CN113203553B - Lens center error measuring system and measuring method - Google Patents
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Abstract
The invention relates to a lens center error measuring system and a measuring method, which solve the problem that the lens center error is measured completely by an image processing technology in the prior art, and realize high-precision and non-contact measurement of the lens center error. The invention comprises a laser light source, a shaping lens, a beam splitting prism and a lens adjusting mechanism which are sequentially arranged along the vertical direction of an optical axis, wherein a lens to be tested is arranged on the lens adjusting mechanism, a video monitor is arranged on one side of the beam splitting prism, and a plane reflecting mirror is arranged on the other side of the beam splitting prism; the lens assembling and adjusting mechanism comprises a lens support for setting a lens to be measured, a combined platform capable of moving in two horizontal directions and driving the measuring part to rotate around a shaft is arranged below the lens support, and a vertical displacement device connected with the lens support is arranged on the combined platform. The vertical displacement device comprises a displacement rod, a grating ruler, a displacement sensor or a nano displacement table.
Description
Technical field:
the invention belongs to the technical field of optical detection, and relates to a lens center error measuring system and a measuring method.
The background technology is as follows:
with the rapid development of the optical industry, the structure of the optical system is more and more complex, and the technical indexes such as resolution, aperture, field of view, distortion and the like are also continuously improved, so that the requirements on the optical system in various fields are also higher and higher. However, the optical lens generates a center error in the production process for various reasons, resulting in an increase in system aberration and a serious influence on imaging quality. Therefore, in the processing of optical lenses, the measurement of the center error of the lens is of great importance.
Currently, the representation method of the lens center error comprises the inclination angle, the eccentric difference, the spherical center difference, the edge thickness difference and the like. The surface inclination angle refers to the included angle between the normal line at the centering vertex of the optical surface and the reference axis; the decentration difference refers to the amount of deviation of the lens geometry from the optical axis at the center of the lens, for a thin lens, i.e., the amount of deviation of the lens geometry center from the center of the optical axis; spherical center deviation refers to the deviation of the center of curvature of the lens optical surface from the reference axis; the edge thickness difference refers to the difference in thickness of the edges of the lens.
The method for measuring the lens center deviation error comprises a three-coordinate measuring method, an interferometry method, an auto-collimation method and the like. The three-coordinate measurement method is a contact measurement method, the contact measurement can cause certain damage to the element, the magnitude of the center deviation error can not be accurately measured by adopting the gradual measurement of the separated points in order to reduce the damage, and the measurement period is longer; the measurement result of the interferometry is high in precision, but the optical system is complex, and certain requirements are met on the reflectivity of the to-be-measured piece, so that the method has certain limitation and is not easy to popularize; the auto-collimation measurement method is suitable for the measurement of spherical lenses, the optical system is simpler, the number of optical devices is smaller, but the measurement accuracy and the measurement sensitivity can be influenced by a CCD/CMOS camera and an image processing algorithm.
Currently, the more widely used instruments employ interferometry and autocollimation. The interferometry instrument has complex structure, large volume and difficult assembly and adjustment; the auto-collimation method mainly comprises an auto-collimation light path and a CCD camera, and the measuring method is to calculate the offset of the reflected light or the transmitted light of the lens to be measured through the light spot position on the CCD camera, so as to finish the measurement of the lens center error. In 1997, the document "Solid state division. One: two 2 division PSDs", hamamatsu Photonics KK, irradiated point laser obliquely to the center of the lens, placed a CCD on the other side symmetrical with respect to the optical axis of the lens to be measured. And rotating the lens, recording the circular track of the light spot by the CCD, and calculating the diameter of the circular track to obtain the center error. In 2013, the literature "study of a PSD-based lens centering instrument" determined the size and direction of lens decentration by PSD measurement of the position of a diffuse spot. As described in patent document 1 (patent document 1, CN 204831226U), a parallel beam is made incident on a lens to be detected, and a receiving optical system and an imaging CCD are mounted at a transmission/reflection position to detect an image point. When the lens to be measured is measured, the lens to be measured is rotated, if the lens to be measured has a center error, the image point track is a circular ring with a certain radius, wherein the diameter of the circular ring and the center of the lens to be measured are in a corresponding geometric relationship, and the center error of the lens to be measured is reversely calculated. The method is to directly and quantitatively calculate the center error of the lens according to the position of the light spot received on the CCD image surface, and the measurement result is directly affected by the imaging quality of the camera, is easily interfered by environmental factors and is closely related to the quality of an image processing algorithm.
The invention comprises the following steps:
the invention aims to provide a lens center error measuring system and a lens center error measuring method, which solve the problem that the lens center error is measured by completely relying on an image processing technology in the prior art, and realize high-precision and non-contact measurement of the lens center error.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a lens center error measurement system, characterized by: the device comprises a laser light source, a shaping lens, a beam splitting prism and a lens adjusting mechanism which are sequentially arranged along the vertical direction of an optical axis, wherein a lens to be tested is arranged on the lens adjusting mechanism, a video monitor is arranged on one side of the beam splitting prism, and a plane reflecting mirror is arranged on the other side of the beam splitting prism; the lens assembling and adjusting mechanism comprises a lens support for setting a lens to be tested, a combined platform composed of an XY displacement platform and a rotary platform is arranged below the lens support, and a vertical displacement device connected with the lens support is arranged on the combined platform.
The vertical displacement device comprises a displacement rod, a grating ruler, a displacement sensor or a nano displacement table.
A method of measuring lens center error using the system of claim 1, wherein: the method comprises the following steps:
step one: calibrating the device:
placing a flat plate or a plane reflecting mirror on a lens adjusting mechanism, adjusting a vertical displacement device to enable light spots reflected by the surface of the flat plate or the plane reflecting mirror to overlap with light spots reflected by the plane reflecting mirror into a video monitor, and completing calibration;
step two: mounting the lens to be tested on the lens adjusting mechanism;
step three: turning on a laser light source, and adjusting the laser light source to be a point light source with smaller divergence angle after passing through a shaping lens; after the laser reaches the beam splitting prism, one beam of light reaches the plane reflecting mirror, and finally reaches the center of the video monitor through reflection of the plane reflecting mirror, and is marked as a first light spot; the other beam of light falls on the lens to be detected, and the video monitor receives reflected light spots of the upper surface and the lower surface of the lens to be detected through the reflection of the upper surface and the lower surface of the lens to be detected, and the reflected light spots are respectively marked as second light spots and third light spots; adjusting the inclination of the lens to be tested through the relative positions of three light spots presented on the video monitor;
step four: observing the spot position on the video monitor, and recording the vertex space coordinates of three vertical displacement devices when the lens to be tested only has a center error, so as to form a plane in space; at the moment, the heights of the three vertical displacement devices are adjusted, the lens adjustment mechanism moves in two horizontal directions, so that two light spots reflected by the upper surface and the lower surface of the lens to be measured are overlapped with light spots reflected by the central plane reflector of the video monitor, and at the moment, the space coordinates of the vertexes of the three vertical displacement devices are recorded to form a new plane; and calculating the included angle of the two surfaces to obtain the center error of the lens to be measured.
In the fourth step, the method for judging the center error and the tilt error of the lens to be tested is as follows:
if the video monitor receives light spots reflected by the upper surface and the lower surface of the lens to be measured and the plane mirror, the light spots overlap the center of the video monitor, and when the part to be measured is rotated to drive the lens to be measured to rotate along the central axis of the lens to be measured, the positions of the three overlapped laser spots are not changed, so that the lens to be measured is free from central errors and inclination errors;
if two light spots reflected to the video monitor by the upper surface and the lower surface of the lens to be measured received on the video monitor exist independently and deviate from the light spot reflected to the center of the video monitor by the plane reflector, when the rotation measuring part drives the lens to be measured to rotate along the central axis of the lens to be measured, the two light spots rotate around the center of the video monitor, so that only a tilt error exists in the lens to be measured;
if the video monitor receives two light spots reflected to the video monitor by the upper surface and the lower surface of the lens to be measured, the two light spots exist independently and deviate from the light spot reflected to the center of the video monitor by the plane reflector, and when the rotation measuring part drives the lens to be measured to rotate along the central axis of the lens to be measured, the positions of the two light spots are not changed, so that only a central error exists in the lens to be measured.
