CN104950420A - System and method for calibrating optical axis of non-spherical reflecting mirror - Google Patents
System and method for calibrating optical axis of non-spherical reflecting mirror Download PDFInfo
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- CN104950420A CN104950420A CN201510358642.3A CN201510358642A CN104950420A CN 104950420 A CN104950420 A CN 104950420A CN 201510358642 A CN201510358642 A CN 201510358642A CN 104950420 A CN104950420 A CN 104950420A
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- spherical reflector
- laser interferometer
- light path
- optical axis
- adjustment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
Abstract
The invention relates to a system and a method for calibrating an optical axis of a non-spherical reflecting mirror. The system comprises a first optical path, a second optical path and a third optical path, wherein the first optical path comprises a frame I, a compensator, a laser interferometer I and a PC (personal computer) which are sequentially arranged; the second optical path is characterized in that the compensator in the first optical path is removed, a lens of the laser interferometer I in the first optical path is replaced with a flat standard lens, and an adjustment system is mounted and fixed on a frame II through a mesopore of the non-spherical reflecting mirror; the third optical path is structurally characterized in that a posture adjusting tool in the second optical path is fixedly connected with a lathe rotating shaft, and the laser interferometer II in the second optical path is replaced with an internal focusing telescope. According to the system and the method, the optical axis of the non-spherical reflecting mirror is accurately found out in an optical non-contact manner, and a traditional method for determining the optical axis of the non-spherical reflecting mirror through meter running is abandoned.
Description
Technical field
The invention belongs to optics and debug detection field, particularly relate to a kind of method and system of non-spherical reflector determination optical axis.
Background technology
Spherical reflector has numerous optical axis, and all optical axises are all by the centre of sphere of spherical reflector.Non-spherical reflector only has unique optical axis, and relative to optical axis Rotational Symmetry, and namely its axis of symmetry of optical axis of non-spherical reflector and the approximate centre of sphere of non-spherical reflector also drop on this optical axis.
Determine the optical axis of non-spherical reflector to optical system assembling and setting and detect all significant.In the application of present non-spherical reflector, often in the middle part of minute surface, drawn mesopore, considerably increased the difficulty determining its optical axis like this, how the optical axis of Accurate Calibration non-spherical reflector just becomes unavoidable engineering problem.
Summary of the invention
An object of the present invention for provide a kind of can the system of Accurate Calibration aspheric surface reflector, another object of the present invention for provide a kind of can the method for Accurate Calibration aspheric surface reflector.
Technical solution of the present invention:
Demarcate the system of aspheric surface reflector, its special character is: comprise the first light path, the second light path and the 3rd light path,
Described first light path comprises framework, compensator, laser interferometer and the PC put successively, non-spherical reflector is fixed on framework, the light shaft coaxle of non-spherical reflector, compensator, laser interferometer, one end of described laser interferometer is camera lens and towards non-spherical reflector, the other end of described laser interferometer is connected with PC, described camera lens is sphere standard lens and matches with the R/D numerical value of non-spherical reflector, wherein R is the radius of non-spherical reflector, and D is the diameter of non-spherical reflector;
The structure of described second light path is: removed by the compensator in the first light path, is flat normal camera lens, is mounted and fixed on framework by adjustment System by the mesopore of non-spherical reflector by the lens changing of the laser interferometer in the first light path,
Described adjustment System comprises space pitching and orientation two dimension fine setting frock, installation shaft and pose adjustment frock,
The pitching of described space and orientation two dimension fine setting frock comprise three adjustment frock, flange plate-like fixture, optical module stationary installations, and optical module stationary installation is fixed with plane mirror, and plane mirror is towards flat normal camera lens;
Three adjustment frocks are divided equally and are fixed on flange plate-like fixture, optical element is fixed in optical module stationary installation, described adjustment frock comprises adjustment screw, external thread sleeve, upper bulb slide block and lower bulb slide block, described external thread sleeve, upper bulb slide block and lower bulb slide block are all sleeved on adjustment screw, described upper bulb slide block is positioned at one end of external thread sleeve, and described lower bulb slide block is positioned at the other end of external thread sleeve; Described external thread sleeve is fixedly connected with flange plate-like fixture, and described flange plate-like fixture is fixedly connected with one end of installation shaft, and described pose adjustment frock is fixing on the mounting shaft;
Described adjustment screw is fixed in optical module stationary installation, and described lower bulb slide block contacts with optical module stationary installation;
Plane mirror is vertical with the parallel beam of laser interferometer;
The structure of described 3rd light path is: be fixedly connected with lathe revolving shaft by the pose adjustment frock in the second light path, and the laser interferometer in the second light path is replaced with internal focusing telescope, one end of described internal focusing telescope is towards non-spherical reflector, and the other end of described internal focusing telescope is connected with PC.
Demarcate the method for aspheric surface reflector, comprise the following steps:
1] build the first light path, adjustment compensator, make the face type index of face type index and the non-spherical reflector that PC shows consistent, then the optical axis of laser interferometer just can represent the optical axis of non-spherical reflector;
2] build the second light path, the flat normal camera lens of laser interferometer, to opal, ensures that laser interferometer sends parallel beam parallel with the optical axis of non-spherical reflector;
3] parallel beam that space pitching and orientation two dimension fine setting frock ensure that laser interferometer the sends reflection ray after plane mirror is adjusted along former road return laser light interferometer, interference zero striped of formation:
Adjustment space pitching and orientation two dimension fine setting frock adjustment plane mirror, and in PC, observe interference fringe correction to minimum i.e. zero striped, now the plane of plane mirror and the optical axis of laser interferometer completely vertical, namely also just illustrate space pitching and orientation two dimension fine setting frock completely vertical with the optical axis of non-spherical reflector;
4] the 3rd light path is built, the image of spherical center of non-spherical reflector and the autocollimation reflection image of space pitching and orientation two dimension fine setting frock midplane mirror is found by internal focusing telescope focusing, in lathe spindle turning course, adjust the pitching of pose adjustment frock, orientation and upper and lower, left and right translation, ensure that the shaking volume of image of spherical center and autocollimation reflection image is minimum until do not rock, now the optical axis of non-spherical reflector is determined, optical axis and the lathe revolving shaft of non-spherical reflector overlap completely.
The advantage that the present invention has:
1. interfered by high precision and detect the light path control demarcation non-spherical reflector autocollimation picture parallel with optical axis, the image of spherical center of non-spherical reflector is controlled by internal focusing telescope, utilize the mode of optical touchless accurately to search out the optical axis of non-spherical reflector, broken away from traditional dependence and beaten the method that aspheric surface reflector determined by table.
2. non-cpntact measurement and demarcation, reduces the risk that minute surface scratches.
3. modular fixture component, for convenience detach with replacement.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention first light path;
Fig. 2 is the structural representation of the present invention second light path;
Fig. 3 is the structural representation of adjustment System of the present invention;
Fig. 4 is the structural representation that the present invention adjusts frock;
Fig. 5 is the structural representation of the present invention the 3rd light path.
