WO2006028183A1

WO2006028183A1 - Lens system adjusting device and lens system adjusting method using it, and production device for imaging device and production method for imaging device

Info

Publication number: WO2006028183A1
Application number: PCT/JP2005/016546
Authority: WO
Inventors: Tetsuo Saeki
Original assignee: Sharp Kabushiki Kaisha
Priority date: 2004-09-10
Filing date: 2005-09-08
Publication date: 2006-03-16
Also published as: JP2006078849A; JP3766835B2; CN101019057A

Abstract

A substrate (24) is formed with diffraction elements (23) at positions corresponding to respective angles of view of a lens system (22) so as to be point-symmetric, and is disposed between a light source (21) and the first lens element (39) of the lens system (22). The second lens element (40) of the lens system (22) is fixed by a second holding unit (35), and the second holding unit (35) is moved by a second moving mechanism (36) so that the condensing spot of a reference ray of light agrees with the center of an imaging element (25) and a group of condensing spots of rays of light deflected in association with respective angles of view by respective diffraction elements (23) of the substrate (24) are point-symmetric with respect to the center of the imaging element (25). Thus, rays of light corresponding to a plurality of angles of view are used to accurately adjust the light axis of the lens system (22).

Description

Specification

LENS SYSTEM ADJUSTING DEVICE, LENS SYSTEM ADJUSTING METHOD USING THE SAME, IMAGING DEVICE MANUFACTURING DEVICE, AND IMAGING DEVICE MANUFACTURING METHOD

Technical field

The present invention relates to a lens system adjustment device that performs optical axis adjustment of a lens system composed of a plurality of lenses, a lens system adjustment method using the same, an imaging device manufacturing apparatus, and an imaging device manufacturing method.

Background art

[0002] In recent years, the required accuracy of camera lenses for the above-mentioned digital cameras and mobile phone cameras has been increasing year by year due to the downsizing of lens elements due to higher functionality of compact digital cameras and mobile phone cameras and the increased adoption of aspherical surfaces. It is becoming strict, and the optical axis adjustment of a lens system consisting of a plurality of lenses is essential only by improving the processing accuracy of a single lens. At the same time as the adjustment of the optical axis of the lens system, the imaging performance of the adjusted lens system is measured using MTF (spatial frequency characteristics), which is generally used as an index representing the resolving power of the optical lens. It is necessary to check the result of the axis adjustment and determine pass / fail.

[0003] Conventional MTF measuring devices include those listed in JP-A-61-84541. Further, as a conventional optical axis adjusting device, there is one as disclosed in JP-A-6-265766.

[0004] Here, the MTF apparatus measurement will be described with reference to FIGS. The MTF is a quantity that comprehensively represents the performance of an imaging system such as a lens. This is the ratio of the amplitude of the image by the lens to the amplitude on the object side when a spatial sine wave is input to the lens. expressed. The actual measurement in the above MTF is performed by detecting the light intensity distribution such as point images, line images, and edge images with the test lens and performing Fourier transform processing. In FIG. 13, for example, a slit 2 is placed on the optical axis and outside the optical axis of the lens 1 to be measured at a position corresponding to the film surface of the camera, and the slit 2 is irradiated with the light source 3 to correspond to the object plane. A slit image is formed on the screen. Then, this slit image is picked up by an image pickup device 4 such as a CCD (Charge Coupled Device) and scanned in a direction perpendicular to the longitudinal direction of the slit image. An intensity distribution as shown is obtained. Then, noise is removed by the signal processing circuit 5 and Fourier transform is performed by the FFT operation circuit 6 to obtain the MTF value for each angle of view as shown in FIG. 15, and the result is displayed on the display unit 7. .

Next, a conventional lens system optical axis adjusting device will be described with reference to FIG. The conventional lens system optical axis adjusting device shown in FIG. 16 fixes the first lens system 11 by arranging the first lens system 11 and the second lens system 12 so that their optical axes are in the vertical direction. . After that, the second lens system 12 is finely moved so that the optical axis of the first lens system 11 coincides with the optical axis of the second lens system 12.

[0006] This lens system optical axis adjusting device includes an irradiation means 13 for irradiating the first lens system 11 and the second lens system 12 with a central ray and three or more annular rays parallel to the central ray, Illuminance generation means 14, fine alignment correction amount generation means 15, and second lens fine movement means 16 are provided. The illuminance generation means 14 receives the central ray and the annular ray that have passed through the first lens system 11 and the second lens system 12, and images formed by the central ray and the annular ray, respectively. A signal corresponding to is generated. At the same time, the brightness of each image is obtained based on the above signal. Further, the fine alignment correction amount generation means 15 obtains the illuminance distribution power of each image obtained by the illuminance generation means 14 as the center of gravity coordinates of the image of the zonal ray and the center coordinates of the image of the center ray. Differential force Determine the fine alignment correction amount according to the amount of on-axis coma. The second lens fine moving means 16 finely moves the second lens system 12 based on the fine alignment correction amount obtained by the fine alignment correction amount generating means 15.

[0007] In the above configuration, when the optical axes of the first lens system 11 and the second lens system 12 do not coincide with each other, the parallel central ray and three or more annular rays are the first lens. By passing through the system 11 and the second lens system 12, a deviation occurs between the center position through which the central ray passes and the position of the center of gravity of the annular light beam. Therefore, the illuminance of each image formed by the central ray and the zonal ray on the light receiving surface of the light receiving element 17 in the illuminance generation means 14 is obtained, and the fineness correction amount generation means 15 obtains the illuminance distribution power of each image. The difference between the center position and the center of gravity position is quantitatively measured by calculating the difference between the center coordinates of the center ray and the center of gravity coordinates of the zonal rays as the on-axis frame amount. Then, based on the fine alignment correction amount obtained by the fine alignment correction amount generation means 15 in accordance with the above-mentioned axial coma amount. Then, the second lens system 12 is repeatedly finely moved by the second lens fine moving means 16 so that the optical axis of the first lens system 11 and the optical axis of the second lens system 12 are automatically matched.

[0008] However, the conventional MTF measuring apparatus described in Japanese Patent Application Laid-Open No. 61-84541 has the following problems. That is, by arranging the light source 3, the slit 2, and the image sensor 4 for each of a plurality of angles of view, it is possible to calculate MTF values corresponding to the angles of view at a time. However, in that case, there is a problem that the number of components increases. Furthermore, there is a limit to the actual arrangement of the light source 3 and the slit 2, and there is a problem that the MTF evaluation for a large number of angles of view cannot be easily performed.

[0009] Further, the conventional lens system optical axis adjusting device described in JP-A-6-265766 has the following problems. In other words, the lens system optical axis adjusting device confirms whether the optical axes of the first lens system 11 and the second lens system 12 are correctly aligned when the optical axis of the lens system is adjusted. There is no way to do it. Therefore, in the case of a conventional lens system optical axis adjustment device, after the optical axis adjustment of the lens system (optical axis adjustment process), the test lens is further replaced with an MTF measurement device to measure the MTF value. Therefore, it is necessary to check the adjustment defect in the optical axis adjustment process (inspection process), and the simplification of the optical axis adjustment process and the inspection process is desired.

