CN1932432A - Light wave interferometer - Google Patents
Light wave interferometer Download PDFInfo
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- CN1932432A CN1932432A CN 200610153659 CN200610153659A CN1932432A CN 1932432 A CN1932432 A CN 1932432A CN 200610153659 CN200610153659 CN 200610153659 CN 200610153659 A CN200610153659 A CN 200610153659A CN 1932432 A CN1932432 A CN 1932432A
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Abstract
To provide a light wave interference device, capable of adjusting automatically parallel deviation between the optical axis of an inspection lens and the optical axis of a reference spherical reflecting mirror, and automating light wave interference measurement of the inspection lens, in the light wave interference device equipped with a positioning means of the inspection lens. A bright spot, based on reflected light of measuring light flux from the surface of the inspection lens (1), is observed, and the image position of the bright spot on an observation screen is operated, and a moving amount of the reference spherical reflecting mirror (7) required for moving the measured bright point image to a prescribed reference position on the observation screen is calculated. Driving the control of the reference spherical reflecting mirror (7) is performed based on the operated moving amount, and thereby the deviation in parallelism between the optical axis of the inspection lens (1) and the optical axis of the reference spherical reflecting mirror (7) is adjusted automatically on the observation screen for the light wave interference measurement.
Description
Technical field
The present invention relates to possess the light wave interferometer that the transmission Wavefront-measuring of the locating device of detected lens is used, particularly relate in mensuration and being equipped under the situation of the corrugated aberrations such as optical pickup lens on the recording/reproducing apparatus of optical recording media, can regulate the light wave interferometer of skew of the optical axis of the optical axis of these detected lens and benchmark spherical reflector automatically.
Background technology
The light wave interferometer that the at present known transmission Wavefront-measuring that the corrugated aberration of measuring various lens, for example optical pickup lens etc. arranged is used.
In this light wave interferometer, detected lens are carried anchor clamps, with roughly moved on the direction of quadrature by the optical axis direction of the detected lens of this fixture support, carry out the loading and the unloading of these detected lens, after detected lens carry on the anchor clamps to this with detected lens configuration, by carrying out the load operation of detected lens, detected lens are placed regular observation place.
Summary configuration when Figure 17 (A) expression is carried out the interference of light and measured the detected lens 100 that are made of the biconvex optical pickup lens that place regular observation place by such load operation.
That is, the mensuration of the instrument of self-interference in the future main body is divided into two classes with datum plate 102 irradiations of parallel beam to interferometer on this reference field.One side constitutes reference light by the reference field reflection, and this reference field of the opposing party's transmission shines on the detected lens 100 that are supported on the lens lift-launch anchor clamps 104.The mensuration light beam that shines the opposing party on these detected lens 100 is temporarily focused on by these detected lens 100, disperses once more afterwards, to the reflecting surface irradiation of benchmark spherical reflector 106.
But, the mensuration light beam that penetrates from detected lens 100,, then can not carry out the mensuration of the interference of light of detected lens 100 if can not be consistent with the ejaculation path with respect to the incident path of benchmark spherical reflector 106.Therefore, shown in Figure 17 (A), have halfway under the situation of focus point at the mensuration light beam that penetrates from detected lens 100, the back light that returns from benchmark spherical reflector 106 oppositely advances on this incident path, therefore, need make benchmark sphere centre (centre of sphere) 108 strict conformances of this focus point and benchmark spherical reflector 106.
But, in fact detected lens 100 are configured in lens and carry anchor clamps 104 enterprising Xingqi load operations, under the state of the observation place that detected lens 100 is placed regulation, the optical axis of detected lens 100 tilts with respect to the vertical direction of the reference field of datum plate, in this case, regulate the degree of tilt of detected lens 100, make the optical axis of detected lens 100 vertical with respect to the reference field of datum plate.
But when regulating the degree of tilt of detected lens 100 like this, the optical axis of the optical axis of common detected lens 100 and benchmark spherical reflector 106 produces parallel offset.Thus, shown in Figure 17 (B), the mensuration beams focusing point that penetrates from detected lens 100 produces skew with respect to the benchmark sphere centre (centre of sphere) 108 of benchmark spherical reflector 106, and its result is difficult to carry out the interference of light mensuration of detected lens 100.More than if so usually parallel offset produces about for example tens of μ m, interference fringe (amplify among Figure 17 (B) and described above-mentioned parallel offset) does not then appear on sightingpiston.
That is the small parallel offset of the optical axis that produces when, suppress regulating the degree of tilt of detected lens 100 is big problem when carrying out that the interference of light is measured.
In addition, be provided with under the situation of portion at the lens that detected lens 100 placed lens carry anchor clamps 104, owing to produce loosening a little, therefore, even so also can between the optical axis of the optical axis of detected lens 100 and benchmark spherical reflector 106, produce parallel offset, produce problem same as described above.
Thus, when lens carry on the anchor clamps 104 the detected lens 100 of configuration, fixing at present for it is carried on anchor clamps 104 at these lens, expend time in and be fixed on position accurately reliably.
In addition, remember down disclose in the Patent Document 1 below such technology, promptly, in interferometer, for carrying out the aligning of detected body and datum plate, and the transmission condenser different with the optical system of original interferometer will form the some picture from the reflected light optically focused of these detected bodies and datum plate on the line sensor of special use.
