CN111076898B - Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) - Google Patents
Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) Download PDFInfo
- Publication number
- CN111076898B CN111076898B CN201911215298.7A CN201911215298A CN111076898B CN 111076898 B CN111076898 B CN 111076898B CN 201911215298 A CN201911215298 A CN 201911215298A CN 111076898 B CN111076898 B CN 111076898B
- Authority
- CN
- China
- Prior art keywords
- cgh
- optical axis
- compensator
- tracker
- cgh compensator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/005—Testing of reflective surfaces, e.g. mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a method for measuring an optical axis of an aspheric reflector by matching a laser tracker with a CGH (Carrier grade height), which comprises the following steps: (1) providing a CGH compensator; (2) adjusting the optical axis of the CGH compensator to be coaxial with a rotary table of the center deviation measuring instrument on the center deviation measuring instrument; (3) keeping the position of the CGH compensator on a rotary table of a central deviation measuring instrument unchanged, measuring a rotating shaft of the central deviation measuring instrument by using a laser tracker, and measuring the relative position relation between an optical axis of the CGH compensator and a target ball of the first tracker arranged at the corner of the CGH compensator; (4) building a test light path for measuring the surface shape of the aspheric reflector by the CGH compensator; (5) the laser tracker is erected in a test light path, 4 first tracker target ball positions on the CGH compensator are tested, and the optical axis of the CGH compensator is reproduced by utilizing the coordinate conversion of the laser tracker, wherein the optical axis is equivalent to the optical axis of the aspheric reflector in the test light path. The invention enables the measurement precision to be higher.
Description
Technical Field
The invention belongs to the technical field of adjustment testing of an optical camera lens in the field of remote sensing, and particularly relates to a method for measuring an optical axis of an aspheric reflector by matching a laser tracker with a CGH (Carrier grade height).
Background
In the field of optical remote sensing, in order to achieve good imaging performance, tolerance distribution of an optical lens requires that optical axes of main optical elements guarantee a strict angular relationship, so that optical axis measurement of the optical elements is required. The optical axis is not solid and is difficult to measure directly. In order to solve the problem, there are two commonly adopted solutions, namely, an interferometer is used for performing aberration-free point method test on the surface shape of a reflecting mirror, a plane mirror with the same caliber is used as an auxiliary measuring optical element, the aberration is strictly controlled in a measuring light path, and finally a theodolite is used for measuring the normal line of the plane mirror, so that the optical axis can be represented. This method is only effective for paraboloids or nearly paraboloids, and requires a plane mirror with the same aperture and a high-precision surface shape, which results in high cost for measuring the optical axis of the reflector. The second scheme is to measure the surface shape of the aspheric surface by three coordinates, and the obtained discrete point data is processed by polynomial fitting to calculate the optical axis angle. The method depends on the measurement precision and repeatability of three coordinates, and when the large-aperture reflector is measured, the measurement process is as long as several hours and is easily influenced by temperature and vibration, so the final optical axis measurement precision and repeatability are not ideal.
Disclosure of Invention
The technical problem solved by the invention is as follows: the method comprises the steps of utilizing a CGH compensator (namely a computer generated hologram) to have a plane substrate and diffraction characteristics, using a central deviation measuring instrument, a laser tracker and a tracker target ball to measure and record the relative position relation between the CGH optical axis and the target ball, and then using the laser tracker and the target ball to reproduce the CGH optical axis in a light path of the CGH as the compensator to measure the surface shape of the aspheric reflector, wherein the light path is equivalent to the optical axis of the aspheric reflector, so that the measurement precision is higher.
