CN105783776A - Device and method of measuring surface topography based on double-wave surface interference fringe array - Google Patents
Device and method of measuring surface topography based on double-wave surface interference fringe array Download PDFInfo
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- CN105783776A CN105783776A CN201610259777.9A CN201610259777A CN105783776A CN 105783776 A CN105783776 A CN 105783776A CN 201610259777 A CN201610259777 A CN 201610259777A CN 105783776 A CN105783776 A CN 105783776A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention discloses a device and a method of measuring a surface topography based on a double-wave surface interference fringe array. Based on a shearing interference self-reference interference principle, a fully-optical path sharing, simple, compact, stable and reliable structure is built, thereby realizing convenient and stable path sharing shearing; and a software system comprising an image acquisition part, an image processing part and a measurement result display part is built at the same time, and thus, the overall measurement system carries out precise surface topography measurement under coordinated control of an operator and a computer. Online measurement on the precisely-processed surface shape can be realized, conditions are created for surface quality online monitoring and further adaptive surface quality control, and an important role is played in high-precision surface processing in development and applications of microelectronic processing, MEMS, optoelectronic information technology, aerospace technology and other high technology fields.
Description
Technical field
The invention belongs to object surface appearance field of measuring technique, be specifically related to the design of a kind of surface figure measuring device based on double wave face interference fringe array and method.
Background technology
In the industrial production, due to the needs of design and test, the surface profile of various complicated shapes and size are usually required test, thus judging that whether product is qualified and improved.Object three-dimensional contour outline is measured and is widely used in many fields such as measurement technology, reverse engineering, complex object three-dimensional modeling.Owing to the importance in numerous application, high-resolution and real-time three-dimensional measurement have become as important research topic, for instance the measuring three-dimensional morphology etc. of the various complex parts such as detection waveguide photodetector processing technique detection.And process waveguide photodetector due to be spatial complex thin-wall curved-surface, job design amount is big, efficiency is low, the quality of its processing technique directly affects the performance of detector, therefore studies waveguide photodetector topography measurement is necessary.Wherein, method relative to traditional spot measurement, the advantage of area-structure light technology is in that to be easily achieved, data process and are prone to automatization, there is higher certainty of measurement and measuring speed faster, but it is limited by the precision of digital raster, still cannot meet the measurement requirement of waveguide photodetector micron level.Fast development along with technology such as microelectronics, microelectromechanical-systems (MEMS), opto-electronic information technology and aeronautical and space technologies, Surface Quality, as the surface quality requirements such as optical element surface, silicon wafer surface, the contour fine information matrix of disk and other precision assembly parts are just steadily improving, it is proposed to and realize a kind of surface accurate measuring method and become particularly important.
Measuring three-dimensional morphology is with laser interferance method for representative, having longer developing history, typical method is based on Michelson Interference Principle, and two-way light produces to interfere through two reflective surface, one reflecting surface is standard reflection mirror, and a reflecting surface is the surface needing to measure.Interference image cameras record, processes gauging surface coordinate through computer digital image.It is illustrated in figure 1 the surface topography measuring method schematic diagram based on laser interferance method.The light that laser instrument sends becomes directional light after expanding instrument and expanding, then through polarization beam splitting device, it is divided into the two orthogonal S light of bundle direction of vibration and P light, polarized light P reflects through quarter wave plate through plane of reference plane mirror, polarized light S is projected in body surface through quarter wave plate, is divided into two bundle direction of vibration mutually perpendicular S light such as former polarized light the same with P light.After again passing by quarter wave plate, S light becomes P light, and P light becomes S light, owing to the direction of vibration of two-beam is identical, will not interfere, before camera, add rotatable polariser, make two-beam interfere, by polariser being rotated successively 45 °, interference fringe is phase shift 90 ° successively, i.e. four-stepped switching policy, thus obtaining four width phase shifted images, utilize relative theory to solve acquisition and block phase place, thus restoring the pattern of object.
The method is owing to mainly utilizing the principle of Michelson's interferometer, and therefore vertical survey scope is subject to the restriction of wavelength, it is impossible to exceed half-wavelength, and when exceeding half wavelength, just None-identified measures scope is how many times of wavelength.
The topography measurement method based on white light scanning that development in recent years is got up is another kind of topography measurement method, as shown in Figure 2, utilize white point light source, light produces aberration after lens, the light of different wavelength separately after incides sample surface, be positioned at hypersensitive detector system in the symmetric position of white light source for receiving the light after sample diffuse-reflectance.By common focusing principle, detector system can only receive the light of the specific wavelength that single-point reflects, thus obtaining the vertical dimension of these some distance lens, scans sample surfaces successively, thus obtaining the pattern of object.
The method has following two shortcomings: (1), owing to adopting the mode of spot scan, therefore the measuring speed of the method is very slow.(2) the enough little and required precision of detector is higher of white point light source requirements, costly；Additionally, due to detector is placed on the position symmetrical with point source, light path system is relatively difficult to build.
Summary of the invention
The invention aims to solve surface topography measuring method of the prior art measurement scope limited by wavelength, and the problem that measuring speed is slower, it is proposed that a kind of surface figure measuring device based on double wave face interference fringe array and method.
The technical scheme is that the surface figure measuring device based on double wave face interference fringe array, including computer, digital-to-analogue conversion card, phase-shifter, drive circuit, laser instrument, interference fringe array generation module and the micro-acquisition module of image；Computer, digital-to-analogue conversion card, drive circuit, laser instrument, interference fringe array generation module are sequentially connected with, and the input of phase-shifter connects digital-to-analogue conversion card, and outfan connecting laser, computer is connected with the micro-acquisition module of image.
Preferably, interference fringe array generation module includes the lens, the first parallel flat and the second parallel flat that are sequentially located on laser light path.
Preferably, the first parallel flat is through coating film treatment, and the one side near laser instrument is full-trans-parent film, and another side is part reflective semitransparent film.
Preferably, the second parallel flat is through coating film treatment, and the one side near laser instrument is part reflective semitransparent film, and another side is the film that is all-trans.
Preferably, the micro-acquisition module of image includes interconnective ccd image sensor and microscope.
Present invention also offers the surface topography measuring method based on double wave face interference fringe array, comprise the following steps:
S1, computer send digit pulse modulation signal to digital-to-analogue conversion card；
Digit pulse is modulated signal and is converted to analog pulse modulation signal by S2, digital-to-analogue conversion card；
S3, drive circuit are modulated signal according to analog pulse and laser instrument are modulated；
The light beam that S4, laser instrument send produces interference fringe array by interference fringe array generation module, and is incident upon testee surface；
The interference fringe array image on testee surface is carried out microscopic processing by S5, microscope, simultaneous computer controls the interference fringe array image after ccd image sensor synchronous acquisition microscopic processing, the interference fringe array image that interference fringe array image is phase shift 0 ° of definition initial time collection；
S6, computer pass through digital-to-analogue conversion card control phase-shifter, produce phase shift 90 °, the interference fringe array image of 180 ° and 270 ° respectively；
S7, ccd image sensor gather the phase shift 0 ° after microscopic processing, the four width interference fringe array images of 90 °, 180 ° and 270 ° respectively；
Four width interference fringe array images are smoothed by S8, computer, obtain background interference striped array image and interference fringe array image that four width are modulated by object height；
What testee asked for by S9, computer blocks phase place；
S10, computer carry out Phase-un-wrapping, thus reducing object surface appearance.
Further, step S8 adopt the method for medium filtering and mean filter four width interference fringe array images are smoothed.
Further, step S10 adopt trigon principle carry out Phase-un-wrapping, thus reducing object surface appearance.
The invention has the beneficial effects as follows:
(1) present invention adopts phase-shifter that laser instrument is carried out phase shift, obtain the four width interference fringe array images of 0 °, 90 °, 180 ° and 270 °, and solved by this four width image obtain testee surface topography block phase place, carry out Phase-un-wrapping again thus reducing object surface appearance, it is achieved that the not large range measuring of Stimulated Light device wavelength restriction.
(2) present invention carries out measuring surface form based on double wave face interference fringe array image, efficiently solves the problem that the measuring speed measured in prior art and cause is slow by spot scan.
(3) present invention eliminates the interference of veiling glare in measurement process, improves the definition of striped, eliminates a part of error, thus improve certainty of measurement.
Accompanying drawing explanation
Fig. 1 is the surface topography measuring method schematic diagram based on laser interferance method of prior art.
Fig. 2 is the topography measurement Method And Principle figure based on white light scanning of prior art.
Fig. 3 is the surface figure measuring device structural representation based on double wave face interference fringe array provided by the invention.
Fig. 4 is the interference fringe array generation modular structure schematic diagram of the embodiment of the present invention.
Fig. 5 is the surface topography measuring method flow chart based on double wave face interference fringe array provided by the invention.
Fig. 6 is the principle of interference schematic diagram of the embodiment of the present invention.
Fig. 7 be the embodiment of the present invention microscope under amplify the laser interferencefringes array image of 100 times.
Fig. 8 is the phase shift 0 ° of the embodiment of the present invention, the four width interference fringe array images of 90 °, 180 ° and 270 °.
The trigonometry that utilizes that Fig. 9 is the embodiment of the present invention carries out Phase-un-wrapping schematic diagram.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the invention are further described.
The invention provides a kind of surface figure measuring device based on double wave face interference fringe array, as it is shown on figure 3, include computer, digital-to-analogue conversion card, phase-shifter, drive circuit, laser instrument, interference fringe array generation module and the micro-acquisition module of image；Computer, digital-to-analogue conversion card, drive circuit, laser instrument, interference fringe array generation module are sequentially connected with, and the input of phase-shifter connects digital-to-analogue conversion card, and outfan connecting laser, computer is connected with the micro-acquisition module of image.
Wherein, computer is used for modulating laser instrument transmitting laser beam, interference fringe array image is carried out micro-and gathers, and restoring object surface appearance by the interference fringe array image after micro-by the control micro-acquisition module of image.
Digital-to-analogue conversion card is converted into analogue signal for the digital signal sent by computer.
Laser instrument is modulated by drive circuit for the pulse-modulated signal sent according to computer.
Phase-shifter realizes the phase shift of interference fringe for controlling laser instrument.
As shown in Figure 4, interference fringe array generation module includes the lens, the first parallel flat and the second parallel flat that are sequentially located on laser light path.Lens are positioned over after laser instrument, the beam spread that laser instrument is launched are come.First parallel flat, through coating film treatment, is 45 ° of angles with laser light path, and wherein A face is full-trans-parent film when incident (45 ° absorbance T >=99%), and B face is part reflective semitransparent film.Second parallel flat, equally also through coating film treatment, is perpendicular to laser light path and arranges, and wherein C face is part reflective semitransparent film, and D face is the film that is all-trans (during vertical incidence reflectance R >=99%).
The micro-acquisition module of image includes interconnective ccd image sensor and microscope.Wherein microscope is for carrying out microscopic processing to the interference fringe array image on testee surface, and ccd image sensor is used for the interference fringe array image after gathering microscopic processing.
Present invention also offers a kind of surface topography measuring method based on double wave face interference fringe array, as it is shown in figure 5, comprise the following steps:
S1, computer send digit pulse modulation signal to digital-to-analogue conversion card.
Digit pulse is modulated signal and is converted to analog pulse modulation signal by S2, digital-to-analogue conversion card.
S3, drive circuit are modulated signal according to analog pulse and laser instrument are modulated.
The light beam that S4, laser instrument send produces interference fringe array by interference fringe array generation module, and is incident upon testee surface, and its detailed process is as follows:
As shown in Figure 4, the light beam that laser instrument is launched is through lens and the first parallel flat, incide the second parallel flat and form two bundle coherent lights through former and later two faces (C face and D face), this two bundles coherent light is then through the reflection in B face in the first parallel flat, thus interfering in space, it is thus achieved that the laser interferencefringes array that stable and contrast is high.It is incident upon testee surface, is formed interference fringe array image OAOBOCOD。
As shown in Figure 6, in the embodiment of the present invention, the light beam of actual laser output is approximately Gaussian beam, two bundle Gaussian beams are formed, at 1, space M (x, y after the reflection and refraction of the second parallel flat, z) two Gaussian beam spherical waves interfere, and form accurate interference fringe array.
