CN105841617B - It is a kind of confocal altogether as contraposition microassembly system and calibration method - Google Patents
It is a kind of confocal altogether as contraposition microassembly system and calibration method Download PDFInfo
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- CN105841617B CN105841617B CN201610352169.2A CN201610352169A CN105841617B CN 105841617 B CN105841617 B CN 105841617B CN 201610352169 A CN201610352169 A CN 201610352169A CN 105841617 B CN105841617 B CN 105841617B
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- 239000011159 matrix material Substances 0.000 claims abstract description 26
- 238000001000 micrograph Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 16
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 9
- 239000004579 marble Substances 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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- 238000011030 bottleneck Methods 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound 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[C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 238000004624 confocal microscopy Methods 0.000 description 1
- 238000009510 drug design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N magnesium Chemical compound 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[Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical means
Abstract
It is a kind of confocal altogether as contraposition microassembly system and calibration method are including a kind of confocal altogether as contraposition microassembly system (abbreviation system) and one kind are confocal altogether as contraposition micro assemby calibration method (abbreviation method)；System includes mainly laser confocal microscope, gantry frame mechanism, Dove prism and its clamping device, prism pose adjustment mechanism, base part and its clamper, target part and its clamper, matrix and target objective table；Method includes：1) Dove prism pose is adjusted, angular deviation is eliminated；2) fitting, alignment and the fixation of two pieces of scaling boards are completed, then releases the two constraint；3) two pieces of scaling boards are reversely detached, then laser confocal microscope is moved into right over Dove prism；4) centre coordinate that two pieces of scaling boards and Dove prism are measured by laser confocal microscope, acquire two pieces of scaling boards laser confocal microscope image plane the relative position error.The present invention is simple and practicable, improves alignment and the assembly precision of micro assemby.
Description
Technical field
The present invention relates to a kind of confocal contraposition microassembly system of picture altogether and calibration methods, belong to micro assemby, micro-vision inspection
Survey technology field.
Background technology
The guiding of aviation field and guidance instrument, the fuze component in SMART AMMUNITION, in inertial confinement fusion system
Target component etc. is all the urgent need Core equipment of China's tackle key problems in science and technology, and assembly is horizontal seriously to restrict the high-end manufacture of a new generation
The development of industry.For the precision and performance of guarantee mini system, the fit-up gap of this kind of instrument or component generally requires strictly to control
System in the micron-scale, and aligns accuracy of detection and needs to reach submicron order.
Due to being limited by optical diffraction limit, resolution ratio is traditional micro-vision imaging system with illumination wavelengths
The alignment accuracy of detection of an order of magnitude, part is difficult to reach submicron order.And due to the limitation of limited depth of focus, in depth
Degree direction has the occasion for being accurately positioned requirement to cannot be satisfied requirement.
The concept of confocal microscopy is since late 1950s are proposed by American Minsky, since it has height
It differentiates and is especially higher longitudinal resolution, and have the characteristics that preferable digital picture three-dimensional chromatography ability, answered extensively
Detection and analysis used in fields such as micro-electronic manufacturing, biomedicine, material science, accurate measurements.Its lateral resolution is phase
With 1.4 times of the ordinary optical microscope of hole coke ratio.
In order to further increase micro element assembly alignment accuracy of detection, propose using confocal altogether as contraposition testing principle, profit
The special ability having in terms of three-dimensional imaging with confocal scanning optical microscopy solves to be existed with the detection of common microoptic
The bottleneck problem encountered in micro element assembling process enables the assembly alignment accuracy of detection of micro element to reach submicron order, institute
With confocal altogether as the calibration of contraposition microassembly system is to realize the premise of Micro-miniature parts high-precision assembly.
Invention content
It is an object of the invention to improve alignment accuracy of detection of the microassembly system to micro element, ensure contraposition accuracy of detection
Submicron order can be reached, it is proposed that a kind of confocal altogether as contraposition microassembly system and calibration method.
