CN103363901A - Calibration method oriented towards coaxial counterpoint micro-assembly system - Google Patents
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Abstract
The invention relates to a calibration method oriented towards a coaxial counterpoint micro-assembly system, and belongs to the technical field of micro detection and micro assembly. An autocollimator is adopted. The calibration method oriented towards the coaxial counterpoint micro-assembly system comprises the steps of (1) calibrating the parallelism between a prism face and an imaging face of the autocollimator, (2) calibrating the perpendicularity between a reflected light path of a base body object stage and the imaging face of the autocollimator, and (3) calibrating the perpendicularity between reflected light rays of a target object stage and the imaging face of the autocollimator, (4) installing a CCD and a microscope lens after the autocollimator is disassembled, and carrying out fine adjustment to eliminate installation errors. The purpose that a CCD camera and the optical axis of a prism are perpendicular to the prism face is achieved, the calibration work of relative poses of components, including the prism, the target object stage, the base body object stage and the microscope lens, of the coaxial counterpoint micro-assembly system is accomplished, the assembly accuracy of the coaxial counterpoint micro-assembly system is greatly improved, and the calibration method oriented towards the coaxial counterpoint micro-assembly system is simple and easy to implement.
Description
Technical field
The present invention relates to a kind of scaling method towards the coaxial alignment microassembly system, belong to little detection and little mounting technology field.
Background technology
The demarcation of coaxial alignment microassembly system is the prerequisite that realizes the assembling of high precision micro-miniature structures spare.Demarcation before concrete assembling has vital effect to success ratio and the precision that improves the assembling of micro-miniature structures spare.
The development of MEMS (micro electro mechanical system) (MEMS) technology, so that the target of little assembling constantly tends to miniaturization and microminiaturization, and assembly precision requires at micron even submicron order, and it is the method that at present microassembly system research is both at home and abroad generally adopted that micro-machine vision is introduced little assembling field.
In the coaxial alignment system, the vertical relation of camera lens optical axis and image planes relies on the machining precision of camera lens and the manufacturing accuracy of CCD camera to guarantee, what need to regulate mainly is object plane and the verticality of optical axis and the object plane degree that overlaps with the focusing effect face.Wherein the optical axis of camera system and object plane out of plumb can cause the impact of two aspects: 1. cause the anamorphose distortion; 2. cause simultaneously blur-free imaging of whole object plane; And object plane will directly have influence on the readability of image with the degree that overlaps of complete focusing plane.Can find out, both will have influence on the measuring accuracy of system, therefore, in order to realize high-precision measurement target, it is vital that the verticality of system's object plane and optical axis and object plane and the complete degree that overlaps of focusing plane are carried out high-precision adjusting.
Traditional optical system CCD and camera lens are vertically to arrange, object under the shooting on the platform, obtain image, under the condition of the large depth of field, determine the angle of optical axis deflection by the variation of criterion length, under the condition of the little depth of field, determine the direction of optical axis deflection by the focusing degree of judging four angles of image, yet camera is horizontally disposed in this cover system, optical axis is need to the half-reflection and half-transmission refraction by collinear prism just can shine up and down on two object planes, the factor that affects optical axis verticality in this cover system has two rotary freedoms of CCD and camera lens, two rotary freedoms of matrix object plane, two rotary freedoms of target object plane, and three rotary freedoms of prism.Affect two rotary freedoms that only have object plane of optical axis verticality or two rotary freedoms of camera in traditional optical system, so traditional image information of passing through is judged the method for optical axis verticality and is not suitable in the coaxial alignment microassembly system.
Summary of the invention
The objective of the invention is to propose a kind of scaling method towards the coaxial alignment microassembly system for improving microassembly system to the assembly precision of micro-miniature structures spare.
A kind of scaling method towards the coaxial alignment microassembly system, concrete steps are as follows:
Step 1 is built the coaxial alignment microassembly system;
The coaxial alignment microassembly system comprises CCD camera and microlens, optical prism, matrix objective table, target objective table and three angular displacement platforms (angular displacement platform 1, angular displacement platform 2 and angular displacement platform 3).Its position relationship is: optical prism is positioned over the microlens dead ahead, pose is fixed, the matrix objective table be positioned at optical prism under, the target objective table is positioned at directly over the optical prism; Matrix objective table corresponding edge minute surface 3, its light path to optical prism is light path 2; Target objective table corresponding edge minute surface 2, its light path to optical prism is light path 1; CCD camera and microlens are positioned at light path 1 on the light path after the prismatic refraction, corresponding edge minute surface 1; Prism facets 4 is the half-reflection and half-transmission face of optical prism inside, and face 5 is the fully reflecting surface of prism.Angular displacement platform 1, angular displacement platform 2 and angular displacement platform 3 are connected with CCD camera and microlens, matrix objective table, target objective table respectively.
Step 2, the depth of parallelism of demarcating prism facets 1 and autocollimator imaging surface;
Microlens and CCD camera are taken off, use screw that autocollimator is fixed on the card extender on the angular displacement platform 1, carrying out the imaging surface of autocollimator and the depth of parallelism of prism facets 1 demarcates, concrete grammar is: autocollimator sends directional light and shines prism, face 1, face 4 and face 5 form respectively a picture, wherein the picture of face 1 reflection is the darkest, can find out by the bright-dark degree of picture the picture of face 1 reflection, adjust angular displacement platform 1 picture of face 1 reflection is overlapped with the cross groove of autocollimator inside, then this moment, face 1 was parallel with the imaging plane of autocollimator inside.And in follow-up staking-out work, do not change the pose of prism and autocollimator.
Step 3, the verticality of demarcating matrix objective table reflected light path and autocollimator imaging surface;
Place a level crossing at the matrix objective table, cross grooves more than then on the imaging surface of autocollimator, adjusting angular displacement platform 2 overlaps the inner cross groove of cross groove corresponding to matrix objective table and autocollimator, then the imaging surface of the reflected light path of matrix objective table and autocollimator is vertical at this moment, finishes the staking-out work of matrix objective table.
Step 4, the verticality of spotting objective table reflection ray and autocollimator imaging surface;
Level crossing on the matrix objective table is withdrawn from, place a level crossing at the target objective table, find out it at cross groove corresponding to the imaging surface of autocollimator, adjusting angular displacement platform 3 overlaps the inner cross groove of cross groove corresponding to target objective table and autocollimator, then the imaging surface of the optical path direction of order body objective table and autocollimator is vertical at this moment, finishes the demarcation of target objective table.
Step 2 to step 4 has been determined prism, target objective table and matrix objective table three's spatial relationship.
Step 5 unloads autocollimator, loads onto CCD and microlens, and installation deviation is removed in fine setting, realizes that the optical axis of CCD camera and prism is vertical with face 1.
Concrete grammar is: at first CCD and camera lens are installed on the angular displacement platform 1, and adjust to operating distance; Then place the optical calibrating plate at the matrix objective table, because the microlens depth of field is little, if microlens optical axis and prism facets 1 out of plumb then can cause image local unintelligible, therefore by adjusting angular displacement platform 1 so that four angle imaging clearlies of normalized optical scaling board, thereby guarantee that optical axis is vertical with prism facets 1.The evaluation criterion of imaging clearly is to utilize sharpness evaluation function respectively the sharpness evaluation to be carried out at four angles of image, when the sharpness function at four angles can reach maximal value simultaneously, judges that then CCD is vertical with prism facets 1 with the optical axis of camera lens.
So far, finish demarcation to each ingredient relative pose of coaxial alignment microassembly system.
Beneficial effect
The inventive method is utilized autocollimator, has finished to comprise prism the target objective table, the matrix objective table, microlens improves the assembly precision of system greatly in the staking-out work of interior each ingredient relative pose of coaxial alignment microassembly system, and method is simple.
Description of drawings
Fig. 1 is the scaling method process flow diagram towards the coaxial alignment microassembly system of the present invention;
Fig. 2 is the schematic diagram of coaxial alignment microassembly system in the embodiment;
Fig. 3 is the calibrating principle figure of autocollimator and prism facets 1 in the embodiment;
Fig. 4 is the calibrating principle figure of matrix objective table and prism facets 1 in the embodiment;
Fig. 5 is the calibrating principle figure of target objective table and prism facets 1 in the embodiment;
Fig. 6 is the optical calibrating plate in the embodiment.
Embodiment
The present invention is further detailed explanation below in conjunction with drawings and Examples: the flow process of the inventive method as shown in Figure 1.The principle of the coaxial alignment optical system in the present embodiment as shown in Figure 2, comprising, CCD camera and microlens, optical prism, matrix objective table, target objective table and angular displacement platform 1, angular displacement platform 2, angular displacement platform 3.Because the existence of coaxial optical prism, part enters the picture plane of camera simultaneously on matrix objective table and the target objective table, respectively two width of cloth images are carried out edge identification, calculate the pose deviation of part, deviation compensation to the 6-dof motion platform under the matrix objective table, after compensation is finished, is withdrawn from prism, the target objective table is vertically mobile to the matrix objective table by mechanical arm, finally finishes assembling.
Can find out among Fig. 2, scaling method towards the coaxial alignment microassembly system is to carry out the adjustment of optical axis verticality by three angular displacement platforms, why the pose of prism is not adjusted, because three rotary freedoms of prism all can impact imaging, will be so that the matrix part be 0.15 micron as plane deflection distance along a direction rotation 0.001 degree by calculating prism, target part is being 0.83 micron as plane deflection distance, this will have influence on the assembly precision of coaxial alignment assembly system greatly, yet the adjusting of prism is very inconvenient, existing most of structure all is to carry out the fine setting of angle by stage clip, there is not locked structure, the movement of prism in assembling process will inevitably cause the variation of angle, therefore prism do not carried out the adjusting of angle in scaling method of the present invention.
The core instrument that scaling method of the present invention uses is autocollimator, is usually used in measuring the linearity of guide rail, dull and stereotyped flatness (at this moment being called flatness measuring instrument) etc., also can be by means of turning to the prism annex to measure verticality etc.Photoelectric auto-collimator is applied to Aero-Space, boats and ships, military project etc. more and requires the high industry of precision, such as the test of angle measurement standard, prism angle orientation and monitoring, optical element in the quality assurance (flatness, flatness, verticality, the depth of parallelism etc.) of Mechanical Processing Industry, the measurement verification industry and installation accuracy control etc.Light by the graticule that is positioned at focal plane of lens after, form directional light through object lens.Directional light is returned by the mirror reflects perpendicular to optical axis, overlap with graticule by forming graticule graticule picture in the focal plane behind the object lens again, then this moment, provable autocollimator was parallel with reflecting surface, divided for four steps the coaxial alignment microassembly system was demarcated according to this principle.
(1) demarcation of collinear prism face 1 and the autocollimator imaging surface depth of parallelism as shown in Figure 3;
At first put up the coaxial alignment microassembly system, then camera lens and CCD are taken off, select TRIOPTICS company
The high-speed sampling electronics autocollimator of TA300 model replaces, and carries out the imaging surface of autocollimator and the depth of parallelism of prism facets 1 and demarcates.Concrete grammar is as follows, and the bright-dark degree by imaging finds out the picture of face 1 reflection, allows the cross hair of itself and autocollimator inside overlap by adjusting angular displacement platform 3, then can determine that the imaging plane of face 1 and autocollimator inside is parallel this moment.
(2) demarcation of matrix objective table reflected light path and autocollimator imaging surface verticality as shown in Figure 4;
Place a level crossing at the target objective table, on the imaging surface of autocollimator, can have more a cross hair this moment, by adjusting angular displacement platform 2 it is overlapped with autocollimator internal standard cross groove.
(3) demarcation of target objective table reflection ray and autocollimator imaging surface verticality as shown in Figure 5;
Level crossing on the matrix objective table is withdrawn from, place a level crossing at the target objective table, find out its corresponding cross groove, by adjusting angular displacement platform 1 it is overlapped with autocollimator internal standard cross groove, can illustrate then that at this moment the optical path direction of order body objective table and the imaging surface of autocollimator are vertical.
(4) optical axis of realization CCD and prism is vertical with face 1
Autocollimator is unloaded, CCD and camera lens are installed on the angular displacement platform 3, then at matrix objective table placement optical calibrating plate as shown in Figure 6, utilize sharpness evaluation function respectively the sharpness evaluation to be carried out at four angles of image.
