CN109959350A - The detection method and device of prism right angle working face verticality - Google Patents
The detection method and device of prism right angle working face verticality Download PDFInfo
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- CN109959350A CN109959350A CN201711423538.3A CN201711423538A CN109959350A CN 109959350 A CN109959350 A CN 109959350A CN 201711423538 A CN201711423538 A CN 201711423538A CN 109959350 A CN109959350 A CN 109959350A
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- working face
- right angle
- angular instrument
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
Abstract
The invention discloses a kind of detection method and device of prism right angle working face verticality, and detection device includes: mounting table, have the placed side for placing tested prism, and mounting table can be swung along the inclined direction of placed side；Angular instrument, measurement end is towards the region setting for placing tested prism on the mounting table.Since mounting table has placed side, and tested prism is rotatable, mounting table tiltable is swung, so that the tested prism being placed on mounting table different measuring surface can be gone to it is opposite with angular instrument, and the measurement light that mounting table may make the measuring surface auto-collimation reflecting goniometer of tested prism to emit by wallowing motion, form self-collimation measurement, to can accurately detect the error of perpendicularity of tested prism right angle working face by mounting table and angular instrument, therefore the structure of this detection device and method is simple, easy to detect and detection accuracy is high.
Description
Technical field
The present invention relates to the detections of optical element working face verticality, and in particular to a kind of prism right angle working face verticality
Detection method and device.
Background technique
The error of perpendicularity of prism right angle working face can utilize three coordinate measuring engine measurement, but since the technology belongs to contact
Formula measurement is easy to scratch working face, and precision is lower when measuring bore lesser prism.
The circumferentially closed prism special for hexahedron etc., using sewage station or full combined method (JJG283-2007
Regular polygonal prism body vertification regulation) it measures, measurement accuracy is higher, but this method is related to high-precision multiteeth indexing table, multi-panel
The more instrument and equipment such as rib body, mandrel, autocollimator, adjustment mechanism and tool tooling, operating process is complicated, data processing
It is more complicated, it is difficult in common prism process plant application.
In order to reduce the complexity of contactless squareness measurement technology, developed again later based on Feisuo interferometer and
The measuring technology that multiteeth indexing table combines, the technical testing precision is higher, but test process is still complex, and needs
Use a variety of instrument and equipments and the works such as Feisuo interferometer, turnover reflecting mirror, optical flat, multiteeth indexing table, two-dimentional tilt adjusting mechanism
Holding tool.
Summary of the invention
The application provides that a kind of structure is simple, inspection easy to detect and high detection accuracy prism right angle working face verticality
Survey method and device.
According in a first aspect, providing a kind of detection device of prism right angle working face verticality in a kind of embodiment, comprising:
Mounting table has the placed side for placing tested prism, and the mounting table can be along the inclination of the placed side
Direction is swung；
Angular instrument, measurement end is towards the region setting for placing tested prism on the mounting table.
Further, mounting table includes tilting table and supporting element, and the supporting element is fixed on the tilting table, and on
The placed side having for placing tested prism is held, the tested prism for being placed on placed side can be rotated along placed side normal direction.
Further, supporting element is optical parallel, and the optical parallel is fixed on the tilting table, the optical parallel
Upper surface be placed side for placing tested prism.
In other embodiments, supporting element is ball, and the ball includes at least three, and at least three balls are fixed on
The top of the upper surface of the tilting table, the ball is equipped with section, and the section of all ball upper ends is located in approximately the same plane,
Form the placed side for placing tested prism.
Further, angular instrument is interferometer or autocollimator.
Further, detection device further includes driving device, and the driving device is connect with the tilting table, for driving
The tilting table is swung；
Optionally, detection device further includes controller, and the controller is connect with the angular instrument and driving device signal,
The tilting table is driven to swing for controlling the angular instrument measurement, and for controlling the driving device.
According to second aspect, a kind of detection method of prism right angle working face verticality is provided in a kind of embodiment, is utilized
The detection device of above-mentioned prism right angle working face verticality carries out.
