CN105371757A - Differential parallel optical chromatographic microscopic measuring device and method - Google Patents
Differential parallel optical chromatographic microscopic measuring device and method Download PDFInfo
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- CN105371757A CN105371757A CN201510707518.3A CN201510707518A CN105371757A CN 105371757 A CN105371757 A CN 105371757A CN 201510707518 A CN201510707518 A CN 201510707518A CN 105371757 A CN105371757 A CN 105371757A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
Abstract
The invention discloses a differential parallel optical chromatographic microscopic measuring device and method, and belongs to the technical fields of optical microscopic imaging and precise measurement. A dual CCD wide field differential detection method is used, an unconjugated defocus CCD imaging detection branch is introduced on the basis of single-path CCD conjugated quasi-focus imaging detection, illuminating phase-shift image fields of the structure are collected synchronously, the near defocus detection intensity image field is subtracted from the far defocus detection intensity image field to obtain distribution of the wide-field differential detection image field, differential optical theory and the Fourier optical theory are used to establish a theoretical association model between the differential intensity field and the sample surface height, and the intensity and the displaced linear calibration curve are used to realize wide field chromatographic measurement for the 3D morphology of a microstructure. The device and method can realize parallel and stereo-chromatographic rapid detection free of axial mechanical scanning, and provide a brand new effective measurement approach for non-contact, high-resolution and rapid chromatographic image and measurement of 3D surface morphology of a micromechanical, microelectronic or micro-optical micro nano device or the internal structure of a transparent sample.
Description
Technical field:
The invention belongs to optical microphotograph imaging and Technology of Precision Measurement field, particularly relate to a kind of differential type parallel optical chromatography micro-measurement apparatus and method.
Background technology:
Optical microphotograph measurement mechanism human knowledge and understand microcosmic Scientific World process in serve important impetus, middle and later periods the 1950's, Harvard University post-doctor M.Minsky has invented a kind of brand-new optical microscopy device, i.e. confocal microscope, which employs an illumination and point detects and introduces point by point scanning structure to realize sample interior three-dimensional structure three-dimensional imaging.1997, Regius professor M.A.A.Neil and T.Wilson etc. study for a long period of time on the basis of exploration in confocal microscopy field, propose Structured Illumination microtechnic (see document M.Neil, R.Juskaitis, T.Wilson.Methodofobtainingopticalsectioningbyusingstruct uredlightinaconventionalmicroscope.OpticsLetters, 1997, 22 (24): 1905-1907), this is that one carries out very little change just attainable parallel optical chromatography microtechnic in ordinary optical microscope system-based, comprise the illumination of common white radiant, without (confocal) physical pin, non-point by point scanning etc., modulated by optical stripe, the steps such as demodulation realize optical tomography, and prove its axial optics chromatography and common simple scan confocal microscope similar.
Current Structured Illumination microtechnic generally drives one dimension physical grating to produce mechanical step-scan phase shift by micro-displacement work table, cosine intensity fringes is projected to testing sample space, utilizes the grating fringe of different initial phase to modulate sample surface morphology or inner structure; Utilize CCD to detect respectively to carry the modulation light field of object structures information, general gather 3 width images after, by mathematical operation process, from detection light field, common wide field picture and confocal tomography image are isolated in demodulation.
To sum up, current Structured Illumination microtechnic is to the laminar analysis measurement of thick sample generally by carrying out mechanical step-scan realization to it, and mechanical step-scan wherein not only reduces measurement efficiency, also affects measuring accuracy.The problems referred to above limit the range of application of Structured Illumination microtechnic.
Summary of the invention:
The object of the invention is the mechanical step-scan process in order to overcome testing sample, finally realize noncontact, Non-scanning mode, the three-dimensional chromatography micro-imaging of wide field parallel optical and measurement, provide a kind of differential type parallel optical chromatography micro-measurement apparatus and method, it overcomes the mechanical step-scan of axis of testing sample by introducing wide field differential detection method, single sweep operation just can realize the three-dimensional chromatography of sample surface morphology in certain axial range ability and detect.