Patent Document 1: the spy opens flat 7-83609 communique
But, as mentioned above, on carrying anchor clamps 104, fixed reliably under the situation of detected lens 100 by lens, and the replacing of carrying out detected lens 100 by the automated job that has used robot etc. is extremely difficult.
In manufacturing processes such as optical pickup lens, the task of top priority is to establish the system that lens can be produced in batches at a high speed, but at present, as mentioned above, the part of interference of light measurement operation of checking the corrugated aberration of these detected lens 100 needs spended time manually to operate, to the interference of light of detected lens is measured full-automatic require extremely strong.
In addition, technology according to above-mentioned communique record, except that the formation of interferometer commonly used, need above-mentioned collector lens and line sensor and the half mirror that is used for light path is cut apart in this condenser direction etc., thereby cause device complicated, maximize.
Summary of the invention
The present invention In view of the foregoing makes, its purpose is, a kind of light wave interferometer is provided, it has the locating device of detected lens, wherein, the parallel offset of the optical axis of the optical axis of detected lens and benchmark spherical reflector can be regulated automatically, the light wave interference detection full-automation of detected lens can be made, but and the simplification of implement device and densification.
For solving above-mentioned problem, the invention provides light wave interferometer, it will be divided into two classes with light beam from the mensuration of light source, make the detected lens of side's transmission after, reflect by benchmark sphere reflection unit, these detected lens of transmission and form detected light again, make the opposing party form reference light, observe the interference fringe that produces by this detected light and this benchmark interference of light, measure the corrugated aberration of these detected lens based on this observations at reference field, it is characterized in that
Possess: regulate the detected body locating device that the position of the optical axis of described benchmark sphere reflection unit and this detected lens concerns,
This detected body locating device possesses: detected body supporting device, and it supports this detected body, makes this detected body and uses the light beam opposite from the mensuration of described light wave interferometer;
The described mensuration of this detected body of transmission is used the benchmark sphere reflection unit of beam reflection;
Can with this benchmark sphere reflection unit with its optical axis direction plane orthogonal in 2 mutually orthogonal direction of principal axis on the mobile regulating device of move regulating;
Observation is based on from the described mensuration on the surface of the described detected lens cursor with the catoptrical intensity distributions of light beam, and computing is observed the cursor image position of the image position of this cursor on the picture and measured arithmetic unit;
Computing makes by this cursor image position and measures the benchmark sphere amount of movement arithmetic unit of amount of movement that this cursor that arithmetic unit measures looks like to move to the needed described benchmark sphere reflection unit in reference position of the regulation on this observation picture;
Based on amount of movement, carry out the driving control device of the drive controlling of described mobile regulating device by this benchmark sphere amount of movement arithmetic unit computing.
In addition, above-mentioned " benchmark sphere " be meant, the so-called aspherical shape except that physically spherical shape.
Preferred detected body supporting device by along with the optical axis direction of the detected lens that support by this detected body supporting device roughly the direction of quadrature move, carry out the loading and the unloading of these detected lens.
In addition, preferred described detected lens have periphery, this periphery has a benchmark peripheral surface vertical with the optical axis of these detected lens at least, detected body supporting device has a part that supports this benchmark peripheral surface, and has the peripheral surface brace table of window portion from described mensuration usefulness light beam to the remainder of this benchmark peripheral surface that can shine.
And then preferably have: on described observation picture, generate specific described detected lens body interference fringe viewing area and corresponding to the blindage generating apparatus of the blindage of the viewing area of the interference fringe of the described benchmark peripheral surface of described window portion; Make the blindage mobile device that move of this blindage according to the picture of the described cursor on the described observation picture.
In the light wave interferometer of the present invention, observation is based on the cursor of using the catoptrical intensity distributions of light beam from the described mensuration of detected lens surface, the image position of this cursor on the picture is observed in computing, computing simultaneously makes this cursor of mensuration look like to move to the amount of movement of the reference position needed benchmark sphere reflection unit of the regulation on this observation picture, the amount of movement that obtains according to this computing carries out the drive controlling of benchmark sphere reflection unit, therefore, can easily regulate the axle offset of the optical axis of the optical axis of detected lens and benchmark spherical reflector automatically.Thus, when on detected body supporting device, disposing detected lens, in order to make it stiff on this detected body supporting device, and carry out numerous and diverse fixed operation is unwanted, can carry out the replacing of detected lens by the automated job that has used robot etc., and can establish can be with the system of lens high speed mass.
In addition,, do not need other optical system and line sensor etc., simplification and densification that can implement device as the needed mensuration of the position adjustments of detected lens system.
Description of drawings
Fig. 1 is the summary pie graph of the light wave interferometer of expression an embodiment of the present invention;
Fig. 2 is the skeleton diagram of the shape of the detected lens of expression, ((A) is front view, (B) is vertical view);
Fig. 3 is the skeleton diagram of the shape of the expression lens peripheral surface brace table that carries anchor clamps, ((A) is the first sample attitude, (B) is the second sample attitude);
Fig. 4 is the front view that the general survey of detected lens position portion of the light wave interferometer of expression present embodiment constitutes;
Fig. 5 is used to represent that the general survey of detected lens position portion of load/unload state of detected lens of the light wave interferometer of present embodiment constitutes outboard profile;
Fig. 6 is the skeleton diagram that expression generates the situation of bright spot;
Fig. 7 is that the expression bright spot is passed through the figure of the center window of peripheral surface brace table in the situation of the substantial middle appearance of observing picture;
Fig. 8 is the mode chart of skew of the image position of the expression bright spot P ' that is disposed at the image position of bright spot P of reference position and this mensuration;
Fig. 9 A is the figure of the optical axis of the detected lens of the expression interference fringe image during with respect to the inclined light shaft of benchmark spherical reflector;
Fig. 9 B is the figure of the interference fringe image after the degree of tilt of the expression optical axis of having regulated the optical axis of detected lens and benchmark spherical reflector;
To be expression be adjusted to the figure of the interference fringe image after consistent with the optical axis of the optical axis of detected lens and benchmark spherical reflector to Figure 10;
Figure 11 is the chart of expression apart from the relation of the amount of movement of bright spot reference position and the axial amount of movement of L;
Figure 12 is the chart of the relation of the degree of tilt on transmission corrugated of the detected lens of expression and the axial amount of movement of L;
Figure 13 is the chart of relation of the amount of movement of the degree of tilt on transmission corrugated of the detected lens of expression and Y direction;
To be expression extract the figure that scope is made as the circle of diameter as the setting that will be changed to the center with the image position of bright spot medial region shows with the blindage of detected lens area to Figure 14;
To be expression extract scope with the blindage in peripheral surface zone to Figure 15 is made as the figure that zone that two circles of diameter clip shows as the setting that will be changed to the center with the image position of bright spot;
Figure 16 is the figure of situation of adjusting operation that represents to carry out the optical axis of the optical axis of detected lens and benchmark spherical reflector by the order of (A), (B), (C), (D);
The figure of the state of Figure 17 (A) when to be expression to the detected lens that correctly are arranged at the observation place carry out the interference of light and measure (B) is the figure of the state that produced of the parallel offset of the optical axis of the optical axis of the detected lens of expression and benchmark spherical reflector.
Symbol description
1,100 detected lens
2 lens bodies
3 peripheries
3A peripheral surface (reference field)
4, the datum plate of 102 interferometers (datum plate)
5,55,104 lens carry anchor clamps
6 revision boards
7,106 benchmark spherical reflectors
8,58 peripheral surface supporting zones
9A, 59A center window
9B, 59B peripheral surface reflected light window
9C, 59C revision board reflected light window
11 manual 2 inclination objective tables (datum plate is regulated and used)
12 manual 2 inclination objective tables (revision board is regulated and used)
13 electronic 2 inclination objective tables
14 electronic Y-axis objective tables
15 electronic X-axis objective tables
16 electronic Z axle objective tables
20 interferometer main parts
21 light sources
22 beam diameters amplify uses lens
23 spectroscopes
24 collimation lenses
25 imaging lens
26 camera heads
27 computing machines
28 monitoring arrangements
29 input medias
30 detected body location divisions
31 sample stage fore-and-aft directions (L direction of principal axis) travel mechanism
32 rotary encoders
34 pulse motors
36 Z axle manual coarse adjustment knobs
108 benchmark sphere centre
P, P ' bright spot
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.Fig. 1 is the figure that the major part of the summary light wave interferometer of representing an embodiment of the present invention constitutes.Fig. 2 is that ((A) is front view for the skeleton diagram of shape of the detected lens of expression, (B) be vertical view), Fig. 3 is the skeleton diagram of the shape of the expression lens peripheral surface brace table that carries anchor clamps, Fig. 4 is the front view that the general survey of detected lens position portion of the light wave interferometer of expression present embodiment constitutes, and Fig. 5 is used to represent that the general survey of detected lens position portion of load/unload state of detected lens of the light wave interferometer of present embodiment constitutes outboard profile.
As shown in Figure 1, the light wave interferometer of present embodiment is made of interferometer main part 20 and detected body location division 30.
At first, but interferometer main part 20 is the phenanthrene assistant type interferometers that are equipped with the long light source 21 of interference distance such as LASER Light Source, has beam diameter that the advance sequence of the light that penetrates from light source 21 disposes successively and amplifies with lens 22, spectroscope 23, collimation lens 24, imaging len 25, camera head 26 with light detection faces.In addition, interferometer main part 20 has computing machine 27, the monitoring arrangement 28 that shows interference fringe image and the input media 29 that is used for computing machine 27 is carried out various inputs, wherein, aforementioned calculation machine 27 carries out the drive controlling about Flame Image Process, various calculation process and the various adjusting portions of the image taken by camera head 26.In addition, datum plate 4 is generally comprised within interferes in the utmost point main part 20, but in this manual, for the convenience that illustrates, and is included in explanation in the following detected body location division 30.
On the other hand, detected body location division 30 is following structure, towards measuring with the working direction (being the top Fig. 1) of light beam from interferometer main part 20, support interferometer datum plate (the following datum plate that is called simply) 4, detected lens 1, revision board 6 and benchmark spherical reflector 7 successively, and they are carried out position adjustments.
That is, datum plate 4 is supported by manual 2 inclination objective tables 11, and to regulate with X-axis and Y-axis in the preparation adjusting stage be the anglec of rotation (degree of tilt) at center.In addition, detected lens 1 carry anchor clamps 5 by lens and are supported by electronic 2 inclination objective tables 13, and to regulate with X-axis and Y-axis automatically when measuring each detected lens 1 be the anglec of rotation (degree of tilt) at center.And then revision board 6 and benchmark spherical reflector 7 are supported by manual 2 inclination objective tables 12, electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16 orders.At this; revision board 6 is the protective seam of corresponding optical recording media and the transparent panel (being generally glass plate) that is provided with; be actually to making and optical recording media carried out the state of recording/reproducing is consistent with optical condition to be disposed; regulating with X-axis and Y-axis in the preparation adjusting stage by manual 2 inclination objective tables 11 is the anglec of rotation (degree of tilt) at center, makes its reference field with respect to datum plate 4 parallel.On the other hand, benchmark spherical reflector 7 can move adjusting along X, Y, each direction of principal axis of Z abreast by electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16, thus, when measuring each detected lens 1, automatically carry out position adjustments.