Sharpness evaluation function mainly comprises time domain class function, frequency domain class function, information science function and statistics function etc.Wherein the time domain class function mainly obtains the intensity contrast value of image from the raw data of image, and differentiates the sharpness of image according to the size of numerical value.The frequency domain class function is take Fourier transform as the basis, and image has edge clearly and abundant details clearly, the high fdrequency component of correspondence image Fourier transform, and the blurred picture of out of focus is then corresponding to the decay of high fdrequency component.
The present embodiment adopts the time domain class function to carry out the sharpness evaluation: use the gradient chi square function respectively the sharpness in four corners of image to be calculated, the gradient chi square function is as follows
f(I)=∑∑{[I(x+1,y)-I(x,y)]
2+[I(x,y+1)-I(x,y)]
2}
X wherein, y represent respectively pixel corresponding row and column in image coordinates system, and x is capable in I (x, y) expression, the gray-scale value that y row pixel is corresponding.
When four region gradient values of as shown in Figure 6 scaling board image simultaneously greater than 10000, and its mutual difference thinks then that less than 50 o'clock CCD is vertical with prism facets 1 with the optical axis of camera lens.
Experiment showed, for identical coaxial alignment microassembly system, the coaxial alignment microassembly system assembly precision after having demarcated by the inventive method is 2 μ m, and the coaxial alignment microassembly system assembly precision of demarcating is 20 μ m.
Claims (2)
1. scaling method towards the coaxial alignment microassembly system, it is characterized in that: concrete steps are as follows:
Step 1 is built the coaxial alignment microassembly system;
The coaxial alignment microassembly system comprises CCD camera and microlens, optical prism, matrix objective table, target objective table and displacement platform 1, angular displacement platform 2 and angular displacement platform 3; Its position relationship is: optical prism is positioned over the microlens dead ahead, pose is fixed, the matrix objective table be positioned at optical prism under, the target objective table is positioned at directly over the optical prism; Matrix objective table corresponding edge minute surface 3, its light path to optical prism is light path 2; Target objective table corresponding edge minute surface 2, its light path to optical prism is light path 1; CCD camera and microlens are positioned at light path 1 on the light path after the prismatic refraction, corresponding edge minute surface 1; Prism facets 4 is the half-reflection and half-transmission face of optical prism inside, and face 5 is the fully reflecting surface of prism; Angular displacement platform 1, angular displacement platform 2 and angular displacement platform 3 are connected with CCD camera and microlens, matrix objective table, target objective table respectively;
Step 2, the depth of parallelism of demarcating prism facets 1 and autocollimator imaging surface;
Microlens and CCD camera are taken off, autocollimator is fixed on the card extender on the angular displacement platform 1, carrying out the imaging surface of autocollimator and the depth of parallelism of prism facets 1 demarcates, concrete grammar is: autocollimator sends directional light and shines prism, face 1, face 4 and face 5 form respectively a picture, wherein the picture of face 1 reflection is the darkest, adjusts angular displacement platform 1 picture of face 1 reflection is overlapped with the cross groove of autocollimator inside, and finished surface 1 is parallel with the imaging plane of autocollimator inside; In follow-up staking-out work, do not change the pose of prism and autocollimator;
Step 3, the verticality of demarcating matrix objective table reflected light path and autocollimator imaging surface;
Place a level crossing at the matrix objective table, cross grooves more than then on the imaging surface of autocollimator, adjusting angular displacement platform 2 overlaps the inner cross groove of cross groove corresponding to matrix objective table and autocollimator, then the imaging surface of the reflected light path of matrix objective table and autocollimator is vertical, finishes the staking-out work of matrix objective table;
Step 4, the verticality of spotting objective table reflection ray and autocollimator imaging surface;
Withdraw from the level crossing on the matrix objective table, place a level crossing at the target objective table, find out it at cross groove corresponding to the imaging surface of autocollimator, adjusting angular displacement platform 3 overlaps the inner cross groove of cross groove corresponding to target objective table and autocollimator, then the imaging surface of the optical path direction of order body objective table and autocollimator is vertical, finishes the demarcation of target objective table;
Step 5 unloads autocollimator, loads onto CCD and microlens, and installation deviation is removed in fine setting, realizes that the optical axis of CCD camera and prism is vertical with face 1;
Concrete grammar is: at first CCD and camera lens are installed on the angular displacement platform 1, and adjust to operating distance; Place the optical calibrating plate at the matrix objective table, adjust angular displacement platform 1 so that four angle imaging clearlies of optical calibrating plate, realize the vertical calibrating of optical axis and prism facets 1; So far, finish demarcation to each ingredient relative pose of coaxial alignment microassembly system.
2. a kind of scaling method towards the coaxial alignment microassembly system according to claim 1, it is characterized in that: step 5 utilizes sharpness evaluation function respectively the sharpness evaluation to be carried out at four angles of image, when the sharpness function at four angles reaches maximal value simultaneously, judge that then CCD is vertical with prism facets 1 with the optical axis of camera lens.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105427288A (en) * | 2015-11-10 | 2016-03-23 | 凌云光技术集团有限责任公司 | Calibration method and device of machine vision alignment system |
| CN105487247A (en) * | 2015-12-04 | 2016-04-13 | 中国航空工业集团公司洛阳电光设备研究所 | Optical sensor bending part adjustment and installation system and method |
| CN105758339A (en) * | 2016-03-17 | 2016-07-13 | 中国计量学院 | Optical axis and object plane verticality detection method based on geometric error correction technology |
| CN105841636A (en) * | 2016-03-17 | 2016-08-10 | 中国计量学院 | Optical axis and object surface verticality detection method based on linear motion component error compensation |
| CN105841617A (en) * | 2016-05-25 | 2016-08-10 | 北京理工大学 | Confocal common-imaging alignment micro assembling system and calibration method |
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| CN110530298A (en) * | 2019-08-13 | 2019-12-03 | 中山依瓦塔光学有限公司 | The passive type auto-collimation depth of parallelism calibrates platform and calibration system |
| CN112936315A (en) * | 2021-03-18 | 2021-06-11 | 深圳市梯易易智能科技有限公司 | Mechanical arm calibration method and device based on imaging mode |
| CN113857839A (en) * | 2020-06-30 | 2021-12-31 | 宁波舜宇光电信息有限公司 | Optical element assembling method and assembling machine |
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| CN114545645A (en) * | 2022-02-28 | 2022-05-27 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Periscopic integrated optical path assembling and adjusting method |
| CN115342757A (en) * | 2022-10-19 | 2022-11-15 | 长春理工大学 | Device and method for detecting parallelism of mechanical shaft of coaxial double-shaft turntable |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6628405B1 (en) * | 1999-02-01 | 2003-09-30 | Mirage Development, Ltd. | Optical angle finder and coaxial alignment device |
| CN101972928A (en) * | 2010-08-19 | 2011-02-16 | 北京理工大学 | Automatic aligning assembly system for micro members |
| CN102183221A (en) * | 2011-03-25 | 2011-09-14 | 天津大学 | Measurement method for verticality of optical axis of microscope system |
| CN102735191A (en) * | 2012-06-06 | 2012-10-17 | 南京柯瑞特种陶瓷股份有限公司 | Device for determining verticality of honeycomb ceramics |
-
2013
- 2013-07-15 CN CN201310295766.2A patent/CN103363901B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6628405B1 (en) * | 1999-02-01 | 2003-09-30 | Mirage Development, Ltd. | Optical angle finder and coaxial alignment device |
| CN101972928A (en) * | 2010-08-19 | 2011-02-16 | 北京理工大学 | Automatic aligning assembly system for micro members |
| CN102183221A (en) * | 2011-03-25 | 2011-09-14 | 天津大学 | Measurement method for verticality of optical axis of microscope system |
| CN102735191A (en) * | 2012-06-06 | 2012-10-17 | 南京柯瑞特种陶瓷股份有限公司 | Device for determining verticality of honeycomb ceramics |
Non-Patent Citations (3)
| Title |
|---|
| （墨）D.马拉卡拉等: "《光学车间检测 原书第3版》", 30 June 2012 * |
| 周智等: "基于视觉对准的非硅MEMS微小型结构件微装配系统", 《兵工自动化》 * |
| 唐永龙等: "微装配正交精确对准系统的设计", 《光学 精密工程》 * |
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