CN116380419A - Device and method for detecting optical axis consistency of two-sided co-body aspheric mirror - Google Patents
Device and method for detecting optical axis consistency of two-sided co-body aspheric mirror Download PDFInfo
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention discloses a device and a method for detecting the consistency of optical axes of two-sided integrated large-caliber aspheric reflectors, and belongs to the technical field of optical part processing and detection. The device comprises an interferometer and 2 CGH compensators. In the interference detection light path, optical axes of two aspheric surfaces are led out to the CGH compensator after precise adjustment and strict calibration, a specific area of the CGH emits parallel light, interference fringes representing the included angle of the two CGH compensators are formed in the interferometer after the parallel light is reflected by the other CGH, and the optical axis consistency deviation of the two aspheric surfaces is calculated by observing the number of the statistical interference fringes. Compared with the traditional interferometry method that a mechanical reference is required to be led out for detecting the optical axis, a theodolite and other high-precision detection instruments are used, the method has the advantages of being high in detection precision, few in error source and low in detection cost.
Description
Technical Field
The invention relates to a device and a method for detecting the consistency of optical axes of two-sided co-body aspherical mirrors, and belongs to the technical field of optical part processing and detection.
Background
In the field of space optical remote sensing, an aspheric main mirror and a four-mirror are integrally formed in a coaxial four-trans optical system, so that the complexity of the system is greatly reduced, the quality of the whole machine is reduced, and the installation efficiency is improved. On the other hand, the integrated molding of the main mirror and the four mirrors restricts the degree of freedom of the adjustment of the optical system in the later stage, and the consistency of the optical axes of the main mirror and the four mirrors needs to be strictly measured and controlled in the mirror surface manufacturing process.
Currently, the measuring method of the aspheric optical axis angle mainly comprises a centering instrument method, a contour scanning method, an interferometry method and an aberration-free point method. The centering instrument method is mainly suitable for spherical lens optical axis measurement by searching a spherical image of the light emitted by the autocollimation telescope and reflected by a measured surface, and is used for fitting an optical axis by measuring spherical images returned by different annular zones of the aspheric surface when the aspheric surface is measured.
The contour measurement method obtains sagittal contour data of a mirror surface through probe scanning of a contour scanner, and then calculates optical axis deviation through data fitting. And the caliber of the aspheric surface to be measured by the method is limited by the measuring range of the profiler.
The interferometry utilizes a laser interferometer to combine with a compensating optical element (a plane mirror, a zero compensator or a method for measuring the aspherical surface shape by a calculation hologram (CGH)) to lead an aspherical optical axis to the compensating optical element, and then uses a measuring instrument such as a laser tracker to measure the deviation of the optical axis relative to a mechanical reference, wherein the measuring precision is limited by the machining precision of the mechanical reference and the detection precision of the measuring instrument.
Disclosure of Invention
The technical solution of the invention is as follows: the invention overcomes the defects of the prior art, and provides a device and a method for detecting the optical axis of the two-sided co-body aspheric mirror, which realize the simultaneous measurement of the surface shape and the optical axis and have the advantages of high detection precision, less error sources and low detection cost.
The technical scheme of the invention is as follows:
the device for detecting the consistency of the optical axes of the two-sided co-body large-caliber aspheric reflecting mirror comprises an interferometer and a CGH compensator;
the surface of the two-sided co-body aspheric optical part to be measured is divided into an aspheric optical surface M and an aspheric optical surface N, and the two CGH compensators are respectively arranged at the outer side of the aspheric optical surface M and the outer side of the aspheric optical surface N; an interferometer is arranged on the other side of each of the two CGH compensators;
each CGH compensator is divided into a zero test area, an alignment area and a reference area, wherein the zero test area is used for measuring the surface shape error of the optical part, and the alignment area is used for auxiliary alignment of the interferometer and the CGH compensator; the reference area is used for measuring the included angle error of the two CGH compensators to obtain the included angle error of the optical axis of the optical part.
