CN106017349A - White light interferometry-based test system and test method therefor - Google Patents
White light interferometry-based test system and test method therefor Download PDFInfo
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- CN106017349A CN106017349A CN201610401870.9A CN201610401870A CN106017349A CN 106017349 A CN106017349 A CN 106017349A CN 201610401870 A CN201610401870 A CN 201610401870A CN 106017349 A CN106017349 A CN 106017349A
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- white light
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- piezoelectric ceramics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a white light interferometry-based test system and a test method therefor. The white light interferometry-based test system is characterized by comprising a micrographic optical system, a digital CCD camera, an image collection card, an interference system, a piezoelectric ceramic part, a piezoelectric ceramic controller, an air floatation platform, a white light halogen light source and a PC machine. The test method disclosed in the invention comprises the following steps: the piezoelectric ceramic controller is operated via the PC machine to control the piezoelectric ceramic part to drive a sample being tested, and therefore the sample being tested can be subjected to vertical scanning operation, interference fringes are enabled to scan an area being tested, and a collected image can be recorded via the digital CCD camera; after the collected image is filtered via the PC machine, white light interference signals of individual pixel points are extracted, background light intensity value of obtained white light interference fringes is subtracted, light intensity of each pixel point is subjected to time domain to frequency domain conversion, and relation between a wave number and a phase position is obtained via decomposition operation performed in a frequency domain; wave number and phase position information in a signal domain is subjected to comprehensive interference, then a position of zero light path difference is obtained, and surface height information can be extracted.
Description
Technical field
The present invention relates to a kind of microstructure appearance test system and method for testing thereof, particularly open a kind of dry based on white light
Relate to test system and the method for testing thereof of art, be applied in micro-structural 3 D pattern non-cpntact measurement.
Background technology
Ultraprecision Machining and various miniature instrument such as MEMS(MEMS) and NEMS(nano electromechanical systems)
Fast development, the feature size of relevant processing device is more and more less, complexity is more and more higher, size span increasingly
Greatly, the requirement for measuring and characterize is more and more higher.Ultra precise measurement not only comprises longitudinal elevation information size and x wire
Interval, the measurement of structural cycle equidimension, also had very important measurement to anticipate by the 3 d surface topography of micro-measuring structure simultaneously
Justice.
Ultra precise measurement technology have measured size micro-nano-scale, position error on measurement result impact increase,
Measurement result is easily by the feature such as dust or foreign materials away, and ultraprecise detection field develops many detection techniques and equipment accordingly,
Such as automatic focussing, fringe projection method, scanning probe microscopy, optical microphotograph interferometric method.Wherein optical microphotograph interferometry will be dry
Relate to principle to be combined with contemporary optics microtechnique, utilize the very high sensitivity that spatial position change is had by interference fringe, real
Existing nano level measurement resolution, and it is with whole visual field for analyzing object, can be obtained the three of micro structure by single pass
Dimension pattern, has the highest testing efficiency, therefore suffers from the extensive concern of domestic and international research institution.
Monochromatic light Phaseshifting interferometry and white light scanning interferometry are two kinds of important method in optical microphotograph interferometry.But
In monochromatic light Phaseshifting interferometry, there is " phase ambiguity " problem, on test surfaces, the height change at consecutive number strong point should be less than
Quarter-wave, therefore limits the application of monochromatic light Phaseshifting interferometry so that it is can be only applied to smooth surface or ties continuously
In the measurement of structure.White light scanning interferometry uses broad spectrum light source be illuminated, there is for comparing monochromatic light shorter phase
Dry length, makes interference fringe can only appear in the least spatial dimension, which overcomes in monochromatic light Phaseshifting interferometry simultaneously
Phase fuzzy problem.White light interference signal is typically denoted as the cosine signal that an envelope is modulated by Gaussian function, and it is visible
Degree changes with the change of scan position.When measuring light and being zero with reference light optical path difference, there is maximum in interference signal, is referred to as
For relevant peak.Owing to relevant peak represents the relative altitude of test surfaces, the position error at the most any relevant peak all can be to measurement
Result impacts.Relevant peak position is the most more precisely located and becomes the core of white light scanning interferometry, and this side
There is being always so far research emphasis from white light scanning interferometry in the research in face.
Summary of the invention
Present invention aim to address the defect of prior art, it is provided that a kind of be independent of stripe signal visible contrast,
The microstructure appearance test system little by noise and dispersive influence, computational accuracy is high and method of testing thereof, open a kind of based in vain
The test system of interference of light art and method of testing thereof.
The present invention is achieved in that a kind of test system based on White light interferometry, including micro optical system, numeral
Ccd video camera, image pick-up card, interference system, piezoelectric ceramics, the piezoelectric ceramics controller being connected with piezoelectric ceramics and air supporting are flat
Platform, it is characterised in that: described test system also includes white light halogen light source and the PC providing light source to micro optical system；
Described PC is connected with digital CCD camera by image pick-up card, and PC is also by USB and control piezo ceramic motion
Piezoelectric ceramics controller connect；Described piezoelectric ceramics is arranged on air floating platform；The input of described interference system is corresponding
In the sample being placed on piezoelectric ceramics.
A kind of method of testing of test system based on White light interferometry, it is characterised in that: the test of described test system
Method operates piezoelectric ceramics controller by PC, controls piezoelectric ceramics and drives the sample being positioned on piezoelectric ceramics to carry out
Vertical scanning, makes the inswept tested region of interference fringe, and the image gathered by digital CCD camera record；PC passes through image
Capture card reads the image that storage gathers, and PC extracts the white light interference signal of single pixel after the image filtering to gathering,
Obtain white-light fringe, to obtained white-light fringe, first have to deduct its bias light intensity values, the light to each pixel
Carry out by force the time domain conversion to frequency domain, do in frequency domain and decompose, obtain the phase value that different frequency is corresponding, i.e. wave number and phase place
Relation；With phase information thus the position of zero optical path difference is obtained, it is achieved apparent height by wave number in comprehensive interference signal frequency domain
The extraction of information.
Described obtain white-light fringe after, during it is positioned, white light interference signal is converted into frequency
Territory is done and decomposes, obtain the relation of wave number and phase place.Described white light interference signal is converted into frequency domain after, try to achieve interference signal
In frequency domain at amplitude maximum near after phase value, carry out this phase value launching operation, spread out to four-quadrant.Described
By wave number in comprehensive interference signal frequency domain with phase information thus during obtaining the position of zero optical path difference, calculating zero light
Add sample surface reflectivity, the consideration of phase reflection catastrophe during path difference position, introduce phase compensation amount and anti-
Penetrate rate coefficient.
The invention has the beneficial effects as follows: the present invention is a kind of contactless measurement, to sample during measurement
The impact of surface characteristic is minimum；The present invention is the formula scanning of a kind of field, measures scope by the visual field of CCD target surface size and object lens certainly
Fixed, measure efficiency high；The present invention adds when calculating zero optical path difference position sample surface reflectivity, phase reflection sudden change
The consideration of situation, introduces phase compensation amount and reflectivity factor；Present invention uses wave number and the phase place of frequency domain internal interference signal
Information, is independent of the visible contrast of stripe signal, little by noise and dispersive influence, improves certainty of measurement, can be effectively
Measure micro-nano structure three-dimensional appearance.
Accompanying drawing explanation
Fig. 1 is the structural representation of present invention test based on White light interferometry system.
Fig. 2 is the test flow chart of the method for testing of present invention test based on White light interferometry system.
Fig. 3 is white light interference signal amplitude and wave-number relationship figure.
Fig. 4 is white light interference signal phase and wave-number relationship figure.
In the drawings: 1, white light halogen light source；2, micro optical system；3, digital CCD camera；4, image pick-up card；
5, interference system；6, sample；7, piezoelectric ceramics；8, air floating platform；9, piezoelectric ceramics controller；10, PC；
11, interference signal amplitude and wave number conversion curve；12, central angle beam location；13, interference signal phase place is bent with wave-number relationship
Line.
Detailed description of the invention
With reference to the accompanying drawings 1 and 2, the structure of present invention test based on White light interferometry system includes micro optical system 2, number
Word ccd video camera 3, image pick-up card 4, interference system 5, piezoelectric ceramics 7, the piezoelectric ceramics controller that is connected with piezoelectric ceramics 7
9, air floating platform 8, the white light halogen light source 1 that light source is provided to micro optical system 2 and PC 10；Described piezoelectric ceramics 7 sets
Put on air floating platform 8；Described micro optical system 2 is made up of Guan Jing, diaphragm, microcobjective and spectroscope, at micro-thing
Add Guan Jing, Guan Jing before mirror to be combined by two convex lenss, be parallel light path between the two convex lens, can be at directional light
Road is inserted into different types of optical element, such as polaroid, filter plate etc., is used for filtering veiling glare, is passed through by the light of Guan Jing
Diaphragm and microcobjective arrive half-reflection and half-transmission spectroscope by diaphragm again and enter interference system 5.The input of described interference system 5
Corresponding to the sample 6 being placed on piezoelectric ceramics 7, interference system 5 is by micro-interference object lens, spectroscope and reference mirror
Composition, the light of arrival interference system 5 part reflective semitransparent film on spectroscope is divided into two bundles, a branch of plate that is split to reflex to reference
The reflector space of reflecting mirror, is reflected after reflexing to spectroscope again, eventually passes back to micro-interference object lens；Another bundle is through light splitting
Plate projects sample surface, returns to micro-interference object lens through beam-splitter after reflection, and two-beam converges in objective angular field to be sent out
Raw interfere, finally extracted the light intensity value of interference image by digital CCD camera 3 and carry out processing and i.e. can get the surface of sample
Topographical information.Described PC 10 is connected with digital CCD camera 3 by image pick-up card 4, PC 10 also by USB and
The piezoelectric ceramics controller 9 controlling piezoelectric ceramics 7 motion connects.Described test system can be placed on air floating platform 8, and
Illumination is provided to whole system by white light halogen light source 1.
The method of testing of present invention test based on White light interferometry system, selectes before measuring and need to measure scanning area also
Focusing, adjusts sample 6 position and illumination intensity, makes illumination light include whole visible light wave range, to make full use of number as far as possible
The resolving power of word ccd video camera 3, the bound of selected scanning, so that the abundant inswept tested region of interference fringe, set scanning step
Long, scanning step sets according to sampling thheorem；Operate piezoelectric ceramics controller 9 by PC 10, control piezoelectric ceramics 7 drive and put
The sample 6 being placed on piezoelectric ceramics 7 carries out unique step vertical scanning, makes the inswept tested region of interference fringe, uses numeral
Ccd video camera 3 is every a Scanning step acquisition scans image, and is sent to PC 10 is stored by image pick-up card 4；
Extract the white light interference signal of single pixel after the image filtering that storage is gathered by PC 10, obtain white-light fringe, right
Obtained by white-light fringe, first have to deduct its bias light intensity values, the light intensity of each pixel carried out time domain and arrives frequency domain
Conversion, does in frequency domain and decomposes, and calculates amplitude maximum position point after the conversion of each pixel, utilizes each pixel amplitude maximum position
Put data extraction phase value near a little, obtain the relation of the phase value that different frequency is corresponding, i.e. wave number and phase place；By comprehensive dry
In relating to signal frequency domain, wave number with phase information thus obtains the position of zero optical path difference, it is achieved the extraction of apparent height information.
Described obtain white-light fringe after, during it is positioned, white light interference signal is converted into frequency
Territory is done and decomposes, obtain the relation of wave number and phase place.Described white light interference signal is converted into frequency domain after, try to achieve interference signal
In frequency domain at amplitude maximum near after phase value, carry out this phase value launching operation, spread out to four-quadrant.Described
By wave number in comprehensive interference signal frequency domain with phase information thus during obtaining the position of zero optical path difference, calculating zero light
Add sample surface reflectivity, the consideration of phase reflection catastrophe during path difference position, introduce phase compensation amount and anti-
Penetrate rate coefficient.
With reference to the accompanying drawings 3, process after filtering, remove background light intensity, the interference signal amplitude of time domain to frequency domain transform and ripple
Transformation of variables curve 11, the formula that conversion process uses is:
Wherein for the light intensity value of position during measuring, corresponding specific wave number, arrives frequency domain transform for interference signal time domain
As a result, for amplitude, phase place is the function of wave number.For after conversion at amplitude maximum at arrow indication in Fig. 3, it is central angle ripple
Numerical digit puts 12, and near this position, phase value is linear with wave number, and phase place can be calculated by below equation:
With reference to the accompanying drawings 4, near central angle beam location 12, phase value closes with wave number with wave-number relationship curve, i.e. interference signal phase place
It is curve 13, during phase calculation, there is the uncertain of periodically 2 π, eliminated by following solution packaging method:
Wherein, ± for calculate time along withjValue be increased or decreased, represent and take the inside nearest integer value of value of calculation, to ensure phase
The seriality that position calculates.
Then group velocity optical path difference can be calculated from the slope of phase place with wave number according to below equation:
The consideration of the situation such as surface reflectivity, phase reflection sudden change of addition, introduces reflectivity factor n and phase compensation amount, interferes
Signal zero level fringe position can be expressed as:
It is hereby achieved that the surface topography of sample.
The present invention is a kind of contactless measurement, and during measurement, the impact on sample surface characteristic is minimum；
The present invention is the formula scanning of a kind of field, and scope of measuring is determined by the visual field of CCD target surface size and object lens, measures efficiency high；The present invention
Add when calculating zero optical path difference position sample surface reflectivity, the consideration of phase reflection catastrophe, introduce phase place
Compensation dosage and reflectivity factor；Present invention uses wave number and the phase information of frequency domain internal interference signal, be independent of stripe signal
Visible contrast, little by noise and dispersive influence, improve certainty of measurement, can be with effectively measuring micro-nano structure three-dimensional shaped
Looks.
Claims (5)
1. a test system based on White light interferometry, including micro optical system, digital CCD camera, image pick-up card,
Interference system, piezoelectric ceramics, the piezoelectric ceramics controller being connected with piezoelectric ceramics and air floating platform, it is characterised in that: described
Test system also includes white light halogen light source and the PC providing light source to micro optical system；Described PC is adopted by image
Truck is connected with digital CCD camera, and PC connects with the piezoelectric ceramics controller controlling piezo ceramic motion also by USB
Connect；Described piezoelectric ceramics is arranged on air floating platform；The input of described interference system is corresponding to being placed on piezoelectric ceramics
Sample.
2. a method of testing based on the test system based on White light interferometry described in claim 1, it is characterised in that:
The method of testing of described test system operates piezoelectric ceramics controller by PC, controls piezoelectric ceramics drive and is positioned over piezoelectricity pottery
Sample on porcelain carries out vertical scanning, makes the inswept tested region of interference fringe, and gathered by digital CCD camera record
Image；PC reads, by image pick-up card, the image that storage gathers, and PC extracts single pixel after the image filtering to gathering
The white light interference signal of point, obtains white-light fringe, to obtained white-light fringe, first has to deduct its background light intensity
Value, carries out the time domain conversion to frequency domain to the light intensity of each pixel, does and decompose, obtain the phase place that different frequency is corresponding in frequency domain
Value, i.e. wave number and the relation of phase place；With phase information thus zero optical path difference is obtained by wave number in comprehensive interference signal frequency domain
Position, it is achieved the extraction of apparent height information.
3. according to the method for testing of the test system based on White light interferometry described in claim 2, it is characterised in that: described
Obtain white-light fringe after, be converted in frequency domain to do by white light interference signal during it is positioned and decompose,
Obtain the relation of wave number and phase place.
4. according to the method for testing of the test system based on White light interferometry described in claim 3, it is characterised in that: described
White light interference signal is converted into frequency domain after, try to achieve in interference signal frequency domain near at amplitude maximum after phase value, to this
Phase value carries out launching operation, spreads out to four-quadrant.
5. according to the method for testing of the test system based on White light interferometry described in claim 2, it is characterised in that: described
By wave number in comprehensive interference signal frequency domain and phase information thus during obtaining the position of zero optical path difference, calculating zero
Add sample surface reflectivity, the consideration of phase reflection catastrophe during optical path difference position, introduce phase compensation amount and
Reflectivity factor.
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Cited By (9)
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| CN109163672A (en) * | 2018-08-03 | 2019-01-08 | 广东工业大学 | A kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm |
| CN109387155A (en) * | 2017-08-10 | 2019-02-26 | 上海微电子装备（集团）股份有限公司 | Shape measure device and Shape measure method |
| WO2020056566A1 (en) * | 2018-09-17 | 2020-03-26 | 苏州大学张家港工业技术研究院 | Snapshot full-field white light interference microscopic measurement method and device thereof |
| CN111339844A (en) * | 2020-02-12 | 2020-06-26 | 天津大学 | Three-dimensional morphology demodulation method based on white light scanning interference |
| CN111692991A (en) * | 2020-06-02 | 2020-09-22 | 哈尔滨工程大学 | Point cloud data acquisition method for measuring batten bonding surface based on white light interference |
| CN111964586A (en) * | 2020-08-10 | 2020-11-20 | 中国民航大学 | White light interference signal processing method based on random noise correction |
| CN112902846A (en) * | 2021-03-22 | 2021-06-04 | 天津大学 | Position coarse acquisition method applied to wavelength modulation anti-vibration interference system |
| CN113091634A (en) * | 2021-03-01 | 2021-07-09 | 南京理工大学 | Rapid micro-morphology measuring method suitable for white light scanning interference |
| CN113465534A (en) * | 2021-06-25 | 2021-10-01 | 浙江大学 | Micro-nano deep groove structure rapid measurement method based on white light interference |
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| CN111964586A (en) * | 2020-08-10 | 2020-11-20 | 中国民航大学 | White light interference signal processing method based on random noise correction |
| CN113091634A (en) * | 2021-03-01 | 2021-07-09 | 南京理工大学 | Rapid micro-morphology measuring method suitable for white light scanning interference |
| CN112902846A (en) * | 2021-03-22 | 2021-06-04 | 天津大学 | Position coarse acquisition method applied to wavelength modulation anti-vibration interference system |
| CN112902846B (en) * | 2021-03-22 | 2022-04-19 | 天津大学 | Position coarse acquisition method applied to wavelength modulation anti-vibration interference system |
| CN113465534A (en) * | 2021-06-25 | 2021-10-01 | 浙江大学 | Micro-nano deep groove structure rapid measurement method based on white light interference |
| CN113465534B (en) * | 2021-06-25 | 2022-04-19 | 浙江大学 | Micro-nano deep groove structure rapid measurement method based on white light interference |
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