In the above-described embodiment, detected lens 1 are to carry at the lens that optical recording medias such as CD, DVD, AOD, Blu-ray Disc carried out the device of recording/reproducing as optical pickup lens, and it is made of lens body 2 and periphery 3.Lens body 2 is a biconvex lens, disposes the face of big curvature in the light source side of the recording/reproducing apparatus of optical recording media.In addition, the reference field when the peripheral surface 3A that is disposed at this light source side of periphery 3 constitutes lens alignment is set to strictly vertical with respect to the optical axis of optical pickup lens.In addition, the another side that can certainly establish periphery 3 is a reference field.
In addition, as detected lens 1, its shape and uses thereof is not limited to above-mentioned embodiment, also can attach aspheric surface and diffraction optics face.In addition, for example have under the aspheric situation at detected lens, the surface of benchmark spherical reflector 7 constitutes the aspherical shape corresponding with the surface configuration of these detected lens 1.
Not shown among the figure, be used for implementing to make the interference fringe scanning adapter (fringe scan adapter) of datum plate 4 when interference fringe scanning is measured being provided with on the datum plate 4 along the optical axis direction fine motion.
Secondly, lens carry the shape of the peripheral surface brace table of anchor clamps 5, from interferometer main part 20, shown in Fig. 3 (A), have that part is carried out center window 9A that the interference of light of detected lens 1 measures by being used in the central, three peripheral surface reflected light being positioned at the center window 9A outside with window 9B, be positioned at three peripheral surface supporting zones 8 of continuous window portion that the peripheral surface reflected light constitutes with window 9C with three revision board reflected light outside the window 9B and the corresponding region that reaches peripheral surface 3A.In addition, in the example of Fig. 3 (A), the peripheral surface reflected light all is provided with three with window 9B, revision board reflected light with window 9C and peripheral surface supporting zone 8, but the quantity of these each ones also can be other quantity, for example, at the example shown in Fig. 3 (B) (about the symbol of each one, the symbol of each one corresponding with Fig. 3 adds 50 expressions) in, expression peripheral surface reflected light all is provided with four (these parts of expression are four in the record described later) with window 9B, revision board reflected light with window 9C and peripheral surface supporting zone 8.
Among Fig. 4 expression be used to carry out the load/unload operation of detected lens 1 sample stage fore-and-aft direction (L direction of principal axis) travel mechanism 31, measure above-mentioned peripheral surface 3A with X-axis and Y-axis be the anglec of rotation (degree of tilt) at center rotary encoder 32, make pulse motor 34 that electronic Z axle objective table 16 moves and Z axle manual coarse adjustment with knob 36.
In addition, Fig. 5 (A) represents detected lens 1 are placed the state of observation place, the unloading operation of the detected lens 1 of Fig. 5 (B) expression carrying out, the state that carries out configuration/replacing operation of detected lens 1.
Below, the mensuration of above-mentioned light wave interferometer is done simple declaration in proper order.
At first, in the state shown in Fig. 5 (B), detected lens 1 are equipped on lens to be carried on the anchor clamps 5, move it to the state shown in Fig. 5 (A) by sample stage fore-and-aft direction (L direction of principal axis) travel mechanism 31 and (to be the depth direction of paper among Fig. 1, consistent with Y direction), detected lens 1 are placed the observation place.
Secondly, being used to carry out the preparation that the interference of light of detected lens 1 measures regulates.This preparation is carried out following adjusting in regulating, promptly, set the reference field of datum plate 4 and measure the axle of using light beam by manual 2 inclination objective tables 11, make it regulate the reference field degree of tilt orthogonally, and the reference field by manual 2 inclination objective tables, 12 setting revision boards 6 and datum plate 4 makes it regulate the revision board degree of tilt parallel to each other.In addition, as required, save knob 36, carry out the coarse adjustment of the Z-direction position of benchmark spherical reflector 7 by Z axle manual coarse adjustment.
In addition, under the situation of initial operative installations, need manually observe the various adjustings operations that produce interference fringe in the picture, and this regulated value is stored in the storer in the computing machine 27 in advance.
What secondly, become key point of the present invention is used to carry out the formal adjusting (being described in detail later) that the interference of light of detected lens 1 is measured.Above-mentioned preparation is regulated mainly carrying out the interference of light and a series of detected lens 1 is carried out once getting final product before measuring, but this is to carry out in principle when formally being adjusted in the mensuration of at every turn carrying out each detected lens 1 at every turn.
This formal adjusting is at first used electronic 2 inclination objective tables 13 to carry out 2 to tilt and to regulate automatically, makes that the reference field of the peripheral surface 3A of detected lens 1 and said reference plate 4 is parallel to each other.Thus, the optical axis of the optical axis of detected lens 1 and benchmark spherical reflector 7 is adjusted to parallel to each other.
Secondly, use electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16 to carry out the automatic adjusting of benchmark spherical reflector 7, make to see through the reflecting sphere part that light beam that detected lens 1 become spherical wave from plane wave impinges perpendicularly on benchmark spherical reflector 7 to X, Y, each axial parallel offset of Z.That is, thus, make the optical axis of the optical axis of detected lens 1 and benchmark spherical reflector 7 consistent mutually.
After above-mentioned formal adjusting finishes, carry out the interference of light of detected lens 1 and measure.Be determined at the interference fringe image information that obtains in the camera head 26 of interferometer main part 20 by this interference of light and utilize computing machine 27 to carry out calculation process and image analysis processing, obtain the corrugated aberration amount of detected lens 1.
Interference fringe image that obtains and analysis result etc. are presented on the monitoring arrangement 28 that is connected with computing machine 27.
But, the device of present embodiment has function as follows, that is, detected lens 1 are equipped on lens carry on the anchor clamps 5 and move it, the parallel offset that produces at the optical axis that places the optical axis of revising detected lens 1 under the state of observation place with respect to benchmark spherical reflector 7.
Even trace, also can produce the parallel offset of this optical axis, if so, then the mensuration beams focusing point that penetrates from detected lens 1 produces skew with respect to the center (centre of sphere) of the benchmark sphere of benchmark spherical reflector 7, and its result produces the problem of the interference of light mensuration that is difficult to carry out detected lens 1.Even so small margin of error about for example tens of μ m of such parallel offset also can observed the state that does not occur interference fringe on the picture.
Therefore, in the device of present embodiment, have: observe the bright spot of using the reflected light of light beam to produce by from the mensuration on detected lens 1 surface, computing is observed the bright spot image position of the image position of this bright spot on the picture and is measured arithmetic unit (arithmetic unit is measured in the cursor image position); The picture that computing makes this bright spot image position measure this bright spot that arithmetic unit measures moves to that the fixing reference position of observing on the picture is needed, the benchmark sphere amount of movement arithmetic unit of the amount of movement of benchmark spherical reflector 7; Carry out the driving control device of drive controlling of each objective table of electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16 based on the amount of movement that obtains by this benchmark sphere amount of movement arithmetic unit computing, we can say with based on being the spike point with the catoptrical bright spot of light beam from the mensuration on detected lens 1 surface, for making this bright spot picture can in observing picture, move to the position of regulation, and carry out the drive controlling of above-mentioned each objective table (particularly electronic Y-axis objective table 14 and electronic X-axis objective table 15), above-mentioned each benchmark spherical reflector 7 is moved.
At this, above-mentioned bright spot image position measures arithmetic unit and said reference sphere amount of movement arithmetic unit is the device that is made of CPU in the computing machine 27 and the program in the storer etc., and above-mentioned driving control device is by being attached to driving motor on each objective table 14,15,16 (being made of pulse motor etc.), controlling the control circuit (not shown) of this driving motor and making formation such as the program that this control circuit works (be stored in the storer in the computing machine 27 or in the storer that is provided with in addition).
Fig. 6 is the skeleton diagram that expression generates the situation of above-mentioned bright spot.That is, use up intrafascicularly in mensuration, the major part in the light beam of transmission datum plate 4 penetrates from detected lens 1, to 7 irradiations of benchmark spherical reflector, but uses up intrafascicularly in mensuration, and the part of the light beam of transmission datum plate 4 is in the edge reflection of detected lens 1 and air.Because the lens surface of detected lens 1 constitutes curved surfaces such as sphere or aspheric surface, therefore, nearly all light in this reflextion from lens surface is reflected to a side of detected lens 1, but usually since only near the regional area the optical axis by regarded as with measure with light beam over against the zone on plane, therefore, the mensuration that shines this regional area becomes back light with the part of light beam, forms the bright spot picture in the regulation zone of the camera head 26 of this interferometer main part 20.
Therefore, the picture of this bright spot constitutes the sign of the optical axis position of the detected lens 1 of expression, is that the spike point of optical axis position works as the expression reference position in interference fringe is observed picture.In addition, as shown in Figure 6, this bright spot produces from the both sides, the table back side or the either side of detected lens 1.
In addition, the lens position that produces this bright spot is not limited near the optical axis, for example in non-spherical lens etc., near the circle-shaped zone beyond considering the optical axis become by regarded as with measure with light beam over against the situation in zone on plane, but also can use picture from this regional bright spot.
Also have, as " based on the cursor of measuring with the catoptrical intensity distributions of light beam " among the present invention, be not limited to the situation of above-mentioned embodiment, for example also can implement Flame Image Process such as high-pass filtering processing near the interference fringe (being also referred to as the projection noise) of the concentric circles that produces the optical axis and use.
Fig. 7 represents that above-mentioned bright spot P carries by said lens that the interference fringe with detected lens is presented at the situation of observing the substantial middle in the picture behind the center window 9A of peripheral surface brace table of anchor clamps 5.In addition, among Fig. 7, represented to carry the peripheral surface reflection situation in the zone of window 9B observation peripheral surface 3A of the peripheral surface brace table of anchor clamps 5, and then passed through the revision board reflected light is observed the zone of revision board 6 with window 9C situation by said lens.
