CN102175189B - Central error measuring system of dual beam interferometer - Google Patents
Central error measuring system of dual beam interferometer Download PDFInfo
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- CN102175189B CN102175189B CN201110038569A CN201110038569A CN102175189B CN 102175189 B CN102175189 B CN 102175189B CN 201110038569 A CN201110038569 A CN 201110038569A CN 201110038569 A CN201110038569 A CN 201110038569A CN 102175189 B CN102175189 B CN 102175189B
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Abstract
The invention relates to a central error measuring system of a dual beam interferometer, and the central error measuring system comprises a laser device, a collimating lens, a polarizer, a Wollaston prism, a lens, a spectroscope, a first lambda/4 wave plate, a reference reflector, an upper adjustable reflector, a lower adjustable reflector, a lower fixed reflector, an upper fixed reflector, a second lambda/4 wave plate, an analyzer, an imaging lens, a CCD (Charge Coupled Device) camera, a computer and a precision rotary table. The central error measuring system provided by the invention can be used for simultaneously measuring the central errors on the front and rear surfaces of spherical surface and axial symmetrical aspheric surface lenses and has the advantages of high measuring accuracy and simplicity in operation.
Description
Technical field
The present invention relates to a kind of two-beam interference lens center error measuring system, be used for sphere and axisymmetric aspheric surface lens front and rear surfaces errors of centration are measured, belong to field of optical measuring technologies.
Background technology
Each discrete component of optical system heart quality is directly connected to the final image quality of total system, it is one of high quality optical imaging system subject matter that need solve.
The measurement means of present optical centre error is main with optical measurement still.Mainly contain alignment measurement and interference and compare and measure two big types of measuring methods.Interfere comparative measurement method based on principle of interference; The measuring beam and the reference beam that utilize the measured lens surface to be reflected produce interference; Situation of change through observation and recording interference fringe obtains the relation of errors of centration and moving interference fringes number, thereby comes the errors of centration of measurement of Lens.Compare to the alignment measurement method, interfere to compare and measure advantages such as method has fast, high precision.
Changchun optical precision optical machinery and always debuging of physics Institute's design promptly are based on the errors of centration that principle of interference is measured sphere and axisymmetric aspheric surface lens surface to heart interferometer, and the measuring principle of this instrument is as shown in Figure 1.The light that light source (laser instrument) sends is through focusing collimating mirror, polaroid, catoptron and half pentaprism; Incide on the polarization beam splitter prism; On the beam-splitting surface of polarization beam splitter prism; The reflection of part transmittance another part light, thus two-beam formed, and this two-beam is inciding mirror M behind more than half pentaprisms and λ/4 wave plates
1And M
2On, the adjustment catoptron impinges perpendicularly on by the surface of microscopy light, and light beam returns by former road.Light beam passes through λ/4 wave plates twice, and 90 ° of change of polarized direction, the two-beam that reflects are combined into a branch of light again behind polarization beam splitter prism, interferes through analyzer, receives this interference fringe with ccd video camera, on monitor, observes change of interference fringes.During measurement, be placed on the precise rotating platform by microscopy, interferometer is placed on the portal frame of turntable top.If do not overlapped with the rotating shaft of precise rotating platform by the microscopy optical axis; Then when turntable rotates; Being had relative displacement by two luminous point places of microscopy, on monitor, can be observed striped and be moved, note the mobile number of striped; Calculate the relative shift at two luminous point places, and then can know by the offset of microscopy.
Not enough below this instrument exists: in clamping process, can only measure the errors of centration on the single surface of lens, efficiency of measurement is not high; In single measured surface errors of centration measuring process, need two catoptrons of twice adjustment so that measuring beam is vertical with measured surface, complex operation; In measuring process, also need know the distance between two measuring beams and the lens surface intersection, and the measurement of this distance value is directly perceived inadequately and degree of accuracy is not high yet; This instrument is mainly used the measurement of heavy caliber (Φ 200mm～Φ 500mm) lens center error.
Summary of the invention
The technical matters that the present invention mainly solves is: the deficiency that overcomes prior art; A kind of two-beam interference lens center error measuring system is provided; Can measure sphere and axisymmetric aspheric surface lens front and rear surfaces errors of centration simultaneously, efficiency of measurement is high, and simple to operate.
The scheme that the present invention solves the problems of the technologies described above is: two-beam interference lens center error measuring system comprises: laser instrument 1, collimating mirror 2, the polarizer 3, wollaston prism 4, lens 5, spectroscope 6, a λ/4 wave plate 7, reference mirror 8, go up adjustable mirror 9, down adjustable mirror 10, down stationary mirror 11, go up stationary mirror 12, the 2nd λ/4 wave plate 13, analyzer 14, imaging lens 15, CCD camera 16, computing machine 17 and micro swivel 18; The laser beam that laser instrument 1 sends is after collimating mirror 2 expands bundle; Outgoing laser beam is changed into linearly polarized light and incide on the wollaston prism 4 through the polarizer 3; Wollaston prism 4 is divided into the mutually perpendicular linearly polarized light in two bundle polarization directions with certain angle with incident laser, and this linearly polarized light changes two bundle directional lights into through lens 5 again; Above-mentioned two-beam is divided into reference beam and measuring beam through spectroscope 6, and reference beam incides on the reference mirror 8 behind a λ/4 wave plates 7, and by reference mirror 8 reflections, reference beam passes through a λ/4 wave plates, 7 rear polarizer directions for twice and changes 90 °; Last measuring beam is behind the 2nd λ/4 wave plates 13; Through last stationary mirror 12 glancing incidences to last adjustable mirror 9; Adjustment is gone up adjustable mirror 9 and is made that upward measuring beam impinges perpendicularly on the upper surface of measured lens 19 and returns along former road then; Twice of last measuring beam changes 90 ° through the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; Following measuring beam is behind the 2nd λ/4 wave plates 13; Through descending stationary mirror 11 glancing incidences to following adjustable mirror 10; Then adjustment down adjustable mirror 10 make that measuring beams impinge perpendicularly on the lower surface of measured lens 19 and return along former road down, twice of following measuring beam changes 90 ° through the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; Aforementioned two groups of interfering beams obtain two groups of interference fringes respectively behind analyzer 14; Through after imaging lens 15 imagings, interference fringe is received by CCD camera 16, rotates micro swivel 18 then again; Computing machine 17 shows and the change of interference fringes of record through observing, and calculates the measurement result of lens front and rear surfaces errors of centration.
Principle of the present invention: the laser beam that laser instrument is sent is divided into reference beam and measuring beam; Make measuring beam impinge perpendicularly on measured lens surface and returned and interfere through the adjustment adjustable mirror with reference beam by former road; When there is errors of centration in the measured lens surface; At lens in the rotating process of precise rotating platform axis; Thereby the variation that can cause optical path difference between reference beam and the measuring beam causes moving of interference fringe, through observing the direction and the variation of number that moves with recording interference fringe, passes through mathematical computations again and can obtain the relation between optical path difference, measured lens centre of surface error and the moving interference fringes number three.
Errors of centration computing method of the present invention: as shown in Figure 3; α representes to impinge perpendicularly on the measuring beam on measured lens surface and the angle of surface level; θ representes the angle of measuring beam and surface level, and L representes that the measured point arrives the distance of micro swivel axis, and R representes the radius-of-curvature on measured lens surface; H is illustrated in the precise rotating platform turning course; The variation of measured point height, Δ are illustrated in the process that micro swivel circles for 18 times, and the center on measured lens surface is along micro swivel 18 maximum displacement radially.Can get by relation among Fig. 3: α=π-2 θ, at Δ O
1O
2Utilize the cosine law to have among the A:
(R+H)
2＝R
2+Δ
2-2RΔcos(π-α)＝R
2+Δ
2-2RΔcos2θ
Because Δ is indivisible, so omit Δ
2, can solve:
Because 2R＞＞H, so can omit H
2, thereby have:
The relation that moves number by optical path difference and striped again can get: 2H=K λ, and K representes the number of lens moving interference fringes in turning course in the formula, the operation wavelength of the laser instrument that λ representes to be adopted, the substitution following formula can get:
So the errors of centration C of lens is:
Can know that from following formula the errors of centration of lens and measured point have nothing to do to the distance at work table rotation center and the radius-of-curvature of tested sphere.
The angle deviator γ that can calculate the lens center error according to the lens center margin of error C that is calculated is:
The present invention has following advantage compared with prior art:
(1) in the errors of centration measuring process on the single surface of lens, only needs catoptron of adjustment, thereby make measuring operation obtain simplifying.
(2) can select tested sphere through selecting measuring beam.
(3) measure in the time of can be to lens front and rear surfaces errors of centration, thereby improved the efficient of measuring.
(4) corner with the measuring beam catoptron replaces the measurement of measured point to the distance of work table rotation axis, compares with the latter and more easily corner is measured accurately.
(5) can adapt to the measurement of small-bore optical element errors of centration through collimating mirror to the diameter of laser beam with to the adjustment of regulating reflection mirror angle up and down, thereby enlarge measurement range.
(6) measuring beam catadioptric number of times in optical system is few, helps reducing the loss of luminous energy, the contrast of high interference fringe.
(7) relative positional accuracy between each optical element is less demanding, thus the designing requirement that helps lowering apparatus with bring convenience for making and debuging.
Figure of description
Fig. 1 is the optical schematic diagram of prior art;
Fig. 2 is an optical system schematic diagram of the present invention;
Fig. 3 is an errors of centration schematic diagram calculation of the present invention;
Fig. 4 is a measuring process synoptic diagram of the present invention;
The synoptic diagram of Fig. 5 for concerning between moving interference fringes direction of the present invention and number and the micro swivel corner.
Embodiment
As shown in Figure 2, two-beam interference of the present invention lens center error measuring system comprises: laser instrument 1, collimating mirror 2, the polarizer 3, wollaston prism 4, lens 5, spectroscope 6, a λ/4 wave plate 7, reference mirror 8, go up adjustable mirror 9, down adjustable mirror 10, down stationary mirror 11, go up stationary mirror 12, the 2nd λ/4 wave plate 13, analyzer 14, imaging lens 15, CCD camera 16, computing machine 17 and micro swivel 18.The laser beam that laser instrument 1 sends is after collimating mirror 2 expands bundle; Outgoing laser beam is changed into linearly polarized light and incide on the wollaston prism 4 through the polarizer 3; Wollaston prism 4 is divided into incident laser and has certain angle the mutually perpendicular linearly polarized light in two bundle polarization directions of (as 5 °, 10 °, 15 °, 20 ° etc.), and this linearly polarized light changes two bundle directional lights into through lens 5 again; Above-mentioned two-beam is divided into reference beam and measuring beam through spectroscope 6, and reference beam reenters and is mapped on the reference mirror 8 behind a λ/4 wave plates 7, and by reference mirror 8 reflections, and twice of reference beam changes 90 ° through a λ/4 wave plates, 7 rear polarizer directions; Last measuring beam is behind the 2nd λ/4 wave plates 13; Through last stationary mirror 12 glancing incidences to last adjustable mirror 9; Adjustment is gone up adjustable mirror 9 and is made that upward measuring beam impinges perpendicularly on the upper surface of measured lens 19 and returns along former road then; Twice of last measuring beam changes 90 ° through the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; Following measuring beam is behind the 2nd λ/4 wave plates 13; Through descending stationary mirror 11 glancing incidences to following adjustable mirror 10; Then adjustment down adjustable mirror 10 make that measuring beams impinge perpendicularly on the lower surface of measured lens 19 and return along former road down, twice of following measuring beam changes 90 ° through the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; Aforementioned two groups of interfering beams obtain two groups of interference fringes respectively behind analyzer 14; Through after imaging lens 15 imagings, interference fringe is received by CCD camera 16, rotates micro swivel 18 then again; Computing machine 17 shows and the change of interference fringes of record through observing, and utilizes aforesaid formula (1), (2) to calculate the measurement result of the angle deviator of lens front and rear surfaces errors of centration and measurement of Lens errors of centration.
(1), adjusts the diameter of laser beam through collimating mirror 2 according to the diameter of measured lens.
(2) the upper and lower adjustable mirror of adjustment is so that measuring beam impinges perpendicularly on lens surface to be measured.
(3) rotate micro swivel, observe the change of interference fringes that computing machine shows and writes down.Some stripeds that relate to do not have tangible moving, and explain that then measured lens surface curvature center overlaps with the precision stage centre of gyration.Some stripeds that relate to change with micro swivel centre of gyration angle of revolution, explain that then measured lens surface curvature center does not have and the precision stage centre of gyration overlaps, and promptly have errors of centration.As shown in Figure 4, the A point is a measurement point, and O is the centre of gyration of precision stage, and O ' is the center of curvature on measured lens surface.When precision stage around 0 when revolution, O ' can be successively twice through straight line AO, and meet at an O ' respectively
1, O '
2, these 2 respectively corresponding maximum and minimum light path differences, thus also with Fig. 5 curve on two extreme points corresponding.According in the micro swivel turning course, the maximum changes delta K of number of interference fringes purpose
Max, and utilize aforesaid formula (1), (2) to calculate the measurement result of the angle deviator of lens front and rear surfaces errors of centration and lens center error.
The present invention does not set forth part in detail and belongs to techniques well known.
Claims (1)
1. two-beam interference lens center error measuring system is characterized in that comprising: laser instrument (1), collimating mirror (2), the polarizer (3), wollaston prism (4), lens (5), spectroscope (6), a λ/4 wave plates (7), reference mirror (8), go up adjustable mirror (9), down adjustable mirror (10), down stationary mirror (11), go up stationary mirror (12), the 2nd λ/4 wave plates (13), analyzer (14), imaging lens (15), CCD camera (16), computing machine (17) and micro swivel (18); The laser beam that laser instrument (1) sends is after collimating mirror (2) expands bundle; Outgoing laser beam is changed into linearly polarized light and incide on the wollaston prism (4) through the polarizer (3); Wollaston prism (4) is divided into the mutually perpendicular linearly polarized light in two bundle polarization directions with certain angle with incident laser, and this linearly polarized light changes two bundle directional lights into through lens (5) again; Above-mentioned two bundle directional lights are divided into reference beam and measuring beam through spectroscope (6); Reference beam is behind a λ/4 wave plates (7); Incide on the reference mirror (8), and by reference mirror (8) reflection, reference beam passes through a λ/4 wave plates (7) rear polarizer direction for twice and changes 90 °; Last measuring beam is behind the 2nd λ/4 wave plates (13); Through last stationary mirror (12) glancing incidence to last adjustable mirror (9); Adjustment is gone up adjustable mirror (9) and is made that upward measuring beam impinges perpendicularly on the upper surface of measured lens (19) and returns along former road then; Twice of last measuring beam changes 90 ° through the 2nd λ/4 wave plates (13) rear polarizer direction, and converges with reference beam and interfere; Following measuring beam is behind the 2nd λ/4 wave plates (13); On adjustable mirror (10) under stationary mirror (11) glancing incidence arrives down; Then adjustment down adjustable mirror (10) make that measuring beam impinges perpendicularly on the lower surface of measured lens (19) and returns along former road down, twice of following measuring beam changes 90 ° through the 2nd λ/4 wave plates (13) rear polarizer direction, and converges with reference beam and interfere; Aforementioned two groups of interfering beams obtain two groups of interference fringes respectively behind analyzer (14); After passing through imaging lens (15) imaging again, interference fringe is received by CCD camera (16), rotates micro swivel (18) then; Computing machine (17) shows and the change of interference fringes of record through observing, and calculates the measurement result of lens front and rear surfaces errors of centration.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102707452B (en) * | 2012-07-02 | 2014-07-16 | 北京理工大学 | Double separation wollaston prism high-resolution simultaneous polarization-imaging system |
| CN103144036B (en) * | 2012-12-31 | 2015-07-22 | 南京理工大学 | Grinding amount on-line monitoring device at ring-polishing stage and grinding amount on-line monitoring method |
| CN104567752A (en) * | 2015-01-19 | 2015-04-29 | 复旦大学 | Stray light elimination dual-optical-path optical centering instrument |
| CN104949819A (en) * | 2015-06-30 | 2015-09-30 | 福建师范大学 | Surface deviation detection device and method based on polarization interference |
| CN110243573B (en) * | 2018-03-07 | 2022-12-20 | 扬明光学股份有限公司 | Optical device for measurement and measurement method thereof |
| CN112882184B (en) * | 2021-01-18 | 2023-01-06 | 之江实验室 | Double-beam real-time center alignment and stabilization device and method |
| CN113108691B (en) * | 2021-04-13 | 2022-12-27 | 南京中安半导体设备有限责任公司 | Measuring device and measuring method |
| CN113203553B (en) * | 2021-04-22 | 2023-07-14 | 西安工业大学 | Lens center error measuring system and measuring method |
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| JP4880513B2 (en) * | 2007-03-29 | 2012-02-22 | 富士フイルム株式会社 | Method and apparatus for measuring surface deviation of aspherical lens |
| DE102007043803A1 (en) * | 2007-09-13 | 2009-04-09 | Vistec Semiconductor Systems Gmbh | Device and method for determining the spatial position of moving elements of a coordinate measuring machine |
| CN101226344B (en) * | 2008-01-31 | 2010-06-02 | 上海微电子装备有限公司 | Apparatus and method for measuring optical system parameter |
| CN101793500B (en) * | 2010-01-13 | 2011-08-03 | 北京理工大学 | Method and device for measuring central thickness of differential confocal lens |
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| 牛轶杰等.透镜中心误差测量系统.《电子测量技术》.2005,(第5期),5-6. * |
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