection and equipment of automatized three-dimensional imaging seem very urgent.
Currently, aperture measuring method has two class of contact method and eyes with non-contact method, wherein contact method has feeler gauge measurement, micrometer
Measurement, three-dimensional coordinates measurement etc.；Eyes with non-contact method has light microscope imaging, pneumatic gauging, measurement by capacitance etc..Feeler gauge method and thousand points
Ruler method method is simple, and precision is low, and measurement process manually adjusts, it is difficult to realize high-precision automatic measurement；Three coordinates are surveyed
Amount method be Light Electrical combine mensuration, precision reach submicron order, can automatized three-dimensional imaging, but gauge head be easy mechanically deform,
System price is expensive, is unsuitable for in-site measurement；Light microscope imaging method, precision micron order, but to longhole survey difficulty；Gas
Dynamic measurement method, precision micron order, can automatic three-dimensional imaging, but to air supply requirement height, the response time is long；Measurement by capacitance method
It is easily disturbed, precision sub-micron.Above common aperture measuring method respectively has advantage and disadvantage, but to be suitable for aperture, deep hole, blind hole
In high precision, non-contact, automation detection is more difficult, and therefore, traditional detection means has been unable to the new problem of comprehensively solve, must
Beard and hair opens up new detection technique to meet testing requirements.
Invention content
Problem to be solved by this invention is：A kind of small internal surface of hole three based on Spectral Confocal displacement measuring technology is provided
Image-forming detecting system is tieed up, it can overcome the deficiencies of existing technologies, and skill is scanned by using Spectral Confocal ranging technology, three-dimensional machinery
Art, Point Cloud Processing technology, realize aperture high-precision, non-contact, automatic detection, be applied to aperture, deep hole, blind hole it is interior
Surface three dimension is imaged and the information high-acruracy surveys such as aperture, hole finish, hole circularity.
Technical problem proposed by the invention solves in this way：It proposes a kind of based on Spectral Confocal displacement measuring technology
Small internal surface of hole three-dimensional imaging detecting system, including optical dispersion is gone out by white light source 1, fiber coupler 2,3,90 degree of optical fiber slip ring
90 degree of confocal displacement measurement systems of light spectrum of rotary type that object lens 4, spectrometer 5 form, by straight-line displacement platform controller
6, the three-dimensional machinery scanning system and computer 10 that straight-line displacement platform 7, rotation stage controller 8, rotating platform 9 form,
It is characterized in that, the confocal displacement measurement system measurement of 90 degree of light spectrums of rotary type obtains being formed by vertically going out optical dispersion object lens 4
Radial displacement of the Spectral Confocal displacement measurement head apart from internal surface of hole, computer 10 controls three-dimensional machinery scanning system band and carries light
It composes confocal displacement measurement head and carries out 3-D scanning, and then obtain internal surface of hole three-dimensional point cloud information, through 10 three-dimensional point cloud of computer
Data processing realizes that aperture high-precision, non-contact, automatized three-dimensional are imaged and the information such as aperture, hole finish, hole circularity are high-precision
Degree measures.
Small internal surface of hole three-dimensional imaging detecting system provided by the present invention based on Spectral Confocal displacement measuring technology,
Middle Spectral Confocal displacement measurement system is for realizing the Spectral Confocal displacement measurement head distance formed by vertically going out optical dispersion object lens 4
The displacement high-acruracy survey of internal surface of hole, system go out optical dispersion object by white light source 1, fiber coupler 2,3,90 degree of optical fiber slip ring
Mirror 4, spectrometer 5 form, and wherein optical fiber slip ring 3 is for solving the problems, such as Optical Fiber Winding.Range measurement principle is as follows：White light source 1 is sent out
Polychromatic light coupled into optical fibres coupler 2, after optical fiber slip ring 3 fiber port can approximation regard as point light source outgoing, point light source
Spectral dispersion is generated after 90 degree go out optical dispersion object lens 4, be imaged on optical axis and forms a series of continuously distributed corresponding differences
The focal beam spot of optical wavelength, when placing a testee within the scope of serial focal beam spot, then dispersed light can be by testee surface
Reflection, reflected light go out optical dispersion object lens 4 again by 90 degree and image in fiber end face, and only object being measured surface location is full
The luminous flux that the monochromatic light of the confocal condition of foot enters fiber end face is maximum, the entered optical fiber end of other spectral components of defocus reflection
The luminous flux in face is then smaller, and reflected light reaches spectrometer 5 after optical fiber slip ring 3, fiber coupler 2, and spectrometer 5 believes reflected light
Number carry out spectrum unscrambling and determine its luminous flux maximum wavelength, with this it is counter push away the distance between testee surface and dispersion camera lens, this
Sample just establishes the relationship between wavelength information and location information, that is, Spectral Confocal measuring system is constituted, to realize displacement measurement.
Small internal surface of hole three-dimensional imaging detecting system provided by the present invention based on Spectral Confocal displacement measuring technology,
Middle three-dimensional machinery scanning system for realizing Spectral Confocal displacement measurement system to small internal surface of hole carry out 3-D scanning, system by
Straight-line displacement platform controller 6, straight-line displacement platform 7, rotation stage controller 8, rotating platform 9 form.System cathetus position
It moves platform controller 6 and controls the straight-line displacement that straight-line displacement platform 7 realizes displacement measurement head, the control rotation of rotation stage controller 8
Turn the circumferential rotation that platform 9 realizes displacement measurement head, rotating platform is installed on displacement platform, finally realizes 3-D scanning.
Small internal surface of hole three-dimensional imaging detecting system provided by the present invention based on Spectral Confocal displacement measuring technology,
Middle three-dimensional point cloud information processing system is for realizing the information such as small internal surface of hole three-dimensionalreconstruction and aperture, hole finish, hole circularity
High-acruracy survey, system are made of several processing procedures such as cloud filtering, point cloud registering, point cloud interpolation, surface reconstructions.
The beneficial effects of the invention are as follows：It realizes and is applicable in by being scanned in three-dimensional apertures with Spectral Confocal displacement measurement system
It is surveyed in the information high-precision such as aperture, deep hole, the high accurate hole inner surface three-dimensional imaging of blind hole and aperture, hole finish, hole circularity
Amount.System has accuracy of detection is high, can survey various surfaces, temperature stability is good, anti-interference, non-contact, full-automatic to measure etc.
Feature.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention.
Wherein, 1, white light source, 2, fiber coupler, 3, optical fiber slip ring, 4,90 degree go out optical dispersion object lens, and 5, spectrometer,
6, straight-line displacement platform controller, 7, straight-line displacement platform, 8, rotation stage controller, 9, rotating platform, 10, computer.
Fig. 2 is the confocal displacement measurement system structural schematic diagram of 90 degree of light spectrums of rotary type of the present invention.
Wherein, 1, white light source, 2, fiber coupler, 3, optical fiber slip ring, 4, dispersion object lens, 5, reflective mirror, 6, spectrometer,
7, computer.
Specific implementation mode
Embodiments of the present invention are described in further detail below in conjunction with the accompanying drawings：
A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology of the present invention is
Basic principle of uniting is as follows：Based on Spectral Confocal ranging technology, three-dimensional machinery scanning technique and Point Cloud Processing technology, with light
Confocal displacement measurement system is composed to carry out three-dimensional internal surface of hole scanning survey and carry out internal surface of hole three-dimensional with points cloud processing algorithm
Aperture high-precision, non-contact, automation image checking are realized in reconstruct.
The core of small internal surface of hole three-dimensional imaging detecting system of the present invention is Spectral Confocal displacement measurement system, is led to
It crosses Spectral Confocal system and establishes relationship between light wave long message and displacement information, realize Spectral Confocal measurement head (dispersion in hole
Object lens) it is measured with the distance between hole inner wall, Spectral Confocal displacement measurement system of the present invention is 90 degree of light extractions of rotary type
Spectral Confocal displacement measurement system, detailed schematic are as follows：The polychromatic light coupled into optical fibres coupler that white light source is sent out, through optical fiber
After slip ring fiber port be emitted, fiber port outgoing light can approximation regard as point light source transmitting, sent out when the point light source
With wide spectrum λ1~λ2Light by vertically go out optical dispersion object lens when, spectral dispersion will be generated, forms a series of companies on optical axis
The point light source monochrome picture point of continuous distribution, it is assumed that wavelength XiLight formed monochromatic picture point and object lens between axial distance be d
(λi), then d (λ corresponding to the light of different wave lengthi) different, therefore, there is λ in view of system1~λ2The light of wide spectrum, then system
Measurement range be d (λ1)~d (λ2).Ideally, there are linear relationships between wavelength X and displacement d (λ)：
D (λ)=m+k λ
When testee is within the scope of systematic survey, then dispersed light is led to again by testee surface reflection, reflected light
It crosses dispersion object lens and images in fiber end face, the monochromatic light that corresponding testee surface location meets confocal condition enters optical fiber end
The luminous flux in face is maximum, and the luminous flux of the entered fiber end face of other spectral components of defocus reflection is then smaller, thus establishes
Relationship between wavelength information and location information, reflected light reach spectrometer, spectrometer pair after optical fiber slip ring, fiber coupler
Reflected light signal carries out spectrum unscrambling and simultaneously determines its luminous flux maximum wavelength, counter is pushed away between testee surface and dispersion camera lens with this
Distance, to realize displacement measurement.Spectral Confocal range accuracy can reach micro-, nanoscale, require more measured surface situation
It is low, allow measured surface to have larger angle of inclination, temperature stability good.