Fig. 8 is the figure with the skew of the image position of the image position that schematically shows the bright spot P that was measured to last time (reference position) and this bright spot P ' that is measured to, measure this side-play amount of arithmetic unit computing by the bright spot image position, and make this bright spot P ' that is measured to turn back to the amount of movement of the needed benchmark spherical reflector 7 in image position (reference position) of the bright spot P that last time was measured to by the computing of benchmark sphere amount of movement arithmetic unit based on this operation values.Computing machine 27 can drive the indicator signal of each objective table 14,15,16 (particularly objective table 14,15) based on this operation values to above-mentioned driving control device output.At this, the bright spot P that was measured to last time represent " this desired location when measuring of the desired location of electronic Y-axis objective table 14 and electronic X-axis objective table 15 and beginning is identical; and the bright spot P of good interference fringe when occurring in the zone of detected lens 1 ", if satisfy this condition, then be not subjected to the restriction of the bright spot P of mensuration last time.In this manual, this position is called the reference position of bright spot P or the reference position of regulation.
Above-mentionedly be illustrated as the image position of bright spot P or the image position of bright spot P ', though in fact (for example 10 several pixel degree) of area are arranged because this bright spot picture is small, therefore, preferred above-mentioned computing is a benchmark with the center of this picture.
But, under the situation of optical axis with respect to the inclined light shaft of benchmark spherical reflector 7 of detected lens 1, need revise the degree of tilt of detected lens 1 reliably.Therefore, in the device of present embodiment, regulate degree of tilt by electronic 2 inclination objective tables 13, until from by the peripheral surface reflected light with the interference fringe in the zone of the peripheral surface 3A of window 9B observation (the not having striped) degree that disappears substantially.In addition, the state of the interference fringe that the zone of this peripheral surface 3A occurs is to resolve by the computing machine in the interferometer main part 20 27, drives electronic 2 inclination objective tables 13 based on this analysis result.
In the interference fringe image shown in Fig. 9 A from the zone of peripheral surface 3A, many interference fringes appear in the zone of peripheral surface 3A, show the state before the adjusting that peripheral surface 3A tilts.On the other hand, the interference fringe picture from the zone of peripheral surface 3A shown in Fig. 9 B similarly is the image that the state after the degree of tilt of peripheral surface 3A is regulated in expression.According to this situation, regulate the stage that finishes at this, as shown in Figure 7, in the zone of detected lens 1 a plurality of interference fringes appear.
Also have, after regulating the degree of tilt of detected lens 1 like this, as mentioned above, carry out the parallel of benchmark spherical reflector 7 based on the image position of above-mentioned bright spot P and move.
Figure 10 is the parallel offset elimination of the optical axis of optical axis that expression will so detected lens 10 and benchmark spherical reflector 7, regulates the interference fringe image from tested transparent 1 zone after these optical axises make its mutual unanimity.In addition, the initial stage of adjusting at this moment shown in Fig. 9 B, does not occur in the zone of detected lens 1 under the situation of state of interference fringe, in the stage midway of the parallel offset of regulating optical axis, observe the image that occurs a large amount of interference fringes as illustrated in fig. 7 in the zone of detected lens 1.
The interference fringe image in the zone of the detected lens of representing from this Figure 10 1 can be observed mainly the interference fringe based on the corrugated aberration of detected lens 1.
But, for above-mentioned formal adjusting, need obtain the relation that is used to proofread and correct in advance, Figure 11～Figure 13 is chart (all figure that are used for illustrating the step of obtaining such relation, dotted line is a measured value, and solid line is a value of representing this solid line value by near linear).That is, this step is for obtaining the step that makes this bright spot turn back to the amount of movement of the needed electronic Y-axis objective table 14 in reference position with respect to the amount of movement of observing the bright spot on the picture.
At this, among Figure 11, the amount of movement (pixel count) apart from the bright spot reference position and the relation of the axial amount of movement of L (consistent with the amount of movement of sample stage fore-and-aft direction travel mechanism 31: unit is μ m) have been obtained from the bright spot centre of gravity place to the reference position.
In addition, among Figure 12, obtained the degree of tilt (unit: on the transmission corrugated of detected lens 1 wave number (wave)) with the relation of the axial amount of movement of L (with to be sent to the amount of movement of travel mechanism 31 before and after the sample stage consistent: unit is μ m).
Also have, Figure 13 is the expression degree of tilt of having obtained the transmission corrugated of detected lens a 1 (unit: wave number (wave)) with the figure of the relation of the amount of movement (consistent with the amount of movement of electronic Y-axis objective table 14: unit is μ m) of Y direction.In addition, among Figure 13, measured value roughly is positioned at the wire spoke degree of the straight line of near linear.
Based on each relation of using above-mentioned Figure 11～Figure 13 explanation,, obtain the amount of movement that makes this bright spot turn back to the electronic Y-axis objective table 14 that the reference position needs with respect to amount of movement from the bright spot of reference position.
Drive electronic Y-axis objective table 14 based on this amount of movement of obtaining, make the picture of bright spot turn back to the reference position,, finish the operation of above-mentioned formal adjusting (the wave tilt degree is similar to 0) by parallel moving reference spherical reflector 7.
Also have, the operation of above-mentioned formal adjusting is relevant with the adjusting of Y direction, in fact for the adjusting of X-direction, also can carry out above-mentioned formal adjusting (degree of tilt on corrugated is similar to 0) by same sequence of events.In the adjusting of this X-direction, use electronic X-axis objective table 15 to replace electronic Y-axis objective table 14.
