CN114545645B - Periscope type integrated optical circuit assembling and adjusting method - Google Patents
Periscope type integrated optical circuit assembling and adjusting method Download PDFInfo
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- CN114545645B CN114545645B CN202210186417.6A CN202210186417A CN114545645B CN 114545645 B CN114545645 B CN 114545645B CN 202210186417 A CN202210186417 A CN 202210186417A CN 114545645 B CN114545645 B CN 114545645B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
Abstract
The application provides an adjustment method of periscope type integrated optical paths, which is characterized in that an objective table of a center deviation measuring instrument is calibrated to adjust the direction of a first optical axis corresponding to the center deviation measuring instrument to a first preset direction; placing a standard reflector at a preset position of a central deviation measuring instrument, and adjusting the standard reflector through the calibrated central deviation measuring instrument so that the standard reflector reflects incident light rays in a first preset direction to a second preset direction perpendicular to the first preset direction; the plane reflector is placed on one side of the standard reflector, and the plane reflector is adjusted so that the plane reflector reflects light rays reflected by the standard reflector along a second preset direction to a stage of the center deviation measuring instrument along a first preset direction, so that the installation angles of all optical devices in the periscope type integrated optical circuit are adjusted.
Description
Technical Field
The application relates to the technical field of optics, in particular to a periscope type integrated optical circuit assembling and adjusting method.
Background
With the development of semiconductor devices, periscope-type integrated optical circuits are widely applied to infinite conjugate alignment optical systems limited by space constraints. The tilt and decentration of each segment of the periscope type integrated optical path relative to the optical axis directly affects the final imaging quality and alignment accuracy of the optical system.
In the existing periscope type integrated optical path assembling and adjusting method, only an assembling and adjusting method of two lens angles of a periscope is introduced, and the assembling and assembling of other lens groups of the periscope type integrated optical path are not reported.
Disclosure of Invention
Therefore, the present application is directed to a method for adjusting periscope type integrated optical circuits, which is used for guiding the adjustment of all structures in periscope type integrated optical circuits.
In a first aspect, an embodiment of the present application provides a method for tuning an integrated optical circuit, where the tuning method includes: calibrating an objective table of the center deviation measuring instrument so as to adjust the direction of a first optical axis corresponding to the center deviation measuring instrument to a first preset direction; placing a standard reflector at a preset position of a central deviation measuring instrument, and adjusting the standard reflector through the calibrated central deviation measuring instrument so that the standard reflector reflects incident light rays in a first preset direction to a second preset direction perpendicular to the first preset direction; placing a plane reflector on one side of a standard reflector, and adjusting the plane reflector to enable the plane reflector to reflect light rays reflected by the standard reflector along a second preset direction to a stage of a central deviation measuring instrument along a first preset direction; placing an objective lens between the standard reflecting mirror and the plane reflecting mirror, and adjusting the objective lens so that the objective lens transmits light rays in a second preset direction along the original direction; placing a periscope lens on one side of an objective lens, wherein the periscope lens comprises an input lens and an output lens, and the input lens reflects incident light rays in a second preset direction transmitted by the objective lens to the output lens along the opposite direction of the first preset direction; calibrating the inner focusing auto-collimator to adjust the direction of a second optical axis corresponding to the inner focusing auto-collimator to the opposite direction of a second preset direction; a first beam splitting prism and a second beam splitting prism are sequentially arranged between the inner focusing autocollimator and the periscope type lens, the beam splitting directions of the first beam splitting prism and the second beam splitting prism are opposite, the first beam splitting prism is adjusted so that the first beam splitting prism reflects light rays emitted by the inner focusing autocollimator along the direction of a second optical axis to a first preset direction, and the second beam splitting prism is adjusted so that the light rays reflected by the periscope along the second preset direction are reflected to the first preset direction; placing a tube mirror between the first beam splitting prism and the second beam splitting prism, and adjusting the tube mirror so that the direction of the optical axis of the tube mirror is in the same direction as a second preset direction; placing an amplifying lens on one side of the first beam splitting prism, and adjusting the amplifying lens to enable the amplifying lens to transmit light rays in a first preset direction reflected by the first beam splitting prism in an original direction; the first beam splitting prism is replaced by a third beam splitting prism with the same beam splitting direction as the second beam splitting prism.
Preferably, the method further comprises the step of placing an illumination component on one side of the second beam splitting prism, wherein the illumination component is used for providing a light source opposite to the first preset direction for the second beam splitting prism; a first CCD camera is arranged at one side of the third beam splitting prism and is used for capturing imaging of the object to be detected after being amplified by the tube lens; and a second CCD camera is arranged on one side of the amplifying lens and is used for capturing imaging of the object to be detected after being amplified by the tube lens and the amplifying lens.
Preferably, the step of calibrating the stage of the central deviation measuring instrument to adjust the first optical axis corresponding to the central deviation measuring instrument to a first preset direction specifically includes: setting the flat glass on an objective table of a central deviation measuring instrument, and adjusting the objective table so that the verticality deviation value between the flat glass and the first optical axis is within a first preset deviation value.
Preferably, the step of calibrating the inner focusing auto-collimator to adjust the direction of the second optical axis corresponding to the inner focusing auto-collimator to the opposite direction of the second preset direction specifically includes: the method comprises the steps of setting a first beam splitting prism at a preset position in front of a lens of an inner focusing autocollimator, setting the first beam splitting prism between the inner focusing autocollimator and a periscope lens, and adjusting the inner focusing autocollimator to enable a perpendicularity deviation value between the first beam splitting prism and a second optical axis to be within a first preset deviation value.
Preferably, the step of placing the standard reflector at a preset position of the central deviation measuring instrument, and adjusting the standard reflector by the calibrated central deviation measuring instrument so that the standard reflector reflects the incident light in the first preset direction to the second preset direction perpendicular to the first preset direction, specifically includes: a reference lens is arranged on one side of the standard reflector, and comprises a plane and a spherical surface; adjusting the inclination angle of the standard reflector based on the plane of the reference lens so that the perpendicularity deviation value between the direction of the optical axis of the reference lens and the direction of the first optical axis is smaller than a second preset deviation value; and adjusting the plane position of the objective table of the center deviation measuring instrument based on the spherical surface of the reference lens so that the distance between the position of the spherical center of the reference lens and the position of the first optical axis is smaller than a second preset distance value.
Preferably, the step of calibrating the inner focusing autocollimator to adjust the direction of the second optical axis corresponding to the inner focusing autocollimator to the opposite direction of the second preset direction further includes: and grinding a target mounting salient point for mounting a lens on the periscope lens, so that the perpendicularity deviation value between the direction of the optical axis of the reference lens and the direction of the second optical axis is not larger than a third preset deviation value, and the distance between the position of the optical axis of the reference lens and the position of the second optical axis is smaller than the third preset distance value.
Preferably, the step of adjusting the first beam splitting prism to make the first beam splitting prism reflect the light emitted by the inner focusing autocollimator along the direction of the second optical axis to the first preset direction specifically includes: and adjusting the inclination angle of the first beam splitting prism so that the perpendicularity deviation value between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
Preferably, the step of adjusting the second beam splitter prism to reflect the light rays along the second preset direction reflected by the periscope to the first preset direction specifically includes: and adjusting the inclination angle of the second beam splitting prism so that the perpendicularity deviation value between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
Preferably, the plane mirror and the objective lens are fixed at preset positions of the first mounting plate respectively; the periscope type lens, the first beam splitting prism, the second beam splitting prism, the tube lens, the amplifying lens, the lighting component, the first CCD camera and the second CCD camera are respectively fixed at preset positions of the second mounting plate; the first mounting plate and the second mounting plate are respectively fixed at preset positions of the total mounting plate.
Preferably, the magnification of the tube lens is 4 times and the magnification of the magnifying lens is 5 times.
The periscope type integrated optical path is divided into a first optical component and a second optical component, the first optical component comprises a plane reflecting mirror and an objective lens, the first optical component is arranged on a first mounting plate, the second optical component comprises a periscope type lens, a first beam splitting prism, a second beam splitting prism, a tube mirror, an amplifying lens, an illumination component, a first CCD camera and a second CCD camera, the second optical component is arranged on a second mounting plate, the first mounting plate and the second mounting plate are respectively arranged on the total mounting plate, the optical paths between the first optical components are firstly adjusted through a center deviation measuring instrument, and the optical paths between the second optical components are adjusted through an auto-focusing auto-collimator according to a common reference, so that the complete periscope type integrated optical path is assembled and adjusted.
In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic plan view of a periscope type integrated optical circuit according to an embodiment of the present application;
FIG. 2 is a schematic diagram of an optical path corresponding to the step A1 according to an embodiment of the present application;
FIG. 3 is a schematic diagram of an optical path corresponding to the step A2 according to an embodiment of the present application;
FIG. 4 is a schematic diagram of an optical path corresponding to the step A3 according to an embodiment of the present application;
FIG. 5 is a schematic diagram of an optical path corresponding to the step A4 according to an embodiment of the present application;
FIG. 6 is a schematic diagram of an optical path corresponding to steps B1 and B2 according to an embodiment of the present application;
FIG. 7 is a schematic diagram of an optical path based on a reference lens according to an embodiment of the present application;
FIG. 8 is a schematic diagram of an optical path corresponding to the step B3 according to an embodiment of the present application;
FIG. 9 is a schematic diagram of an optical path corresponding to the step B4 according to an embodiment of the present application;
FIG. 10 is a schematic diagram of an optical path corresponding to the step B5 according to an embodiment of the present application;
FIG. 11 is a schematic diagram of an optical path corresponding to the step B6 according to an embodiment of the present application;
fig. 12 is a side view of a periscope lens according to an embodiment of the application.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application, and it should be understood that the drawings in the present application are for the purpose of illustration and description only and are not intended to limit the scope of the present application. In addition, it should be understood that the schematic drawings are not drawn to scale. A flowchart, as used in this disclosure, illustrates operations implemented according to some embodiments of the present application. It should be appreciated that the operations of the flow diagrams may be implemented out of order and that steps without logical context may be performed in reverse order or concurrently. Moreover, one or more other operations may be added to or removed from the flow diagrams by those skilled in the art under the direction of the present disclosure.
In addition, the described embodiments are only some, but not all, embodiments of the application. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by a person skilled in the art based on embodiments of the application without making any inventive effort, fall within the scope of the application.
With the development of semiconductor devices, periscope-type integrated optical circuits are widely applied to infinite conjugate alignment optical systems limited by space constraints. The tilt and decentration of each segment of the periscope type integrated optical path relative to the optical axis directly affects the final imaging quality and alignment accuracy of the optical system.
In the existing periscope type integrated optical path assembling and adjusting method, only an assembling and adjusting method of two lens angles of a periscope is introduced, and the assembling and assembling of other lens groups of the periscope type integrated optical path are not reported.
In view of the above problems, the embodiments of the present application provide a method for adjusting a periscope type integrated optical circuit, which is described below by way of embodiments.
In order to facilitate understanding of the present application, the following detailed description of the technical solution provided by the present application is provided in connection with specific embodiments.
Referring to fig. 1, a schematic plan view of a periscope type integrated optical circuit according to an embodiment of the present application is provided, where the periscope type integrated optical circuit includes a first optical component, a second optical component, a first mounting board, a second mounting board, and a total mounting board. Wherein a first optical assembly and a second optical assembly are shown in fig. 1. The first optical component comprises a plane reflecting mirror 2 and an objective lens 3, and the second optical component comprises a periscope type lens 4, a second beam splitting prism 5, a third beam splitting prism 8, a tube mirror 7, a magnifying lens 9, an illumination component 6, a first CCD camera 10 and a second CCD camera 11. The object to be measured can be placed on the object stage 1 to be measured. The first optical components are respectively fixed at preset positions of the first mounting plates, the second optical components are respectively fixed at preset positions of the second mounting plates, and the first mounting plates and the second mounting plates are respectively fixed on the total mounting plates. It should be noted that, the preset position corresponding to each optical device and the positional relationship between the optical devices are designed in advance, and only the optical devices are required to be installed according to rules, but the installation angle of each optical device is required to be accurately adjusted.
The following describes a method for adjusting the periscope type integrated optical circuit according to the periscope type integrated optical circuit in fig. 1, which comprises the following steps:
firstly, the first optical component is assembled and adjusted through a center deviation measuring instrument, which specifically comprises the following steps:
a1: the stage 14 of the center deviation measuring instrument is calibrated to adjust the direction of the first optical axis corresponding to the center deviation measuring instrument to a first preset direction.
Specifically, the flat mirror glass 13 is set on the stage 14 of the central deviation measuring instrument, and the stage 14 is adjusted so that the deviation value of the perpendicularity between the flat mirror glass 13 and the first optical axis is within a first preset deviation value.
Fig. 2 provides a schematic diagram of the optical path corresponding to step A1. As shown in fig. 2, it is necessary here to adjust the angle of the stage 14 in the auto-collimation mode with reference to the calm glass on the stage 14 of the central deviation measuring instrument so that the perpendicularity deviation value between the flat mirror glass 13 and the first optical axis of the central deviation measuring instrument is not more than 1 ". The perpendicularity deviation value here includes Rx and Ry, where Rx and Ry refer to tilt angles between the reference optical axis and the measured surface in the X-axis or the Y-axis, respectively. The lens 12 based on the center deviation measuring instrument can measure the verticality deviation value and obtain a specific value of the verticality deviation value on the display of the center deviation measuring instrument.
A2: the standard reflector 15 is placed at a preset position of the central deviation measuring instrument, and the standard reflector 15 is adjusted through the calibrated central deviation measuring instrument, so that the standard reflector 15 reflects incident light rays in a first preset direction to a second preset direction perpendicular to the first preset direction.
Specifically, a reference lens 16 is disposed on one side of the standard reflector 15, and the reference lens 16 includes a plane and a sphere; adjusting the inclination angle of the standard mirror 15 based on the plane of the reference lens 16 so that the perpendicularity deviation value between the direction of the optical axis of the reference lens 16 and the direction of the first optical axis is smaller than a second preset deviation value; based on the spherical surface of the reference lens 16, the planar position of the stage 14 of the center deviation measuring instrument is adjusted so that the distance between the position of the center of sphere of the reference lens 16 and the position of the first optical axis is smaller than a second preset distance value.
As shown in fig. 3, fig. 3 provides a schematic view of the optical path corresponding to step A2. Wherein the first preset deviation value is 5', and the second preset distance value is 5um. Here, the standard mirror 15 and the reference lens 16 are each fixed to a first mounting plate which is placed on the stage 14 of the center deviation measuring instrument. The angle of the standard mirror 15 is adjusted so that the perpendicularity deviation between the plane of the reference lens 16 and the first optical axis is less than 5 ". The stage 14 is adjusted to translate in the X or Y direction of the horizontal plane with respect to the spherical center image of the reference lens 16 such that the spherical center image of the reference lens 16 is eccentric less than 5um in the X, Y direction with respect to the first optical axis.
A3: the plane mirror 2 is placed on one side of the standard mirror 15, and the plane mirror 2 is adjusted so that the plane mirror 2 reflects the light beam reflected by the standard mirror 15 along the second preset direction onto the stage 14 of the center deviation measuring instrument along the first preset direction.
Specifically, fig. 4 provides a schematic diagram of the optical path corresponding to step A3. As shown in fig. 4, the reference lens 16 is removed, the flat mirror glass 13 is moved below the flat mirror 2, and the installation angle of the flat mirror 2 is adjusted so that the deviation value of the perpendicularity between the horizontal plane corresponding to the flat mirror glass 13 and the optical axis of the center deviation measuring instrument is less than 5 ".
A4: the objective lens 3 is placed between the standard mirror 15 and the plane mirror 2, and the objective lens 3 is adjusted so that the objective lens 3 transmits light rays in the second preset direction in the original direction.
Fig. 5 provides a schematic view of the optical path corresponding to step A4. As shown in fig. 5, the objective lens 3 is mounted to a preset position, and the mounting position of the objective lens 3 is adjusted based on the optical axis of the center deviation measuring instrument, so that the eccentricity between the imaging of the objective lens 3 and the first optical axis is less than 5um, and the verticality deviation value between the horizontal plane corresponding to the objective lens 3 and the first optical axis is less than 10 ". The tilt posture of the objective lens 3 can be calculated based on the measurement of two spherical images of the same lens in the objective lens 3 by the center deviation measuring instrument.
The positions of the plane mirror 2 and the objective lens 3 are fixed on the first mounting plate, and then the first mounting plate is fixed on the preset position of the total mounting plate.
The method comprises the following steps of adjusting the second optical component through an auto-focusing auto-collimator, and specifically comprises the following steps:
b1: the periscope type lens 4 is placed on one side of the objective lens 3, the periscope type lens 4 comprises an input lens and an output lens, the input lens reflects incident light rays in a second preset direction transmitted by the objective lens 3 onto the output lens along the opposite direction of the first preset direction.
Fig. 6 provides a schematic diagram of the optical path corresponding to step B2. The mounting position of the periscope lens as shown in fig. 6, where the position of the periscope lens 4 is pre-designed. It will be appreciated that the periscope lens 4 may be fixed to a second mounting plate or to a total mounting plate.
B2: the inner focus autocollimator 18 is calibrated to adjust the direction of the second optical axis corresponding to the inner focus autocollimator 18 to the opposite direction of the second preset direction.
Specifically, the first beam splitter prism 17 is disposed at a preset position in front of the lens of the inner focusing auto-collimator 18, and the first beam splitter prism 17 is disposed between the inner focusing auto-collimator 18 and the periscope lens 4, and the inner focusing auto-collimator 18 is adjusted so that a verticality deviation value between the first beam splitter prism 17 and the second optical axis is within a first preset deviation value.
As shown in fig. 6, here, an inner focusing autocollimator 18 is fixed at a specified position outside the total mounting plate, and then a first beam splitter prism 17 is mounted. The angle between the optical axis of the inner focusing autocollimator 18 and the surface of the first beam splitter prism 17 in the X-axis direction is adjusted with reference to the surface of the first beam splitter prism 17 so that the Rx between the second optical axis of the inner focusing autocollimator 18 and the surface of the first beam splitter prism 17 is less than 1 ".
Further, fig. 7 provides a schematic view of an optical path based on a reference lens. As shown in fig. 7, it is also possible to measure Rx between the surface of the reference lens 16 and the second optical axis by the inner focusing autocollimator 18 to be less than 30 "as needed. The inner focus autocollimator 18 is then adjusted with reference to the reference lens 16 such that Ry between the surface of the reference lens 16 and the second optical axis is less than 10 "and such that the eccentricity between the imaging of the reference lens 16 and the second optical axis is less than 10um.
Fig. 12 provides a side view of a periscope lens. Three mounting protruding points 44 are arranged on the surface of the periscope type lens 4, the three mounting protruding points 44 can be arranged according to a triangle, and the mounting protruding points are used for mounting the lens 42. The target mounting bumps for mounting the lens 42 on the periscope lens 4 are ground so that the perpendicularity deviation value between the direction of the optical axis of the reference lens 16 and the direction of the second optical axis is not greater than a third preset deviation value, and the distance between the position of the optical axis of the reference lens 16 and the position of the second optical axis is made smaller than a third preset distance value.
The periscope lens 4 comprises two lenses, the lenses are fixed on mounting convex points, the angles of the lenses can be changed by grinding the mounting convex points, ry between the inner focusing auto-collimator 18 and the reference lens 16 is adjusted, and therefore butt joint of optical axes between the optical path of the first optical component and the optical path of the second optical component is achieved.
B3: the first beam splitting prism 17 and the second beam splitting prism 5 are sequentially disposed between the inner focusing autocollimator 18 and the periscope type lens 4, the beam splitting directions of the first beam splitting prism 17 and the second beam splitting prism 5 are opposite, the first beam splitting prism 17 is adjusted so that the first beam splitting prism 17 reflects light rays emitted by the inner focusing autocollimator 18 along the direction of the second optical axis to a first preset direction, and the second beam splitting prism 5 is adjusted so as to reflect light rays reflected by the periscope type lens along the second preset direction to the first preset direction.
The step of adjusting the first beam splitting prism 17 to make the first beam splitting prism 17 reflect the light emitted by the inner focusing auto-collimator 18 along the direction of the second optical axis to the first preset direction specifically includes: the inclination angle of the first beam splitting prism 17 is adjusted so that the deviation value of the perpendicularity between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
The step of adjusting the second beam splitter prism 5 to reflect the light rays along the second preset direction reflected by the periscope to the first preset direction specifically includes: the inclination angle of the second beam splitting prism 5 is adjusted so that the perpendicularity deviation value between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
Fig. 8 provides a schematic diagram of the optical path corresponding to step B3. As shown in fig. 8, the mounting angles of the first beam splitting prism 17 and the second beam splitting prism 5 are sequentially adjusted with the second optical axis of the inner focusing autocollimator 18 as a reference, so that neither Rx nor Ry between the first beam splitting prism 17 nor the second beam splitting prism 5 and the second optical axis is greater than 10 ".
B4: a tube mirror 7 is placed between the first beam splitting prism 17 and the second beam splitting prism 5, and the tube mirror 7 is adjusted so that the direction of the optical axis of the tube mirror 7 is in the same direction as the second preset direction.
Fig. 9 provides a schematic diagram of the optical path corresponding to step B4. As shown in fig. 9, the internal adjustment mode of the internal focusing autocollimator 18 is selected, and the mounting angle of the tube mirror 7 is adjusted so that neither Rx nor Ry between the surface of the tube mirror 7 and the second optical axis is greater than 30 ". The tilt attitude of the tube mirror 7 can be calculated by measuring the decentration of the two spherical images of the same lens in the tube mirror 7 by the inner focusing autocollimator 18.
B5: a magnifying lens 9 is placed on one side of the first beam splitter prism 17, and the magnifying lens 9 is adjusted so that the magnifying lens 9 transmits the light rays in the first preset direction reflected by the first beam splitter prism 17 out along the original direction.
Fig. 10 provides a schematic diagram of the optical path corresponding to step B5. As shown in fig. 10, the internal adjustment mode of the internal focusing autocollimator 18 is selected, and the mounting angle of the magnifying lens 9 is adjusted so that neither Rx nor Ry between the mirror surface of the magnifying lens 9 and the second optical axis is greater than 30 ".
B6: the first beam splitting prism 17 is replaced with a third beam splitting prism 8 having the same beam splitting direction as the second beam splitting prism 5.
Fig. 11 provides a schematic view of the optical path corresponding to step B6. As shown in fig. 11, first, the first beam splitter prism 17 is removed and replaced with the third beam splitter prism 8. And the third beam splitting prism 8 is adjusted so that the Rx and Ry between the surface of the third beam splitting prism 8 and the second optical axis are not more than 10 ".
Finally, the illumination unit 6 and the CCD camera are configured by:
c1: an illumination member 6 is placed at one side of the second beam splitting prism 5, the illumination member 6 being adapted to provide the second beam splitting prism 5 with light sources in opposite directions to the first predetermined direction.
C2: a first CCD camera 10 is disposed at one side of the third beam splitter prism 8, and the first CCD camera 10 is used for capturing the image of the object to be measured after being amplified by the tube mirror 7.
And C3: a second CCD camera 11 is disposed at one side of the magnifying lens 9, and the second CCD camera 11 is used for capturing the image of the object to be measured after being magnified by the tube mirror 7 and the magnifying lens 9.
Among them, the positions among the illumination section 6, the first CCD camera 10, and the second CCD camera 11 are as shown in fig. 1. But it is necessary to adjust the deviation of the centers of the two images of the first CCD camera 10 and the second CCD camera 11 to be not more than 5um.
According to the periscope type integrated optical path adjustment method provided by the embodiment of the application, the reference lens 16 is adopted as an optical path reference, the first optical component is calibrated based on the center deviation measuring instrument, the second optical component is calibrated based on the inner focusing autocollimator 18, and the optical axes of the optical paths of the first optical component and the second optical component are butted through the periscope type lens 4, so that the complete adjustment of the periscope type integrated optical path is realized.
In one embodiment of the present application, the magnification of the tube mirror 7 is 4 times and the magnification of the magnifying lens 9 is 5 times. It will be appreciated that the first CCD camera 10 may capture four times the magnified image, while the second CCD camera 11 may capture twenty times the magnified image.
It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to corresponding procedures in the foregoing method embodiments, and are not repeated herein.
In the several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.
The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer readable memory executable by a processor. Based on this understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution in the form of a software product stored in a memory, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method of the various embodiments of the present application. And the aforementioned memory includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
Finally, it should be noted that: the above examples are only specific embodiments of the present application, and are not intended to limit the scope of the present application, but it should be understood by those skilled in the art that the present application is not limited thereto, and that the present application is described in detail with reference to the foregoing examples: any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or perform equivalent substitution of some of the technical features, while remaining within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application. Therefore, the protection scope of the application is subject to the protection scope of the claims.
Claims (10)
1. The periscope type integrated optical circuit assembling and adjusting method is characterized by comprising the following steps of:
calibrating an objective table of a center deviation measuring instrument so as to adjust the direction of a first optical axis corresponding to the center deviation measuring instrument to a first preset direction;
placing a standard reflector at a preset position of a central deviation measuring instrument, and adjusting the standard reflector through the calibrated central deviation measuring instrument so that the standard reflector reflects incident light rays in the first preset direction to a second preset direction perpendicular to the first preset direction;
placing a plane reflector on one side of the standard reflector, and adjusting the plane reflector to enable the plane reflector to reflect light rays reflected by the standard reflector along the second preset direction to a stage of the center deviation measuring instrument along the first preset direction;
placing an objective lens between the standard reflector and the plane reflector, and adjusting the objective lens so that the objective lens transmits the light rays in the second preset direction out along the original direction;
placing a periscope lens on one side of the objective lens, wherein the periscope lens comprises an input lens and an output lens, and the input lens reflects incident light rays in a second preset direction transmitted by the objective lens to the output lens along the opposite direction of the first preset direction;
calibrating the inner focusing auto-collimator to adjust the direction of a second optical axis corresponding to the inner focusing auto-collimator to the opposite direction of the second preset direction;
a first beam splitting prism and a second beam splitting prism are sequentially arranged between the inner focusing autocollimator and the periscope type lens, the beam splitting directions of the first beam splitting prism and the second beam splitting prism are opposite, the first beam splitting prism is adjusted so that the first beam splitting prism reflects light rays emitted by the inner focusing autocollimator along the direction of the second optical axis to a first preset direction, and the second beam splitting prism is adjusted so that the light rays reflected by the periscope type lens along the second preset direction are reflected to the first preset direction;
placing a tube mirror between the first beam splitting prism and the second beam splitting prism, and adjusting the tube mirror so that the direction of the optical axis of the tube mirror is in the same direction as a second preset direction;
placing an amplifying lens on one side of the first beam splitting prism, and adjusting the amplifying lens to enable the amplifying lens to transmit light rays in a first preset direction reflected by the first beam splitting prism in an original direction;
and replacing the first beam splitting prism with a third beam splitting prism with the same beam splitting direction as the second beam splitting prism.
2. The method as recited in claim 1, further comprising:
an illumination component is arranged on one side of the second beam splitting prism, and the illumination component is used for providing a light source opposite to the first preset direction for the second beam splitting prism;
a first CCD camera is arranged at one side of the third beam splitting prism and is used for capturing imaging of the object to be detected after the object to be detected is amplified by the tube mirror;
and a second CCD camera is arranged on one side of the amplifying lens and is used for capturing imaging of the object to be detected after being amplified by the tube mirror and the amplifying lens.
3. The method of claim 1, wherein the step of calibrating the stage of the central deviation measuring instrument to adjust the first optical axis corresponding to the central deviation measuring instrument to a first predetermined direction comprises:
and setting the flat glass on an objective table of the central deviation measuring instrument, and adjusting the objective table so that the verticality deviation value between the flat glass and the first optical axis is within a first preset deviation value.
4. The method according to claim 1, wherein the step of calibrating the inner focusing autocollimator to adjust the direction of the second optical axis corresponding to the inner focusing autocollimator to the opposite direction of the second preset direction specifically includes:
the method comprises the steps that a first beam splitting prism is arranged at a preset position in front of a lens of the internal focusing autocollimator, the first beam splitting prism is arranged between the internal focusing autocollimator and the periscope lens, and the internal focusing autocollimator is adjusted so that the perpendicularity deviation value between the first beam splitting prism and the second optical axis is within a first preset deviation value.
5. The method according to claim 1, wherein the step of placing the standard mirror at a preset position of the central deviation measuring instrument, and adjusting the standard mirror by the calibrated central deviation measuring instrument so that the standard mirror reflects the incident light in the first preset direction to a second preset direction perpendicular to the first preset direction, specifically comprises:
a reference lens is arranged on one side of the standard reflector, and the reference lens comprises a plane and a spherical surface;
adjusting the inclination angle of the standard reflector based on the plane of the reference lens so that the perpendicularity deviation value between the direction of the optical axis of the reference lens and the direction of the first optical axis is smaller than a second preset deviation value;
and adjusting the plane position of the objective table of the center deviation measuring instrument based on the spherical surface of the reference lens so that the distance between the position of the spherical center of the reference lens and the position of the first optical axis is smaller than a second preset distance value.
6. The method of claim 5, wherein the step of calibrating the inner focus autocollimator to adjust the direction of the second optical axis corresponding to the inner focus autocollimator to the opposite direction of the second preset direction further comprises:
and grinding target mounting protruding points for mounting lenses on the periscope type lens, so that the perpendicularity deviation value between the direction of the optical axis of the reference lens and the direction of the second optical axis is not larger than a third preset deviation value, and the distance between the position of the optical axis of the reference lens and the position of the second optical axis is smaller than a third preset distance value.
7. The method according to claim 1, wherein the step of adjusting the first beam splitting prism so that the first beam splitting prism reflects the light emitted by the inner focusing autocollimator along the direction of the second optical axis to a first preset direction, specifically comprises:
and adjusting the inclination angle of the first beam splitting prism so that the perpendicularity deviation value between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
8. The method according to claim 1, wherein the step of adjusting the second beam splitter prism to reflect the light reflected by the periscope lens along the second preset direction to the first preset direction specifically includes:
and adjusting the inclination angle of the second beam splitting prism so that the perpendicularity deviation value between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
9. The method as recited in claim 2, further comprising:
the plane reflector and the objective lens are respectively fixed at preset positions of the first mounting plate;
the periscope type lens, the first beam splitting prism, the second beam splitting prism, the tube lens, the amplifying lens, the illumination component, the first CCD camera and the second CCD camera are respectively fixed at preset positions of a second mounting plate;
the first mounting plate and the second mounting plate are respectively fixed at preset positions of the total mounting plate.
10. The method of claim 1, wherein the tube lens has a magnification of 4 times and the magnifying lens has a magnification of 5 times.
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