The purpose of the invention is realized by the following technical scheme: a method for measuring an optical axis of an aspheric reflector by matching a laser tracker with a CGH (Carrier grade height), the method comprises the following steps: (1) providing a CGH compensator which takes a parallel flat plate as a substrate and can detect the surface shape of a large-caliber aspheric reflector; (2) adjusting the optical axis of the CGH compensator to be coaxial with a rotary table of a central deviation measuring instrument on the central deviation measuring instrument by utilizing the plane normal of the base of the CGH compensator and a diffraction convergence focus; (3) keeping the position of the CGH compensator on a rotary table of a central deviation measuring instrument unchanged, measuring a rotating shaft of the central deviation measuring instrument, namely an optical axis of the CGH compensator, by using a laser tracker, and measuring the relative position relation between the optical axis of the CGH compensator and 4 first tracker target balls arranged at the corners of the CGH compensator; (4) building a test light path for measuring the surface shape of the aspheric reflector by the CGH compensator; (5) the laser tracker is erected in a test light path, 4 first tracker target ball positions on the CGH compensator are tested, and the optical axis of the CGH compensator is reproduced by utilizing the coordinate conversion of the laser tracker, wherein the optical axis is equivalent to the optical axis of the aspheric reflector in the test light path.
In the method for measuring the optical axis of the aspheric reflector by matching the laser tracker with the CGH, in the step (2), the CGH compensator is placed on a rotary table of a center deviation measuring instrument; the autocollimator of the central deviation measuring instrument irradiates the CGH compensator through spherical wave laser emitted by the objective lens, and the laser is reflected by the CGH compensator and converged into a focus due to diffraction effect; meanwhile, the substrate of the CGH compensator is a polished plane, the normal direction of the plane can be measured by a central deviation measuring instrument, a straight line which is parallel to the normal of the plane and passes through a focusing point of diffraction light is the optical axis of the CGH compensator, and the optical axis is adjusted to be coaxial with a rotary table of the central deviation measuring instrument.
In the method for measuring the optical axis of the aspheric reflector by matching the laser tracker with the CGH, in the step (3), 4 first tracker target balls are adhered to the corners of the CGH compensator, an aluminum metal thin rod is stably placed on a rotary table of a center deviation measuring instrument to avoid contacting the CGH compensator, and two second tracker target balls are fixedly installed at two ends of the aluminum metal thin rod respectively; rotating an aluminum metal slender rod for a circle on a rotary table of a center deviation measuring instrument, measuring the relative position relation of second tracker target balls at two ends of the aluminum metal slender rod when the second tracker target balls rotate for different angles by using a laser tracker, fitting the relative position relation into two circles according to the relative position relation of the second tracker target balls at two ends of the aluminum metal slender rod when the second tracker target balls rotate for different angles, wherein the connecting line of the circle centers of the two circles represents the rotating shaft of the center deviation measuring instrument, namely the optical axis of the CGH compensator; then, the positions of 4 first tracker target balls on the corner of the CGH compensator are measured when the CGH compensator is stable, so that the relative position relation between the optical axis of the CGH compensator and the first tracker target balls is recorded in the laser tracker.
In the method for measuring the optical axis of the aspheric mirror by matching the laser tracker with the CGH, in the step (4), the test light path comprises a laser interferometer, a CGH compensator and the aspheric mirror; spherical wave laser emitted by the laser interferometer penetrates through the CGH compensator, irradiates the aspheric reflecting mirror and is reflected, returns along the original optical path, penetrates through the CGH compensator again and is received by the laser interferometer, and the laser interferometer is used for measuring the aberration of the test optical path in real time until the aberration of the test optical path meets the requirement.
In the method for measuring the optical axis of the aspheric reflector by matching the laser tracker with the CGH, the CGH compensator can be used as a compensator to measure the surface shape of the aspheric reflector, the optical axis of the CGH compensator is superposed with the optical axis of the aspheric reflector in a test optical path, and the test optical path test theoretical wavefront error PV is not more than lambda/10; the wavelength λ is 632.8 nm.
In the method for measuring the optical axis of the aspheric reflector by matching the laser tracker with the CGH, the length of the aluminum metal thin rod is 300-500 mm.
In the method for measuring the optical axis of the aspheric reflector by matching the laser tracker with the CGH, the coma coefficient is controlled to be +/-0.01 when the optical path aberration is tested.