Preferably, the device needs to meet the following requirements before measurement:
the two interferometers emit standard spherical test light waves, and a zero test area of each CGH compensator generates corresponding interference fringes in the interferometers outside the CGH compensator, wherein the number of the interference fringes is less than 3.
Preferably, the CGH compensator is not further from the nearest aspherical optical surface than the radius of curvature of the apex of the aspherical optical surface.
Preferably, the caliber of the CGH compensator null test zone is no greater than 100mm; the outer caliber of the alignment area is not more than 135mm, and the difference between the inner caliber and the outer caliber is not less than 20mm; the caliber of the reference area is not less than 15% of the caliber of the zero test area.
Preferably, the manufacturing parameters of the CGH compensator are obtained by performing simulation design by using optical design software Zemax according to the geometric parameters of the optical part, the distances between the CGH compensator and the aspheric optical surface, the caliber of all areas of each CGH compensator and the CGH compensator material, and the CGH compensator is manufactured according to the manufacturing parameters.
Preferably, standard spherical test light waves emitted by the interferometer are modulated into wave fronts with consistent surfaces of the aspheric optical parts after passing through a zero test area of the CGH compensator, so that interferometry conditions can be formed, and measurement of surface shape errors of the aspheric optical parts can be realized.
Preferably, the two interferometers sequentially emit standard spherical test light waves, the test light waves are modulated into standard planar light waves after passing through a reference area of the CGH compensator, the standard planar light waves are self-collimated and returned after passing through the CGH compensator farthest from the interferometers, interference fringes are formed, the number of the two fringes is counted, and an included angle error of the two CGH compensators is obtained, namely the included angle error of the optical axis of the optical part.
Preferably, the F-number of the interferometer standard lens is less than the ratio of the CGH compensator to the interferometer distance beside the interferometer to the alignment area aperture.
A method for detecting the consistency of optical axes of two-sided co-body large-caliber aspheric reflectors comprises the following steps:
according to the geometric parameters of the two-sided co-body aspheric optical part to be detected, designing the device for detecting the optical axis consistency of the two-sided co-body large-caliber aspheric reflecting mirror according to claim 1; the CGH compensator and the interferometer which are arranged on one side of the aspheric optical surface M are respectively marked as a first CGH compensator and a first interferometer, and the CGH compensator and the interferometer which are arranged on one side of the aspheric optical surface N are respectively marked as a second CGH compensator and a second interferometer;
based on the device, the two interferometers emit standard spherical test light waves, the positions of the two interferometers are respectively adjusted, so that corresponding interference fringes appear in the first interferometer and the second interferometer in the alignment area B of the first CGH compensator and the second CGH compensator respectively, and the number of the fringes is smaller than 3;
finely adjusting the position and the inclination angle of the two-sided co-body aspheric optical part to be measured, so that corresponding interference fringes appear in a zero position test area of the first CGH compensator in the first interferometer, the number of the fringes is less than 3, and primary coma aberration of the wave surface measured by the first interferometer is less than 0.02; calculating to obtain a surface shape error of the aspheric optical surface M;
fine-tuning the positions and the inclination angles of the second interferometer and the second CGH compensator to enable a zero position test area of the second CGH compensator to generate corresponding interference fringes in the second interferometer, wherein the number of the fringes is required to be less than 3, and primary coma aberration of a wave surface measured by the second interferometer is less than 0.02; calculating to obtain a surface shape error of the aspheric optical surface N;
and observing and counting the number of interference fringes of the first CGH compensator reference area in the first interferometer, and calculating the number of interference fringes of the second CGH compensator reference area in the second interferometer to obtain an optical axis included angle error.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, by observing and counting interference fringes formed by the included angles of the two CGH compensators, the in-situ high-precision detection of the optical axis of the two-sided co-body aspheric mirror is realized, and compared with the traditional interferometry method in which a mechanical reference is required to be led out for detecting the optical axis, the method has the advantages of less error sources and low detection cost by using high-precision detection instruments such as theodolites.
Drawings
FIG. 1 is a schematic diagram of a detection surface profile according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of detecting an included angle of an optical axis according to an embodiment of the present invention;
fig. 3 is a schematic diagram of the distribution of each planning area of the CGH compensator according to the embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the apparatus of the present invention includes: a first interferometer 1, a second interferometer 2, a first CGH compensator 3, a second CGH compensator 4. The left and right surfaces of the two-sided co-body aspheric optical part 5 to be measured are divided into an aspheric optical surface M and an aspheric optical surface N, the first CGH compensator 3 is placed on the left side of the aspheric optical surface M, the second CGH compensator 4 is placed on the right side of the aspheric optical surface N, the first interferometer 1 is placed on the left side of the first CGH compensator 3, and the second interferometer 2 is placed on the right side of the second CGH compensator 4.
As shown in fig. 3, different areas including a zero test area a, an alignment area B, and a reference area C are divided on the first CGH compensator 3 and the second CGH compensator 4 according to the geometrical parameters of the aspheric optical surface M, N and the positional relationship of the optical elements in the device. The area A is used for measuring the surface shape error of the two-sided co-body aspheric optical part 5, and standard spherical test light waves emitted by the laser interferometer pass through the area AModulated to a uniform wavefront at the surface of the aspheric optical element, thereby creating interferometric conditions. And the standard spherical test light wave emitted by the laser interferometer passes through the region B and then is auto-collimated and returned to form interference fringes for auxiliary alignment of the laser interferometer and the CGH compensator. The area C is used for measuring the included angle between the first CGH compensator 3 and the second CGH compensator 4, as shown in fig. 2, the standard spherical test light wave emitted by the first interferometer 1 is modulated into a standard planar light wave after passing through the area C, the light wave returns after passing through the CGH compensator 4 in an auto-collimation manner, interference fringes are formed in the first interferometer 1, and the number N of the fringes is counted 1 . In the same way, the second interferometer 2 emits standard spherical test light waves, and the light waves emitted by the surface area C of the second CGH compensator 4 can be counted to be reflected by the first CGH compensator 3, so as to form the number N of interference fringes in the interferometer 2 2 。
The interference fringe N 1 、N 2 The optical axis angle θ is calculated according to the following formula.
D 1 、D 2 The diameter of the surface area C of the first 3 and second 4 CGH compensator, respectively, lambda being the laser wavelength of the interferometer.
The standard spherical test light wave emitted by the first interferometer 1 passes through the test area A of the first CGH compensator 3 and then is modulated to be consistent with the wavefront of the theoretical aspheric optical surface M, the test light wave carries the surface shape error information of the test light wave after being reflected by the aspheric optical surface M, returns to the first interferometer 1 after passing through the test area A of the first CGH compensator 3 again, and generates interference phenomenon with the reference spherical light wave in the first interferometer 1, and the interferometer data acquisition and processing system can calculate and invert the surface shape error of the aspheric optical surface M. In the same way, the surface shape error of the aspherical optical surface N can be measured.
In the design of optical path parameters, the caliber of the CGH compensator testing area A is influenced by the distance L1 from the CGH compensator to the aspheric optical surface, and the caliber is comprehensively evaluated according to the geometric parameters of the aspheric optical surface and the processing difficulty of the CGH compensator. By way of reference, the CGH compensator-to-aspherical optical surface distance L1 generally does not exceed in value the vertex radius of curvature R of the aspherical optical surface, within which the closer the CGH compensator-to-aspherical optical surface distance L1 is, the larger the caliber of the required test area a. The distance is chosen as much as possible so that the caliber of the CGH compensator area a is not more than 100mm. The CGH compensator to interferometer distance L2 affects the minimum feature size of the CGH compensator process, which is chosen as much as possible so that the minimum feature size is not less than 5um, which can be calculated in the optical design software Zemax. The outer aperture of the alignment area B is not larger than 135mm as much as possible, and the difference between the inner aperture and the outer aperture is not smaller than 20mm as much as possible. The caliber of the reference area C is not smaller than 15% of the caliber of the test area A as much as possible.
The F number of the interferometer standard lens should be smaller than the ratio of the CGH compensator to the interferometer distance L2 to the aperture of the alignment area B in the interferometer standard lens selection.
Based on optical design software Zemax, simulation design is carried out, the caliber, vertex curvature radius and aspheric coefficients of the aspheric optical surface M, N of the two-sided co-body aspheric optical part to be tested are input, the material and thickness of the two compensators and the caliber of each area and the distance between the compensators and the optical part are obtained through simulation, and the design indexes of the two compensators are obtained through simulation, so that the corresponding compensators are manufactured.
The design of the device is completed based on the light path and distance parameters of fig. 1.
The following describes in detail by way of examples, the aspherical optical surface M of the two-sided co-spherical optical part 5 to be measured has an aperture Φ500mm, a vertex radius of curvature r0=560 mm, and an aspherical coefficient k= -0.88. Aspherical optical surface N caliber Φ420mm, vertex curvature radius r0=1558mm, aspherical coefficient k= -3.
The first CGH compensator 3 and the second CGH compensator 4 are designed in a simulation mode by using optical design software Zemax according to geometric parameters of the aspheric optical surface M, N in the two-sided co-body aspheric optical part 5 to be tested.
The laser wavelength λ= 6.328e-4mm was set, the aspheric optical surface M was 460mm from the CGH compensator 3, the CGH compensator 3 was 190mm from the interferometer 1, the CGH compensator was of fused silica and 6.35mm thick.
The caliber of the test area A of the first CGH compensator 3 is 80mm, and even order term coefficients of binary optical polynomial parameters in the Binary2 format from a quadratic term to a tenth order term are 5.057E+001, -2.035E-002,7.053E-006, -1.387E-009,1.104E-013 respectively;
the caliber of the alignment area B of the first CGH compensator 3 is 120mm, and even order term coefficients of binary optical polynomial parameters of the Binary2 format from a quadratic term to an eighth order term are-7.195E+004, 1.987E+003, -1.074E+002 and 5.878E+000 respectively;
the first CGH compensator 3 has a reference area Ccaliber D1=20mm, and binary optical polynomial parameters in the Binary2 format have even term coefficients of-1.30E+003 and 3.448E-001 from the second term to the fourth term, respectively.
Setting the distance between the aspheric optical surface N and the second CGH compensator 4 to be 1000mm, setting the distance between the second CGH compensator 4 and the second interferometer 2 to be 240mm, and setting the CGH compensator to be fused quartz with the thickness of 6.35mm;
the caliber of the test area A of the second CGH compensator 4 is 70mm, and even order term coefficients of binary optical polynomial parameters in the Binary2 format from a quadratic term to a tenth order term are 6.18PE+001, -3.051E-002,7.361E-006, -2.237E-009,6.345E-013 respectively;
the second CGH compensator 4 aligns with the aperture of the area B as 115mm, and the even order term coefficients of binary optical polynomial parameters of the Binary2 format from the quadratic term to the eighth order term are-8.213E+004, 2.156E+003, -1.129E+002, and 3.788E+000 respectively;
the second CGH compensator 4 had a C-caliber d2=18mm, and binary optical polynomial parameters in the binary2 format had even term coefficients of-1.50e+003, 5.448e-001 from the second to fourth order terms, respectively.
