CN201016713Y - Optical centering instrument with air bearing rotating platform - Google Patents
Optical centering instrument with air bearing rotating platform Download PDFInfo
- Publication number
- CN201016713Y CN201016713Y CNU2007200687635U CN200720068763U CN201016713Y CN 201016713 Y CN201016713 Y CN 201016713Y CN U2007200687635 U CNU2007200687635 U CN U2007200687635U CN 200720068763 U CN200720068763 U CN 200720068763U CN 201016713 Y CN201016713 Y CN 201016713Y
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- optics
- air bearing
- undetermined
- object lens
- lens
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Abstract
An optical centering device equipped with an air bearing rotary table; the optical centering device is fixed on a lens frame which is equipped in the center of the air bearing rotary table by a centered optical part; on the basis of ensuring the part datum plane is vertical to a collimated light and a central shaft is coaxial with the air bearing, an additional object lens is chosen to make the beam of the collimated light after passing through the object lens reflected back to an automatic collimating pipe in the original way by the upper surface or the lower surface of the centered part lens; a CCD electronic object lens is used for observing the reflected graduation image in the automatic collimating pipe; if the graduation image center does not rotate when the air bearing rotates, the centering is good; therefore, the centering error of the centered part can be decided according to the diameter of the rotation circle of the graduation image center and the focus of eh additional object lens; in this way, people can adjust the lens position pertinently to promote the centering precision.
Description
Technical field
The utility model relates to a kind of optics with air bearing turntable and decides China National Instruments Import ﹠ Export Corporation.
Background technology
Along with the function of optical instrument increases and the improving constantly and the raising day by day of optical element and component of machine machining precision of performance requirement, it is important further that the assembling of optical instrument becomes, the assembling of optical instrument mainly shows gummed and the precision positioning of eyeglass in housing between eyeglass, and this requires optical axis and lens barrel mechanical axis between eyeglass that good coupling is arranged.And optics is decided assembling that China National Instruments Import ﹠ Export Corporation is an optical system and the gummed of lens detects indispensable instrument, now decide China National Instruments Import ﹠ Export Corporation especially towards digitizing, high precision, direction develops fast.In deciding China National Instruments Import ﹠ Export Corporation, the optical axis location and the sensitivity of general optical imagery part always will be higher than mechanical part, and restriction optics decide the also accuracy of platform often of China National Instruments Import ﹠ Export Corporation precision, make the whole precision acquisition raising of decide China National Instruments Import ﹠ Export Corporation, and the improvement platform is bound to.
Therefore how solving existing optics decide the shortcoming reality that China National Instruments Import ﹠ Export Corporation exists and has become the technical task that those skilled in the art need to be resolved hurrily.
The utility model content
The purpose of this utility model is to provide a kind of optics with air bearing turntable to decide China National Instruments Import ﹠ Export Corporation, to realize the raising of deciding middle assembly precision of optical system.
For reaching above-mentioned purpose, optics with air bearing turntable of the present utility model is decided China National Instruments Import ﹠ Export Corporation and is comprised: be provided with lens frame, be used for installing optics undetermined and by rotation with to described undetermined in the optics air bearing turntable that carries out centralized positioning, be used for fixing convergence object lens with middle optics coupling undetermined, and the object lens with the function that moves described object lens are regulated platform, be used to reflect light into the catoptron of described convergence object lens, be used to provide the autocollimator of parallel rays to described catoptron, be used to absorb the CCD electronic eyepiece of reflection graduation picture, wherein, described undetermined in the parallel rays that provides by described autocollimator when being installed in described lens frame of optics arrive after through described catoptron and described convergence object lens described undetermined in optics, and through described undetermined in optics reflection back return along the former road of route that described parallel rays incident comes and enter described autocollimator and promptly form described reflection graduation picture.
Wherein, when described air bearing turntable has the scalable lever ruby gauge head that is used for the circularity and the degree of tilt of described optics undetermined are measured, described optics with air bearing turntable is decided China National Instruments Import ﹠ Export Corporation and is also comprised and be used for the measured data of described scalable lever ruby gauge head are analyzed with the circularity that obtains described optics undetermined and the roundness measuring equipment computing machine of degree of tilt, described optics with air bearing turntable is decided China National Instruments Import ﹠ Export Corporation and is also comprised with described CCD electronic eyepiece and being connected, and be used for analyzing the analysis platform of the parameter of described optics undetermined with the convergence object lens parameter of definite and described middle optics coupling undetermined, described air bearing turntable adopts the high-hardness stainless steel air bearing in the diamond process equipment.
Eventually the above, it is to the graticule reflection image analysis of its autocollimator and carry out the assembling device of lens that optics with air bearing turntable of the present utility model is decided China National Instruments Import ﹠ Export Corporation, so can make optical axis between the lens that are mounted or the deviation control between lens light axis and the mechanical component central shaft in the scope of minimum, decide precision in China National Instruments Import ﹠ Export Corporation fixed to improve.
Description of drawings
Fig. 1 decides the basic framework synoptic diagram of China National Instruments Import ﹠ Export Corporation for the optics with air bearing turntable of the present utility model.
Fig. 2 decides the concrete structure synoptic diagram of China National Instruments Import ﹠ Export Corporation for the optics with air bearing turntable of the present utility model.
Fig. 3 decides the air bearing synoptic diagram of China National Instruments Import ﹠ Export Corporation for the optics with air bearing turntable of the present utility model.
Fig. 4 to Fig. 6 decides the application implementation illustration of China National Instruments Import ﹠ Export Corporation for the optics with air bearing turntable of the present utility model, wherein, Fig. 4 is the synoptic diagram that is used for the location gummed between eyeglass and eyeglass, Fig. 5 is the synoptic diagram that is used for the location assembling between eyeglass and lens barrel, and Fig. 6 is the combine and assemble synoptic diagram that is used for a plurality of eyeglasses and lens barrel.
Embodiment
See also Fig. 1 and Fig. 2, the optics with air bearing turntable of the present utility model is decided China National Instruments Import ﹠ Export Corporation: air bearing turntable 11, roundness measuring equipment computing machine 12, object lens are regulated platform 13, catoptron 14, autocollimator 15, CCD electronic eyepiece 16, are reached analysis platform 17.
It is provided with lens frame 111 described air bearing turntable 11, be used for installing optics 10 undetermined and by the rotation with to described undetermined in optics carry out centralized positioning, see also Fig. 3, described air bearing turntable adopts the high-hardness stainless steel air bearing in the diamond process equipment, this is a kind of mechanism that utilizes the non-contacting air film of static pressure to separate the relative motion body as lubricant medium, it mainly comprises rotary shaft body, pore, axle journal and pressurized air etc., because those skilled in the art are familiar with the structure and the principle of work of described air bearing, be not described in detail in this, its principal feature is as follows:
■ has high bearing accuracy, and its precision is 100 times of common mechanical axle
The ■ friction, almost not wearing and tearing of friction, no jumping phenomena.
The good rigidity of ■, the stationarity good reproducibility
■ does not have age limit
The dynamic range that ■ is high---from extremely slowly to being exceedingly fast
The axis straightness (no transverse force drives) that ■ is fabulous
The mesa dimensions of described air bearing turntable 11 is 150 millimeters of , the bore of corresponding fixed part can reach 200 millimeters of , dress has the DC brushless electric machine of 1000 line code readers in it, axial rigidity is better than 175N/ μ m, radial rigidity is better than 87N/ μ m, motion accuracy≤the 50nm of axle (2 μ "); also being equipped with the high sensitivity diameter simultaneously is the scalable lever ruby gauge head of 1.6mm; be used for the circularity and the degree of tilt of optics described to be fixed are measured, its measurement range is: ± 0.25mm; Dynamometry is two-way 0.18 ounce; The fine tuning scope is 6.5mm.
Described roundness measuring equipment computing machine 12 is connected with described ruby gauge head, and roundness measuring equipment computing machine 11 is analyzed to obtain the circularity and the degree of tilt of described middle optics undetermined its data of measuring, measures transmission by the linear variable differential principle.This is traditional optical to be decided the improvement of China National Instruments Import ﹠ Export Corporation novel practicalization.
Described object lens are regulated platform 13 and are used for fixing the convergence object lens 20 that mate with middle optics undetermined, and the function that moves described object lens is provided, moving the described object lens 20 of assembling usually is can assemble to middle optics undetermined for making by the light beam of described convergence object lens.
Described catoptron 14 is used to reflect light into described convergence object lens 20.
Described autocollimator 15 is used to provide parallel rays to described catoptron 14.
Described CCD electronic eyepiece 16 is used for picked-up reflection graduation picture, when described undetermined in optics 10 when being installed in described lens frame 111, parallel rays that described autocollimator 15 provides through described catoptron 14 and described convergence object lens 20 backs arrive described undetermined in optics 10, and through described undetermined in optics 10 reflection backs return along the former road of route that described parallel rays incident comes and enter described autocollimator 15 and promptly form described reflection graduation picture.
Described analysis platform 17 is connected with described CCD electronic eyepiece, be used for analyzing the parameter of the parameter of described optics undetermined with the convergence object lens 20 of definite and described middle optics coupling undetermined, in the present embodiment, it finishes analytic process by adopting Labview software.
Optics with air bearing turntable of the present utility model is decided the location gummed that China National Instruments Import ﹠ Export Corporation not only can be used between eyeglass and eyeglass and (is seen also Fig. 4, wherein, L1 and L2 are eyeglass), the location assembling that also can be used between eyeglass and lens barrel (sees also Fig. 5, wherein, L is an eyeglass, and M is a lens barrel), the combine and assemble that also can be used for a plurality of eyeglasses and lens barrel (sees also Fig. 6, wherein, L1 and L2 are eyeglass, and M is a lens barrel), below will be elaborated with different embodiment:
Embodiment one: the gummed step between eyeglass and eyeglass
1) eyeglass coarse adjustment down: will play eyeglass to be placed in the lens frame 111 of described air bearing turntable 11, and regulate described air bearing turntable 11 its central shaft and described lens edge axle axle are down overlapped.
2) eyeglass fine tuning down: eyeglass is by the additional object lens of cemented surface radius-of-curvature and operating distance under selecting to be fit to, and object lens are installed in described object lens regulate on the platform, the air bearing of regulating described air bearing turntable 11 again by described gauge head and collimated light image formation state, and move up and down additional object lens, make down the optical axis and the air bearing axle of eyeglass collinear, and assurance and collimated light central axes, graduation was as motionless when basis for estimation was the worktable rotation.
3) fixing eyeglass down, and later step can not be regulated worktable, evenly is coated with ultraviolet glue being glued together between eyeglass, will go up eyeglass and cover down on the eyeglass.
4) select additional object lens according to last upper lens surface radius-of-curvature and suitable operating distance, move additional object lens and make beam convergence by additional object lens at last upper lens surface center of curvature place, at this moment light beam can return from being glued together the former road of upper lens surface.
5) when air bearing is rotated, regulate upward by suitable plate clamp on show eyeglass reflects graduation as till motionless in being imaged on CCD electronic eyepiece 16.
6) by analysis platform 17 built-in formula and last eyeglass parametric curvature R
1, R
2Refractive index n and thickness d are selected the focal length of additional object lens, can realize verifying in cemented surface fixed.As verify errorless, with ultraviolet light freezing plastic mixture.
Embodiment two: the step of fixed middle assembling between eyeglass and lens barrel
1) lens barrel is installed on the described air bearing turntable 11, it is vertical with collimated light to be adjusted to the lens barrel basal plane with described gauge head and optical parallel, and lens barrel mechanical axis and air bearing are coaxial.
2) eyeglass to be installed is packed into its microscope base, select additional object lens according to upper lens surface radius-of-curvature and suitable operating distance, move additional object lens and make beam convergence by additional object lens at upper lens surface center of curvature place, at this moment light beam can be from being returned by the former road of gummed upper lens surface.
3) keep lens barrel to fix, being provided with of air bearing is constant.When air bearing is rotated, regulate the position of eyeglass in microscope base by suitable eyeglass anchor clamps, till reflection graduation inconocenter does not rotate in being imaged on CCD electronic eyepiece 16.
4) with suitable method location eyeglass, by analysis platform 17 built-in formula and lens parameters curvature R
1, R
2Refractive index n and thickness d are selected the focal length of additional object lens, can realize that the lower surface of eyeglass verifies in fixed.As verify errorlessly, carry out gummed.
To the installation of a plurality of eyeglasses, if with the eyeglass position of the bottom fixed in foundation, by 3) and 4) steps in sequence eyeglass upwards is installed.
Optics with air bearing turntable of the present utility model is decided China National Instruments Import ﹠ Export Corporation and is finally decided medium sensitivity and be: f
1/ f
2* 1arcsec.
In sum, optics with air bearing turntable of the present utility model is decided China National Instruments Import ﹠ Export Corporation by being decided the central authorities of middle optic stationary at the air bearing turntable earlier, guaranteeing that the parts reference field is vertical with collimated light, under the coaxial condition of central shaft and air bearing, by selecting additional object lens, light beam after making collimated light by additional object lens is from being turned back to autocollimator after parts upper lens surface fixed or the lower surface former road reflection, observe the graduation picture of reflected back autocollimator, in fixed under the good situations, this graduation inconocenter is non-rotary when air bearing is rotated, and can judge by the centering error value of parts in fixed according to the diameter of graduation inconocenter rotation round and the focal length of additional object lens, thereby adjust the position of eyeglass targetedly, precision was better than during it was fixed: f
1/ f
2* 1arcsec., wherein f
1Be the autocollimator focal length, f
2It is the focal length of assembling object lens.Because the performance of air bearing turntable improves, just can reasonably adopt long-focus high precision collimator, provide more reliable more accurate assurance for adjusting the assembling optical imaging system, thereby effectively alleviate element processing, the difficulty of mechanical organ processing particularly, and reduced the optical system manufacturing cost accordingly.
Claims (4)
1. the optics with air bearing turntable is decided China National Instruments Import ﹠ Export Corporation, it is characterized in that comprising:
The air bearing turntable, it is provided with lens frame, be used for installing optics undetermined and by the rotation with to described undetermined in optics carry out centralized positioning;
Object lens are regulated platform, are used for fixing the convergence object lens that mate with middle optics undetermined, and have the function that moves described object lens;
Catoptron is used to reflect light into described convergence object lens;
Autocollimator is used to provide parallel rays to described catoptron;
The CCD electronic eyepiece, be used for picked-up reflection graduation picture, wherein, described undetermined in the parallel rays that provides by described autocollimator when being installed in described lens frame of optics arrive after through described catoptron and described convergence object lens described undetermined in optics, and through described undetermined in optics reflection back return along the former road of route that described parallel rays incident comes and enter described autocollimator and promptly form described reflection graduation picture.
2. the optics with air bearing turntable as claimed in claim 1 is decided China National Instruments Import ﹠ Export Corporation, it is characterized in that: when described air bearing turntable had the scalable lever ruby gauge head that is used for the circularity and the degree of tilt of described optics undetermined are measured, described optics with air bearing turntable was decided China National Instruments Import ﹠ Export Corporation and is also comprised and be used for the measured data of described scalable lever ruby gauge head are analyzed with the circularity that obtains described optics undetermined and the roundness measuring equipment computing machine of degree of tilt.
3. the optics with air bearing turntable as claimed in claim 1 is decided China National Instruments Import ﹠ Export Corporation, it is characterized in that also comprising: be connected with described CCD electronic eyepiece, be used for analyzing the analysis platform of the parameter of described optics undetermined with the convergence object lens parameter of definite and described middle optics coupling undetermined.
4. the optics with air bearing turntable as claimed in claim 1 is decided China National Instruments Import ﹠ Export Corporation, it is characterized in that; Described air bearing turntable adopts the high-hardness stainless steel air bearing in the diamond process equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200687635U CN201016713Y (en) | 2007-04-09 | 2007-04-09 | Optical centering instrument with air bearing rotating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200687635U CN201016713Y (en) | 2007-04-09 | 2007-04-09 | Optical centering instrument with air bearing rotating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201016713Y true CN201016713Y (en) | 2008-02-06 |
Family