Further, detection method includes the following steps:
Tested prism is placed on the placed side of mounting table, bottom surface and the placed side flush contact of tested prism are made, and
And make on tested prism with the first side of plane perpendicular towards the measurement end of angular instrument；
Make on angular instrument emission measurement light to the first side of tested prism, and tilts mounting table and tested prism together
The measurement light auto-collimation for being rocked to angular instrument returns, and the pitch angle for recording the first side of tested prism is θ1；
Staggered relatively of tested prism is rotated 180 ° along placed side normal direction, so as to make on tested prism with first side phase
Pair second side towards angular instrument；
Make on angular instrument emission measurement light to the second side of tested prism, and records bowing for the second side for being detected prism
The elevation angle is θ2；
Calculate the bottom surface of tested prism and error of perpendicularity Δ=(θ of first side2-θ1)/2。
Further, when, there are when parallelism error δ, further being wrapped between the first side and second side of tested prism
It includes: the error of perpendicularity being corrected based on formula (Δ+δ/2), wherein the first side and second of the tested prism
Side is measured by angular instrument in the parallelism error δ of the optical axis pitch orientation of measurement light and is determined.
In other embodiments, it is missed between placement bottom surface and the first side normal thereto of tested prism without verticality
Under the premise of difference, detection method includes the following steps:
Tested prism is placed on the placed side of mounting table, bottom surface and the placed side flush contact of tested prism are made, and
And make on tested prism with the first side of plane perpendicular towards the measurement end of angular instrument；
Make on angular instrument emission measurement light to the first side of tested prism, and tilts mounting table and tested prism together
The measurement light auto-collimation for being rocked to angular instrument returns；
Staggered relatively, tested prism is rotated by 90 ° or 270 ° along placed side normal direction, so as to make on tested prism with bottom surface
The third side vertical with first side is towards angular instrument；
Make on angular instrument emission measurement light to the third side of tested prism, and records bowing for the third side for being detected prism
The elevation angle, the pitch angle of third side are the error of perpendicularity between bottom surface and third side.
The detection method and device of prism right angle working face verticality according to above-described embodiment are put since mounting table has
Set face, and mounting table tiltable is swung so that the tested prism being placed on mounting table different measuring surface can be gone to
Angular instrument is opposite, and the survey that mounting table may make the measuring surface auto-collimation reflecting goniometer of tested prism to emit by wallowing motion
Light is measured, self-collimation measurement is formed, so that the mounting table and angular instrument that are swung by tiltable can accurately detect tested rib
The error of perpendicularity of mirror right angle working face, therefore the structure of this detection device and method is simple, easy to detect and detection accuracy is high.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the detection device of prism right angle working face verticality in embodiment；
Fig. 2 is the structural schematic diagram of the detection device of prism right angle working face verticality in another embodiment.
Specific embodiment
Below by specific embodiment combination attached drawing, invention is further described in detail.
Embodiment one:
A kind of detection device of prism right angle working face verticality is present embodiments provided, this detection device is mainly used for examining
The verticality of right angle working face on hex surface prism is surveyed, this detection device also can detect other prisms or the work of optical element right angle
The verticality in face.
As shown in Figure 1, the detection device of the present embodiment mainly includes mounting table 1 and angular instrument 2, mounting table 1 and angular instrument 2
It is oppositely arranged, mounting table 1 drives tested 3 wallowing motion of prism for placing tested prism 3, and angular instrument 2 is tested for detecting
The pitch angle of 3 measuring surface of prism, and then measure the verticality of tested 3 right angle working face of prism.Tested prism 3 is with mutual
Vertical right angle working face.
Specifically, mounting table 1 includes tilting table 11 and supporting element, the upper end of tilting table 11 has a mounting surface, support
Part is fixedly mounted on the mounting surface of tilting table 11, and the upper end of supporting element has the placed side for placing tested prism 3, is placed
Tested prism 3 in placed side can be rotated along placed side normal direction, be contacted always in rotary course with placed side.In the present embodiment,
Supporting element is optical parallel 12, and the lower surface of optical parallel 12 is fixedly mounted on the mounting surface of tilting table 11, can pass through bonding
Or the modes such as clamping are fixed.The upper surface of optical parallel 12 is the placed side of polishing, and the placed side is for placing tested prism 3.
Tilting table 11 can be swung along the inclined direction of placed side, the optical axis and optical parallel 12 of the measurement light only emitted in angular instrument 2
Placed side normal direction intersect the tilted swing of plane, can by the measuring surface wallowing motion of tested prism 3 to tested prism 3
Measurement light it is vertical.
As shown in Fig. 2, in other embodiments, supporting element is ball 13, and there are three the tools of ball 13, and three balls 13 are bonded
It is fixed on the upper surface of tilting table 11, and three balls 13 are arranged on three vertex of a triangle, three balls
13 top is equipped with section, and the section on three 13 tops of ball is located in approximately the same plane, is formed for placing tested prism
3, three balls 13 support tested prism 3 by three sections, are equivalent to the placed side of a polishing.Three balls 13 replace light
It learns the support of optical flat 12 and is detected prism 3, it is therefore prevented that stroke of tested prism 3 and optical parallel 12 in rotation and swing process mutually
Wound, and prevent and be mingled with dust between the bottom surface and placed side of tested prism 3, and influence measurement accuracy.
In other more embodiments, the quantity of ball 13 includes more, such as four with array or six；
Or supporting element is multiple support rods, the upper end of support rod flushes, and forms the placed side for placing tested prism 3.
In the present embodiment, angular instrument 3 is interferometer or autocollimator, such as Feisuo interferometer and Taylor Hobson
DA400 autocollimator, angular instrument 3 by the measuring surface of emission measurement light to tested prism 3, measurement light that is upper and receiving reflection with
The pitch angle of the measuring surface of detection inspection prism 3.
In the present embodiment, the detection device of prism right angle working face verticality further includes driving device (not shown),
Driving device is connect with tilting table 11, is used for 11 wallowing motion of drive incline platform.Such as driving device includes motor, shaft and pendulum
Lever, shaft and oscillating rod and tilting table 11, motor pass through 11 wallowing motion of shaft and oscillating rod drive incline platform, driving device
Specific component and installation relation can be arranged according to actual needs.In other embodiments, tilting table 11 can pass through manual drive
It adjusts.
In the present embodiment, the detection device of prism right angle working face verticality further includes controller, controller and angle measurement
Instrument 2 is connected with driving device signal, is inclined for controlling 2 emission measurement light measurement of angular instrument, and for controlling driving device driving
11 wallowing motion of sloping platform.Controller can accurately control 11 wallowing motion angle of tilting table, ensure that the precision of detection.
A kind of detection device of prism right angle working face verticality provided in this embodiment is placed since mounting table 1 has
Face, and 1 tiltable of mounting table swing so that the tested prism 3 being placed on mounting table 1 different measuring surface can be gone to
Angular instrument 2 is opposite, and mounting table 1 may make the measuring surface auto-collimation reflecting goniometer 2 of tested prism 3 to emit by wallowing motion
Measurement light, formed self-collimation measurement, thus by tiltable swing mounting table 1 and angular instrument 2 can accurately detect
The error of perpendicularity of tested 3 right angle working face of prism, therefore the structure of this detection device is simple, easy to detect and detection accuracy is high.
Embodiment two:
A kind of detection method of prism right angle working face verticality is present embodiments provided, this detection method is based on above-mentioned reality
The detection device for applying the prism right angle working face verticality in example one is realized.
This detection method by detect six face prisms and for be illustrated, this detection method includes the following steps:
S101: as shown in Figure 1, tested prism 3 is placed on mounting table 1 on the placed side of optical parallel 12, make to be detected
The bottom surface S of prism 30With placed side flush contact, and contact is remained, be detected on prism 3 and bottom surface S0Vertical first side
S1Measurement end towards angular instrument 2, at this time first side S1For measuring surface；
S102: make 2 emission measurement light of angular instrument to the first side S of tested prism 31On, and make tested prism 3 along placement
The measurement light auto-collimation that the inclined direction in face is rocked to angular instrument 2 returns, i.e., is zero interference in angular instrument 2, and record is tested at this time
The first side S of prism 31Pitch angle be θ1, θ1It is close to zero；
S103: tested prism 3 is rotated 180 ° along placed side normal direction, when rotation needs bottom surface S0It is contacted always with placed side,
To guarantee the shaft and its placed side normal parallel of tested prism 3, by second side S on tested prism 32Towards angular instrument 2,
Two side faces S2For with first side S1Opposite face, both with bottom surface S0Vertically, and second side S2With first side S1It is flat
Row；The rotation of tested prism 3 can be realized by peripheral equipment control；
S104: make 2 emission measurement light of angular instrument to the second side S of tested prism 32On, and record the of tested prism 3
Two side faces S2Pitch angle be θ2；
S105: the bottom surface S of tested prism 3 is calculated0With first side S1Error of perpendicularity Δ=(θ2-θ1)/2=θ2/2。
Above-mentioned steps detected the bottom surface S of tested prism 30With first side S1The error of perpendicularity, overturn tested prism
3 repeat to detect using different faces as bottom surface according to above-mentioned steps, can detect that the vertical of all right angle working faces of tested prism 3
Degree.
For first side S1With second side S2Between there are the tested prisms 3 of parallelism error, it is also necessary to carry out it is as follows
The amendment of step, which detects, to be calculated:
S106: the first side S of tested prism 3 is measured by angular instrument 21With second side S2It bows in the optical axis of measurement light
Face upward the parallelism error δ in direction；
S107: correction calculates the bottom surface of tested prism and the error of perpendicularity of first side.
Specifically, according to formula: Δ+δ/2, correction calculate the bottom surface of tested prism and the error of perpendicularity of first side.
For being detected the bottom surface S of prism 30With the squareness measurement of other sides, it is only necessary to rotate side to be measured to
One side S1Position, repeating the above steps can be detected out.For side and top surface verticality, it is only necessary to by tested prism 3
It is inverted, top surface is positioned to bottom surface.
The detection method of prism right angle working face verticality provided in this embodiment is put by the inclined direction of mounting table 1
Dynamic cooperation angular instrument 2 quickly can accurately calculate prism right angle working face verticality, it can be achieved that measuring for verticality precision is excellent
In 1 ".Therefore this detection method precision with higher and easy to detect, it is high-efficient.
Embodiment three:
This implementation provides the detection method of another prism right angle working face verticality, this detection method is equally based on
The detection device for stating the prism right angle working face verticality in embodiment one is realized, and this detection method is to be detected prism 3
Place bottom surface S0With first side S normal thereto1Between without the error of perpendicularity under the premise of, or both the error of perpendicularity
It is detected under the premise of very little.
This detection method includes the following steps:
S201: as shown in Figure 1, tested prism 3 is placed on mounting table 1 on the placed side of optical parallel 12, make to be detected
The bottom surface S of prism 30With placed side flush contact, and make on tested prism 3 with bottom surface S0Vertical first side S1Towards survey
The measurement end of angle instrument 2；
S202: make 2 emission measurement light of angular instrument to the first side S of tested prism 31On, and make tested prism 3 along placement
The measurement light auto-collimation that the inclined direction in face is rocked to angular instrument 2 returns, at this time self-collimation measurement in angular instrument 2；
S203: tested prism 3 is rotated by 90 ° or 270 ° along placed side normal direction, and when rotation needs bottom surface S0Always with placed side
Contact, to guarantee the shaft and its placed side normal parallel of tested prism 3, by tested prism 3 with bottom surface S0With first side S1
Vertical third side S3Towards angular instrument, bottom surface S0, first side S1With third side S3Three is adjacent two-by-two and mutually hangs down
Directly；The rotation of tested prism 3 can be realized by peripheral equipment control.
S204: make 2 emission measurement light of angular instrument to the third side S of tested prism 33On, and record the of tested prism 3
Three side S3Pitch angle, third side S3Pitch angle be bottom surface S0With third side S3Between the error of perpendicularity.
If desired other three orthogonal faces are detected, two faces almost without the error of perpendicularity are defined as bottom surface S0
With first side S1, repeat the above steps.
The detection method of a kind of prism right angle working face verticality provided in this embodiment, due to based on tested prism 3
Place bottom surface S0With first side S normal thereto1Between without the error of perpendicularity, therefore detect more simple and convenient, do not need to count
Calculate, can between detect bottom surface S0With third side S3Between the error of perpendicularity.
Use above specific case is illustrated the present invention, is merely used to help understand the present invention, not to limit
The system present invention.For those skilled in the art, according to the thought of the present invention, can also make several simple
It deduces, deform or replaces.
Claims (10)
1. a kind of detection device of prism right angle working face verticality characterized by comprising
Mounting table has the placed side for placing tested prism, and the mounting table can be along the inclined direction of the placed side
It swings；
Angular instrument, measurement end is towards the region setting for placing tested prism on the mounting table.
