CN113203553A - Lens center error measuring system and measuring method - Google Patents
Lens center error measuring system and measuring method Download PDFInfo
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- CN113203553A CN113203553A CN202110435828.XA CN202110435828A CN113203553A CN 113203553 A CN113203553 A CN 113203553A CN 202110435828 A CN202110435828 A CN 202110435828A CN 113203553 A CN113203553 A CN 113203553A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention relates to a system and a method for measuring lens center errors, which solve the problem that the prior art completely depends on an image processing technology to measure the lens center errors and realize high-precision non-contact measurement of the lens center errors. The laser beam splitter comprises a laser light source, a shaping lens, a beam splitter prism and a lens adjusting mechanism which are sequentially arranged along the vertical direction of an optical axis, wherein the lens adjusting mechanism is provided with a lens to be tested, one side of the beam splitter prism is provided with a video monitor, and the other side of the beam splitter prism is provided with a plane reflector; the lens adjusting mechanism comprises a lens support used for setting a lens to be measured, a combined platform which can move in two horizontal directions and drive the measuring part to rotate around a shaft is arranged below the lens support, and a vertical displacement device connected with the lens support is arranged on the combined platform. The vertical displacement device comprises a displacement rod, a grating ruler, a displacement sensor or a nanometer displacement platform.
Description
The technical field is as follows:
the invention belongs to the technical field of optical detection, and relates to a system and a method for measuring lens center error.
Background art:
with the rapid development of the optical industry, the structure of the optical system is more and more complex, and the technical indexes such as resolution, aperture, field of view, distortion and the like are also continuously improved, so that the requirements on the optical system in various fields are higher and higher. However, the optical lens generates a central error in a production process due to various reasons, resulting in an increase in system aberration and a serious influence on imaging quality. Therefore, in the processing of the optical lens, the measurement of the lens center error has great significance.
At present, the methods for representing the lens center error include a surface inclination angle, an eccentricity difference, a spherical center difference, a side thickness difference and the like. The surface inclination angle refers to an included angle between a normal line at the centering vertex of the optical surface and the reference axis; the eccentricity difference refers to the deviation of the lens geometry from the optical axis at the center of the lens, for a thin lens, i.e. the deviation of the lens geometry center from the optical center; the spherical center offset refers to the amount of deviation of the center of curvature of the optical surface of the lens from the reference axis; the edge thickness difference refers to the difference in thickness of the lens edges.
The method for measuring the lens center deviation error comprises a three-coordinate measuring method, an interference method, an auto-collimation method and the like. The three-coordinate measuring method is a contact measuring method, the contact measuring can cause certain damage to the element, the size of the center deviation error cannot be accurately measured by adopting point-by-point gradual measurement for reducing the damage, and the measuring period is longer; the measurement result of the interference method has higher precision, but the optical system is more complex and has certain requirements on the reflectivity of the piece to be measured, so that the method has certain limitations and is not easy to popularize; the auto-collimation measuring method is suitable for measuring the spherical lens, the optical system is simpler, the used optical devices are fewer, but the measuring precision and the measuring sensitivity of the auto-collimation measuring method are influenced by a CCD/CMOS camera and an image processing algorithm.