The first CGH compensator 3 and the second CGH compensator 4 which are designed and manufactured according to the light path parameters are constructed, an interference detection light path is built for detection, and the method comprises the following steps:
step 1, standard lens F numbers of a first interferometer 1 and a second interferometer 2 are 1.5 and 2 respectively, and a detection light path is initially built;
step 2, respectively adjusting the translation of the first interferometer 1 and the second interferometer 2 in the X/Y/Z directions, so that the alignment areas B of the first CGH compensator 3 and the second CGH compensator 4 generate corresponding interference fringes in the first interferometer 1 and the second interferometer 2, and the number of the interference fringes is less than 3; as shown in fig. 1, the rotation symmetry axis of the two-sided co-spherical optical part is an X axis, the aspheric optical surface M points to the aspheric optical surface N, the vertical paper surface is an upward Z axis, the Y axis can be determined according to the right hand rule, and the following measurement steps are defined by adopting the same coordinate system;
step 3, finely adjusting the translation and the inclination of the X/Y/Z axes of the two-sided co-body aspheric optical part 5 in three directions, so that a test area A of the first CGH compensator 3 generates corresponding interference fringes in the interferometer 1, as shown in figure 1, the surface shape error of the aspheric optical surface M is measured by utilizing an interferometer data acquisition and processing system, the number of the fringes of the interferometer is required to be less than 3, and the primary coma aberration of the wave surface measured by the interferometer is less than 0.02;
step 4, finely adjusting the translation and the inclination of the X/Y/Z axes of the whole second interferometer 2 and the second CGH compensator 4 to enable the test area A of the second CGH compensator 4 to generate corresponding interference fringes in the interferometer 2, and measuring by using an interferometer data acquisition and processing system to obtain the surface shape error of the aspheric optical surface N, wherein the number of the interference fringes is required to be less than 3, and the primary coma aberration of the wave surface measured by the interferometer is less than 0.02;
step 5, observing and counting the number N of interference fringes of the surface area C of the first CGH compensator 3 in the first interferometer 1 1 =5, the number N of interference fringes in the second interferometer 2 of the surface area C of the second CGH compensator 4 2 =4, calculated as the optical axis angle error θ according to the following formula.
The angle corresponding to the five stripes is 13 seconds, the angle resolution of one stripe is about 2 seconds, the in-situ high-precision detection is realized, and compared with the traditional interferometry method for detecting the optical axis, the mechanical reference is required to be led out, and a high-precision detection instrument such as a theodolite is used, so that the method has the advantages of less error source and low detection cost.
The foregoing is merely illustrative of the best embodiments of the present invention, and the present invention is not limited thereto, but any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be construed as falling within the scope of the present invention.
What is not described in detail in the present specification belongs to the known technology of those skilled in the art.
Claims (9)
1. The device for detecting the consistency of the optical axes of the two-sided co-body large-caliber aspheric reflecting mirror is characterized by comprising an interferometer and a CGH compensator;
the surface of the two-sided co-body aspheric optical part to be measured is divided into an aspheric optical surface M and an aspheric optical surface N, and the two CGH compensators are respectively arranged at the outer side of the aspheric optical surface M and the outer side of the aspheric optical surface N; an interferometer is arranged on the other side of each of the two CGH compensators;
each CGH compensator is divided into a zero test area, an alignment area and a reference area, wherein the zero test area is used for measuring the surface shape error of the optical part, and the alignment area is used for auxiliary alignment of the interferometer and the CGH compensator; the reference area is used for measuring the included angle error of the two CGH compensators to obtain the included angle error of the optical axis of the optical part.
2. The device for detecting the optical axis of the two-sided co-body large-caliber aspheric mirror according to claim 1, wherein the device is required to satisfy the following requirements before measurement:
the two interferometers emit standard spherical test light waves, and a zero test area of each CGH compensator generates corresponding interference fringes in the interferometers outside the CGH compensator, wherein the number of the interference fringes is less than 3.
3. A device for detecting the optical axis of a two-sided co-located large caliber aspherical mirror as claimed in claim 1 wherein the CGH compensator is located no further from the nearest aspherical optical surface than the radius of curvature of the apex of the aspherical optical surface.
4. The device for detecting the optical axis of a two-sided co-body large-caliber aspheric mirror according to claim 1, wherein the caliber of the CGH compensator zero test area is not more than 100mm; the outer caliber of the alignment area is not more than 135mm, and the difference between the inner caliber and the outer caliber is not less than 20mm; the caliber of the reference area is not less than 15% of the caliber of the zero test area.