ID=39057205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200687635U Expired - Fee Related CN201016713Y (en) | 2007-04-09 | 2007-04-09 | Optical centering instrument with air bearing rotating platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201016713Y (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101339091B (en) * | 2008-08-14 | 2010-10-06 | 南京东利来光电实业有限责任公司 | Parfocalization checking procedure and parfocalization checker |
| CN101387761B (en) * | 2008-10-08 | 2011-10-12 | 上海微电子装备有限公司 | Center aligning assembling and regulating apparatus and method for optical system |
| CN103024254A (en) * | 2011-12-17 | 2013-04-03 | 中国航空工业集团公司洛阳电光设备研究所 | Imaging adjustment method for television camera |
| CN103064195A (en) * | 2011-12-17 | 2013-04-24 | 中国航空工业集团公司洛阳电光设备研究所 | Adjustment method of non-coaxial optical system |
| CN103389049A (en) * | 2012-05-08 | 2013-11-13 | 中国计量科学研究院 | Method for adjusting and detecting machine tool cradle-type composite rotary table axis space vertical intersection |
| CN104567752A (en) * | 2015-01-19 | 2015-04-29 | 复旦大学 | Stray light elimination dual-optical-path optical centering instrument |
| CN105157617A (en) * | 2015-08-27 | 2015-12-16 | 浙江大学 | Spherical surface automatic centering method applied to spherical surface optical element surface defect detection |
| CN106679595A (en) * | 2016-12-29 | 2017-05-17 | 福州华友光学仪器有限公司 | Center offset and wedge angle detecting instrument for wedge angle spherical lens and measurement method |
| CN106767420A (en) * | 2017-02-13 | 2017-05-31 | 苏州迅威光电科技有限公司 | A kind of apparatus and method of total powerstation vertical pivot group precision image fully-automated synthesis |
| CN104880833B (en) * | 2015-04-21 | 2017-12-19 | 中国科学院西安光学精密机械研究所 | Optical lens and the system and method at the high-precision fixed center of focal plane subassembly can be achieved |
| CN109029928A (en) * | 2018-07-10 | 2018-12-18 | 张家港市光学仪器有限公司 | A kind of micro objective center verifying attachment |
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2007
- 2007-04-09 CN CNU2007200687635U patent/CN201016713Y/en not_active Expired - Fee Related
Cited By (18)
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|---|---|---|---|---|
| CN101339091B (en) * | 2008-08-14 | 2010-10-06 | 南京东利来光电实业有限责任公司 | Parfocalization checking procedure and parfocalization checker |
| CN101387761B (en) * | 2008-10-08 | 2011-10-12 | 上海微电子装备有限公司 | Center aligning assembling and regulating apparatus and method for optical system |
| CN103024254A (en) * | 2011-12-17 | 2013-04-03 | 中国航空工业集团公司洛阳电光设备研究所 | Imaging adjustment method for television camera |
| CN103064195A (en) * | 2011-12-17 | 2013-04-24 | 中国航空工业集团公司洛阳电光设备研究所 | Adjustment method of non-coaxial optical system |
| CN103024254B (en) * | 2011-12-17 | 2016-08-03 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of imaging Method of Adjustment of television cameras |
| CN103389049B (en) * | 2012-05-08 | 2016-03-02 | 中国计量科学研究院 | The adjustment that lathe cradle-type composite turntable axial space intersects vertically and detection method |
| CN103389049A (en) * | 2012-05-08 | 2013-11-13 | 中国计量科学研究院 | Method for adjusting and detecting machine tool cradle-type composite rotary table axis space vertical intersection |
| WO2016116036A1 (en) * | 2015-01-19 | 2016-07-28 | 复旦大学 | Dual-optical-path optical centering instrument for eliminating stray light |
| CN104567752A (en) * | 2015-01-19 | 2015-04-29 | 复旦大学 | Stray light elimination dual-optical-path optical centering instrument |
| GB2539844A (en) * | 2015-01-19 | 2016-12-28 | Univ Fudan | Dual-optical-path optical centering instrument for eliminating stray light |
| GB2539844B (en) * | 2015-01-19 | 2019-03-06 | Univ Fudan | Optical centering apparatus with dual optical paths for eliminating a stray light |
| CN104880833B (en) * | 2015-04-21 | 2017-12-19 | 中国科学院西安光学精密机械研究所 | Optical lens and the system and method at the high-precision fixed center of focal plane subassembly can be achieved |
| CN105157617A (en) * | 2015-08-27 | 2015-12-16 | 浙江大学 | Spherical surface automatic centering method applied to spherical surface optical element surface defect detection |
| CN105157617B (en) * | 2015-08-27 | 2018-01-30 | 浙江大学 | Method during sphere applied to spherical optics element surface defects detection is determined automatically |
| CN106679595A (en) * | 2016-12-29 | 2017-05-17 | 福州华友光学仪器有限公司 | Center offset and wedge angle detecting instrument for wedge angle spherical lens and measurement method |
| CN106767420A (en) * | 2017-02-13 | 2017-05-31 | 苏州迅威光电科技有限公司 | A kind of apparatus and method of total powerstation vertical pivot group precision image fully-automated synthesis |
| CN109029928A (en) * | 2018-07-10 | 2018-12-18 | 张家港市光学仪器有限公司 | A kind of micro objective center verifying attachment |
| CN109029928B (en) * | 2018-07-10 | 2023-12-12 | 张家港市光学仪器有限公司 | Microscope objective center inspection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080206 Termination date: 20120409 |