In above-mentioned formal adjusting, measure situation, and in just measuring, measure in the situation from the interference fringe image on the transmission corrugated in the zone of detected lens 1, all need specific each zone automatically from the interference fringe image on the reflection corrugated in the zone of peripheral surface 3A.
Therefore, in the present embodiment, in observing picture, be provided for mildly sheltering respectively the blindage in the mensuration zone of the mensuration zone of detected lens 1 and peripheral surface 3A, will be identified as each by each scope that this blindage extracts and measure the zone, measure interference fringe image.
But, because offset degree according to detected lens 1, move on the observation picture in the mensuration zone of detected lens 1 and the mensuration zone of peripheral surface 3A, therefore, under the situation that each scope on the observation picture that will extract by above-mentioned blindage is fixed, each scope of extracting by blindage can not be consistent with each mensuration zone, causes having measured the zone different with the purpose object, thereby measure meaningless.
Therefore, in the device of present embodiment, be that blindage is the formation that move at the center with the bright spot on the above-mentioned observation picture also.Promptly, for the image position (as centre of gravity place) of bright spot that will be consistent with the approximate centre of detected lens 1 (near the position optical axis) is configured in the center of each scope of extracting by blindage, and keep each scope of extracting by blindage consistent all the time by the periphery circle that moves this each scope with each mensuration zone.
Specifically, as shown in figure 14, it be the center with the image position (as centre of gravity place) of bright spot that the blindage corresponding with the mensuration of detected lens 1 zone extracts scope, is that the medial region of the circle (among Figure 14 justified represent by white line) of diameter is represented as the value with the effective diameter that is equivalent to detected lens 1.In addition, proofread and correct 1 pixel of observing on the picture in advance and on the detected lens 1 of reality, be equivalent to how many mm, determine that blindage extracts the diameter of scope.
As shown in figure 15, the blindage corresponding with the mensuration of peripheral surface 3A zone extracts scope and be the center, is two concentric circles (representing by dual white line is round among Figure 15) clamping of radius with each value of regulation by the image position (as centre of gravity place) with bright spot, is shown four zones by central angle 90 kilsyth basalts.
Like this, in above-mentioned any situation, even measuring the zone moves according to being adjusted on the observation picture of parallel offset of detected lens 1, also can move the blindage extraction scope that is used to discern this mensuration zone, thereby can discern the mensuration zone that to measure reliably according to the mobile of picture of bright spot.
As above carry out the preceding formal adjusting (correction) of first mensuration of the device of present embodiment like that.Formal each interference fringe image constantly of regulating operation Fig. 7, Fig. 9 A, Fig. 9 B, and Figure 10 represent that remove the major part of these figure, Figure 16 (A), (B), (C), (D) represent side by side by the order in adjusting stage.Understand by this Figure 16 (A), (B), (C), (D), carry out the situation of adjusting operation of the viewing area of detected lens 1 by the order of (A), (B), (C), (D) in turn.
In addition, as the light wave interferometer of present embodiment, be not limited to the structure of above-mentioned embodiment, for example in the above-described embodiment, interferometer main part 20 is luxuriant and rich with fragrance assistant type, but can certainly be applicable to other types such as Michelson's type.
Claims (4)
1. light wave interferometer, it will be divided into two classes with light beam from the mensuration of light source, after making the detected lens of side's transmission, by the benchmark spheric reflection, these detected lens of transmission and form detected light make the opposing party form reference light at reference field again, the interference fringe that observation is produced by this detected light and this benchmark interference of light, measure the corrugated of these detected lens based on this observations, it is characterized in that
Possess: the detected body locating device of the relation that is provided with of the optical axis of adjusting and these detected lens,
This detected body locating device possesses: detected body supporting device, and it supports these detected lens, makes these detected lens and uses the light beam opposite from the mensuration of light source, and make the light beam transmission of this mensuration;
With transmission the described mensuration of this detected body with the benchmark sphere reflection unit of the described benchmark sphere of having of beam reflection;
Can with this benchmark sphere reflection unit with its optical axis direction plane orthogonal in 2 mutually orthogonal direction of principal axis on the mobile regulating device of move regulating;
Observation is based on from the described mensuration on the surface of the described detected lens cursor with the catoptrical intensity distributions of light beam, and computing is observed the cursor image position of the image position of this cursor on the picture and measured arithmetic unit;
Computing makes by this cursor image position and measures the benchmark sphere amount of movement arithmetic unit of amount of movement that this cursor that arithmetic unit measures looks like to move to the needed described benchmark sphere reflection unit in reference position of the regulation on this observation picture;
Based on amount of movement, carry out the driving control device of the drive controlling of described mobile regulating device by this benchmark sphere amount of movement arithmetic unit computing.
2. light wave interferometer as claimed in claim 1, it is characterized in that, described detected body supporting device by along with the optical axis direction of the detected lens that support by this detected body supporting device roughly the direction of quadrature move, carry out the loading and the unloading of these detected lens.
3. light wave interferometer as claimed in claim 1 or 2 is characterized in that,
Described detected lens have periphery, and this periphery has a benchmark peripheral surface vertical with the optical axis of these detected lens at least,
Described detected body supporting device has: support the part of this benchmark peripheral surface, and have the peripheral surface support portion of window portion from described mensuration usefulness light beam to the remainder of this benchmark peripheral surface that can shine.