At present, the widely used instruments adopt an interference method and an auto-collimation method. The interference method instrument has complex structure, large volume and difficult assembly and adjustment; the auto-collimation method mainly comprises an auto-collimation light path and a CCD camera, and the measuring method is characterized in that the offset of reflected light or transmitted light of the lens to be measured is calculated through the position of a light spot on the CCD camera, so that the measurement of the center error of the lens is completed. In 1997, the literature "Solid state division. one: two 2dimensional PSDs", Hamamatsu Photonics KK obliquely irradiates point laser to the center of a lens, and a CCD is placed on the other side symmetrical to the optical axis of the lens to be measured. The lens is rotated and the circular track of the spot is recorded by the CCD, and the center error is obtained by calculating the diameter of the circular track. In 2013, the literature, "research on PSD-based lens centering apparatuses", determines the magnitude and direction of lens decentration by PSD measurement of the position of a diffuse spot. Patent document 1 (patent document 1, patent No. CN204831226U) discloses a technique in which a beam of parallel light is incident on a lens to be detected, and a received optical system and an imaging CCD are attached to a transmission/reflection position to detect an image point. When the lens to be measured is measured, the lens to be measured is rotated, if the lens to be measured has a central error, the image point track is a circular ring with a certain radius, wherein the diameter of the circular ring and the center of the lens to be measured deviate to form a corresponding geometric relation, and then the central error of the lens to be measured is back calculated. The method is characterized in that the lens center error is obtained by directly and quantitatively calculating the position of the light spot received on the CCD image surface, the measurement result is directly influenced by the imaging quality of the camera and is easily interfered by environmental factors, and the method is closely related to the quality of an image processing algorithm.
The invention content is as follows:
the invention aims to provide a system and a method for measuring lens center error, which solve the problem that the lens center error is measured by completely depending on an image processing technology in the prior art and realize high-precision non-contact measurement of the lens center error.
In order to achieve the purpose, the invention adopts the technical scheme that:
a lens center error measuring system, characterized in that: the laser beam splitter comprises a laser light source, a shaping lens, a beam splitter prism and a lens adjusting mechanism which are sequentially arranged along the vertical direction of an optical axis, wherein the lens adjusting mechanism is provided with a lens to be tested, one side of the beam splitter prism is provided with a video monitor, and the other side of the beam splitter prism is provided with a plane reflector; the lens adjusting mechanism comprises a lens support used for setting a lens to be measured, a combined platform consisting of an XY displacement platform and a rotating platform is arranged below the lens support, and a vertical displacement device connected with the lens support is arranged on the combined platform.
The vertical displacement device comprises a displacement rod, a grating ruler, a displacement sensor or a nanometer displacement platform.
A method for determining a lens center error using the system of claim 1, comprising: the method comprises the following steps:
the method comprises the following steps: calibrating the device:
placing the flat plate or the plane reflector on the lens adjusting mechanism, and adjusting the vertical displacement device to enable light spots reflected by the surface of the flat plate or the plane reflector to be overlapped with light spots reflected into the video monitor by the plane reflector so as to finish calibration;
step two: mounting a lens to be tested on a lens adjusting mechanism;
step three: turning on a laser light source, and adjusting the laser light source into a point light source with a smaller divergence angle after passing through a shaping lens; after the laser reaches the beam splitting prism, a beam of light reaches the plane reflector, is reflected by the plane reflector and finally reaches the center of the video monitor, and is marked as a first light spot; the other beam of light falls on the lens to be measured, and after the light is reflected by the upper surface and the lower surface of the lens to be measured, the video monitor receives the light spots reflected by the upper surface and the lower surface of the lens to be measured, and the light spots are respectively marked as a second light spot and a third light spot; adjusting the inclination of the lens to be measured according to the relative positions of the three light spots displayed on the video monitor;
step four: observing the position of a light spot on a video monitor, and recording the vertex space coordinates of the three vertical displacement devices when the lens to be detected only has a central error, so as to form a plane in space; adjusting the heights of the three vertical displacement devices, moving the three vertical displacement devices in two horizontal directions of the lens adjusting mechanism to enable two light spots reflected by the upper surface and the lower surface of the lens to be measured to be overlapped with light spots reflected by a central plane reflector of the video monitor, and recording the space coordinates of the vertexes of the three vertical displacement devices to form a new plane; and obtaining the central error of the lens to be measured by calculating the included angle of the two surfaces.