In the conventional lens system optical axis adjustment device, the optical axis of the lens system can be adjusted, but the adjustment is performed using the light receiving element 17 for adjustment. Therefore, for example, in the lens system adjustment of a camera lens in which an imaging element such as a digital camera and a lens system are integrated, after the optical axis adjustment of the lens system is performed, an imaging element to be actually used is further used. It is necessary to adjust the position of the lens and the lens system, and in this respect, simplicity is desired. Later, even if an image sensor that is actually fixed as a module is arranged on the image plane 18 and the lens system is adjusted using the image sensor, a plurality of parallel lights can be adjusted at the same incident angle. Since the light is incident on the system, the focused spot on the image plane 18 is reduced to one point. Therefore, as it is, the optical axis of the lens system cannot be adjusted using the image sensor disposed on the image plane 18, and another lens for guiding the light to the image sensor for the module is required. is there.

Disclosure of the invention Problems to be solved by the invention

Therefore, the problem of the present invention is that the optical axis adjustment of the lens system and the MTF measurement can be continuously performed, and the optical axis of the lens can be accurately adjusted by the light beam corresponding to each angle of view. Lens system adjustment device capable of continuously performing optical axis adjustment of a lens system and position adjustment of an imaging element in a camera lens or the like in which an imaging element and a lens system are integrated, and a lens system using the same An adjustment method, an imaging apparatus manufacturing apparatus, and an imaging apparatus manufacturing method are provided.

Means for solving the problem

In order to solve the above problems, a lens system adjusting device of the present invention includes:

A laser light source unit that generates parallel light rays serving as a reference axis;

A to-be-adjusted object including a lens system including a plurality of lenses and an image sensor;

It is arranged between the laser light source section and the object to be adjusted, and deflects a part of the parallel light beam from the laser light source section so that the angle with the reference axis is an angle corresponding to the angle of view of the lens system. A plurality of diffractive elements that generate a certain parallel beam bundle and enter the lens system, and a reference beam bundle as the reference axis by passing a part of the parallel beam from the laser light source unit located at the center part On the basis of the output of the imaging device, the moving unit for moving at least one of the lens system and the imaging device, and the output of the imaging device. A movement amount of the lens system or image sensor for positioning the reference beam bundle image and the deflected beam bundle image at a predetermined position on the light receiving surface is calculated, and based on the calculated movement amount. The above moving part An arithmetic control unit for controlling the operation

It is characterized by having! / Speak.

[0013] According to the above configuration, the operation of the moving unit is controlled by the arithmetic control processing unit so that, for example, the image of the reference beam bundle is positioned at the center position on the light receiving surface of the imaging element. By moving the lens system, it is possible to adjust the eccentricity or tilt of a plurality of lenses constituting the lens system. Further, for example, the center of the substrate By moving the lens system so that the image of the light beam deflected by the diffractive elements arranged on the point object is point-symmetrical with respect to the center of the light receiving surface, a plurality of angles of view are supported. The optical axis of the lens system can be accurately adjusted by the light beam.

[0014] Further, in the lens system adjusting device of one embodiment,

An optical branching element disposed between the substrate and the object to be adjusted on the reference axis; an aperture disposed between the optical branching element and the object to be adjusted on the reference axis;

The light is emitted from the laser light source unit, passes through the opening of the substrate, the light branching element and the aperture, is reflected by the reference surface of the imaging element, passes again through the aperture, and is reflected by the light branching element to the reference. A light detector that detects the light reflected in the direction perpendicular to the axis.

I have.

[0015] According to this embodiment, the operation of the moving unit is controlled by the arithmetic control processing unit, and for example, the light detected by the photodetector is centered on the light receiving surface of the photodetector. Prior to the optical axis adjustment of the lens system, the angle and position between the reference axis and the reference surface of the object to be adjusted are adjusted optimally by moving the imaging device so that it is positioned. That's right.

[0016] Further, in the lens system adjusting device of one embodiment,

The diameter of the parallel light beam that is deflected by the diffraction element of the substrate and is incident on the lens system, and the diameter of the reference light beam that is incident on the lens system through the opening of the substrate are the lens It is set larger than the diameter of the entrance pupil of the system.

[0017] According to this embodiment, it is possible to relax the adjustment accuracy when the entrance pupil center of the lens system and the reference axis coincide with each other.

[0018] Further, in the lens system adjusting device of one embodiment,

The moving unit is configured to move the lens system and the image sensor, and is configured to fix and hold a first lens element constituting a part of the lens system with respect to the reference axis. 1 holding unit,

A second holding unit for holding a second lens element constituting the remainder of the lens system; The moving unit that moves the lens system is configured, and a lens element moving mechanism that moves at least one of the first holding unit and the second holding unit is provided.

According to this embodiment, the first lens element and the second lens element constituting the lens system are individually moved by the lens element moving mechanism under the control of the arithmetic control processing unit. be able to. Therefore, the decentration or tilt of the lens system can be precisely adjusted by dividing it into the first and second lens elements.

[0020] Further, in the lens system adjusting device of one embodiment,

The board is provided with a chart for MTF measurement,

An illuminating unit that uniformly illuminates the chart from the laser light source unit side is provided, and the arithmetic control processing unit calculates an MTF value of the lens system based on an output of the imaging device related to the chart. Get ready!

[0021] According to this embodiment, after the adjustment of the eccentricity or tilt of the lens system and the optical axis adjustment of the lens system are completed, MTF, which is an index of resolving power of the lens system, is continuously measured. it can. Therefore, if the difference between the obtained MTF value and the design value (target value) is large, it becomes possible to adjust the optical axis of the lens system again, reducing the incidence of defective products. be able to.

[0022] Further, in the lens system adjusting device of one embodiment,

Based on the output of the image sensor, the peak value of the light intensity of the spot formed by collimating the parallel light emitted from the laser light source unit on the light receiving surface of the image sensor by the lens system is obtained. A light amount adjusting means for adjusting the light amount of the laser light source unit according to the peak value is obtained.

[0023] According to this embodiment, since the light amount of the laser light source unit is adjusted according to the peak value of the light intensity on the light receiving surface of the image sensor, the light condensing spot can increase the energy density. Even when the optical axis is adjusted, the light quantity can be adjusted so that smear does not occur in the image sensor.

[0024] Further, the present invention is a lens system adjustment method using the lens system adjustment device, wherein the operation of the moving unit is controlled by the arithmetic control processing unit to open the opening of the substrate. Moving the image sensor so that the image of the reference beam bundle that has passed is positioned at the center of the light receiving surface of the image sensor;

A step of holding the first lens element fixed to the reference axis by the first holding unit while holding the second lens element by the second holding unit; and the lens element by the arithmetic control processing unit. The movement of the moving mechanism is controlled so that the condensing spot by the first lens element and the second lens element of the reference beam bundle that has passed through the opening of the substrate is positioned at the center of the light receiving surface of the image sensor. Moving at least one of the first holding unit and the second holding unit;

The operation of the lens element moving mechanism is controlled by the arithmetic control processing unit, and the condensed spot by the first lens element and the second lens element of the light beam deflected through the diffraction element of the substrate is deflected. Moving at least one of the first holding unit and the second holding unit so as to be arranged at a predetermined position on the light receiving surface of the image sensor;

Fixing the lens system and the image sensor with respect to the reference axis;

It is characterized by including.

According to the above configuration, the operation of the moving unit is controlled by the arithmetic control processing unit, and the image sensor is moved so that the image of the reference beam bundle is positioned at the center of the light receiving surface of the image sensor. The relative position between the reference axis and the reference surface of the object to be adjusted can be adjusted to be optimum. Further, the operation of the lens element moving mechanism is controlled by the arithmetic control processing unit so that the focused spot of the reference beam bundle by the first lens element and the second lens element is the center of the light receiving surface of the image sensor. Since at least one of the first holding unit and the second holding unit is moved so as to be positioned at the position, the eccentricity or tilt of the plurality of lens elements constituting the lens system can be adjusted by a simple method. Further, the operation of the lens element moving mechanism is controlled by the arithmetic control processing unit, so that a condensed spot of the deflected light bundle by the first lens element and the second lens element is a light receiving surface of the image sensor. At least one of the first holding unit and the second holding unit is moved so as to be arranged at a predetermined position above. Therefore, the optical axis of the lens system can be adjusted with high accuracy using light beams corresponding to a plurality of angles of view.

The present invention is also a lens system adjustment method using the lens system adjustment device, wherein the operation of the moving unit is controlled by the arithmetic control processing unit, and an image of a reference beam bundle that has passed through the opening of the substrate. Moving the image sensor so that is positioned at the center of the light receiving surface of the image sensor;

The operation of the lens element moving mechanism is controlled by the arithmetic control processing unit, and an image of the light of the illumination means force that has passed through the MTF measurement chart of the substrate is formed on the light receiving surface of the image sensor. The step of moving the first holding unit and the second holding unit,

A step of calculating an MTF value by the arithmetic control processing unit based on an output of the imaging element relating to the image of the chart;

When the difference between the calculated MTF value of the lens system and the target MTF value is within a predetermined range, the lens system and the image sensor are fixed with respect to the reference axis;

It is characterized by including. [0027] According to the above configuration, the operation of the moving unit is controlled by the arithmetic control processing unit, and the image sensor is arranged so that the image of the reference beam bundle is positioned at the center of the light receiving surface of the image sensor. Since it is moved, the relative position between the reference axis and the reference surface of the object to be adjusted can be adjusted to be optimal. Further, the operation of the lens element moving mechanism is controlled by the arithmetic control processing unit so that the focused spot of the reference beam bundle by the first lens element and the second lens element is the center of the light receiving surface of the image sensor. Since at least one of the first holding unit and the second holding unit is moved so as to be positioned at the position, the eccentricity or tilt of the plurality of lens elements constituting the lens system can be adjusted by a simple method. Further, the operation of the lens element moving mechanism is controlled by the arithmetic control processing unit, so that a condensed spot of the deflected light bundle by the first lens element and the second lens element is a light receiving surface of the image sensor. Since at least one of the first holding unit and the second holding unit is moved so as to be arranged at a predetermined position on the upper side, the optical axis of the lens system is accurately adjusted by light beams corresponding to a plurality of angles of view. Can be adjusted.

[0028] Power! If the difference between the calculated MTF value and the target MTF value is within a predetermined range, the calculation control processing unit calculates the MTF value of the lens system. Since it is fixed with respect to the reference axis, the lens system is decentered! /, After the tilt adjustment and the optical axis adjustment of the lens system are completed, the MTF, which is an index of the resolving power of the lens system, is subsequently continued. It can be measured. Therefore, the optical axis position adjustment process of the lens system and the image sensor, the optical axis adjustment process of the lens system, and the inspection process of the lens system can be integrated. Furthermore, when the difference between the obtained MTF value and the design value (target value) is large, it becomes possible to adjust the optical axis of the lens system again, reducing the incidence of defective products. You can.

[0029] Further, the present invention is an apparatus for manufacturing an imaging apparatus including a lens system having a plurality of lens forces and an imaging element,

An image sensor holding unit that holds the image sensor and adjusts the optical axis of the image sensor to coincide with a reference axis by moving the image sensor;

While holding the lens system and moving the lens system, the optical axis of the lens system A lens system holding unit that adjusts the optical axis of the image sensor to coincide with the optical axis of the image sensor, and based on the output from the image sensor, the amount of deviation of the optical axis of the image sensor from the reference axis and the lens The amount of deviation of the optical axis of the system from the optical axis of the image sensor is calculated, and the operations of the image sensor holding unit and the lens system holding unit are controlled based on the calculated amount of deviation, while the optical axis is An arithmetic control processing unit that calculates the MTF value of the lens system after adjustment and evaluates the calculated MTF value;

If the evaluation result of the MTF value by the arithmetic control processing unit is acceptable, a fixing unit that fixes the lens system to the image sensor

It is characterized by having! / Speak.

[0030] According to the above configuration, the optical axis adjustment of the lens system and the MTF evaluation can be continuously performed by the calculation * control by the calculation control processing unit. Therefore, the optical axis adjustment process and the inspection process for the lens system can be integrated, and the manufacturing process of the imaging device can be simplified and the manufacturing cost can be reduced. Furthermore, M, which is an index of resolving power of the above lens system

Only lens systems with acceptable TF evaluation results can be fixed. On the other hand, if the MTF evaluation result is negative, the optical axis can be readjusted, reducing the incidence of defective products. can do. Furthermore, even if the optical axis is readjusted, if the MTF evaluation result is negative, the lens system is not fixed, so that the image sensor and lens system can be reused.

[0031] Further, in the imaging apparatus manufacturing apparatus of one embodiment,

A laser light source;

A plurality of parallel light beams are generated by deflecting a part of the parallel light beams from the laser light source and generating a parallel light beam whose angle with the reference axis is an angle corresponding to the angle of view of the lens system and entering the lens system. With diffraction elements

The light source part containing is provided.

[0032] According to this embodiment, since the plurality of parallel light beams having different angles with respect to the reference axis are simultaneously incident on the lens system by the plurality of diffraction elements, the light beams are collected through the lens system. The emitted light beam is focused on the image plane without being focused at a single point. Therefore, a lens for separating the light beam collected at one point is not necessary. An image pickup device that forms an image pickup apparatus integrally with the lens system can be used as it is as an image pickup device for optical axis adjustment. Furthermore, the lens optical axis can be adjusted with high accuracy by light beams corresponding to a plurality of angles of view.

[0033] In the imaging device manufacturing apparatus according to one embodiment,

A pattern for MTF measurement is formed on the diffraction element.

[0034] According to this embodiment, the MTF value can be calculated using the diffraction element without the need to provide the MTF measurement slit or chart separately from the diffraction element. Therefore, it is possible to efficiently perform the MTF evaluation of the lens system by continuously adjusting the optical axis of the lens system, which does not require extra optical adjustment of the inspection system.

[0035] Further, in the imaging apparatus manufacturing apparatus of one embodiment,

The fixed part is

An adhesive supply section for supplying an ultraviolet curable adhesive;

And an ultraviolet irradiation section for irradiating the ultraviolet curable adhesive with ultraviolet rays.

[0036] According to this embodiment, it is possible to quickly fix the lens system for which the MTF evaluation result is acceptable, by using the ultraviolet ray curable adhesive and the ultraviolet ray irradiation thereto.

[0037] Further, the present invention is a method of manufacturing an imaging device including a lens system having a plurality of lens forces and an imaging element,

Based on the output from the image sensor that received light from the light source on the reference axis, the amount of deviation of the optical axis of the lens system from the optical axis of the image sensor was obtained, and this was obtained. An optical axis adjustment step of moving the lens system based on the amount of deviation to align the optical axis of the lens system with the optical axis of the imaging element;

The light from the light source is imaged on the light receiving surface of the image sensor through the lens system with the optical axis adjusted to calculate the MTF value of the lens system, and the calculated MTF value is evaluated. MTF calculation 'evaluation process,

If the evaluation result of the MTF value is acceptable, a lens system fixing step for fixing the lens system to the imaging device; It is characterized by having! / Speak.

[0038] According to the above configuration, the optical axis adjustment and MTF evaluation of the lens system can be performed continuously. Therefore, the optical axis adjustment process and the inspection process for the lens system can be integrated, and the manufacturing process of the imaging device can be simplified and the manufacturing cost can be reduced. In addition, it is possible to fix only the lens system for which the MTF evaluation result, which is an index of the resolving power of the lens system, is acceptable, and readjust the optical axis if the MTF evaluation result is negative. It is possible to reduce the occurrence rate of defective products. Furthermore, if the MTF evaluation result is negative even if the optical axis is readjusted, the lens system is not fixed, so that the image sensor and lens system can be reused.

[0039] Further, in the manufacturing method of the imaging device according to one embodiment,

In the optical axis adjustment step,

Using a laser light source as the light source,

A plurality of diffractive elements disposed between the laser light source and the lens system deflect some of the parallel light rays from the laser light source, and the angle with the reference axis corresponds to the angle of view of the lens system. A parallel light beam that is an angle is generated and incident on the lens system.

[0040] According to this embodiment, since the plurality of parallel light beams having different angles with respect to the reference axis are simultaneously incident on the lens system by the plurality of diffraction elements, the light beams are collected through the lens system. The emitted light beam is focused on the image plane without being focused at a single point. Therefore, a lens for separating the light beam condensed at one point is not required, and the image sensor that forms the image pickup apparatus integrally with the lens system is used as it is for adjusting the optical axis. Can be used as Furthermore, the lens optical axis can be adjusted with high accuracy by light beams corresponding to a plurality of angles of view.

[0041] In the manufacturing method of the imaging device according to one embodiment,

A pattern for MTF measurement is formed on the diffraction element. In the MTF calculation-evaluation step, light from the light source that has passed through the pattern for MTF measurement is used.

[0042] According to this embodiment, the MTF value can be calculated using the diffraction element without the need to provide the MTF measurement slit or chart separately from the diffraction element. Therefore, the optical axis adjustment of the above lens system without the need for extra optical adjustment of the inspection system In this way, MTF evaluation of the above lens system can be performed efficiently.

The invention's effect

As apparent from the above, according to the present invention, the operation of the moving unit is controlled by the arithmetic control processing unit, and the image of the reference beam is positioned at a predetermined position on the light receiving surface of the image sensor. Since the lens system is moved as described above, for example, by positioning the image of the reference beam at the center position on the light receiving surface, it is possible to adjust the eccentricity or tilt of the lenses constituting the lens system. it can.

[0044] Further, the operation of the moving unit is controlled by the arithmetic control processing unit so that the image of the light beam deflected by the diffraction element of the substrate is positioned at a predetermined position on the light receiving surface of the imaging element. For example, the image of the light beam deflected by the diffraction element arranged in a point object with respect to the center of the substrate is arranged so as to be symmetric with respect to the center of the light receiving surface. By doing so, the optical axis of the lens system can be adjusted with high accuracy by light rays corresponding to a plurality of angles of view.

[0045] According to one embodiment, after the adjustment of the decentering or tilting of the lens system and the optical axis adjustment of the lens system are completed, the resolving power of the lens system is continuously processed by the arithmetic control processing unit. Since the MTF, which is an index of measurement, is measured, the optical axis position adjustment process between the lens system and the image sensor, the optical axis adjustment process of the lens system, and the inspection process of the lens system can be integrated. Furthermore, when the difference between the obtained MTF value and the design value (target value) is large, the optical axis of the lens system can be adjusted again, and the incidence of defective products can be reduced. Brief Description of Drawings

FIG. 1 is a schematic configuration diagram of a lens system adjusting device according to the present invention.

FIG. 2 is a plan view of the substrate in FIG.

FIG. 3 is a diagram showing a state when the lens system adjustment device shown in FIG. 1 makes a right angle between a reference surface of a lens system and a reference axis.

FIG. 4 is a diagram showing a state when the optical axis position adjustment between the lens system and the image sensor is performed by the lens system adjusting device shown in FIG. 1.

[Fig. 5] Shows how the optical axis of a lens system is adjusted by the lens system adjusting device shown in Fig. 1. It is a figure.

FIG. 6 is a diagram showing a state in which the lens system after adjustment of the optical axis and the image sensor are fixed with an adhesive or the like.

FIG. 7 is a diagram showing an image on the image sensor before adjustment of the second lens element.

FIG. 8 is a diagram showing an image on the image sensor during adjustment of the second lens element.

FIG. 9 is a diagram showing an image on the image sensor when adjustment of the second lens element is completed.

FIG. 10 is a diagram showing directions when obtaining the intensity distribution of the image of the slit in FIG.

FIG. 11A is a diagram showing a radial intensity distribution and MTF in FIG.

FIG. 11B is a diagram showing the radial intensity distribution and MTF in FIG.

FIG. 12A is a diagram showing the intensity distribution and MTF in the tangential direction in FIG.

FIG. 12B is a diagram showing the intensity distribution in the tangential direction and MTF in FIG.

FIG. 13 is a schematic configuration diagram of a conventional MTF measuring apparatus.

FIG. 14 is a diagram showing an intensity distribution obtained by the MTF measuring apparatus shown in FIG.

FIG. 15 is a diagram showing MTF values based on the intensity distribution shown in FIG.

FIG. 16 is a schematic configuration diagram of a conventional optical axis adjusting device.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the present invention will be described in detail with reference to embodiments shown in the drawings. FIG. 1 is a schematic configuration diagram of the lens system adjusting apparatus according to the present embodiment.

This lens system adjusting device is roughly configured by a light source 21, a lens system 22, a substrate 24, an image sensor 25, a holding unit 26, a first moving mechanism 27, and an arithmetic control processing unit 28. The light source 21 has a laser element and generates a parallel light beam serving as a reference axis A. The lens system 22 includes a plurality of lenses and is an adjustment target. The substrate 24 is disposed between the light source 21 and the lens system 22 and a plurality of diffractive elements 23 that allow the parallel light obtained by deflecting part of the parallel light generated by the light source 21 to enter the lens system 22. Is provided. The holding unit 26 is disposed after the lens system 22 on the reference axis A, and holds an image sensor 25 that is a CCD or the like that receives light from the light source 21. The image sensor 25 is integrated with the lens system 22 after adjustment. Thus, a camera lens such as a digital camera is constructed. The first moving mechanism 27 moves the image sensor 25 together with the holding unit 26. The arithmetic control processing unit 28 calculates an optical evaluation value of the lens system 22 based on the output of the image sensor 25. Further, a control amount for controlling the movement of the image sensor 25 is calculated, and a control signal based on this control amount is generated and output to the first moving mechanism 27.

FIG. 2 is a plan view of the substrate 24. As shown in FIG. 2, the diffractive element 23 is formed on the substrate 24 so as to be point-symmetric at a position corresponding to the angle of view of the lens system 22, for example, in a ring shape. In addition, an opening 29 is formed in the central portion of the diffraction element 23 arranged in a circle so as to allow the light from the light source 21 to pass therethrough and generate a parallel light beam serving as a reference axis A (hereinafter referred to as a reference light beam). Yes. The diffractive elements 23 are arranged so that the angle of the diffracted light with respect to the reference axis A is an angle corresponding to the angle of view of the lens system 22. Further, the arrangement is taken into consideration so that unnecessary diffracted light does not enter the lens system 22.

[0050] The size of the aperture 29 that generates the reference beam serving as the reference axis A and the size of the diffractive element 23 arranged corresponding to the angle of view of the lens system 22 are determined by the incidence of the lens system 22. The diameter of each parallel light incident on the pupil is set to be larger than the entrance pupil of the lens system 22. As a result, it is possible to relax the adjustment accuracy when the center of the entrance pupil of the lens system 22 and the reference axis of the present lens system adjustment device are matched.

In addition, a slit 30 for MTF measurement is provided at a position on the substrate 24 corresponding to the angle of view for inspecting the MTF. The slit 30 may have any shape as long as it can measure the MTF value, such as a point image, a line image, and an edge image. In the case of the present embodiment, since the MTF values in the tangential and radial directions are assumed to be measured, a crosshair composed of two straight lines parallel to the two directions is used. The tangential and radial directions are as shown in FIG.

[0052] The slit 30 for MTF measurement is illuminated from the side of the light source 21 that generates parallel light by, for example, an illumination device (not shown) such as a white LED (light emitting diode) or a halogen lamp. . At this time, the illumination device is set so that the intensity of light transmitted through each slit 30 is uniform. In addition, the diffraction element 23, the opening 29, and the The area excluding the lit 30 is configured so that the parallel light from the light source 21 is not transmitted and unnecessary light does not enter the lens system 22! RU

Further, as shown in FIG. 3, in order to make a right angle between the reference axis A and the reference plane of the lens system 22, the optical branching element 31 and the aperture 32 arranged on the reference axis A, And a photodetector 33 that detects the reflected light that is irradiated by the light source 21 and reflected by the reference plane of the lens system 22 and the light branching element 31. Further, as shown in FIG. 1, a first holding unit 34 that holds a part of lens elements (hereinafter referred to as a first lens element) 39 constituting the lens system 22 fixedly with respect to a reference axis A, A second holding unit 35 that holds the remaining lens elements (hereinafter referred to as second lens elements) 40 of the lens system 22 and a second moving mechanism 36 that moves the second holding unit 35 are provided. Then, the arithmetic control processing unit 28 calculates a control amount for controlling the movement of the second holding unit 35, generates a control signal based on this control amount, and outputs it to the second moving mechanism 36. And

[0054] Further, according to the design of the lens system 22, a mechanical shutter (hereinafter referred to as a mechanical shutter) 37 is arranged, or an IR (infrared) cut filter, a low-pass filter, or the like filter 38 on the image sensor 25. Need to be placed.

3 to 6 show an optical axis adjustment procedure by the lens system adjustment device. 7 to 9 show a condensing spot and a cross-shaped slit image formed on the image sensor 25. FIG. 10 to 12 show the MTF calculation method by this lens system adjusting device. Hereinafter, the optical axis adjustment method and MTF measurement method using this lens system adjustment apparatus will be described in detail with reference to FIGS.

FIGS. 3 to 6 show a procedure for adjusting the position of the lens system 22 and the image sensor 25 using the present lens system adjusting apparatus, and a procedure for adjusting the optical axis of the lens system 22.

In FIG. 3, first, adjustment is performed so that the reference axis A and the image sensor 25 are orthogonal to each other and the reference axis A and the center of the image sensor 25 are aligned.

Specifically, one of the reference light beams emitted from the light source 21 and passed through the half mirror as the light branching element 31 and the opening 29 disposed at the center of the substrate 24 on which the diffraction element 23 is formed. (Hereinafter referred to as the central axis ray) passes through the aperture 32, reaches the image sensor 25, is reflected by the cover glass (not shown) of the image sensor 25, and passes through the aperture 32 again. Reflected in the direction perpendicular to the reference axis A by the half mirror 31 and detected by the image sensor as the optical axis adjusting photodetector 33, the first moving mechanism 27 Adjust the tilt angle Θ and the tilt angle φ with respect to the X axis. In this case, although not shown in the figure, the output from the image sensor 33 is input to the arithmetic control processing unit 28, and the arithmetic control processing unit 28 causes the center of the image sensor 33 of the central axis ray to be centered. The amount of displacement in the Z-axis direction and the amount of displacement in the Y-axis direction are obtained, and the tilt angle Θ relative to the Y-axis is calculated based on the amount of displacement in the Z-axis direction. The tilt angle φ with respect to the X axis is calculated based on the amount of deviation. Then, a control signal based on the calculated tilt angles θ and φ is generated and output to the first moving mechanism 27.

[0059] Next, based on the signal from the image sensor 25, the arithmetic control processor 28 determines the amount of deviation of the central force of the image sensor 25 in the XY axis direction with respect to the central axis light beam as the reference axis A in the XY axis direction. The amount of movement in the XY-axis direction is calculated based on this amount of deviation. Further, a control signal based on the calculated movement amount is generated and output to the first movement mechanism 27. Then, the image sensor 25 is moved in the X and Y directions by the first moving mechanism 27, and the position of the image sensor 25 is adjusted so that the reference axis A and the center of the light receiving surface of the image sensor 25 coincide. In this way, the angle and position between the reference plane of the lens system 22 (the surface of the image sensor 25) and the reference axis (reference axis A) of the present lens system adjusting device are adjusted in advance. When a parallel plate composed of a filter 38 such as an IR cut filter or a low-pass filter is attached to the surface of the image sensor 25, the reflected light of the surface force of the parallel plate is used to You may adjust the angle and position.

Next, as shown in FIG. 4, the first lens element 39 constituting the lens system 22 is fixed by the first holding unit 34 while holding the state of the image sensor 25 after adjustment. Then, the first moving mechanism 27 moves the image sensor 25 in the + Z direction or so that the central axis light beam that has passed through the opening 29 and the aperture 32 of the substrate 24 is condensed on the image sensor 25. Shift in Z direction. In this case, the arithmetic control processing unit 28 calculates the illuminance of the image of the central axis ray based on the signal from the image sensor 25, and moves the image sensor 25 in the + Z direction or the −Z direction by a predetermined length while moving the image sensor 25 above. Try to find the position where the calculated illuminance is maximum. Alternatively, find the position where the spot diameter of the image of the central axis ray is minimized. You can do it.

[0061] When the fixed first lens element 39 has lens decentering or tilting, the central axis light beam incident on the first lens element 39 is slightly shifted from the center of the image sensor 25. It will be condensed at the position. In that case, since it is important that the central axis ray is incident on the image sensor 25 at a right angle from the viewpoint of image forming performance, the first moving mechanism 27 is used to make the image blur symmetric. The tilt angles θ and φ of 25 are adjusted, and further, the adjustment in the XY directions is performed so that the light reaching the image sensor 25 is positioned at the center of the image sensor 25. At that time, the lowering of the light condensing with respect to the image sensor 25 is corrected by shifting in the Z direction at any time. In this case, the arithmetic control processing unit 28 first calculates an illuminance distribution on the image sensor 25 with reference to the center of the center axis ray image and the illuminance at the center, and the calculated illuminance distribution is uniform. The tilt angles θ and φ of the image pickup device 25 are calculated, and a control signal based on the calculated tilt angles θ and φ is output to the first moving mechanism 27. Next, a control signal for positioning the center of the center axis ray image at the center of the image sensor 25 is generated and output to the first moving mechanism 27.

Next, as shown in FIG. 5, the aperture 32 is removed, and the remaining second lens element 40 constituting the lens system 22 is fixed by the second holding unit 35. The second holding unit 35 is shifted in the XYZ direction by the second moving mechanism 36 while adjusting the position in the Z direction of the image sensor 25 so that the focused spot is imaged on the image sensor 25 by the structure 27. Adjust the tilt angle. In this case, the image on the image sensor 25 changes as shown in FIGS. 7 and 8 show a case where the first lens element 39 of the lens system 22 and the second lens element 40 to be adjusted are relatively decentered or tilted. However, FIG. 7 is before the adjustment of the second lens element 40, and FIG. 8 is the adjustment of the second lens element 40.

In FIG. 7, the positions of the condensing spot 42 of the reference light beam that has passed through the opening 29 of the substrate 24 and the center 41 of the image sensor 25 are shifted. However, by performing XYZ adjustment and tilt angle adjustment of the second lens element 40, the converging spot 42 of the reference beam coincides with the center 41 of the image sensor 25 as shown in FIG. In this case, the arithmetic control processing unit 28 corresponds to the amount of deviation between the condensing spot 42 on the image sensor 25 and the center 41 of the image sensor 25. A control signal for positioning the condensing spot 42 of the reference beam at the center of the image sensor 25 is generated and output to the second moving mechanism 36.

[0064] Further, the light beam is incident on the lens system 22 corresponding to each angle of view that has been deflected by passing through each diffraction element 23 on the substrate 24 to form a group of focused spots 43 on the image sensor 25. The This group of focused spots 43 is made point-symmetric with respect to the focused spot 42 of the central ray as shown in FIG. 9 by performing XYZ adjustment and tilt angle adjustment of the second lens element 40. Be placed. In that case, the arithmetic control processing unit 28 calculates the center of gravity of the group of the condensing spots 43 based on the illuminance distribution of the condensing spot 43 on the image sensor 25, and positions the calculated center of gravity in the condensing spot 42. This control signal is generated and output to the second moving mechanism 36.

Therefore, if the second lens element 40 is adjusted as shown in FIG. 9, the force between the first lens element 39 and the second lens element 40 of the lens system 22 composed of a plurality of lenses is substantially decentered. It is adjusted so that there is no default. Furthermore, the image sensor 25 is also adjusted to an optimum position with respect to the lens system 22.

In FIGS. 7 to 9, all the focused spots 42 and 43 are simply indicated by circles. However, in reality, the optical spots due to lens tilt, decentration, etc. are generated, so the condensing spots 42 and 43 do not become round!

In addition, since temporary adjustment is being performed at the stage shown in FIG. 9, the second lens system 40 and the image sensor 25 in the lens system 22 are not fixed until the next MTF inspection process is completed.

[0068] Next, a method for measuring the MTF value will be described. The measurement of the MTF value is performed using a cross-shaped slit 30 formed on the substrate 24 on which the diffraction element 23 is formed and illuminated uniformly from the light source side.

First, the lens system 22 after the optical axes of the first and second lens elements 39 and 40 and the image sensor 25 are adjusted as described above is used for the slit 30 on the light receiving surface of the image sensor 25. The lens system 22 is focused on the surface of the substrate 24 so that the illuminance of the image is maximized, and the cross-shaped slit 30 is formed on the image sensor 25. In this state, as shown in FIG. 9, the image 44 of the cross-shaped slit 30 is formed on the light receiving surface of the image sensor 25. After that, the arithmetic control processing unit 28 makes a cross-shaped slit as shown in FIG. The intensity distribution is obtained in the radial direction and the tangential direction at the dotted line portion in 30 images 44, and the intensity distribution as shown in FIGS. 11A and 12A is obtained. Then, by performing Fourier transform on this intensity distribution, the MTF value is simply measured as shown in FIGS. 11B and 12B.

[0070] At this stage, if there is no particular problem with the MTF value (that is, if the difference between the calculated MTF value and the target MTF value is within the allowable range), as shown in FIG. The lens elements 39 and 40 of the lens system 22 after the optical axis adjustment and the image sensor 25 are fixed with an adhesive 45 or the like. If there is a problem with the MTF value, the second holding unit 35 is controlled by the second moving mechanism 36 based on the difference between the target MTF value and the calculated MTF value, and the lens system 22 is again detected. The optical axis adjustment is performed as described above.

[0071] The first and second lens elements 39, 40 and the image sensor 25 are fixed by, for example, supplying an ultraviolet curable adhesive as an adhesive 45 from an adhesive supply unit (not shown). This is performed by irradiating ultraviolet rays by an ultraviolet irradiation unit (not shown). Reference numeral 46 denotes an ND filter disposed between the light source 21 and the substrate 24.

[0072] Thus, the optical axis position adjustment step between the lens system 22 and the image pickup device 25 configured by a plurality of lenses, the optical axis adjustment step of the lens system 22, and the inspection step of the lens system 22 using the MTF. Can be continuously performed by the same lens system adjusting device. Moreover, the occurrence of defective products can be reduced by performing the optical axis adjustment step again based on the result of the inspection step.

[0073] In addition, the image pickup device by the first moving mechanism 27 and the second moving mechanism 36 at that time

The movement of the 25 and the second holding unit 35 is performed by a control signal generated by the arithmetic control processing unit 28 based on the outputs from the imaging elements 25 and 33. Therefore, the optical axis position adjustment between the lens system 22 and the image sensor 25, the optical axis adjustment of the lens system 22, and the inspection of the lens system 22 can be performed automatically and continuously.

In the present embodiment as described above, the image sensor 25 is moved via the holding unit 26 to the image sensor 25 that constitutes a camera lens such as a digital camera after being adjusted. A first moving mechanism 27 is provided. Then, as shown in FIG. 3, the light source 21, the aperture 29, the light branching element 31, the aperture 32, and the photodetector 33 are used, and the central axis light beam is The angle and position of the image sensor 25 are adjusted by the first moving mechanism 27 so that the center of the light detector 33 and the center of the photodetector 33 are aligned. Accordingly, the angle and position between the reference plane of the lens system 22 (the surface of the imaging element 25) and the reference axis (reference axis A) of the adjusting device can be adjusted in advance.

[0075] In addition, the first lens element 39 of the lens system 22 composed of a plurality of lenses is fixed by the first holding unit 34, and the image blur is symmetric with respect to the center of the image sensor 25. Thus, the imaging device 25 is moved by the first moving mechanism 27 so that the central axis light beam is collected at the center of the imaging device 25. Therefore, the optical axis adjustment and the position adjustment between the lens system 22 and the image pickup device 25 that constitute a camera lens such as a digital camera can be automatically performed continuously after adjustment.

[0076] Further, a substrate 24 on which a diffraction element 23 is formed so as to be point-symmetrical at a position corresponding to each angle of view of the lens system 22 is disposed between the light source 21 and the first lens element 39. Yes. Then, the second lens element 40 constituting the lens system 22 is fixed by the second holding unit 35, and the converging spot 42 of the reference beam coincides with the center 41 of the image sensor 25, so that each diffraction element of the substrate 24 is The second holding unit 35 is moved by the second moving mechanism 36 so that the group of converging spots 43 of the light beams deflected corresponding to each angle of view by 23 is point-symmetrical with respect to the center 41 of the image sensor 25. I try to move it. Therefore, the optical axis of the lens system 22 can be adjusted with high accuracy by light rays corresponding to a plurality of angles of view.

In addition, a cross-shaped slit 30 is imaged on the image sensor 25 with the focal point of the lens system 22 with the optical axis adjusted being adjusted to the surface of the substrate 24. Then, the MTF value is measured by obtaining the intensity distribution in the radial direction and the tangential direction in the image 44 of the cross-shaped slit 30 by the arithmetic control processing unit 28, and Fourier transforming this intensity distribution. ing. Therefore, following the optical axis adjustment of the lens system 22, the MTF value, which is an index of the resolving power of the lens system 22, can be measured automatically and easily. Furthermore, when the measurement result of the MTF value is bad, the optical axis adjustment of the lens system 22 can be performed again based on the measurement result of the MTF value. Therefore, the incidence of defective products can be reduced.

In the above-described embodiment, the calculation control processing unit 28 receives the signal from the image sensor 25. Based on the output signal, the peak value of the light intensity of the converging spots 42 and 43 formed by collimating the parallel light beam from the light source 21 on the image sensor 25 by the lens system 22 is obtained, and according to the above peak value. A function as the light amount adjusting means for adjusting the light amount of the light source can be provided. By doing so, it is possible to control the amount of light so that smear does not occur in the image sensor 25 even when the optical axis is adjusted, even if the light spot has a high energy density.

In the above-described embodiment, the MTF measurement slit 30 is provided on the substrate 24 separately from the diffraction element 23 as an MTF measurement pattern. However, the MTF measurement pattern can also be formed on the diffraction element 23. In such a case, the configuration of the substrate 24 is simplified because it is not necessary to provide a slit or chart for MTF measurement separately from the diffraction element 23. Furthermore, the MTF can be measured using the diffraction element 23, and the optical adjustment at the time of MTF measurement is eliminated, and the MTF measurement can be performed efficiently following the optical axis adjustment of the lens system 22. it can.

[0080] In the above-described embodiment, as an image sensor used for various adjustments, an image sensor 25 that forms a camera lens such as a digital camera integrally with the lens system 22 after the adjustment is used. However, there is no problem even if an image sensor dedicated for adjustment is used. However, in that case, after the optical axis adjustment of the lens system 22 and the measurement of the MTF value are completed, it is necessary to adjust the position of the imaging system and the lens system 22 constituting the camera lens.

[0081] In the above embodiment, the lens system 22 is composed of two lens elements, the first lens element 39 and the second lens element 40, but is composed of three or more lens elements. In this case, the optical axis of the lens system can be adjusted in the same manner. Even in this case, the lens element closest to the imaging element 25 may be held by the second holding unit 35 to adjust the position and angle.

In the above embodiment, the light source 21, the substrate 24, the holding unit 26, the first moving mechanism 27, the calculation control processing unit 28, the first holding unit 34, the second holding unit 35, and the second movement The lens system adjusting device that is schematically configured by the mechanism 36 and performs optical adjustment on the lens system 22 and the image sensor 25 has been described. However, the above lens system adjusting device is integrated with the lens system 22 and the image sensor 25, which will later be integrated into a digital camera or the like. Therefore, it can be regarded as a manufacturing apparatus of the imaging apparatus.

Claims

The scope of the claims

[1] A laser light source unit (21) that generates parallel light rays serving as a reference axis (A),

A to-be-adjusted object including a lens system (22) and an image sensor (25) comprising a plurality of lenses, and disposed between the laser light source part (21) and the to-be-adjusted object, and the laser light source part (21) A part of the parallel light beam from the beam is deflected to generate a parallel light beam whose angle with the reference axis (A) is an angle corresponding to the angle of view of the lens system (22) to the lens system (22). A plurality of incident diffractive elements (23) and a part of the parallel light beam from the laser light source part (21) located at the center part are allowed to pass through to generate a reference beam bundle as the reference axis (A). A substrate (24) formed with an aperture (29) to be incident on the lens system (22),

A moving unit (27, 36) for moving at least one of the lens system (22) and the image sensor (25);

Based on the output of the image sensor (25), the image (42) of the reference beam bundle and the image (43) of the deflected beam bundle at a predetermined position on the light receiving surface of the image sensor (25) Is calculated by calculating the amount of movement of the lens system (22) or image sensor (25) for positioning the image sensor and controlling the operation of the moving unit (27, 36) based on the calculated amount of movement. A lens system adjusting device comprising: a section (28).

[2] In the lens system adjusting device according to claim 1,!

An optical branching element (31) disposed between the substrate (24) and the object to be adjusted on the reference axis (A);

An aperture (32) disposed between the optical branching element (31) and the object to be adjusted on the reference axis (A);

It is emitted from the laser light source section (21) and passes through the opening (29), the optical branching element (31), and the aperture (32) of the substrate (24), and then passes through the reference plane of the image sensor (25). A photodetector (33) for detecting the light reflected and reflected again in the direction perpendicular to the reference axis (A) by the optical branching element (31) after passing through the aperture (32) again.

A lens system adjustment device comprising:

[3] In the lens system adjusting device according to claim 1,!

The light is deflected by the diffraction element (23) of the substrate (24) and is incident on the lens system (22). The diameter of the parallel light beam and the diameter of the reference light beam that passes through the opening (29) of the substrate (24) and enters the lens system (22) are the entrance pupil of the lens system (22). Lens system adjusting device characterized in that it is set larger than the diameter of the lens.

[4] In the lens system adjusting device according to claim 1,!

The moving unit (27, 36) is configured to move the lens system (22) and the imaging device (25).

A first holding unit (34) for fixing and holding a first lens element (39) constituting a part of the lens system (22) with respect to the reference axis (A);

A second holding unit (35) for holding the second lens element (40) constituting the remainder of the lens system (22);

The moving part (36) for moving the lens system (22) constitutes a lens element moving mechanism for moving at least one of the first holding unit (34) and the second holding unit (35).

A lens system adjustment device comprising:

[5] The lens system adjusting apparatus according to claim 4, wherein

The substrate (24) is provided with a chart (30) for MTF measurement,

The laser light source section (21) side force comprises illumination means for uniformly illuminating the chart (30),

The arithmetic control processing unit (28) calculates the MTF value of the lens system (22) based on the output of the imaging device (25) with respect to the chart (30).

A lens system adjusting device.

[6] In the lens system adjusting device according to claim 1,!

Based on the output of the image sensor (25), the parallel light beam emitted from the laser light source section (21) is condensed and formed on the light receiving surface of the image sensor (25) by the lens system (22). Lens system adjustment characterized by comprising a light amount adjusting means for obtaining a peak value of the light intensity of the spot (42, 43) and adjusting the light amount of the laser light source section (21) according to the peak value. apparatus.

[7] A lens system adjustment method using the lens system adjustment device according to claim 4, The operation of the moving unit (27) is controlled by the arithmetic control processing unit (28), and the image (42) of the reference beam passing through the opening (29) of the substrate (24) is converted into the image sensor (25). ) Moving the image sensor (25) so as to be positioned at the center of the light receiving surface of

The first lens unit (39) is fixedly held with respect to the reference axis (A) by the first holding unit (34), while the second lens element (40 is fixed by the second holding unit (35). The process of holding the thigh,

The operation of the lens element moving mechanism is controlled by the arithmetic control processor (28), and the first lens element (39) of the reference beam bundle that has passed through the opening (29) of the substrate (24) and the above. At least one of the first holding unit (34) and the second holding unit (35) so that the condensing spot (42) by the second lens element (40) is positioned at the center of the light receiving surface of the image sensor (25). Moving one of them;

The operation of the lens element moving mechanism is controlled by the arithmetic control processing unit (28), and the first lens element (39) of the light bundle deflected through the diffraction element (23) of the substrate (24) is used. ) And the condensing spot (43) force by the second lens element (40) The first holding unit (34) and the second holding unit (34) are arranged so as to be arranged at predetermined positions on the light receiving surface of the image sensor (25). Moving at least one of the holding units (35);

Fixing the lens system (22) and the image sensor (25) with respect to the reference axis (A).

A lens system adjustment method using the lens system adjustment apparatus according to claim 5, wherein the operation of the moving unit (27) is controlled by the arithmetic control processing unit (28), and the substrate (24) Moving the image sensor (25) so that the image (42) of the reference beam bundle that has passed through the aperture (29) is positioned at the center of the light receiving surface of the image sensor (25);

The operation of the lens element moving mechanism is controlled by the arithmetic control processor (28), and the first lens element (39) of the reference beam bundle that has passed through the opening (29) of the substrate (24) and the above. The condensing spot (42) by the second lens element (40) is the center of the light receiving surface of the image sensor (25). Moving at least one of the first holding unit (34) and the second holding unit (35) so as to be positioned at

The operation of the lens element moving mechanism is controlled by the arithmetic control processing unit (28), and an image of light from the illumination means (44) passing through the MTF measurement chart (30) of the substrate (24) (44) ) Moving the first holding unit (34) and the second holding unit (35) so that an image is formed on the light receiving surface of the imaging device (25),

A step of calculating an MTF value by the arithmetic control processor (28) based on the output of the imaging device (25) relating to the image (44) of the chart (30);

When the difference between the calculated MTF value of the lens system (22) and the target MTF value is within a predetermined range, the lens system (22) and the image sensor (25) are connected to the reference axis ( A process for fixing to A)

A lens system adjustment method comprising:

[9] An apparatus for manufacturing an imaging device including a lens system (22) composed of a plurality of lenses and an imaging device (25),

An image sensor holding unit (26) that holds the image sensor (25) and adjusts the optical axis of the image sensor (25) to coincide with the reference axis (A) by moving the image sensor (25). 27) and the lens system (22), and the lens system (22) is moved so that the optical axis of the lens system (22) matches the optical axis of the image sensor (25). Lens system holder (34, 35, 36) to be adjusted,

Based on the output from the image sensor (25), the amount of deviation of the optical axis of the image sensor (25) from the reference axis (A) and the image sensor (25) of the optical axis of the lens system (22) The amount of deviation from the optical axis of the image sensor is calculated, and based on the calculated amount of deviation, the image sensor holding unit (26, 27) And the lens system holding unit (34, 35, 36), while calculating the MTF value of the lens system (22) after the optical axis is adjusted, and evaluating the calculated MTF value. Arithmetic control processor (28),

If the evaluation result of the MTF value by the arithmetic control processing unit (28) is acceptable, a fixing unit for fixing the lens system (22) to the image sensor (25)

An apparatus for manufacturing an imaging device, comprising:

[10] The apparatus for manufacturing an imaging device according to claim 9,

A laser light source (21),

A part of the parallel light beam from the laser light source (21) is deflected to generate a parallel light beam whose angle with the reference axis (A) is an angle corresponding to the angle of view of the lens system (22). A plurality of diffraction elements (23) incident on the lens system (2 2) and

An imaging device manufacturing apparatus comprising a light source unit including:

[11] In the imaging device manufacturing apparatus according to claim 10,

An apparatus for manufacturing an imaging device, wherein a pattern for MTF measurement is formed on the diffraction element.

[12] In the apparatus for manufacturing an imaging device according to claim 9,

The fixed part is

An adhesive supply section for supplying an ultraviolet curable adhesive;

An ultraviolet irradiation unit for irradiating the ultraviolet curable adhesive with ultraviolet rays;

An apparatus for manufacturing an imaging device, characterized by comprising:

[13] A method of manufacturing an imaging device including a lens system (22) composed of a plurality of lenses and an imaging device (25),

Based on the output of the imaging device (25) force that received light from the light source (21) on the reference axis (A), the imaging device (25) of the optical axis of the lens system (22) The amount of deviation of the optical axis force is obtained, and the lens system (22) is moved based on the obtained amount of deviation, so that the optical axis of the lens system (22) matches the optical axis of the imaging device (25). An optical axis adjustment step to be performed;

The light from the light source (21) is imaged on the light receiving surface of the image sensor (25) via the lens system (22) with the optical axis adjusted, and the MTF value of the lens system (22) is obtained. Calculate this calculated MTF calculation to evaluate the measured MTF value

If the evaluation result of the MTF value is acceptable, a lens system fixing step for fixing the lens system (22) to the image sensor (25);

An image pickup apparatus manufacturing method comprising:

[14] In the manufacturing method of the imaging device according to claim 13,

In the optical axis adjustment step,

Using a laser light source as the light source (21),

A plurality of diffractive elements (23) arranged between the laser light source and the lens system (22) deflect some of the parallel rays from the laser light source so that the angle with the reference axis (A) is A parallel light flux having an angle corresponding to the angle of view of the lens system (22) is generated and incident on the lens system (22).

A method for manufacturing an imaging device.

[15] In the manufacturing method of the imaging device according to claim 14,

A pattern for MTF measurement is formed on the diffraction element, and light from the light source that has passed through the MTF measurement pattern is used in the MTF calculation-evaluation process. Method.