In the method for measuring the optical axis of the aspheric reflector by matching the laser tracker with the CGH, the optical axis of the aspheric reflector in the test optical path is vertical to the CGH compensator.
Compared with the prior art, the invention has the following beneficial effects:
the invention utilizes the CGH compensator (namely, the computer generated hologram) to have a plane substrate and diffraction characteristics at the same time, uses the central deviation measuring instrument, the laser tracker and the tracker target ball to measure and record the relative position relation of the optical axis of the CGH and the target ball, then uses the laser tracker and the target ball to reproduce the optical axis of the CGH in the optical path of measuring the surface shape of the aspheric reflector by using the CGH as the compensator, and the optical path is equivalent to the optical axis of the aspheric reflector, so that the cost is low, the measurement error is controllable, and the measurement precision is higher.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a designed optical path for measuring the surface shape of an aspheric reflector by CGH;
FIG. 2 is a schematic diagram of a decentration gauge calibrating the optical axis of a CGH;
FIG. 3 is a schematic illustration of target spheres immobilized on a CGH;
fig. 4 is a test light path of a laser tracker reproducing the CGH optical axis. .
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
The embodiment provides a method for measuring an optical axis of an aspheric reflector by matching a laser tracker with a CGH, which is characterized by comprising the following steps of:
(1) providing a CGH compensator which takes a parallel flat plate as a substrate and can detect the surface shape of a large-caliber aspheric reflector;
(2) adjusting the optical axis of the CGH compensator to be coaxial with a rotary table of a central deviation measuring instrument on the central deviation measuring instrument by utilizing the plane normal of the base of the CGH compensator and a diffraction convergence focus;
(3) keeping the position of the CGH compensator on a rotary table of a central deviation measuring instrument unchanged, measuring a rotating shaft of the central deviation measuring instrument, namely an optical axis of the CGH compensator, by using a laser tracker, and measuring the relative position relation between the optical axis of the CGH compensator and 4 first tracker target balls arranged at the corners of the CGH compensator;
(4) building a test light path for measuring the surface shape of the aspheric reflector by the CGH compensator;
(5) the laser tracker is erected in a test light path, 4 first tracker target ball positions on the CGH compensator are tested, and the optical axis of the CGH compensator is reproduced by utilizing the coordinate conversion of the laser tracker, wherein the optical axis is equivalent to the optical axis of the aspheric reflector in the test light path.
In the step (1), the specific design process of the CGH compensator is to establish a light path for the CGH compensator to test the surface shape of the aspheric mirror in zemax optical design software, generally, a point light source is used to emit spherical waves, the spherical waves pass through the CGH and then irradiate the aspheric mirror and are reflected, and then the light returns along the original path. Inputting the initial values of the parameters and the distances of all optical elements, taking the minimum wavefront aberration of the optical system as an optimization target, and repeatedly optimizing and iterating to obtain the parameters of the CGH compensator according to the ray tracing principle.
In step (2), the CGH compensator is typically fabricated on a square sheet of glass with a 4 inch or 6 inch caliber, which is the base of the CGH, with the two sides of the sheet being substantially parallel. The CGH compensator is placed on the turntable of the decentration gauge. The autocollimator of the central deviation measuring instrument irradiates the CGH compensator with spherical wave laser emitted by the objective lens, and the laser is reflected by the CGH compensator and converged into a focus due to diffraction effect. Meanwhile, the substrate of the CGH compensator is a polished plane, and the normal direction of the plane can be measured by a central deviation measuring instrument. A straight line which is parallel to the normal of the plane and passes through a focus point of the diffraction light is the optical axis of the CGH compensator, and the optical axis is adjusted to be coaxial with the rotary table of the center deviation measuring instrument.
In step (3), 4 first tracker balls (as shown in fig. 3) are attached to the corners of the CGH compensator, and the laser tracker is mounted near the centroid displacement gauge. An aluminum metal thin rod with the height of about 300-500 mm is stably placed on a rotary table of the center deviation measuring instrument, the CGH compensator is prevented from being contacted, and a second tracker target ball is fixedly mounted at each of two ends of the aluminum metal thin rod. Rotating an aluminum metal slender rod for a circle on a rotary table of a center deviation measuring instrument, measuring the relative position relation of second tracker target balls at two ends of the aluminum metal slender rod when the second tracker target balls rotate for different angles by using a laser tracker, obtaining point positions according to the relative position relation of the second tracker target balls at two ends of the aluminum metal slender rod when the second tracker target balls rotate for different angles, and fitting the point positions into two circles, wherein the connecting line of the centers of the two circles represents the rotating shaft of the center deviation measuring instrument, namely the optical axis of the CGH compensator; then measuring the positions of 4 first tracker target balls on the corner of the CGH compensator when the CGH compensator is stable, so that the relative position relation between the optical axis of the CGH compensator and the first tracker target balls is recorded in the laser tracker; in the later measurement of the optical path of the aspherical mirror by the CGH compensator, the laser tracker can reproduce the optical axis position of the CGH compensator by measuring the position of the 4 first tracker target balls on the CGH compensator and using coordinate transformation, as shown in fig. 2.
In step (4), as shown in fig. 4, the test optical path is composed of the laser interferometer, the CGH compensator, the aspheric mirror, and the position adjustment tool for each part, and spherical wave laser emitted by the laser interferometer passes through the CGH compensator, irradiates the aspheric mirror, is reflected, returns along the original optical path, passes through the CGH compensator again, and is received by the laser interferometer. And placing all parts according to the designed space in zemax, and measuring the aberration of the test light path in real time by using a laser interferometer until the aberration of the test light path meets the requirement (the coma coefficient is controlled to be +/-0.01).
The CGH compensator can be used as a compensator to measure the surface shape of an aspheric reflector, the optical axis of the CGH compensator is overlapped with the optical axis of the aspheric reflector in a designed optical path, and the theoretical wave-front error of system test does not exceed lambda/10 (PV) (lambda is 632.8 nm). The base of the CGH compensator is a parallel flat plate, and the optical axis of the aspheric reflector in the test light path is vertical to the CGH compensator.
And adjusting the optical axis of the CGH compensator to be coaxial with the rotary table of the equipment by utilizing the plane normal of the base of the CGH compensator and a diffraction focusing point on a central deviation measuring instrument.
Examples
1) The aperture of the non-spherical reflector is phi 1500mm, and the vertex curvature radius R04500mm, aspheric coefficient K-0.9. The CGH compensator is designed and processed according to the parameters and is used for measuring the surface shape of the aspheric surface reflector.
The optical path of the aspheric surface for measuring the CGH is designed in zemax software, a main holographic measuring area of the CGH for testing is phi 80mm, even term coefficients of binary optical polynomial parameters of the CGH from a quadratic term to a tenth term are respectively 3.216e +004, -2.258e +004, 3.198e +004, -5.439e +004 and 8.008e +004, and odd term coefficients are all 0. The CGH optical axis L2 coincides with the mirror optical axis L1, and the mirror optical axis L1 is perpendicular to the CGH, the theoretical wavefront error PV is less than λ/10(λ 632.8 nm). The test light path is shown in fig. 1. The actual CGH substrate processed was a 4 inch parallel plate of quartz with 1 "of parallelism on both sides and a thickness of 5 mm.
2) And selecting a non-measuring area on the processed CGH corner, fixing at least 3 tracker target balls, and placing on a rotary table of the center deviation measuring instrument. The plane normal can be found using the CGH base plane. The distance CGH of the diffraction convergence focus of the CGH is about 300-350 mm, a measuring objective lens with the focal length of 300mm attached to a central deviation measuring instrument is used for finding a position with a clearer convergence focus, and the optical axis L2 of the CGH is adjusted to be coaxial with a rotary table of the central deviation measuring instrument by combining the normal line of a plane substrate. The principle is as shown in fig. 2.