In the fourth step, the method for judging the center error and the tilt error of the lens to be measured is as follows:
if the video monitor receives light spots reflected by the upper surface and the lower surface of the lens to be measured and the plane mirror, the light spots are overlapped in the center of the video monitor, and when the part to be measured is rotated to drive the lens to be measured to rotate along the central axis of the lens to be measured, the positions of three overlapped laser points are not changed, which indicates that the lens to be measured does not have a central error and an inclination error;
if two light spots received by the video monitor and reflected to the video monitor by the upper surface and the lower surface of the lens to be measured are independent, and the two light spots are reflected to the center of the video monitor by deviating from the plane reflector, when the rotation measuring part drives the lens to be measured to rotate along the central axis of the lens to be measured, the two light spots can rotate around the center of the video monitor, which indicates that the lens to be measured only has a tilt error;
if two light spots reflected to the video monitor from the upper surface and the lower surface of the lens to be measured independently exist on the video monitor and deviate from the plane reflector to reflect to the light spot at the center of the video monitor, when the rotation measuring part drives the lens to be measured to rotate along the central axis of the lens to be measured, the positions of the two light spots are not changed, and the fact that the lens to be measured only has a center error is indicated.
The method for calculating the lens center error X in the fourth step is as follows:
the included angle of the two planes can be solved by the normal vectors corresponding to the two space plane equations:
theta obtained by the formula (3) is the central error X;
the lens to be measured is placed on the lens adjusting mechanism, the fact that the lens does not incline can be observed on a video monitor, and coordinates of three vertexes are a (X1, Y1, Z1), b (X2, Y2, Z2) and c (X3, Y3, Z3);
the vertical displacement device is adjusted to enable the three light spots in the video monitor to coincide, and the coordinates of three vertexes are a1(X4, Y4 and Z4), b1(X5, Y5 and Z5) and c1(X6, Y6 and Z6);
the space plane equations of two states can be obtained from the coordinates in the coordinate system, and the space normal vectors corresponding to the space plane equations are
And
compared with the prior art, the invention has the advantages that:
1. the system of the invention uses a point light source when measuring, and further uses a shaping lens to adjust the divergence angle of the point light source, so that the influence of the diameter of a light spot on the result is minimized, and the vertical displacement device in the lens adjusting mechanism can move in the vertical direction to realize the large-amplitude adjustment of the lens in the space, thereby having no requirement on the surface curvature of the lens to be measured.
2. The system of the invention obtains the lens center error by recording the vertex coordinates of the micro-displacement device when the center error exists in the lens and the vertex coordinates of the micro-displacement device when the three light spots coincide and calculating the included angle of two space planes by utilizing the space geometric relationship. The whole process mainly realizes the measurement of the lens center error through the micro displacement of the three displacement devices, and the measurement precision is higher.
3. The video monitor in the system only feeds back the measurement system, assists the adjustment of the micro-displacement device in the system, completes the measurement of the center error of the lens, and does not directly take the relative position of the light spot in the monitor as the measurement basis. The measuring result is not influenced by a video monitor, and the influence of the image resolution and the camera on the measuring result is eliminated.
4. The invention has simple integral structure and lower requirement on environment, and can easily measure and obtain the lens center error only by the movement amount of the three micro-displacement devices.
Description of the drawings:
FIG. 1 is a schematic diagram of a lens center error measurement system according to the present invention;
fig. 2 is a schematic structural view of the lens adjusting mechanism of the present invention.
FIG. 3 is a schematic diagram of lens center error;
FIG. 4 is a schematic diagram of the vertex coordinates of the micro-displacement device when the lens has a center error;
fig. 5 is a schematic diagram of the vertex coordinates of the micro-displacement device when three light spots coincide.
In the figure: the device comprises a laser source 1, a shaping lens 2, a beam splitting prism 3, a video monitor 4, a lens to be measured 5, a lens adjusting mechanism 6, a plane reflector 7, a lens support 6-1, a vertical displacement device 6-2 and a combined platform 6-3.
The specific implementation mode is as follows:
in order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention relates to a lens center error measuring system, which comprises a laser light source 1, a shaping lens 2, a beam splitter prism 3 and a lens adjusting mechanism 6 which are sequentially arranged along the vertical direction of an optical axis, wherein a lens 5 to be measured is arranged on the lens adjusting mechanism 6, a video monitor 4 is arranged on one side of the beam splitter prism 3, and a plane reflector 7 is arranged on the other side of the beam splitter prism 3, as shown in figure 1.
Referring to fig. 2, the lens adjusting mechanism 6 includes a lens support 6-1 for arranging a lens to be measured, a combined platform 6-3 capable of moving in two horizontal directions and driving the measuring part to rotate around an axis is arranged below the lens support 6-1, and a vertical displacement device 6-2 connected with the lens support 6-1 is arranged on the combined platform 6-3. The lens support 6-1 is used for placing the lens 5 to be measured, and the vertical displacement device 6-2 can perform micro displacement in the vertical direction. The vertical displacement device 6-2 can be a displacement rod, a grating ruler, a displacement sensor, a nanometer displacement table and the like, and can move and measure micro displacement in the vertical direction. The combined platform 6-3 can realize manual or electric micro-displacement movement in two horizontal XY directions, and the motor drives the measuring part to rotate around the shaft.
The invention also comprises a measuring method of the lens center error measuring system, which comprises the following steps:
the method comprises the following steps: the device is calibrated.
The measurement device needs to be calibrated before the entire device can be used. In calibration, a flat plate (or a flat mirror) may be placed on the lens adjustment mechanism 6, and the vertical displacement device 6-2 may be adjusted to overlap the light spot reflected by the surface of the flat plate and the light spot reflected by the flat mirror 7 onto the video monitor 4 (or the vertical displacement device 6-2 may be adjusted to overlap the light spot reflected by the flat mirror placed on the lens adjustment mechanism 6 and the light spot reflected by the flat mirror 7 onto the center of the video monitor 4). The device may be considered to be calibrated.
Step two: mounting a lens 5 to be tested on a lens adjusting mechanism 6;
step three: turning on the laser light source 1, and adjusting the laser light source 1 into a point light source with a smaller divergence angle after passing through the shaping lens 2; after the laser reaches the beam splitting prism 3, a beam of light reaches the plane reflector 7, is reflected by the plane reflector 7 and finally reaches the center of the video monitor 4 and is marked as a first light spot; the other beam of light falls on the lens 5 to be measured, and reflected by the upper surface and the lower surface of the lens 5 to be measured, the video monitor receives light spots reflected by the upper surface and the lower surface of the lens to be measured, and the light spots are marked as a second light spot and a third light spot respectively; adjusting the inclination of the lens 5 to be measured according to the relative positions of the three light spots displayed on the video monitor;
step four: observing the position of a light spot on the video monitor 4, and recording the vertex space coordinates of the three vertical displacement devices 6-2 when the lens to be measured only has a central error, so as to form a surface in space; adjusting the heights of the three vertical displacement devices 6-2, and moving the lens adjusting mechanism 6 in two horizontal directions to enable two light spots reflected by the upper surface and the lower surface of the lens 5 to be measured to be overlapped with light spots reflected by the central plane reflector 7 of the video monitor 4, and recording the space coordinates of the vertexes of the three vertical displacement devices 6-2 to form a new plane; and the central error of the lens to be measured can be obtained by calculating the included angle of the two surfaces.
In the fourth step, the method for judging the center error and the tilt error of the lens to be measured is as follows:
if the video monitor 4 receives light spots reflected by the upper surface and the lower surface of the lens 5 to be measured and the plane mirror 7, the light spots are overlapped in the center of the video monitor 4, and when the part to be measured is rotated to drive the lens 5 to be measured to rotate along the central axis of the lens, the positions of the three overlapped laser points are not changed, which indicates that the lens 5 to be measured does not have a central error and an inclination error;
if two light spots received by the video monitor 4 and reflected by the upper surface and the lower surface of the lens 5 to be measured to the video monitor 4 independently exist and deviate from the light spot reflected by the plane reflector 7 to the center of the video monitor 4, when the rotation measuring part drives the lens 5 to be measured to rotate along the central axis thereof, the two light spots can rotate around the center of the video monitor 4, which indicates that the lens 5 to be measured only has a tilt error;
if two light spots reflected to the video monitor 4 from the upper surface and the lower surface of the lens 5 to be measured independently exist on the video monitor 4 and deviate from the light spot reflected to the center of the video monitor 4 by the plane reflector 7, when the rotation measuring part drives the lens 5 to be measured to rotate along the central axis thereof, the positions of the two light spots are not changed, which indicates that the lens 5 to be measured only has a center error.
