CN114545645A - Periscopic integrated optical path assembling and adjusting method - Google Patents
Periscopic integrated optical path assembling and adjusting method Download PDFInfo
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- CN114545645A CN114545645A CN202210186417.6A CN202210186417A CN114545645A CN 114545645 A CN114545645 A CN 114545645A CN 202210186417 A CN202210186417 A CN 202210186417A CN 114545645 A CN114545645 A CN 114545645A
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- G02—OPTICS
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- G—PHYSICS
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Abstract
The application provides a periscopic integrated optical path assembling and adjusting method, which is characterized in that an objective table of a central deviation measuring instrument is calibrated so as to adjust the direction of a first optical axis corresponding to the central deviation measuring instrument to a first preset direction; placing a standard reflector on a preset position of a center deviation measuring instrument, and adjusting the standard reflector through the calibrated center deviation measuring instrument so that the standard reflector reflects incident light in a first preset direction to a second preset direction perpendicular to the first preset direction; and placing the plane reflector on one side of the standard reflector, and adjusting the plane reflector to enable the plane reflector to reflect the light reflected by the standard reflector along the second preset direction to an objective table of the central deviation measuring instrument along the first preset direction so as to realize the installation and adjustment of the installation angles of all optical devices in the periscopic integrated optical path.
Description
Technical Field
The application relates to the technical field of optics, in particular to a periscopic integrated optical path assembling and adjusting method.
Background
With the development of semiconductor devices, periscopic integrated optical circuits are widely used in infinite conjugate alignment optical systems limited by space constraints. The inclination and eccentricity of each optical path in the periscopic integrated optical path relative to the optical axis directly affect the final imaging quality and alignment accuracy of the optical system.
In the existing adjusting method of the periscopic integrated optical path, only the adjusting method of two lens angles of a periscope is introduced, and the combination and assembly of other lens groups of the periscopic integrated optical path are not reported.
Disclosure of Invention
In view of the above, the present application provides a method for adjusting a periscopic integrated optical circuit to guide the adjustment of all structures in the periscopic integrated optical circuit.
In a first aspect, an embodiment of the present application provides an installation and adjustment method for a formula integrated optical circuit, where the installation and adjustment method includes: calibrating an objective table of the central deviation measuring instrument so as to adjust the direction of a first optical axis corresponding to the central deviation measuring instrument to a first preset direction; placing a standard reflector on a preset position of a center deviation measuring instrument, and adjusting the standard reflector through the calibrated center deviation measuring instrument so that the standard reflector reflects incident light in a first preset direction to a second preset direction perpendicular to the first preset direction; placing a plane reflector on one side of the standard reflector, and adjusting the plane reflector to enable the plane reflector to reflect light rays reflected by the standard reflector along a second preset direction to an objective table of the central deviation measuring instrument along a first preset direction; placing an objective lens between the standard reflector and the plane reflector, and adjusting the objective lens to enable the objective lens to transmit the light rays in the second preset direction along the original direction; placing a periscopic lens on one side of the objective lens, wherein the periscopic lens comprises an input lens and an output lens, and the input lens reflects incident light rays transmitted by the objective lens in a second preset direction onto the output lens along the opposite direction of the first preset direction; calibrating the internal focusing autocollimator to adjust the direction of a second optical axis corresponding to the internal focusing autocollimator to the direction opposite to a second preset direction; sequentially placing a first beam splitter prism and a second beam splitter prism between the inner focusing autocollimator and the periscopic lens, wherein the beam splitting directions of the first beam splitter prism and the second beam splitter prism are opposite, adjusting the first beam splitter prism so that the first beam splitter prism reflects light rays emitted by the inner focusing autocollimator along the direction of the second optical axis to the first preset direction, and adjusting the second beam splitter prism so that light rays reflected by the periscopic lens along the second preset direction are reflected to the first preset direction; placing a tube mirror between the first beam splitting prism and the second beam splitting prism, and adjusting the tube mirror to enable the direction of the optical axis of the tube mirror to be the same as the second preset direction; placing an amplifying lens on one side of the first beam splitting prism, and adjusting the amplifying lens to enable the amplifying lens to transmit the light rays in the first preset direction reflected by the first beam splitting prism out along the original direction; and replacing the first beam splitting prism by a third beam splitting prism which has the same beam splitting direction as the second beam splitting prism.
Preferably, the method further comprises the step of placing an illuminating component on one side of the second beam splitting prism, wherein the illuminating component is used for providing light sources opposite to each other along the first preset direction for the second beam splitting prism; a first CCD camera is arranged on one side of the third beam splitting prism and used for capturing an image of the object to be detected after the object to be detected is amplified by the tube lens; and a second CCD camera is arranged on one side of the magnifying lens and is used for capturing the image of the object to be measured after the object to be measured is magnified by the tube lens and the magnifying lens.
Preferably, the step of calibrating the stage of the central deviation measuring instrument to adjust the first optical axis corresponding to the central deviation measuring instrument to the first preset direction specifically includes: and arranging the flat mirror glass on an objective table of the central deviation measuring instrument, and adjusting the objective table to enable the verticality deviation value between the flat mirror glass and the first optical axis to be within a first preset deviation value.
Preferably, the step of calibrating the internally focused autocollimator to adjust the direction of the second optical axis corresponding to the internally focused autocollimator to the opposite direction of the second preset direction specifically includes: and arranging a first beam splitting prism at a preset position in front of a lens of the inner focusing autocollimator, arranging the first beam splitting prism between the inner focusing autocollimator and the periscopic lens, and adjusting the inner focusing autocollimator to enable the verticality deviation value between the first beam splitting prism and the second optical axis to be within a first preset deviation value.
Preferably, the step of placing the standard reflector at a preset position of the center deviation measuring instrument, and adjusting the standard reflector by the calibrated center deviation measuring instrument so that the standard reflector reflects the incident light in the first preset direction to the second preset direction perpendicular to the first preset direction specifically includes: a reference lens is arranged on one side of the standard reflector, and comprises a plane and a spherical surface; adjusting the inclination angle of the standard reflector based on the plane of the reference lens so that the perpendicularity deviation value between the optical axis direction of the reference lens and the direction of the first optical axis is smaller than a second preset deviation value; and adjusting the plane position of the objective table of the central deviation measuring instrument based on the spherical surface of the reference lens so that the distance between the position of the spherical center of the reference lens and the position of the first optical axis is smaller than a second preset distance value.
Preferably, the step of calibrating the internally focused autocollimator to adjust the direction of the second optical axis corresponding to the internally focused autocollimator to the opposite direction of the second preset direction further includes: and grinding the target mounting salient points for mounting the lenses on the periscopic lens so that the verticality deviation value between the direction of the optical axis of the reference lens and the direction of the second optical axis is not larger than a third preset deviation value, and the distance between the position of the optical axis of the reference lens and the position of the second optical axis is smaller than a third preset distance value.
Preferably, the step of adjusting the first beam splitting prism to reflect the light emitted by the internally focused autocollimator along the direction of the second optical axis to the first preset direction includes: and adjusting the inclination angle of the first beam splitter prism so that the verticality deviation value between the beam splitter prism and the second optical axis is smaller than a third preset deviation value.
Preferably, the step of adjusting the second beam splitting prism to reflect the light ray reflected by the periscope along the second preset direction to the first preset direction includes: and adjusting the inclination angle of the second beam splitting prism so that the verticality deviation value between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
Preferably, the plane mirror and the objective lens are respectively fixed on preset positions of the first mounting plate; the periscopic lens, the first beam splitter prism, the second beam splitter prism, the tube lens, the magnifying lens, the illuminating part, the first CCD camera and the second CCD camera are respectively fixed on the preset position of the second mounting plate; the first mounting plate and the second mounting plate are respectively fixed on the preset positions of the main mounting plate.
Preferably, the tube lens has a magnification of 4 times and the magnifying lens has a magnification of 5 times.
The embodiment of the application provides a method for assembling and adjusting a periscopic integrated optical path, divide the periscopic integrated optical path into a first optical component and a second optical component, the first optical component comprises a plane mirror and an objective lens, the first optical component is arranged on a first mounting plate, the second optical component comprises a periscopic lens, a first beam splitter prism, a second beam splitter prism, a tube lens, an amplifying lens, an illuminating component, a first CCD camera and a second CCD camera, the second optical component is arranged on a second mounting plate, the first mounting plate and the second mounting plate are respectively arranged on a total mounting plate, the optical path between the first optical component is adjusted through a central deviation measuring instrument, the optical path between the second optical component is adjusted through a self-focusing auto-collimator on a common basis, and the complete assembling and adjusting of the periscopic integrated optical path are realized.
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
To more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a schematic plan view of a periscopic integrated optical circuit according to an embodiment of the present application;
fig. 2 is a schematic diagram of an optical path corresponding to step a1 according to an embodiment of the present disclosure;
fig. 3 is a schematic diagram of an optical path corresponding to step a2 according to an embodiment of the present disclosure;
fig. 4 is a schematic optical path diagram corresponding to step a3 according to an embodiment of the present disclosure;
fig. 5 is a schematic diagram of an optical path corresponding to step a4 according to an embodiment of the present disclosure;
FIG. 6 is a schematic diagram of an optical path corresponding to steps B1 and B2 according to an embodiment of the present disclosure;
FIG. 7 is a schematic diagram of an optical path based on a reference lens according to an embodiment of the present disclosure;
fig. 8 is a schematic optical path diagram corresponding to step B3 according to an embodiment of the present disclosure;
fig. 9 is a schematic optical path diagram corresponding to step B4 according to an embodiment of the present disclosure;
fig. 10 is a schematic diagram of a light path corresponding to step B5 according to an embodiment of the present disclosure;
fig. 11 is a schematic optical path diagram corresponding to step B6 according to an embodiment of the present disclosure;
fig. 12 is a side view of a periscopic lens according to an embodiment of the present disclosure.
Detailed Description
To make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it should be understood that the drawings in the present application are for illustrative and descriptive purposes only and are not used to limit the scope of protection of the present application. Additionally, it should be understood that the schematic drawings are not necessarily drawn to scale. The flowcharts used in this application illustrate operations implemented according to some embodiments of the present application. It should be understood that the operations of the flow diagrams may be performed out of order, and that steps without logical context may be performed in reverse order or concurrently. In addition, one skilled in the art, under the guidance of the present disclosure, may add one or more other operations to the flowchart, or may remove one or more operations from the flowchart.
In addition, the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
With the development of semiconductor devices, periscopic integrated optical circuits are widely used in infinite conjugate alignment optical systems limited by space constraints. The inclination and eccentricity of each optical path in the periscopic integrated optical path relative to the optical axis directly affect the final imaging quality and alignment accuracy of the optical system.
In the existing adjusting method of the periscopic integrated optical path, only the adjusting method of two lens angles of a periscope is introduced, and the combination and assembly of other lens groups of the periscopic integrated optical path are not reported.
In view of the foregoing problems, embodiments of the present application provide a method for adjusting a periscopic integrated optical circuit, which is described below by way of embodiments.
For the convenience of understanding of the present application, the technical solutions provided in the present application will be described in detail below with reference to specific embodiments.
Fig. 1 is a schematic plan view of a periscopic integrated optical circuit according to an embodiment of the present disclosure, which includes a first optical component, a second optical component, a first mounting board, a second mounting board, and a total mounting board. Wherein a first optical assembly and a second optical assembly are shown in fig. 1. The first optical assembly comprises a plane mirror 2 and an objective lens 3, and the second optical assembly comprises a periscopic lens 4, a second beam splitter prism 5, a third beam splitter prism 8, a tube lens 7, an amplifying lens 9, an illuminating component 6, a first CCD camera 10 and a second CCD camera 11. The object to be measured may be placed on the object stage 1. The first optical assembly is fixed on the preset position of the first mounting plate respectively, the second optical assembly is fixed on the preset position of the second mounting plate respectively, and the first mounting plate and the second mounting plate are fixed on the main mounting plate respectively. It should be noted that, the preset position corresponding to each optical device and the position relationship between the optical devices are designed in advance, and only the optical devices need to be installed according to rules, but the installation angle of each optical device needs to be adjusted accurately.
The method for adjusting the periscopic integrated optical circuit in fig. 1 is described as follows, which comprises the following steps:
firstly, the step of adjusting the first optical component by the center deviation measuring instrument specifically comprises the following steps:
a1: the stage 14 of the center deviation measuring instrument is calibrated to adjust the direction of the first optical axis corresponding to the center deviation measuring instrument to a first preset direction.
Specifically, the flat mirror glass 13 is arranged on an objective table 14 of the central deviation measuring instrument, and the objective table 14 is adjusted, so that the verticality deviation value between the flat mirror glass 13 and the first optical axis is within a first preset deviation value.
Fig. 2 provides a schematic diagram of the optical path corresponding to step a 1. As shown in fig. 2, it is necessary to adjust the angle of the stage 14 in the auto-collimation mode based on the flat glass on the stage 14 of the center deviation meter so that the value of the verticality deviation between the flat glass 13 and the first optical axis of the center deviation meter is not more than 1 ". The perpendicularity deviation value here includes Rx and Ry, where Rx and Ry refer to the inclination angle between the reference optical axis and the surface under test, respectively, between the X axis or the Y axis. The central deviation meter based lens 12 can measure the perpendicularity deviation value and obtain a specific numerical value of the perpendicularity deviation value on the display of the central deviation meter.
A2: the standard reflector 15 is placed at a preset position of the center deviation measuring instrument, and the standard reflector 15 is adjusted by the calibrated center deviation measuring instrument, so that the standard reflector 15 reflects the incident light in the first preset direction to a second preset direction perpendicular to the first preset direction.
Specifically, a reference lens 16 is arranged on one side of the standard reflector 15, and the reference lens 16 comprises a plane and a spherical surface; adjusting the inclination angle of the standard reflector 15 based on the plane of the reference lens 16 so that the perpendicularity deviation value between the optical axis direction of the reference lens 16 and the first optical axis direction is smaller than a second preset deviation value; based on the spherical surface of the reference lens 16, the plane position of the stage 14 of the center deviation measuring instrument is adjusted so that the distance between the position of the spherical center of the reference lens 16 and the position of the first optical axis is smaller than a second preset distance value.
As shown in fig. 3, fig. 3 provides a schematic diagram of the optical path corresponding to step a 2. Wherein the first predetermined deviation value is 5' and the second predetermined distance value is 5 um. The reference mirror 15 and the reference lens 16 are each fixed to a first mounting plate which is placed on the stage 14 of the center deviation measuring instrument. The angle of the standard mirror 15 is adjusted so that the value of the deviation of the perpendicularity between the plane of the reference lens 16 and the first optical axis is less than 5 ". The stage 14 is adjusted to be translated in the X or Y direction of the horizontal plane with the spherical center image of the reference lens 16 as a reference so that the eccentricity in the X, Y direction of the spherical center image of the reference lens 16 with respect to the first optical axis is less than 5 um.
A3: the plane mirror 2 is placed on one side of the standard mirror 15, and the plane mirror 2 is adjusted so that the plane mirror 2 reflects the light reflected by the standard mirror 15 along the second preset direction to the objective table 14 of the central deviation measuring instrument along the first preset direction.
Specifically, fig. 4 provides a schematic diagram of the optical path corresponding to step a 3. As shown in fig. 4, the reference lens 16 is removed, the flat mirror glass 13 is moved to the lower side of the flat mirror 2, and the installation angle of the flat mirror 2 is adjusted so that the verticality deviation value between the horizontal plane corresponding to the flat mirror glass 13 and the optical axis of the central deviation measuring instrument is less than 5 ″.
A4: the objective lens 3 is placed between the standard reflector 15 and the plane reflector 2, and the objective lens 3 is adjusted so that the objective lens 3 transmits the light rays in the second preset direction along the original direction.
Fig. 5 provides a schematic diagram of the optical path corresponding to step a 4. As shown in fig. 5, the objective lens 3 is mounted to a predetermined position, and the mounting position of the objective lens 3 is adjusted based on the optical axis of the central deviation measuring instrument, so that the eccentricity between the image of the objective lens 3 and the first optical axis is less than 5um, and the verticality deviation value between the horizontal plane corresponding to the objective lens 3 and the first optical axis is less than 10 ". The tilt posture of the objective lens 3 can be calculated based on two spherical center images of the same lens in the objective lens 3 measured by the center deviation measuring instrument.
The positions of the plane mirror 2 and the objective lens 3 are fixed on the first mounting plate respectively, and then the first mounting plate is fixed on the preset position of the total mounting plate.
Then, the step of adjusting the second optical assembly by the self-focusing autocollimator specifically includes:
b1: the periscopic lens 4 is arranged on one side of the objective lens 3, the periscopic lens 4 comprises an input lens and an output lens, and the input lens reflects incident light rays transmitted by the objective lens 3 in a second preset direction onto the output lens along the opposite direction of the first preset direction.
Fig. 6 provides a schematic diagram of the optical path corresponding to step B2. The mounting position of the periscope lens, shown in fig. 6, is designed in advance here for the position of the periscope lens 4. It will be appreciated that the periscopic lens 4 may be fixed to the second or general mounting plate.
B2: the internally focused autocollimator 18 is calibrated to adjust the direction of the second optical axis corresponding to the internally focused autocollimator 18 to the opposite direction of the second preset direction.
Specifically, the first beam splitting prism 17 is arranged at a preset position in front of the lens of the inner focusing autocollimator 18, the first beam splitting prism 17 is arranged between the inner focusing autocollimator 18 and the periscopic lens 4, and the inner focusing autocollimator 18 is adjusted so that the perpendicularity deviation value between the first beam splitting prism 17 and the second optical axis is within a first preset deviation value.
As shown in fig. 6, the internal focusing autocollimator 18 is fixed at a predetermined position outside the main mounting plate, and then the first beam splitter prism 17 is mounted. The angle in the X-axis direction between the optical axis of the internally focusing autocollimator 18 and the surface of the first beam splitting prism 17 is adjusted with the surface of the first beam splitting prism 17 as a reference so that Rx between the second optical axis of the internally focusing autocollimator 18 and the surface of the first beam splitting prism 17 is less than 1 ".
Further, fig. 7 provides a schematic diagram of an optical path based on a reference lens. As shown in fig. 7, Rx between the surface of the reference lens 16 and the second optical axis can also be measured by the in-focus autocollimator 18 to be less than 30 "as needed. The in-focus autocollimator 18 is then adjusted, with reference to the reference lens 16, so that Ry between the surface of the reference lens 16 and the second optical axis is less than 10' and the decentration between the imaging of the reference lens 16 and the second optical axis is less than 10 um.
Fig. 12 provides a side view of a periscopic lens. Three mounting bumps 44 are provided on the surface of the periscopic lens 4, and the three mounting bumps 44 may be arranged in a triangular arrangement, and are used for mounting the lens 42. By grinding the target mounting bumps for mounting the mirror plates 42 on the periscope lens 4, the perpendicularity deviation value between the direction of the optical axis of the reference lens 16 and the direction of the second optical axis is not larger than the third preset deviation value, and the distance between the position of the optical axis of the reference lens 16 and the position of the second optical axis is smaller than the third preset distance value.
The periscopic lens 4 here comprises two lenses, which are fixed on mounting bumps, and the angle of the lenses can be changed by grinding the mounting bumps, so as to adjust Ry between the inner focusing autocollimator 18 and the reference lens 16, thereby realizing the butt joint of the optical axis between the optical path of the first optical component and the optical path of the second optical component.
B3: the first beam splitting prism 17 and the second beam splitting prism 5 are sequentially placed between the inner focusing autocollimator 18 and the periscopic lens 4, the beam splitting directions of the first beam splitting prism 17 and the second beam splitting prism 5 are opposite, the first beam splitting prism 17 is adjusted, so that light rays emitted by the inner focusing autocollimator 18 along the direction of the second optical axis are reflected to the first preset direction by the first beam splitting prism 17, and the second beam splitting prism 5 is adjusted, so that light rays reflected by the periscope along the second preset direction are reflected to the first preset direction.
The step of adjusting the first beam splitter prism 17 to enable the first beam splitter prism 17 to reflect the light emitted by the inner focusing autocollimator 18 along the direction of the second optical axis to a first preset direction specifically includes: and adjusting the inclination angle of the first beam splitter prism 17 so that the perpendicularity deviation value between the beam splitter prism and the second optical axis is smaller than a third preset deviation value.
Adjusting the second beam splitter prism 5 to reflect the light ray reflected by the periscope along the second preset direction to the first preset direction, specifically comprising: and adjusting the inclination angle of the second beam splitter prism 5 so that the perpendicularity deviation value between the beam splitter prism and the second optical axis is smaller than a third preset deviation value.
Fig. 8 provides a schematic diagram of the optical path corresponding to step B3. As shown in fig. 8, the installation angles of the first beam splitter prism 17 and the second beam splitter prism 5 are sequentially adjusted with reference to the second optical axis of the in-focus autocollimator 18 so that Rx and Ry between the first beam splitter prism 17 and the second beam splitter prism 5 and the second optical axis are not more than 10 ″.
B4: the tube mirror 7 is placed between the first beam splitting prism 17 and the second beam splitting prism 5, and the tube mirror 7 is adjusted so that the direction of the optical axis of the tube mirror 7 is the same direction as the second preset direction.
Fig. 9 provides a schematic diagram of the optical path corresponding to step B4. As shown in fig. 9, the internal adjustment mode of the internally focused autocollimator 18 is selected, and the installation angle of the tube mirror 7 is adjusted so that Rx and Ry between the surface of the tube mirror 7 and the second optical axis are not more than 30 ″. The tilt attitude of the tube lens 7 can be calculated by measuring the decentering of two spherical center images of the same lens in the tube lens 7 by the internally focusing autocollimator 18.
B5: an amplifying lens 9 is disposed on one side of the first beam splitter prism 17, and the amplifying lens 9 is adjusted so that the amplifying lens 9 transmits the light ray in the first preset direction reflected by the first beam splitter prism 17 along the original direction.
Fig. 10 provides a schematic diagram of the optical path corresponding to step B5. As shown in fig. 10, the internal adjustment mode of the internally focused autocollimator 18 is selected, and the installation angle of the magnifying lens 9 is adjusted so that Rx and Ry between the mirror surface of the magnifying lens 9 and the second optical axis are not more than 30 ".
B6: the first beam splitting prism 17 is replaced with a third beam splitting prism 8 having the same beam splitting direction as the second beam splitting prism 5.
Fig. 11 provides a schematic diagram of the optical path corresponding to step B6. As shown in fig. 11, first, the first beam splitter prism 17 is removed and replaced with the third beam splitter prism 8. And adjusts the third beam splitting prism 8 so that Rx and Ry between the surface of the third beam splitting prism 8 and the second optical axis are not more than 10 ".
Finally, the illumination member 6 and the CCD camera are configured by the following steps:
c1: an illumination member 6 is disposed at one side of the second beam splitting prism 5, and the illumination member 6 is used to provide a light source opposite to the first preset direction to the second beam splitting prism 5.
C2: a first CCD camera 10 is arranged on one side of the third beam splitting prism 8, and the first CCD camera 10 is used for capturing the image of the object to be measured after being amplified by the tube mirror 7.
C3: a second CCD camera 11 is arranged on one side of the magnifying lens 9, and the second CCD camera 11 is used for capturing the image of the object to be measured after the object to be measured is magnified by the tube lens 7 and the magnifying lens 9.
Among them, the positions of the illumination member 6, the first CCD camera 10, and the second CCD camera 11 are as shown in fig. 1. But the deviation of the two image centers of the first CCD camera 10 and the second CCD camera 11 needs to be adjusted to be not more than 5 um.
The periscopic integrated optical path assembling and adjusting method provided by the embodiment of the application adopts the reference lens 16 as the optical path reference, calibrates the first optical component based on the central deviation measuring instrument, calibrates the second optical component based on the internal focusing autocollimator 18, and realizes butt joint of the optical axes of the optical paths of the first optical component and the second optical component through the periscopic lens 4, thereby realizing complete assembling and adjusting of the periscopic integrated optical path.
In one embodiment of the present application, the magnification of the tube mirror 7 is 4 times, and the magnification of the magnifying lens 9 is 5 times. It will be appreciated that the first CCD camera 10 can capture images at four times magnification, while the second CCD camera 11 can capture images at twenty times magnification.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, a division of a unit is merely a division of one logic function, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed coupling or direct coupling or communication connection between each other may be through some communication interfaces, indirect coupling or communication connection between devices or units, and may be in an electrical, mechanical or other form.
Units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
The functions, if implemented in software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer readable memory executable by a processor. Based on such understanding, the technical solution of the present application or portions thereof that substantially contribute to the prior art may be embodied in the form of a software product stored in a memory, and including instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present application. And the aforementioned memory comprises: various media capable of storing program codes, such as a usb disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk, or an optical disk.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present application, and are used for illustrating the technical solutions of the present application, but not limiting the same, and the scope of the present application is not limited thereto, and although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the exemplary embodiments of the present application, and are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A method for adjusting a periscopic integrated optical circuit, the method comprising:
calibrating an objective table of a central deviation measuring instrument so as to adjust the direction of a first optical axis corresponding to the central deviation measuring instrument to a first preset direction;
placing a standard reflector on a preset position of a center deviation measuring instrument, and adjusting the standard reflector through the calibrated center deviation measuring instrument so that the standard reflector reflects the incident light in the first preset direction to a second preset direction perpendicular to the first preset direction;
placing a plane reflector on one side of the standard reflector, and adjusting the plane reflector so that the plane reflector reflects the light rays reflected by the standard reflector along the second preset direction onto an objective table of the central deviation measuring instrument along the first preset direction;
placing an objective lens between the standard reflector and the plane reflector, and adjusting the objective lens to enable the objective lens to transmit the light rays in the second preset direction along the original direction;
placing a periscopic lens on one side of the objective lens, wherein the periscopic lens comprises an input lens and an output lens, and the input lens reflects incident light rays transmitted by the objective lens in a second preset direction onto the output lens along the opposite direction of the first preset direction;
calibrating the inner focusing autocollimator to adjust the direction of a second optical axis corresponding to the inner focusing autocollimator to the direction opposite to the second preset direction;
sequentially placing a first beam splitting prism and a second beam splitting prism between the internal focusing autocollimator and the periscopic lens, wherein the beam splitting directions of the first beam splitting prism and the second beam splitting prism are opposite, adjusting the first beam splitting prism to enable the first beam splitting prism to reflect light rays emitted by the internal focusing autocollimator along the direction of the second optical axis to a first preset direction, and adjusting the second beam splitting prism to reflect light rays reflected by the periscopic lens along the second preset direction to the first preset direction;
placing a tube mirror between the first beam splitting prism and the second beam splitting prism, and adjusting the tube mirror to enable the direction of the optical axis of the tube mirror to be the same as a second preset direction;
placing an amplifying lens on one side of the first beam splitting prism, and adjusting the amplifying lens to enable the amplifying lens to transmit the light rays in the first preset direction reflected by the first beam splitting prism out along the original direction;
and replacing the first beam splitting prism by a third beam splitting prism which has the same beam splitting direction as the second beam splitting prism.
2. The method of claim 1, further comprising:
placing an illuminating component on one side of the second beam splitting prism, wherein the illuminating component is used for providing light sources opposite to each other along the first preset direction for the second beam splitting prism;
a first CCD camera is arranged on one side of the third beam splitting prism and used for capturing an image of the object to be detected after the object to be detected is amplified by the tube lens;
and a second CCD camera is arranged on one side of the magnifying lens and is used for capturing the image of the object to be measured after the object to be measured is magnified by the tube lens and the magnifying lens.
3. The method according to claim 1, wherein the step of calibrating the stage of the center deviation measuring instrument to adjust the first optical axis corresponding to the center deviation measuring instrument to a first predetermined direction includes:
and arranging the flat mirror glass on an objective table of the central deviation measuring instrument, and adjusting the objective table to enable the verticality deviation value between the flat mirror glass and the first optical axis to be within a first preset deviation value.
4. The method according to claim 1, wherein the step of calibrating the in-focus autocollimator to adjust the direction of the second optical axis corresponding to the in-focus autocollimator to the opposite direction of the second preset direction specifically comprises:
and arranging a first beam splitting prism at a preset position in front of a lens of the internal focusing autocollimator, arranging the first beam splitting prism between the internal focusing autocollimator and the periscopic lens, and adjusting the internal focusing autocollimator to enable the verticality deviation value between the first beam splitting prism and the second optical axis to be within a first preset deviation value.
5. The method according to claim 1, wherein the step of placing a standard mirror at a predetermined position of a center deviation measuring instrument and adjusting the standard mirror by the calibrated center deviation measuring instrument so that the standard mirror reflects the incident light in the first predetermined direction to a second predetermined direction perpendicular to the first predetermined direction comprises:
a reference lens is arranged on one side of the standard reflector, and comprises a plane and a spherical surface;
adjusting the inclination angle of the standard reflector based on the plane of the reference lens so that the perpendicularity deviation value between the optical axis direction of the reference lens and the direction of the first optical axis is smaller than a second preset deviation value;
and adjusting the plane position of the objective table of the central deviation measuring instrument based on the spherical surface of the reference lens so that the distance between the position of the spherical center of the reference lens and the position of the first optical axis is smaller than a second preset distance value.
6. The method of claim 5, wherein the step of calibrating the in-focus autocollimator to adjust the direction of the second optical axis corresponding to the in-focus autocollimator to the opposite direction of the second preset direction further comprises:
and grinding a target mounting convex point used for mounting the lens on the periscopic lens so as to enable the verticality deviation value between the direction of the optical axis of the reference lens and the direction of the second optical axis to be not more than a third preset deviation value and enable the distance between the position of the optical axis of the reference lens and the position of the second optical axis to be less than a third preset distance value.
7. The method according to claim 1, wherein the step of adjusting the first beam splitting prism so that the first beam splitting prism reflects the light emitted by the internally focused autocollimator along the direction of the second optical axis to a first predetermined direction comprises:
and adjusting the inclination angle of the first beam splitter prism so that the verticality deviation value between the beam splitter prism and the second optical axis is smaller than a third preset deviation value.
8. The method according to claim 1, wherein the step of adjusting the second beam splitting prism to reflect the light reflected by the periscope in the second predetermined direction to the first predetermined direction comprises:
and adjusting the inclination angle of the second beam splitting prism so that the verticality deviation value between the beam splitting prism and the second optical axis is smaller than a third preset deviation value.
9. The method of claim 2, further comprising:
the plane reflector and the objective lens are respectively fixed on the preset positions of the first mounting plate;
the periscopic lens, the first beam splitter prism, the second beam splitter prism, the tube lens, the magnifying lens, the illuminating part, the first CCD camera and the second CCD camera are respectively fixed on preset positions of a second mounting plate;
the first mounting plate and the second mounting plate are respectively fixed on the preset positions of the general mounting plate.
10. The method of claim 1, wherein the tube lens is magnified by a factor of 4 and the magnifying lens is magnified by a factor of 5.
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