CN110764271B - Method for adjusting position precision among lenses in conjugate optical system - Google Patents

Method for adjusting position precision among lenses in conjugate optical system Download PDF

Info

Publication number
CN110764271B
CN110764271B CN201910985171.7A CN201910985171A CN110764271B CN 110764271 B CN110764271 B CN 110764271B CN 201910985171 A CN201910985171 A CN 201910985171A CN 110764271 B CN110764271 B CN 110764271B
Authority
CN
China
Prior art keywords
optical axis
lenses
lens
spherical center
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910985171.7A
Other languages
Chinese (zh)
Other versions
CN110764271A (en
Inventor
张华锋
李岳峰
李泽
高鹏涛
王鹏
谭杭杭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Luoyang Institute of Electro Optical Equipment AVIC
Original Assignee
Luoyang Institute of Electro Optical Equipment AVIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luoyang Institute of Electro Optical Equipment AVIC filed Critical Luoyang Institute of Electro Optical Equipment AVIC
Priority to CN201910985171.7A priority Critical patent/CN110764271B/en
Publication of CN110764271A publication Critical patent/CN110764271A/en
Application granted granted Critical
Publication of CN110764271B publication Critical patent/CN110764271B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

Abstract

The invention provides a method for adjusting the position precision among lenses in a conjugate optical system, which uses an air-float turntable [1], an internal focusing telescope [2] and an adjustable reflector [3] to form a test system, wherein the internal focusing telescope [2] is fixed on the table top of the air-float turntable [1], the optical axis position of a reference lens [4] is determined by an air-float rotating shaft, and then the optical axis position of other lenses [5] is adjusted by taking the optical axis position of the reference lens [4] as a reference. The method solves the problem of the consistency precision adjustment of the optical axes of all lenses in the long-focus large-caliber conjugate optical system, and simultaneously solves the problem of the influence on the imaging precision of the optical system due to the position precision change of the lenses.

Description

Method for adjusting position precision among lenses in conjugate optical system
Technical Field
The invention belongs to the field of optical adjustment test, and particularly relates to an adjustment method for position precision among lenses in a conjugate optical system.
Background
The large position precision of each lens in the conjugate optical system is adjusted by using a method of simulating the center of each lens by the center of a reticle by taking a focusing optical axis of an inner focusing light tube as a tandem axis reference. However, the adjusting method has a large adjusting error; the focusing straightness error of the internal focusing light tube and the error between the center of the reticle and the actual optical axis of the lens are both brought into the assembly of the optical system, so that the assembly and adjustment precision of the optical system cannot meet the technical requirements. Therefore, the method researches the position accuracy adjustment of the optical system lens by taking the high-accuracy air-floating rotating shaft as an adjusting reference and the rotary inner focusing telescope as a test method, and well solves the outstanding contradictions of low accuracy of the adjusting reference, large error with the actual position accuracy and the like; at present, no similar adjusting method is found in China.
Disclosure of Invention
The invention aims to solve the problem of consistency precision adjustment of optical axes of all lenses in a long-focus large-caliber conjugate optical system and simultaneously solve the problem of influence on imaging precision of the optical system due to the change of the position precision of the lenses.
In order to achieve the purpose, the invention provides a method for adjusting the position precision among lenses in a conjugate optical system, which comprises the steps of forming a test system by using an air floatation rotary table 1, an inner focusing telescope 2 and an adjustable reflecting mirror 3, wherein the inner focusing telescope 2 is fixed on the table top of the air floatation rotary table 1, the optical axis position of a reference lens 4 is determined by using an air floatation rotating shaft, and then the optical axis position of other lenses 5 is adjusted by taking the optical axis position of the reference lens 4 as a reference.
Preferably, the method for adjusting the positional accuracy between lenses in the conjugate optical system specifically includes the following steps:
step 1, taking a rotating shaft of an air-flotation turntable 1 as an adjustment reference, rotating an internal focusing telescope 2, and detecting the position degree of an optical axis of a reference lens 4 relative to the air-flotation rotating shaft;
step 2, adjusting the position of the optical axis of the reference lens 4 relative to the air floatation rotating shaft to enable the optical axis of the reference lens 4 to be coaxial with the air floatation rotating shaft, and determining a reference optical axis;
step 3, adjusting the working distance of the inner focusing telescope 2, and detecting the position degree of the optical axis of other lenses 5 relative to the reference optical axis;
and 4, adjusting the position precision of other lenses 5 to enable the optical axes of the other lenses to be coaxial with the reference optical axis, so that the position precision among the lenses in the conjugate optical system is realized.
Preferably, in the method for adjusting the position accuracy between lenses in the conjugate optical system, when the lens to be measured is transparent to visible light, the step 1 includes:
respectively observing the spherical center images of two surfaces of the reference lens 4 through the internal focusing telescope 2; and (3) rotating the air floatation rotary table 1, shaking the spherical center images of the two surfaces of the reference lens 4 relative to an air floatation rotating shaft to draw a circle, respectively carrying out data processing on the circle drawing tracks of the two spherical center images by using image processing software, and calculating respective circle drawing shaking amounts r 6.
Preferably, in the method for adjusting the position accuracy between lenses in the conjugate optical system, when the lens to be measured is opaque to visible light, the step 1 includes:
respectively observing a spherical center image of the first surface of the reference lens 4 and a vertical plane image of an optical axis through the internal focusing telescope 2; the air-float turntable 1 is rotated, the first surface spherical center image of the reference lens 4 and the vertical surface image of the optical axis swing and draw circles relative to the air-float rotating shaft, data processing is respectively carried out on the circle drawing tracks of the spherical center image and the vertical surface image by using image processing software, and respective circle drawing swinging amount r6 is calculated.
Preferably, in the tuning method for adjusting the position accuracy between lenses in the conjugate optical system, the step 2 includes: the azimuth, the pitching two angles and the height position of the adjustable reflector 3 are adjusted, and the unfolding position of the optical axis of the reference lens 4 is adjusted, so that the optical axis of the reference lens 4 is coaxial with the air floatation rotating shaft.
Preferably, in the tuning method for adjusting the position accuracy between lenses in the conjugate optical system, the step 2 includes: and adjusting the position precision of the reference lens 4, wherein the position precision comprises an angle deviation position, an optical axis spreading position and an optical axis vertical position, so that the optical axis of the reference lens 4 is coaxial with the air floatation rotating shaft.
Preferably, in the method for adjusting the positional accuracy between lenses in the conjugate optical system, when the lens to be measured is transparent to visible light, the step 3 includes:
the spherical center images of the two surfaces of the other lens 5 are respectively observed through the inner focusing telescope 2; when the air flotation turntable 1 is rotated, the spherical center images of the two surfaces of the other lens 5 swing relative to the reference optical axis to draw circles, the circle drawing tracks of the two spherical center images are respectively subjected to data processing, and respective circle drawing swinging amounts r6 are calculated.
Preferably, in the method for adjusting the position accuracy between lenses in the conjugate optical system, when the lens to be measured is opaque to visible light, the step 3 includes:
respectively observing the spherical center image of the first surface of the other lens 5 and the vertical surface image of the optical axis through the inner focusing telescope 2; when the air floatation rotary table 1 is rotated, the first surface spherical center image and the vertical surface image of the optical axis of other lenses 5 swing and draw circles relative to the air floatation rotary shaft, data processing is respectively carried out on the circle drawing tracks of the spherical center image and the vertical surface image by using image processing software, and respective circle drawing swinging amount r6 is calculated.
Preferably, in the tuning method for adjusting the position accuracy between lenses in the conjugate optical system, the step 4 includes: and adjusting the position precision of other lenses 5, wherein the position precision comprises angle deviation, optical axis spreading position and optical axis vertical position, so that the optical axes of other lenses 5 are coaxial with the reference optical axis.
The invention has the beneficial effects that:
1) the high-precision air-floating rotating shaft is used for replacing a focusing shaft of an internal focusing telescope, so that the adjustment precision of the optical axis of the lens can reach the micron level;
2) the spherical center image on the surface of the actual lens is directly used for assembly and adjustment, the cross-shaped fiber differentiation plate is replaced to simulate the optical axis of the lens, and the assembly and adjustment are more real and reliable;
3) the method for adjusting the rotary internal focusing telescope of the air-flotation turntable overcomes the problems of large volume and weight of a long-focus large-aperture optical system product and insufficient precision of the air-flotation turntable due to large load, realizes integration of installation, adjustment and test, and has universality.
Drawings
FIG. 1 is a schematic diagram of the application of the method of the present invention.
Detailed Description
In the first embodiment, the lens to be detected is transparent to visible light, the reference lens is adjusted by adjusting the reflecting mirror, and the other lenses are adjusted by adjusting the lenses.
The specific test method and process are as follows:
1) firstly, fixing an inner focusing telescope 2 on the table top of an air-floating rotary table 1;
2) rotating the air-float turntable 1, adjusting the position accuracy of the focusing telescope 2 in the CCD and the air-float rotating shaft within 0.3mm, and adjusting the angle error within 5';
3) adjusting the working distance of a focusing telescope 2 in the CCD according to the curvature radius data of the first surface of the reference lens 4, and observing a spherical center image of the first surface;
4) rotating the air floatation rotary table 1, and detecting a circle drawing track of a spherical center image on the first surface of the reference lens 4; performing data processing on the spherical center image rounding track through image processing software, and calculating the rounding shaking amount r of the first surface spherical center image of the reference lens 4;
5) according to the data of the circle-drawing shaking amount, the height position of the adjustable reflector 3 and the unfolding position of the reference lens 4 on the air-floating rotating shaft are adjusted, so that the first surface spherical center image is superposed with the circle-drawing center, namely the circle-drawing amount is minimum; the center of the sphere of the first surface of the reference lens 4 is on the air bearing axis;
6) adjusting the working distance of the focusing telescope 2 in the CCD again, and observing a spherical center image of a second surface of the reference lens 4 through the first surface of the reference lens 4; then the air-float turntable 1 is rotated, and the CCD inner focusing telescope 2 is used for detecting the circle drawing amount of the spherical center image on the second surface; performing data processing on the spherical center image circle drawing track of the second surface through image processing software to calculate a circle drawing shaking amount r;
7) calculating the angle deviation between the optical axis of the reference lens 4 and the air floatation rotating shaft according to the circle drawing amount of the spherical center image on the second surface of the reference lens 4; according to the deviation value, the position and the pitching angle of the adjustable reflector 3 are adjusted, and meanwhile, the height position of the reflector and the position of the reference lens 4 in the unfolding direction of the air floatation rotating shaft are also adjusted; the circle drawing amount of the spherical center images on the two surfaces of the reference lens 4 is adjusted to be minimum, namely the optical axis of the reference lens 4 is coaxial with the axis of the air floatation rotary table 1, and the coaxial precision is the circle drawing amount of the spherical center.
8) Fixing the adjustable mirror 3 and the optical product; the reference lens 4 is disassembled, the working distance of the focusing telescope 2 in the CCD is adjusted according to the curvature radius data of the first surface of the other lens 5, and the spherical center image of the first surface of the other lens 5 is observed;
9) rotating the air floatation rotary table 1 to detect the circle drawing track of the spherical center image of the first surface of the other lens 5; processing the track data through image processing software, and calculating the circle-drawing shaking amount r of the first surface spherical center image of other lenses 5; according to the magnification of the object image of the inner focusing telescope 2, the shaking amount of the center of the sphere on the first surface of the lens relative to the air floatation rotating shaft or the reference optical axis can be calculated;
10) the working distance of the focusing telescope 2 in the CCD is adjusted again, and the spherical center image of the first surface of the other lens 5 is penetrated; detecting the circle drawing locus of the spherical center image of the second surface of the other lens 5; processing the track data through image processing software, and calculating the circle-drawing shaking amount r of the second surface spherical center image of other lenses 5; according to the magnification of the object image of the inner focusing telescope 2, the magnification of the first surface of other lenses 5 and the removal of the shaking error of the first surface, the shaking amount of the spherical center of the second surface of other lenses 5 relative to the air floatation rotating shaft or the reference optical axis can be calculated;
11) according to the circle drawing amount of the spherical center images on the two surfaces of the other lens 5, the circle drawing amount of the two spherical centers is calculated through image processing software; i.e. the accuracy of the position of the optical axis of the other lens 5 relative to the reference lens 4;
12) similarly, according to the circle drawing amount of the spherical center images of the other lenses 5, the directions and the pitching two-dimensional angular deviations of the other lenses 5 in the direction perpendicular to the reference optical axis and the two-dimensional translation of the optical axis spreading direction and the optical axis vertical position are adjusted, so that the optical axes of the other lenses 5 are coaxial with the reference optical axis, and the position accuracy of each lens of the optical system is realized.
In the second embodiment, the lens to be detected is opaque to visible light, the reference lens is adjusted by adjusting the reflecting mirror, and the other lenses are adjusted by adjusting the lenses.
The specific test method and process are as follows:
1) firstly, fixing an inner focusing telescope 2 on the table top of an air-floating rotary table 1;
2) rotating the air-float turntable 1, adjusting the position accuracy of the focusing telescope 2 in the CCD and the air-float rotating shaft within 0.3mm, and adjusting the angle error within 5';
3) detecting the optical axis of the lens part and the end face of the lens part by using centering equipment, wherein the vertical precision between the optical axis of the lens part and the end face of the lens part is within 10'; if not, the end face of the lens part is repaired and ground.
4) Firstly, clinging a flat crystal to the installation surface of a reference lens 4 in an optical product, adjusting the working distance of a focusing telescope 2 in a CCD to be infinity, and observing a reflection image of the flat crystal surface;
5) rotating the air floatation rotary table 1 to detect a circle drawing track of a reflection image on the installation surface of the reference lens 4; performing data processing on the reflection image rounding track through image processing software, and calculating the rounding shaking amount r of the reflection image on the mounting surface of the reference lens 4;
6) according to the data of the circle-drawing shaking amount, the direction and the pitching two-dimensional angle of the adjustable reflector 3 are adjusted, so that the reflection image of the mounting surface is superposed with the center of the circle-drawing, namely the circle-drawing amount is minimum; at this time, the normal line of the mounting surface of the reference lens 4 is parallel to the air floatation axis;
7) disassembling the flat crystal and installing the reference lens 4 in the optical product;
8) adjusting the working distance of the focusing telescope 2 in the CCD again, and observing the spherical center image of the first surface of the reference lens 4; then the air-float turntable 1 is rotated, and the CCD inner focusing telescope 2 is used for detecting the circle drawing amount of the spherical center image of the first surface; performing data processing on the spherical center image circle drawing track of the first surface through image processing software to calculate a circle drawing shaking amount r;
9) calculating the displacement deviation between the optical axis of the reference lens 4 and the air floatation rotating shaft according to the circle drawing amount of the spherical center image on the first surface of the reference lens 4; according to the deviation value, adjusting the height position of the reflector of the adjustable reflector 3 and the position of the reference lens 4 in the unfolding direction of the air floatation rotating shaft; meanwhile, the direction and the pitching angle of the adjustable reflector 3 are adjusted, so that the spherical center image of the first surface of the reference lens 4 and the circle drawing amount of the mounting surface are adjusted to be minimum, namely the optical axis of the reference lens 4 is coaxial with the axis of the air floatation rotary table 1, and the coaxial precision is the circle drawing amount of the spherical center and the mounting surface.
10) Fixing the adjustable mirror 3 and the optical product; disassembling the reference lens 4, utilizing the flat crystal to cling to the installation surface of other lenses 5 in the optical product, adjusting the working distance of the focusing telescope 2 in the CCD to infinity, and observing the reflection image of the flat crystal surface;
11) rotating the air floatation rotary table 1 to detect the circle drawing track of the reflection image of the installation surface of other lenses 5; performing data processing on the reflected image rounding track through image processing software, and calculating the rounding shaking amount r of the reflected images on the installation surfaces of other lenses 5;
12) adjusting or repairing the orientation and pitching two-dimensional angle deviation of the mounting surface of other lenses 5 on the optical product according to the data of the circle-drawing shaking amount, so that the reflected image of the mounting surface is superposed with the center of the circle-drawing, namely the circle-drawing amount is minimum; at the moment, the normal lines of the installation surfaces of other lenses 5 on the optical product are parallel to the air floatation axis, and the parallel error is the diameter of the circle drawing amount;
13) disassembling the flat crystal and mounting other lenses 5 on the surface;
14) adjusting the working distance of the focusing telescope 2 in the CCD again, and observing the spherical center image of the first surface of the other lens 5; then the air-float turntable 1 is rotated, and the CCD inner focusing telescope 2 is used for detecting the circle drawing amount of the spherical center image of the first surface; performing data processing on the spherical center image circle drawing track of the first surface through image processing software to calculate a circle drawing shaking amount r; according to the magnification of the object image of the inner focusing telescope 2, the shaking amount of the spherical center of the first surface of the other lens 5 relative to the air floatation rotating shaft or the reference optical axis can be calculated;
15) translating other lenses 5 on the mounting surfaces in two directions to enable the spherical center images of the other lenses to coincide with the center of the drawn circle, namely the optical axes of the other lenses 5 are coaxial with the optical axis of the reference lens, and the coaxial precision is the composite circle drawing amount of the normal of the mounting surfaces and the spherical center of the first surface of the other lenses 5 relative to the optical axis of the reference lens;
16) similarly, according to the circle drawing amount of the spherical center image of the first surface of the other lens 5 and the circle drawing amount of the normal line of the installation surface, the azimuth and the pitching two-dimensional angular deviation of the other lens 5 in the vertical plane direction of the reference optical axis and the two-dimensional translation of the optical axis expansion direction and the optical axis vertical position are adjusted or repaired, so that the optical axes of the other lens 5 are coaxial with the reference optical axis, and the position precision of each lens of the optical system is realized.

Claims (1)

1. A method for adjusting position precision among lenses in a conjugate optical system is characterized in that an air floatation rotary table (1), an inner focusing telescope (2) and an adjustable reflector (3) are used for forming a test system, the inner focusing telescope (2) is fixed on the table top of the air floatation rotary table (1), the optical axis position of a reference lens (4) is determined by an air floatation rotary shaft, and then the optical axis position of the reference lens (4) is used as a reference to adjust the optical axis positions of other lenses (5);
the method specifically comprises the following steps:
step 1, taking a rotating shaft of an air-floating turntable (1) as an adjustment reference, rotating an internal focusing telescope (2), and detecting the position degree of an optical axis of a reference lens (4) relative to the air-floating rotating shaft;
step 2, adjusting the position of the optical axis of the reference lens (4) relative to the air floatation rotating shaft to enable the optical axis of the reference lens (4) to be coaxial with the air floatation rotating shaft, and determining the reference optical axis;
step 3, adjusting the working distance of the inner focusing telescope (2) and detecting the position degree of the optical axis of other lenses (5) relative to the reference optical axis;
step 4, adjusting the position precision of other lenses (5) to enable the optical axes of the lenses to be coaxial with the reference optical axis, so as to realize the position precision among the lenses in the conjugate optical system;
when the lens to be detected is transparent to visible light, the step 1 comprises:
the spherical center images of two surfaces of the reference lens (4) are respectively observed through the inner focusing telescope (2); rotating the air floatation rotary table (1), shaking and scribing two face spherical center images of the reference lens (4) relative to an air floatation rotating shaft, respectively carrying out data processing on the circle scribing tracks of the two spherical center images by using image processing software, and calculating respective circle scribing shaking amounts r (6);
when the lens to be detected is opaque to visible light, the step 1 comprises:
respectively observing a spherical center image and a vertical plane image of an optical axis of the first surface of the reference lens (4) through the internal focusing telescope (2); rotating the air floatation rotary table (1), shaking and drawing circles relative to an air floatation rotating shaft by a first surface spherical center image and a vertical surface image of an optical axis of the reference lens (4), respectively carrying out data processing on circle drawing tracks of the spherical center image and the vertical surface image by using image processing software, and calculating respective circle drawing shaking amounts r (6);
the step 2 comprises the following steps: adjusting the position, two pitching angles and the height position of the adjustable reflector (3), and adjusting the unfolding position of the optical axis of the reference lens (4) to enable the optical axis of the reference lens (4) to be coaxial with the air floatation rotating shaft; adjusting the position precision of the reference lens (4), wherein the position precision comprises angle deviation, optical axis spreading position and optical axis vertical position, so that the optical axis of the reference lens (4) is coaxial with the air floatation rotating shaft;
when the lens to be detected is transparent to visible light, the step 3 comprises:
spherical center images of two surfaces of other lenses (5) are respectively observed through the inner focusing telescope (2); rotating the air flotation turntable (1), shaking the spherical center images of the two surfaces of other lenses (5) relative to a reference optical axis to draw circles, respectively carrying out data processing on the circle drawing tracks of the two spherical center images, and calculating respective circle drawing shaking amounts r (6);
when the lens to be detected is opaque to visible light, the step 3 includes:
respectively observing the spherical center image and the vertical plane image of the optical axis of the first surface of the other lens (5) through the inner focusing telescope (2); rotating the air floatation rotary table (1), shaking and scribing the first surface spherical center image and the vertical surface image of the optical axis of other lenses (5) relative to the air floatation rotary shaft, respectively carrying out data processing on the circle scribing tracks of the spherical center image and the vertical surface image by using image processing software, and calculating respective circle scribing shaking amounts r (6);
the step 4 comprises the following steps: and adjusting the position precision of other lenses (5), wherein the position precision comprises angle deviation, optical axis spreading position and optical axis vertical position, so that the optical axes of other lenses (5) are coaxial with the reference optical axis.
CN201910985171.7A 2019-10-16 2019-10-16 Method for adjusting position precision among lenses in conjugate optical system Active CN110764271B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910985171.7A CN110764271B (en) 2019-10-16 2019-10-16 Method for adjusting position precision among lenses in conjugate optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910985171.7A CN110764271B (en) 2019-10-16 2019-10-16 Method for adjusting position precision among lenses in conjugate optical system

Publications (2)

Publication Number Publication Date
CN110764271A CN110764271A (en) 2020-02-07
CN110764271B true CN110764271B (en) 2022-08-12

Family

ID=69332242

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910985171.7A Active CN110764271B (en) 2019-10-16 2019-10-16 Method for adjusting position precision among lenses in conjugate optical system

Country Status (1)

Country Link
CN (1) CN110764271B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114296251A (en) * 2021-11-11 2022-04-08 中航洛阳光电技术有限公司 Method for adjusting consistency of optical axes of multi-light-path lens

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1629673A (en) * 2003-12-16 2005-06-22 中国科学院光电技术研究所 Through-axis center alignment method for novel optical system
CN101387761A (en) * 2008-10-08 2009-03-18 上海微电子装备有限公司 Center aligning assembling and regulating apparatus and method for optical system
CN102538689A (en) * 2011-12-29 2012-07-04 中国科学院上海光学精密机械研究所 Centering and locating device of optical system and using method thereof
WO2012169935A2 (en) * 2011-06-06 2012-12-13 Open Joint Stock Company "Scientific And Production Association" State Institute Of Applied Optics" (Ojsc "Npo "Gipo") Device for aligning a two-mirror centered optical system
CN103226240A (en) * 2013-04-17 2013-07-31 同济大学 Multi-channel normal incidence imaging system and installation and adjustment method thereof
CN207529045U (en) * 2017-12-15 2018-06-22 湖北工业大学 A kind of coaxial detection adjusting apparatus of lens group

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1629673A (en) * 2003-12-16 2005-06-22 中国科学院光电技术研究所 Through-axis center alignment method for novel optical system
CN101387761A (en) * 2008-10-08 2009-03-18 上海微电子装备有限公司 Center aligning assembling and regulating apparatus and method for optical system
WO2012169935A2 (en) * 2011-06-06 2012-12-13 Open Joint Stock Company "Scientific And Production Association" State Institute Of Applied Optics" (Ojsc "Npo "Gipo") Device for aligning a two-mirror centered optical system
CN102538689A (en) * 2011-12-29 2012-07-04 中国科学院上海光学精密机械研究所 Centering and locating device of optical system and using method thereof
CN103226240A (en) * 2013-04-17 2013-07-31 同济大学 Multi-channel normal incidence imaging system and installation and adjustment method thereof
CN207529045U (en) * 2017-12-15 2018-06-22 湖北工业大学 A kind of coaxial detection adjusting apparatus of lens group

Also Published As

Publication number Publication date
CN110764271A (en) 2020-02-07

Similar Documents

Publication Publication Date Title
CN102937738B (en) System and method for achieving accurate positioning of off-axis aspheric surface reflector
WO2017107777A1 (en) Method for measuring surface shape error of rotary symmetrical unknown aspheric surface, and measurement device thereof
CN106873122B (en) A kind of device and method for large-diameter non-spherical reflecting mirror centering adjustment
CN101858735B (en) Large-caliber off-axis non-spherical measuring and calibration system
CN101650157B (en) Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror
CN209406712U (en) A kind of five axis dispenser systems
CN107132636A (en) A kind of aspherical primary mirror reflecting surface debugs benchmark calibration method and its system
CN101949691A (en) Method for detecting nonzero digit compensation light-degree optical aspheric surface profile
CN103278109A (en) Angle measurement precision detecting device of aspect angle monitor for satellite
CN112198624B (en) Method and system for assembling and adjusting optical despun K-mirror assembly
CN110531531B (en) Method for assembling and adjusting primary and secondary reflectors of Cassegrain optical system
CN112504177B (en) Multifunctional vertical zero-position overlapping scanning interference measuring device
CN101813454A (en) New method for correcting of aspherical biased errors and aspherical stitching measure by sub-aperture stitching interferometry
CN111338390A (en) Cemented lens centering control method and system and full-automatic cementing equipment
CN113175893A (en) Optical free-form surface full-aperture detection method based on multi-error real-time compensation
CN110764271B (en) Method for adjusting position precision among lenses in conjugate optical system
CN110989188B (en) K mirror optical system adjusting method
CN113203553B (en) Lens center error measuring system and measuring method
CN202916479U (en) System for realizing accurate positioning of optical axis of off-axis non-spherical reflector
CN106979857B (en) Vertical spherical interference splicing measuring device and its method of adjustment
CN110987371B (en) Centering system and method for large-caliber concave aspheric surface
CN105627945A (en) Device and method of measuring deviation between center of aspheric element and center of outer circle
CN209674117U (en) A kind of optical mirror slip assembly device
CN114755818B (en) Device and method for adjusting large-aperture telescope garage light path
CN114234887A (en) Free-form surface lens curvature measuring device and application thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant