CN103926058A - Method for measuring optical axis in aspheric surface detection by means of self-aligning plane mirror - Google Patents
Method for measuring optical axis in aspheric surface detection by means of self-aligning plane mirror Download PDFInfo
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Abstract
The invention provides a method for measuring an optical axis in aspheric surface detection by means of a self-aligning plane mirror, and belongs to the technical field of optical detection. According to the method, the problem that orientation measurement accuracy of the optical axis is low in aspheric surface detection is solved. The method is used for adjusting relative positions and angles of the plane mirror and an interferometer, and enabling the direction of the plane mirror to be perpendicular to emergent light of the interferometer to generate interference fringes which are in a zero fringe state. A laser tracker is adopted to respectively measure a space coordinate of one point in space and a space coordinate of the mirror point, in the plane mirror, of the point, and the direction of the optical axis is obtained through the coordinates of the two points; a compensator is adjusted to be aligned to the interferometer, and an adjustment definition instrument is adopted to be aligned to the concave surface of the outer surface of a lens of the compensator; the laser tracker is used for measuring the position of a converge center of the adjustment definition instrument, namely, the position of the center of sphere of the outer surface of the lens, and obtaining a space coordinate of one point on the optical axis, and therefore the optical axis in a detection optical path is obtained with the combination of the optical axis direction obtained in the step 2; after the optical axis is obtained, mirror body characteristics are measured for positioning an aspheric surface mirror, and measurement and precision analysis can be carried out many times.
Description
Technical field
The present invention relates to the optical axis measuring method in a kind of aspheric surface detection, the optical axis measuring method during especially long radius-of-curvature aspheric surface detects, belongs to optical detective technology field.
Background technology
It is the benchmark of detected element location that aspheric surface detects optical axis in light path, by the measurement to optical axis, could further measure or calculate the geometric senses such as aspheric offset, vertex curvature radius.The measurement of optical axis is the link that detects the most critical of locating in light path, and its measuring accuracy is determining the measuring accuracy of the geometric senses such as aspheric surface offset, vertex curvature radius.The method of measuring optical axis in prior art in aspheric surface detection can be divided into two kinds.One is to adopt laser tracker measurement mechanical structure benchmark (the mechanical frock side benchmark of for example compensator) set up model, carries out benchmark transmission and calculating obtains optical axis according to the space relativeness such as parallel, vertical existing between mechanical references and optical axis; The second is by the centre of sphere of measuring compensator optical surface sphere, according to the definition of optical axis, measures two centre of sphere points and obtains optical axis.The method of mechanical references is simple, effective, but the precision of physical construction benchmark is subject to processing technique and laser tracker is surveyed quantitative limitation, generally be merely able to reach the precision of 0.02mm, in the non-spherical measuring of long radius-of-curvature, this error will increase to several millimeters (in as the detection light path in 10m magnitude, the measuring accuracy of optical axis is about 2mm), and repetition measurement precision is low.The centre of sphere is measured the general centre of sphere of debuging lens outer surface in orientator autocollimatic positioning compensation device that adopts of method of determining optical axis, adopt again laser tracker measure the position of the centre of sphere and in model, build straight line and obtain optical axis, when lens outer surface is convex surface or radius-of-curvature hour, 2 distances on optical axis are less, and measuring accuracy reduces.Two kinds of above-mentioned methods all can not meet the aspheric optical axis of long vertex curvature radius and measure requirement.
Summary of the invention
The present invention solves the low problem of optical axis direction measuring accuracy in aspheric surface detection, proposes a kind of method of measuring optical axis that detects according to level crossing autocollimatic.
Adopt level crossing to be realized by following steps from the method for locating tab assembly optical axis:
Step 1, interferometer are aimed at placement with plane mirror, adjust the angle of plane mirror, make its directional light reflection that interferometer is sent, and the striped that the light after reflection forms in interferometer, without inclination, is realized plane mirror autocollimatic;
Step 2, employing laser tracker carry out respectively the measurement of measurement point and mirror point thereof, obtain two space of points coordinate datas; Remove plane mirror;
Step 3, compensator is filled in light path, adjusts the angle of compensator, it is aimed at interferometer; Adjustment is debug to orientator and be filled in light path, adjust position and the angle of debuging orientator, it is aimed at the optical surface of compensator;
Step 4, employing laser tracker are measured the above-mentioned convergence center point of debuging orientator, obtain the spatial data of this convergence center point, and this convergence center point is a bit on optical axis;
The spatial data of convergence center point on step 5, the measurement point, mirror point and the optical axis that obtain according to step 2 and step 4, adopt the three dimensional space coordinate modeling software of laser tracker, the straight line being connected with mirror point according to measurement point, perpendicular to the principle of plane mirror, calculates the straight line that represents optical axis in model;
Step 6, obtain after optical axis, can position non-spherical reflector by measuring mirror body characteristics, calculate the parameter such as vertex curvature radius of catoptron; Repeating step a to e, takes multiple measurements and precision analysis.
Beneficial effect of the present invention: after level crossing and interferometer autocollimatic, the directional light direction of sending due to interferometer detects optical axis direction exactly, and therefore the plane of this autocollimatic level crossing is just perpendicular to optical axis direction; Utilize the function of laser tracker measurement plane catoptron picpointed coordinate, distinguish measurement space a bit and the mirror point coordinate of this point; According to the definition of mirror image, through this straight line of 2, perpendicular to mirror surface, due to minute surface and interferometer emergent light autocollimatic, this straight line parallel, in optical axis, has just obtained the direction of optical axis in space by the measurement of 2 about Mirror Symmetry like this; The function that orientator spherical wave is aimed at is debug in utilization, it is aimed at a lens sphere in compensator, the sphere of recycling laser tracker target ball with debug orientator and aim at, the centre of sphere of target ball is exactly a bit on optical axis like this, has just obtained a bit on optical axis by the position of laser tracker measurement target drone ball; After obtaining on optical axis direction and optical axis a bit, also just determine optical axis.
The present invention utilizes the method precision of autocollimatic level crossing method measurement optical axis high, solve the low problem of optical axis positioning precision in long distance detection, optical axis positioning precision in the detection light path of 10m magnitude is increased to 0.1mm, provides guarantee to the accurate measurements of geometric sense such as vertex curvature radius, offset in aspheric surface detection and control.
Brief description of the drawings
Fig. 1 utilizes the mirror point measurement of laser tracker and autocollimatic level crossing to determine the schematic diagram of optical axis direction in the inventive method.
Fig. 2 utilizes the instrumentation plan of debuging orientator and laser tracker and measure on optical axis any in the inventive method.
In figure: 1, interferometer, 2, autocollimatic level crossing, 3, directional light, 4, laser tracker, 5, measurement point, 6, the mirror point of measurement point, 7, be parallel to the straight line of optical axis, 8, compensator, 9, debug orientator, 10, tested aspheric surface, 11, tested melatope.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
The method that adopts autocollimatic plane mirror measurement optical axis, the method is realized by following steps:
As shown in Figure 1, step 1, interferometer 1 are aimed at placement with plane mirror 2, adjust the angle of plane mirror 2, and its directional light 3 that interferometer 1 is sent is reflected, the striped that light after reflection forms in interferometer 1, without inclination, is realized plane mirror 2 autocollimatics;
Step 2, employing laser tracker 4 carry out respectively the measurement of measurement point 5 and mirror point 6 thereof, obtain two space of points coordinate datas; Remove plane mirror 2;
As shown in Figure 2, step 3, compensator 8 is filled in light path, adjusts the angle of compensator 8, it is aimed at interferometer 1; Adjustment is debug to orientator 9 and be filled in light path, adjust position and the angle of debuging orientator 9, it is aimed at the optical surface of compensator 8;
Step 4, employing laser tracker 4 are measured the above-mentioned convergence center point 11 of debuging orientator 9, obtain the spatial data of this convergence center point 11, and this convergence center point 11 is a bit on optical axis;
The spatial data of convergence center point 11 on step 5, the measurement point 5, mirror point 6 and the optical axis that obtain according to step 2 and step 4, adopt the three dimensional space coordinate modeling software of laser tracker 4, the straight line being connected with mirror point 6 according to measurement point 5, perpendicular to the principle of plane mirror 2, calculates the straight line that represents optical axis in model;
Step 6, obtain after optical axis, can position non-spherical reflector 10 by measuring mirror body characteristics, calculate the parameter such as vertex curvature radius of catoptron; Repeating step a to e, takes multiple measurements and precision analysis.
