CN105841617B - It is a kind of confocal altogether as contraposition microassembly system and calibration method - Google Patents

It is a kind of confocal altogether as contraposition microassembly system and calibration method Download PDF

Info

Publication number
CN105841617B
CN105841617B CN201610352169.2A CN201610352169A CN105841617B CN 105841617 B CN105841617 B CN 105841617B CN 201610352169 A CN201610352169 A CN 201610352169A CN 105841617 B CN105841617 B CN 105841617B
Authority
CN
China
Prior art keywords
prism
target
clamper
dove prism
altogether
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610352169.2A
Other languages
Chinese (zh)
Other versions
CN105841617A (en
Inventor
叶鑫
张之敬
李扬
蔡绍鹏
周登宇
刘玉红
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Institute of Technology BIT
Original Assignee
Beijing Institute of Technology BIT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Institute of Technology BIT filed Critical Beijing Institute of Technology BIT
Priority to CN201610352169.2A priority Critical patent/CN105841617B/en
Publication of CN105841617A publication Critical patent/CN105841617A/en
Application granted granted Critical
Publication of CN105841617B publication Critical patent/CN105841617B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means

Abstract

It is a kind of confocal altogether as contraposition microassembly system and calibration method are including a kind of confocal altogether as contraposition microassembly system (abbreviation system) and one kind are confocal altogether as contraposition micro assemby calibration method (abbreviation method);System includes mainly laser confocal microscope, gantry frame mechanism, Dove prism and its clamping device, prism pose adjustment mechanism, base part and its clamper, target part and its clamper, matrix and target objective table;Method includes:1) Dove prism pose is adjusted, angular deviation is eliminated;2) fitting, alignment and the fixation of two pieces of scaling boards are completed, then releases the two constraint;3) two pieces of scaling boards are reversely detached, then laser confocal microscope is moved into right over Dove prism;4) centre coordinate that two pieces of scaling boards and Dove prism are measured by laser confocal microscope, acquire two pieces of scaling boards laser confocal microscope image plane the relative position error.The present invention is simple and practicable, improves alignment and the assembly precision of micro assemby.

Description

It is a kind of confocal altogether as contraposition microassembly system and calibration method
Technical field
The present invention relates to a kind of confocal contraposition microassembly system of picture altogether and calibration methods, belong to micro assemby, micro-vision inspection Survey technology field.
Background technology
The guiding of aviation field and guidance instrument, the fuze component in SMART AMMUNITION, in inertial confinement fusion system Target component etc. is all the urgent need Core equipment of China's tackle key problems in science and technology, and assembly is horizontal seriously to restrict the high-end manufacture of a new generation The development of industry.For the precision and performance of guarantee mini system, the fit-up gap of this kind of instrument or component generally requires strictly to control System in the micron-scale, and aligns accuracy of detection and needs to reach submicron order.
Due to being limited by optical diffraction limit, resolution ratio is traditional micro-vision imaging system with illumination wavelengths The alignment accuracy of detection of an order of magnitude, part is difficult to reach submicron order.And due to the limitation of limited depth of focus, in depth Degree direction has the occasion for being accurately positioned requirement to cannot be satisfied requirement.
The concept of confocal microscopy is since late 1950s are proposed by American Minsky, since it has height It differentiates and is especially higher longitudinal resolution, and have the characteristics that preferable digital picture three-dimensional chromatography ability, answered extensively Detection and analysis used in fields such as micro-electronic manufacturing, biomedicine, material science, accurate measurements.Its lateral resolution is phase With 1.4 times of the ordinary optical microscope of hole coke ratio.
In order to further increase micro element assembly alignment accuracy of detection, propose using confocal altogether as contraposition testing principle, profit The special ability having in terms of three-dimensional imaging with confocal scanning optical microscopy solves to be existed with the detection of common microoptic The bottleneck problem encountered in micro element assembling process enables the assembly alignment accuracy of detection of micro element to reach submicron order, institute With confocal altogether as the calibration of contraposition microassembly system is to realize the premise of Micro-miniature parts high-precision assembly.
Invention content
It is an object of the invention to improve alignment accuracy of detection of the microassembly system to micro element, ensure contraposition accuracy of detection Submicron order can be reached, it is proposed that a kind of confocal altogether as contraposition microassembly system and calibration method.
It is a kind of confocal altogether as contraposition microassembly system and calibration method include a kind of confocal altogether as contraposition microassembly system (letter Title system) and it is a kind of confocal altogether as contraposition micro assemby calibration method (abbreviation method);
Wherein, system includes mainly Dali Shitai County, laser confocal microscope, gantry frame mechanism, Dove prism, prism position Appearance adjustment mechanism, prism clamping device, base part, base part clamper, matrix objective table, target part, target part Clamper, target objective table, grating scale and monitor station;
Wherein, prism pose adjustment mechanism is the prism pose adjustment mechanism of six degree of freedom;Wherein, base part and target Part is one kind in axial workpiece, hole type parts, flat-type part and three-dimensional micro part;
The base part is " ten " word groove matrix scaling board;
The target part is " ten " word groove target designation plate;
Wherein, " ten " word groove matrix scaling board and " ten " word groove target designation plate, belong to three-dimensional micro part, Follow-up referred to as two pieces of scaling boards;
Wherein, base part clamper and target part clamper are vacuum adsorption type clamper, electrostatic adsorption type clamping Device, liquid adsorption formula clamper, marmem minisize clamper, electrostatic clamper, electromagnetic type clamper, piezoelectric type folder Holder or combined type clamper;The lateral resolution of laser confocal microscope can reach 0.12 μm;Gantry frame mechanism includes dragon Door frame and mounted on y, z direction guiding rail on portal frame top and the x direction guiding rails of portal frame bottom end;Dove prism upper surface has reference Cross groove and square pattern groove;Grating scale is made of scale grating and grating reading head two parts;Monitor station is sharp The motorized subject table in the direction x, y of light Laser Scanning Confocal Microscope;
Wherein, it is flat to be that base part Two-dimensional Position moving stage and six degree of freedom PI parallel micromotion platforms form for matrix objective table Platform;Target objective table is target part Two-dimensional Position moving stage and the platform that target part lifting platform forms;
It is a kind of confocal altogether as the function of each component part in contraposition microassembly system is:Dali Shitai County is a kind of confocal picture altogether Align the pedestal of microassembly system;Laser confocal microscope is used to acquire the image of part;Gantry frame mechanism is sharp for driving Light Laser Scanning Confocal Microscope realizes the straight-line displacement in tri- directions x, y and z;Dove prism is for reflecting base part and target part Picture;Prism clamping device is used for stable holding Dove prism;Prism pose adjustment mechanism can realize the accurate micro- of six direction It adjusts;Base part clamper and target part clamper are respectively used to clamping base part and target part;Matrix objective table Function is the precise fine-adjustment to base part six direction;The function of target objective table is to realize target part along x, y and z tri- The straight-line displacement in direction;Straight-line displacement of the grating scale for detecting laser confocal microscope in high precision, accuracy of detection is up to 0.1 μm;Monitor station is for placing detection sample;It is a kind of confocal altogether as the connection and installation of each component part in contraposition microassembly system Relationship is as follows:
Laser confocal microscope is mounted on the frame mechanism of gantry, and gantry frame mechanism is mounted on marble countertop;It is trapezoidal Prism is positioned over immediately below laser confocal microscope, and Dove prism stable holding is on prism clamping device, prism clamping machine Structure is rigidly connected with prism pose adjustment mechanism, and prism pose adjustment mechanism is mounted on marble countertop;Base part two dimension Displacement platform connects composition matrix objective table with six degree of freedom PI parallel micromotion platforms;Target part Two-dimensional Position moving stage and target part Lifting platform connection composition target objective table;Matrix objective table is located at the both sides of Dove prism with target objective table, and all pacifies On marble countertop;Base part clamper is mounted on matrix objective table, and target part clamper is carried mounted on target On object platform;Base part clamping is on base part clamper, and target part clamping is on target part clamper, and matrix zero Part is respectively aligned to two inclined-planes of Dove prism with target part;Grating scale is attached to the side of portal frame top y direction guiding rails;Detection Platform is mounted on marble countertop;
It is a kind of confocal altogether as contraposition micro assemby calibration method, it is realized especially by following steps:
Step 1: by Dove prism stable holding on prism clamping device, prism clamping device and prism pose tune Complete machine structure is rigidly connected, then reads zero to the six direction of prism pose adjustment mechanism;
Wherein, the six direction is that tri- angles in tri- directions x, y and z and α, β and γ turn to;
Step 2: with the square pattern groove of laser confocal microscope observation Dove prism upper surface, obtain square The image of shape pattern measures the diagonal line of square pattern and the angle of photo coordinate system and square pattern in image plane Two cornerwise length, then calculate angular deviation of the Dove prism around tri- directions x, y and z, utilize the adjustment of prism pose Mechanism, which realizes, adjusts the precision of Dove prism pose, by the way that Dove prism is respectively adjusted above-mentioned measurement around tri- directions x, y and z Angular deviation negative value eliminate angular deviation;
Wherein, the diagonal line of square pattern and the angle of photo coordinate system are denoted as θ i in image plane, indicate that ith is surveyed The angle of the diagonal line and photo coordinate system square in image plane measured;
Two cornerwise length of square pattern are denoted as ACi and BDi respectively, indicate the pros that ith measurement obtains Two cornerwise length of shape;
Angular deviation of the Dove prism around tri- directions x, y and z is denoted as α i, β i and γ i respectively;
Wherein, angular deviation α i are calculated by α i=arcsinACi/AC0;
Wherein, arcsin indicates arcsin function;
Wherein, angular deviation β i, specially:β i=arcsinBDi/BD0 are calculated;
Wherein, AC0, BD0 are the cornerwise physical length of Dove prism upper surface square;
Wherein, angular deviation γ i are equal to θ i;
Wherein, the Dove prism respectively adjusts the angular deviation negative value of above-mentioned measurement around tri- directions x, y and z, that is, divides Not adjustment-α i ,-β i and-γ i angles;
Wherein, the i value ranges are positive integer;I is assigned into initial value in step 2:I=1;
Step 3: the size for angular deviation α i, the β i and γ i that judgment step two is calculated, and it is adjusted trapezoidal rib Operation whether mirror pose:
If the value of 3.1 angular deviation α i, β i and γ i are respectively less than 0.001 °, in defined error range, then no longer need to adjust Whole Dove prism pose, skips to step 4;
3.2 enable i=i+1, skip to step 2, calculate angu-lar deviation α i, β i of the Dove prism around tri- directions x, y and z With γ i, angular deviation α i, the β i and γ i calculated again using prism pose adjustment mechanism removal process two;
Step 4: by being bonded altogether as aligning two pieces of scaling boards that micro assemby is calibrated for confocal, it is micro- in laser co-focusing Alignment function is completed under mirror, so that " ten " word groove of two pieces of scaling boards is overlapped, then two pieces of scaling boards are fixed together;
Step 5: with base part clamper by two pieces of scaling board stable holdings in step 4, specially:By target zero Part clamper is close to " ten " word groove target designation plate, until contact, stable holding " ten " word groove target designation plate;It solves again Except the constraint between two pieces of scaling boards;
Step 6: base part clamper drives " ten " word groove matrix scaling board, meanwhile, target part clamper drives " ten " word groove target designation plate, is reversely detached;Dove prism is slowly moved between two pieces of scaling boards, makes Dove prism Two inclined-planes be respectively toward to two pieces of scaling boards, then laser confocal microscope is moved into right over Dove prism;
Step 7: measuring the centre coordinate of two pieces of scaling board " ten " word grooves and trapezoidal by laser confocal microscope The coordinate of prism centers groove acquires phase of " ten " the word groove center in laser confocal microscope image plane of two pieces of scaling boards To site error, complete confocal altogether as the calibration of contraposition micro assemby.
Advantageous effect
It is a kind of confocal altogether as contraposition microassembly system and calibration method, compared with other microassembly systems and calibration method, It has the advantages that:
1. a kind of confocal picture altogether of the invention is aligned microassembly system and calibration method and is detected altogether as aligning using confocal, into one Step improves micro element assembly alignment accuracy of detection, and micro element assembly alignment accuracy of detection is enable to reach submicron order;
2. a kind of confocal contraposition microassembly system of picture altogether of the invention uses confocal altogether as contraposition principle, rational design contraposition Light path ensure that suitable operating distance using Dove prism;
3. the present invention it is a kind of it is confocal altogether as contraposition micro assemby calibration method using prism upper surface reference cross groove with Square pattern completes the calibration of Dove prism pose, based on confocal altogether as the principle completion of contraposition microassembly system is confocal total As contraposition micro assemby calibration, the assembly precision of microassembly system is greatly improved, method is simple and practicable.
Description of the drawings
Fig. 1 is a kind of tomograph of confocal contraposition microassembly system of picture altogether in the present invention and embodiment 1;
Fig. 2 is that one kind in the present invention and embodiment 2 is confocal altogether as contraposition microassembly system assembly schematic diagram;
Fig. 3 is the upper surface of Dove prism in a kind of confocal contraposition microassembly system of picture altogether in the present invention and embodiment 3 Pattern partial enlarged view;
Fig. 4 is a kind of flow chart of confocal contraposition micro assemby calibration method of picture altogether in the present invention and embodiment 3;
Fig. 5 is that one kind in the present invention and embodiment 3 is confocal to be calibrated as aligning Dove prism pose in microassembly system altogether Schematic diagram;
Fig. 6 is that one kind in the present invention and embodiment 3 is confocal altogether as contraposition micro assemby calibration method adjustment Dove prism position Square pattern groove after appearance under laser confocal microscope;
Fig. 7 is a kind of operation chart of confocal contraposition micro assemby calibration method of picture altogether in the present invention and embodiment 3.
Specific implementation mode
In order to better illustrate objects and advantages of the present invention, the present invention is done further with reference to the accompanying drawings and examples Illustrate and is described in detail.
Embodiment 1
Fig. 1 is that the present invention is a kind of confocal altogether as the tomograph of contraposition microassembly system, and oxyz is the coordinate system of system. Including target part Two-dimensional Position moving stage 1, target part lifting platform 2, target part clamper 3, base part clamper 4, matrix Part 5, target part 6, Dove prism 7, laser confocal microscope 8, grating scale 9, gantry frame mechanism 10, prism clamping device 11, prism pose adjustment mechanism 12, monitor station 13, six degree of freedom PI parallel micromotion platforms 14, base part Two-dimensional Position moving stage 15, Dali Shitai County 16.Target part clamper 3 is below target part Two-dimensional Position moving stage 1 and target for target part 6 to be clamped Part lifting platform 2 connection composition target objective table, it can be achieved that target part 6 along tri- directions x, y and z straight-line displacement.Base Body part retainer 4 is below six degree of freedom PI parallel micromotion platforms 14 and base part two dimension for base part 5 to be clamped Displacement platform 15 connection composition matrix objective table, it can be achieved that the six direction to base part 5 precise fine-adjustment.
Wherein, base part 5 and target part 6 are respectively " ten " word groove matrix scaling board and " ten " word in the present embodiment Groove target designation plate;Target part clamper 3 and base part clamper 4 in the present embodiment are vacuum adsorption type clamping Device.7 stable holding of Dove prism is on prism clamping device 11, prism clamping device 11 and 12 rigidity of prism pose adjustment mechanism Connection, prism pose adjustment mechanism 12 is there are six degree of freedom, it can be achieved that accurate adjustment to 7 pose of Dove prism.Laser is copolymerized Zoom lens 8 are mounted on gantry frame mechanism 10, it can be achieved that tri- direction straight-line displacements of x, y and z.Grating scale 9 is attached to portal frame machine The side of 10 top y direction guiding rails of structure, can accurately measure the position of laser confocal microscope 8.Monitor station 13 is laser co-focusing The original fitting of microscope 8 is that the motorized subject table that mesa dimensions are 100*100 is detected for placing sample.Target zero Part Two-dimensional Position moving stage 1, gantry frame mechanism 10, prism pose adjustment mechanism 12, monitor station 13 and base part Two-dimensional Position moving stage 15 It is installed in Dali Shitai County 16.
Embodiment 2
Fig. 2 is that one kind in the present invention and the present embodiment is confocal altogether as contraposition microassembly system assembly schematic diagram;From Fig. 2 It can be seen that oxyz is the coordinate system of system, o1x1y1 is the picture coordinate system of system;
Before system assembly, need target part A and base part B being separately mounted to target part clamper and base On body part retainer, after being adjusted, A and B are in x and z directions existence position deviation;System installation step, it is specific as follows:
First, mobile laser confocal microscope obtains the end face figure like of part A to the positions H0, makes the center of end face figure like Line is with Laser Scanning Confocal Microscope as the y1 overlapping of axles of coordinate system;
Then, laser confocal microscope is moved right to above reference line α, adjustment camera lens obtains the clear of reference line Image makes y1 overlapping of axles of the reference line with Laser Scanning Confocal Microscope as coordinate system, the displacement distance a of the record positions H0 to reference line α;
Laser confocal microscope is moved right to the end face figure like that the positions H1 obtain part B, makes end face figure like by third Center line focus the y1 overlapping of axles as coordinate system together, record reference line α to H1 position displacement distance b;
Camera lens can be adjusted in the z-direction when it should be noted that obtaining image, to obtain part clearly as the adjustment of the directions z Camera lens does not interfere with alignment testing result.Part A and position deviation △ xs of the B in the directions x can be by the image of H0, H1 position acquisition It acquires, deviation of the end face centre coordinate in the directions y1 in as two images.And deviation △ zs of the part A and B in the directions z is a and b Difference, i.e. △ z=| a-b |.The value of a and b can be read from the grating installed on microscopical guide rail, and the precision of grating is reachable To 0.1 μm.Base part pose is adjusted according to deviation △ x, the △ z being calculated, high-precision is completed and assembles.
Embodiment 3
Special Dove prism, two inclined-planes plating high reflectance aluminium film of this Dove prism and fluorination have been used in the present embodiment Magnesium protective film, aluminium film for wavelength be 400~700nm laser reflectivity 90% or more;Prism material is BK7;Face essence Degree is 1/4 λ;The partial enlarged view of the upper surface pattern of Dove prism is as shown in Figure 3, it can be seen that has in Dove prism upper surface With reference to cross groove and square pattern groove, the catercorner length of square pattern is 0.5mm, with reference to cross groove and pros The line width of shape pattern be 5 μm;
Fig. 4 is that the present invention and the present embodiment are a kind of confocal altogether as the flow chart of contraposition micro assemby calibration method.By can in Fig. 4 To find out, according to prism pose calibrating principle and the confocal contraposition micro assemby calibration method of picture altogether to confocal altogether as contraposition micro assemby system System is calibrated;It is a kind of confocal as follows as the step of contraposition micro assemby calibration method altogether:
Step A, Dove prism is fixed in prismatic adjustment mechanism, on laser confocal microscope observation Dove prism The square pattern groove on surface, adjustment focal length make the image clearly of square so that square pattern is located in visual field Centre obtains image.Start measurement pattern and eliminate the angular deviation in three directions, angular deviation α, β and γ herein can be adopted With the parallel elimination in specification main body, the serial elimination in the present embodiment can also be used, specially:
The angle of the diagonal line and photo coordinate system of square pattern in image plane is measured, as Dove prism is around z To angular deviation γ, adjustment prism pose adjustment mechanism to rotation-γ, eliminates angular deviation γ around z;It is trapezoidal as shown in Figure 5 Prism pose calibration schematic diagram, measure square diagonal line AC and BD value, then acquire around x to angular deviation α= ArcsinAC/A0C0, similarly acquire y to angular deviation β=arcsinBD/B0D0, and then adjust prism pose adjustment mechanism Around x angular deviation α and β are eliminated around y to rotation-β to rotation-α;
Step B, the operation of step A is repeated, is observed with laser confocal microscope, calculates angular deviation α, β and γ, It adjusts prism pose adjustment mechanism and eliminates deviation, until the angular deviation of α, β and γ angle direction is less than 0.001 °, the present embodiment The middle operation for having carried out 3 step A so that angle of tri- angle directions of α, β and γ between system coordinate system oxyz is inclined Difference completes the pose calibration of prism within 0.0007 °;
The square pattern groove image obtained after being adjusted is as shown in Figure 6;
Step C, confocal altogether as the operation chart of contraposition micro assemby calibration method, as shown in Figure 7;It will be used for confocal picture altogether The two pieces of scaling boards fitting for aligning micro assemby calibration, completes alignment function under laser confocal microscope, makes two pieces of scaling boards " ten " word groove overlap, then two pieces of scaling boards are fixed together;
Step D, two pieces of scaling boards in step C are adsorbed with base part vacuum adsorption type clamper, by target part Vacuum adsorption type clamper is close to " ten " word groove target designation plate, until contact, adsorbs " ten " word groove target designation plate, Release the constraint between two pieces of scaling boards;
Step E, base part clamper drives " ten " word groove matrix scaling board, meanwhile, target part clamper drives " ten " word groove target designation plate, is reversely detached;Dove prism is slowly moved between two pieces of scaling boards, prevents from colliding, So that two inclined-planes of Dove prism is respectively toward to two pieces of scaling boards, then laser confocal microscope is moved on to right over Dove prism It is detected;
Step F, the centre coordinate of two pieces of scaling board " ten " word grooves and trapezoidal is measured by laser confocal microscope The coordinate of prism centers groove acquires phase of " ten " the word groove center in laser confocal microscope image plane of two pieces of scaling boards To site error, complete confocal altogether as the calibration of contraposition micro assemby.
" ten " word groove center of " ten " word groove target designation plate is measured in the present embodiment to Dove prism center groove Distance a be 8.2643mm, " ten " word groove center of " ten " word groove matrix scaling board to Dove prism center groove away from It is 8.2634mm from b, the difference △ z of the two are 9 μm, and the position deviation △ x in the directions x are 3 μm, i.e. " ten " word groove matrix mark " ten " word groove center of fixed board and " ten " word groove target designation plate is in the opposite of Laser Scanning Confocal Microscope image plane x1, y1 direction Site error is respectively 9 μm and 3 μm.The measurement result includes the detection error of laser confocal microscope, and Dove prism adds The small stroke movement of position error and laser confocal microscope of work and installation error, matrix objective table and target objective table itself Position error.
The above is presently preferred embodiments of the present invention, and it is public that the present invention should not be limited to embodiment and attached drawing institute The content opened.It is every not depart from the lower equivalent or modification completed of spirit disclosed in this invention, both fall within the model that the present invention protects It encloses.

Claims (6)

1. a kind of confocal altogether as contraposition microassembly system, it is characterised in that:System is mainly aobvious including Dali Shitai County, laser co-focusing Micro mirror, gantry frame mechanism, Dove prism, prism pose adjustment mechanism, prism clamping device, base part, base part clamping Device, matrix objective table, target part, target part clamper, target objective table, grating scale and monitor station;Wherein, prism position Appearance adjustment mechanism is the prism pose adjustment mechanism of six degree of freedom;Wherein, base part clamper and target part clamper are It is vacuum adsorption type clamper, electrostatic adsorption type clamper, liquid adsorption formula clamper, marmem minisize clamper, quiet Electric-type clamper, electromagnetic type clamper, piezoelectric type clamper or combined type clamper;The lateral of laser confocal microscope is differentiated Rate can reach 0.12 μm;Gantry frame mechanism includes portal frame and y, z direction guiding rail mounted on portal frame top and portal frame bottom end X direction guiding rails;Dove prism upper surface, which has, refers to cross groove and square pattern groove;Grating scale be by scale grating and Grating reading head two parts form;Monitor station is the motorized subject table in the direction x, y of laser confocal microscope;
It is a kind of confocal altogether as the function of each component part in contraposition microassembly system is:Dali Shitai County is a kind of confocal altogether as contraposition The pedestal of microassembly system;Laser confocal microscope is used to acquire the image of part;Gantry frame mechanism is for driving laser total Focusing microscope realizes the straight-line displacement in tri- directions x, y and z;Dove prism is used to reflect base part and target part Picture;Prism clamping device is used for stable holding Dove prism;Prism pose adjustment mechanism can realize the precise fine-adjustment of six direction; Base part clamper and target part clamper are respectively used to clamping base part and target part;The function of matrix objective table It is the precise fine-adjustment to base part six direction;The function of target objective table is to realize target part along tri- directions x, y and z Straight-line displacement;Straight-line displacement of the grating scale for detecting laser confocal microscope in high precision, accuracy of detection is up to 0.1 μm; Monitor station is for placing detection sample;
Base part in the system is " ten " word groove matrix scaling board;Target part is " ten " word groove target designation Plate;Wherein, " ten " word groove matrix scaling board and " ten " word groove target designation plate, belong to three-dimensional micro part, subsequently Referred to as two pieces of scaling boards;
It is a kind of confocal as follows as aligning the connection of each component part and installation relation in microassembly system altogether:Laser co-focusing is micro- Mirror is mounted on the frame mechanism of gantry, and gantry frame mechanism is mounted on marble countertop;It is aobvious that Dove prism is positioned over laser co-focusing Immediately below micro mirror, for Dove prism stable holding on prism clamping device, prism clamping device and prism pose adjustment mechanism are rigid Property connection, prism pose adjustment mechanism be mounted on marble countertop on;Base part Two-dimensional Position moving stage and six degree of freedom PI are in parallel Micromotion platform connection composition matrix objective table;Target part Two-dimensional Position moving stage connects composition target loading with target part lifting platform Platform;Matrix objective table is located at the both sides of Dove prism with target objective table, and is all mounted on marble countertop;Matrix zero Part clamper is mounted on matrix objective table, and target part clamper is mounted on target objective table;Base part clamping is in base On body part retainer, target part clamping is on target part clamper, and base part is respectively aligned to ladder with target part Two inclined-planes of shape prism;Grating scale is attached to the side of portal frame top y direction guiding rails;Monitor station is mounted on marble countertop.
2. it is as described in claim 1 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that:Specifically It is realized by following steps:
Step 1: by Dove prism stable holding on prism clamping device, prism clamping device and prism pose are adjusted machine Structure is rigidly connected, then reads zero to the six direction of prism pose adjustment mechanism;
Step 2: with the square pattern groove of laser confocal microscope observation Dove prism upper surface, square figure is obtained The image of case measures two of the diagonal line of square pattern and the angle of photo coordinate system and square pattern in image plane The cornerwise length of item, then angular deviation of the Dove prism around tri- directions x, y and z is calculated, utilize prism pose adjustment mechanism It realizes and the precision of Dove prism pose is adjusted, by the angle that Dove prism is respectively adjusted to above-mentioned measurement around tri- directions x, y and z Deviation negative value is spent to eliminate angular deviation;
The behaviour Step 3: size for the angular deviation that judgment step two is calculated, and whether be adjusted Dove prism pose Make:
Step 4: by being bonded altogether as aligning two pieces of scaling boards that micro assemby is calibrated for confocal, under laser confocal microscope Alignment function is completed, so that " ten " word groove of two pieces of scaling boards is overlapped, then two pieces of scaling boards are fixed together;
Step 5: with base part clamper by two pieces of scaling board stable holdings in step 4;
Step 6: base part clamper drives " ten " word groove matrix scaling board, meanwhile, target part clamper drives " ten " Word groove target designation plate, is reversely detached;Dove prism is slowly moved between two pieces of scaling boards, makes the two of Dove prism A inclined-plane is respectively toward to two pieces of scaling boards, then laser confocal microscope is moved into right over Dove prism;
Step 7: measuring the centre coordinate and Dove prism of two pieces of scaling board " ten " word grooves by laser confocal microscope The coordinate of center groove acquires " ten " word groove center of two pieces of scaling boards in the opposite position of laser confocal microscope image plane Error is set, is completed confocal altogether as the calibration of contraposition micro assemby.
3. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that:Step Six direction described in one is that tri- angles in tri- directions x, y and z and α, β and γ turn to.
4. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that:Its In, the diagonal line of square pattern and the angle of photo coordinate system are denoted as θ i in the image plane in step 2, indicate that ith is surveyed The angle of the diagonal line and photo coordinate system square in image plane measured;Two of square pattern are cornerwise Length is denoted as ACi and BDi respectively, indicates two cornerwise length of square that ith measurement obtains;Dove prism is around x, y Angular deviation with tri- directions z is denoted as α i, β i and γ i respectively;
Wherein, angular deviation α i are calculated by α i=arcsinACi/AC0;Wherein, arcsin indicates arcsin function;Wherein, Angular deviation β i, specially:β i=arcsinBDi/BD0 are calculated;Wherein, AC0, BD0 are that Dove prism upper surface square is right The physical length of linea angulata;Wherein, angular deviation γ i are equal to θ i;Wherein, the Dove prism is respectively adjusted around tri- directions x, y and z The angular deviation negative value of whole above-mentioned measurement adjusts separately-α i ,-β i and-γ i angles;Wherein, the i value ranges are just Integer;I is assigned into initial value in step 2:I=1.
5. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that:Step The size for the angular deviation that judgment step two is calculated in three, and operation whether be adjusted Dove prism pose, specifically For:If the value of 3.1 angular deviation α i, β i and γ i are respectively less than 0.001 °, in defined error range, then adjustment ladder is no longer needed to Shape prism pose, skips to step 4;3.2 enable i=i+1, skip to step 2, calculate angle of the Dove prism around tri- directions x, y and z Spend deviation α i, β i and γ i, angular deviation α i, the β i calculated again using prism pose adjustment mechanism removal process two With γ i.
6. it is as claimed in claim 2 a kind of confocal altogether as the calibration method of contraposition microassembly system, it is further characterized in that:Step With base part clamper by two pieces of scaling board stable holdings in step 4 in five, specially:By target part clamper to " ten " word groove target designation plate is close, until contact, stable holding " ten " word groove target designation plate;Two pieces of calibration are released again Constraint between plate.
CN201610352169.2A 2016-05-25 2016-05-25 It is a kind of confocal altogether as contraposition microassembly system and calibration method Active CN105841617B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610352169.2A CN105841617B (en) 2016-05-25 2016-05-25 It is a kind of confocal altogether as contraposition microassembly system and calibration method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610352169.2A CN105841617B (en) 2016-05-25 2016-05-25 It is a kind of confocal altogether as contraposition microassembly system and calibration method

Publications (2)

Publication Number Publication Date
CN105841617A CN105841617A (en) 2016-08-10
CN105841617B true CN105841617B (en) 2018-10-16

Family

ID=56594309

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610352169.2A Active CN105841617B (en) 2016-05-25 2016-05-25 It is a kind of confocal altogether as contraposition microassembly system and calibration method

Country Status (1)

Country Link
CN (1) CN105841617B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107179052B (en) * 2017-04-14 2020-02-14 中国科学院光电研究院 Online calibration device and method for spectrum confocal measurement system
CN112428264B (en) * 2020-10-26 2021-12-07 中国计量大学 Robot arm correction method and system
CN112433337B (en) * 2020-11-23 2021-08-17 中国科学院西安光学精密机械研究所 Precise optical machine assembling method of trapezoidal prism optical system
CN112595251A (en) * 2020-12-15 2021-04-02 北京无线电测量研究所 Matching block assembly gap measuring device and method based on laser measurement

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231747A (en) * 1990-12-21 1993-08-03 The Boeing Company Drill/rivet device
CN101972928A (en) * 2010-08-19 2011-02-16 北京理工大学 Automatic aligning assembly system for micro members
CN103363901A (en) * 2013-07-15 2013-10-23 北京理工大学 Calibration method oriented towards coaxial counterpoint micro-assembly system
CN103837080A (en) * 2014-03-07 2014-06-04 北京理工大学 Micro-assembly-oriented submicron precision coaxial confocal alignment detection method and device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231747A (en) * 1990-12-21 1993-08-03 The Boeing Company Drill/rivet device
CN101972928A (en) * 2010-08-19 2011-02-16 北京理工大学 Automatic aligning assembly system for micro members
CN103363901A (en) * 2013-07-15 2013-10-23 北京理工大学 Calibration method oriented towards coaxial counterpoint micro-assembly system
CN103837080A (en) * 2014-03-07 2014-06-04 北京理工大学 Micro-assembly-oriented submicron precision coaxial confocal alignment detection method and device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
可重构12自由度微装配技术及其实现;叶鑫 等;《北京理工大学学报》;20090930;第29卷(第9期);775-779 *
毫米器件半自动微装配系统研制;吴文荣 等;《传感器与微系统》;20130131;第32卷(第1期);83-86、90 *

Also Published As

Publication number Publication date
CN105841617A (en) 2016-08-10

Similar Documents

Publication Publication Date Title
CN105841617B (en) It is a kind of confocal altogether as contraposition microassembly system and calibration method
CN104614558B (en) A kind of, line CCD combine atomic force probe scanning measurement system and measuring method
TWI576563B (en) Method and device for non-contact measuring surfaces
JP4791118B2 (en) Image measuring machine offset calculation method
CN105157606B (en) Contactless complicated optical surface profile high precision three-dimensional measurement method and measurement apparatus
JP5207213B2 (en) Autofocus device
CN103837080B (en) Sub-micrometer precision coaxial confocal towards micro assemby is directed at detection method and device
KR20100119526A (en) Method and apparatus for measuring relative positions of a specular reflection surface
KR101808388B1 (en) Probe apparatus and probe method
CN104848802B (en) Normal tracking mode differential confocal non-spherical measuring method and system
US10415955B2 (en) Measuring system
CN211085268U (en) Adjusting system for optical guide rail distance measuring device
CN108344383B (en) Non-contact coordinate measuring machine
CN108344381B (en) Non-contact three-dimensional surface shape measuring method
CN106839997B (en) The detection method of linear grating ruler
CN110836641A (en) Detection method and detection equipment for three-dimensional size of part special-shaped surface microstructure
CN102538707B (en) Three dimensional localization device and method for workpiece
CN108759713B (en) Surface shape three-dimensional measurement system based on ray tracing
CN104776804B (en) The optical camera Method of Adjustment and device measured based on contactless slight distance
JP2019194571A (en) Curved surface shape inspection apparatus
CN102878933B (en) Comparator based on white light interference positioning principle and detection method thereof
CN104567676A (en) Bilateral fitting differential confocal measurement method
CN105046650A (en) Machine vision-based image mosaic method for small module gear detection process
GB2337815A (en) Thickness meter for thin transparent objects
TWM485590U (en) Nanometer optical alignment and imprint leveling device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant