CN109163672A - A kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm - Google Patents
A kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm Download PDFInfo
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- CN109163672A CN109163672A CN201810877911.0A CN201810877911A CN109163672A CN 109163672 A CN109163672 A CN 109163672A CN 201810877911 A CN201810877911 A CN 201810877911A CN 109163672 A CN109163672 A CN 109163672A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The present invention provides a kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm.A kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm, wherein include the following steps: that S1. obtains white light interference template curve；S2. vertical scanning testee acquires interference fringe, obtains sampled point；S3. gravity model appoach or extremum method fast rough zero optical path difference point are used；S4. it determines search range, takes around zero optical path difference point in a certain range several sampled points as point to be matched；S5. it is matched in search range with point to be matched with template curve, obtains the zero optical path difference point of fine positioning；S6. the relative altitude of accurate object surface appearance is obtained according to the correlativity of zero optical path difference and topographical height, and then rebuilds the 3D pattern of testee.Inventive algorithm is simple, and speed is fast, and precision is high, and anti-noise ability is stronger.
Description
Technical field
The present invention relates to precision optics survey engineering technical fields, are based on zero light of white light interference more particularly, to one kind
The microscopic appearance measurement method of path difference position picking algorithm.
Background technique
The microscopic appearance of body surface largely influences its quality and service performance.With Ultraprecision Machining
It continues to develop, corresponding ultraprecise detection technique seems increasingly important.White light interferometric technology is one of extremely important
Non-contact surface microscopic appearance optical measuring technique, it solves laser interferometer when the discontinuous height transition of measured surface
Phase fuzzy problem when more than quarter-wave.The basic principle of white light interferometric are as follows: the light that light source issues passes through light
Reflection occurs for road a part as measurement light after reaching on the testee on vertical scanning platform, a part of light is arrived by optical path
Up to reference mirror back reflection as reference light.Two beam reflected lights converge and pass through spectroscope, are received by CCD camera.Work as vertical scanning
When platform is scanned up and down so that the optical path difference of measurement light and reference light is less than the coherence length of laser, it is white that two-beam interferes generation
Interference of light striped.When the optical path difference for measuring light and reference light is equal to zero, i.e., zero optical path difference position, the intensity of interference signal reach
It is maximum.Zero optical path difference position reflects the information of object height, i.e. positioning zero optical path difference position can rebuild the 3D pattern of object.
Therefore, zero optical path difference position is accurately positioned by white light interference signal processing algorithm, is a pass of white light interferometric technology
Key step.In the identical situation of other factors, white light interference signal processing algorithm directly determines determining for zero optical path difference position
Position accuracy and speed, and then determine the accuracy and speed for rebuilding object 3D pattern.
Currently, white light interference signal processing algorithm mainly has: extremum method, gravity model appoach, envelope curve fitting process, phase shift method,
Spatial frequency domain method etc..Extremum method directly using at very big light intensity value as zero optical path difference point, it is very simple and quick, precision mainly by
Scanning step determines, while vulnerable to influence of noise, causing precision poor；Gravity model appoach calculates simply, and speed is fast, but also easy simultaneously
Affected by noise, precision is not high；White light phase shift method precision is higher than extremum method and gravity model appoach, is lower than envelope curve fitting process and sky
Between frequency domain method, arithmetic speed is moderate；Envelope curve fitting process has Fourier to convert filter method, and Hilbert converter technique, small echo become
The methods of method and direct quadratic polynomial fitting process are changed, precision is all higher in general, but operand is larger, and time-consuming, difficult
To meet the requirement of on-line measurement；Spatial frequency domain method has higher precision, but it is quasi- to need to carry out Fourier transformation and least square
It closes, operand is larger.
Therefore, research can quickly, be accurately positioned zero optical path difference position white light interference signal processing algorithm rebuild it is microcosmic
Three-dimensional appearance is of great significance to ultraprecise detection.
Summary of the invention
The present invention in order to overcome at least one of the drawbacks of the prior art described above, provides a kind of based on zero light path of white light interference
The microscopic appearance measurement method of poor position picking algorithm.Inventive algorithm is simple, and speed is fast, and precision is high, and anti-noise ability is stronger.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: one kind being based on white light interference zero optical path difference position
Set the microscopic appearance measurement method of picking algorithm, wherein include the following steps:
S1. white light interference template curve is obtained；
S2. vertical scanning testee acquires interference fringe, obtains sampled point；
S3. gravity model appoach or extremum method fast rough zero optical path difference point are used；
S4. it determines search range, takes around zero optical path difference point in a certain range several sampled points as point to be matched；
S5. it is matched in search range with point to be matched with template curve, obtains the zero optical path difference point of fine positioning；
S6. the relative altitude of accurate object surface appearance is obtained according to the correlativity of zero optical path difference and topographical height,
And then rebuild the 3D pattern of testee.
Further, in the step S1, vertical scanning platform is used first to carry out vertical scanning with a fixed step size, obtained close
The sampled point of collection carries out white light interference curve matching to sampled point, obtains white light interference template curve.
In the present invention, white light interference can also be obtained according to a variety of methods such as system parameter by white light interference theory analysis
Template curve.Moreover, also there are many different forms for the white light interference template curve expression formula of fitting.
It under white light interference system hardware certain situation, that is, include that light source and objective aperture numerical value determine feelings in the present invention
Under condition, the concrete shape of white light interference intensity curve is can white light that is determined or estimative, therefore being fitted in the present invention
Interfere template curve expression formula can are as follows:
I in formulabFor background light intensity, γ is fringe contrast, can determine the two parameters through over-fitting；lcAnd λ0Respectively
The coherence length and central wavelength of light source, are determined by light source；Z is sampling point position, and it is known quantity that I (z), which is corresponding light intensity value,；
h0For zero optical path difference position, as unique variable.
Further, in the step S2, testee is placed in vertical scanning platform and carries out unique step scanning, is used
CCD acquires interference fringe, and each pixel of CCD obtains a series of sampled point.
Further, in the step S3, coarse positioning zero optical path difference point is denoted as N0；In the step S4, according to N0Determining
It is N with search range0± Δ, takes N0For a certain range of m sampled point of surrounding as point to be matched, position z is corresponding
Light intensity value is Iz。
Further, in the step S5, the variable h of template curve is just set0=N0Δ substitutes into the position z of point to be matched
Into white light interference template curve, template curve can be obtained in the white light interference intensity value I (z) of z location.By I (z) and IzIt is poor to make
And ask and thoroughly deserve residual absolute value, then residual absolute value the sum of of the m to point are as follows: ε=∑ | I (z)-Iz|, it is bent to change template
Line variable h0, meet N0-Δ≤h0≤N0+ Δ, when the sum of residual absolute value ε value minimum, corresponding h0As required essence is fixed
The zero optical path difference position of position.
Compared with prior art, beneficial effects of the present invention:
The present invention takes full advantage of extremum method or the simple and quick feature of gravity model appoach algorithm, improves template matching speed, into
And make template matching method that there is high arithmetic speed.
The present invention makes full use of the confirmability or estimability of white light interference signal curve shape, with sampled point and template
Curve is matched, and has achieved the purpose that high accuracy three-dimensional Profile construction.
The present invention can still keep higher precision when vertical scanning platform is scanned with larger step pitch, therefore can accelerate
Scan procedure.
The present invention is by combining coarse positioning and two step of fine positioning, and algorithm is simple, and speed is fast, and precision is high, and anti-noise ability is stronger.
Detailed description of the invention
Fig. 1 is the working principle of the invention flow chart.
Fig. 2 is the white light interference template curve figure got in advance in the present invention.
Fig. 3 is that the sampled point of the vertical unique step scanning of scanning platform in the present invention is illustrated with gravity model appoach or extremum method coarse positioning
Figure.
Fig. 4 is search range and sampled point schematic diagram to be matched in the present invention.
Fig. 5 is template curve and sampled point matching process schematic diagram to be matched in the present invention.
Fig. 6 is that template curve matches completion schematic diagram with sampled point to be matched in the present invention.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；In order to better illustrate this embodiment, attached
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
As shown in Figure 1, a kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm,
In, include the following steps:
S1. white light interference template curve is obtained.The specific method is as follows: using vertical scanning platform first with fixed step size progress
Vertical scanning obtains intensive sampled point, carries out white light interference curve matching to sampled point, obtains white light interference template curve,
As shown in Figure 2.Under white light interference system hardware certain situation, that is, include light source and objective aperture numerical value certain situation under, it is white
The concrete shape of interference of light intensity curve is can white light interference mould that is determined or estimative, therefore being fitted in the present embodiment
Plate curve representation formula can are as follows:
I in formulabFor background light intensity, γ is fringe contrast, can determine the two parameters through over-fitting；lcAnd λ0Respectively
The coherence length and central wavelength of light source, are determined by light source；Z is sampling point position, and it is known quantity that I (z), which is corresponding light intensity value,；
h0For zero optical path difference position, as unique variable.
In the present embodiment, it is dry that white light can also be obtained according to a variety of methods such as system parameter by white light interference theory analysis
Relate to template curve.Moreover, also there are many different forms for the white light interference template curve expression formula of fitting.
S2. vertical scanning testee acquires interference fringe, obtains sampled point；The specific method is as follows: testee is set
Unique step scanning is carried out in vertical scanning platform, interference fringe is acquired using CCD, each pixel of CCD obtains a series of sampling
Point, as shown in Figure 3.
S3. gravity model appoach or extremum method fast rough zero optical path difference point are used, coarse positioning zero optical path difference point is denoted as N0, such as Fig. 3
It is shown.
S4. it determines search range, takes around zero optical path difference point in a certain range several sampled points as point to be matched；Tool
Body method is as follows: according to N0Determine that matching search range is N0± Δ, takes N0Around a certain range of m sampled point as to
Match point, position z, corresponding light intensity value are Iz, as shown in Figure 4.
S5. it is matched in search range with point to be matched with template curve, obtains the zero optical path difference point of fine positioning；Tool
Body method is as follows: just setting the variable h of template curve0=N0Δ substitutes into the position z of point to be matched to white light interference template curve
In, template curve can be obtained in the white light interference intensity value I (z) of z location.By I (z) and IzMake difference and ask to thoroughly deserve residual error
Absolute value, then residual absolute value the sum of of the m to point are as follows: ε=∑ | I (z)-Iz|, change template curve variable h0, meet N0-Δ≤
h0≤N0+ Δ, so that curve moves in search range, as shown in Figure 5.It is corresponding when the sum of residual absolute value ε value minimum
h0The as zero optical path difference position of required fine positioning, as shown in Figure 6.
S6. the relative altitude of accurate object surface appearance is obtained according to the correlativity of zero optical path difference and topographical height,
And then rebuild the 3D pattern of testee.
Obviously, the above embodiment of the present invention is just for the sake of clearly demonstrating examples made by the present invention, and is not
Restriction to embodiments of the present invention.For those of ordinary skill in the art, on the basis of the above description also
It can make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all
Made any modifications, equivalent replacements, and improvements etc. within the spirit and principles in the present invention should be included in right of the present invention and want
Within the protection scope asked.
Claims (6)
1. a kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm, which is characterized in that including
Following steps:
S1. white light interference template curve is obtained；
S2. vertical scanning testee acquires interference fringe, obtains sampled point；
S3. gravity model appoach or extremum method fast rough zero optical path difference point are used；
S4. it determines search range, takes around zero optical path difference point in a certain range several sampled points as point to be matched；
S5. it is matched in search range with point to be matched with template curve, obtains the zero optical path difference point of fine positioning；
S6. the relative altitude of accurate object surface appearance is obtained according to the correlativity of zero optical path difference and topographical height, in turn
Rebuild the 3D pattern of testee.
2. a kind of microscopic appearance measurement side based on white light interference zero optical path difference position picking algorithm according to claim 1
Method, which is characterized in that in the step S1, vertical scanning platform is used first to carry out vertical scanning with a fixed step size, obtained intensive
Sampled point, to sampled point carry out white light interference curve matching, obtain white light interference template curve.
3. a kind of microscopic appearance measurement side based on white light interference zero optical path difference position picking algorithm according to claim 2
Method, which is characterized in that the white light interference template curve expression formula of fitting are as follows:
I in formulabFor background light intensity, γ is fringe contrast, can determine the two parameters through over-fitting；lcAnd λ0Respectively light source
Coherence length and central wavelength, determined by light source；Z is sampling point position, and it is known quantity that I (z), which is corresponding light intensity value,；h0For
Zero optical path difference position, as unique variable.
4. a kind of microscopic appearance measurement side based on white light interference zero optical path difference position picking algorithm according to claim 2
Method, which is characterized in that in the step S2, testee is placed in vertical scanning platform and carries out unique step scanning, is adopted using CCD
Collect interference fringe, each pixel of CCD obtains a series of sampled point.
5. a kind of microscopic appearance measurement side based on white light interference zero optical path difference position picking algorithm according to claim 3
Method, which is characterized in that in the step S3, coarse positioning zero optical path difference point is denoted as N0；In the step S4, according to N0Determine matching
Search range is N0± Δ, takes N0The a certain range of m sampled point of surrounding is as point to be matched, position z, corresponding light
Intensity values are Iz。
6. a kind of microscopic appearance measurement side based on white light interference zero optical path difference position picking algorithm according to claim 5
Method, which is characterized in that in the step S5, just set the variable h of template curve0=N0Δ substitutes into the position z of point to be matched to white
In interference of light template curve, template curve can be obtained in the white light interference intensity value I (z) of z location.By I (z) and IzMake difference and asks
Thoroughly deserve residual absolute value, then residual absolute value the sum of of the m to point are as follows: ε=∑ | I (z)-Iz|, change template curve and becomes
Measure h0, meet N0-Δ≤h0≤N0+ Δ, when the sum of residual absolute value ε value minimum, corresponding h0As required fine positioning
Zero optical path difference position.
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| CN109751971A (en) * | 2019-01-23 | 2019-05-14 | 南京理工大学 | Short coherent light three-dimensional appearance rapid survey algorithm in high precision |
| CN110223384A (en) * | 2019-06-27 | 2019-09-10 | 广东工业大学 | A kind of white light interference three-dimensional appearance method for reconstructing, device, system and storage medium |
| CN111339844A (en) * | 2020-02-12 | 2020-06-26 | 天津大学 | Three-dimensional morphology demodulation method based on white light scanning interference |
| CN111412861A (en) * | 2020-03-31 | 2020-07-14 | 天津大学 | Linear white light surface profile measuring method |
| CN113029366A (en) * | 2021-03-11 | 2021-06-25 | 深圳中科飞测科技股份有限公司 | Zero phase difference position finding method, scanning system and storage medium |
| CN113091634A (en) * | 2021-03-01 | 2021-07-09 | 南京理工大学 | Rapid micro-morphology measuring method suitable for white light scanning interference |
| CN114088010A (en) * | 2021-11-18 | 2022-02-25 | 中国科学院长春光学精密机械与物理研究所 | Interference three-dimensional morphology resolving method |
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| CN115046469A (en) * | 2022-05-20 | 2022-09-13 | 浙江大学 | Interference fringe envelope extraction method for optical fiber white light interference |
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| CN109751971B (en) * | 2019-01-23 | 2020-10-02 | 南京理工大学 | High-precision short coherent light three-dimensional morphology rapid measurement algorithm |
| CN109751971A (en) * | 2019-01-23 | 2019-05-14 | 南京理工大学 | Short coherent light three-dimensional appearance rapid survey algorithm in high precision |
| CN110223384B (en) * | 2019-06-27 | 2022-12-27 | 广东工业大学 | White light interference three-dimensional shape reconstruction method, device and system and storage medium |
| CN110223384A (en) * | 2019-06-27 | 2019-09-10 | 广东工业大学 | A kind of white light interference three-dimensional appearance method for reconstructing, device, system and storage medium |
| CN111339844A (en) * | 2020-02-12 | 2020-06-26 | 天津大学 | Three-dimensional morphology demodulation method based on white light scanning interference |
| CN111339844B (en) * | 2020-02-12 | 2022-10-28 | 天津大学 | Three-dimensional morphology demodulation method based on white light scanning interference |
| CN111412861A (en) * | 2020-03-31 | 2020-07-14 | 天津大学 | Linear white light surface profile measuring method |
| CN111412861B (en) * | 2020-03-31 | 2022-02-11 | 天津大学 | Linear white light surface profile measuring method |
| CN114354541A (en) * | 2020-10-14 | 2022-04-15 | 中粮集团有限公司 | Rice processing precision detection method and system |
| CN113091634A (en) * | 2021-03-01 | 2021-07-09 | 南京理工大学 | Rapid micro-morphology measuring method suitable for white light scanning interference |
| CN113029366A (en) * | 2021-03-11 | 2021-06-25 | 深圳中科飞测科技股份有限公司 | Zero phase difference position finding method, scanning system and storage medium |
| CN114088010A (en) * | 2021-11-18 | 2022-02-25 | 中国科学院长春光学精密机械与物理研究所 | Interference three-dimensional morphology resolving method |
| CN114088010B (en) * | 2021-11-18 | 2022-08-19 | 中国科学院长春光学精密机械与物理研究所 | Interference three-dimensional morphology resolving method |
| WO2023088409A1 (en) * | 2021-11-18 | 2023-05-25 | 中国科学院长春光学精密机械与物理研究所 | Interferometric three-dimensional profile solving method |
| CN114485464A (en) * | 2022-01-24 | 2022-05-13 | 天津大学 | Large-range plane element white light interference rapid measurement method |
| CN114485464B (en) * | 2022-01-24 | 2022-12-27 | 天津大学 | Large-range plane element white light interference rapid measurement method |
| CN115046469A (en) * | 2022-05-20 | 2022-09-13 | 浙江大学 | Interference fringe envelope extraction method for optical fiber white light interference |
| CN116972771B (en) * | 2023-09-25 | 2023-12-12 | 板石智能科技(深圳)有限公司 | White light scanning interference three-dimensional reconstruction method and device, electronic equipment and storage medium |
| CN117870548A (en) * | 2024-03-12 | 2024-04-12 | 板石智能科技(深圳)有限公司 | Method, device, equipment and medium for determining white light interference zero optical path difference position |
| CN117870548B (en) * | 2024-03-12 | 2024-05-28 | 板石智能科技(深圳)有限公司 | Method, device, equipment and medium for determining white light interference zero optical path difference position |
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