Embodiment:
A, plane mirror 2 is placed near near the position (far away apart from interferometer 1, the precision of measurement is higher) detected aspheric surface 10, and the directional light 3 of interferometer 1 outgoing is radiated in the effective aperture of plane mirror 2; Adjust rocking and two angle directions of pitching of plane mirror 2, making its interference fringe forming in interferometer 1 is zero striation; Adopt interferometer 1 to measure and analyze, check the tilt quantity (the tilt item after zernike matching) in face shape testing result, and continue to adjust plane mirror 2 until inclination is close to 0, adjust and realized the autocollimatic of plane mirror 2 to interferometer;
B, the target ball that utilizes laser tracker 4 cause the laser of laser tracker 4 autocollimatic level crossing 2 and form reflection, adopt target ball to obtain the laser of reflection, target ball is placed on and the position of the about half optical path distance of vertical range of plane mirror 2, as shown in Figure 1, being set as measurement point 5(places ball seat and keeps motionless), due to process reflection, that measure is the spatial data (x6 of mirror point 6, y6, z6); Target ball is playbacked to laser tracker 4 ball seats, and then again drawing laser to above-mentioned ball seat position is measurement point 5, is this time that laser does not pass through catoptron, therefore the volume coordinate that adopts laser tracker 4 to carry out measurement point 5 is measured, obtain coordinate data (x5, y5, z5); After measurement, in light path, remove plane mirror 2;
C, compensator 8 is filled in light path and (places suitable distance, ensure to be measured and interval non-spherical reflector 10), utilize the feature end face of compensator 8 to adjust compensator, it is aimed at interferometer 1, in this process, keep interferometer 1 motionless, adjusting the emergent light direction of interferometer 1 after aiming at is exactly optical axis direction; Keep compensator 8 motionless, will debug orientator 9 and be filled in light path; Position and the angle of orientator 9 debug in adjustment, and it is aimed at the last one side (or first surface) of lens combination in compensator 8;
D, keep that to debug orientator 9 motionless, the target ball of laser tracker 4 is placed in light path (being slightly placed near the convergent point of debuging orientator 9 emergent lights), adjust the D translation of the target ball of laser tracker 4, its reflected light is aimed at debuging orientator 9, and the convergence center 11 of debuging orientator 9 emergent lights is exactly target Qiu center; After aiming at, adopt laser tracker 4 to measure, acquisition point 11(be on optical axis a bit) coordinate (x11, y11, z11);
E, according to measurement point 5,6 and 11 that in above-mentioned steps b and d, laser tracker 4 measures, according to the definition of optical axis, modeling in the software of laser tracker 4, optical axis is for being parallel to point (x5, y5, z5), (x6, y6, z6) and through point (x11, y11, z11) straight line, the formula of foundation is:
after confirming that data are without gross error, the target ball of debuging orientator 9 and laser tracker 4 is removed to light path, prepare the measurement of non-spherical reflector 10;
F, obtain after optical axis, can position non-spherical reflector 10 by measuring mirror body characteristics, calculate the parameter such as vertex curvature radius of catoptron; Repeating step a to e, takes multiple measurements and precision analysis.
Claims (1)
1. the method that adopts autocollimatic plane mirror measurement optical axis, is characterized in that, the method is realized by following steps:
Step 1, interferometer (1) is aimed at placement with plane mirror (2), adjusts the angle of plane mirror (2), directional light (3) reflection that it is sent interferometer (1), the striped that light after reflection forms in interferometer (1), without inclination, is realized plane mirror (2) autocollimatic;
Step 2, adopts laser tracker (4) to carry out respectively the measurement of measurement point (5) and mirror point (6) thereof, obtains two space of points coordinate datas; Remove plane mirror (2);
Step 3, is filled to compensator (8) in light path, adjusts the angle of compensator (8), and it is aimed at interferometer (1); Adjustment is debug to orientator (9) and be filled in light path, adjust position and the angle of debuging orientator (9), it is aimed at the optical surface of compensator (8);
Step 4, adopts laser tracker (4) to measure the above-mentioned convergence center point (11) of debuging orientator (9), obtains the spatial data of this convergence center point (11), and this convergence center point (11) is a bit on optical axis;
Step 5, the spatial data of convergence center point (11) on measurement point (5), mirror point (6) and the optical axis obtaining according to step 2 and step 4, adopt the three dimensional space coordinate modeling software of laser tracker (4), the straight line being connected with mirror point (6) according to measurement point (5), perpendicular to the principle of plane mirror (2), calculates the straight line that represents optical axis in model;
Step 6, obtains after optical axis, can position non-spherical reflector (10) by measuring mirror body characteristics, calculates the parameter such as vertex curvature radius of catoptron; Repeating step a to e, takes multiple measurements and precision analysis.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104950420A (en) * | 2015-06-25 | 2015-09-30 | 中国科学院西安光学精密机械研究所 | System and method for calibrating optical axis of aspheric reflector |
| CN105092211A (en) * | 2015-04-30 | 2015-11-25 | 京东方科技集团股份有限公司 | Display optical test system and test method |
| CN106338261A (en) * | 2016-09-13 | 2017-01-18 | 湖北航天技术研究院总体设计所 | Angle deviation calibration method between two interferometer emergence plane wave light beams |
| CN106526576A (en) * | 2016-11-30 | 2017-03-22 | 上海卫星工程研究所 | Optical axis alignment method for ground imaging test of satellite remote sensing device |
| CN106767471A (en) * | 2016-09-28 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Optical interval measuring system and method in aspheric surface detection light path |
| CN107817088A (en) * | 2017-09-26 | 2018-03-20 | 中国科学院长春光学精密机械与物理研究所 | The scaling method and system of off-axis paraboloidal mirror optical axis direction |
| CN111076898A (en) * | 2019-12-02 | 2020-04-28 | 北京空间机电研究所 | Method for measuring optical axis of aspheric reflector by matching laser tracker with CGH (Carrier grade height) |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010169472A (en) * | 2009-01-21 | 2010-08-05 | Konica Minolta Opto Inc | Method of interference measurement |
| EP2261629A2 (en) * | 2009-06-08 | 2010-12-15 | Fujinon Corporation | Asphere measurement method and apparatus |
| CN102168955A (en) * | 2011-05-18 | 2011-08-31 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting curvature radius of optical spherical surface |
| CN102288132A (en) * | 2011-05-18 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument |
| CN102506761A (en) * | 2011-10-30 | 2012-06-20 | 中国科学院光电技术研究所 | Method for measuring curvature radius of aspheric surface vertex by using laser tracker |
| CN102879182A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring off-axis aspheric surface eccentricity by laser tracker |
| CN103591888A (en) * | 2013-10-28 | 2014-02-19 | 中国科学院长春光学精密机械与物理研究所 | Measuring and calculating method for geometrical parameters of large-caliber off-axis aspheric optical element |
-
2014
- 2014-03-27 CN CN201410120021.7A patent/CN103926058B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010169472A (en) * | 2009-01-21 | 2010-08-05 | Konica Minolta Opto Inc | Method of interference measurement |
| EP2261629A2 (en) * | 2009-06-08 | 2010-12-15 | Fujinon Corporation | Asphere measurement method and apparatus |
| CN102168955A (en) * | 2011-05-18 | 2011-08-31 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting curvature radius of optical spherical surface |
| CN102288132A (en) * | 2011-05-18 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument |
| CN102506761A (en) * | 2011-10-30 | 2012-06-20 | 中国科学院光电技术研究所 | Method for measuring curvature radius of aspheric surface vertex by using laser tracker |
| CN102879182A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring off-axis aspheric surface eccentricity by laser tracker |
| CN103591888A (en) * | 2013-10-28 | 2014-02-19 | 中国科学院长春光学精密机械与物理研究所 | Measuring and calculating method for geometrical parameters of large-caliber off-axis aspheric optical element |
Non-Patent Citations (2)
| Title |
|---|
| 师途 等: "非球面光学元件的面形检测技术", 《中国光学》, vol. 7, no. 1, 28 February 2014 (2014-02-28), pages 26 - 46 * |
| 王孝坤 等: "一种精确测量光学球面曲率半径的方法", 《光学学报》, vol. 31, no. 8, 31 August 2011 (2011-08-31) * |
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