3) The laser tracker is arranged near the central deviation measuring instrument, the rotating shaft L3 of the central deviation measuring instrument is led out and recorded, namely equivalent to the CGH optical axis L2, and the relative position relation between the CGH optical axis and the attached target ball of the tracker is measured and recorded.
An aluminum metal thin rod with the height of about 500mm is stably placed on a rotary table of the center deflection measuring instrument, and a tracker target ball is fixedly installed at each of the high end and the low end. The slender rod rotates for a circle on the rotary table, the laser tracker is used for measuring the relative position relation of target balls at two ends when the target balls rotate for different angles, at least 10 fixed point positions are recorded, the point positions are fit into a high circle and a low circle, and the connecting line of the circle centers of the two circles represents a central deflection axis L3, namely a CGH optical axis L2. And then measuring the positions of 4 tracker target balls on the corner of the CGH when the CGH is stable, so that the relative position relation between the optical axis of the CGH and the tracker target balls is recorded in the laser tracker. In the light path of the aspheric reflector for later CGH measurement, the laser tracker can measure the position of a target ball on the CGH and reproduce the position of the optical axis of the CGH by using the coordinate conversion function of software.
4) A test light path for measuring the surface shape of the aspheric reflector is built by using a laser interferometer and a CGH, the system aberration is measured by using the interferometer in real time, each part is accurately adjusted by using a position adjusting tool, the coma coefficient in the Zernike aberration measured by the interferometer is required to be controlled to be +/-0.01, and the interference fringes are controlled to be only two or three.
5) The target ball on the CGH is retested by a laser tracker, and the optical axis L2 of the CGH is retested by the coordinate conversion function of the tracker measurement software, namely equivalent to the optical axis L1 of the aspheric reflector in the optical path. The laser tracker reproduces the measuring optical path of the optical axis of the CGH as shown in fig. 4.
The invention utilizes the CGH compensator (namely, the computer generated hologram) to have a plane substrate and diffraction characteristics at the same time, uses the central deviation measuring instrument, the laser tracker and the tracker target ball to measure and record the relative position relation of the optical axis of the CGH and the target ball, then uses the laser tracker and the target ball to reproduce the optical axis of the CGH in the optical path of measuring the surface shape of the aspheric reflector by using the CGH as the compensator, and the optical path is equivalent to the optical axis of the aspheric reflector, so that the cost is low, the measurement error is controllable, and the measurement precision is higher.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.
Claims (8)
1. A method for measuring an optical axis of an aspheric reflector by matching a laser tracker with a CGH (Carrier grade height), is characterized by comprising the following steps:
(1) providing a CGH compensator which takes a parallel flat plate as a substrate and can detect the surface shape of a large-caliber aspheric reflector;
(2) adjusting the optical axis of the CGH compensator to be coaxial with a rotary table of a central deviation measuring instrument on the central deviation measuring instrument by utilizing the plane normal of the base of the CGH compensator and a diffraction convergence focus;
(3) keeping the position of the CGH compensator on a rotary table of a central deviation measuring instrument unchanged, measuring a rotating shaft of the central deviation measuring instrument, namely an optical axis of the CGH compensator, by using a laser tracker, and measuring the relative position relation between the optical axis of the CGH compensator and 4 first tracker target balls arranged at the corners of the CGH compensator;
(4) building a test light path for measuring the surface shape of the aspheric reflector by the CGH compensator;
(5) the laser tracker is erected in a test light path, 4 first tracker target ball positions on the CGH compensator are tested, and the optical axis of the CGH compensator is reproduced by utilizing the coordinate conversion of the laser tracker, wherein the optical axis is equivalent to the optical axis of the aspheric reflector in the test light path.
2. The method for measuring the optical axis of the aspheric mirror by the laser tracker with the aid of the CGH as claimed in claim 1, wherein: in the step (2), placing the CGH compensator on a rotary table of the eccentricity measuring instrument; the autocollimator of the central deviation measuring instrument irradiates the CGH compensator through spherical wave laser emitted by the objective lens, and the laser is reflected by the CGH compensator and converged into a focus due to diffraction effect; meanwhile, the substrate of the CGH compensator is a polished plane, the normal direction of the plane is measured by a central deviation measuring instrument, a straight line which is parallel to the normal of the plane and passes through a focus point of diffraction light is the optical axis of the CGH compensator, and the optical axis is adjusted to be coaxial with a rotary table of the central deviation measuring instrument.
3. The method for measuring the optical axis of the aspheric mirror by the laser tracker with the aid of the CGH as claimed in claim 1, wherein: in the step (3), 4 first tracker target balls are adhered to the corners of the CGH compensator, an aluminum metal thin rod is stably placed on a rotary table of the center deviation measuring instrument to avoid contacting the CGH compensator, and two second tracker target balls are fixedly installed at two ends of the aluminum metal thin rod respectively; rotating an aluminum metal slender rod for a circle on a rotary table of a center deviation measuring instrument, measuring the relative position relation of second tracker target balls at two ends of the aluminum metal slender rod when the second tracker target balls rotate for different angles by using a laser tracker, fitting the relative position relation into two circles according to the relative position relation of the second tracker target balls at two ends of the aluminum metal slender rod when the second tracker target balls rotate for different angles, wherein the connecting line of the circle centers of the two circles represents the rotating shaft of the center deviation measuring instrument, namely the optical axis of the CGH compensator; then, the positions of 4 first tracker target balls on the corner of the CGH compensator are measured when the CGH compensator is stable, so that the relative position relation between the optical axis of the CGH compensator and the first tracker target balls is recorded in the laser tracker.
4. The method for measuring the optical axis of the aspheric mirror by the laser tracker with the aid of the CGH as claimed in claim 1, wherein: in the step (4), the test light path comprises a laser interferometer, a CGH compensator and an aspheric surface reflector; spherical wave laser emitted by the laser interferometer penetrates through the CGH compensator, irradiates the aspheric reflecting mirror and is reflected, returns along the original optical path, penetrates through the CGH compensator again and is received by the laser interferometer, and the laser interferometer is used for measuring the aberration of the test optical path in real time until the aberration of the test optical path meets the requirement.
5. The method for measuring the optical axis of the aspheric mirror by the laser tracker with the aid of the CGH as claimed in claim 1, wherein: the CGH compensator can be used as a compensator to measure the surface shape of the aspheric reflector, the optical axis of the CGH compensator is overlapped with the optical axis of the aspheric reflector in a test light path, and the test theoretical wavefront error PV of the test light path is not more than lambda/10; the wavelength λ is 632.8 nm.
6. The method for measuring the optical axis of the aspheric mirror by the laser tracker with the aid of the CGH as claimed in claim 3, wherein: the length of the aluminum metal thin rod is 300-500 mm.
7. The method for measuring the optical axis of the aspheric mirror by the laser tracker with the aid of the CGH as claimed in claim 4, wherein: the test light path aberration meets the requirement that the coma coefficient is controlled to be +/-0.01.