4. as each described light wave interferometer in the claim 1～3, it is characterized in that,
Possess: the blindage generating apparatus, its on described observation picture, generate specific described detected lens body interference fringe viewing area and corresponding to the blindage of the viewing area of the interference fringe of the described benchmark peripheral surface of described window portion;
The blindage mobile device, it moves according to the picture of the described cursor on the described observation picture, and this blindage is moved.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005269217 | 2005-09-15 | ||
| JP2005-269217 | 2005-09-15 | ||
| JP2005269217A JP4738949B2 (en) | 2005-09-15 | 2005-09-15 | Lightwave interference device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1932432A true CN1932432A (en) | 2007-03-21 |
| CN1932432B CN1932432B (en) | 2010-09-15 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101536596A Expired - Fee Related CN1932432B (en) | 2005-09-15 | 2006-09-12 | Light wave interferometer |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4738949B2 (en) |
| CN (1) | CN1932432B (en) |
| TW (1) | TW200712444A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102203577A (en) * | 2008-11-06 | 2011-09-28 | 佳能市场营销日本株式会社 | Alignment system, method and program for controlling the same, and measurement device |
| CN107430046A (en) * | 2015-03-27 | 2017-12-01 | 奥林巴斯株式会社 | Corrugated measuring device and corrugated measuring method |
| CN114323582A (en) * | 2021-12-22 | 2022-04-12 | 光皓光学(江苏)有限公司 | Wavefront test method and device with platform lens |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4947774B2 (en) * | 2006-08-18 | 2012-06-06 | 富士フイルム株式会社 | Light wave interference measuring apparatus and light wave interference measuring method |
| JP2009008594A (en) * | 2007-06-29 | 2009-01-15 | Konica Minolta Opto Inc | Optical element unit and interferometer |
| JP2009145081A (en) * | 2007-12-11 | 2009-07-02 | Fujinon Corp | Method and apparatus for measuring error quantity of occurrence factor of rotational asymmetric aberration |
| JP5025501B2 (en) * | 2008-01-17 | 2012-09-12 | オリンパス株式会社 | Optical element holding mechanism and optical element measuring apparatus |
| JP2009236694A (en) * | 2008-03-27 | 2009-10-15 | Konica Minolta Opto Inc | Lens measuring device, lens measuring method, and lens production method |
| JP5044495B2 (en) * | 2008-07-17 | 2012-10-10 | 富士フイルム株式会社 | Parallel plate thickness measurement method |
| JP5095539B2 (en) * | 2008-07-17 | 2012-12-12 | 富士フイルム株式会社 | Aberration measurement error correction method |
| JP5235591B2 (en) * | 2008-10-10 | 2013-07-10 | 富士フイルム株式会社 | Method for measuring transmitted wavefront of birefringent optical element |
| JP5208075B2 (en) * | 2008-10-20 | 2013-06-12 | 富士フイルム株式会社 | Lightwave interference measuring device |
| JP5473743B2 (en) * | 2010-04-20 | 2014-04-16 | 富士フイルム株式会社 | Off-axis transmitted wavefront measuring device |
| JP5525367B2 (en) * | 2010-07-28 | 2014-06-18 | Ｈｏｙａ株式会社 | Lens position adjustment mechanism |
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|---|---|---|---|---|
| JPS61195328A (en) * | 1985-02-26 | 1986-08-29 | Asahi Optical Co Ltd | Interferometer with semispherical lens |
| JPS63163137A (en) * | 1986-12-25 | 1988-07-06 | Hitachi Electronics Eng Co Ltd | Lens surface defect inspecting device |
| JPH07167630A (en) * | 1993-10-14 | 1995-07-04 | Asahi Optical Co Ltd | Equipment and method for measuring interference |
| JP3758279B2 (en) * | 1997-03-06 | 2006-03-22 | ソニー株式会社 | Method and apparatus for adjusting objective lens for optical pickup |
| JP2003066300A (en) * | 2001-08-29 | 2003-03-05 | Sony Corp | Device for manufacturing objective lens and method for manufacturing objective lens |
| JP2005127914A (en) * | 2003-10-24 | 2005-05-19 | Fujinon Corp | Mounting stand for lens to be inspected of interferometer system |
-
2005
- 2005-09-15 JP JP2005269217A patent/JP4738949B2/en not_active Expired - Fee Related
-
2006
- 2006-09-12 CN CN2006101536596A patent/CN1932432B/en not_active Expired - Fee Related
- 2006-09-15 TW TW095134217A patent/TW200712444A/en not_active IP Right Cessation
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102203577A (en) * | 2008-11-06 | 2011-09-28 | 佳能市场营销日本株式会社 | Alignment system, method and program for controlling the same, and measurement device |
| CN102203577B (en) * | 2008-11-06 | 2014-07-09 | 佳能市场营销日本株式会社 | Alignment system, method and program for controlling the same, and measurement device |
| CN107430046A (en) * | 2015-03-27 | 2017-12-01 | 奥林巴斯株式会社 | Corrugated measuring device and corrugated measuring method |
| CN107430046B (en) * | 2015-03-27 | 2019-08-30 | 奥林巴斯株式会社 | Corrugated measuring device and corrugated measuring method |
| CN114323582A (en) * | 2021-12-22 | 2022-04-12 | 光皓光学(江苏)有限公司 | Wavefront test method and device with platform lens |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007078593A (en) | 2007-03-29 |
| TW200712444A (en) | 2007-04-01 |
| CN1932432B (en) | 2010-09-15 |
| TWI292033B (en) | 2008-01-01 |
| JP4738949B2 (en) | 2011-08-03 |
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