CN103226240A - Multi-channel normal incidence imaging system and installation and adjustment method thereof - Google Patents
Multi-channel normal incidence imaging system and installation and adjustment method thereof Download PDFInfo
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Abstract
The invention relates to a multi-channel normal incidence imaging system and an installation and adjustment method thereof. The multi-channel normal incidence imaging system comprises a secondary mirror and a plurality of primary mirrors, wherein the primary mirrors are arranged on the same circumference; the secondary mirror is positioned in an axis of the circumference; each primary mirror and the secondary mirror form a channel; each channel allows the same object to form an image; and the imaging system allows the same object to form the images with the same quantity as the primary mirrors. The installation and adjustment method of the system comprises the following steps that the secondary mirror is adjusted by an auto-collimation centering method; a curvature center of the secondary mirror is adjusted to be positioned in the axis of the circumference where the primary mirrors are located; inclination angles of the primary mirrors are adjusted by detecting mutual positions of the images; and axial distances between the primary mirrors and the secondary mirror are adjusted to be equal by a laser interferometer combined with a grating ruler. Compared with the prior art, the installation and adjustment method is high in accuracy, easy in installation and adjustment operation, and wide in application prospect.
Description
Technical field
The present invention relates to the extreme ultraviolet field, especially relate to a kind of hyperchannel normal incidence imaging system and debug method.
Background technology
Multichannel normal incidence extreme ultraviolet system can become multiple image to an object, adopts framing camera as detector, can realize two-dimensional space and time resolution imaging simultaneously; On the optical element of each passage, be coated with the multilayer film of different materials and parameter, can also make each passage be operated in different putting or wavelength, and can control reflectivity and the bandwidth of optical element by the parameter of revising film to special wavelength light.This imaging system is fit to be applied in the plasma diagnostics field, for example strong laser device and Z-pinch device etc.The above characteristic of system can obtain plasma at the specific two-dimensional space distributed image that can put, and can reflect plasma evolutionary process in time, is a kind of effective diagnosis equipment.
At this imaging system, debuging of object lens is the key of equipment successful Application.Because the complicacy and the accuracy of multichannel normal incidence imaging system, the detection method for single channel normal incidence imaging system is not suitable for hyperchannel normal incidence imaging system at present.
Summary of the invention
Purpose of the present invention is exactly for a kind of hyperchannel normal incidence imaging system being provided and debuging method.The multi channel imaging system can realize two-dimensional space and time resolution, and has higher spectrally resolved ability, is one of key equipment of plasma diagnostics.
A kind of hyperchannel normal incidence imaging system, this system comprises a secondary mirror and polylith primary mirror, described primary mirror all is located on the circumference, described secondary mirror is positioned on the axis of this circumference, each piece primary mirror is formed a passage jointly with secondary mirror respectively, each passage forms piece image to same object, and all passages form and the identical multiple image of primary mirror piece number an object simultaneously.
Described polylith primary mirror is symmetrically distributed with respect to the axis of the residing circumference of primary mirror.
The center of curvature of described secondary mirror is positioned on the axis of the residing circumference of primary mirror, and described secondary mirror offers center pit.
The focal length of each passage is determined along axial distance by primary mirror and secondary mirror, and the focal length of a plurality of passages is identical.
The number of described primary mirror is 4 or 8.
For the multi channel imaging system, debuging of object lens is the key of equipment successful Application.The center of curvature of secondary mirror is positioned on the axis of symmetry; The skew of primary mirror or rotation have determined the mutual alignment between the image; Primary mirror and secondary mirror have determined the focal length of each passage along the spacing of axis of symmetry, because the detector image planes that adopt are the plane, this just requires each passage to have identical focal length.
A kind of method of debuging of hyperchannel normal incidence imaging system, this is debug method and may further comprise the steps:
(1) adopt autocollimation centering method to adjust secondary mirror, the center of curvature of adjusting secondary mirror is positioned on the axis of the residing circumference of primary mirror;
(2) regulate the inclination angle of primary mirror by detecting mutual alignment between the multiple image;
(3) adopt laser interferometer to adjust each primary mirror and secondary mirror equates at axial spacing in conjunction with the grating chi.
The described employing autocollimation of step (1) centering method is adjusted secondary mirror, and the concrete grammar that the center of curvature of adjusting secondary mirror is positioned on the axis of the residing circumference of primary mirror is as follows:
Secondary mirror is fixed on the air-float turntable, with attachment lens be located at secondary mirror directly over, autocollimator is located at the top of attachment lens, with the rotating shaft of air-float turntable as reference axis, the axis of primary mirror circumference of living in overlaps with the rotating shaft of air-float turntable, the radius-of-curvature of attachment lens, material refractive index and center thickness are known quantity, the divergent beams that autocollimator sends are converged to the center of curvature of secondary mirror convex surface by attachment lens, the diameter of attachment lens is greater than the diameter of secondary mirror center pit, like this, light beam just can be from the convex surface reflected back autocollimator of secondary mirror.
Debug in the process at secondary mirror, need to measure the deviation of secondary mirror convex curvature center, and it is corrected in the rotating shaft with respect to rotating shaft.The crosshair that autocollimator sends is done picture circular motion after secondary mirror convex surface autocollimatic returns, it is inclined to one side to calculate secondary mirror convex surface center according to radius-of-curvature, refractive index and the center thickness of drawing circular diameter and attachment lens, according to the inclined to one side numerical value in secondary mirror convex surface center that records secondary mirror is carried out position adjustments, up to the secondary mirror convex surface center that records partially in allowed limits, promptly finish debuging to secondary mirror.
Step (2) is described, and to regulate the concrete grammar at inclination angle of primary mirror as follows by detecting mutual alignment between the multiple image:
Laser instrument is located on the axis of primary mirror circumference of living in, between laser instrument and secondary mirror, be provided with the object point marking plate of center pit, the picture position marking plate that will have center pit and picture position sign hole is located on the image planes, and the center pit of object point marking plate and picture position marking plate all is positioned on the axis;
Utilize laser to replace common light source, laser convergence is in the object point position of system, produce a plurality of laser specks through after the multi-channel system in image planes, the light that utilizes the center pit locating laser device of object point marking plate to send, observe laser through the focusing speck that produces after the system whether with the picture position marking plate on sign hole, picture position overlap, if deviation is arranged, then regulate the inclination angle of primary mirror respectively, up to focus on speck all with the picture position marking plate on the picture position identify the hole and overlap, then finished the position adjustment of primary mirror.
The described employing laser interferometer of step (3) adjusts each primary mirror in conjunction with the grating chi and secondary mirror is as follows at the concrete grammar that axial spacing equates:
Laser interferometer is located on the axis of primary mirror circumference of living in, between laser interferometer and secondary mirror, be provided with the object point marking plate of center pit, the picture position marking plate that will have center pit and picture position sign hole is located on the axis of primary mirror back, concave mirror is located at the rear in picture position sign hole, and described concave mirror is fixed on the grating chi that has a slide block;
At first the passage of being made up of a primary mirror and secondary mirror is carried out wave aberration and detect, move axially slide block, up to the wave aberration minimum, this moment, grating chi reading was t
0, mobile then concave mirror and grating chi detect other the primary mirror and the wave aberration of the passage formed of secondary mirror respectively, in the testing process, move axially slide block, up to detected wave aberration minimum, and adjusted the position of primary mirror, up to grating chi reading and t
0Till identical, utilize the method, measure each passage successively, can finish detection whole imaging system.
Compare with existing pin-hole imaging technology, of the present inventionly debug method accuracy height, and debug processing ease, be with a wide range of applications.
Description of drawings
Fig. 1 is the structural representation of the hyperchannel normal incidence imaging system among the embodiment 1;
Fig. 2 is the arrangement synoptic diagram of the primary mirror among the embodiment 1;
Fig. 3 detects the light channel structure synoptic diagram partially for autocollimation centering method secondary mirror center;
Fig. 4 is that the light channel structure synoptic diagram is detected in multi channel imaging system diagram image position;
Fig. 5 is that the primary mirror and the secondary mirror axial spacing of multi channel imaging system object lens detects the light channel structure synoptic diagram;
Fig. 6 is the arrangement synoptic diagram of the primary mirror among the embodiment 2.
Among the figure, 1 is object, and 2 is secondary mirror, 3 is first primary mirror, and 4 is second primary mirror, and 5 is the 3rd primary mirror, 6 is the 4th primary mirror, and 7 is first image, and 8 is second image, 9 is the 3rd image, and 10 is the 4th image, 11 extreme ultraviolet or the soft X-rays that send for object, 12 is the circumference at primary mirror place, and 13 is autocollimator, and 14 is air-float turntable, 15 is attachment lens, and 16 is the attachment lens upper surface, and 17 is the attachment lens lower surface, 18 is laser instrument, and 19 is the object point marking plate, and 20 is the picture position marking plate, 21 is picture position marking plate center pit, 22 is sign hole, first picture position, and 23 is sign hole, second picture position, and 24 is sign hole, the 3rd picture position, 25 is sign hole, the 4th picture position, 26 is laser interferometer, and 27 is concave mirror, and 28 is grating chi slide block, 29 is the grating chi, and 30 is the three-dimensional regulation platform.
Embodiment
The present invention is described in detail below in conjunction with the drawings and specific embodiments.
Embodiment 1
A kind of hyperchannel normal incidence imaging system, as shown in Figure 1 and Figure 2, this system comprises 4 primary mirrors (being respectively first primary mirror 3, second primary mirror 4, the 3rd primary mirror 5, the 4th primary mirror 6) and a secondary mirror 2, first primary mirror 3, second primary mirror 4, the 3rd primary mirror 5, the 4th primary mirror 6 evenly are laid on the circumference 12, and secondary mirror 2 is positioned at the axes O of this circumference 12
1O
2On, four primary mirrors are with respect to the axes O of the residing circumference of primary mirror
1O
2Be symmetrically distributed.Each piece primary mirror is formed a passage jointly with secondary mirror 2 respectively, and each passage forms piece image to same object 1; Extreme ultraviolet that object 1 sends or soft X-ray 11 are after first primary mirror 3, second primary mirror 4, the 3rd primary mirror 5 and 6 reflections of the 4th primary mirror, all shine on the secondary mirror 2, light forms 4 images of object again through secondary mirror 2 reflection backs, be respectively first image 7, second image 8, the 3rd image 9 and the 4th image 10.The center of curvature of secondary mirror 2 is positioned at the axes O of the residing circumference 12 of primary mirror
1O
2On, secondary mirror 2 offers center pit.The focal length of each passage is determined along axial distance by primary mirror and secondary mirror 2, and the focal length of a plurality of passages is identical.Among Fig. 1, the xoy plane is perpendicular to axle O
1O
2, the yoz plane is perpendicular to the xoy plane, and among the figure, h1, h2 be the distance between the presentation video respectively.
A kind of method of debuging of hyperchannel normal incidence imaging system, this is debug method and may further comprise the steps:
(1) adopt autocollimation centering method to adjust secondary mirror, the center of curvature of adjusting secondary mirror is positioned on the axis of the residing circumference of primary mirror;
(2) regulate the inclination angle of primary mirror by detecting mutual alignment between the multiple image;
(3) adopt laser interferometer 26 to equate at axial spacing in conjunction with grating chi 29 each primary mirror of adjustment and secondary mirror.
Adopt in the step (1) autocollimation centering method to adjust secondary mirror, the concrete grammar that the center of curvature of adjusting secondary mirror is positioned on the axis of the residing circumference of primary mirror is as follows:
As shown in Figure 3, secondary mirror 2 is fixed on the air-float turntable 14, with attachment lens 15 be located at secondary mirror 2 directly over, autocollimator 13 is located at the top of attachment lens 15, with the rotating shaft of air-float turntable 14 as reference axis, the axes O of primary mirror circumference of living in
1O
2Overlap with the rotating shaft of air-float turntable 14, the radius-of-curvature of attachment lens 15, material refractive index and center thickness are known quantity, the divergent beams that autocollimator 13 sends are converged to the center of curvature of secondary mirror 2 convex surfaces by attachment lens 15, the diameter of attachment lens 15 is greater than the diameter of secondary mirror 2 center pits, like this, light beam just can be from the convex surface reflected back autocollimator 13 of secondary mirror 2.The diameter of secondary mirror 2 center pits is 50mm, the beam size that sends of autocollimator 13 is 30mm, the diameter of attachment lens 15 is 100mm, the about 20mm of distance with secondary mirror 2, then light is through the diameter of section about 90mm of attachment lens 15 backs at secondary mirror 2 convex surfaces, greater than the center-hole diameter (50mm) of secondary mirror 2,, and turn back in the autocollimator 13 so light beam can be in the reflection of the convex surface of secondary mirror 2.
Debug in the process at secondary mirror 2, need to measure the deviation of secondary mirror 2 convex curvature centers, and it is corrected in the rotating shaft with respect to rotating shaft.If the center of curvature departs from rotating shaft, then in air-float turntable 14 rotary courses, the crosshair that autocollimator 13 sends is done picture circular motion after secondary mirror 2 convex surface autocollimatics return; If the center of curvature is in rotating shaft, then crosshair returns as transfixion.But because the measurement of secondary mirror 2 convex surfaces is subjected to the influence of (center is inclined to one side, and promptly the center of curvature departs from the amount of rotating shaft) partially of attachment lens upper surface 16 and attachment lens lower surface 17 centers.As long as determine radius-of-curvature, refractive index and the center thickness of attachment lens 15, then the center of curvature deviation of secondary mirror 2 can be calculated by the parameter and the offset thereof of attachment lens 15.According to the inclined to one side numerical value in secondary mirror 2 convex surface centers that records secondary mirror 2 is carried out position adjustments, up to the secondary mirror 2 convex surface centers that record partially in allowed limits, promptly finish debuging secondary mirror 2.In the practical application, air-float turntable 14 whenever rotates a circle, the center that just records attachment lens upper surface 16, attachment lens lower surface 17 and secondary mirror 2 convex surfaces is inclined to one side, according to the inclined to one side numerical value in secondary mirror 2 convex surface centers that records secondary mirror 2 is carried out position adjustments at x and y direction, repeat above step then, up to the secondary mirror 2 convex surface centers that record partially in allowed limits, promptly finish debuging to secondary mirror 2.
To regulate the concrete grammar at inclination angle of primary mirror as follows by detecting mutual alignment between the multiple image in the step (2):
As shown in Figure 4, laser instrument 18 is located at the axes O of primary mirror (first primary mirror 3, second primary mirror 4, the 3rd primary mirror 5 or the 4th primary mirror 6) circumference of living in
1O
2On, between laser instrument 18 and secondary mirror 2, be provided with the object point marking plate 19 of center pit, the picture position marking plate 20 that will have picture position marking plate center pit 21 and picture position sign hole (comprising sign hole 22, first picture position, sign hole 23, second picture position, sign hole 24, the 3rd picture position and sign hole 25, the 4th picture position) is located on the image planes, and object point marking plate 19 all is positioned at axes O with the center pit of picture position marking plate 20
1O
2On; Wherein, comprise that sign hole 22, first picture position, sign hole 23, second picture position, sign hole 24, the 3rd picture position and sign hole 25, the 4th picture position are used for identifying the position of first image 7, second image 8, the 3rd image 9 and the 4th image 10 respectively, the mutual alignment in sign hole, four picture positions is a design load, and is identical with the image pitch of system design.Wherein, first picture position sign hole 22, sign hole 23, second picture position, sign hole 24, the 3rd picture position and the focus point of 25 difference corresponding laser in sign hole, the 4th picture position after first primary mirror 3, second primary mirror 4, the 3rd primary mirror 5 and the 4th primary mirror 6 and secondary mirror 2 reflections.
Utilize laser to replace common light source, laser convergence is in the object point position of system, produce a plurality of laser specks through after the multi-channel system in image planes, the light that utilizes the center pit locating laser device 18 of object point marking plate 19 to send, observe laser through four of producing after the system focus on specks whether with picture position marking plate 20 on sign hole, four picture positions overlap, if deviation is arranged, then regulate first primary mirror 3 respectively, second primary mirror 4, the inclination angle of the 3rd primary mirror 5 and the 4th primary mirror 6, up to focus on speck all with picture position marking plate 20 on the picture position identify the hole and overlap, then finished the position adjustment of primary mirror.
Adopt laser interferometer 26 as follows at the concrete grammar that axial spacing equates in the step (3) in conjunction with grating chi 29 each primary mirror of adjustment and secondary mirror:
As shown in Figure 5, laser interferometer 26 is located at the axes O of primary mirror circumference of living in
1O
2On, between laser interferometer 26 and secondary mirror 2, being provided with the object point marking plate 19 of center pit, the picture position marking plate 20 that will have center pit and picture position sign hole is located at the axes O of primary mirror back
1O
2On, concave mirror 27 is located at the rear in sign hole, picture position, the optical convergence that laser interferometer 26 is sent is to the center pit of object point marking plate 19, and light beam is through on first primary mirror 3, second primary mirror 4, the 3rd primary mirror 5, the 4th primary mirror 6 and the secondary mirror 2 reflection post-concentrations picture position marking plate 20 on system's image planes.The center of curvature of concave mirror 27 overlaps with the picture point of this passage, also overlaps with sign hole, picture position simultaneously.Concave mirror 27 is fixed on the grating chi 29 that has a slide block 28, and grating chi 29 is located on the three-dimensional regulation platform 30, and grating chi 29 can be noted slide block 28 accurately in axially movable distance.
At first the passage of being made up of first primary mirror 3 and secondary mirror 2 is carried out wave aberration and detect, move axially slide block 28, up to the wave aberration minimum, this moment, grating chi 29 readings were t
0, the center of curvature of wave aberration minimum specification concave mirror 27 has overlapped with this passage picture point accurately.Move concave mirror 27 and grating chi 29 by three-dimensional regulation platform 30 at x and y direction then, the wave aberration of the passage that second primary mirror 4 and secondary mirror 2 formed detects respectively, in the testing process, equally, along axial (z direction) moving slider 28 (concave mirror 27 is fixed on the slide block 28), up to detected wave aberration minimum, utilize grating chi 29 to note the reading t of this moment
1, the difference of reading
t-t
0Be these two passage image planes at axial range difference, utilize this range difference to extrapolate these two passage primary mirrors and secondary mirror 2 again, and adjusted second primary mirror 4, overlap up to the image planes of these two passages, i.e. grating chi reading t in axial spacing deviation
1=t
0Till.Utilize the method, measure each passage successively, can finish detection whole imaging system.
Embodiment 2
Difference from Example 1 is that this system is eight channel systems, and hyperchannel normal incidence imaging system comprises eight primary mirrors, and as shown in Figure 6, eight primary mirrors all are laid on the same circumference 12.
Claims (9)
1. hyperchannel normal incidence imaging system, it is characterized in that, this system comprises a secondary mirror and polylith primary mirror, described primary mirror all is located on the circumference, described secondary mirror is positioned on the axis of this circumference, each piece primary mirror is formed a passage jointly with secondary mirror respectively, and each passage forms piece image to same object, and all passages form and the identical multiple image of primary mirror piece number an object simultaneously.
2. a kind of hyperchannel normal incidence imaging system according to claim 1 is characterized in that, described polylith primary mirror is symmetrically distributed with respect to the axis of the residing circumference of primary mirror.
3. a kind of hyperchannel normal incidence imaging system according to claim 1 is characterized in that the center of curvature of described secondary mirror is positioned on the axis of the residing circumference of primary mirror, and described secondary mirror offers center pit.
4. a kind of hyperchannel normal incidence imaging system according to claim 1 is characterized in that, the focal length of described passage is determined along axial distance by primary mirror and secondary mirror, and the focal length of a plurality of passages is identical.
5. a kind of hyperchannel normal incidence imaging system according to claim 1 is characterized in that the number of described primary mirror is 4 or 8.
6. method of debuging as the arbitrary described hyperchannel normal incidence imaging system of claim 1～4 is characterized in that this is debug method and may further comprise the steps:
(1) adopt autocollimation centering method to adjust secondary mirror, the center of curvature of adjusting secondary mirror is positioned on the axis of the residing circumference of primary mirror;
(2) regulate the inclination angle of primary mirror by detecting mutual alignment between the multiple image;
(3) adopt laser interferometer to adjust each primary mirror and secondary mirror equates at axial spacing in conjunction with the grating chi.
7. the method for debuging of a kind of hyperchannel normal incidence imaging system according to claim 6, it is characterized in that, the described employing autocollimation of step (1) centering method is adjusted secondary mirror, and the concrete grammar that the center of curvature of adjusting secondary mirror is positioned on the axis of the residing circumference of primary mirror is as follows:
Secondary mirror is fixed on the air-float turntable, with attachment lens be located at secondary mirror directly over, autocollimator is located at the top of attachment lens, with the rotating shaft of air-float turntable as reference axis, the axis of primary mirror circumference of living in overlaps with the rotating shaft of air-float turntable, the crosshair that autocollimator sends is done picture circular motion after secondary mirror convex surface autocollimatic returns, according to the radius-of-curvature of drawing circular diameter and attachment lens, it is inclined to one side that refractive index and center thickness calculate secondary mirror convex surface center, partially secondary mirror is carried out position adjustments according to the secondary mirror convex surface center that records, up to the secondary mirror convex surface center that records partially in allowed limits, promptly finish debuging to secondary mirror.
8. the method for debuging of a kind of hyperchannel normal incidence imaging system according to claim 6 is characterized in that, step (2) is described, and to regulate the concrete grammar at inclination angle of primary mirror as follows by detecting mutual alignment between the multiple image:
Laser instrument is located on the axis of primary mirror circumference of living in, between laser instrument and secondary mirror, be provided with the object point marking plate of center pit, the picture position marking plate that will have center pit and picture position sign hole is located on the image planes, and the center pit of object point marking plate and picture position marking plate all is positioned on the axis;
The light that utilizes the center pit locating laser device of object point marking plate to send, whether observe laser identifies the hole with the picture position through the focusing speck that produces behind primary mirror and the secondary mirror and overlaps, if deviation is arranged, then regulate the inclination angle of primary mirror respectively, all overlap up to focusing on speck, then finished the position adjustment of primary mirror with sign hole, picture position.
9. the method for debuging of a kind of hyperchannel normal incidence imaging system according to claim 6 is characterized in that, the described employing laser interferometer of step (3) adjusts each primary mirror in conjunction with the grating chi and secondary mirror is as follows at the concrete grammar that axial spacing equates:
Laser interferometer is located on the axis of primary mirror circumference of living in, between laser interferometer and secondary mirror, be provided with the object point marking plate of center pit, the picture position marking plate that will have center pit and picture position sign hole is located on the axis of primary mirror back, concave mirror is located at the rear in picture position sign hole, and described concave mirror is fixed on the grating chi that has a slide block;
At first the passage of being made up of a primary mirror and secondary mirror is carried out wave aberration and detect, move axially slide block, up to the wave aberration minimum, this moment, grating chi reading was t
0, mobile then concave mirror and grating chi detect other the primary mirror and the wave aberration of the passage formed of secondary mirror respectively, in the testing process, move axially slide block, up to detected wave aberration minimum, and adjusted the position of primary mirror, up to grating chi reading and t
0Till identical.
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| CN104142579A (en) * | 2014-07-23 | 2014-11-12 | 西安空间无线电技术研究所 | Adjustment method for reflectors of periscopic type acquisition and tracking mechanism |
| CN105607278A (en) * | 2016-01-13 | 2016-05-25 | 中国科学院上海光学精密机械研究所 | Auxiliary apparatus for adjustment of optical lens placed at pitching angle and using method thereof |
| CN108801178A (en) * | 2017-05-04 | 2018-11-13 | 北京理工大学 | Differential confocal auto-collimation center is partially and curvature radius measurement method and device |
| CN110764271A (en) * | 2019-10-16 | 2020-02-07 | 中国航空工业集团公司洛阳电光设备研究所 | Method for adjusting position precision among lenses in conjugate optical system |
| CN113557445A (en) * | 2019-03-12 | 2021-10-26 | 法雷奥开关和传感器有限责任公司 | Optical signal deflection device for an optical measuring system for detecting an object, measuring system and method for operating an optical signal deflection device |
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| CN103226240B (en) | 2015-04-15 |
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