CN110530298A - The passive type auto-collimation depth of parallelism calibrates platform and calibration system - Google Patents

The passive type auto-collimation depth of parallelism calibrates platform and calibration system Download PDF

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Publication number
CN110530298A
CN110530298A CN201910745349.0A CN201910745349A CN110530298A CN 110530298 A CN110530298 A CN 110530298A CN 201910745349 A CN201910745349 A CN 201910745349A CN 110530298 A CN110530298 A CN 110530298A
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CN
China
Prior art keywords
reflection
transmission
passive type
parallelism
lens module
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CN201910745349.0A
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Chinese (zh)
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CN110530298B (en
Inventor
叶晓辉
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ZHONGSHAN UVATA OPTICAL Co Ltd
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ZHONGSHAN UVATA OPTICAL Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for

Abstract

This application involves technical field of optical detection, more particularly to a kind of passive type auto-collimation depth of parallelism calibrates platform and calibration system, calibrating platform includes substrate, substrate is equipped with the half-reflection and half-transmission lens module for being reflected parallel rays, it is equipped with substrate in half-reflection and half-transmission lens module into the half-reflection and half-transmission reflecting surface at 45 degree of angles, the side of half-reflection and half-transmission lens module is equipped with the image-forming module being oppositely arranged with half-reflection and half-transmission reflecting surface to allow the parallel rays of reflection to enter, and the downside that the bottom of half-reflection and half-transmission lens module is located at half-reflection and half-transmission reflecting surface is equipped with fully reflecting surface;Calibration system includes the parallel light tube for issuing parallel rays, further includes above-mentioned passive type auto-collimation depth of parallelism calibration platform.The application uses high-resolution image sensors, receives test pattern by prism planes and emits image, is then now in tilt angle by software computational discrimination graph card, verticality is adjusted in conjunction with software real-time display tilt angle data, calibration more has foundation.

Description

The passive type auto-collimation depth of parallelism calibrates platform and calibration system
[technical field]
This application involves technical field of optical detection more particularly to a kind of passive type auto-collimation depth of parallelism calibration platform and schools Barebone.
[background technique]
Parallel light tube field does not receive the instrument that test pattern carries out depth of parallelism calibration at present, and tradition is used to differentiate parallel The mode of degree mainly carries out adjustment with autocollimator or level meter, however, differentiating test pattern using both the above mode It has the disadvantage in that 1, autocollimator volume is too big when the depth of parallelism, can be limited to calibration equipment more;2, level meter adjusting accuracy has Limit, without detection data.
[summary of the invention]
To solve the problems, such as that existing parallel light tube field does not receive the instrument that test pattern carries out depth of parallelism calibration, this Shen A kind of passive type auto-collimation depth of parallelism calibration platform and calibration system please be provided.
The application is technical solution used by solving its technical problem:
The passive type auto-collimation depth of parallelism calibrates platform, including substrate, and the substrate is equipped with for carrying out to parallel rays The half-reflection and half-transmission lens module of reflection, interior be equipped with of the half-reflection and half-transmission lens module are reflected with substrate at the half-reflection and half-transmission at 45 degree of angles Face, the side of the half-reflection and half-transmission lens module, which is equipped with, to be oppositely arranged to allow the directional light of reflection with the half-reflection and half-transmission reflecting surface The image-forming module that line enters, the downside that the bottom of the half-reflection and half-transmission lens module is located at half-reflection and half-transmission reflecting surface are equipped with complete Reflecting surface.
The passive type auto-collimation depth of parallelism as described above calibrates platform, described image forming module include imaging sensor and It is fixed on the camera lens of described image sensor, the relatively described half-reflection and half-transmission lens module setting of the camera lens.
The passive type auto-collimation depth of parallelism as described above calibrates platform, described image forming module and the half-reflection and half-transmission mould It is equipped between block for fixing half-reflection and half-transmission lens module while connecting the connection pedestal of image forming module.
The passive type auto-collimation depth of parallelism as described above calibrates platform, and one end of the connection pedestal is equipped with anti-for described half The other end of the test station that semi-transparent lens module is placed, the connection pedestal is equipped with the installation being connected to the test station The camera lens in hole, described image forming module is set in the mounting hole.
The passive type auto-collimation depth of parallelism as described above calibrates platform, the relatively described connection pedestal of described image sensor One end is equipped with the Connection protrusion protruded into mounting hole with mounting hole cooperation, and the Connection protrusion is recessed for the camera lens The shrinkage pool that protrudes into of rear end, the fixed ring for fixed lens is equipped in the shrinkage pool.
The passive type auto-collimation depth of parallelism as described above calibrates platform, the half-reflection and half-transmission lens module with described image at The axle center of pattern block is that guiding is rotatably set in the test station of the connection pedestal, and the connection pedestal is equipped with and is used for Adjust the rotating and regulating mechanism of the levelness of half-reflection and half-transmission lens module direction of rotation.
The passive type auto-collimation depth of parallelism as described above calibrates platform, and the rotating and regulating mechanism includes being opened in attachment base The screw hole of body upper surface and two sides and the axle center being threadedly coupled with screw hole adjustment fixed screw, in half-reflection and half-transmission lens Module is locked after adjusting its axle center by axle center adjustment fixed screw.
The passive type auto-collimation depth of parallelism as described above calibrates platform, is additionally provided on the substrate for described half anti-half The horizontal adjusting mechanism that the depth of parallelism of saturating lens module is finely adjusted, the horizontal adjusting mechanism include being set to described image to form Bottom plate between the bottom surface and substrate of module is sequentially arranged in 4 adjusted leveling screws of 4 corner edges of bottom plate and is sequentially arranged in 4 corner edges of bottom plate and 4 jackscrews adjacent with corresponding adjusted leveling screws.
The passive type auto-collimation depth of parallelism as described above calibrates platform, being surrounded by of the substrate be fixed on substrate with Surround the half-reflection and half-transmission lens module, it is described connection pedestal and described image forming module side plate, the side plate it is upper End is equipped with cover board, and the position that the half-reflection and half-transmission lens module is corresponded on the cover board offers light-conductive hole.
Passive type auto-collimation depth of parallelism calibration system further includes above-mentioned including the parallel light tube for issuing parallel rays The passive type auto-collimation depth of parallelism calibrate platform.
Compared with prior art, the passive type auto-collimation depth of parallelism calibration platform of the application has the following advantages:
1, using high-resolution image sensors, test pattern is received by prism planes and emits image, then by soft Part computational discrimination graph card is now in tilt angle, and verticality is adjusted in conjunction with software real-time display tilt angle data, calibration More there is foundation.
2, the stable horizontal adjusting mechanism of built-in simplicity, prism and substrate verticality are adjustable, full accuracy ± 1 second.
3, calibration platform overall volume is small, and versatile, the equipment for adapting to different volumes is calibrated.
[Detailed description of the invention]
Fig. 1 is the structural schematic diagram of the passive type auto-collimation depth of parallelism calibration platform of the application;
Fig. 2 is the exploded view of the passive type auto-collimation depth of parallelism calibration platform of the application;
Fig. 3 be Fig. 1 along A-A to cross-sectional view.
[specific embodiment]
The application is described further below in conjunction with the accompanying drawings and the specific embodiments.
Attached drawing 1 is please referred to attached drawing 3, a kind of passive type auto-collimation depth of parallelism calibrates platform, including substrate 1, is fixed on base The side plate 11 of plate surrounding and cover board 12 set on side plate upper end, the opposite region surrounded of the substrate 1, side plate 11 and cover board 12 It is interior to be equipped with half-reflection and half-transmission lens module 2 for being reflected parallel rays, be equipped in the half-reflection and half-transmission lens module with At the half-reflection and half-transmission reflecting surface 21 at 45 degree of angles, the side of the half-reflection and half-transmission lens module 2 is equipped with and the half-reflection and half-transmission substrate The image-forming module 4 that reflecting surface is oppositely arranged to allow the parallel rays of reflection to enter, the bottom of the half-reflection and half-transmission lens module 2 The downside that portion is located at half-reflection and half-transmission reflecting surface 21 is equipped with fully reflecting surface 22.In the present embodiment, described half is corresponded on the cover board 12 The position of anti-semi-transparent lens module offers light-conductive hole 120, by light-conductive hole 120 vertically into parallel rays through more than half anti-half Saturating lens module 2 enters in image-forming module 4 after reflecting.
In the present embodiment, the half-reflection and half-transmission lens module 2 is prism, and described image forming module 4 includes image sensing Device 42 and the telephoto lens 41 for being fixed on described image sensor, the relatively described half-reflection and half-transmission lens module of telephoto lens 41 2 settings.Part parallel rays after the reflection of half-reflection and half-transmission reflecting surface enter the camera lens in and image in described image at Pattern block, part parallel rays then pass through the bottom surface that half-reflection and half-transmission reflecting surface enters prism, are back to after bottom surface is totally reflected The parallel light tube of parallel rays is issued, then enters mirror through half-reflection and half-transmission reflecting surface after the plane mirror on parallel light tube vertically reflects In head and image in described image forming module.By judging whether secondary imaging is overlapped, to judge to issue parallel rays Whether the test pattern on parallel light tube is parallel.
It is equipped in the present embodiment, between described image forming module 4 and the half-reflection and half-transmission lens module 2 for fixed half Anti- semi-transparent lens module connects the connection pedestal 3 of image forming module simultaneously.Specifically, one end of the connection pedestal 3 is equipped with For the test station 31 that the half-reflection and half-transmission lens module is placed, the other end of the connection pedestal 3 is equipped with and the test work The telephoto lens 41 of the mounting hole 32 of position connection, described image forming module is set in the mounting hole 32.It is described in the present embodiment It is convex that one end of the relatively described connection pedestal 3 of imaging sensor 42 is equipped with the connection protruded into mounting hole with the mounting hole 32 cooperation Portion 421, the Connection protrusion 421 are recessed the shrinkage pool protruded into for the rear end of the camera lens 41, are equipped with and are used in the shrinkage pool The fixed ring 43 of fixed lens.Imaging sensor is high pixel CCD, and when assembly, after camera lens adjusts infinity, dispensing is fixed on In fixed ring.
Further, the half-reflection and half-transmission lens module 2 is that guiding is rotatable with the axle center of described image forming module 4 In the test station 31 of the connection pedestal 3, the connection pedestal 3 is equipped with for adjusting half-reflection and half-transmission lens module 2 The rotating and regulating mechanism 5 of the levelness of direction of rotation.In the present embodiment, the rotating and regulating mechanism 5 includes being opened in attachment base The screw hole of body upper surface and two sides and the axle center being threadedly coupled with screw hole adjustment fixed screw, in half-reflection and half-transmission lens Module is locked after adjusting its axle center by axle center adjustment fixed screw.After image-forming module assembles, by prism set Enter to connect in the test station of pedestal and be oriented to the axle center of telephoto lens and image-forming module, adjusts axis direction and hang down It is fixed after straight degree with axle center adjustment fixed screw.
Preferably, the level being finely adjusted for the depth of parallelism to the half-reflection and half-transmission lens module 2 is additionally provided on substrate 1 Adjustment mechanism 6, the horizontal adjusting mechanism 6 include the bottom plate between the bottom surface and substrate 1 of described image forming module 4 61,4 adjusted leveling screws 62 of 4 corner edges of bottom plate are sequentially arranged in and be sequentially arranged in 4 corner edges of bottom plate and with it is corresponding Adjacent 4 jackscrews 63 of adjusted leveling screws.The verticality of prism axis direction adjusts fixed screw by axle center and adjusts Afterwards, the depth of parallelism by 4 adjusted leveling screws and 4 jackscrews to prism relative to substrate carries out further accurate adjustment.
In addition, the application also provides a kind of passive type auto-collimation depth of parallelism calibration system, including for issuing parallel rays Parallel light tube and with parallel light tube cooperation the above-mentioned passive type auto-collimation depth of parallelism calibrate platform.Calibration system detection test The process of the graph card depth of parallelism is as follows:
1, parallel light tube emits beam in infinite distant positions;
2, by the half-reflection and half-transmission face of prism hypotenuse/facet surfaces;
3, half energy light enters the bottom surface of prism by the face;
4, parallel light tube test pattern pattern is returned again to the pattern of parallel light tube glass after bottom surface is totally reflected It is interior;
5, half energy light enters heavy caliber telephoto lens and is imaged on high pixel CCD by the face;
6, heavy caliber telephoto lens can take two test patterns at this time;
It is completely coincident i.e. discriminating test graph card if 7, two patterns are adjusted mechanism and can reach and has reached the depth of parallelism.
To sum up, the passive type auto-collimation depth of parallelism calibration platform of the application has the following advantages:
1, using high-resolution image sensors, test pattern is received by prism planes and emits image, then by soft Part computational discrimination graph card is now in tilt angle, and verticality is adjusted in conjunction with software real-time display tilt angle data, calibration More there is foundation.
2, the stable horizontal adjusting mechanism of built-in simplicity, prism and substrate verticality are adjustable, full accuracy ± 1 second.
3, calibration platform overall volume is small, and versatile, the equipment for adapting to different volumes is calibrated.
The foregoing is merely the preferred embodiments of the application, not be used to limit the application implementation range, other it is all its Principle and basic structure are same as the present application or approximate, within the scope of protection of this application.

Claims (10)

1. the passive type auto-collimation depth of parallelism calibrates platform, including substrate (1), it is characterised in that: the substrate (1) is equipped with and is used for To the half-reflection and half-transmission lens module (2) that parallel rays is reflected, it is equipped with substrate in the half-reflection and half-transmission lens module at 45 The half-reflection and half-transmission reflecting surface (21) at angle is spent, the side of the half-reflection and half-transmission lens module (2) is equipped with to be reflected with the half-reflection and half-transmission The image-forming module (4) that face is oppositely arranged to allow the parallel rays of reflection to enter, the bottom of the half-reflection and half-transmission lens module (2) The downside that portion is located at half-reflection and half-transmission reflecting surface (21) is equipped with fully reflecting surface (22).
2. the passive type auto-collimation depth of parallelism according to claim 1 calibrates platform, it is characterised in that: described image shaping mould Block (4) includes imaging sensor (42) and the camera lens (41) for being fixed on described image sensor, and the camera lens (41) is relatively described Half-reflection and half-transmission lens module (2) setting.
3. the passive type auto-collimation depth of parallelism according to claim 2 calibrates platform, it is characterised in that: described image shaping mould It is equipped between block (4) and the half-reflection and half-transmission module (2) for fixing half-reflection and half-transmission lens module while connecting image shaping mould The connection pedestal (3) of block.
4. the passive type auto-collimation depth of parallelism according to claim 3 calibrates platform, it is characterised in that: the connection pedestal (3) one end is equipped with the test station (31) placed for the half-reflection and half-transmission lens module, the other end of connection pedestal (3) Equipped with the mounting hole (32) being connected to the test station, the camera lens (41) of described image forming module is set to the mounting hole (32) It is interior.
5. the passive type auto-collimation depth of parallelism according to claim 4 calibrates platform, it is characterised in that: described image sensor (42) one end of the relatively described connection pedestal is equipped with the Connection protrusion protruded into mounting hole with the mounting hole (32) cooperation (421), the Connection protrusion (421) is recessed the shrinkage pool protruded into for the rear end of the camera lens (41), is equipped in the shrinkage pool Fixed ring (43) for fixed lens.
6. the passive type auto-collimation depth of parallelism according to claim 4 calibrates platform, it is characterised in that: the half-reflection and half-transmission is saturating Mirror module (2) is with the test work that the axle center of described image forming module (4) is that guiding is rotatably set to connection pedestal (3) In position (31), connection pedestal (3) is equipped with the rotation for adjusting the levelness of half-reflection and half-transmission lens module (2) direction of rotation Turn adjustment mechanism (5).
7. the passive type auto-collimation depth of parallelism according to claim 6 calibrates platform, it is characterised in that: the rotation adjustment machine Structure (5) includes that the axle center for being opened in the screw hole of connection pedestal upper surface and two sides and being threadedly coupled with screw hole adjusts admittedly Determine screw, fixed screw is adjusted by axle center after half-reflection and half-transmission lens module adjusts its axle center and is locked.
8. the passive type auto-collimation depth of parallelism according to claim 1 calibrates platform, it is characterised in that: on the substrate (1) It is additionally provided with the horizontal adjusting mechanism (6) being finely adjusted for the depth of parallelism to the half-reflection and half-transmission lens module (2), the level Adjustment mechanism includes the bottom plate (61) being set between the bottom surface and substrate (1) of described image forming module (4), is sequentially arranged in bottom plate 4 adjusted leveling screws (62) of 4 corner edges and be sequentially arranged in 4 corner edges of bottom plate and with corresponding adjusted leveling screws 4 adjacent jackscrews (63).
9. the passive type auto-collimation depth of parallelism according to claim 1 calibrates platform, it is characterised in that: the substrate (1) It is surrounded by and is fixed on substrate to surround the half-reflection and half-transmission lens module (2), the connection pedestal (3) and described image The upper end of the side plate (11) of forming module (4), the side plate (11) is equipped with cover board (12), and described half anti-half is corresponded on the cover board The position of saturating lens module (2) offers light-conductive hole (120).
10. passive type auto-collimation depth of parallelism calibration system, including the parallel light tube (a) for issuing parallel rays, feature exists In: it further include the described in any item passive type auto-collimation depth of parallelism calibration platforms of claim 1-9.
CN201910745349.0A 2019-08-13 2019-08-13 Passive auto-collimation parallelism calibration platform and calibration system Active CN110530298B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112764165A (en) * 2021-01-12 2021-05-07 北京凯普林光电科技股份有限公司 Adjustable optical fiber polarization collimating lens
CN114295078A (en) * 2021-12-28 2022-04-08 歌尔股份有限公司 Prism calibration device and parallelism calibration method
CN115342757A (en) * 2022-10-19 2022-11-15 长春理工大学 Device and method for detecting parallelism of mechanical shaft of coaxial double-shaft turntable

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JP2014085158A (en) * 2012-10-19 2014-05-12 Fujikura Ltd Apparatus and method for measuring parallelism of transparent body
CN105424322A (en) * 2015-11-09 2016-03-23 中国科学院长春光学精密机械与物理研究所 Self-calibration optical axis parallelism detector and detection method
RU2016109398A (en) * 2015-03-30 2017-09-20 Открытое Акционерное Общество "Пеленг" METHOD FOR CALIBRATING A LARGE-SIZED OPTICAL-ELECTRONIC APPARATUS AND DEVICE FOR ITS IMPLEMENTATION
CN210833455U (en) * 2019-08-13 2020-06-23 中山依瓦塔光学有限公司 Passive auto-collimation parallelism calibration platform

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Publication number Priority date Publication date Assignee Title
JP2014085158A (en) * 2012-10-19 2014-05-12 Fujikura Ltd Apparatus and method for measuring parallelism of transparent body
CN103363901A (en) * 2013-07-15 2013-10-23 北京理工大学 Calibration method oriented towards coaxial counterpoint micro-assembly system
RU2016109398A (en) * 2015-03-30 2017-09-20 Открытое Акционерное Общество "Пеленг" METHOD FOR CALIBRATING A LARGE-SIZED OPTICAL-ELECTRONIC APPARATUS AND DEVICE FOR ITS IMPLEMENTATION
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112764165A (en) * 2021-01-12 2021-05-07 北京凯普林光电科技股份有限公司 Adjustable optical fiber polarization collimating lens
CN114295078A (en) * 2021-12-28 2022-04-08 歌尔股份有限公司 Prism calibration device and parallelism calibration method
CN115342757A (en) * 2022-10-19 2022-11-15 长春理工大学 Device and method for detecting parallelism of mechanical shaft of coaxial double-shaft turntable
CN115342757B (en) * 2022-10-19 2022-12-27 长春理工大学 Device and method for detecting parallelism of mechanical shafts of coaxial double-shaft rotary table

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