CN103968779A - Super-resolution three-dimensional measurement microscope - Google Patents
Super-resolution three-dimensional measurement microscope Download PDFInfo
- Publication number
- CN103968779A CN103968779A CN201410198264.2A CN201410198264A CN103968779A CN 103968779 A CN103968779 A CN 103968779A CN 201410198264 A CN201410198264 A CN 201410198264A CN 103968779 A CN103968779 A CN 103968779A
- Authority
- CN
- China
- Prior art keywords
- light
- interference
- resolution
- super
- structured light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The invention relates to the technical field of precise measurement, in particular to a super-resolution three-dimensional measurement microscope which comprises an interference microscope body. The interference microscope body comprises a lighting module for generating collimating uniform light, the emergent light of the lighting module faces a structured light generator for generating sine structured light of different phase values, the emergent light of the structured light generator faces a beam splitter prism, and the reflected light of the beam splitter prism faces an interference objective lens. The interference objective lens enables light beams reflected by the beam split prism to be converged in the optical axis direction to irradiate a measured object, and measurement light beams reflected from the measured object interfere with reference light beams obtained inside the interference objective lens. The interference light of the measured object passes through the beam split prism, a barrel lens and a detector in sequence after returning from the interference objective lens, and the interference light is received by the detector after passing through the barrel lens. A super-resolution interference light field image is rebuilt through the structured light generator and a software algorithm.
Description
Technical field
The present invention relates to Technology of Precision Measurement field, be specifically related to interference microscope.
Background technology
Along with the development of Micrometer-Nanometer Processing Technology is progressively abundant and meticulous, microcircuit, micro optical element, micromechanics and other various microstructures constantly occur, urgent all the more to the demand of Microstructures Topography measuring system.Because grade micro-surface structure is due to the 3 D complex structure being comprised of micromechanism unit, it is measured generally all need to, by direct or indirectly micro-amplification, require to have higher lateral resolution and longitudinal frame.Simultaneously different from the measurement of smooth surface, the measurement of micro-structure surface not only will be measured surperficial roughness or flaw, also will measure surperficial profile, form variations and position deviation.
Interfering microscopy is the product that Through Optical Interference Spectra combines with microscopic system, by increase micro-amplification vision system on interferometer, has improved the lateral resolution of interferogram, and the 3 d surface topography that has enabled micro-nano structure is measured.Along with the development of computer technology, modern control technology and image processing techniques, interfere microscopy to occur that measuring accuracy reaches phase shift interference method (PSI) and the vertical scanning interferometric method (VSI) of Nano grade.Compare with other surface topography measuring method, interfere microscopy to there is quick, non-contacting advantage, and can coordinate with environment loading system the body structure surface topography measurement under vacuum, pressure, heating environment, thereby be widely applied on the body structure surface topography measurement of microelectronics, MEMS (micro electro mechanical system) and Micro-Opto-Electro-Mechanical Systems.
At 19 20 beginning of the century of end of the century Germany scientist Abbe (Abbe, 1840-1905) with British scientist Rayleigh (Rayleigh, 1842-1905) from wave theory of light, prove, in imaging optical system, due to diffraction of light effect, desirable object point is no longer desirable geometric point picture through system imaging, but there is a certain size hot spot (being Airy disk), when two object points too near to such an extent as to its image patch while overlaping, just can not tell is the picture of two object points, in optical system, exists a diffraction resolving limit.In microscopic system, this optical resolution limit is decided by the numerical aperture of microcobjective.Because microcobjective numerical aperture exists a upper limit, in visible-range, microscopical resolving limit is approximately 200nm, and trickleer like this structure just cannot be differentiated.
In interference microscope system, by phase in-migration, calculate interferometric phase, and then calculate the altitude information of three-dimensional surface face type.But lateral resolution is owing to being subject to the restriction of diffraction limit, for the higher surface profile of some fineness, what calculate is just the average of a transverse area, rather than an exact value.The surface profile restoring is like this exactly ambiguous, and concrete details just can not restore, and Here it is is resolved the result that rate limits.Due to processing and assembling capabilities limits, conventional Mirau type interferes the numerical aperture of microcobjective often can not do greatly, and therefore, the restricted problem of the lateral resolution of interference microscope is more outstanding.
From the angle of optical information processing, resolution is based on object being regarded as to the set of luminous point, and concentration of energy degree during with some imagings characterizes the image quality of optical system.And utilize optical transfer function to evaluate the image quality of optical system, be based on object being regarded as to the spectrum by various frequencies forms, namely the optical field distribution functional expansion of object become to the form of fourier series (thing function is periodic function) or fourier integral (thing function is non-periodic function).If optical system is regarded as to linear constant system, object, through optical system imaging, can be considered object after optical system is transmitted so, its transmission effect is that frequency is constant, but contrast decline, phase place will be passed, and in the cut-off of a certain frequency place, contrast is zero.It is different with the difference of frequency that the reduction of this contrast and phase place are passed, and its funtcional relationship is called as optical transfer function.It has reflected the transmission capacity of object different frequency composition in optical system.In general, the details of HFS reflection object is transmitted situation, and intermediate-frequency section reflects the level situation of object, and low frequency part reflects the profile situation of object.In interference microscope, due to the microcobjective optical system optical transfer function of restriction interfere to(for) high frequency, cause the detail section of object to be lost.
Summary of the invention
The object of the invention is to, super-resolution three-dimensional guide microscope is provided, to solve at least one above-mentioned technical matters.
Technical matters solved by the invention can realize by the following technical solutions:
Super-resolution three-dimensional guide microscope, comprise an interference microscope body, it is characterized in that, described interference microscope body comprises the lighting module of a generation collimation uniform light, the emergent light of described lighting module is towards the structured light maker of the sinusoidal light of a generation out of phase initial value, the emergent light of described structured light maker is towards an Amici prism, and the reflected light of described Amici prism is towards an interference objective;
Described interference objective makes the light beam being reflected by Amici prism in the direction of optical axis, assemble and irradiate in measured object, and make the measuring beam that obtains from measured object reflection and the inner generation of interference objective reference beams interference;
After the interference light of measured object returns from described interference objective, Amici prism described in approach, mirror, a detector successively, described interference light is detected device and receives after cylinder mirror.
The present invention realizes super-resolution by the form of structured light, by lighting module, obtains collimating uniform light; Through structured light maker, produce corresponding structured light; By Amici prism, make light path enter interference objective, the interference light that then can obtain measured object returns from interference objective; Again by Amici prism, after cylinder mirror, be detected device and receive afterwards, just can obtain being different from the interference optical field of general interference microscope.By optical interference circuit, make the measurement light of body surface reflection and the convergence of the reference light in interference objective obtain interference fringe; Through specific phase shifting method, modulate its phase place again, by the light intensity change calculations in detection interference field, go out the initial phase of each data point; Finally, utilize the relation of phase place or light intensity and height to draw surface topography.The present invention improves resolution by structured light maker, carrys out the image of rebuilding super resolution by software algorithm.
Described structured light maker is connected with a control device, and described control device can be PC terminal, generates the structured light of different light intensity out of phase initial value by described PC terminal control structured light maker.
Described lighting module comprises a lighting source, collimation lens, fly's-eye lens, collector lens, and the emergent light of described lighting source described in approach after collimation lens, described fly's-eye lens, described collector lens, forms collimation uniform light successively.
Described interference objective comprises that one for changing the annular phase shifter of interference optical field fringe phase.This annular phase shifter can combine with interference objective in the mode of optimizing.
Described interference objective adopts interference objective, can be specifically Mirau type interference objective.
As a kind of preferred version, described structured light maker is a digital micro-mirror device, is provided with a TIR prism between described lighting module and described digital micro-mirror device;
Described digital micro-mirror device comprises semiconductor chip, is placed with a matrix being comprised of micromirror on described semi-conductor chip, a pixel described in each in micromirror controlling projection picture;
Described micromirror is a catoptron.
Described micromirror can change rapidly angle under the control of digital drive signals, once receive corresponding signal, micromirror certain angle that will tilt, as 12 °, thereby changes the reflection direction of incident light.Micromirror in projection state is illustrated as " opening ", and with digital signal tilt+12 °; If micromirror, in non-projection state, is illustrated as " pass ", and tilt-12 °.Meanwhile, the incident light being reflected away under "On" state by TIR prism by image along Amici prism projection; And the incident light being reflected under "Off" state in micromirror is absorbed by light absorber.
First lighting source obtains collimating uniform light by lighting module; The uniform light of resulting collimation will incide in digital micro-mirror device with specific incident angle by the refraction of TIR prism; " opening " or the "off" state of each micro-reflector of control that by compuman is then, light will obtain corresponding intensity modulation like this, then from the vertical outgoing of digital micro-mirror device; Reflection by Amici prism afterwards makes light path enter interference objective, in interference objective, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object returns from interference objective; Again by Amici prism, after cylinder mirror, be detected device and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase initial value by digital micro-mirror device.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
As another kind of preferred version, described structured light maker is a liquid crystal display, described liquid crystal display comprises plate after at least one polarization filter header board, at least one polarization filter, and described polarization filter header board is mutually vertical with the polarization direction of plate after described polarization filter;
After described polarization filter header board and described polarization filter, between plate, be provided with a liquid crystal molecule array layer.