8. The method for measuring the optical axis of the aspheric mirror by the laser tracker with the aid of the CGH as claimed in claim 1, wherein: and an optical axis of the aspheric surface reflector in the test light path is vertical to the CGH compensator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911215298.7A CN111076898B (en) | 2019-12-02 | 2019-12-02 | Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911215298.7A CN111076898B (en) | 2019-12-02 | 2019-12-02 | Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111076898A CN111076898A (en) | 2020-04-28 |
| CN111076898B true CN111076898B (en) | 2021-07-13 |
Family
ID=70312418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911215298.7A Active CN111076898B (en) | 2019-12-02 | 2019-12-02 | Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111076898B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113702002B (en) * | 2021-08-27 | 2024-01-12 | 长光卫星技术股份有限公司 | Off-axis three-lens camera debugging test method and system based on CGH compensator |
| CN116539283B (en) * | 2023-07-06 | 2023-09-12 | 长春通视光电技术股份有限公司 | Double-reflecting-surface composite mirror optical axis deviation detection system and detection method |
| CN117168310B (en) * | 2023-11-02 | 2024-02-09 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1516767A1 (en) * | 1986-11-05 | 1989-10-23 | Куйбышевский авиационный институт им.акад.С.П.Королева | Apparatus for monitoring optical aspherical surfaces |
| CN102288132A (en) * | 2011-05-18 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument |
| CN102879182A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring off-axis aspheric surface eccentricity by laser tracker |
| CN103926058A (en) * | 2014-03-27 | 2014-07-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring optical axis in aspheric surface detection by means of self-aligning plane mirror |
-
2019
- 2019-12-02 CN CN201911215298.7A patent/CN111076898B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1516767A1 (en) * | 1986-11-05 | 1989-10-23 | Куйбышевский авиационный институт им.акад.С.П.Королева | Apparatus for monitoring optical aspherical surfaces |
| CN102288132A (en) * | 2011-05-18 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument |
| CN102879182A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring off-axis aspheric surface eccentricity by laser tracker |
| CN103926058A (en) * | 2014-03-27 | 2014-07-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring optical axis in aspheric surface detection by means of self-aligning plane mirror |
Non-Patent Citations (1)
| Title |
|---|
| 非球面Null Lens 补偿检测中采用激光跟踪仪测量几何参数方法研究;陈新东等;《中国激光》;20150531;全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111076898A (en) | 2020-04-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111076898B (en) | Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) | |
| CN101650157B (en) | Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror | |
| JP4312602B2 (en) | Aspheric and wavefront scanning interferometers | |
| WO2017107777A1 (en) | Method for measuring surface shape error of rotary symmetrical unknown aspheric surface, and measurement device thereof | |
| KR20070012459A (en) | Device and method for optical precision measurement | |
| CN111912607A (en) | Large-aperture optical system MTF measuring device and method | |
| CN100507488C (en) | Method and device for aspherical mirror diffraction image | |
| CN110554512B (en) | High-precision secondary off-axis ellipsoidal reflector optical axis leading-out method and optical system thereof | |
| JP6401279B2 (en) | Method for measuring spherical-astigmatic optical surfaces | |
| CN112504177B (en) | Multifunctional vertical zero-position overlapping scanning interference measuring device | |
| CN110987371B (en) | Centering system and method for large-caliber concave aspheric surface | |
| CN110108228A (en) | Calculating holography is different with spherical reflector detection to measure aspherical method off axis | |
| JP2003057016A (en) | High speed measuring method for shape of large caliber surface and measuring instrument therefor | |
| US20110051147A1 (en) | Measurement of Changes in Surfaces of Objects | |
| CN116380419A (en) | Device and method for detecting optical axis consistency of two-sided co-body aspheric mirror | |
| CN113203553B (en) | Lens center error measuring system and measuring method | |
| West et al. | Alignment and use of the optical test for the 8.4-m off-axis primary mirrors of the Giant Magellan Telescope | |
| CN112964455B (en) | Wave aberration splicing measuring device and method for large-numerical-aperture objective lens | |
| CN112532969B (en) | Adjustable focal plane assembly position calibration method for collimator | |
| Burge et al. | Development of surface metrology for the Giant Magellan Telescope primary mirror | |
| CN108267094B (en) | Non-cylindrical surface interference splicing measurement system and method based on rotary CGH | |
| CN216284233U (en) | Off-axis aspherical mirror detection device and detection system | |
| CN112923871B (en) | Free-form surface reflector curvature radius detection device and method | |
| US20210361159A1 (en) | Systems and methods for measurement of optical wavefronts | |
| Schillke | Critical aspects of testing aspheres in interferometric setups |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |