CN102538689A - Centering and locating device of optical system and using method thereof - Google Patents

Abstract

The invention relates to a centering and locating device of an optical system and a using method of the centering and locating device. The centering and locating device comprises an internal focusing telescope, a white light fiber interferometer, an electronics part, a computer, an adjusting rack, a guide rail and an optical platform. The centering and locating device provided by the invention can simultaneously measure the center deviation, the center thickness and the center interval of an optical element in an optical assembling and debugging process, so as to center and locate the optical system; and the centering and locating device is applicable to the assembling and the debugging of horizontal optical systems or coaxial optical systems with complicated operating attitudes, such as a turning light axis and the like, and meanwhile, can be applied to the centering, locating and assembling of a rotation reflection optical system, the measurement of the center deviation and the center thickness of an optical lens, the gluing of the optical lens, and the centered edging, the precision angle measurement, the precision position measurement and the like, of the optical lens, in a popularizing manner.

Description

Optical system centering locating device and method of application thereof

Technical field

The present invention relates to optical system, particularly a kind of optical system centering locating device and method of application thereof when being used for optical system bulk cargo school.

Background technology

The optical centre deviation be in the optical instrument foozle one bigger to complete machine optics assembly quality influence, error also more rambunctious simultaneously.The existence of optical element centre deviation has destroyed the coaxiality of optical system, causes the decline of image quality.The optical centre interval error is the other important errors in the optical instrument foozle, and its existence directly has influence on the imaging performance of optical system.

In the process of the dress school of optical system; Precision optical system particularly; In the assembling process like projection mask aligner's object lens, aerial survey camera lens, interferometer standard lens, laserresonator chamber length, laser space communication ground validation system etc., optical centre deviation and Center Gap all there is very strict control requirement.

Therefore, debuging the centre deviation and the Center Gap error that how effectively to solve optical element in the process at optical instrument is the key point that guarantees Performance of Optical System.

In real work, the method for measuring the optics centre deviation mainly contains two kinds: a kind of is static method, and another kind is rotary process.Static method is that the optical axis with some surveying instrument is a benchmark, measures the deviation of each centre of sphere autocollimation kine bias from the instrument optical axis, calculates then.And rotary process is to be the measuring basis axle with precision optical machinery axle system; System under test (SUT) is fixed on the turning axle; When the rotation of axle system, all reflection autocollimatic pictures are all done and are drawn circular motion, measure each centre of sphere autocollimatic picture with respect to the relative position of drawing the circle center and just obtain centre deviation.

The Center Gap of measuring each element of optical system mainly contains two kinds of methods: a kind of is Mechanical Method, and another kind is an interferometric method.Mechanical Method adopts the mode of contact to measure the center thickness and the spacer ring thickness of optical element, through calculating the interval between the optical element.Mechanical Method can only be measured in optical alignment, in case the dress gyp accomplishes, with regard to the center thickness of energy measurement whole optical system not and airspace, factor that can't the decision influence image quality.Mechanical measurement adopts the airspace, center that measures optical system indirectly, and error is generally bigger.Interferometric method is that the principle that adopts Michelson to interfere is measured; This method is with the noncontact mode; Through interference of light; Measure the center thickness and the interval of optical element, its measuring accuracy can reach nanoscale, and interferometric method can be carried out center thickness and measurement at interval with adorning after accomplish in the school in the process of dress school.

At present, a lot of commercial optical centre deviation measuring apparatus are arranged on the market, generally be used for compact optical elements such as camera lens, pick-up lens.Optical centre deviation measuring apparatus for high precision such as projection mask aligner's object lens, aerial survey camera lens, large-scale optical instrument has only external fewer companies to make, and price is very expensive.Though domestic have unit to develop the optical centering appearance, do not form commercial product.The optical centre deviation is measured the optical centering locating device that is integrated in one with optical centre thickness and interval measurement, also do not having ripe product to occur in the market.Some unit is optical centering appearance and an optical alignment appearance of purchasing different company respectively, through some devices they is mechanically combined, the inevitable like this purchase cost that improves greatly.In addition; Commercial white light fibre optic interferometer is in measuring process on the market, can only judge the alignment of two optical axises through the power that observation detects reflected light beam signal, can't the control survey beam optical axis and the alignment of seized system optical axis; Its measuring beam optical axis and seized system optical axis are accurately aimed at; Bring a little less than the measuring-signal, be difficult for surveying, problems such as operation inconvenience.

Because the demand of working environment, some optical systems need adopt the optical axis horizontal attitude work parallel with ground, or place with other complicated attitude, assemble the centre deviation that these optical systems must consider that the optical element self gravitation brings.At present; The high precision centre deviation measuring instrument of selling on the market generally adopts the vertical rotating reflectometry; Can't effectively measure the centre deviation problem of these optical systems, like a large amount of horizontal work system that all exists in the large-scale optical devices such as refreshing electro-optical device, space laser communication ground validation system, photo-etching machine illumination system.

Summary of the invention

Deficiency to above-mentioned prior art existence; The technical matters that the present invention will solve is: a kind of optical system centering locating device and method of application thereof are provided; This device can be measured centre deviation, center thickness and the Center Gap of optical element simultaneously in the optical alignment process; To optical system feel relieved the location device; This device is applicable to horizontal or has the assembling and setting of complex work attitude coaxial optical system such as turnover optical axis etc., also can promote the use of the assembling of centering location, optical lens centre deviation and the measurement of center thickness of rotary reflection method optical system, the gummed of optical lens, the centering edging of optical lens, accurate measurement of angle, precision measurement etc. simultaneously.

Technical solution of the present invention is following:

A kind of optical system centering locating device, characteristics are that its formation comprises internal focusing telescope, white light fibre optic interferometer, electronics part, computing machine, adjustment rack, guide rail and optical table, the position of above-mentioned component concerns as follows:

Described white light fibre optic interferometer, electronics part, computing machine and guide rail place on the described optical table; Described internal focusing telescope places on the described adjustment rack; Described adjustment rack is a four-dimensional adjustment rack, and height, left and right displacement and the pitching, the orientation that are used to adjust described internal focusing telescope tilt, and described adjustment rack places on the described guide rail; Described adjustment rack moves on described guide rail, is used to regulate moving axially of described internal focusing telescope;

Described internal focusing telescope is made up of light source, condenser group, prism, field lens graticule, focusing lens group, fixed mirror group, spectroscope, relay lens and ccd detector, and described fixed mirror group, focusing lens group, field lens graticule, spectroscope, relay lens and ccd detector constitute the optical axis of internal focusing telescope;

The fibre-coupled mirrors group of described white light fibre optic interferometer and the spectroscope of described internal focusing telescope, field lens graticule common optical axis, this white light fibre optic interferometer have measures the center thickness of each lens and the function of Center Gap to the optical system autoscan of common optical axis;

The light that described light source sends; Convergence through the condenser group; The reflection of prism; Illumination field lens graticle; The picture of field lens graticle images in infinite distant place through focusing lens group and fixed mirror group; When the centre of sphere on the seized surface of optical system to be measured just in time is in the position of picture of field lens graticle; The reverberation on this seized surface passes through described fixed mirror group again; Focusing lens is formed picture on the surface of field lens graticle; This picture is again through described spectroscope reflection; Relay lens is assembled and is imaged on the test surface of described ccd detector; Be called image; Described field lens graticle itself reflects through described spectroscope; Relay lens is assembled the center of the test surface that will be imaged on described ccd detector, is called field lens graticle picture;

Described electronics partly is used for controlling moving of internal focusing telescope focusing lens group and relay lens group; And record displacement information; Described computing machine links to each other the collaborative work of control device and data processing with described electronics part with described ccd detector.

Described optical system to be measured or optical system to be installed are the coaxial optical system of no central obscuration, and described optical system to be measured or optical system to be installed place on the described optical table.

Utilize above-mentioned optical system centering locating device to carry out the measuring method of optical system centre deviation and center thickness and Center Gap, its characteristics are that this method comprises the following steps:

1. on the optical table of described optical system centering locating device, fix optical system to be measured; The optical axis that makes optical system to be measured roughly with the optical axis basically identical of the internal focusing telescope of optical system centering locating device, start optical system centering locating device;

2. pass through driven by servomotor; Move the focusing lens group in the internal focusing telescope; Make the field lens graticule be imaged onto the centre of sphere of first surface of first lens of optical system to be measured through focusing lens group and fixed mirror group; The reflected light of first surface is imaged on ccd detector and obtains the image b of first surface clearly through fixed mirror group, focusing lens group, field lens graticule, spectroscope, relay lens convergence successively; Simultaneously, the field lens graticule is assembled to be imaged on through spectroscope, relay lens group and is formed centrally the field lens graticule in the ccd detector visual field as a, regulates described adjustment rack first surperficial image b is overlapped as a with described field lens graticule;

3. pass through driven by servomotor; Move the focusing lens group in the internal focusing telescope; Make the field lens graticule be imaged onto the centre of sphere on second surface of first lens of seized optical system; The reflected light on this second surface is assembled through fixed mirror group, focusing lens group, field lens graticule, spectroscope, relay lens successively and is imaged on the ccd detector acquisition image b on second surface clearly; Regulating adjustment rack makes the image b on second surface of optical system to be measured overlap with the picture a of the field lens graticule that is positioned at center, ccd detector visual field;

4. repeating image b that 3. 2. above-mentioned steps make first surperficial image b of optical system to be measured and second surface with step all overlaps as a with the field lens graticule at center, ccd detector visual field; At this moment the optical axis coincidence of first of the optical axis of described internal focusing telescope and seized optical system lens, and claim that this optical axis is the benchmark optical axis;

5. through driven by servomotor, move the focusing lens group, make the field lens graticule be imaged onto the centre of sphere on the 3rd surface of optical system to be measured; Through the rotational angle θ of photoelectric encoder measurement servomotor, the helical pitch P of known guide calculates the distance between fixation group and the focusing group

Collect the image of field lens graticule through ccd detector, adopt centroid method to obtain the field lens graticule as the centre coordinate (X of a on ccd detector through Flame Image Process as a and image b ₀, Y ₀) and the centre coordinate (X of image b on ccd detector; Y); The pixel size PH of known ccd detector, utilize formula calculate by the image b of the 3rd surface reflection of optical system to be measured and the field lens graticule at center, ccd detector visual field as the distance C between a ':

$C^{\′}=\sqrt{{(X-X_0)}^2+{(Y-Y_0)}^2}\×\mathrm{PH};$

Wherein: the focal distance f of fixation group ₁', the focal distance f of focusing group ₂', fixation group is to the distance L of field lens graticule, the multiplying power β of relay lens _RFor known;

Utilize formula to calculate the 3rd optical surface of optical system to be measured and the centre deviation of benchmark optical axis;

When the 3rd optical surface was sphere, its centre deviation was the distance of this optical surface centre of sphere to the benchmark optical axis,

$C=\frac{C^{\&prime;}}{2\mathrm{\&beta;}}=\frac{C^{\&prime;}}{2{\mathrm{\&beta;}}_O\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{1}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}+e-L)-L\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e)-e^2}---\left(7\right)$

When the 3rd optical surface was the plane, its centre deviation was the angle of this normal to a surface and benchmark optical axis,

$\mathrm{\&alpha;}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f_O}^{\&prime;}\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f^{\&prime;}}_Z}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}+{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e_0}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}---\left(8\right)$

6. 5. repeating step moves the focusing lens group, makes the field lens graticule be imaged onto the 4th surface of optical system to be measured, the 5th surface ..., the centre of sphere on last surface, meter is calculated the centre deviation of seized surface and benchmark optical axis respectively;

7. utilize the center thickness and the Center Gap of each lens of autoscan measurement of white light fibre optic interferometer.

Utilize above-mentioned optical system centering locating device when optical system is assembled, optical system to be installed to be carried out the method that optical centering is located, comprise the following steps:

1. on the optical table of described optical system centering locating device, fix first lens of optical system to be installed; The optical axis that makes optical system to be installed roughly with the optical axis basically identical of the internal focusing telescope of optical system centering locating device, start optical system centering locating device;

2. pass through driven by servomotor; Move the focusing lens group in the internal focusing telescope; Make the field lens graticule be imaged onto the centre of sphere of the first surface of first lens through focusing lens group and fixed mirror group; The reflected light of first surface is imaged on ccd detector and obtains the image b of first surface clearly through fixed mirror group, focusing lens group, field lens graticule, spectroscope, relay lens convergence successively; Simultaneously, the field lens graticule through spectroscope, relay lens group assemble be imaged on center, ccd detector visual field the field lens graticule as a, regulate described adjustment rack first surperficial image b overlapped as a with described field lens graticule;

3. pass through driven by servomotor; Move the focusing lens group; Make the field lens graticule be imaged onto the centre of sphere on second surface of first lens of seized optical system; The reflected light on this second surface is assembled through fixed mirror group, focusing lens group, field lens graticule, spectroscope, relay lens successively and is imaged on the ccd detector acquisition image b on second surface clearly; Regulating adjustment rack makes the image b on second surface overlap with the picture a of the field lens graticule that is positioned at center, ccd detector visual field;

4. repeating image b that 3. 2. above-mentioned steps make first surperficial image b and second surface with step all overlaps as a with the field lens graticule at center, ccd detector visual field; At this moment the optical axis coincidence of first of the optical axis of internal focusing telescope and seized optical system lens, and claim that this optical axis is the benchmark optical axis;

5. according to the spacing of the design of second lens and first lens second lens is installed;

6. repeat above-mentioned steps 2. with step 3., adjust described second lens, the image b on two surfaces of second lens is all overlapped as a with the field lens graticule that is positioned at center, ccd detector visual field, accomplish the centering of second lens;

7. measure the Center Gap of first lens and second lens with the white light fibre optic interferometer; When the error of the Center Gap of measuring in the design tolerance scope, do not adjust, promptly get into step 8.; When the error of the Center Gap of measuring exceeds the design tolerance scope, return step 5.;

8. install and adjust the 3rd lens according to the spacing of the design of the 3rd lens and second lens, repeat above-mentioned steps 6. with step 7.;

9. and the like, the centering location of accomplishing optical system.

The present invention has following technique effect with compared with techniques formerly:

1, the present invention adopts the optical axis of the optical axis of horizontal internal focusing telescope as optical system centering location, has solved the assembling and setting problem of optical system under horizontal optical system or other complex work attitudes effectively.

2, the present invention has organically installed spectroscope, fibre-coupled mirrors group and the fiber bench with the light shaft coaxle of described internal focusing telescope on described internal focusing telescope; Only need the measuring optical fiber of described white light fibre optic interferometer is inserted in the described fiber bench; The optical axis of the light beam of described white light fibre optic interferometer output and input promptly overlaps with the optical axis of described internal focusing telescope is organic; When having solved independent use white light interferometer effectively and having measured; A little less than the reflected signal, be difficult for surveying difficulties such as operation inconvenience.

3, of the present inventionly totally can carry out the measurement of centre deviation, Center Gap and center thickness simultaneously, realize that optical instrument debugs centering and the location in the process optical system; The present invention can carry out the center thickness and measurement at interval of optical element in the optical system in the process of dress school and after the completion of dress school.

Description of drawings

Fig. 1 is optical system centering orientator apparatus structure synoptic diagram of the present invention

Fig. 2 is optical system centering orientator device optical schematic diagram of the present invention

Fig. 3 is an internal focusing telescope object lens equivalence light path principle figure

Equivalent index path when Fig. 4 is in outgoing directional light position for the internal focusing telescope object lens

Fig. 5 is that field lens graticule picture and seized surface reflection are as synoptic diagram

Fig. 6 is the internal focusing telescope structural drawing

Fig. 7 is the composition structural drawing of electronics componental movement control system

Embodiment

Below in conjunction with embodiment and accompanying drawing the present invention is further described, but should limit protection scope of the present invention with this.

See also Fig. 1 earlier; Fig. 1 is optical system centering orientator apparatus structure synoptic diagram of the present invention; Visible by figure, optical system centering locating device of the present invention adopts horizontal static reflex method measuring center deviation; Adopt michelson interferometry to measure optics center thickness and Center Gap, its formation comprises internal focusing telescope 01, white light fibre optic interferometer 02, electronics part 03, computing machine 04, adjustment rack 05, guide rail 06, optical table 07 and seized optical system 08.

Internal focusing telescope 01 is imaged onto the centre of sphere on seized surface through moving the focusing lens group with the field lens graticule, and its reflection image is used to measure the centre deviation on seized surface through being received by ccd detector behind interior focusing system;

White light fibre optic interferometer 02 is coupled to its measuring beam in the light path of internal focusing telescope, and converges to seized surface through spectroscope, adopts the michelson interferometry measuring principle to carry out the measurement of optical centre thickness and Center Gap;

Electronics part 03 is used for controlling moving of internal focusing telescope 01 focusing lens group and relay lens group, and measures its displacement information, through calculating the position that can obtain its emission beam convergence point and to reflecting the imaging multiplying power of graduation picture; Signal to ccd detector output carries out analyzing and processing, calculates the optical centre deviation on seized surface;

Computing machine 04 is used for keeping watch on the various information of the process of debuging;

Height, left and right displacement and pitching, orientation that adjustment rack 05 is used to adjust internal focusing telescope 01 tilt, and are a four-dimensional adjustment rack;

Guide rail 06 is used to move axially internal focusing telescope 01, and suitable operating distance is provided;

Optical table 07 provides a stabilised platform for the optical centering locating device;

Seized optical system 08 is the coaxial optical system of no central obscuration.

The optical principle of optical centering orientator is as shown in Figure 2;

The light that light source 101 sends, through the convergence of condenser group 102, the reflection of prism 103, illumination field lens graticule 104, the picture of field lens graticule 104 images in infinite distant place through focusing lens group 105 and fixed mirror group 106.Change the position of focusing lens group 105, the picture of field lens graticule 104 can be transferred to-∞ from+∞.When the centre of sphere on the seized surface of optical element 08 to be measured just in time overlaps with the picture of described field lens graticule 104 (plane can think that then radius is infinitely-great sphere); Light will be by described seized surface reflection; This seized surface reflection pass through again fixed mirror group 106 and focusing lens group 105 with seized surface imaging on the surface of field lens graticule 104; Through spectroscope 107 reflections, assemble image in the test surface of ccd detector 109 on again by relay lens 108 for the picture on this seized surface.

After the centre of sphere on a certain seized surface of the picture of the field lens graticule 104 of internal focusing telescope and optical element to be measured 08 overlapped basically, the optical axis of the optical axis of internal focusing telescope and optical element to be measured 08 overlapped basically.At this moment, the optical axis of the measurement optical axis of white light fibre optic interferometer and optical element to be measured 08 is also just basic overlaps.

At this moment, short coherent source 201 sends reference beam and measuring beam, and measuring beam is focused at field lens graticule 104 places through fibre-coupled mirrors group 203 and spectroscope 107; By field lens graticule 104 reflection, converge to the sphere center position on optical element to be measured 08 seized surface through focusing lens group 105 and fixed mirror group 106, light is by optical element 08 seized surface reflection to be measured; Reflected light converges to the white light fibre optic interferometer through interior focusing system again; This light beam and reference beam are received by detector 205 through coupling mechanism 202 couplings, when mobile reference mirror 204 arrives a certain position; Two-beam forms interferes, and at this moment detector 205 obtains peak signal; Can form interference in element under test 08 different surface through moving reference mirror 204,204 displacements of precision measurement reference mirror just can obtain Center Gap and center thickness between element under test 08 different surfaces;

The internal focusing telescope calculation of parameter is following:

When the centre of sphere of the seized optical surface of optical element 08 to be measured and the picture of field lens graticule 104 have little deviation C; Then reflection image changes 2C; This amount is C ' after internal focusing telescope 2 amplifies, and the centre of sphere of optical element 8 seized optical surfaces then to be measured and the deviation C of internal focusing telescope optical axis are:

$C=\frac{C^{\&prime;}}{2\mathrm{\&beta;}}---\left(1\right)$

Wherein: β is the enlargement ratio of internal focusing telescope, and it equals interior focusing object lens multiplying power β _O(fixed mirror group 106 and focusing lens group 105 combination multiplying powers) and relay lens 108 multiplying power β _RProduct, i.e. β=β _O* β _R

If seized surface is the plane, then the amount of deflection on plane is weighed with angle:

$\mathrm{\&alpha;}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f_O}^{\&prime;}\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f^{\&prime;}}_Z}---\left(2\right)$

Wherein: f _O' focal length value during for interior focusing object lens (fixed mirror group 106 with focusing lens group 105) outgoing directional light, " be constant, its value is 206265 to ρ, f ' _ZThe combined focal length value of object lens and relay lens 108, i.e. f ' during for internal focusing telescope outgoing directional light _Z=f _O' β _R

If the focal length of fixed mirror group is f ₁', the focal length of focusing lens group is f ₂', the distance between fixed mirror group and the focusing lens group is e, and is as shown in Figure 3.When the e value changes, field lens graticule picture to fixed mirror group apart from S and interior focusing object lens multiplying power β _OAlso change, as shown in Figure 3.S, β _OAnd the relation between the e is following:

$S=\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}\&CenterDot;(L-e)+{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;e\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-L+e)}{({{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}-e)\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-L+e)-{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}\&CenterDot;(L-e)}---\left(3\right)$

${\mathrm{\&beta;}}_O=\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}+e-L)-L\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e)-e^2}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}---\left(4\right)$

Wherein: L is the distance between field lens graticule and the fixed mirror group.

As shown in Figure 4, when internal focusing telescope 2 outgoing directional lights, between fixed mirror group and the focusing lens group apart from e ₀For:

$e_0=\frac{(L+{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;})-\sqrt{{(L+{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;})}^2-4\&times;[L({{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}-{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;})-{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}]}}{2}---\left(5\right)$

Interior focusing objective focal length f _O' be:

${f_O}^{\&prime;}=\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}+{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e_0}---\left(6\right)$

When the centre of sphere of seized optical surface and the picture of field lens graticule 104 have slight distance C, the distance between seized surface reflection picture that detects on the ccd detector and field lens graticule picture is C ', and is as shown in Figure 5.Then the deviation of the centre of sphere of seized optical surface and internal focusing telescope optical axis is calculated and can be got by formula (1) and (4):

$C=\frac{C^{\&prime;}}{2\mathrm{\&beta;}}=\frac{C^{\&prime;}}{2{\mathrm{\&beta;}}_O\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{1}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}+e-L)-L\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e)-e^2}---\left(7\right)$

When seized surface is the plane, then the plane is calculated and can be got by formula (2) and (5) with respect to the amount of deflection of internal focusing telescope optical axis:

$\mathrm{\&alpha;}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f_O}^{\&prime;}\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f^{\&prime;}}_Z}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}+{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e_0}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}---\left(8\right)$

Like this, through measure the distance C between the seized surface reflection picture and field lens graticule picture on the ccd detector ', can obtain the deviation of seized surface and internal focusing telescope optical axis through calculating; Through obtaining the positional information of focusing lens group, can calculate the distance of field lens graticule picture to the fixed mirror group.

Optical system centering locating device, as shown in Figure 1, its formation comprises internal focusing telescope 01, white light fibre optic interferometer 02, electronics part 03, computing machine 04, adjustment rack 05, guide rail 06, optical table 07 and seized optical system 08.

Wherein, White light fibre optic interferometer 02 is commercial product, has Optical fiber plug, can be connected to internal focusing telescope 01; Present embodiment adopts the LENSCAN-L1600 of Fogale company development; Its measuring accuracy is ± 0.15 micron, and measurement range is 600 millimeters optical lengths, operation wavelength 1310 nanometers.Computing machine 04, adjustment rack 05, guide rail 06 and optical table 07 are the universal product.

The NWJ-3 internal focusing telescope part light path that internal focusing telescope 01 employing Shanghai ray machine is developed; With ccd detector as receiver; Driven by motor focusing lens group through having scrambler moves, and is coupled into through the measuring beam of spectroscope with white light interferometer.The structure of specific embodiment is as shown in Figure 6, and its main composition comprises body 1, fixed mirror group 106, line slideway 2, screw mandrel 3; Focusing lens group 105, field lens graticule 104, reflecting prism 103, condenser 102; Light source 101, motor 4, photoelectric encoder 5, ccd detector 109; Relay lens group 108, spectroscope 107, fibre-coupled mirrors group 203, fiber bench 6.Wherein, fixed mirror group 106 is fixed on the body 1; Focusing lens group 105 is fixed on the slide block of line slideway 2, and the slide block of the slide block of line slideway 2 and screw mandrel 3 is fixed together through physical construction; The motor 4 that has photoelectric encoder 5 is through rotation, drives the slide block that screw mandrel 3 promotes on the line slideways 2 and moves, and moves along straight line thereby drive focusing lens group 105; Field lens graticule 104 is glued on the reflecting prism 103, is fixed on the body 1 through prism table; Light source 101 is through the convergence of condenser 102, the indirect illumination field lens graticule 104 of reflecting prism 103; Plating wavelength 400nm～700nm reflection on the spectroscope 107, the spectro-film of wavelength 1320nm transmission, this spectro-film is used to reflect the picture of field lens graticule 104, and the measuring beam of white light fibre optic interferometer is transmitted in the internal focusing telescope; Fibre-coupled mirrors group 203 is made up of two lens; Fiber bench 6 is used for the accurate fixedly Optical fiber plug of white light fibre optic interferometer; Relay lens group 108 is made up of a balsaming lens, is fixed on the body 1 through lens barrel; Ccd detector 109 is fixed on the lens barrel of relay lens group 108.

The main effect of electronics part 03:

1, control motor rotation drives screw mandrel and rotates, and drives the focusing lens group and moves along the guide rail straight line; Photoelectric encoder and motor link together, and can measure the anglec of rotation of motor, can obtain the positional information of focusing lens group through the anglec of rotation of measuring motor; When the field lens graticule is imaged onto the centre of sphere on seized surface, can measure the positional information of focusing lens group through photoelectric encoder, can calculate the distance of fixed mirror group according to formula (3) to the seized surperficial centre of sphere; In addition, according to seized Design for optical system data, through calculating, can the focusing lens group directly be moved to the centre of sphere on a certain seized surface, carry out the inclined to one side measurement in center.

2, reading the field lens graticule that ccd detector collects is reflected by spectroscope; Through relay lens group; The field lens graticule that is become is as a, and the field lens graticule is through focusing lens group, fixed mirror group, field lens graticule reflection image b (as shown in Figure 5 as a and picture b) that seized surface reflection became; Move through driving the focusing lens group, when field lens graticule reflection image b is clear, explain that the field lens graticule is imaged onto the centre of sphere on seized surface.

3, according to the field lens graticule as a and the position coordinates of field lens graticule reflection image b on ccd detector, can calculate distance C between the b of picture a and picture '; According to the positional information of focusing lens group, can obtain the focusing lens group to the position e of fixed mirror group, and according to the focal distance f of known fixed group ₁', the focal distance f of focusing group ₂', fixation group is to the distance L of field lens graticule, the multiplying power β of relay lens _R, calculate the centre deviation of seized surface and benchmark optical axis according to formula (7) or (8).

The composition structural drawing of kinetic control system is as shown in Figure 7 in the electronics part 03.In the present embodiment; Motion control card 301 is the Turbo PMAC2 type control card of DELTATAU company; Accessory card 302 is the Acc-8e of DELTATAU company; Servo-driver 303 is the ACJ-55-18 of Copley company, and servomotor 4 is the electrographite brush direct current generator 118730 of Maxon, and scrambler 304 is the 512 line scramblers 201937 of Maxon.Wherein, motion control card 301 is inserted in the PCI slot in the cabinet of computing machine 04, and both carry out high-speed data communications through pci bus.The interface J9 (JMACH1) of motion control card 301 is connected with the JMACH1 interface of accessory card 302 through flat cable.The interface TB5 of accessory card 302, J4 link to each other with servo-driver 303, and they are used for the order data that transmitting moving control card 301 sends to servo-driver 303.Servo-driver 303 is intercepted order data, in case obtain order data, it to direct current generator 4, moves thereby direct current generator 4 rotates and drive focusing lens group 105 through screw mandrel 3 the output motor drive signal along guide rail.Simultaneously, the positional information of focusing lens group 5 finally feeds back to motion control card 301 by scrambler 304 through the interface TB2 on the accessory card 302, J1.Motion control card 301 compares the positional information and the settings of feedback, ceases and desist order to servo-driver 303 transmissions if focusing lens group 105 arrives desired locations, otherwise continues monitoring.

In the present embodiment, it is 1/3 that ccd detector is selected optical dimensions for use ", pixel size is 4.65 μ m * 4.65 μ m, and resolution is 1024 * 768, and frame rate is 30fps, and interface is the industrial CCD detector of USB2.0.Computing machine 04 sends the IMAQ order or reads the view data that ccd detector is gathered to ccd detector through USB interface.

The measuring method of optical system centre deviation and center thickness and Center Gap comprises the following steps:

1. on the optical table (07) of described optical system centering locating device, fix optical axis that optical system to be installed (08) makes optical system to be installed (08) roughly with the optical axis basically identical of the internal focusing telescope of optical system centering locating device, start optical system centering locating device;

2. move the focusing lens group (105) in the internal focusing telescope through driven by servomotor; Make field lens graticule (104) be imaged onto the centre of sphere of the first surface of first lens through focusing lens group (105) and fixed mirror group (106); The reflected light of first surface is imaged on ccd detector (109) and obtains the image b of first surface clearly through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) convergence successively; Simultaneously, field lens graticule (104) through spectroscope (107), relay lens group assemble be imaged on ccd detector (109) center, visual field the field lens graticule as a, regulate described adjustment rack (05) first surperficial image b overlapped as a with described field lens graticule;

3. move the focusing lens group (105) in the internal focusing telescope through driven by servomotor; Make field lens graticule (104) be imaged onto the centre of sphere on second surface of first lens of seized optical system; The reflected light on this second surface is assembled through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) successively and is imaged on ccd detector (109) the acquisition image b on second surface clearly; Regulating adjustment rack (05) makes the image b on second surface overlap with the picture a of the field lens graticule that is positioned at center, ccd detector visual field;

4. repeating above-mentioned steps 3. 2. makes first surface and the field lens graticule reflection image b on second surface all overlap as a with the field lens graticule at center, ccd detector visual field with step; At this moment the optical axis coincidence of first of the optical axis of internal focusing telescope and seized optical system lens, and claim that this optical axis is the benchmark optical axis;

5. move the focusing lens group, make the field lens graticule be imaged onto the centre of sphere on the 3rd surface of seized optical system; Through the rotational angle θ of photoelectric encoder measurement servomotor, the helical pitch P of known guide calculates the distance between fixation group and the focusing group

(like Fig. 3, shown in Figure 4); Collect the image of field lens graticule through ccd detector, adopt centroid method to obtain the field lens graticule as the centre coordinate (X of a on ccd detector through Flame Image Process as a and field lens graticule reflection image b ₀, Y ₀) and the centre coordinate (X of field lens graticule reflection image b on ccd detector; Y); The pixel size PH of known ccd detector, utilize formula calculate by the field lens graticule reflection image b of the 3rd surface reflection and at the field lens graticule at center, ccd detector visual field as the distance C between a ':

$C^{\&prime;}=\sqrt{{(X-X_0)}^2+{(Y-Y_0)}^2}\&times;\mathrm{PH};$

The focal distance f of known fixed group ₁', the focal distance f of focusing group ₂', fixation group is to the distance L of field lens graticule, the multiplying power β of relay lens _R

Utilize formula to calculate the centre deviation of the 3rd optical surface and benchmark optical axis;

When the 3rd optical surface was sphere, its centre deviation was the distance of this optical surface centre of sphere to the benchmark optical axis,

$C=\frac{C^{\&prime;}}{2\mathrm{\&beta;}}=\frac{C^{\&prime;}}{2{\mathrm{\&beta;}}_O\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{1}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}+e-L)-L\&CenterDot;({{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e)-e^2}---\left(7\right)$

When the 3rd optical surface was the plane, its centre deviation was the angle of this normal to a surface and benchmark optical axis,

$\mathrm{\&alpha;}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f_O}^{\&prime;}\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f^{\&prime;}}_Z}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}+{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}-e_0}{{{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}^{\&prime;}\&CenterDot;{{\mathrm{<figure-callout\; id="2"\; label="f"\; filenames="HDA0000126647860000031.png"\; state="\{\{state\}\}">f</figure-callout>}}_2}^{\&prime;}}---\left(8\right)$

6. move the focusing lens group, make the field lens graticule be imaged onto the 4th surface, the 5th surface ..., the centre of sphere on last surface, meter is calculated the centre deviation of seized surface and benchmark optical axis respectively;

7. utilize the autoscan of white light fibre optic interferometer to can read the center thickness and the Center Gap of each lens.

The method of optical centering location comprises the following steps: in the optical system assembling

1. on the optical table (07) of described optical system centering locating device, fix first lens of optical system to be installed (08); The optical axis that makes optical system to be installed (08) roughly with the optical axis basically identical of the internal focusing telescope of optical system centering locating device, start optical system centering locating device;

2. move the focusing lens group (105) in the internal focusing telescope through driven by servomotor; Make field lens graticule (104) be imaged onto the centre of sphere of the first surface of first lens through focusing lens group (105) and fixed mirror group (106); The reflected light of first surface is imaged on ccd detector (109) and obtains the image b of first surface clearly through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) convergence successively; Simultaneously, field lens graticule (104) through spectroscope (107), relay lens group assemble be imaged on ccd detector (109) center, visual field the field lens graticule as a, regulate described adjustment rack (05) first surperficial image b overlapped as a with described field lens graticule;

3. move the focusing lens group (105) in the internal focusing telescope through driven by servomotor; Make field lens graticule (104) be imaged onto the centre of sphere on second surface of first lens of seized optical system; The reflected light on this second surface is assembled through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) successively and is imaged on ccd detector (109) the acquisition image b on second surface clearly; Regulating adjustment rack 05 makes the image b on second surface overlap with the picture a of the field lens graticule that is positioned at center, ccd detector visual field;

4. repeating above-mentioned steps 3. 2. makes first surface and the field lens graticule reflection image b on second surface all overlap as a with the field lens graticule at center, ccd detector visual field with step; At this moment the optical axis coincidence of first of the optical axis of internal focusing telescope and seized optical system lens, and claim that this optical axis is the benchmark optical axis;

5. according to the spacing of the design of second lens and first lens second lens is installed;

6. repeat above-mentioned steps 2. with step 3., adjust described second lens, the image b on two surfaces of second lens is all overlapped as a with the field lens graticule that is positioned at center, ccd detector visual field, accomplish the centering of second lens;

7. measure the Center Gap of first lens and second lens with the white light fibre optic interferometer; When the error of the Center Gap of measuring in the design tolerance scope, do not adjust, promptly get into step 8.; When the error of the Center Gap of measuring exceeds the design tolerance scope, return step 5.;

8. install and adjust the 3rd lens according to the spacing of the design of the 3rd lens and second lens, repeat above-mentioned steps 6. with step 7.;

9. and the like, the centering location of accomplishing optical system.

Claims (4)

1. optical system centering locating device; Be characterised in that its formation comprises internal focusing telescope (01), white light fibre optic interferometer (02), electronics part (03), computing machine (04), adjustment rack (05), guide rail (06) and optical table (07), the position of above-mentioned component concerns as follows:

Described white light fibre optic interferometer (02), electronics part (03), computing machine (04) and guide rail (06) place on the described optical table (07); Described internal focusing telescope (01) places on the described adjustment rack (05); Described adjustment rack (05) is a four-dimensional adjustment rack; Height, left and right displacement and the pitching, the orientation that are used to adjust described internal focusing telescope (01) tilt; Described adjustment rack (05) places on the described guide rail (06), and described adjustment rack (05) moves described guide rail (06), is used to regulate moving axially of described internal focusing telescope (01);

Described internal focusing telescope (01) is made up of light source (101), condenser group (102), prism (103), field lens graticule (104), focusing lens group (105), fixed mirror group (106), spectroscope (107), relay lens (108) and ccd detector (109), and described fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) and ccd detector (109) constitute the optical axis of internal focusing telescope (01);

The fibre-coupled mirrors group (203) of described white light fibre optic interferometer (02) and the spectroscope (107) of described internal focusing telescope (01), field lens graticule (104) common optical axis, this white light fibre optic interferometer (02) have measures the center thickness of each lens and the function of Center Gap to the optical system autoscan of common optical axis;

The light that described light source (101) sends; Convergence through condenser group (102); The reflection of prism (103); Illumination field lens graticule (104), the picture of field lens graticule (104) images in infinite distant place through focusing lens group (105) and fixed mirror group (106), when the centre of sphere on the seized surface of optical system to be measured (08) just in time is in the position of picture of field lens graticule (104); The reflected light on this seized surface passes through described fixed mirror group (106) again, focusing lens group (105) is imaged on the surface of field lens graticule (104); This picture passes through described spectroscope (107) reflection again, and relay lens (108) is assembled and is imaged on the test surface of described ccd detector (109), is called image; Described field lens graticule (104) is called field lens graticule picture through the center that described spectroscope (107) reflects, relay lens (108) is assembled the test surface that will be imaged on described ccd detector (109);

Described electronics part (03) is used for controlling moving of internal focusing telescope 01 focusing lens group and relay lens group; And record displacement information; Described computing machine (04) links to each other the collaborative work of control device and data processing with described electronics part (03) with described ccd detector (109).

2. optical system centering locating device according to claim 1 is characterized in that seized optical system (08) is the coaxial optical system of no central obscuration, and this seized optical system (08) places on the described optical table (07).

3. utilize the described optical system centering of claim 1 locating device to carry out the measuring method of optical system centre deviation and center thickness and Center Gap, it is characterized in that this method comprises the following steps:

1. on the optical table (07) of described optical system centering locating device, fix optical system to be measured (08); The optical axis that makes optical system to be measured (08) roughly with the optical axis basically identical of the internal focusing telescope of optical system centering locating device, start optical system centering locating device;

2. pass through driven by servomotor; Move the focusing lens group (105) in the internal focusing telescope; Make field lens graticule (104) be imaged onto the centre of sphere of first surface of first lens of optical system to be measured (08) through focusing lens group (105) and fixed mirror group (106); The reflected light of first surface is imaged on ccd detector (109) and obtains the image b of first surface clearly through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) convergence successively; Simultaneously; Field lens graticule (104) is assembled to be imaged in ccd detector (109) visual field through spectroscope (107), relay lens group and is formed centrally the field lens graticule as a, regulates described adjustment rack (05) first surperficial image b is overlapped as a with described field lens graticule;

3. pass through driven by servomotor; Move the focusing lens group (105) in the internal focusing telescope; Make field lens graticule (104) be imaged onto the centre of sphere on second surface of first lens of seized optical system; The reflected light on this second surface is assembled through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) successively and is imaged on ccd detector (109) the acquisition image b on second surface clearly; Regulating adjustment rack (05) makes the image b on second surface of optical system to be measured (08) overlap with the picture a of the field lens graticule that is positioned at center, ccd detector visual field;

4. repeating image b that 3. 2. above-mentioned steps make first surperficial image b of optical system to be measured (08) and second surface with step all overlaps as a with the field lens graticule at center, ccd detector visual field; At this moment the optical axis coincidence of first of the optical axis of described internal focusing telescope and seized optical system lens, and claim that this optical axis is the benchmark optical axis;

5. through driven by servomotor, move the focusing lens group, make the field lens graticule be imaged onto the centre of sphere on the 3rd surface of optical system to be measured (08); Through the rotational angle θ of photoelectric encoder measurement servomotor, the helical pitch P of known guide calculates the distance between fixation group and the focusing group

Collect the image of field lens graticule through ccd detector, adopt centroid method to obtain the field lens graticule as the centre coordinate (X of a on ccd detector through Flame Image Process as a and image b ₀, Y ₀) and the centre coordinate (X of image b on ccd detector; Y); The pixel size PH of known ccd detector, utilize formula calculate by the image b of the 3rd surface reflection of optical system to be measured (08) and the field lens graticule at center, ccd detector visual field as the distance C between a ':

$C^{\&prime;}=\sqrt{{(X-X_0)}^2+{(Y-Y_0)}^2}\&times;\mathrm{PH};$

Wherein: the focal distance f of fixation group ₁', the focal distance f of focusing group ₂', fixation group is to the distance L of field lens graticule, the multiplying power β of relay lens _RFor known;

Utilize formula to calculate the 3rd optical surface of optical system to be measured (08) and the centre deviation of benchmark optical axis;

When the 3rd optical surface was sphere, its centre deviation was the distance of this optical surface centre of sphere to the benchmark optical axis,

$C=\frac{C^{\&prime;}}{2\mathrm{\&beta;}}=\frac{C^{\&prime;}}{2{\mathrm{\&beta;}}_O\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{1}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{f_1}^{\&prime;}\&CenterDot;{f_2}^{\&prime;}}{{f_1}^{\&prime;}\&CenterDot;({f_2}^{\&prime;}+e-L)-L\&CenterDot;({f_2}^{\&prime;}-e)-e^2}---\left(7\right)$

When the 3rd optical surface was the plane, its centre deviation was the angle of this normal to a surface and benchmark optical axis,

$\mathrm{\&alpha;}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f_O}^{\&prime;}\&CenterDot;{\mathrm{\&beta;}}_R}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{f^{\&prime;}}_Z}=\frac{C^{\&prime;}\&CenterDot;{\mathrm{\&rho;}}^{\&prime;\&prime;}}{2{\mathrm{\&beta;}}_R}\&CenterDot;\frac{{f_1}^{\&prime;}+{f_2}^{\&prime;}-e_0}{{f_1}^{\&prime;}\&CenterDot;{f_2}^{\&prime;}}---\left(8\right)$

6. 5. repeating step moves the focusing lens group, makes the field lens graticule be imaged onto the 4th surface of optical system to be measured (08), the 5th surface ..., the centre of sphere on last surface, meter is calculated the centre deviation of seized surface and benchmark optical axis respectively;

7. utilize the center thickness and the Center Gap of each lens of autoscan measurement of white light fibre optic interferometer.

4. utilize the described optical system centering of claim 1 locating device when optical system is assembled, optical system to be installed to be carried out the method that optical centering is located, comprise the following steps:

1. on the optical table (07) of described optical system centering locating device, fix first lens of optical system to be installed (08); The optical axis that makes optical system to be installed (08) roughly with the optical axis basically identical of the internal focusing telescope of optical system centering locating device, start optical system centering locating device;

2. pass through driven by servomotor; Move the focusing lens group (105) in the internal focusing telescope; Make field lens graticule (104) be imaged onto the centre of sphere of the first surface of first lens through focusing lens group (105) and fixed mirror group (106); The reflected light of first surface is imaged on ccd detector (109) and obtains the image b of first surface clearly through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) convergence successively; Simultaneously, field lens graticule (104) through spectroscope (107), relay lens group assemble be imaged on ccd detector (109) center, visual field the field lens graticule as a, regulate described adjustment rack (05) first surperficial image b overlapped as a with described field lens graticule;

3. pass through driven by servomotor; Move focusing lens group (105); Make field lens graticule (104) be imaged onto the centre of sphere on second surface of first lens of seized optical system; The reflected light on this second surface is assembled through fixed mirror group (106), focusing lens group (105), field lens graticule (104), spectroscope (107), relay lens (108) successively and is imaged on ccd detector (109) the acquisition image b on second surface clearly; Regulating adjustment rack 05 makes the image b on second surface overlap with the picture a of the field lens graticule that is positioned at center, ccd detector visual field;

4. repeating image b that 3. 2. above-mentioned steps make first surperficial image b and second surface with step all overlaps as a with the field lens graticule at center, ccd detector visual field; At this moment the optical axis coincidence of first of the optical axis of internal focusing telescope and seized optical system lens, and claim that this optical axis is the benchmark optical axis;

5. according to the spacing of the design of second lens and first lens second lens is installed;

6. repeat above-mentioned steps 2. with step 3., adjust described second lens, the image b on two surfaces of second lens is all overlapped as a with the field lens graticule that is positioned at center, ccd detector visual field, accomplish the centering of second lens;

7. measure the Center Gap of first lens and second lens with the white light fibre optic interferometer; When the error of the Center Gap of measuring in the design tolerance scope, do not adjust, promptly get into step 8.; When the error of the Center Gap of measuring exceeds the design tolerance scope, return step 5.;

8. install and adjust the 3rd lens according to the spacing of the design of the 3rd lens and second lens, repeat above-mentioned steps 6. with step 7.;

9. and the like, the centering location of accomplishing optical system.

Images