To realize that internal surface of hole three-D displacement acquisition of information, Spectral Confocal system must carry out 3-D scanning in hole, this hair
The bright small internal surface of hole three-dimensional imaging detecting system is in such a way that linear movement platform and rotating platform are combined, by straight
Line mobile platform realizes the axial displacement of Spectral Confocal measurement head, and the rotation of Spectral Confocal measurement head circumferential direction is realized by rotating platform
Turn, rotating platform is placed on linear movement platform, finally realizes 3-D scanning.In order to make Spectral Confocal measurement head in rotary course
In so that Optical Fiber Winding is damaged, Spectral Confocal measuring system solves the problems, such as Optical Fiber Winding using optical fiber slip ring.
Spectral Confocal range-measurement system, which is carried, by three-dimensional machinery scanning system band obtains Spectral Confocal measurement head table in hole
Face three-D displacement point cloud information establishes internal surface of hole three-dimensional point in conjunction with the internal surface of hole location point cloud information that scanning system obtains
Cloud information, point cloud data after processing, could realize that three-dimension curved surface is rebuild in hole.Small internal surface of hole three-dimensional imaging of the present invention
Detecting system completes Point Cloud Processing, specifically by cloud filtering, point cloud registering, point cloud interpolation, the several steps of surface reconstruction
Operation is as follows：1) due to the presence of noise or body surface reflectivity, using medium filtering and neighborhood averaging
Smoothing filtering operation is carried out to data, removes the spotted noise in point cloud data.2) exist centainly with hole axle due to measuring axis
Angle completes Registration of Measuring Data by realizing that the tilt translation of point cloud data is corrected with iteration closest approach algorithm.If 3) obtained
Point cloud is sparse cloud, so that sparse cloud interpolation is point off density cloud by triangulation interpolation method, it is flat to reach generation
The data volume of sliding curved surface.4) effect of three-dimensional scenic inverting and the representation method of spatial scene have much relations, the expression of scene
Mode have based on point cloud, triangle gridding, feature or texture mapping etc. several ways, the manifestation mode based on cloud due to
The limitation of sampling resolution, partial enlargement will appear cavity later, be unfavorable for the details on represented object surface, and the present invention uses three
Angle grid carries out scene expression, triangle gridding structure is simple, quickly, body surface can be approached well.
A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology of the present invention is led to
It crosses Spectral Confocal range-measurement system and obtains the distance between Spectral Confocal measurement head and hole inner wall information, three-dimensional machinery scanning system reality
Existing Spectral Confocal range-measurement system obtains internal surface of hole three-dimensional point cloud information, Point Cloud Processing system realizes hole negative camber weight
It builds.A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology of the present invention can be suitably used for
Aperture, deep hole, blind hole high-precision, it is non-contact, automation detection, can make keyhole detection from single Pore Diameter Detection the table into hole
Face high-precision automatic three-dimensional imaging development can realize small internal surface of hole high-precision three-dimensional imaging and aperture, hole finish, Kong Yuan
The information high-acruracy surveys such as degree.
Claims (4)
1. a kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology, including by white light source
(1), fiber coupler (2), optical fiber slip ring (3), 90 degree of rotary type for vertically going out optical dispersion object lens (4), spectrometer (5) composition
The confocal displacement measurement system of light spectrum is controlled by straight-line displacement platform controller (6), straight-line displacement platform (7), rotating platform
The three-dimensional machinery scanning system and computer (10) of device (8), rotating platform (9) composition, which is characterized in that 90 degree of rotary type goes out
Light Spectral Confocal displacement measurement system measurement obtain by vertically go out Spectral Confocal displacement measurement head that optical dispersion object lens (4) form away from
Radial displacement from internal surface of hole, computer (10) control three-dimensional machinery scanning system band and carry the progress of Spectral Confocal displacement measurement head
3-D scanning, and then internal surface of hole three-dimensional point cloud information is obtained, it is handled through computer (10) three dimensional point cloud, realizes that aperture is high
Precision, non-contact, automatized three-dimensional are imaged and the information high-acruracy surveys such as aperture, hole finish, hole circularity.
2. the small internal surface of hole three-dimensional imaging detection system according to claim 1 based on Spectral Confocal displacement measuring technology
System, it is characterised in that：By vertically going out the displacement of Spectral Confocal displacement measurement head that optical dispersion object lens (4) form apart from internal surface of hole
Measure use Spectral Confocal displacement measuring technology, Spectral Confocal displacement measurement system by white light source (1), fiber coupler (2),
Optical fiber slip ring (3), 90 degree go out optical dispersion object lens (4), spectrometer (5) composition.Range measurement principle is as follows：White light source (1) is sent out
Polychromatic light coupled into optical fibres coupler (2), after optical fiber slip ring (3) fiber port can approximation regard as point light source outgoing, put light
Source generates spectral dispersion after 90 degree go out optical dispersion object lens (4), is imaged on optical axis and forms a series of continuously distributed correspondences
The focal beam spot of Different lightwave length, when placing a testee within the scope of serial focal beam spot, then dispersed light can be by testee
Surface reflection, reflected light go out optical dispersion object lens (4) again by 90 degree and image in fiber end face, only object being measured surface
Position meet confocal condition monochromatic light enter fiber end face luminous flux it is maximum, other spectral components of defocus reflection are entered
The luminous flux of fiber end face is then smaller, and reflected light reaches spectrometer (5), spectrum after optical fiber slip ring (3), fiber coupler (2)
Instrument (5) carries out spectrum unscrambling to reflected light signal and determines its luminous flux maximum wavelength, and anti-testee surface and dispersion mirror are pushed away with this
The distance between head, to realize that displacement measurement, wherein optical fiber slip ring (3) solve the problems, such as Optical Fiber Winding.
3. the small internal surface of hole three-dimensional imaging detection system according to claim 1 based on Spectral Confocal displacement measuring technology
System, it is characterised in that：Spectral Confocal displacement measurement system carries out the work of internal surface of hole 3-D scanning by three-dimensional machinery scanning system
It realizes, scanning system is by straight-line displacement platform controller (6), straight-line displacement platform (7), rotation stage controller (8), rotary flat
Platform (9) forms.System Working Principle is as follows：Straight-line displacement platform controller (6) controls straight-line displacement platform (7) and realizes that displacement is surveyed
Measure the straight-line displacement of head；Rotation stage controller (8) controls the circumferential rotation that rotating platform (9) realizes displacement measurement head；Rotation
Stage+module realizes system 3-D scanning on displacement platform.
4. the small internal surface of hole three-dimensional imaging detection system according to claim 1 based on Spectral Confocal displacement measuring technology
System, it is characterised in that：Small internal surface of hole three-dimension curved surface reconstruction is realized that system is filtered by cloud by three-dimensional point cloud information processing system
Several processing procedures such as wave, point cloud registering, point cloud interpolation, surface reconstruction are constituted.
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| CN201810288293.6A CN108489388A (en) | 2018-04-03 | 2018-04-03 | A kind of small internal surface of hole three-dimensional imaging detecting system based on Spectral Confocal displacement measuring technology |
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| CN108592795A (en) * | 2018-06-06 | 2018-09-28 | 中国计量科学研究院 | A kind of thread parameter measurement device based on spectral confocal sensor |
| CN109894924A (en) * | 2019-03-20 | 2019-06-18 | 长春理工大学 | A kind of diamond cutter cutting edge abrasion detection module and detection method |
| CN110440723A (en) * | 2019-08-05 | 2019-11-12 | 中国工程物理研究院材料研究所 | A kind of abnormally-structured part negative camber measuring device for surface roughness and measurement method |
| CN110887450A (en) * | 2019-12-23 | 2020-03-17 | 海伯森技术（深圳）有限公司 | Object surface three-dimensional information measuring system and method based on spectrum confocal |
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