CN114323582A - Wavefront test method and device with platform lens - Google Patents
Wavefront test method and device with platform lens Download PDFInfo
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Abstract
The invention relates to the technical field of lens detection, in particular to a wavefront testing method and a device for a lens with a platform, which comprises the following steps: the method comprises the following steps: and (3) interference light path testing: forming interference fringes by the interferometer host; step two: correcting a transmitting mirror: enabling the interferometer host and the plane mirror to be in a parallel state; step three: lens installation: installing an interferometer objective lens and a test fixture; step four: lens detection: and opening the interferometer host for detection. The invention adjusts the pitching inclination angle of the plane reflector, adjusts the stripe to a zero-order state, enables the host of the interferometer and the plane reflector to be in a parallel state, then installs the objective lens of the interferometer, puts the test lens in a test fixture horizontally, puts the test fixture horizontally on the plane reflector, does not generate inclination between the test lens and the test fixture, tightly attaches the test fixture and the reflector, does not introduce inclination caused by incomplete installation and adjustment, and solves the problem of rapid measurement of wavefront of the lens with the platform.
Description
Technical Field
The invention relates to a method and a device for testing the wave front of a lens, in particular to a method and a device for testing the wave front of a lens with a platform, belonging to the technical field of lens detection.
Background
The wavefront testing device of the platform lens is mainly applied to wavefront testing with the platform optical element, the traditional device adopts a vertical interference light path to test, platform positioning is utilized, the device is more convenient than a traditional horizontal interference light path, the device is suitable for large-batch rapid measurement application, the traditional horizontal interference light path is more difficult to debug, a large system debugging error is easily introduced, the vertical lens platform can be effectively utilized to position, complex adjustment is not needed, and the inclination error caused by the fact that the device cannot be adjusted is effectively avoided.
In addition, in the horizontal interference test structure, the lens is positioned by the column body and is easy to roll, and the lens can be horizontally arranged in the test fixture by the gravity due to the vertical test structure.
Therefore, there is a need for an improved method and apparatus for wavefront testing of a lens to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to provide a wavefront test method and a device with a platform lens, which are characterized in that the pitching inclination angle of a plane mirror is adjusted, stripes are adjusted to a zero-order state, so that a host of an interferometer and the plane mirror are in a parallel state, then an objective lens of the interferometer is installed, a test lens is horizontally placed in a test fixture, then the test fixture is horizontally placed on the plane mirror, no inclination is generated between the test lens and the test fixture, the test fixture and the plane mirror are tightly attached, no inclination is generated, no inclination is introduced due to the fact that installation and adjustment are not in place in the whole system, and the problem of rapid measurement of the wavefront with the platform lens is solved.
In order to achieve the purpose, the invention adopts the main technical scheme that:
a wavefront test method with a platform lens comprises the following steps:
the method comprises the following steps: and (3) interference light path testing: taking down the interferometer objective lens, and taking away the test fixture and the test lens, so that light rays emitted by the interferometer host directly return through the reflection of the reflector to form interference fringes;
step two: correcting a transmitting mirror: adjusting the pitching inclination angle of the plane mirror through a correction nut, and adjusting the fringes to a zero-order state, which indicates that the interferometer host and the plane mirror are in a parallel state;
step three: lens installation: then, an interferometer objective lens is installed, the test lens is horizontally placed on the test fixture, at the moment, the lens platform is attached to the test fixture platform, and the lower surface of the test fixture is attached to the reflector;
step four: lens detection: opening the interferometer host to detect the test lens;
preferably, the first step is specifically: leveling the plane reflector through interference fringes, or checking the horizontal state of the plane reflector through a leveling box on the plane reflector, and leveling the plane reflector through a correcting nut;
through the technical scheme, when in test, an interferometer objective lens is not required to be installed, the test fixture and the test lens are removed, light rays emitted by a host machine of the interferometer directly return through a reflection original path of the plane reflector to form interference fringes, at the moment, the pitching inclination angle of the plane reflector is adjusted, the fringes are adjusted to a zero-order state, the host machine of the interferometer and the plane reflector are in a parallel state, then the interferometer objective lens is installed, the test lens is horizontally placed in the test fixture, the test fixture is horizontally placed on the plane reflector, at the moment, the lens platform is attached to the test fixture platform, the lower surface of the test fixture is attached to the plane reflector, no inclination is generated between the test lens and the test fixture, meanwhile, the test fixture is closely attached to the reference reflector, no inclination is generated, and no inclination is introduced due to the fact that the installation and the adjustment are not in place, the problem of take platform lens wavefront rapid survey is solved, solve the lens simultaneously because the slope error problem that the installation can not adjust the position and introduce in the test procedure.
A method of mounting a lens with a platform, comprising the steps of:
firstly, moving the space between the lower clamp mechanisms through a second transmission nut on the lower movable clamp;
the distance between the upper-layer clamp mechanisms is adjusted through a first transmission nut on the upper-layer clamp mechanisms;
finally, placing the test lens on a test fixture;
wherein, test fixture and plane mirror swing joint, test fixture place the side of going up of plane mirror.
The device for testing the wave front with the platform lens comprises an interferometer host and a test fixture arranged right below the interferometer host, wherein a plane reflector is arranged on the bottom side surface of the test fixture, the test lens is arranged on the test fixture, and the test lens is arranged right below an objective lens of the interferometer;
preferably, the test fixture includes upper anchor clamps mechanism and lower floor's anchor clamps mechanism, upper anchor clamps mechanism sets up lower floor's anchor clamps mechanism's top, lower floor's anchor clamps mechanism includes lower floor's mounting fixture and lower floor's movable fixture, lower floor's mounting fixture with lower floor's movable fixture is through the propulsion hub connection, the propulsion hub runs through lower floor's movable fixture is connected with second drive nut, second drive nut is used for fixing lower floor's mounting fixture with interval between the lower floor's movable fixture, be provided with the direction location axle on the mounting fixture of lower floor, the direction location axle runs through lower floor's movable fixture and with lower floor's movable fixture sliding connection.
Preferably, upper anchor clamps mechanism includes upper mounting fixture and upper movable anchor clamps, upper mounting fixture fixes the side of going up of lower floor's mounting fixture, upper movable anchor clamps slide to set up the side of going up of lower floor's movable anchor clamps, the inside rotation of upper movable anchor clamps is provided with the transfer line, be provided with first drive nut and driving cog on the transfer line, first drive nut sets up the outside of upper movable anchor clamps, the driving cog sets up the inside of upper movable anchor clamps, the side of going up of lower floor's movable anchor clamps is provided with the drive tooth's socket, the driving cog with the meshing of drive tooth's socket is connected, first drive nut is used for the horizontal migration upper movable anchor clamps.
According to the technical scheme, the test fixture comprises an upper fixture mechanism and a lower fixture mechanism, the upper fixture mechanism comprises an upper fixed fixture and an upper movable fixture, a transmission rod is arranged inside the upper movable fixture, a first transmission nut on the transmission rod is rotated to drive a transmission tooth on the transmission rod to rotate, and the transmission tooth drives the whole upper movable fixture to push on a driving tooth groove of the lower fixture mechanism in the rotating process, so that the distance between the upper fixed fixture and the upper movable fixture can be reduced, and the purpose of quick adjustment is achieved;
meanwhile, a propelling shaft is connected between the lower-layer fixed clamp and the lower-layer movable clamp, penetrates through the lower-layer movable clamp and is connected with a second transmission nut, so that the distance between the lower-layer fixed clamp and the lower-layer movable clamp can be adjusted through the second transmission nut, and a guiding and positioning shaft on the lower-layer fixed clamp penetrates through the lower-layer movable clamp and is in sliding connection with the lower-layer movable clamp, so that the guiding and supporting effects can be achieved, the lower-layer fixed clamp is prevented from deflecting in the moving process, and the mounting efficiency is improved;
the distance between upper stationary fixture and the upper movable fixture can be adjusted, and the distance between lower stationary fixture and the lower movable fixture can also be adjusted, so that the requirement for detecting test lenses with different diameters can be met, and the use range and the use flexibility can be greatly improved.
Preferably, a reflector pivot is fixedly arranged on the bottom side surface of the plane reflector, a connecting rod joint is fixedly arranged on one side of the reflector pivot, and a correcting nut is rotatably connected onto the connecting rod joint through a connecting rod;
preferably, the connecting rod is provided with driving grains, a correcting nut is meshed with the driving grains and is used for vertically moving the connecting rod, and the plane mirror horizontally rotates around the reflector fulcrum;
through above technical scheme, the bottom of plane mirror is provided with the reflector fulcrum, therefore the plane mirror can take place horizontally rotation around the reflector fulcrum, in the test phase, in case the plane mirror takes place to deflect or when plane mirror and interferometer host computer nonparallel, through adjusting the correction nut, with connecting rod rebound when the correction nut rotates, the connecting rod on the connecting rod drives the plane mirror connects and makes the plane mirror take place to deflect, until plane mirror and interferometer host computer level, moreover, the steam generator is simple in structure, promote the convenience of adjusting.
Preferably, one end of the plane reflector is connected with a leveling box, a leveling box mercury bin is arranged inside the leveling box, mercury is filled inside the leveling box mercury bin, second electrical connectors which are symmetrically distributed are arranged on the upper portion of the inner side face of the leveling box mercury bin, a first electrical connector is fixedly arranged in the middle of the bottom of the inner side face of the leveling box mercury bin, and the first electrical connector is connected with a buzzer through a lead;
through above technical scheme, the inside of levelling tank is provided with mercury, and be provided with first electrical joint in the bottom in levelling tank mercury storehouse, the upper portion in levelling tank mercury storehouse is provided with the second electrical joint, be similar to single-pole double-throw switch, when the plane mirror is to a slope, the inside mercury in levelling tank mercury storehouse flows to one side that corresponds, make first electrical joint pass through the second electrical joint electric connection of mercury and one side, then the alarm takes place for the bee calling organ of one side, when the slope takes place for the opposite side of the same reason, the alarm takes place for the siren of opposite side, can detect at any time, promote the accuracy that detects.
Preferably, the upper fixing clamp with the upper anchor clamps between the upper activity anchor clamps have been seted up upper anchor clamps lens groove, lower floor's fixing clamp with lower floor's anchor clamps lens groove has been seted up on the activity anchor clamps of lower floor, upper anchor clamps lens groove with lower floor's anchor clamps lens groove corresponds, just upper anchor clamps lens groove with the inside in lower floor's anchor clamps lens groove is all fixed and is provided with the foam-rubber cushion, and upper anchor clamps lens groove and lower floor's anchor clamps lens groove can all be adjusted, simple structure, and it is swift convenient to use, and the foam-rubber cushion both can increase the friction with test lens, can prevent again that test lens from being scraped the flower to ensure test lens's precision.
The invention has at least the following beneficial effects:
1. the pitching inclination angle of the plane mirror is adjusted, the fringes are adjusted to a zero-order state, the interferometer host and the plane mirror are enabled to be in a parallel state, then the interferometer objective is installed, the test lens is horizontally placed in the test fixture, the test fixture is horizontally placed on the plane mirror, the test lens and the test fixture cannot be inclined, the test fixture and the mirror are tightly attached, the inclination cannot be generated, the inclination caused by the fact that the installation and the adjustment are not in place cannot be introduced into the whole system, and the problem of rapid measurement of the wavefront of the lens with the platform is solved.
2. The inside of levelling tank is provided with mercury, and be provided with first electrical joint in the bottom in levelling tank mercury storehouse, the upper portion in levelling tank mercury storehouse is provided with the second electrical joint, be similar to single-pole double-throw switch, when the plane mirror when taking place the slope to one, the inside mercury in levelling tank mercury storehouse flows to one side that corresponds, make first electrical joint pass through the second electrical joint electric connection of mercury and one side, then the alarm takes place for the bee calling organ of one side, when the slope takes place for the opposite side of the same reason, the alarm takes place for the siren of opposite side, can detect at any time, promote the accuracy that detects.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
FIG. 1 is a front view of the present invention;
FIG. 2 is a partial cross-sectional view of the lower clamp mechanism of the present invention;
FIG. 3 is a partial cross-sectional view of the upper clamp mechanism of the present invention;
FIG. 4 is a bottom perspective view of the flat reflector of the present invention;
FIG. 5 is a view of the structure of the lower fixture of the present invention;
FIG. 6 is a cross-sectional view of a leveling box of the present invention;
fig. 7 is a circuit diagram of the present invention.
In the figure, 1-interferometer main unit, 2-interferometer objective lens, 3-upper fixture mechanism, 301-upper fixture, 302-upper movable fixture, 303-upper fixture lens groove, 4-lower fixture mechanism, 401-lower fixed fixture, 402-lower movable fixture, 403-guiding positioning shaft, 404-propulsion shaft, 405-lower fixture lens groove, 406-driving tooth groove, 5-plane mirror, 501-connecting rod joint, 6-first electrical joint, 601-second electrical joint, 7-connecting rod, 701-driving line, 8-leveling box, 801-leveling box silver bin, 9-correcting nut, 10-reflector fulcrum, 11-testing lens, 12-mercury, 13-driving rod, 14-transmission teeth, 15-first transmission nut, 16-second transmission nut, 17-test fixture and 18-buzzer.
Detailed Description
Embodiments of the present application will be described in detail with reference to the drawings and examples, so that how to implement technical means to solve technical problems and achieve technical effects of the present application can be fully understood and implemented.
As shown in fig. 1 to fig. 7, the method for testing a wavefront with a stage lens provided in this embodiment includes the following steps:
the method comprises the following steps: and (3) interference light path testing: taking down the interferometer objective lens 2, and taking away the test fixture 17 and the test lens 11, so that the light emitted by the interferometer host 1 directly returns through the reflection of the reflector to form interference fringes;
step two: correcting a transmitting mirror: the pitching inclination angle of the plane mirror 5 is adjusted through the correcting nut 9, and the fringes are adjusted to a zero-order state, so that the situation that the interferometer host 1 and the plane mirror 5 are in a parallel state is shown;
step three: lens installation: then, installing an interferometer objective lens 2, horizontally placing a test lens 11 on a test fixture 17, at the moment, attaching a lens platform to a test fixture platform, and attaching the lower surface of the test fixture to a reflector;
step four: lens detection: the interferometer host 1 is opened to detect the test lens 11;
leveling the plane reflector 5 through interference fringes, or checking the horizontal state of the plane reflector 5 through a leveling box 8 on the plane reflector 5, and leveling the plane reflector 5 through a correcting nut 9;
when in test, the interferometer objective lens 2 is not needed to be installed, the test fixture 17 and the test lens 11 are removed, the light emitted by the interferometer host 1 directly returns through the reflection path of the plane reflector 5 to form interference fringes, at the moment, the pitching inclination angle of the plane reflector is adjusted, the fringes are adjusted to a zero-order state, the interferometer host 1 and the plane reflector 5 are in a parallel state, then the interferometer objective lens 2 is installed, the test lens 11 is horizontally placed in the test fixture 17, then the test fixture 17 is horizontally placed on the plane reflector 5, at the moment, the lens platform is attached to the test fixture platform, the lower surface of the test fixture 17 is attached to the plane reflector 5, the test lens 11 and the test fixture 17 cannot be inclined, meanwhile, the test fixture 17 is tightly attached to the reference reflector 5, the inclination cannot be generated, and the inclination caused by the fact that the installation and the adjustment are not in place is introduced into the whole system, the problem of take platform lens wavefront rapid survey is solved, solve the lens simultaneously because the slope error problem that the installation can not adjust the position and introduce in the test procedure.
A method of mounting a lens with a platform, comprising the steps of:
firstly, moving the distance between the lower clamp mechanisms 4 through the second transmission nut 16 on the lower movable clamp 402;
the distance between the upper clamp mechanisms 3 is adjusted through the first transmission nut 15 on the upper clamp mechanism 3;
finally the test lens 11 is placed on the test fixture 17;
wherein, the test fixture 17 is movably connected with the plane reflector 5, and the test fixture 17 is arranged on the upper side surface of the plane reflector 5.
A device for testing the wave front of a lens with a platform comprises an interferometer host 1 and a test fixture 17 arranged right below the interferometer host 1, wherein a plane reflector 5 is arranged on the bottom side surface of the test fixture 17, a test lens 11 is arranged on the test fixture 17, the test lens 11 is arranged right below an interferometer objective lens 2, the test fixture 17 comprises an upper fixture mechanism 3 and a lower fixture mechanism 4, and the upper fixture mechanism 3 is arranged above the lower fixture mechanism 4;
the lower-layer clamp mechanism 4 comprises a lower-layer fixed clamp 401 and a lower-layer movable clamp 402, the lower-layer fixed clamp 401 and the lower-layer movable clamp 402 are connected through a propulsion shaft 404, the propulsion shaft 404 penetrates through the lower-layer movable clamp 402 and is connected with a second transmission nut 16, the second transmission nut 16 is used for fixing the distance between the lower-layer fixed clamp 401 and the lower-layer movable clamp 402, a guide positioning shaft 403 is arranged on the lower-layer fixed clamp 401, and the guide positioning shaft 403 penetrates through the lower-layer movable clamp 402 and is in sliding connection with the lower-layer movable clamp 402;
The test fixture 17 comprises an upper fixture mechanism 3 and a lower fixture mechanism 4, the upper fixture mechanism 3 comprises an upper fixed fixture 301 and an upper movable fixture 302 at the same time, a transmission rod 13 is arranged inside the upper movable fixture 302, a first transmission nut 15 on the transmission rod 13 is rotated to drive a transmission tooth 14 on the transmission rod 13 to rotate, and the transmission tooth 14 drives the whole upper movable fixture 302 to push on a driving tooth socket 406 of the lower fixture mechanism 4 in the rotating process, so that the distance between the upper fixed fixture 301 and the upper movable fixture 302 can be reduced, and the purpose of quick adjustment is achieved;
meanwhile, a propulsion shaft 404 is connected between the lower fixed clamp 401 and the lower movable clamp 402, the propulsion shaft 404 penetrates through the lower movable clamp 402 and is connected with a second transmission nut 16, so that the distance between the lower fixed clamp 401 and the lower movable clamp 402 can be adjusted through the second transmission nut 16, and a guide positioning shaft 403 on the lower fixed clamp 401 penetrates through the lower movable clamp 402 and is in sliding connection with the lower movable clamp 402, so that the guide and support effects can be achieved, the lower fixed clamp 401 is prevented from deflecting in the moving process, and the installation efficiency is improved;
the distance between the upper layer fixing clamp 301 and the upper layer movable clamp 302 can be adjusted, and the distance between the lower layer fixing clamp 401 and the lower layer movable clamp 402 can also be adjusted, so that the requirement for detecting the test lenses 11 with different diameters can be met, and the use range and the use flexibility are greatly improved.
In this embodiment, as shown in fig. 4, a mirror pivot 10 is fixedly disposed on a bottom side surface of the plane mirror 5, a connecting rod joint 501 is fixedly disposed on one side of the mirror pivot 10, a correction nut 9 is rotatably connected to the connecting rod joint 501 through a connecting rod 7, a driving pattern 701 is disposed on the connecting rod 7, the correction nut 9 is engaged with the driving pattern 701, the correction nut 9 is used for performing vertical movement on the connecting rod 7, and the plane mirror 5 horizontally rotates around the mirror pivot 10.
The bottom of the plane reflector 5 is provided with a reflector fulcrum 10, so that the plane reflector 5 can horizontally rotate around the reflector fulcrum 10, in a testing stage, once the plane reflector 5 deflects or the plane reflector 5 is not parallel to the interferometer host 1, the connecting rod 7 moves upwards when the correcting nut 9 rotates by adjusting the correcting nut 9, and the connecting rod 7 drives the connecting rod joint 501 on the plane reflector 5 to deflect the plane reflector 5 until the plane reflector 5 is horizontal to the interferometer host 1;
in this embodiment, as shown in fig. 6, a leveling box 8 is connected to one end of the plane mirror 5, a leveling box mercury bin 801 is opened inside the leveling box 8, mercury 12 is filled inside the leveling box mercury bin 801, second electrical connectors 601 symmetrically distributed are arranged on the upper portion of the inner side surface of the leveling box mercury bin 801, a first electrical connector 6 is fixedly arranged at the middle position of the bottom of the inner side surface of the leveling box mercury bin 801, and a buzzer 18 is connected to the first electrical connector 6 through a lead.
The inside of the leveling box 8 is provided with mercury 12, the bottom of the leveling box mercury bin 801 is provided with a first electrical connector 6, the upper portion of the leveling box mercury bin 801 is provided with a second electrical connector 601, similar to a single-pole double-throw switch, when the plane reflector 5 inclines towards one side, the mercury 12 inside the leveling box mercury bin 801 flows towards the corresponding side, the first electrical connector 6 is electrically connected with the second electrical connector 601 on one side through the mercury 12, then the buzzer 18 on one side gives an alarm, and similarly, when the other side inclines, the alarm on the other side gives an alarm, so that detection can be carried out at any time, and the detection accuracy is improved.
An upper clamp lens groove 303 is formed between the upper fixing clamp 301 and the upper movable clamp 302, a lower clamp lens groove 405 is formed on the lower fixing clamp 401 and the lower movable clamp 402, the upper clamp lens groove 303 corresponds to the lower clamp lens groove 405, and sponge pads are fixedly arranged inside the upper clamp lens groove 303 and the lower clamp lens groove 405.
The upper clamp lens groove 303 and the lower clamp lens groove 405 can be adjusted, the structure is simple, the use is fast and convenient, the sponge cushion can increase the friction with the test lens 11, and the test lens 11 can be prevented from being scraped to ensure the precision of the test lens 11.
As shown in fig. 1 to fig. 6, the principle of the wavefront measuring method and apparatus with a stage lens provided in this embodiment is as follows: the light emitted by the interferometer host can directly return through the plane reflector reflection original path to form interference fringes, at the moment, the pitching inclination angle of the plane reflector is adjusted, the fringes are adjusted to a zero-order state, the situation that the interference fringes are in a parallel state between the interferometer host and the plane reflector is indicated, then an interferometer objective lens is installed, a test lens is horizontally placed in a test fixture, then the test fixture is horizontally placed on the plane reflector, at the moment, a lens platform is attached to a test fixture platform, the lower surface of the test fixture is attached to the plane reflector, no inclination can be generated between the test lens and the test fixture, meanwhile, the test fixture is closely attached to a reference reflector, no inclination can be generated, no inclination is introduced due to the fact that installation and adjustment are not in place in the whole system, and the problem of rapid measurement of the wavefront of the lens with the platform is solved.
As used in the specification and in the claims, certain terms are used to refer to particular components. As one skilled in the art will appreciate, manufacturers may refer to a component by different names. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. "substantially" means within an acceptable error range, and a person skilled in the art can solve the technical problem within a certain error range to achieve the technical effect basically.
It is noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a good or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such good or system. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of additional like elements in the article or system in which the element is included.
The foregoing description shows and describes several preferred embodiments of the invention, but as aforementioned, it is to be understood that the invention is not limited to the forms disclosed herein, but is not to be construed as excluding other embodiments and is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A wavefront test method of a lens with a platform is characterized by comprising the following steps:
the method comprises the following steps: and (3) interference light path testing: taking down the interferometer objective lens (2), and taking away the test fixture (17) and the test lens (11), so that light rays emitted by the interferometer host (1) directly return through the reflection mirror to form interference fringes;
step two: correcting a transmitting mirror: the pitching inclination angle of the plane mirror (5) is adjusted through the correcting nut (9), and the fringes are adjusted to a zero-order state, so that the situation that the interferometer host (1) and the plane mirror (5) are in a parallel state is shown;
step three: lens installation: then an interferometer objective lens (2) is installed, a test lens (11) is flatly placed on a test fixture (17), at the moment, a lens platform is attached to a test fixture platform, and the lower surface of the test fixture is attached to a reflector;
step four: lens detection: the interferometer host (1) is opened to detect the test lens (11).
2. The method of claim 1, wherein the wavefront testing with the platform lens comprises: the first step is specifically as follows: the plane reflector (5) is leveled through interference fringes, or the horizontal state of the plane reflector (5) is checked through a leveling box (8) on the plane reflector (5), and the plane reflector (5) is leveled through a correcting nut (9).
3. A method of mounting a lens with a platform, comprising the steps of:
firstly, moving the distance between the lower clamp mechanisms (4) through a second transmission nut (16) on the lower movable clamp (402);
the distance between the upper-layer clamp mechanisms (3) is adjusted through a first transmission nut (15) on the upper-layer clamp mechanism (3);
finally, placing the test lens (11) on a test fixture (17);
wherein, the test fixture (17) is movably connected with the plane reflector (5), and the test fixture (17) is arranged on the upper side surface of the plane reflector (5).
4. The utility model provides a take device of wave front test of platform lens which characterized in that: the interferometer comprises an interferometer host (1) and a test fixture (17) arranged right below the interferometer host (1), wherein the plane reflector (5) is arranged on the bottom side surface of the test fixture (17);
the test lens (11) is arranged on the test fixture (17), and the test lens (11) is arranged right below the interferometer objective lens (2).
5. The apparatus for wavefront measurement with stage lens of claim 4, wherein: the test fixture (17) comprises an upper fixture mechanism (3) and a lower fixture mechanism (4), and the upper fixture mechanism (3) is arranged above the lower fixture mechanism (4);
the lower-layer clamp mechanism (4) comprises a lower-layer fixed clamp (401) and a lower-layer movable clamp (402), the lower-layer fixed clamp (401) is connected with the lower-layer movable clamp (402) through a propulsion shaft (404), the propulsion shaft (404) penetrates through the lower-layer movable clamp (402) and is connected with a second transmission nut (16), and the second transmission nut (16) is used for fixing the distance between the lower-layer fixed clamp (401) and the lower-layer movable clamp (402);
the lower-layer fixed clamp (401) is provided with a guide positioning shaft (403), and the guide positioning shaft (403) penetrates through the lower-layer movable clamp (402) and is in sliding connection with the lower-layer movable clamp (402).
6. The apparatus for wavefront measurement with stage lens of claim 4, wherein: the upper-layer clamp mechanism (3) comprises an upper-layer fixed clamp (301) and an upper-layer movable clamp (302), the upper-layer fixed clamp (301) is fixed on the upper side surface of the lower-layer fixed clamp (401), and the upper-layer movable clamp (302) is arranged on the upper side surface of the lower-layer movable clamp (402) in a sliding manner;
a transmission rod (13) is rotatably arranged in the upper-layer movable clamp (302), a first transmission nut (15) and transmission teeth (14) are arranged on the transmission rod (13), the first transmission nut (15) is arranged outside the upper-layer movable clamp (302), and the transmission teeth (14) are arranged in the upper-layer movable clamp (302);
the upper side surface of the lower movable clamp (402) is provided with a driving toothed groove (406), the transmission teeth (14) are meshed with the driving toothed groove (406), and the first transmission nut (15) is used for horizontally moving the upper movable clamp (302).
7. The apparatus for wavefront measurement with stage lens of claim 4, wherein: the plane reflector is characterized in that a reflector fulcrum (10) is fixedly arranged on the bottom side surface of the plane reflector (5), a connecting rod joint (501) is fixedly arranged on one side of the reflector fulcrum (10), and a correcting nut (9) is rotatably connected onto the connecting rod joint (501) through a connecting rod (7).
8. The apparatus for wavefront measurement with stage lens of claim 4, wherein: the plane mirror is characterized in that a driving pattern (701) is arranged on the connecting rod (7), a correcting nut (9) is meshed with the driving pattern (701) and connected with the driving pattern (701), the correcting nut (9) is used for enabling the connecting rod (7) to move vertically, and the plane mirror (5) horizontally rotates around the reflector fulcrum (10).
9. The apparatus for wavefront measurement with stage lens of claim 4, wherein: one end of the plane reflector (5) is connected with a leveling box (8), a leveling box mercury bin (801) is arranged inside the leveling box (8), and mercury (12) is filled inside the leveling box mercury bin (801);
the upper portion of the inner side face of the leveling box mercury bin (801) is provided with second electrical connectors (601) which are symmetrically distributed, a first electrical connector (6) is fixedly arranged at the middle position of the bottom of the inner side face of the leveling box mercury bin (801), and the first electrical connector (6) is connected with a buzzer (18) through a lead.
10. The apparatus for wavefront measurement with stage lens of claim 4, wherein: upper strata mounting fixture (301) with upper strata activity has been seted up between anchor clamps (302) upper anchor clamps lens groove (303), lower floor mounting fixture (401) with lower floor has been seted up on activity anchor clamps (402) of lower floor anchor clamps lens groove (405), upper anchor clamps lens groove (303) with lower floor anchor clamps lens groove (405) are corresponding, just upper anchor clamps lens groove (303) with the inside of lower floor anchor clamps lens groove (405) is all fixed and is provided with the foam-rubber cushion.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111584383.8A CN114323582A (en) | 2021-12-22 | 2021-12-22 | Wavefront test method and device with platform lens |
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| CN202111584383.8A CN114323582A (en) | 2021-12-22 | 2021-12-22 | Wavefront test method and device with platform lens |
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| CN114323582A true CN114323582A (en) | 2022-04-12 |
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| CN202111584383.8A Pending CN114323582A (en) | 2021-12-22 | 2021-12-22 | Wavefront test method and device with platform lens |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115166970A (en) * | 2022-07-27 | 2022-10-11 | 茂莱（南京）仪器有限公司 | Method for precisely adjusting wavefront of high-reflection system by using interferometer |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5048954A (en) * | 1989-07-07 | 1991-09-17 | Miradco | Laser-based wheel alignment system |
| CN1932432A (en) * | 2005-09-15 | 2007-03-21 | 富士能株式会社 | Light wave interferometer |
| AU2011254053A1 (en) * | 2006-02-27 | 2012-01-19 | Signify Holding B.V. | An improved LED device for wide beam generation |
| CN104374548A (en) * | 2014-11-17 | 2015-02-25 | 中国科学院光电技术研究所 | Interference measurement method for refractive index of lens |
| CN111443438A (en) * | 2020-04-13 | 2020-07-24 | 中南大学 | Lens coupling equipment based on voice coil motor drive |
| CN113203553A (en) * | 2021-04-22 | 2021-08-03 | 西安工业大学 | Lens center error measuring system and measuring method |
-
2021
- 2021-12-22 CN CN202111584383.8A patent/CN114323582A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5048954A (en) * | 1989-07-07 | 1991-09-17 | Miradco | Laser-based wheel alignment system |
| CN1932432A (en) * | 2005-09-15 | 2007-03-21 | 富士能株式会社 | Light wave interferometer |
| AU2011254053A1 (en) * | 2006-02-27 | 2012-01-19 | Signify Holding B.V. | An improved LED device for wide beam generation |
| CN104374548A (en) * | 2014-11-17 | 2015-02-25 | 中国科学院光电技术研究所 | Interference measurement method for refractive index of lens |
| CN111443438A (en) * | 2020-04-13 | 2020-07-24 | 中南大学 | Lens coupling equipment based on voice coil motor drive |
| CN113203553A (en) * | 2021-04-22 | 2021-08-03 | 西安工业大学 | Lens center error measuring system and measuring method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115166970A (en) * | 2022-07-27 | 2022-10-11 | 茂莱（南京）仪器有限公司 | Method for precisely adjusting wavefront of high-reflection system by using interferometer |
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