The interference fringe array image on testee surface is carried out microscopic processing by S5, microscope, simultaneous computer controls the interference fringe array image after ccd image sensor synchronous acquisition microscopic processing, the interference fringe array image that interference fringe array image is phase shift 0 ° of definition initial time collection.
Owing to interfering light to be dispersed in space in Fig. 4, therefore from the first parallel flat more away from fringe-width more wide, fringe spacing is more big, and tetragon OAOBOCODFringe spacing very narrow, reached micron level, therefore we need tetragon OAOBOCODIt is micro-that interior optical coupling enters to carry out in microscope image.Fig. 7 shows the laser interferencefringes array of figure amplifying 100 times under microscope.
S6, computer pass through digital-to-analogue conversion card control phase-shifter, produce phase shift 90 °, the interference fringe array image of 180 ° and 270 ° respectively.Phase shift 0 °, 90 °, 180 ° and 270 ° four width interference fringe array images as shown in Figure 8.
S7, ccd image sensor gather the phase shift 0 ° after microscopic processing, the four width interference fringe array images of 90 °, 180 ° and 270 ° respectively.
Four width interference fringe array images are smoothed by S8, computer, obtain background interference striped array image and interference fringe array image that four width are modulated by object height.
In the embodiment of the present invention, adopt the method for medium filtering and mean filter that four width interference fringe array images are smoothed.Owing to medium filtering and mean filter are the conventional process in image processing field, therefore its detailed process does not repeat them here.
What testee asked for by S9, computer blocks phase place.
Shown in fundamental-mode gaussian beam field expression formula such as formula (1):
Wherein c is invariant, and i is imaginary number, and the meaning of all the other each symbols is:
Wherein ω0Back radius for fundamental-mode gaussian beam；(x, y, z) for any coordinate of space；λ is wavelength；K is wave vector；F is the confocal parameter of Gaussian beam；R (z) for intersecting at the radius of curvature of the Gaussian beam equiphase surface of z point with propagation axis；ω (z) is for intersecting at the spot radius on the Gaussian beam equiphase surface of z point with propagation axis.
By the fundamental-mode gaussian beam field of the interference fringe array image that formula (1) can be modulated by object height in the hope of four width, respectively φO0,φO90,φO180,φO270, wherein subscript O represents with object.
Phase place is blocked again through what formula (2) obtained testee:
S10, computer carry out Phase-un-wrapping, thus reducing object surface appearance.
In the embodiment of the present invention, adopting trigon principle to carry out Phase-un-wrapping, thus reducing object surface appearance, trigon concrete principle is as follows:
As shown in Figure 9, D and E is video camera and the optical center of double; two wavefront interferometer respectively, O is the projection on XOY face (also referred to as the plane of reference) of the D point, d is the distance at double; two wavefront interferometer and camera optics center, being the distance between DE, l is the distance between the plane of reference and video camera, and in measurement system, DE is parallel to the plane of reference, C is any point on body surface, and C ' is C projection on the plane of reference.
By interference fringe array measurement volume, Δ ACC '～Δ AEO ', following formula is therefore had to set up:
For the interference fringe array along a direction mechanical periodicity, it will be assumed that interference fringe array, along X-direction, for any point (X, Y) its phase place on the plane of reference isFollowing formula is then had to set up:
In formulaFor the phase place of O point, T is the cycle of interference fringe array.
Again because of Δ BCC '～Δ BDO, so there being following formula to set up:
Simultaneous formula (3), (5) can obtain:
Obtained by formula (4) again:
WhereinThe respectively phase value of A point and B point, brings in formula (6) can obtain formula (7) formula:
Formula (8) is phase place and the relational expression of height, l in formula, T, d is known parameter, because the phase place of B point is owing to being distorted in measurement process, so that what camera obtained is the phase value of A point, as long as therefore obtaining A, the phase value that B is 2 can solve the phase value of C point, thus obtaining the height of object C point.
Phase unwrapping formula is utilized to launch the phase place of blocking in formula (2),Wherein (x, y) for integer, represents that (x, y) 2 corresponding π integral multiples, owing to the object measured is micro-nano structure to pixel, so the k in testee generally can be only small to k.Will obtain continuous phase ψ (x, y) substitutes in formula (8), even Δ ψ=ψ (x, y), just reducible go out object pattern.
Those of ordinary skill in the art is it will be appreciated that embodiment described here is to aid in reader understanding's principles of the invention, it should be understood that protection scope of the present invention is not limited to such special statement and embodiment.Those of ordinary skill in the art can make various other various concrete deformation and combination without departing from essence of the present invention according to these technology disclosed by the invention enlightenment, and these deformation and combination remain in protection scope of the present invention.
Claims (8)
1. based on the surface figure measuring device of double wave face interference fringe array, it is characterised in that include computer, digital-to-analogue conversion card, phase-shifter, drive circuit, laser instrument, interference fringe array generation module and the micro-acquisition module of image；Described computer, digital-to-analogue conversion card, drive circuit, laser instrument, interference fringe array generation module are sequentially connected with；The input of described phase-shifter connects digital-to-analogue conversion card, outfan connecting laser；Described computer is connected with the micro-acquisition module of image.
2. the surface figure measuring device based on double wave face interference fringe array according to claim 1, it is characterised in that described interference fringe array generation module includes the lens, the first parallel flat and the second parallel flat that are sequentially located on laser light path.
3. the surface figure measuring device based on double wave face interference fringe array according to claim 2, it is characterised in that described first parallel flat is through coating film treatment, and the one side near laser instrument is full-trans-parent film, and another side is part reflective semitransparent film.
4. the surface figure measuring device based on double wave face interference fringe array according to claim 2, it is characterised in that described second parallel flat is through coating film treatment, and the one side near laser instrument is part reflective semitransparent film, and another side is the film that is all-trans.
5. the surface figure measuring device based on double wave face interference fringe array according to claim 1, it is characterised in that the described micro-acquisition module of image includes interconnective ccd image sensor and microscope.
6. based on the surface topography measuring method of double wave face interference fringe array, it is characterised in that comprise the following steps:
S1, computer send digit pulse modulation signal to digital-to-analogue conversion card；
Digit pulse is modulated signal and is converted to analog pulse modulation signal by S2, digital-to-analogue conversion card；
S3, drive circuit are modulated signal according to analog pulse and laser instrument are modulated；
The light beam that S4, laser instrument send produces interference fringe array by interference fringe array generation module, and is incident upon testee surface；
The interference fringe array image on testee surface is carried out microscopic processing by S5, microscope, simultaneous computer controls the interference fringe array image after ccd image sensor synchronous acquisition microscopic processing, the interference fringe array image that interference fringe array image is phase shift 0 ° of definition initial time collection；
S6, computer pass through digital-to-analogue conversion card control phase-shifter, produce phase shift 90 °, the interference fringe array image of 180 ° and 270 ° respectively；
S7, ccd image sensor gather the phase shift 0 ° after microscopic processing, the four width interference fringe array images of 90 °, 180 ° and 270 ° respectively；
Four width interference fringe array images are smoothed by S8, computer, obtain background interference striped array image and interference fringe array image that four width are modulated by object height；
What testee asked for by S9, computer blocks phase place；
S10, computer carry out Phase-un-wrapping, thus reducing object surface appearance.
7. the surface topography measuring method based on double wave face interference fringe array according to claim 6, it is characterised in that adopt the method for medium filtering and mean filter that four width interference fringe array images are smoothed in described step S8.
8. the surface topography measuring method based on double wave face interference fringe array according to claim 6, it is characterised in that adopt trigon principle to carry out Phase-un-wrapping in described step S10, thus reducing object surface appearance.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108562239A (en) * | 2018-01-10 | 2018-09-21 | 北京理工大学 | A kind of interference with common path striped grenade instrumentation |
| CN111750799A (en) * | 2019-03-29 | 2020-10-09 | 南京理工大学 | Interference illumination-based five-dimensional information measuring device and method for spectrum polarization morphology |
| CN113011439A (en) * | 2021-03-19 | 2021-06-22 | 中国科学院长春光学精密机械与物理研究所 | Method for extracting displacement information of interference fringes |
| CN114705133A (en) * | 2022-04-15 | 2022-07-05 | 电子科技大学 | System and method for detecting three-dimensional surface shape of mirror surface with discontinuous height |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1078557A (en) * | 1992-05-15 | 1993-11-17 | 中国科学院上海光学精密机械研究所 | Omnibearing light beam tester |
| CN2646683Y (en) * | 2002-12-23 | 2004-10-06 | 中国科学院上海光学精密机械研究所 | Double-shear wave surface interferometer |
| CN102353332A (en) * | 2011-06-28 | 2012-02-15 | 山东大学 | Electronic speckle-interference digital-compensating method and system thereof |
| CN103105236A (en) * | 2013-01-18 | 2013-05-15 | 电子科技大学 | Method for detecting phase of liquid crystal space optical phase modulator |
| CN103727901A (en) * | 2014-01-14 | 2014-04-16 | 中国科学院长春光学精密机械与物理研究所 | Wavelength phase-shifting method based inter-planar parallelism detection method |
| CN204177342U (en) * | 2014-08-28 | 2015-02-25 | 哈尔滨工程大学 | A kind of phase shift point diffraction interference pick-up unit based on reflection grating |
| CN104713489A (en) * | 2015-02-04 | 2015-06-17 | 中国船舶重工集团公司第七一一研究所 | Three-dimensional moire interferometer and material surface measuring method |
-
2016
- 2016-04-25 CN CN201610259777.9A patent/CN105783776A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1078557A (en) * | 1992-05-15 | 1993-11-17 | 中国科学院上海光学精密机械研究所 | Omnibearing light beam tester |
| CN2646683Y (en) * | 2002-12-23 | 2004-10-06 | 中国科学院上海光学精密机械研究所 | Double-shear wave surface interferometer |
| CN102353332A (en) * | 2011-06-28 | 2012-02-15 | 山东大学 | Electronic speckle-interference digital-compensating method and system thereof |
| CN103105236A (en) * | 2013-01-18 | 2013-05-15 | 电子科技大学 | Method for detecting phase of liquid crystal space optical phase modulator |
| CN103727901A (en) * | 2014-01-14 | 2014-04-16 | 中国科学院长春光学精密机械与物理研究所 | Wavelength phase-shifting method based inter-planar parallelism detection method |
| CN204177342U (en) * | 2014-08-28 | 2015-02-25 | 哈尔滨工程大学 | A kind of phase shift point diffraction interference pick-up unit based on reflection grating |
| CN104713489A (en) * | 2015-02-04 | 2015-06-17 | 中国船舶重工集团公司第七一一研究所 | Three-dimensional moire interferometer and material surface measuring method |
Non-Patent Citations (4)
| Title |
|---|
| 埃里克•P. 古德温等: "《光学检测干涉》", 31 August 2014, 浙江大学出版社 * |
| 彭仁军: "激光干涉成像技术研究", 《中国优秀博士学位论文全文数据库基础科学辑》 * |
| 王海斗等: "《表面残余应力检测技术》", 30 September 2013 * |
| 陈海燕等: "《激光原理和技术》", 31 December 2011 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108562239A (en) * | 2018-01-10 | 2018-09-21 | 北京理工大学 | A kind of interference with common path striped grenade instrumentation |
| CN111750799A (en) * | 2019-03-29 | 2020-10-09 | 南京理工大学 | Interference illumination-based five-dimensional information measuring device and method for spectrum polarization morphology |
| CN113011439A (en) * | 2021-03-19 | 2021-06-22 | 中国科学院长春光学精密机械与物理研究所 | Method for extracting displacement information of interference fringes |
| CN114705133A (en) * | 2022-04-15 | 2022-07-05 | 电子科技大学 | System and method for detecting three-dimensional surface shape of mirror surface with discontinuous height |
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Application publication date: 20160720 |