It is a kind of confocal altogether as contraposition microassembly system and calibration method include a kind of confocal altogether as contraposition microassembly system (letter
Title system) and it is a kind of confocal altogether as contraposition micro assemby calibration method (abbreviation method)；
Wherein, system includes mainly Dali Shitai County, laser confocal microscope, gantry frame mechanism, Dove prism, prism position
Appearance adjustment mechanism, prism clamping device, base part, base part clamper, matrix objective table, target part, target part
Clamper, target objective table, grating scale and monitor station；
Wherein, prism pose adjustment mechanism is the prism pose adjustment mechanism of six degree of freedom；Wherein, base part and target
Part is one kind in axial workpiece, hole type parts, flat-type part and three-dimensional micro part；
The base part is " ten " word groove matrix scaling board；
The target part is " ten " word groove target designation plate；
Wherein, " ten " word groove matrix scaling board and " ten " word groove target designation plate, belong to three-dimensional micro part,
Follow-up referred to as two pieces of scaling boards；
Wherein, base part clamper and target part clamper are vacuum adsorption type clamper, electrostatic adsorption type clamping
Device, liquid adsorption formula clamper, marmem minisize clamper, electrostatic clamper, electromagnetic type clamper, piezoelectric type folder
Holder or combined type clamper；The lateral resolution of laser confocal microscope can reach 0.12 μm；Gantry frame mechanism includes dragon
Door frame and mounted on y, z direction guiding rail on portal frame top and the x direction guiding rails of portal frame bottom end；Dove prism upper surface has reference
Cross groove and square pattern groove；Grating scale is made of scale grating and grating reading head two parts；Monitor station is sharp
The motorized subject table in the direction x, y of light Laser Scanning Confocal Microscope；
Wherein, it is flat to be that base part Two-dimensional Position moving stage and six degree of freedom PI parallel micromotion platforms form for matrix objective table
Platform；Target objective table is target part Two-dimensional Position moving stage and the platform that target part lifting platform forms；
It is a kind of confocal altogether as the function of each component part in contraposition microassembly system is：Dali Shitai County is a kind of confocal picture altogether
Align the pedestal of microassembly system；Laser confocal microscope is used to acquire the image of part；Gantry frame mechanism is sharp for driving
Light Laser Scanning Confocal Microscope realizes the straight-line displacement in tri- directions x, y and z；Dove prism is for reflecting base part and target part
Picture；Prism clamping device is used for stable holding Dove prism；Prism pose adjustment mechanism can realize the accurate micro- of six direction
It adjusts；Base part clamper and target part clamper are respectively used to clamping base part and target part；Matrix objective table
Function is the precise fine-adjustment to base part six direction；The function of target objective table is to realize target part along x, y and z tri-
The straight-line displacement in direction；Straight-line displacement of the grating scale for detecting laser confocal microscope in high precision, accuracy of detection is up to 0.1
μm；Monitor station is for placing detection sample；It is a kind of confocal altogether as the connection and installation of each component part in contraposition microassembly system
Relationship is as follows：
Laser confocal microscope is mounted on the frame mechanism of gantry, and gantry frame mechanism is mounted on marble countertop；It is trapezoidal
Prism is positioned over immediately below laser confocal microscope, and Dove prism stable holding is on prism clamping device, prism clamping machine
Structure is rigidly connected with prism pose adjustment mechanism, and prism pose adjustment mechanism is mounted on marble countertop；Base part two dimension
Displacement platform connects composition matrix objective table with six degree of freedom PI parallel micromotion platforms；Target part Two-dimensional Position moving stage and target part
Lifting platform connection composition target objective table；Matrix objective table is located at the both sides of Dove prism with target objective table, and all pacifies
On marble countertop；Base part clamper is mounted on matrix objective table, and target part clamper is carried mounted on target
On object platform；Base part clamping is on base part clamper, and target part clamping is on target part clamper, and matrix zero
Part is respectively aligned to two inclined-planes of Dove prism with target part；Grating scale is attached to the side of portal frame top y direction guiding rails；Detection
Platform is mounted on marble countertop；
It is a kind of confocal altogether as contraposition micro assemby calibration method, it is realized especially by following steps：
Step 1: by Dove prism stable holding on prism clamping device, prism clamping device and prism pose tune
Complete machine structure is rigidly connected, then reads zero to the six direction of prism pose adjustment mechanism；
Wherein, the six direction is that tri- angles in tri- directions x, y and z and α, β and γ turn to；
Step 2: with the square pattern groove of laser confocal microscope observation Dove prism upper surface, obtain square
The image of shape pattern measures the diagonal line of square pattern and the angle of photo coordinate system and square pattern in image plane
Two cornerwise length, then calculate angular deviation of the Dove prism around tri- directions x, y and z, utilize the adjustment of prism pose
Mechanism, which realizes, adjusts the precision of Dove prism pose, by the way that Dove prism is respectively adjusted above-mentioned measurement around tri- directions x, y and z
Angular deviation negative value eliminate angular deviation；
Wherein, the diagonal line of square pattern and the angle of photo coordinate system are denoted as θ i in image plane, indicate that ith is surveyed
The angle of the diagonal line and photo coordinate system square in image plane measured；
Two cornerwise length of square pattern are denoted as ACi and BDi respectively, indicate the pros that ith measurement obtains
Two cornerwise length of shape；
Angular deviation of the Dove prism around tri- directions x, y and z is denoted as α i, β i and γ i respectively；
Wherein, angular deviation α i are calculated by α i=arcsinACi/AC0；
Wherein, arcsin indicates arcsin function；
Wherein, angular deviation β i, specially：β i=arcsinBDi/BD0 are calculated；
Wherein, AC0, BD0 are the cornerwise physical length of Dove prism upper surface square；
Wherein, angular deviation γ i are equal to θ i；
Wherein, the Dove prism respectively adjusts the angular deviation negative value of above-mentioned measurement around tri- directions x, y and z, that is, divides
Not adjustment-α i ,-β i and-γ i angles；
Wherein, the i value ranges are positive integer；I is assigned into initial value in step 2：I=1；
Step 3: the size for angular deviation α i, the β i and γ i that judgment step two is calculated, and it is adjusted trapezoidal rib
Operation whether mirror pose：
If the value of 3.1 angular deviation α i, β i and γ i are respectively less than 0.001 °, in defined error range, then no longer need to adjust
Whole Dove prism pose, skips to step 4；
3.2 enable i=i+1, skip to step 2, calculate angu-lar deviation α i, β i of the Dove prism around tri- directions x, y and z
With γ i, angular deviation α i, the β i and γ i calculated again using prism pose adjustment mechanism removal process two；
Step 4: by being bonded altogether as aligning two pieces of scaling boards that micro assemby is calibrated for confocal, it is micro- in laser co-focusing
Alignment function is completed under mirror, so that " ten " word groove of two pieces of scaling boards is overlapped, then two pieces of scaling boards are fixed together；
Step 5: with base part clamper by two pieces of scaling board stable holdings in step 4, specially：By target zero
Part clamper is close to " ten " word groove target designation plate, until contact, stable holding " ten " word groove target designation plate；It solves again
Except the constraint between two pieces of scaling boards；
Step 6: base part clamper drives " ten " word groove matrix scaling board, meanwhile, target part clamper drives
" ten " word groove target designation plate, is reversely detached；Dove prism is slowly moved between two pieces of scaling boards, makes Dove prism
Two inclined-planes be respectively toward to two pieces of scaling boards, then laser confocal microscope is moved into right over Dove prism；
Step 7: measuring the centre coordinate of two pieces of scaling board " ten " word grooves and trapezoidal by laser confocal microscope
The coordinate of prism centers groove acquires phase of " ten " the word groove center in laser confocal microscope image plane of two pieces of scaling boards
To site error, complete confocal altogether as the calibration of contraposition micro assemby.
Advantageous effect
It is a kind of confocal altogether as contraposition microassembly system and calibration method, compared with other microassembly systems and calibration method,
It has the advantages that：
1. a kind of confocal picture altogether of the invention is aligned microassembly system and calibration method and is detected altogether as aligning using confocal, into one
Step improves micro element assembly alignment accuracy of detection, and micro element assembly alignment accuracy of detection is enable to reach submicron order；
2. a kind of confocal contraposition microassembly system of picture altogether of the invention uses confocal altogether as contraposition principle, rational design contraposition
Light path ensure that suitable operating distance using Dove prism；
3. the present invention it is a kind of it is confocal altogether as contraposition micro assemby calibration method using prism upper surface reference cross groove with
Square pattern completes the calibration of Dove prism pose, based on confocal altogether as the principle completion of contraposition microassembly system is confocal total
As contraposition micro assemby calibration, the assembly precision of microassembly system is greatly improved, method is simple and practicable.
Description of the drawings
Fig. 1 is a kind of tomograph of confocal contraposition microassembly system of picture altogether in the present invention and embodiment 1；
Fig. 2 is that one kind in the present invention and embodiment 2 is confocal altogether as contraposition microassembly system assembly schematic diagram；
Fig. 3 is the upper surface of Dove prism in a kind of confocal contraposition microassembly system of picture altogether in the present invention and embodiment 3
Pattern partial enlarged view；
Fig. 4 is a kind of flow chart of confocal contraposition micro assemby calibration method of picture altogether in the present invention and embodiment 3；
Fig. 5 is that one kind in the present invention and embodiment 3 is confocal to be calibrated as aligning Dove prism pose in microassembly system altogether
Schematic diagram；
Fig. 6 is that one kind in the present invention and embodiment 3 is confocal altogether as contraposition micro assemby calibration method adjustment Dove prism position
Square pattern groove after appearance under laser confocal microscope；
Fig. 7 is a kind of operation chart of confocal contraposition micro assemby calibration method of picture altogether in the present invention and embodiment 3.
Specific implementation mode
In order to better illustrate objects and advantages of the present invention, the present invention is done further with reference to the accompanying drawings and examples
Illustrate and is described in detail.
Embodiment 1
Fig. 1 is that the present invention is a kind of confocal altogether as the tomograph of contraposition microassembly system, and oxyz is the coordinate system of system.
Including target part Two-dimensional Position moving stage 1, target part lifting platform 2, target part clamper 3, base part clamper 4, matrix
Part 5, target part 6, Dove prism 7, laser confocal microscope 8, grating scale 9, gantry frame mechanism 10, prism clamping device
11, prism pose adjustment mechanism 12, monitor station 13, six degree of freedom PI parallel micromotion platforms 14, base part Two-dimensional Position moving stage 15,
Dali Shitai County 16.Target part clamper 3 is below target part Two-dimensional Position moving stage 1 and target for target part 6 to be clamped
Part lifting platform 2 connection composition target objective table, it can be achieved that target part 6 along tri- directions x, y and z straight-line displacement.Base
Body part retainer 4 is below six degree of freedom PI parallel micromotion platforms 14 and base part two dimension for base part 5 to be clamped
Displacement platform 15 connection composition matrix objective table, it can be achieved that the six direction to base part 5 precise fine-adjustment.