5. The device for detecting the optical axis of the two-sided co-body large-caliber aspheric mirror according to claim 4, wherein the manufacturing parameters of the CGH compensator are obtained by performing simulation design by using optical design software Zemax according to the geometric parameters of the optical parts, the distances between the CGH compensator and the aspheric optical surface, the caliber of all areas of each CGH compensator and the CGH compensator material, and the manufacturing parameters of the CGH compensator are manufactured according to the manufacturing parameters.
6. The device for detecting the optical axis of the two-sided co-body large-caliber aspheric mirror according to claim 1, wherein standard spherical test light waves emitted by the interferometer are modulated into wavefront with the same surface shape of the aspheric optical part after passing through a zero position test area of the CGH compensator, so that interferometry conditions can be formed, and measurement of surface shape errors of the aspheric optical part can be realized.
7. The device for detecting the optical axis of the two-sided co-body large-caliber aspheric mirror according to claim 1, wherein the two interferometers sequentially emit standard spherical test light waves, the test light waves are modulated into standard plane light waves after passing through a reference area of the CGH compensator, and the test light waves are self-collimated and returned after passing through the CGH compensator farthest from the interferometers to form interference fringes; and counting the number of the stripes for two times to obtain the included angle error of the two CGH compensators, namely the included angle error of the optical axis of the optical part.
8. A device for detecting the optical axis of a two-sided co-body large-caliber aspherical mirror as claimed in claim 1, wherein the F-number of the interferometer standard lens is smaller than the ratio of the CGH compensator beside the interferometer to the interferometer distance to the alignment area caliber.
9. The method for detecting the optical axis consistency of the two-sided co-body large-caliber aspheric reflecting mirror is characterized by comprising the following steps:
according to the geometric parameters of the two-sided co-body aspheric optical part to be detected, designing the device for detecting the optical axis consistency of the two-sided co-body large-caliber aspheric reflecting mirror according to claim 1; the CGH compensator and the interferometer which are arranged on one side of the aspheric optical surface M are respectively marked as a first CGH compensator and a first interferometer, and the CGH compensator and the interferometer which are arranged on one side of the aspheric optical surface N are respectively marked as a second CGH compensator and a second interferometer;
based on the device, the two interferometers emit standard spherical test light waves, the positions of the two interferometers are respectively adjusted, so that corresponding interference fringes appear in the first interferometer and the second interferometer in the alignment area B of the first CGH compensator and the second CGH compensator respectively, and the number of the fringes is smaller than 3;
finely adjusting the position and the inclination angle of the two-sided co-body aspheric optical part to be measured, so that corresponding interference fringes appear in a zero position test area of the first CGH compensator in the first interferometer, the number of the fringes is less than 3, and primary coma aberration of the wave surface measured by the first interferometer is less than 0.02; calculating to obtain a surface shape error of the aspheric optical surface M;
fine-tuning the positions and the inclination angles of the second interferometer and the second CGH compensator to enable a zero position test area of the second CGH compensator to generate corresponding interference fringes in the second interferometer, wherein the number of the fringes is required to be less than 3, and primary coma aberration of a wave surface measured by the second interferometer is less than 0.02; calculating to obtain a surface shape error of the aspheric optical surface N;
and observing and counting the number of interference fringes of the first CGH compensator reference area in the first interferometer, and calculating the number of interference fringes of the second CGH compensator reference area in the second interferometer to obtain an optical axis included angle error.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116539283A (en) * | 2023-07-06 | 2023-08-04 | 长春通视光电技术股份有限公司 | Double-reflecting-surface composite mirror optical axis deviation detection system and detection method |
| CN117168310A (en) * | 2023-11-02 | 2023-12-05 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116539283A (en) * | 2023-07-06 | 2023-08-04 | 长春通视光电技术股份有限公司 | Double-reflecting-surface composite mirror optical axis deviation detection system and detection method |
| CN116539283B (en) * | 2023-07-06 | 2023-09-12 | 长春通视光电技术股份有限公司 | Double-reflecting-surface composite mirror optical axis deviation detection system and detection method |
| CN117168310A (en) * | 2023-11-02 | 2023-12-05 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
| CN117168310B (en) * | 2023-11-02 | 2024-02-09 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
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