By electric field, can control the rotation of liquid crystal to polarization of light direction, thereby realize the control to light.
First lighting source just can obtain collimating uniform light by lighting module; The uniform light of resulting collimation can be through the transmission of liquid crystal display, the liquid crystal under each pixel of the control that is by compuman, thus by external signal, control the light that liquid crystal modulation enters, make light obtain corresponding sinusoidal light; Refraction by Amici prism afterwards makes light path enter interference objective, in interference objective, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object returns from interference objective; Again by Amici prism, after cylinder mirror, be detected device and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase value by liquid crystal display.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
As another kind of preferred version, described structured light maker is a liquid crystal on silicon, between described lighting module and described digital micro-mirror device, is also provided with an Amici prism.
First lighting source just can obtain collimating uniform light by lighting module; The uniform light of resulting collimation is refracted in liquid crystal on silicon through Amici prism, liquid crystal under each pixel of the control that we by compuman are, thereby by external signal, control the light that liquid crystal modulation enters, make light obtain corresponding sinusoidal light and the silicon by bottom reflects away; Refraction by Amici prism afterwards makes light path enter interference objective, in interference objective, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object returns from interference objective; Again by Amici prism, after cylinder mirror, be detected device and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase value by liquid crystal on silicon.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
As another kind of preferred version, described structured light maker is sinusoidal grating.Grating can make the amplitude of incident light or phase place (or both simultaneously) be subject to the periodically optical element of spatial modulation.Can only make light be subject to the grating of Modulation and Amplitude Modulation or phase-modulation, be called amplitude grating and phase grating.By working method, divide, grating can be divided into again transmission grating (transmitted light is modulated) and reflection grating (reflected light is modulated).
First lighting source just can obtain collimating uniform light by lighting module; The uniform light of resulting collimation can be through the transmission of sinusoidal grating, and we press a phase bit phase shift by the artificial control grating of controller, just can obtain the sinusoidal interference light of out of phase, make light obtain corresponding sinusoidal light; Refraction by Amici prism afterwards makes light path enter interference objective, in interference objective, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object returns from interference objective; Again by Amici prism, after cylinder mirror, be detected device and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase value by grating.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
Beam splitter makes to be irradiated to reference planes reflection and to produce reference beams (that is, reference beams is to obtain from the light beam branch of convergence) to a part for the parallel beam of measuring workpieces convergence.The reference beams of reflection is coupled with the measuring beam as obtaining from measuring workpieces reflection in the position of beam splitter.The interfering beam obtaining by measuring beam and reference beams coupling returns along the direction of optical axis direction beam splitter.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the present invention;
Fig. 2 is concrete 1 the index path of implementing of the present invention;
Fig. 3 is concrete 2 the index path of implementing of the present invention;
Fig. 4 is concrete 3 the index path of implementing of the present invention;
Fig. 5 is concrete 4 the index path of implementing of the present invention.
Embodiment
For technological means, creation characteristic that the present invention is realized, reach object and effect is easy to understand, below in conjunction with concrete diagram, further set forth the present invention.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, super-resolution three-dimensional guide microscope, comprise an interference microscope body, interference microscope body comprises the lighting module 1 of a generation collimation uniform light, the emergent light of lighting module 1 is towards the structured light maker 2 of the sinusoidal light of a generation out of phase value, the emergent light of structured light maker 2 is towards an Amici prism 3, and the reflected light of Amici prism 3 is towards an interference objective 4; Interference objective 4 makes the light beam being reflected by Amici prism 3 in the direction of optical axis, assemble and irradiate in measured object 5, and makes from measured object 5 the reflections measuring beam obtaining and the reference beams interference obtaining from interference objective 4 inside; After the interference light of measured object 5 returns from interference objective 4, approach Amici prism 3, mirror 6, a detector 7 successively, interference light is detected device 7 and receives after cylinder mirror 6.The present invention realizes super-resolution by the form of structured light, by lighting module 1, obtains collimating uniform light; Through structured light maker 2, produce corresponding structured light; By Amici prism 3, make light path enter interference objective 4, the interference light that then can obtain measured object 5 returns from interference objective 4; Again by Amici prism 3, after cylinder mirror 6, be detected device 7 and receive afterwards, just can obtain being different from the interference optical field of general interference microscope.By optical interference circuit, make the measurement light of body surface reflection and the convergence of the reference light in interference objective 4 obtain interference fringe; Through specific phase shifting method, modulate its phase place again, by the light intensity change calculations in detection interference field, go out the initial phase of each data point; Finally, utilize the relation of phase place or light intensity and height to draw surface topography.The present invention improves resolution by structured light maker 2, carrys out the image of rebuilding super resolution by software algorithm.
Structured light maker 2 is connected with a control device 32, and control device 32 can be PC terminal, generates the structured light of different light intensity by PC terminal control structured light maker 2.
Lighting module 1 comprises a lighting source, collimation lens 11, fly's-eye lens 12, collector lens 13, and the emergent light of lighting source after approach collimation lens 11, fly's-eye lens 12, collector lens 13, forms collimation uniform light successively.
Interference objective 4 comprises that one for changing the annular phase shifter of interference optical field fringe phase.This annular phase shifter can combine with interference objective 4 in the mode of optimizing.Interference objective 4 adopts Mirau type interference objective.
Concrete enforcement 1, referring to Fig. 2, structured light maker 2 is digital micro-mirror devices 21, is provided with a TIR prism 22 between lighting module 1 and digital micro-mirror device 21; Digital micro-mirror device 21 comprises semiconductor chip, is placed with a matrix being comprised of micromirror on semi-conductor chip, a pixel in each micromirror controlling projection picture; Micromirror is a catoptron.
First lighting source just can obtain collimating uniform light by lighting module 1; When on dmd chip, the deflection angle of micro-reflector is 12 °, the uniform light of resulting collimation will incide in digital micro-mirror device 21 (DMD) with 24 ° by the refraction of TIR prism 22; " opening " or the "off" state of each micro-reflector of control that by compuman is then, light will obtain corresponding intensity modulation like this, then from the vertical outgoing of digital micro-mirror device 21; Reflection by Amici prism 3 afterwards makes light path enter interference objective 4, in interference objective 4, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object 5 returns from interference objective 4; Again by Amici prism 3, after cylinder mirror 6, be detected device 7 and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase initial value by digital micro-mirror device 21.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
Concrete enforcement 2, referring to Fig. 3, structured light maker 2 is liquid crystal display 31, and liquid crystal display 31 comprises plate after at least one polarization filter header board, at least one polarization filter, and polarization filter header board is mutually vertical with the polarization direction of plate after polarization filter; After polarization filter header board and polarization filter, between plate, be provided with a liquid crystal molecule array layer.
Rotation by electric field controls liquid crystal to polarization of light direction, thus realize the control to light.
First lighting source just can obtain collimating uniform light by lighting module 1; The uniform light of resulting collimation can be through the transmission of liquid crystal display 31, the liquid crystal under each pixel of the control that is by compuman, thus by external signal, control the light that liquid crystal modulation enters, make light obtain corresponding sinusoidal light; Refraction by Amici prism 3 afterwards makes light path enter interference objective 4, in interference objective 4, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object 5 returns from interference objective 4; Again by Amici prism 3, after cylinder mirror 6, be detected device 7 and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase value by liquid crystal display 31.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
Concrete enforcement 3, referring to Fig. 4, structured light maker 2 is liquid crystal on silicon 51, is also provided with an Amici prism 3 between lighting module 1 and digital micro-mirror device 21.
First lighting source just can obtain collimating uniform light by lighting module 1; The uniform light of resulting collimation is refracted in liquid crystal on silicon 51 through Amici prism 3, liquid crystal under each pixel of the control that we by compuman are, thereby by external signal, control the light that liquid crystal modulation enters, make light obtain corresponding sinusoidal light and the silicon by bottom reflects away; Refraction by Amici prism 3 afterwards makes light path enter interference objective 4, in interference objective 4, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object 5 returns from interference objective 4; Again by Amici prism 3, after cylinder mirror 6, be detected device 7 and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase value by liquid crystal on silicon 51.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
Concrete enforcement 4, referring to Fig. 5, structured light maker 2 is sinusoidal gratings 41.Grating can make the amplitude of incident light or phase place (or both simultaneously) be subject to the periodically optical element of spatial modulation.Can only make light be subject to the grating of Modulation and Amplitude Modulation or phase-modulation, be called amplitude grating and phase grating.By working method, divide, grating can be divided into again transmission grating (transmitted light is modulated) and reflection grating (reflected light is modulated).
First lighting source just can obtain collimating uniform light by lighting module 1; The uniform light of resulting collimation can be through the transmission of sinusoidal grating 41, and we press a phase bit phase shift by the artificial control grating of controller, just can obtain the sinusoidal interference light of out of phase, make light obtain corresponding sinusoidal light; Refraction by Amici prism 3 afterwards makes light path enter interference objective 4, in interference objective 4, through beam splitter, forms two-beam, and this two-beam is irradiated to respectively reference planes and tested plane back reflection is returned, and forms optical interference at beam splitter; Then the interference optical field of measured object 5 returns from interference objective 4; Again by Amici prism 3, after cylinder mirror 6, be detected device 7 and receive afterwards, just can obtain being different from the interference image of general interference microscope, because produced the sinusoidal light of out of phase value by grating.The interference optical field numerical value finally obtaining by analysis, applies respective phase algorithm, just can obtain the super-resolution data of the microstructure of tested surface.
Beam splitter makes to produce reference beams (that is, reference beams is to obtain from the light beam branch of convergence) to the part reflection of the parallel beam of measuring workpieces convergence.The reference beams of reflection is coupled with the measuring beam as obtaining from measuring workpieces reflection in the position of beam splitter.The interfering beam obtaining by measuring beam and reference beams coupling returns along the direction of optical axis direction beam splitter.
Principle of the present invention is as follows:
From light source the light of outgoing through illuminator, structured light maker, interfere microcobjective etc. finally by detector, to be received, the interference image obtaining on detector is done the expression formula that Fourier transform obtains frequency domain and is:
In formula, G
n(f
x, f
y) be expressed as object by the Fourier transform of interference image after optical system, f
xand f
yit is x and the y direction glazing spatial frequency values when by optical system.G
n(f
x, f
y) and noise N
n(f
x, f
y) obtain the Fourier transform of the interference optical field that final detector obtains after stack
under sinusoidal structured optical illumination, the interference image frequency domain representation of object under test is:
In formula, H
1and H
2optical transfer function, the G of illumination and imaging system
0the Fourier transform of the light field of object own, f
0that structured light is in the spatial frequency of object light field.In formula (2), can find out first
the light field space frequency that normal exactly optical system can receive; Suppose f
cthe cutoff spatial frequency being limited by system optics transport function, is greater than f
cor be less than-f
chigh frequency spatial frequency information can not reach image planes; Second portion
be that object light field spatial frequency is mixed with light structures light frequency, centre frequency has been become to f
x-f
0, what be now originally locked is greater than spatial frequency f
ccomposition just moved in the optical transfer function scope of system, form super-resolution imaging; Third part is also similarly, and the spatial frequency translation of symmetrical another side is entered within the scope of the optical transfer function of optical system.
In order to obtain super-resolution data, we just can combine this 3 part by algorithm by suitable mode, obtain the high and low frequency information of object simultaneously, thereby obtain meticulousr interference optical field image.In the present invention, apply out of phase initial value
structured Illumination obtain the different image of three width, such as the phase place initial value that can adopt
be 0,
obtain 3 images of describing with formula (2),, by three equations of correspondence, finally by calculating, can calculate G
0(f
x, f
y), restore the super-resolution interference image of object, now the data that can obtain super-resolution of x direction just only.We can adopt the Structured Illumination of y direction by y direction is done to same processing, obtain similar formula, and then obtain the super-resolution data in y direction.The super-resolution interference image of comprehensive x direction and y direction, can obtain the super-resolution interference optical field of whole image.After this, then in conjunction with annular phase shifter work, can obtain the super-resolution interference optical field of interference objective when differing heights, by phase shift interference method, process these super-resolution interference optical field images and can obtain super-resolution three-dimensional surface profile measurement result.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that in above-described embodiment and instructions, describes just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (8)
1. super-resolution three-dimensional guide microscope, comprise an interference microscope body, it is characterized in that, described interference microscope body comprises the lighting module of a generation collimation uniform light, the emergent light of described lighting module is towards the structured light maker of the sinusoidal light of a generation out of phase initial value, the emergent light of described structured light maker is towards an Amici prism, and the reflected light of described Amici prism is towards an interference objective;
Described interference objective makes the light beam being reflected by Amici prism in the direction of optical axis, assemble and irradiate in measured object, and makes the measuring beam obtaining from measured object reflection and the reference beams interference obtaining from interference objective inside;
After the interference light of measured object returns from described interference objective, Amici prism described in approach, mirror, a detector successively, described interference light is detected device and receives after cylinder mirror.
2. super-resolution three-dimensional guide microscope according to claim 1, it is characterized in that, described lighting module comprises a lighting source, collimation lens, fly's-eye lens, collector lens, the emergent light of described lighting source described in approach after collimation lens, described fly's-eye lens, described collector lens, forms collimation uniform light successively.
3. super-resolution three-dimensional guide microscope according to claim 1, is characterized in that, described interference objective comprises that one for changing the annular phase shifter of interference optical field fringe phase.
4. super-resolution three-dimensional guide microscope according to claim 1, is characterized in that, described structured light maker is a digital micro-mirror device, is provided with a TIR prism between described lighting module and described digital micro-mirror device;
Described digital micro-mirror device comprises semiconductor chip, is placed with a matrix being comprised of micromirror on described semi-conductor chip, a pixel described in each in micromirror controlling projection picture;
Described micromirror is a catoptron.
5. super-resolution three-dimensional guide microscope according to claim 1, it is characterized in that, described structured light maker is a liquid crystal display, described liquid crystal display comprises plate after at least one polarization filter header board, at least one polarization filter, and described polarization filter header board is mutually vertical with the polarization direction of plate after described polarization filter;
After described polarization filter header board and described polarization filter, between plate, be provided with a liquid crystal molecule array layer.
6. super-resolution three-dimensional guide microscope according to claim 1, is characterized in that, described structured light maker is a liquid crystal on silicon, between described lighting module and described digital micro-mirror device, is also provided with an Amici prism.
7. super-resolution three-dimensional guide microscope according to claim 1, is characterized in that, described structured light maker is sinusoidal grating.
8. according to the super-resolution three-dimensional guide microscope described in claim 4,5,6 or 7, it is characterized in that, described structured light maker is connected with a control device, described control device is PC terminal, generates the structured light of different light intensity out of phase initial value by described PC terminal control structured light maker.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410198264.2A CN103968779A (en) | 2014-05-12 | 2014-05-12 | Super-resolution three-dimensional measurement microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410198264.2A CN103968779A (en) | 2014-05-12 | 2014-05-12 | Super-resolution three-dimensional measurement microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103968779A true CN103968779A (en) | 2014-08-06 |
Family
ID=51238580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410198264.2A Pending CN103968779A (en) | 2014-05-12 | 2014-05-12 | Super-resolution three-dimensional measurement microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103968779A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104296660A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Microcosmic smooth free-form surface sample measurement device and method based on structured light method |
| CN104501739A (en) * | 2014-12-16 | 2015-04-08 | 上海理工大学 | Multimode interference confocal microscope system |
| CN104599322A (en) * | 2015-02-16 | 2015-05-06 | 杭州清渠科技有限公司 | Super-resolution three-dimensional image reconstruction method based on fly-eye lens |
| CN105136059A (en) * | 2015-05-26 | 2015-12-09 | 东莞市盟拓光电科技有限公司 | Three-dimensional measuring system capable of reducing light reflection on surface of measured object |
| CN106580265A (en) * | 2017-01-24 | 2017-04-26 | 青岛大学 | Three-dimensional imaging device for detecting human body microvascular ultramicrostructure |
| CN107796330A (en) * | 2017-09-30 | 2018-03-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of white light interference measuring three-dimensional morphology optical system |
| CN108600582A (en) * | 2018-03-23 | 2018-09-28 | 哈尔滨理工大学 | Three-dimensional image forming apparatus based on Digital Micromirror Device |
| CN110044262A (en) * | 2019-05-09 | 2019-07-23 | 哈尔滨理工大学 | Contactless precision measuring instrument and measurement method based on image super-resolution rebuilding |
| CN110243310A (en) * | 2015-05-20 | 2019-09-17 | 脸谱科技有限责任公司 | For using object polygon to generate the method and system of light pattern |
| CN111258049A (en) * | 2020-02-20 | 2020-06-09 | 清华大学 | Miniaturized three-dimensional wide-field tomography device |
| CN112762859A (en) * | 2020-12-22 | 2021-05-07 | 四川大学 | High-precision three-dimensional measuring device for sine stripe structured light of non-digital optical machine |
| CN113899320A (en) * | 2021-09-30 | 2022-01-07 | 中国科学院光电技术研究所 | High-precision micro-nano three-dimensional morphology measurement method based on spatial structure light field |
| CN113932735A (en) * | 2021-11-25 | 2022-01-14 | 成都信息工程大学 | Three-dimensional surface shape vertical measurement method, device and medium based on rotary grating projection |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5471303A (en) * | 1994-04-29 | 1995-11-28 | Wyko Corporation | Combination of white-light scanning and phase-shifting interferometry for surface profile measurements |
| US6028670A (en) * | 1998-01-19 | 2000-02-22 | Zygo Corporation | Interferometric methods and systems using low coherence illumination |
| CN2559004Y (en) * | 2002-06-12 | 2003-07-02 | 麦克奥迪实业集团有限公司 | Microscope lighting device |
| CN1614457A (en) * | 2004-11-30 | 2005-05-11 | 哈尔滨工业大学 | Confocal interference microscope with high-space resolution imaging ability |
| CN1737494A (en) * | 2004-08-19 | 2006-02-22 | 财团法人工业技术研究院 | Surface profile analytical method for object needing measure |
| CN201050978Y (en) * | 2007-06-15 | 2008-04-23 | 西安普瑞光学仪器有限公司 | Precise distribution device for surface shape of white light interferometry sample |
| CN101661159A (en) * | 2008-08-25 | 2010-03-03 | 麦克奥迪实业集团有限公司 | Two-dimensional modulation technique-based method for acquiring shear-layer images |
-
2014
- 2014-05-12 CN CN201410198264.2A patent/CN103968779A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5471303A (en) * | 1994-04-29 | 1995-11-28 | Wyko Corporation | Combination of white-light scanning and phase-shifting interferometry for surface profile measurements |
| US6028670A (en) * | 1998-01-19 | 2000-02-22 | Zygo Corporation | Interferometric methods and systems using low coherence illumination |
| CN2559004Y (en) * | 2002-06-12 | 2003-07-02 | 麦克奥迪实业集团有限公司 | Microscope lighting device |
| CN1737494A (en) * | 2004-08-19 | 2006-02-22 | 财团法人工业技术研究院 | Surface profile analytical method for object needing measure |
| CN1614457A (en) * | 2004-11-30 | 2005-05-11 | 哈尔滨工业大学 | Confocal interference microscope with high-space resolution imaging ability |
| CN201050978Y (en) * | 2007-06-15 | 2008-04-23 | 西安普瑞光学仪器有限公司 | Precise distribution device for surface shape of white light interferometry sample |
| CN101661159A (en) * | 2008-08-25 | 2010-03-03 | 麦克奥迪实业集团有限公司 | Two-dimensional modulation technique-based method for acquiring shear-layer images |
Non-Patent Citations (2)
| Title |
|---|
| PETER LEHMANN等: "Measurement of rectangular edge and grating structures using extended low-coherence interometry", 《PROC. OF SPIE》 * |
| PETER LEHMANN等: "Measurementofrectangularedgeandgratingstructuresusingextendedlow-coherenceinterferometry", 《PROC. OF SPIE》 * |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104296660A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Microcosmic smooth free-form surface sample measurement device and method based on structured light method |
| CN104501739A (en) * | 2014-12-16 | 2015-04-08 | 上海理工大学 | Multimode interference confocal microscope system |
| CN104599322A (en) * | 2015-02-16 | 2015-05-06 | 杭州清渠科技有限公司 | Super-resolution three-dimensional image reconstruction method based on fly-eye lens |
| CN110243310A (en) * | 2015-05-20 | 2019-09-17 | 脸谱科技有限责任公司 | For using object polygon to generate the method and system of light pattern |
| CN110243310B (en) * | 2015-05-20 | 2021-11-02 | 脸谱科技有限责任公司 | Method and system for generating light patterns using polygonal objects |
| CN105136059A (en) * | 2015-05-26 | 2015-12-09 | 东莞市盟拓光电科技有限公司 | Three-dimensional measuring system capable of reducing light reflection on surface of measured object |
| CN106580265A (en) * | 2017-01-24 | 2017-04-26 | 青岛大学 | Three-dimensional imaging device for detecting human body microvascular ultramicrostructure |
| CN106580265B (en) * | 2017-01-24 | 2023-10-24 | 青岛大学 | Three-dimensional imaging device for detecting human body microvascular ultrastructure |
| CN107796330B (en) * | 2017-09-30 | 2018-09-21 | 中国科学院长春光学精密机械与物理研究所 | A kind of white light interference measuring three-dimensional morphology optical system |
| CN107796330A (en) * | 2017-09-30 | 2018-03-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of white light interference measuring three-dimensional morphology optical system |
| CN108600582A (en) * | 2018-03-23 | 2018-09-28 | 哈尔滨理工大学 | Three-dimensional image forming apparatus based on Digital Micromirror Device |
| CN110044262A (en) * | 2019-05-09 | 2019-07-23 | 哈尔滨理工大学 | Contactless precision measuring instrument and measurement method based on image super-resolution rebuilding |
| CN111258049A (en) * | 2020-02-20 | 2020-06-09 | 清华大学 | Miniaturized three-dimensional wide-field tomography device |
| CN112762859A (en) * | 2020-12-22 | 2021-05-07 | 四川大学 | High-precision three-dimensional measuring device for sine stripe structured light of non-digital optical machine |
| CN112762859B (en) * | 2020-12-22 | 2022-08-09 | 四川大学 | High-precision three-dimensional measuring device for sine stripe structured light of non-digital optical machine |
| CN113899320A (en) * | 2021-09-30 | 2022-01-07 | 中国科学院光电技术研究所 | High-precision micro-nano three-dimensional morphology measurement method based on spatial structure light field |
| CN113899320B (en) * | 2021-09-30 | 2023-10-03 | 中国科学院光电技术研究所 | High-precision micro-nano three-dimensional morphology measurement method based on spatial structure light field |
| CN113932735A (en) * | 2021-11-25 | 2022-01-14 | 成都信息工程大学 | Three-dimensional surface shape vertical measurement method, device and medium based on rotary grating projection |
| CN113932735B (en) * | 2021-11-25 | 2023-12-22 | 成都信息工程大学 | Method, device and medium for vertical measurement of three-dimensional surface shape based on rotary grating projection |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103968779A (en) | Super-resolution three-dimensional measurement microscope | |
| Hu et al. | Microscopic fringe projection profilometry: A review | |
| CN102589416B (en) | Wavelength scanning interferometer and method for aspheric measurement | |
| US9858671B2 (en) | Measuring apparatus for three-dimensional profilometry and method thereof | |
| US5548403A (en) | Phase shifting diffraction interferometer | |
| CN108844492B (en) | Microstructure morphology measurement method and device based on spectral modulation degree depth coding | |
| CN109975820B (en) | Linnik type interference microscope-based synchronous polarization phase shift focus detection system | |
| CN102289152B (en) | Optical system wave aberration detection device | |
| CN107036552A (en) | A kind of cross-scale surface topography measurement device and method based on optical phase shift | |
| CN103983206A (en) | Interference microscope system based on programmable illumination | |
| CN103115585B (en) | Based on fluorescence interference microscopic measuring method and the device of stimulated radiation | |
| CN103115582B (en) | Based on the Michelson fluorescence interference micro-measurement apparatus of stimulated radiation | |
| CN102175189B (en) | Central error measuring system of dual beam interferometer | |
| CN103115583B (en) | Based on the Mirau fluorescence interference micro-measurement apparatus of stimulated radiation | |
| KR100916593B1 (en) | A 3D Shape Measuring System in Real Time | |
| US10989524B2 (en) | Asymmetric optical interference measurement method and apparatus | |
| CN103913961A (en) | Coaxial focus-detecting device based on light beam wavefront modulation | |
| CN105783776A (en) | Device and method of measuring surface topography based on double-wave surface interference fringe array | |
| CN109458959B (en) | Variable-inclination-angle phase-shift grazing incidence interferometer measuring device and method | |
| CN110160443B (en) | Optical fiber point diffraction interference device and method for transient three-coordinate measurement | |
| Huang et al. | Collimated phase measuring deflectometry | |
| Xiong et al. | Specular surface deformation measurement based on projected-speckle deflectometry with digital image correlation | |
| RU2536764C1 (en) | Method of interference microscopy | |
| CN112504164A (en) | Measuring device and method capable of dynamically measuring surface shape of planar optical element | |
| CN102012561A (en) | Method and system for realizing phase shift in laser interference lithography |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Wan Xinjun Inventor after: Zhu Weichao Inventor after: Yang Bo Inventor after: Jie Shuping Inventor after: Shu Xinwei Inventor after: Guo Xin Inventor after: Zhang Chenhao Inventor after: Yue Lin Inventor before: Wan Xinjun Inventor before: Zhu Weichao Inventor before: Yang Bo |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: WAN XINJUN ZHU WEICHAO YANG BO TO: WAN XINJUN ZHU WEICHAO YANG BO JIE SHUPING SHU XINWEI GUO XIN ZHANG CHENHAO YUE LIN |
|
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140806 |