Wherein, base part 5 and target part 6 are respectively " ten " word groove matrix scaling board and " ten " word in the present embodiment
Groove target designation plate；Target part clamper 3 and base part clamper 4 in the present embodiment are vacuum adsorption type clamping
Device.7 stable holding of Dove prism is on prism clamping device 11, prism clamping device 11 and 12 rigidity of prism pose adjustment mechanism
Connection, prism pose adjustment mechanism 12 is there are six degree of freedom, it can be achieved that accurate adjustment to 7 pose of Dove prism.Laser is copolymerized
Zoom lens 8 are mounted on gantry frame mechanism 10, it can be achieved that tri- direction straight-line displacements of x, y and z.Grating scale 9 is attached to portal frame machine
The side of 10 top y direction guiding rails of structure, can accurately measure the position of laser confocal microscope 8.Monitor station 13 is laser co-focusing
The original fitting of microscope 8 is that the motorized subject table that mesa dimensions are 100*100 is detected for placing sample.Target zero
Part Two-dimensional Position moving stage 1, gantry frame mechanism 10, prism pose adjustment mechanism 12, monitor station 13 and base part Two-dimensional Position moving stage 15
It is installed in Dali Shitai County 16.
Embodiment 2
Fig. 2 is that one kind in the present invention and the present embodiment is confocal altogether as contraposition microassembly system assembly schematic diagram；From Fig. 2
It can be seen that oxyz is the coordinate system of system, o1x1y1 is the picture coordinate system of system；
Before system assembly, need target part A and base part B being separately mounted to target part clamper and base
On body part retainer, after being adjusted, A and B are in x and z directions existence position deviation；System installation step, it is specific as follows：
First, mobile laser confocal microscope obtains the end face figure like of part A to the positions H0, makes the center of end face figure like
Line is with Laser Scanning Confocal Microscope as the y1 overlapping of axles of coordinate system；
Then, laser confocal microscope is moved right to above reference line α, adjustment camera lens obtains the clear of reference line
Image makes y1 overlapping of axles of the reference line with Laser Scanning Confocal Microscope as coordinate system, the displacement distance a of the record positions H0 to reference line α；
Laser confocal microscope is moved right to the end face figure like that the positions H1 obtain part B, makes end face figure like by third
Center line focus the y1 overlapping of axles as coordinate system together, record reference line α to H1 position displacement distance b；
Camera lens can be adjusted in the z-direction when it should be noted that obtaining image, to obtain part clearly as the adjustment of the directions z
Camera lens does not interfere with alignment testing result.Part A and position deviation △ xs of the B in the directions x can be by the image of H0, H1 position acquisition
It acquires, deviation of the end face centre coordinate in the directions y1 in as two images.And deviation △ zs of the part A and B in the directions z is a and b
Difference, i.e. △ z=| a-b |.The value of a and b can be read from the grating installed on microscopical guide rail, and the precision of grating is reachable
To 0.1 μm.Base part pose is adjusted according to deviation △ x, the △ z being calculated, high-precision is completed and assembles.
Embodiment 3
Special Dove prism, two inclined-planes plating high reflectance aluminium film of this Dove prism and fluorination have been used in the present embodiment
Magnesium protective film, aluminium film for wavelength be 400~700nm laser reflectivity 90% or more；Prism material is BK7；Face essence
Degree is 1/4 λ；The partial enlarged view of the upper surface pattern of Dove prism is as shown in Figure 3, it can be seen that has in Dove prism upper surface
With reference to cross groove and square pattern groove, the catercorner length of square pattern is 0.5mm, with reference to cross groove and pros
The line width of shape pattern be 5 μm；
Fig. 4 is that the present invention and the present embodiment are a kind of confocal altogether as the flow chart of contraposition micro assemby calibration method.By can in Fig. 4
To find out, according to prism pose calibrating principle and the confocal contraposition micro assemby calibration method of picture altogether to confocal altogether as contraposition micro assemby system
System is calibrated；It is a kind of confocal as follows as the step of contraposition micro assemby calibration method altogether：
Step A, Dove prism is fixed in prismatic adjustment mechanism, on laser confocal microscope observation Dove prism
The square pattern groove on surface, adjustment focal length make the image clearly of square so that square pattern is located in visual field
Centre obtains image.Start measurement pattern and eliminate the angular deviation in three directions, angular deviation α, β and γ herein can be adopted
With the parallel elimination in specification main body, the serial elimination in the present embodiment can also be used, specially：
The angle of the diagonal line and photo coordinate system of square pattern in image plane is measured, as Dove prism is around z
To angular deviation γ, adjustment prism pose adjustment mechanism to rotation-γ, eliminates angular deviation γ around z；It is trapezoidal as shown in Figure 5
Prism pose calibration schematic diagram, measure square diagonal line AC and BD value, then acquire around x to angular deviation α=
ArcsinAC/A0C0, similarly acquire y to angular deviation β=arcsinBD/B0D0, and then adjust prism pose adjustment mechanism
Around x angular deviation α and β are eliminated around y to rotation-β to rotation-α；
Step B, the operation of step A is repeated, is observed with laser confocal microscope, calculates angular deviation α, β and γ,
It adjusts prism pose adjustment mechanism and eliminates deviation, until the angular deviation of α, β and γ angle direction is less than 0.001 °, the present embodiment
The middle operation for having carried out 3 step A so that angle of tri- angle directions of α, β and γ between system coordinate system oxyz is inclined
Difference completes the pose calibration of prism within 0.0007 °；
The square pattern groove image obtained after being adjusted is as shown in Figure 6；
Step C, confocal altogether as the operation chart of contraposition micro assemby calibration method, as shown in Figure 7；It will be used for confocal picture altogether
The two pieces of scaling boards fitting for aligning micro assemby calibration, completes alignment function under laser confocal microscope, makes two pieces of scaling boards
" ten " word groove overlap, then two pieces of scaling boards are fixed together；
Step D, two pieces of scaling boards in step C are adsorbed with base part vacuum adsorption type clamper, by target part
Vacuum adsorption type clamper is close to " ten " word groove target designation plate, until contact, adsorbs " ten " word groove target designation plate,
Release the constraint between two pieces of scaling boards；
Step E, base part clamper drives " ten " word groove matrix scaling board, meanwhile, target part clamper drives
" ten " word groove target designation plate, is reversely detached；Dove prism is slowly moved between two pieces of scaling boards, prevents from colliding,
So that two inclined-planes of Dove prism is respectively toward to two pieces of scaling boards, then laser confocal microscope is moved on to right over Dove prism
It is detected；
Step F, the centre coordinate of two pieces of scaling board " ten " word grooves and trapezoidal is measured by laser confocal microscope
The coordinate of prism centers groove acquires phase of " ten " the word groove center in laser confocal microscope image plane of two pieces of scaling boards
To site error, complete confocal altogether as the calibration of contraposition micro assemby.
" ten " word groove center of " ten " word groove target designation plate is measured in the present embodiment to Dove prism center groove
Distance a be 8.2643mm, " ten " word groove center of " ten " word groove matrix scaling board to Dove prism center groove away from
It is 8.2634mm from b, the difference △ z of the two are 9 μm, and the position deviation △ x in the directions x are 3 μm, i.e. " ten " word groove matrix mark
" ten " word groove center of fixed board and " ten " word groove target designation plate is in the opposite of Laser Scanning Confocal Microscope image plane x1, y1 direction
Site error is respectively 9 μm and 3 μm.The measurement result includes the detection error of laser confocal microscope, and Dove prism adds
The small stroke movement of position error and laser confocal microscope of work and installation error, matrix objective table and target objective table itself
Position error.
The above is presently preferred embodiments of the present invention, and it is public that the present invention should not be limited to embodiment and attached drawing institute
The content opened.It is every not depart from the lower equivalent or modification completed of spirit disclosed in this invention, both fall within the model that the present invention protects
It encloses.
Claims (6)
1. a kind of confocal altogether as contraposition microassembly system, it is characterised in that：System is mainly aobvious including Dali Shitai County, laser co-focusing
Micro mirror, gantry frame mechanism, Dove prism, prism pose adjustment mechanism, prism clamping device, base part, base part clamping
Device, matrix objective table, target part, target part clamper, target objective table, grating scale and monitor station；Wherein, prism position
Appearance adjustment mechanism is the prism pose adjustment mechanism of six degree of freedom；Wherein, base part clamper and target part clamper are
It is vacuum adsorption type clamper, electrostatic adsorption type clamper, liquid adsorption formula clamper, marmem minisize clamper, quiet
Electric-type clamper, electromagnetic type clamper, piezoelectric type clamper or combined type clamper；The lateral of laser confocal microscope is differentiated
Rate can reach 0.12 μm；Gantry frame mechanism includes portal frame and y, z direction guiding rail mounted on portal frame top and portal frame bottom end
X direction guiding rails；Dove prism upper surface, which has, refers to cross groove and square pattern groove；Grating scale be by scale grating and
Grating reading head two parts form；Monitor station is the motorized subject table in the direction x, y of laser confocal microscope；
It is a kind of confocal altogether as the function of each component part in contraposition microassembly system is：Dali Shitai County is a kind of confocal altogether as contraposition
The pedestal of microassembly system；Laser confocal microscope is used to acquire the image of part；Gantry frame mechanism is for driving laser total
Focusing microscope realizes the straight-line displacement in tri- directions x, y and z；Dove prism is used to reflect base part and target part
Picture；Prism clamping device is used for stable holding Dove prism；Prism pose adjustment mechanism can realize the precise fine-adjustment of six direction；
Base part clamper and target part clamper are respectively used to clamping base part and target part；The function of matrix objective table
It is the precise fine-adjustment to base part six direction；The function of target objective table is to realize target part along tri- directions x, y and z
Straight-line displacement；Straight-line displacement of the grating scale for detecting laser confocal microscope in high precision, accuracy of detection is up to 0.1 μm；
Monitor station is for placing detection sample；
Base part in the system is " ten " word groove matrix scaling board；Target part is " ten " word groove target designation
Plate；Wherein, " ten " word groove matrix scaling board and " ten " word groove target designation plate, belong to three-dimensional micro part, subsequently
Referred to as two pieces of scaling boards；
It is a kind of confocal as follows as aligning the connection of each component part and installation relation in microassembly system altogether：Laser co-focusing is micro-
Mirror is mounted on the frame mechanism of gantry, and gantry frame mechanism is mounted on marble countertop；It is aobvious that Dove prism is positioned over laser co-focusing
Immediately below micro mirror, for Dove prism stable holding on prism clamping device, prism clamping device and prism pose adjustment mechanism are rigid
Property connection, prism pose adjustment mechanism be mounted on marble countertop on；Base part Two-dimensional Position moving stage and six degree of freedom PI are in parallel
Micromotion platform connection composition matrix objective table；Target part Two-dimensional Position moving stage connects composition target loading with target part lifting platform
Platform；Matrix objective table is located at the both sides of Dove prism with target objective table, and is all mounted on marble countertop；Matrix zero
Part clamper is mounted on matrix objective table, and target part clamper is mounted on target objective table；Base part clamping is in base
On body part retainer, target part clamping is on target part clamper, and base part is respectively aligned to ladder with target part
Two inclined-planes of shape prism；Grating scale is attached to the side of portal frame top y direction guiding rails；Monitor station is mounted on marble countertop.
2. it is as described in claim 1 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that：Specifically
It is realized by following steps：
Step 1: by Dove prism stable holding on prism clamping device, prism clamping device and prism pose are adjusted machine
Structure is rigidly connected, then reads zero to the six direction of prism pose adjustment mechanism；
Step 2: with the square pattern groove of laser confocal microscope observation Dove prism upper surface, square figure is obtained
The image of case measures two of the diagonal line of square pattern and the angle of photo coordinate system and square pattern in image plane
The cornerwise length of item, then angular deviation of the Dove prism around tri- directions x, y and z is calculated, utilize prism pose adjustment mechanism
It realizes and the precision of Dove prism pose is adjusted, by the angle that Dove prism is respectively adjusted to above-mentioned measurement around tri- directions x, y and z
Deviation negative value is spent to eliminate angular deviation；
The behaviour Step 3: size for the angular deviation that judgment step two is calculated, and whether be adjusted Dove prism pose
Make：
Step 4: by being bonded altogether as aligning two pieces of scaling boards that micro assemby is calibrated for confocal, under laser confocal microscope
Alignment function is completed, so that " ten " word groove of two pieces of scaling boards is overlapped, then two pieces of scaling boards are fixed together；
Step 5: with base part clamper by two pieces of scaling board stable holdings in step 4；
Step 6: base part clamper drives " ten " word groove matrix scaling board, meanwhile, target part clamper drives " ten "
Word groove target designation plate, is reversely detached；Dove prism is slowly moved between two pieces of scaling boards, makes the two of Dove prism
A inclined-plane is respectively toward to two pieces of scaling boards, then laser confocal microscope is moved into right over Dove prism；
Step 7: measuring the centre coordinate and Dove prism of two pieces of scaling board " ten " word grooves by laser confocal microscope
The coordinate of center groove acquires " ten " word groove center of two pieces of scaling boards in the opposite position of laser confocal microscope image plane
Error is set, is completed confocal altogether as the calibration of contraposition micro assemby.
3. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that：Step
Six direction described in one is that tri- angles in tri- directions x, y and z and α, β and γ turn to.
4. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that：Its
In, the diagonal line of square pattern and the angle of photo coordinate system are denoted as θ i in the image plane in step 2, indicate that ith is surveyed
The angle of the diagonal line and photo coordinate system square in image plane measured；Two of square pattern are cornerwise
Length is denoted as ACi and BDi respectively, indicates two cornerwise length of square that ith measurement obtains；Dove prism is around x, y
Angular deviation with tri- directions z is denoted as α i, β i and γ i respectively；
Wherein, angular deviation α i are calculated by α i=arcsinACi/AC0；Wherein, arcsin indicates arcsin function；Wherein,
Angular deviation β i, specially：β i=arcsinBDi/BD0 are calculated；Wherein, AC0, BD0 are that Dove prism upper surface square is right
The physical length of linea angulata；Wherein, angular deviation γ i are equal to θ i；Wherein, the Dove prism is respectively adjusted around tri- directions x, y and z
The angular deviation negative value of whole above-mentioned measurement adjusts separately-α i ,-β i and-γ i angles；Wherein, the i value ranges are just
Integer；I is assigned into initial value in step 2：I=1.
5. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that：Step
The size for the angular deviation that judgment step two is calculated in three, and operation whether be adjusted Dove prism pose, specifically
For：If the value of 3.1 angular deviation α i, β i and γ i are respectively less than 0.001 °, in defined error range, then adjustment ladder is no longer needed to
Shape prism pose, skips to step 4；3.2 enable i=i+1, skip to step 2, calculate angle of the Dove prism around tri- directions x, y and z
Spend deviation α i, β i and γ i, angular deviation α i, the β i calculated again using prism pose adjustment mechanism removal process two
With γ i.
6. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that：Step
With base part clamper by two pieces of scaling board stable holdings in step 4 in five, specially：By target part clamper to
" ten " word groove target designation plate is close, until contact, stable holding " ten " word groove target designation plate；Two pieces of calibration are released again
Constraint between plate.
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| CN112433337B (en) * | 2020-11-23 | 2021-08-17 | 中国科学院西安光学精密机械研究所 | Precise optical machine assembling method of trapezoidal prism optical system |
| CN112595251A (en) * | 2020-12-15 | 2021-04-02 | 北京无线电测量研究所 | Matching block assembly gap measuring device and method based on laser measurement |
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