2. the detection device of prism right angle working face verticality as described in claim 1, which is characterized in that the mounting table packet
Tilting table and supporting element are included, the supporting element is fixed on the tilting table, and upper end has for placing tested prism
Placed side, the tested prism for being placed on the placed side can be rotated along placed side normal direction.
3. the detection device of prism right angle working face verticality as claimed in claim 2, which is characterized in that the supporting element is
Optical parallel, the optical parallel are fixed on the tilting table, and the upper surface of the optical parallel is for placing tested rib
The placed side of mirror.
4. the detection device of prism right angle working face verticality as claimed in claim 2, which is characterized in that the supporting element is
Ball, the ball include at least three, and at least three balls are fixed on the upper surface of the tilting table, the ball
Top is equipped with section, and the section of all ball upper ends is located in approximately the same plane, forms the placed side for placing tested prism.
5. the detection device of prism right angle working face verticality as described in claim 3 or 4, which is characterized in that the angle measurement
Instrument is interferometer or autocollimator.
6. the detection device of prism right angle working face verticality as described in claim 3 or 4, which is characterized in that further include driving
Dynamic device, the driving device are connect with the tilting table, for driving the tilting table to rotate and swinging；
It optionally, further include controller, the controller is connect with the angular instrument and driving device signal, described for controlling
Angular instrument measurement, and the tilting table rotation and swing are driven for controlling the driving device.
7. a kind of detection method of prism right angle working face verticality, which is characterized in that using described in any one of claim 1-6
Prism right angle working face verticality detection device carry out.
8. the detection method of prism right angle working face verticality as claimed in claim 7, which is characterized in that including walking as follows
It is rapid:
Tested prism is placed on the placed side of mounting table, bottom surface and the placed side flush contact of tested prism are made, and is made
With the first side of plane perpendicular towards the measurement end of angular instrument on tested prism；
Make on angular instrument emission measurement light to the first side of tested prism, and makes mounting table and tested prism wallowing motion together
Measurement light auto-collimation to angular instrument returns, and the pitch angle for recording the first side of tested prism is θ1；
180 ° are rotated along placed side normal direction by staggered relatively, tested prism, it is opposite with first side on tested prism to make
Second side is towards angular instrument；
Make on angular instrument emission measurement light to the second side of tested prism, and records the pitch angle of the second side of tested prism
For θ2；
Calculate the bottom surface of tested prism and error of perpendicularity Δ=(θ of first side2-θ1)/2。
9. the detection method of prism right angle working face verticality as claimed in claim 8, which is characterized in that when tested prism
There are when parallelism error δ between first side and second side, further comprise: based on formula (Δ+δ/2) to described vertical
Degree error is corrected, wherein the first side and second side of the tested prism are measuring the optical axis pitch orientation of light
Parallelism error δ is measured by angular instrument and is determined.
10. the detection method of prism right angle working face verticality as claimed in claim 7, which is characterized in that when tested prism
Placement bottom surface and first side normal thereto between without the error of perpendicularity, described method includes following steps:
Tested prism is placed on the placed side of mounting table, bottom surface and the placed side flush contact of tested prism are made, and is made
With the first side of plane perpendicular towards the measurement end of angular instrument on tested prism；
Make on angular instrument emission measurement light to the first side of tested prism, and makes mounting table and tested prism wallowing motion together
Measurement light auto-collimation to angular instrument returns；
Staggered relatively, tested prism is rotated by 90 ° or 270 ° along placed side normal direction, so as to make on tested prism with bottom surface and the
The vertical third side of one side is towards angular instrument；
Make on angular instrument emission measurement light to the third side of tested prism, and records the pitching of the third side of tested prism
Angle, the pitch angle of third side are the error of perpendicularity between bottom surface and third side.
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| CN201711423538.3A CN109959350B (en) | 2017-12-25 | 2017-12-25 | Method and device for detecting perpendicularity of right-angle working surface of prism |
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| CN201711423538.3A CN109959350B (en) | 2017-12-25 | 2017-12-25 | Method and device for detecting perpendicularity of right-angle working surface of prism |
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| CN112902840A (en) * | 2021-01-22 | 2021-06-04 | 湖南环境生物职业技术学院 | A centering check out test set for prism |
| CN114719788A (en) * | 2022-04-29 | 2022-07-08 | 中国人民解放军国防科技大学 | Guide rail angle error measuring method based on standard plano-crystal and self-calibration instrument |
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