The calculation method of the lens center error X in the fourth step is as follows:
the included angle of the two planes can be calculated by the normal vector corresponding to the two space plane equations:
θ obtained in the formula (3) is the center error X;
the lens to be measured is placed on the lens adjusting mechanism, no inclination of the lens can be observed on the video monitor, and coordinates of three vertexes are a (X1, Y1, Z1), b (X2, Y2, Z2) and c (X3, Y3, Z3) respectively;
three light spots in the video monitor are overlapped through adjusting the vertical displacement device, and coordinates of three vertexes are a1 (X4, Y4, Z4), b1 (X5, Y5, Z5) and c1 (X6, Y6, Z6) respectively;
the coordinates in the coordinate system can respectively obtain space plane equations in two states, and the space normal vectors respectively corresponding to the space plane equations are as follows
And->
Compared with the prior art, the invention has the advantages that:
1. the system uses the point light source when measuring, further uses the shaping lens to adjust the divergence angle of the point light source, so that the influence of the diameter of the light spot on the result is minimized, and the movement of the vertical displacement device in the vertical direction in the lens adjusting mechanism can realize the large-scale adjustment of the lens in space, so that the surface curvature of the lens to be measured is not required.
2. The system of the invention obtains the lens center error by recording the vertex coordinates of the micro-displacement device when the center error exists in the lens and the vertex coordinates of the micro-displacement device when the three light spots are overlapped and calculating the included angle of two space planes by utilizing the space geometric relationship. The whole process mainly realizes the measurement of the lens center error through the micro-displacement of the three displacement devices, and the measurement accuracy is higher.
3. The video monitor in the system only feeds back the measuring system, and the micro-displacement device in the system is assisted to adjust, so that the measurement of the lens center error is completed, and the relative position of the light spot in the monitor is not directly used as the measurement basis. The measurement result is not influenced by the video monitor, and the image resolution and the influence of the camera on the measurement result are eliminated.
4. The invention has simple integral structure and low requirement on environment, and can easily measure and obtain the lens center error by only needing the movement amount of three micro-displacement devices.
Description of the drawings:
FIG. 1 is a schematic diagram of a lens center error measurement system according to the present invention;
fig. 2 is a schematic structural view of a lens adjusting mechanism in the present invention.
FIG. 3 is a diagram of lens center error;
FIG. 4 is a schematic diagram of the vertex coordinates of the micro-displacement device when there is a center error in the lens;
FIG. 5 is a schematic diagram of the vertex coordinates of the micro-displacement device when the three spots overlap.
In the figure: the device comprises a 1-laser light source, a 2-shaping lens, a 3-beam splitting prism, a 4-video monitor, a 5-lens to be tested, a 6-lens adjusting mechanism, a 7-plane reflector, a 6-1-lens bracket, a 6-2-vertical displacement device and a 6-3-combined platform.
The specific embodiment is as follows:
the present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The invention relates to a lens center error measuring system, which comprises a laser light source 1, a shaping lens 2, a beam splitting prism 3 and a lens adjusting mechanism 6 which are sequentially arranged along the vertical direction of an optical axis, wherein a lens 5 to be measured is arranged on the lens adjusting mechanism 6, a video monitor 4 is arranged on one side of the beam splitting prism 3, and a plane reflecting mirror 7 is arranged on the other side of the beam splitting prism 3.
Referring to fig. 2, the lens adjusting mechanism 6 includes a lens support 6-1 for setting a lens to be measured, a combined platform 6-3 capable of moving in two horizontal directions and driving the measuring part to rotate around a shaft is arranged below the lens support 6-1, and a vertical displacement device 6-2 connected with the lens support 6-1 is arranged on the combined platform 6-3. The lens support 6-1 is used for placing the lens 5 to be measured, and the vertical displacement device 6-2 can perform micro displacement in the vertical direction. The vertical displacement device 6-2 can be a displacement rod, a grating ruler, a displacement sensor, a nano displacement table and the like, and can move and measure micro displacement in the vertical direction. The combined platform 6-3 can realize manual or electric micro-displacement movement in two directions of horizontal XY, and the measuring part is driven by a motor to rotate around the shaft.
The invention also comprises a measuring method of the lens center error measuring system, which comprises the following steps:
step one: the device is calibrated.
Calibration of the measurement device is required before the whole device is used. In calibration, a flat plate (or a plane mirror) may be placed on the lens adjustment mechanism 6, and the vertical displacement device 6-2 may be adjusted to overlap the light spot reflected by the surface of the flat plate and the light spot reflected by the plane mirror 7 into the video monitor 4 (or the vertical displacement device 6-2 may be adjusted to overlap the light spot reflected by the plane mirror placed on the lens adjustment mechanism 6 and the light spot reflected by the plane mirror 7 into the center of the video monitor 4). The device can be considered to be calibrated.
Step two: mounting the lens 5 to be tested on the lens adjusting mechanism 6;
step three: turning on the laser light source 1, and adjusting the laser light source 1 to a point light source with smaller divergence angle after passing through the shaping lens 2; after reaching the beam splitting prism 3, one beam of laser reaches the plane mirror 7, and finally reaches the center of the video monitor 4 after being reflected by the plane mirror 7 and is marked as a first light spot; the other beam of light falls on the lens 5 to be detected, and the video monitor receives reflected light spots on the upper surface and the lower surface of the lens 5 to be detected through the reflection of the upper surface and the lower surface of the lens 5 to be detected, and the reflected light spots are respectively marked as second light spots and third light spots; adjusting the inclination of the lens 5 to be tested by the relative positions of three light spots presented on the video monitor;
step four: observing the spot position on the video monitor 4, and recording the vertex space coordinates of the three vertical displacement devices 6-2 when the lens to be tested only has a center error, so as to form a plane in space; at this time, the heights of the three vertical displacement devices 6-2 are adjusted, and the lens adjustment mechanism 6 moves in two horizontal directions, so that two light spots reflected by the upper surface and the lower surface of the lens 5 to be measured are overlapped with light spots reflected by the central plane mirror 7 of the video monitor 4, and at this time, the space coordinates of the vertexes of the three vertical displacement devices 6-2 are recorded to form a new plane; and calculating the included angle between the two surfaces to obtain the center error of the lens to be measured.
In the fourth step, the method for judging the center error and the tilt error of the lens to be tested is as follows:
if the video monitor 4 receives light spots reflected by the upper surface and the lower surface of the lens 5 to be measured and the plane mirror 7, the light spots overlap with the center of the video monitor 4, and when the part to be measured is rotated to drive the lens 5 to be measured to rotate along the central axis of the lens 5 to be measured, the positions of the three overlapped laser spots are not changed, so that the lens 5 to be measured does not have a center error and an inclination error;
if two light spots reflected to the video monitor 4 by the upper and lower surfaces of the lens 5 to be measured received on the video monitor 4 exist independently and deviate from the light spot reflected to the center of the video monitor 4 by the plane mirror 7, when the rotation measuring part drives the lens 5 to be measured to rotate along the center axis of the lens, the two light spots rotate around the center of the video monitor 4, which indicates that the lens 5 to be measured only has inclination errors;
if two light spots reflected to the video monitor 4 by the upper surface and the lower surface of the lens 5 to be measured are received on the video monitor 4 and exist independently, and the light spots reflected to the center of the video monitor 4 by the plane mirror 7 deviate, when the rotation measuring part drives the lens 5 to be measured to rotate along the central axis, the positions of the two light spots are not changed, so that only a central error exists in the lens 5 to be measured.
The calculation method of the lens center error in the fourth step is as follows:
as shown in fig. 3, the lens center error is defined as the angle of the normal at the optical surface centering vertex with the reference axis.
As shown in the spatial coordinate systems of fig. 4 and 5, three straight lines in the drawing represent three vertical displacement devices 6-2 on the lens adjustment mechanism 6 respectively, and the positions of three line segments on the XOY plane in the coordinate system, that is, the corresponding positions of the three vertical displacement devices 6-2 on the lens adjustment mechanism 6; the black dots at the top ends of the three line segments represent the positions of the top ends of the three vertical displacement devices 6-2 in real space.
Fig. 4 is different from fig. 5 in that fig. 4 shows that the lens 5 to be measured is placed on the lens adjustment mechanism 6, and it can be observed on the video monitor 4 that there is no tilt of the lens 5 to be measured, and the coordinates of the three vertices are a (X1, Y1, Z1), b (X2, Y2, Z2), c (X3, Y3, Z3), respectively; fig. 5 shows the state after the vertical displacement device 6-2 is adjusted to make the three light spots overlap in the video monitor, and the coordinates of the three vertices are a1 (X4, Y4, Z4), b1 (X5, Y5, Z5), and c1 (X6, Y6, Z6), respectively.
The coordinates in the coordinate systems of fig. 4 and 5 can be used to obtain the space plane equation in two states:
Ax+By+Cz+D＝0 (1)
A 1 x+B 1 y+C 1 z+D 1 ＝0 (2)
at this time, the space normal vectors corresponding to the space plane equations (1) and (2) are respectively
And
the included angle of the two planes can be obtained by the normal vector corresponding to the two space plane equations
And θ obtained in the formula (3) is the center error X.
The foregoing description of the preferred embodiments of the present invention is not intended to limit the scope of the invention, and it should be noted that modifications and variations could be made by persons skilled in the art without departing from the principles of the present invention.
Claims (3)
1. A lens center error measuring method is characterized in that: the device comprises a laser light source (1), a shaping lens (2), a beam splitting prism (3) and a lens adjusting mechanism (6) which are sequentially arranged along the vertical direction of an optical axis, wherein a lens (5) to be detected is arranged on the lens adjusting mechanism (6), a video monitor (4) is arranged on one side of the beam splitting prism (3), and a plane reflecting mirror (7) is arranged on the other side of the beam splitting prism (3); the lens adjusting mechanism (6) comprises a lens bracket (6-1) for setting a lens (5) to be measured, a combined platform (6-3) consisting of an XY displacement platform and a rotary platform is arranged below the lens bracket (6-1), and a vertical displacement device (6-2) connected with the lens bracket (6-1) is arranged on the combined platform (6-3);
the method comprises the following steps:
step one: calibrating the device:
placing a flat plate or a plane reflecting mirror on a lens adjusting mechanism (6), adjusting a vertical displacement device (6-2) to enable light spots reflected by the surface of the flat plate or the plane reflecting mirror to overlap light spots reflected by the plane reflecting mirror (7) into a video monitor (4), and completing calibration;
step two: mounting a lens (5) to be tested on the lens adjustment mechanism;
step three: turning on a laser light source (1), and adjusting the laser light source (1) into a point light source with smaller divergence angle after passing through a shaping lens (2); after reaching the beam splitting prism (3), one beam of laser reaches the plane reflecting mirror (7), and finally reaches the center of the video monitor (4) through reflection of the plane reflecting mirror (7) and is marked as a first light spot; the other beam of light falls on the lens (5) to be detected, and the video monitor (4) receives reflected light spots on the upper surface and the lower surface of the lens (5) to be detected through the reflection of the upper surface and the lower surface of the lens (5) to be detected, and the reflected light spots are respectively marked as second light spots and third light spots; the inclination of the lens (5) to be tested is adjusted through the relative positions of three light spots displayed on the video monitor (4);
step four: observing the spot position on the video monitor (4), and recording the vertex space coordinates of three vertical displacement devices (6-2) when the lens (5) to be detected only has a center error, so as to form a plane in space; at the moment, the heights of the three vertical displacement devices (6-2) are adjusted, the lens adjustment mechanism (6) moves in two horizontal directions, so that two light spots reflected by the upper surface and the lower surface of the lens (5) to be measured are overlapped with light spots reflected by the central plane reflecting mirror (7) of the video monitor (4), and at the moment, the space coordinates of the vertexes of the three vertical displacement devices (6-2) are recorded to form a new plane; and calculating the included angle between the two planes to obtain the center error of the lens (5) to be measured.
2. The method for measuring the center error of a lens according to claim 1, wherein: the judging method of the center error and the inclination error of the lens to be tested is as follows:
if the video monitor (4) receives light spots reflected by the upper surface, the lower surface and the plane reflecting mirror (7) of the lens to be detected (5), the light spots overlap with the center of the video monitor (4), and when the rotating table drives the lens to be detected (5) to rotate along the central axis of the lens to be detected, the positions of the three overlapped light spots are not changed, so that the lens to be detected (5) is free from central errors and inclination errors;
if two light spots reflected to the video monitor (4) by the upper surface and the lower surface of the lens (5) to be detected received on the video monitor (4) exist independently and deviate from the light spot reflected to the center of the video monitor (4) by the plane reflector (7), when the turntable drives the lens (5) to be detected to rotate along the central axis of the video monitor (4), the two light spots rotate around the center of the video monitor (4), so that only a tilting error exists in the lens (5) to be detected;
if two light spots reflected to the video monitor (4) by the upper surface and the lower surface of the lens (5) to be tested are received on the video monitor (4) and exist independently, and the light spots reflected to the center of the video monitor (4) deviate from the plane reflector (7), when the turntable drives the lens (5) to be tested to rotate along the central axis of the turntable, the positions of the two light spots are not changed, and only a central error exists in the lens (5) to be tested.
3. The method for measuring the center error of a lens according to claim 1, wherein: the calculation method of the lens center error X in the fourth step is as follows:
the included angle of the two planes can be calculated by the normal vector corresponding to the two space plane equations:
θ obtained in the formula (3) is the center error X;
the lens (5) to be tested is placed on the lens adjusting mechanism, no inclination of the lens can be observed on the video monitor (4), and coordinates of three vertexes are a (X1, Y1, Z1), b (X2, Y2, Z2) and c (X3, Y3 and Z3) respectively;
three light spots in the video monitor are overlapped by adjusting the vertical displacement device (6-2), and coordinates of three vertexes are a1 (X4, Y4, Z4), b1 (X5, Y5, Z5) and c1 (X6, Y6, Z6) respectively;
the coordinates in the coordinate system can respectively obtain space plane equations in two states, and the space normal vectors respectively corresponding to the space plane equations are as follows
And->
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| JPH0299841A (en) * | 1988-10-07 | 1990-04-11 | Olympus Optical Co Ltd | Eccentricity measuring apparatus for lens system |
| CN104061867A (en) * | 2014-07-09 | 2014-09-24 | 西安工业大学 | Spectrum confocal type measurement method and device for thickness of center of lens |
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| JPH0781931B2 (en) * | 1989-09-20 | 1995-09-06 | オリンパス光学工業株式会社 | Apparatus and method for measuring eccentricity of lens system |
| JP3372324B2 (en) * | 1993-11-12 | 2003-02-04 | オリンパス光学工業株式会社 | Lens system eccentricity measuring apparatus and eccentricity measuring method |
| JP3725817B2 (en) * | 2001-11-20 | 2005-12-14 | オリンパス株式会社 | Aspheric lens decentration measuring method and decentration measuring apparatus |
| JP4474150B2 (en) * | 2003-11-28 | 2010-06-02 | キヤノン株式会社 | Eccentricity measurement method |
| CN102175189B (en) * | 2011-02-14 | 2012-09-05 | 中国科学院光电技术研究所 | Central error measuring system of dual beam interferometer |
| CN108981593B (en) * | 2018-07-26 | 2020-04-28 | 西安工业大学 | Laser triangulation lens center thickness measuring device and measuring method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0299841A (en) * | 1988-10-07 | 1990-04-11 | Olympus Optical Co Ltd | Eccentricity measuring apparatus for lens system |
| CN104061867A (en) * | 2014-07-09 | 2014-09-24 | 西安工业大学 | Spectrum confocal type measurement method and device for thickness of center of lens |
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