For achieving the above object, the present invention adopts following technical scheme to realize:
A kind of differential type parallel optical chromatography micro-measurement apparatus, comprises illumination of incoherent light light source, narrow band pass filter, one dimension transmission grating, the first pipe mirror, spectroscope, microcobjective, the second pipe mirror, spectroscope, a CCD and the 2nd CCD; Wherein,
The light sent by illumination of incoherent light light source after narrow band pass filter, one dimension transmission grating, the first pipe mirror, by dichroic mirror, focuses on object under test surface through microcobjective successively, forms illumination path; Illuminating bundle reflects by object under test, and successively after microcobjective, spectroscope, the second pipe mirror and spectroscope, illuminating bundle is divided into two-way, wherein, one road light beam focuses on the nearly focal plane place of a CCD, another road focus on the 2nd CCD away from focal plane place, formed two-way detection light path.
The present invention further improves and is, also comprises stepper motor, for controlling one dimension transmission grating transverse shifting.
The present invention further improves and is, also comprises one dimension PZT, and object under test is arranged on one dimension PZT, controls object under test move at vertical direction by one dimension PZT.
A measuring method for differential type parallel optical chromatography micro-measurement apparatus, comprises the following steps:
1) by one dimension transmission grating transverse shifting, simultaneously the illumination light that sends of illumination of incoherent light light source successively through one dimension transmission grating, the first pipe mirror, spectroscope and microcobjective by the imaging of grating fringe epitome to the focal plane place of microcobjective, form cosine intensity distributions illumination striped, the surface undulation of measuring targets is modulated;
2) object under test is by step 1) the illumination streak reflex that obtains, successively after microcobjective, spectroscope, the second pipe mirror, spectroscope, illuminating bundle is divided into two-way, wherein, one road light beam focuses on the nearly focal plane place of a CCD, another road focus on the 2nd CCD away from focal plane place, formed two-way detection light path;
3) diffraction optics and Fourier optics theory is utilized to set up Structured Illumination, by step 2) based on the two-way CCD image field that obtains, obtain wide field differential detection microscopic system and realize the theoretical model that Non-scanning mode parallel line chromatography detects, establish the fundamental relation of CCD axial defocusing amount and axial linear range, chromatography resolution.
The present invention further improves and is, step 1) in, by step motor control one dimension transmission grating transverse shifting.
The present invention further improves and is, step 1) in, control object under test by one dimension PZT and move at vertical direction.
Relative to prior art, beneficial effect of the present invention is:
A kind of differential type parallel optical chromatography micro-measurement apparatus of the present invention and method, adopt two CCD wide fields differential detection method, the wide field line chromatographic theory measurement model of Structured Illumination, out of focus, differential detection is established based on diffraction optics and Fourier optics theory, achieve and shaftlessly to detect fast to mechanical scanning, parallel, three-dimensional chromatography, overcome the mechanical step-scan problem of axis of testing sample, best axial resolution can reach several nanometer to tens nanometer magnitude (depending on the numerical aperture NA of microcobjective).The present invention can be the noncontact of the micro-nano device 3 d surface topographies such as micromechanics, microelectronics, micro-optic or transparent sample inner structure, high resolving power, flash chromatography imaging and measurement provide a new measurement by way of.
In addition, the present invention and prior art differential confocal micro-measurement apparatus and method are (see national inventing patent: the differential confocal scanning detection method with high spatial resolution, application number: CN200410006359, publication number: CN1527026A) exist and significantly distinguish: first, based on principle different, the present invention is based on Structured Illumination fringe-adjusted demodulation techniques, the confocal microscopy that prior art detects based on an illumination and point; Secondly, the present invention adopts the parallel illumination in wide field and detection, and prior art is point by point scanning Detection Techniques, and therefore, the present invention without the need to carrying out mechanical scanning to sample, thus can realize three-dimensional fast precise measurement in precision measurement process.
Accompanying drawing illustrates:
Fig. 1 is the schematic diagram of apparatus of the present invention.
Wherein: 1-illumination of incoherent light light source, 2-narrow band pass filter, 3-stepper motor, 4-one dimension transmission grating, the 5-the first pipe mirror, 6-spectroscope, 7-microcobjective, 8-object under test, 9-PZT, 10-the second pipe mirror, 11-spectroscope, the 12-the one CCD, the 13-the two CCD.
Fig. 2 is Structured Illumination differential detection wide field micro imaging system line chromatography resonse characteristic, and correspondence system parameter is microcobjective numerical aperture NA=0.65, illumination fringe period d=30.4 μm, microcobjective enlargement factor 40 times.
Embodiment:
Below in conjunction with drawings and Examples, the present invention is further detailed.
As shown in Figure 1, a kind of differential type parallel optical of the present invention chromatography micro-measurement apparatus, comprises illumination of incoherent light light source 1, narrow band pass filter 2, stepper motor 3, one dimension transmission grating 4, first pipe mirror 5, spectroscope 6, microcobjective 7, one dimension PZT9, the second pipe mirror 10, spectroscope 11, a CCD12 and the 2nd CCD13; Wherein, the light sent by illumination of incoherent light light source 1 after narrow band pass filter 2, one dimension transmission grating 4, first pipe mirror 5, is reflected by spectroscope 6 successively, focuses on object under test 8 surface on one dimension PZT9, form illumination path through microcobjective 7; Illuminating bundle reflects by object under test 8, successively after microcobjective 7, spectroscope 6, second pipe mirror 10, spectroscope 11, illuminating bundle is divided into two-way, wherein, first via light beam focuses on the nearly focal plane place of a CCD12, second tunnel focus on the 2nd CCD13 away from focal plane place, formed two-way detection light path; Described stepper motor 3 is for controlling one dimension transmission grating 4 transverse shifting; Described one dimension PZT9 moves at vertical direction for controlling object under test 8.
The measuring method of a kind of differential type parallel optical of the present invention chromatography micro-measurement apparatus, comprises the following steps:
1) stepper motor 3 controls one dimension transmission grating 4 transverse shifting, simultaneously the illumination light that sends of illumination of incoherent light light source 1 successively through one dimension transmission grating 4, first pipe mirror 5, spectroscope 6 and microcobjective 7 by the imaging of grating fringe epitome to the focal plane place of microcobjective, form cosine intensity distributions illumination striped, the surface undulation of measuring targets 8 is modulated;
2) object under test 8 is by step 1) the illumination streak reflex that obtains, successively after microcobjective 7, spectroscope 6, second pipe mirror 10, spectroscope 11, illuminating bundle is divided into two-way, wherein, first via light beam focuses on the nearly focal plane place of a CCD12, second tunnel focus on the 2nd CCD13 away from focal plane place, formed two-way detection light path;
3) diffraction optics and Fourier optics theory is utilized to set up Structured Illumination, by step 2) based on the two-way CCD image field that obtains, obtain wide field differential detection microscopic system and realize the theoretical model that Non-scanning mode parallel line chromatography detects, establish the fundamental relation of CCD axial defocusing amount and axial linear range, chromatography resolution.
Embodiment:
Present invention utilizes differential detection Structured Illumination wide field line tomography theoretical, utilize one dimension transmission grating 4 to incident quasi-parallel optical modulation in this device, formation stripe grating throws light on, then through noncoherence optics imaging filtering system by the imaging of grating fringe epitome to the focal plane place of microcobjective 7, produce cosine intensity distributions illumination striped through spatial filtering, sample surfaces is risen and fallen and modulates; The reflection sent by object under test 8 surface or scattered light are by infinity imaging system and be positioned at a CCD12 of the nearly focal plane position of the second pipe mirror 10 and carry out light intensity detection respectively away from the 2nd CCD13 of focal plane position.When first establishing accurate Jiao of CCD to detect, gather image field I
1; By the lateral attitude of the straight stripe grating of stepper motor 3 portable lighting, 1/3 and 2/3 displacement of moving grating cycle d respectively, gathers image field I respectively
2and I
3; Theoretical according to Structured Illumination microscopy tomography, have
According to formula (1), by image field I
1, I
2and I
3mathematical operation separablely obtain ordinary optical image field I
convwith chromatography image field I
sect.
Utilize scalar diffraction integral and Fourier optics theory, under obtaining incoherent illumination condition, the axial chromatography of Structured Illumination micro imaging system normalization responds I
sectu () is approximately
Wherein, J
1() is first kind first-order bessel function; Parameter w is
w＝2υ
ω(1-υ
ω/2)(3)
Wherein, υ
ω=λ M ω/sin α is normalization spatial frequency; ω=1/d is the real space frequency (d is screen periods) of one dimension illumination grating fringe; λ is lighting source centre wavelength; M is the epitome multiple of Structured Illumination system; NA=sin α is microcobjective numerical aperture; Normalization axial displacement optical coordinate u is
Carry out Structured Illumination chromatography micro-imaging to the nearly out of focus of the first via and the second great distance out of focus branch road, will there is axial translation in its chromatography response curve, approximate representation is
I
sect1,2(u)＝I
sect(u±u
c)(5)
Wherein, u
cdimensionless optical coordinate corresponding to CCD axial defocusing amount; The corresponding nearly out of focus of above formula '+', '-' is corresponding to Jiao.By I
sect1and I
sect2do calculus of differences and namely obtain differential chromatography response curve, as shown in Figure 2; Wherein, the correspondence system of curve shown in Fig. 2 parameter is microcobjective numerical aperture NA=0.65, illumination fringe period d=30.4 μm, microcobjective enlargement factor 40 times.Visible, within the scope of the middle both sides of non-cumulative curve, occurred one section of linear zone, utilize the linear corresponding relation of this linear zone and axial defocusing amount can realize parallel line laminar analysis measurement, this is ultimate principle of the present invention.
Below by reference to the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood to limit scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on the claims in the present invention basis is all protection scope of the present invention.
Claims (6)
1. a differential type parallel optical chromatography micro-measurement apparatus, it is characterized in that, comprise illumination of incoherent light light source (1), narrow band pass filter (2), one dimension transmission grating (4), the first pipe mirror (5), spectroscope (6), microcobjective (7), the second pipe mirror (10), spectroscope (11), a CCD (12) and the 2nd CCD (13); Wherein,
The light sent by illumination of incoherent light light source (1) is successively after narrow band pass filter (2), one dimension transmission grating (4), the first pipe mirror (5), reflected by spectroscope (6), focus on object under test (8) surface through microcobjective (7), form illumination path; Illuminating bundle reflects by object under test (8), successively after microcobjective (7), spectroscope (6), the second pipe mirror (10) and spectroscope (11), illuminating bundle is divided into two-way, wherein, one road light beam focuses on the nearly focal plane place of a CCD (12), another road focus on the 2nd CCD (13) away from focal plane place, formed two-way detection light path.
2. a kind of differential type parallel optical chromatography micro-measurement apparatus according to claim 1, is characterized in that, also comprise stepper motor (3), for controlling one dimension transmission grating (4) transverse shifting.
3. a kind of differential type parallel optical chromatography micro-measurement apparatus according to claim 1, it is characterized in that, also comprise one dimension PZT (9), object under test (8) is arranged on one dimension PZT (9), controls object under test (8) move at vertical direction by one dimension PZT (9).
4. the measuring method of a kind of differential type parallel optical chromatography micro-measurement apparatus according to claim 1, is characterized in that, comprise the following steps:
1) by one dimension transmission grating (4) transverse shifting, simultaneously the illumination light that sends of illumination of incoherent light light source (1) successively through one dimension transmission grating (4), the first pipe mirror (5), spectroscope (6) and microcobjective (7) by the imaging of grating fringe epitome to the focal plane place of microcobjective, form cosine intensity distributions illumination striped, the surface undulation of measuring targets (8) is modulated;
2) object under test (8) is by step 1) the illumination streak reflex that obtains, successively after microcobjective (7), spectroscope (6), the second pipe mirror (10), spectroscope (11), illuminating bundle is divided into two-way, wherein, one road light beam focuses on the nearly focal plane place of a CCD (12), another road focus on the 2nd CCD (13) away from focal plane place, formed two-way detection light path;
3) diffraction optics and Fourier optics theory is utilized to set up Structured Illumination, by step 2) based on the two-way CCD image field that obtains, obtain wide field differential detection microscopic system and realize the theoretical model that Non-scanning mode parallel line chromatography detects, establish the fundamental relation of CCD axial defocusing amount and axial linear range, chromatography resolution.
5. a kind of differential type parallel optical chromatography microscopic measuring method according to claim 4, is characterized in that, step 1) in, control one dimension transmission grating (4) transverse shifting by stepper motor (3).
6. a kind of differential type parallel optical chromatography microscopic measuring method according to claim 4, is characterized in that, step 1) in, control object under test (8) by one dimension PZT (9) and move at vertical direction.
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