The method for calculating the lens center error in the fourth step is as follows:
as shown in fig. 3, the lens center error is defined as the angle of the normal at the apex of the optical surface's center with respect to the reference axis.
As shown in the spatial coordinate systems of fig. 4 and 5, three straight lines in the drawings respectively represent three vertical displacement devices 6-2 on the lens adjusting mechanism 6, and the positions of the three line segments on the XOY plane in the coordinate system are the corresponding positions of the three vertical displacement devices 6-2 on the lens adjusting mechanism 6; the black points at the top of the three line segments represent the positions of the tops of the three vertical displacement devices 6-2 in real space.
Fig. 4 differs from fig. 5 in that fig. 4 represents the placement of the lens 5 under test on the lens adjusting mechanism 6, and it can be observed on the video monitor 4 that there is no tilt of the lens 5 under test, and the coordinates of the three vertices at this time are a (X1, Y1, Z1), b (X2, Y2, Z2), c (X3, Y3, Z3), respectively; fig. 5 represents a state where three light spots are superimposed on the video monitor by adjusting the vertical displacement device 6-2, and the coordinates of the three vertexes are a1(X4, Y4, Z4), b1(X5, Y5, Z5), and c1(X6, Y6, Z6).
From the coordinates in the coordinate systems of fig. 4 and 5, the spatial plane equations in the two states can be obtained:
Ax+By+Cz+D＝0 (1)
A1x+B1y+C1z+D1＝0 (2)
at this time, the spatial normal vectors respectively corresponding to the spatial plane equations (1) and (2) are
And
the included angle between the two planes can be obtained by the normal vector corresponding to the above two space plane equations
The θ obtained by the formula (3) is the central error X.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and it should be noted that those skilled in the art should make modifications and variations without departing from the principle of the present invention.
Claims (5)
1. A lens center error measuring system, characterized in that: the device comprises a laser light source (1), a shaping lens (2), a beam splitting prism (3) and a lens adjusting mechanism (6) which are sequentially arranged along the vertical direction of an optical axis, wherein a lens to be detected (5) is arranged on the lens adjusting mechanism (6), a video monitor (4) is arranged on one side of the beam splitting prism (3), and a plane reflector (7) is arranged on the other side of the beam splitting prism (3); the lens adjusting mechanism (6) comprises a lens support (6-1) for arranging a lens (5) to be measured, a combined platform (6-3) consisting of an XY displacement platform and a rotating platform is arranged below the lens support (6-1), and a vertical displacement device (6-2) connected with the lens support (6-1) is arranged on the combined platform (6-3).
2. A lens center error measurement system according to claim 1, wherein: the vertical displacement device (6-2) comprises a displacement rod, a grating ruler, a displacement sensor or a nanometer displacement platform.
3. A method for determining a lens center error using the system of claim 1, comprising: the method comprises the following steps:
the method comprises the following steps: calibrating the device:
placing a flat plate or a plane reflector on the lens adjusting mechanism (6), adjusting the vertical displacement device (6-2) to enable light spots reflected by the surface of the flat plate or the plane reflector to be overlapped with light spots reflected to the video monitor (4) by the plane reflector (7) to finish calibration;
step two: installing a lens (5) to be tested on the lens adjusting mechanism;
step three: turning on a laser light source (1), and adjusting the laser light source (1) into a point light source with a smaller divergence angle after passing through a shaping lens (2); after the laser reaches the beam splitting prism (3), a beam of light reaches the plane reflector (7), is reflected by the plane reflector (7) and finally reaches the center of the video monitor (4) and is marked as a first light spot; the other beam of light falls on the lens (5) to be measured, and is reflected by the upper surface and the lower surface of the lens (5) to be measured, and the video monitor (4) receives the light spots reflected by the upper surface and the lower surface of the lens (5) to be measured, and the light spots are respectively marked as a second light spot and a third light spot; the inclination of the lens (5) to be measured is adjusted through the relative positions of the three light spots presented on the video monitor (4);
step four: observing the position of a light spot on a video monitor (4), and recording the vertex space coordinates of three vertical displacement devices (6-2) when the lens (5) to be measured only has a central error to form a surface in space; adjusting the heights of the three vertical displacement devices (6-2) and moving the lens adjusting mechanism (6) in two horizontal directions to enable two light spots reflected by the upper and lower surfaces of the lens (5) to be measured to be overlapped with light spots reflected by a central plane reflector (7) of the video monitor (4), and recording the space coordinates of the vertexes of the three vertical displacement devices (6-2) to form a new plane; and obtaining the central error of the lens (5) to be measured by calculating the included angle of the two surfaces.
4. A lens center error measuring method according to claim 3, wherein: in the fourth step, the method for judging the center error and the tilt error of the lens to be measured is as follows:
if the video monitor (4) receives light spots reflected by the upper surface, the lower surface and the plane mirror (7) of the lens to be measured (5) and is overlapped on the positive center of the video monitor (4), and when the part to be measured is rotated to drive the lens to be measured (5) to rotate along the central axis of the lens to be measured, the positions of three overlapped laser points are not changed, which indicates that the lens to be measured (5) does not have a central error and an inclination error;
if two light spots received by the video monitor (4) and reflected to the video monitor (4) by the upper surface and the lower surface of the lens to be measured (5) are independent and deviate from the light spot reflected to the center of the video monitor (4) by the plane reflector (7), when the rotation measuring part drives the lens to be measured (5) to rotate along the central axis of the lens to be measured, the two light spots rotate around the center of the video monitor (4), which indicates that the lens to be measured (5) only has a tilt error;
if the video monitor (4) receives two light spots which are reflected to the video monitor (4) by the upper surface and the lower surface of the lens to be measured (5) and independently exist and deviate from the light spot which is reflected to the center of the video monitor (4) by the plane reflector (7), when the rotation measuring part drives the lens to be measured (5) to rotate along the central axis of the lens to be measured, the positions of the two light spots are not changed, and the fact that the lens to be measured (5) only has a center error is shown.
5. A lens center error measuring method according to claim 3, wherein: the method for calculating the lens center error X in the fourth step is as follows:
the included angle of the two planes can be solved by the normal vectors corresponding to the two space plane equations:
theta obtained by the formula (3) is the central error X;
the lens to be measured (5) is placed on the lens adjusting mechanism, the absence of inclination of the lens can be observed on a video monitor (4), and the coordinates of three vertexes are a (X1, Y1, Z1), b (X2, Y2, Z2) and c (X3, Y3 and Z3);
the three light spots in the video monitor are overlapped by adjusting a vertical displacement device (6-2), and the coordinates of three vertexes are a1(X4, Y4 and Z4), b1(X5, Y5, Z5) and c1(X6, Y6 and Z6);
the space plane equations of two states can be obtained from the coordinates in the coordinate system, and the space normal vectors corresponding to the space plane equations are
And
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| CN114323582A (en) * | 2021-12-22 | 2022-04-12 | 光皓光学(江苏)有限公司 | Wavefront test method and device with platform lens |
| CN114397762A (en) * | 2022-01-04 | 2022-04-26 | 中国科学院微电子研究所 | Debugging method for main optical axis of optical system |
| CN114397762B (en) * | 2022-01-04 | 2023-11-10 | 中国科学院微电子研究所 | Method for debugging main optical axis of optical system |
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| CN113203553B (en) | 2023-07-14 |
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