CN104567752A - Stray light elimination dual-optical-path optical centering instrument - Google Patents

Stray light elimination dual-optical-path optical centering instrument Download PDF

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Publication number
CN104567752A
CN104567752A CN201510024956.XA CN201510024956A CN104567752A CN 104567752 A CN104567752 A CN 104567752A CN 201510024956 A CN201510024956 A CN 201510024956A CN 104567752 A CN104567752 A CN 104567752A
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China
Prior art keywords
light
measured
optical
analyzer
optics
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CN201510024956.XA
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Chinese (zh)
Inventor
刘为森
徐敏
王军华
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Fudan University
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Fudan University
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Priority to CN201510024956.XA priority Critical patent/CN104567752A/en
Publication of CN104567752A publication Critical patent/CN104567752A/en
Priority to PCT/CN2016/071372 priority patent/WO2016116036A1/en
Priority to GB1617404.7A priority patent/GB2539844B/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0221Testing optical properties by determining the optical axis or position of lenses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Geometry (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention belongs to the technical field of optical assembly, and particularly relates to a stray light elimination dual-optical-path optical centering instrument. The stray light elimination dual-optical-path optical centering instrument is composed of a photoelectric detector, an autocollimator, a polarizer, a polarization beam splitter, a polarization analyzer, a pancratic telescope, a computer platform and the like. The polarization beam splitter divides parallel light provided by the autocollimator into reflected S light and transmitted P light. The S light passes the polarization analyzer and is focused to the curvature center of the upper surface of a measured lens of an optical part to be measured through the focusing telescope. The P light is reflected through a plane mirror, passes the polarization analyzer and then is focused to the curvature center of the lower surface of the measured lens through the focusing telescope. The photoelectric detector captures crisscross images of reflected light in two optical paths, the computer platform calculates the center deviation of the measured lens, and the lens is adjusted according to the center deviation of the lens for calibration and centering. The stray light elimination dual-optical-path optical centering instrument is low in cost, high in measurement accuracy, and capable of measuring the center deviation of the two measured surfaces of the optical part at the same time and efficiently and quickly achieving calibration of the center deviation.

Description

Eliminate stray light double light path optical centering instrument
Technical field
The invention belongs to optics mounting technology field, be specifically related to a kind of can measurement the centre deviation of the axis optical parts in optical system and the instrument corrected in determining.
Background technology
Precision optical system (as photo-etching machine objective lens, aerial survey camera lens, standard telescope etc.) is more and more higher to the requirement of lens imaging quality in recent years.Deviation is had, i.e. centre deviation between the optical axis of eyeglass and axis of reference during system assembling.The existence of centre deviation fundamentally destroys the theoretical foundation-coaxial theory of optical design, causes the astigmatism of imaging and the asymmetry of distortion, thus reduces image quality.Optical centering instrument is the indispensable surveying instrument of precise engineering surveying optical system centre deviation, and during optics is fixed, precision is about 100 times of the fixed middle method of machinery, and it is in optical lens bonding, optical system bulk cargo school and all play an important role in detecting.
Centering apparatus conventional at present generally adopts monochromatic light road reflective measurement, this method needs to measure former and later two measuring surface of eyeglass successively, rear measuring surface centre deviation measured value is the composite value of eyeglass two measuring surface centre deviations, need by solving the centre deviation obtaining rear measuring surface, because the accuracy of after this measuring surface is always by the impact of pre-test planar survey accuracy, cause the cumulative effect of error.Double light path optical centering instrument directly can measure the centre deviation of eyeglass two measuring surface, thus eliminates the impact of pre-test face accuracy on rear measuring surface accuracy, solves error accumulation problem.
The light beam transmission optics to be measured of a double light path optical centering instrument light path, will form strong veiling glare in another light path, produces interference, even can flood information light to the information light of this light path.Utilize polarization beam apparatus to produce two orthogonal linearly polarized light light paths in polarization direction, and in double light path, adopt analyzer orthogonal design can eliminate the interference of veiling glare to information light.Two optical paths all use the turning axle of air bearing rotating platform as reference axle, and the centre deviation of two light path measurements all shows in same photodetector, and identical normative reference is conducive to reducing align measurement error.Only produce double light path with an autocollimator and realize double light path with a photodetector and measure simultaneously, with low cost, and improve efficiency surely.
During the assembling of optical system eyeglass, roundness measuring equipment detects the reset case of optics to be measured, complicated operation, reset inefficiency.After during optical system first eyeglass is fixed, determines the quick detection also reset rapidly that can be realized optics to be measured when middle assembling follow-up eyeglass determined by China National Instruments Import & Export Corporation by lower light path with double light path, improve the fixed middle efficiency of entirety.
Summary of the invention
The object of the present invention is to provide a kind of cost of manufacture low, measuring accuracy is high, and can measure optics two measuring surface centre deviation simultaneously, thus realizes the optical centering instrument of centre deviation correction rapidly.
Optical centering instrument provided by the invention, its structure as shown in Figure 1, by photodetector 1, autocollimator 2, the polarizer 3, polarization beam apparatus 4, three plane mirrors 5,13,14, three analyzers 6,7,8, two closely pancratic telescopes 9,10, air bearing rotating platform 12, roundness measuring equipment 15, computer platform 16 form; Described autocollimator carries the directional light of cross image signal for providing, produce linearly polarized light to the polarizer 3, and produces the orthogonal S light in polarization direction and P light by polarization beam apparatus 4; S light through the first analyzer 6, second analyzer 7 and by second closely pancratic telescope 10 focus on the optics to be measured 11 be fixed on air bearing rotating platform 12 survey the center of curvature of upper lens surface; P light reflected through the 3rd analyzer 8 by the first plane mirror 5 and by first closely pancratic telescope 9 focus on the surveyed eyeglass lower surface center of curvature; S light and P light are reflected by surveyed eyeglass upper and lower surface, and absorb the cross image signal of reflected light by photodetector 1, computer platform 16 computational analysis survey the centre deviation of eyeglass, according to center of lens deviation adjusting eyeglass carry out correction fixed in; Roundness measuring equipment 15 is for the alignment of the lens barrel and air bearing rotating platform 12 that detect optics 11 to be measured.
In the present invention, described photodetector 1 can be CCD, CMOS or other photodetector.Described photodetector can absorb reflection S light and the cross image signal of transmission P light simultaneously, in the same coordinate system, measure the centre deviation that institute surveys eyeglass upper and lower surface simultaneously, raising centre deviation measuring accuracy.
In the present invention, rotating the polarizer 3 can be polaroid, Nicol prism etc.Natural light can be become linearly polarized light by the described polarizer, can change the beam intensity ratio of reflection S light and transmission P light by rotating this polarizer.
In the present invention, a branch of linearly polarized light is divided into the orthogonal reflection in polarization direction S light and transmission P light by polarization beam apparatus 4.The schematic diagram of polarization beam apparatus 4 as shown in Figure 2, light beam A is from polarization beam apparatus M1 end face vertical incidence, and after the M2 beam splitting of polarization beam splitting face, P light is from end face M3 vertical exit, S light is from end face M4 vertical exit, and P light and S light are the orthogonal linearly polarized light in polarization direction.
In the present invention, described analyzer is polaroid.The analyzer of reflection S light and transmission P light light path is orthogonal, and above-mentioned analyzer shakes thoroughly, direction is identical with P light polarization direction with S light respectively.By the reflection S light of optics to be measured not by the analyzer in transmission P light light path, in like manner by the analyzer in transmission S light light path, thus the interference of veiling glare to information light can not be eliminated by the reflected P light of optics to be measured.Specifically, first analyzer 6 direction that thoroughly shakes is identical with the S light polarization direction of the M4 end face outgoing of polarization beam apparatus 4, second analyzer 7 can change the light intensity of S light, the second analyzer 7 and the first analyzer 6 thoroughly shake direction parallel time S light light intensity maximum, time orthogonal, S light light intensity is minimum; By the corresponding situation of two cross image signals in the second rotation analyzer 7 resolved light electric explorer 1 with the eyeglass two measuring surface center of curvature.First analyzer 6 and the 3rd analyzer 8 orthogonal, therefore by the S light of UUT 11 not by the 3rd analyzer 8; In like manner can not pass through the first analyzer 6 by the P light of UUT 11, thus eliminate the interference of veiling glare to information light.
In the present invention, described in rotation, closely pancratic telescope can change its focal length, thus reflection S light and transmission P light are focused on the center of curvature of the measured surface of optics to be measured.Described two closely pancratic telescope structure is as shown in Figure 3, positive lens in structure a, L1, L2 common optical axis, F1, F2 are respectively the focal position of L1, L2, H1 is lens L1, L2 distance along optical axis, when focal position F1, F2 overlap, directional light incidence closely pancratic telescope 3 emergent light is also directional light.Change the convergent point that distance H1 can change outgoing beam, namely can change the focal length of closely pancratic telescope.In like manner in structure b, L7 is negative lens, changes the focal length that distance H2 also can change closely pancratic telescope.Described in rotation, closely pancratic telescope can change its focal length, thus reflection S light and transmission P light are focused on the center of curvature of measuring surface.
In the present invention, optics 11 to be measured is made up of lens barrel and eyeglass, and roundness measuring equipment 15 detects the alignment of optics 11 lens barrel to be measured and air bearing rotating platform 12, and shows at computer platform 16.
In the present invention, described air bearing rotating platform 12 has light hole, and has leveling aligning objective table, and objective table is used for fixing optics 11 to be measured.
In the present invention, described computer platform for analyzing photodetector cross image signal, calculate optics to be measured survey centre deviation and the process roundness measuring equipment testing result on surface.
In the present invention, reflection S light and transmission P light all use air bearing rotating platform 12 turning axle as with reference to axle, decrease align measurement error.
In the present invention, only need an autocollimator 2 can provide the light beam of two light paths, reduce cost.
In the present invention, only need a photodetector 1 can show the information of S light and P light, information processing does not need coordinate conversion to decrease measuring error, reduces cost simultaneously.
In the present invention, the turning axle of air bearing rotating platform 12 is as S light and P light collective reference axle, and common axis of reference decreases transmission error during data processing, can eliminate the interference of strong veiling glare.
Eliminate stray light double light path optical centering instrument provided by the invention, can detect optics two measuring surface centre deviation simultaneously, improves and detects fixed middle efficiency.
Eliminate stray light double light path optical centering instrument provided by the invention, can detect optics two measuring surface centre deviation simultaneously, solves monochromatic light road and determines China National Instruments Import & Export Corporation measurement time error accumulation problem, improve centre deviation measuring accuracy.
When the present invention's assembling is containing the optics of multiple eyeglass, can detect with P light and realize the Rapid reset of optics 11 to be measured, replacement roundness measuring equipment 15 detects the reset case of optics 11 to be measured, reduces operation easier, improves detection efficiency.
Accompanying drawing explanation
Fig. 1 is the structural drawing of eliminate stray light double light path optical centering instrument.
Fig. 2 is the schematic diagram of polarization beam apparatus 4.
Fig. 3 is the structural drawing of closely pancratic telescope 9,10.
Fig. 4 is a kind of structural drawing of optics 11 to be measured.
Number in the figure: 1 is photodetector; 2 is autocollimator; 3 is the polarizer; 4 is polarization beam apparatus; 5,13,14 is plane mirror; 6,7,8 is analyzer; 9,10 is closely pancratic telescope; 11 is optics to be measured; 12 is air bearing rotating platform; 15 is roundness measuring equipment; 16 computer platforms; M1, M3, M4 are three end faces of polarization beam apparatus 4; M2 is the polarization beam splitting face of polarization beam apparatus 4; L1, L2, L3 are positive lens; L4 is negative lens; F1, F2, F3, F4 are respectively the focal position of L1, L2, L3, L4; H1 is eyeglass L1, L2 distance along optical axis; H2 is eyeglass L3, L4 distance along optical axis; K1, K2 are eyeglass; E is lens barrel; O1, O2 are the center of curvature of eyeglass K1 upper and lower surface; O4, O3 are the center of curvature of eyeglass K2 upper and lower surface; D1 is the line of O1, O2; D2 is the line of O3, O4; D3 is the rotation axes of symmetry of lens barrel E.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
Fig. 4 is a kind of structure of optics 11 to be measured, be made up of lens barrel E and eyeglass K1, K2, wherein O1, O2 are the center of curvature of eyeglass K1 upper and lower surface, O3, O4 are the center of curvature of eyeglass K2 upper and lower surface, D1 is the line of O1, O2 and the optical axis of eyeglass K1, D2 is the line of O3, O4 and the optical axis of eyeglass K2, and D3 is the rotation axes of symmetry of lens barrel E.Concrete steps are as follows:
1) be fixed on air bearing rotating platform 12 by optics 11 to be measured, rotary air bearings turntable 12 also detects the lens barrel of optics 11 to be measured and the alignment of air bearing rotating platform 12 with roundness measuring equipment 15;
2) finely tune the position of optics 11 to be measured, make the lens barrel of optics 11 to be measured and the alignment of air bearing rotating platform 12 converge to allowed tolerance gradually;
3) regulate closely pancratic telescope 10 to make S light focus on the center of curvature O4 of eyeglass K2 upper surface, regulate closely pancratic telescope 9 to make P light focus on the center of curvature O3 of eyeglass K2 lower surface;
4) the cross picture absorbed by photodetector 1 is observed by computer platform 16, rotating the polarizer 3 regulates the brightness of two cross pictures to suitable brightness, rotate the analyzer 7 cross image brightness that regulates S light to be formed, determine the corresponding relation of two cross pictures and center of curvature O3, O4;
5) calculated tilt quantity and the side-play amount of eyeglass K2 by computer platform 16, finely tune eyeglass K2 according to tilt quantity and side-play amount;
6) two crosses are measured when rotary air bearings as till motionless by repeating step 1-5 circulation;
7), during centering mirror sheet K1, the alignment of the lens barrel and air bearing rotating platform 12 that detect optics 11 to be measured does not need to detect with roundness measuring equipment 15, directly by the proper alignment of determining China National Instruments Import & Export Corporation S light detection eyeglass K2, and Rapid reset optics 11 to be measured;
8) regulate closely pancratic telescope 10 to make S light focus on the center of curvature O4 of eyeglass K1 upper surface, regulate closely pancratic telescope 9 to make P light focus on the center of curvature O3 of eyeglass K1 lower surface;
9) the cross picture absorbed by photodetector 1 is observed by computer platform 16, rotating the polarizer 3 regulates the brightness of two cross pictures to suitable brightness, rotate the analyzer 7 cross image brightness that regulates S light to be formed, determine the corresponding relation of two cross pictures and center of curvature O1, O2;
10) calculated tilt quantity and the side-play amount of eyeglass K1 picture by computer platform 16, finely tune eyeglass K1 according to tilt quantity and side-play amount;
11) two crosses are measured when rotary air bearings as till motionless by repeating step 7-10 circulation.

Claims (8)

1. an eliminate stray light double light path optical centering instrument, is characterized in that by photodetector (1), autocollimator (2), the polarizer (3), polarization beam apparatus (4), three plane mirrors (5,13,14), three analyzers (6,7,8), two closely pancratic telescope (9,10), air bearing rotating platform (12), roundness measuring equipment (15), computer platform (16) forms; Described autocollimator carries the directional light of cross image signal for providing, produce linearly polarized light to the polarizer (3), and produces the orthogonal S light in polarization direction and P light by polarization beam apparatus (4); S light through the first analyzer (6), the second analyzer (7) and by second closely pancratic telescope (10) focus on the optics to be measured (11) be fixed on air bearing rotating platform (12) survey the center of curvature of upper lens surface; P light by the first plane mirror (5) reflect through the 3rd analyzer (8) and by first closely pancratic telescope (9) focus on the surveyed eyeglass lower surface center of curvature; S light and P light are reflected by surveyed eyeglass upper and lower surface, and absorb the cross image signal of reflected light by photodetector (1), and computer platform (16) computational analysis institute surveys the centre deviation of eyeglass, carry out in correction calmly according to center of lens deviation adjusting eyeglass; Roundness measuring equipment (15) is for the alignment of the lens barrel and air bearing rotating platform (12) that detect optics to be measured (11).
2. eliminate stray light double light path optical centering instrument according to claim 1, is characterized in that described photodetector is CCD, CMOS or other photodetector.
3. eliminate stray light double light path optical centering instrument according to claim 1, is characterized in that the described polarizer is polaroid or Nicol prism; Natural light is become linearly polarized light by the described polarizer, changes the beam intensity ratio of reflection S light and transmission P light by rotating this polarizer.
4. eliminate stray light double light path optical centering instrument according to claim 1, is characterized in that described analyzer is polaroid; The analyzer of reflection S light and transmission P light light path is orthogonal, and above-mentioned analyzer shakes thoroughly, direction is identical with P light polarization direction with S light respectively; By the reflection S light of optics to be measured not by the analyzer in transmission P light light path, in like manner can not by the analyzer in transmission S light light path by the reflected P light of optics to be measured.
5. eliminate stray light double light path optical centering instrument according to claim 1, closely pancratic telescope described in it is characterized in that rotating, to change its focal length, thus focuses on the center of curvature of the measured surface of optics to be measured by reflection S light and transmission P light.
6. eliminate stray light double light path optical centering instrument according to claim 1, is characterized in that described air bearing rotating platform has light hole, and has leveling aligning objective table, and objective table is used for fixing optics to be measured.
7. eliminate stray light double light path optical centering instrument according to claim 1, is characterized in that described computer platform is for analyzing photodetector cross image signal, calculate optics to be measured survey centre deviation and the process roundness measuring equipment testing result on surface.
8. eliminate stray light double light path optical centering instrument according to claim 1, is characterized in that reflection S light and transmission P light all use air bearing rotating platform turning axle as reference axle.
CN201510024956.XA 2015-01-19 2015-01-19 Stray light elimination dual-optical-path optical centering instrument Pending CN104567752A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201510024956.XA CN104567752A (en) 2015-01-19 2015-01-19 Stray light elimination dual-optical-path optical centering instrument
PCT/CN2016/071372 WO2016116036A1 (en) 2015-01-19 2016-01-19 Dual-optical-path optical centering instrument for eliminating stray light
GB1617404.7A GB2539844B (en) 2015-01-19 2016-01-19 Optical centering apparatus with dual optical paths for eliminating a stray light

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Application Number Priority Date Filing Date Title
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WO2016116036A1 (en) * 2015-01-19 2016-07-28 复旦大学 Dual-optical-path optical centering instrument for eliminating stray light

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GB2539844A (en) * 2015-01-19 2016-12-28 Univ Fudan Dual-optical-path optical centering instrument for eliminating stray light
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WO2016116036A1 (en) 2016-07-28
GB2539844A (en) 2016-12-28
GB201617404D0 (en) 2016-11-30

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Application publication date: 20150429