CN108303045A - A kind of surface roughness measuring method and device - Google Patents
A kind of surface roughness measuring method and device Download PDFInfo
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- CN108303045A CN108303045A CN201810099920.1A CN201810099920A CN108303045A CN 108303045 A CN108303045 A CN 108303045A CN 201810099920 A CN201810099920 A CN 201810099920A CN 108303045 A CN108303045 A CN 108303045A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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Abstract
The present invention relates to a kind of measurement method of surface roughness and realization devices, are furnished with long object distance microlens by the micro- camera of high-resolution, the surface image of measured object when shooting single point light source irradiation,n>=3 point light sources are lighted rear camera and can be shot successivelynWidth surface imageI 1~I n, the direction of light source is demarcated using bloom black ball, obtains the unit direction vector of all light sourcesL 1~L n And world coordinates (x,y,z) and image coordinate (u,v) transformation proportionality coefficientf, pass through the unit direction vector of light sourceL 1~L n With testee surface two dimensional imageI 1~I nThe image coordinate value of gauging surface depthW(u,v), by converting proportionality coefficientfObtain the world coordinates value of testee case depthZ(x,y), choose suitable sample lengthlr, rightZ(x,y) sampling obtain contour curvez(x), using Gaussian filter to contour curvez(x) be filtered, obtain Gauss center linew(x), and isolate roughness profiler(x), calculate roughness profiler(x) arithmetic average deviationIt is worth the measured value as roughness.
Description
Technical field
The present invention relates to a kind of measurement method of surface roughness and realization devices, belong to field of optical measurements.By matching
There are the micro- camera of high-resolution of long object distance microlens and the point light source of n >=3 incidence angles degree, acquisition measured object is not
With multiple images of incident angle light source irradiation, surface three dimensional reconstruction is carried out to measured object according to photometric stereo visual theory, and
The arithmetic average deviation of roughness profile is calculated by the regulation of national standardValue, the measured value as surface roughness.
Background technology
Surface roughness is one of main precision index of machinery part surface performance rating.With modern science and technology
Development and progress, the quality of industrial products is higher and higher, and roughness concentration is changed to examine via traditional sampling observation, to roughness
Measurement method proposes requirements at the higher level.That there are efficiency is low for traditional contact measurement method, is easy to damage the shortcomings of surface,
It cannot be satisfied actual demand；And interference microscope mensuration, the contactless side such as laser confocal scanning microscopic measuring method
There is the problems such as equipment cost is high, measuring environment requires stringent, complicated for operation and inefficiency in method.Therefore, it explores a kind of
Equipment is simple, measurement efficiency is high, roughness measurement method with degree of precision becomes the active demand of enterprise.
Mechanical vision inspection technology have detection efficiency is high, obtain contain much information, high certainty of measurement, it is flexible, non-contact,
The advantages that cost-effective, is introduced into three-dimensional surface shape measurement by many scholars, obtains good effect.Photometric stereo vision
It is a kind of 3D vision detection technique, can subtly obtains piece surface three-dimensional appearance, and then can be to each of surface three dimension
Category information is studied with feature.It is excellent that photometric stereo vision has that non-contact, equipment is simple and cheap, detection efficiency is high etc.
Point has very big application potential in terms of three-dimensional surface shape measurement.
The present invention designs multiple light courcess surface three dimensional reconstruction system, is clapped respectively testee according to stereo photometry principle
Multiple images under different angle illumination are taken the photograph, measured surface three dimensional depth model is reconstructed using photometric stereo vision algorithm, and
Using the consistency profiles extraction of national Specification, associated statistical information is calculated, finally realizes surface finish measurement.
Invention content
A method of using photometric stereo vision measurement surface roughness, using 3 or more point light sources and high-resolution
Micro- camera carries out surface three dimensional reconstruction to measured object, and calculates the arithmetic average deviation of roughness profileValue, as surface
The measured value of roughness；The point light source for the incidence angles degree that the point light source is 3 or more, all light sources are irradiated to measured object
Same position；The micro- camera of high-resolution is furnished with long object distance microlens, and a point light sources of i-th (1≤i≤n) of shooting shine
The surface image I of measured object when penetratingi, all point light sources light rear camera successively can shoot n width surface images I1~In, using height
Light black ball demarcates the direction of light source, obtains a point light source unit direction vector L of i-th (1≤i≤n)i, all light sources
Unit direction vector L1~LnAnd the transformation proportionality coefficient f of world coordinates (x, y, z) and image coordinate (u, v), pass through light source
Unit direction vector L1~LnWith testee surface two-dimensional image I1~InGauging surface depth image coordinate value W (u,
V), the world coordinates value Z (x, y) of testee case depth is obtained by converting proportionality coefficient f, chooses corresponding sample length
Lr is obtained contour curve z (x) to Z (x, y) samplings, is filtered to contour curve z (x) using Gaussian filter, obtains Gauss
Center line w (x), and roughness profile r (x) is isolated, calculate the arithmetic average deviation of roughness profile r (x)Value is as coarse
The measured value of degree.
Another technical solution of the present invention is the image of bloom black ball under above-mentioned spot light, is extracted high on image
The circular contour of light black ball calculates the radius r and the center of circle (uo, v of the circular contouro), and calculate bloom black ball reflection speck
Barycentric coodinates (ud,vd).Reflection speck at surface normal be：
In formulaThe unit direction vector of light source is：
L=2 (NV) V-V,
The device of the measurement surface roughness method includes multiple light courcess spherical surface lampshade, micro imaging system, control module
And objective table；The multiple light courcess spherical surface lampshade is dome-type, is fixed on engine base, and Internal Spherical Surface uses the non-reflective material of black
Matter, uniformly distributed 3 or more point light sources in Internal Spherical Surface.The noise of measurement result can be reduced by increasing quantity of light source, improve the precision of measurement
And accuracy.
Objective table is located at the multiple light courcess spherical surface lampshade centre of sphere, and stage surface and multiple light courcess spherical surface lampshade axis perpendicular lead to
Micromatic setting is crossed to be fixed on engine base.
Micro imaging system is made of long object distance microlens, high resolution camera, imaging system optical axis and multiple light courcess ball
The axle center of face lampshade overlaps, and is fixed by the holder with micromatic setting, realizes focusing.
The acquisition of the control module control light source to shine with camera, testee is loaded on objective table, is pressed
Sequence lights all light sources in multiple light courcess spherical surface lampshade successively, and camera acquires testee surface image when each light source igniting；
Control module sends trigger signal t to high resolution camera and multiple light courcess spherical surface lampshade simultaneouslyi(i=1,2 ..., n), control
Point light source on multiple light courcess spherical surface lampshade is lighted in order, and each moment only lights a light source, and all light sources light one successively
Secondary is an illumination cycle；High resolution camera receives trigger signal ti, and in moment acquisition image Ii, illuminated by one
Cycle can acquire image I1~In, by I1~InStorage in a computer, is calculated tested with the surface roughness measuring method
Object surface roughness.
The invention is realized in this way：
It is (x, y, z) to define world coordinate system, and image coordinate system is (u, v).Pass through the bloom black ball pair of a diameter of d first
The direction of light source is demarcated, and the unit direction vector L and world coordinates (x, y, z) and image coordinate of all light sources are obtained
The transformation proportionality coefficient f of (u, v).
Then testee is loaded to objective table, and the measured surface two of an illumination cycle is acquired using above-mentioned control flow
Image I is tieed up, the unit normal vector N for calculating measured surface is：
N=L-1·I/|L-1·I|
(1)
Assuming that the relative depth that certain in image coordinate system is put is W (u, v), its gradient along image u direction and the directions v is defined
Respectively P (u, v), Q (u, v)：
Gradient matrix P and Q can be found out by following formula：
(P, Q)=(Nu·/Nw, Nv·/Nw) (3)
In formula, Nu, Nv, NwRespectively measured surface unit normal vector N is in u, v and perpendicular to the component of the plane of delineation.
Assuming that the initial value W of W0(u, v)=0 can find out the value of W (u, v) according to iterative formula below：
WmOptimal solution is obtained by successive ignition.The actual grade Z (x, y) under world coordinate system is calculated according to f：
According to national standard GB/T 1031-2009, corresponding sample length lr is chosen, the Z (x, y) that formula (5) is obtained is by difference
Y values take k sections, can obtain k contour curve zi(x) (i=1,2 ..., k).In a sample length lr, each point z on profilei
(x) arithmetic average of absolute value is referred to as profile arithmetic average error Ra values, and calculation formula is as follows：
Since surface roughness is the shortwave part of surface profile, the long wavelength part for filtering out surface profile is needed.Use spy
Fixed filter handles original contour, and long wavelength components are removed from original contour, to obtain in roughness profile
Line.Standard GB/T/T6062-2009 recommends to be filtered surface profile z (x) using following Gaussian filter.
In formula, λ is wavelength, λcoIt is numerically equal with sample length for the cutoff wavelength of contour filter, i.e. λc=
lr.α is a constant.Surface profile z (x) and Gauss weight function g (x) are made into convolution algorithm, obtain Gauss center line w (x).
Surface profile z (x) is subtracted into Gauss center line w (x), and then isolates roughness profile r (x).
R (x)=z (x)-w (x) (9)
K contour curve z can be obtained by formula (8) and formula (9)i(x) the roughness profile r of (i=1,2 ..., k)i(x)
(i=1,2 ..., k), calculates the arithmetic average deviation of roughness profileValue is as follows：
Value is the measured value of roughness.
Description of the drawings
Fig. 1 is the overall structure of the measuring device.In Fig. 1：1 is micro imaging system, including high resolution camera 1a,
Long object distance microlens 1b carries the holder 1c of micromatic setting；2 be multiple light courcess spherical surface lampshade, including Internal Spherical Surface using black not
The hemisphere face 2a, uniformly distributed n >=3 point light source 2b of reflective material；3 be objective table；4 be micromatic setting；5 be computer；6 be control
Molding block；tiFor trigger signal；IiFor image sequence.
Fig. 2 is bloom black ball bianry image schematic diagrames.
Fig. 3 is that light source unit vector seeks schematic diagram.
Specific implementation mode
The measuring device is as shown in Figure 1, by micro imaging system 1, multiple light courcess spherical surface lampshade 2, objective table 3 and its fine tuning
Device 4, computer 5, control module 6 are constituted.
Multiple light courcess spherical surface lampshade 2 is dome-type, is fixed on engine base, and Internal Spherical Surface 2a uses the non-reflective material of black, interior
Uniformly distributed n >=3 point light source 2b, is mounted on the latitude ring of multiple light courcess spherical surface lampshade on spherical surface.
Objective table 3 is located at the multiple light courcess spherical surface lampshade centre of sphere, and stage surface and multiple light courcess spherical surface lampshade axis perpendicular lead to
Micromatic setting 4 is crossed to be fixed on engine base.
Micro imaging system 1 is made of high resolution camera 1a and long object distance microlens 1b, imaging system optical axis with it is more
Light source spherical surface lampshade axle center overlaps, and is fixed by the holder 1c with micromatic setting, realizes that focusing, microlens object distance 1b are more than
1/2 diameter of multiple light courcess spherical surface lampshade 2 avoids interference illumination path.
The control flow of the measuring device is：
Control module 6 sends trigger signal t to high resolution camera 1a and multiple light courcess spherical surface lampshade 2 simultaneouslyi, control more
Point light source 2b on light source spherical surface lampshade 2 is lighted in order, and each moment only lights a light source, and all light sources light one successively
Secondary is an illumination cycle；High resolution camera 1a receives trigger signal ti, and in moment acquisition image Ii, pass through a photograph
Bright cycle can acquire image I1~In, by I1~InIt is stored in computer 5, for subsequently calculating.
The process that Source calibration is carried out using bloom black ball is as follows：
The image of bloom black ball under spot light is shot, the circular contour of bloom black ball on image is extracted, such as void in Fig. 2
Shown in line, the radius r and the center of circle (u of the circular contour are calculatedo,vo), and calculate the barycentric coodinates of bloom black ball reflection speck
(ud,vd), as in Fig. 2 at arrow meaning.Reflection speck at surface normal be：
In formulaFarther out due to camera distance, field range is smaller, therefore reflected light
Direction vector V near normals are upward.Geometrical relationship according to Fig.3, the unit direction vector that can be derived from light source are：
L=2 (NV) V-V (12)
By taking 25 μm of surface roughness criteria sample blocks of Ra measure as an example, standard sample is loaded to objective table 3, use is above-mentioned
Control flow acquires the image I of an illumination cycle.The unit normal vector n that measured surface is calculated according to formula (1), according to formula (3)
Calculate concentration gradient P (u, v), Q (u, v), according to formula (4) and formula (5) calculating image coordinate system under relative depth W (u, v) and
Actual grade Z (x, y) under world coordinate system.The surface three dimension reconstruct image of standard sample can be obtained by above method.Root
According to national standard GB/T 1031-2009, sample length lr=16mm is chosen.It is random in standard sample on surface finish texture direction
The profile of its vertical direction is sampled 10 times in block surface three dimension reconstruct image, obtains 10 contour curves, it can be with according to formula (8)
The Gauss center line of contour curve is obtained, roughness profile curve is isolated according to formula (9), roughness profile is calculated according to formula (10)
Arithmetic average deviationValue is as shown in table 1.
The roughness calculated value of table 1 Ra, 25 μm of roughness standards sample blocks
Claims (3)
1. a kind of method using photometric stereo vision measurement surface roughness, it is characterised in that：Using 3 or more point light sources and
The micro- camera of high-resolution carries out surface three dimensional reconstruction to measured object, and calculates the arithmetic average deviation Ra of roughness profile, makees
For the measured value of surface roughness；The point light source for the incidence angles degree that the point light source is 3 or more, all light sources are irradiated to
The same position of measured object；The micro- camera of high-resolution is furnished with long object distance microlens, when shooting single point light source irradiation
The surface image of measured object, all point light sources light rear camera successively can shoot n width surface images I1~In, using bloom black ball
The direction of light source is demarcated, the unit direction vector L of all light sources is obtained1~LnAnd world coordinates (x, y, z) with figure
As the transformation proportionality coefficient f of coordinate (u, v), pass through the unit direction vector L of light source1~LnWith testee surface two dimensional image
I1~InThe image coordinate value W (u, v) of gauging surface depth obtains the generation of testee case depth by converting proportionality coefficient f
Boundary coordinate value Z (x, y) chooses corresponding sample length lr, contour curve z (x) is obtained to Z (x, y) samplings, using gaussian filtering
Device is filtered contour curve z (x), obtains Gauss center line w (x), and isolate roughness profile r (x), calculates roughness wheel
The arithmetic average deviation of wide r (x)It is worth the measured value as roughness.
2. a kind of method using photometric stereo vision measurement surface roughness as described in claim 1, it is characterised in that：Institute
The image of bloom black ball under the spot light stated extracts the circular contour of bloom black ball on image, calculates the circular contour
The radius r and center of circle (uo,vo), and calculate the barycentric coodinates (u of bloom black ball reflection speckd,vd).Reflect the surface at speck
Normal vector is：
In formulaThe unit direction vector of light source is：
L=2 (NV) V-V.
3. a kind of device for implementing measurement surface roughness method described in claim 1, it is characterised in that：The device includes mostly light
Source spherical surface lampshade, micro imaging system, control module and objective table；The multiple light courcess spherical surface lampshade is dome-type, is fixed on
On engine base, Internal Spherical Surface uses the non-reflective material of black, and 3 or more point light sources are evenly distributed in Internal Spherical Surface；Objective table is located at multiple light courcess
At the spherical surface lampshade centre of sphere, stage surface and multiple light courcess spherical surface lampshade axis perpendicular are fixed on by micromatic setting on engine base；It is aobvious
Micro- imaging system is made of long object distance microlens, high resolution camera, the axis of imaging system optical axis and multiple light courcess spherical surface lampshade
The heart overlaps, and is fixed by the holder with micromatic setting, realizes focusing；The luminous and camera of the control module control light source
Acquisition, testee is loaded on objective table, lights all light sources in multiple light courcess spherical surface lampshade, each light successively in order
Camera acquires testee surface image when source point is bright；Control module is simultaneously to high resolution camera and multiple light courcess spherical surface lampshade
Send trigger signal ti(i=1,2 ..., n), the point light source controlled on multiple light courcess spherical surface lampshade are lighted in order, and each moment is only
A light source is lighted, it is once an illumination cycle that all light sources are lighted successively；High resolution camera receives trigger signal ti, and
In moment acquisition image Ii, image I can be acquired by an illumination cycle1~In, by I1~InStorage in a computer, uses institute
The surface roughness measuring method stated calculates measured object surface roughness.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108895992A (en) * | 2018-09-03 | 2018-11-27 | 大连理工大学 | A kind of laser scanning device and application method for distress in concrete fracture surface roughness |
| CN109190642A (en) * | 2018-09-04 | 2019-01-11 | 华中科技大学 | The method for extracting surface characteristics using high-order Gauss regression filtering and Radon transformation |
| CN109389113A (en) * | 2018-10-29 | 2019-02-26 | 大连恒锐科技股份有限公司 | A kind of multi-function footprint acquisition equipment |
| CN109408888A (en) * | 2018-11-27 | 2019-03-01 | 广东工业大学 | A kind of roughness calculation method, computer readable storage medium and the terminal on two-dimensional cutting surface |
| CN111006615A (en) * | 2019-10-30 | 2020-04-14 | 浙江大学 | Flat surface feature scanning imaging device and method |
| CN111156932A (en) * | 2020-03-10 | 2020-05-15 | 凌云光技术集团有限责任公司 | Mirror surface material roughness detection device |
| CN111337433A (en) * | 2020-05-21 | 2020-06-26 | 深圳新视智科技术有限公司 | Defect layering device and method for surface defect detection |
| CN112037165A (en) * | 2020-07-03 | 2020-12-04 | 河南中烟工业有限责任公司 | Cigarette ash wrapping performance detection method based on regression Gaussian filtering |
| CN113146427A (en) * | 2020-05-29 | 2021-07-23 | 浙江大学 | Steel rail surface defect detection method |
| CN114155359A (en) * | 2022-01-05 | 2022-03-08 | 上海赛图图像设备有限公司 | Multi-angle scanning image acquisition system and method thereof |
| WO2022113934A1 (en) * | 2020-11-26 | 2022-06-02 | 株式会社堀場製作所 | Surface roughness measuring device, and surface roughness measuring method |
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| CN108895992A (en) * | 2018-09-03 | 2018-11-27 | 大连理工大学 | A kind of laser scanning device and application method for distress in concrete fracture surface roughness |
| CN109190642A (en) * | 2018-09-04 | 2019-01-11 | 华中科技大学 | The method for extracting surface characteristics using high-order Gauss regression filtering and Radon transformation |
| CN109389113B (en) * | 2018-10-29 | 2020-12-15 | 大连恒锐科技股份有限公司 | Multifunctional footprint acquisition equipment |
| CN109389113A (en) * | 2018-10-29 | 2019-02-26 | 大连恒锐科技股份有限公司 | A kind of multi-function footprint acquisition equipment |
| CN109408888A (en) * | 2018-11-27 | 2019-03-01 | 广东工业大学 | A kind of roughness calculation method, computer readable storage medium and the terminal on two-dimensional cutting surface |
| CN109408888B (en) * | 2018-11-27 | 2024-01-05 | 广东工业大学 | Roughness calculation method of two-dimensional cutting surface, computer-readable storage medium and terminal |
| CN111006615A (en) * | 2019-10-30 | 2020-04-14 | 浙江大学 | Flat surface feature scanning imaging device and method |
| CN111156932A (en) * | 2020-03-10 | 2020-05-15 | 凌云光技术集团有限责任公司 | Mirror surface material roughness detection device |
| CN111156932B (en) * | 2020-03-10 | 2021-08-27 | 凌云光技术股份有限公司 | Mirror surface material roughness detection device |
| CN111337433A (en) * | 2020-05-21 | 2020-06-26 | 深圳新视智科技术有限公司 | Defect layering device and method for surface defect detection |
| CN111337433B (en) * | 2020-05-21 | 2020-09-08 | 深圳新视智科技术有限公司 | Defect layering device and method for surface defect detection |
| CN113146427A (en) * | 2020-05-29 | 2021-07-23 | 浙江大学 | Steel rail surface defect detection method |
| CN112037165A (en) * | 2020-07-03 | 2020-12-04 | 河南中烟工业有限责任公司 | Cigarette ash wrapping performance detection method based on regression Gaussian filtering |
| WO2022113934A1 (en) * | 2020-11-26 | 2022-06-02 | 株式会社堀場製作所 | Surface roughness measuring device, and surface roughness measuring method |
| CN114155359A (en) * | 2022-01-05 | 2022-03-08 | 上海赛图图像设备有限公司 | Multi-angle scanning image acquisition system and method thereof |
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Application publication date: 20180720 |