Embodiment
Demarcate the system of aspheric surface reflector, comprise the first light path, second light path and the 3rd light path, as Figure 1-5, first light path comprises the framework 1 put successively, compensator 2, laser interferometer 3 and PC 4, non-spherical reflector 5 is fixed on framework 1, non-spherical reflector, compensator, the light shaft coaxle of laser interferometer, one end of laser interferometer is camera lens and towards non-spherical reflector, the other end of laser interferometer is connected with PC, camera lens is sphere standard lens and matches with the R/D numerical value of non-spherical reflector, wherein R is the radius of non-spherical reflector, D is the diameter of non-spherical reflector,
The structure of the second light path is: removed by the compensator in the first light path, is flat normal camera lens, is mounted and fixed on framework by adjustment System by the mesopore of non-spherical reflector by the lens changing of the laser interferometer 3 in the first light path,
Adjustment System comprises space pitching and orientation two dimension fine setting frock 7, installation shaft 8 and pose adjustment frock 9,
Space pitching and orientation two dimension fine setting frock 7 comprise three adjustment frock 71, flange plate-like fixture 72, optical module stationary installations 73, and optical module stationary installation is fixed with plane mirror 74, plane mirror is towards flat normal camera lens;
Three adjustment frocks 71 are divided equally and are fixed on flange plate-like fixture, described adjustment frock comprises adjustment screw 75, external thread sleeve 76, upper bulb slide block 77 and lower bulb slide block 78, external thread sleeve, upper bulb slide block and lower bulb slide block are all sleeved on adjustment screw, upper bulb slide block is positioned at one end of external thread sleeve, and lower bulb slide block is positioned at the other end of external thread sleeve; External thread sleeve is fixedly connected with flange plate-like fixture, and flange plate-like fixture is fixedly connected with one end of installation shaft, and pose adjustment frock is fixing on the mounting shaft;
Adjustment screw is fixed in optical module stationary installation, and lower bulb slide block contacts with optical module stationary installation;
Plane mirror is vertical with the parallel beam of laser interferometer;
The structure of the 3rd light path is: be fixedly connected with lathe revolving shaft by the pose adjustment frock in the second light path, and the laser interferometer in the second light path is replaced with internal focusing telescope, one end of described internal focusing telescope is towards non-spherical reflector, and the other end of described internal focusing telescope is connected with PC.
Demarcate the method for aspheric surface reflector, comprise the following steps:
1] build the first light path, adjustment compensator, make the face type index of face type index and the non-spherical reflector that PC shows consistent, then the optical axis of laser interferometer just can represent the optical axis of non-spherical reflector;
2] build the second light path, the flat normal camera lens of laser interferometer, to opal, ensures that laser interferometer sends parallel beam parallel with the optical axis of non-spherical reflector;
3] parallel beam that space pitching and orientation two dimension fine setting frock ensure that laser interferometer the sends reflection ray after plane mirror is adjusted along former road return laser light interferometer, interference zero striped of formation:
Adjustment space pitching and orientation two dimension fine setting frock adjustment plane mirror, and in PC, observe interference fringe correction to minimum i.e. zero striped, now the plane of plane mirror and the optical axis of laser interferometer completely vertical, namely also just illustrate space pitching and orientation two dimension fine setting frock completely vertical with the optical axis of non-spherical reflector;
4] the 3rd light path is built, the image of spherical center of non-spherical reflector and the autocollimation reflection image of space pitching and orientation two dimension fine setting frock midplane mirror is found by internal focusing telescope focusing, in lathe spindle turning course, adjust the pitching of pose adjustment frock, orientation and upper and lower, left and right translation, ensure that the shaking volume of image of spherical center and autocollimation reflection image is minimum until do not rock, now the optical axis of non-spherical reflector is determined, optical axis and the lathe revolving shaft of non-spherical reflector overlap completely.
Utilize non-spherical reflector, compensator and the laser interferometer that structural framing is housed to build autocollimation and interfere detection light path, the spatial relation of precision calibration three, is detected data accurately.Now the optical axis of the optical axis of non-spherical reflector, the optical axis of compensator and laser interferometer overlaps completely, and namely the optical axis of laser interferometer just can represent the optical axis of non-spherical reflector.
In detection light path, remove compensator, the sphere standard lens of laser interferometer is replaced by flat normal camera lens, and laser interferometer will send collimated light beam (parallel beam), and this collimated light beam is parallel with the optical axis of laser interferometer.By space pitching, orientation two dimension fine setting frock from non-spherical reflector mesopore through and mirror structure framework be fixed as one, the orientation of two-dimension adjustment frock and pitching between continuous modified spatial, make the plane mirror of frock front portion vertical with the parallel beam of laser interferometer, namely plane mirror is vertical with the optical axis of laser interferometer, namely vertical with the optical axis of non-spherical reflector.
Non-spherical reflector parts with space two-dimensional adjustment frock are installed on precision rotating lathe together with four-dimensional pose adjustment frock, boring-and-turning mill precise rotary shaft.Lathe guide rail sets up internal focusing central deviation measuring instrument, is searched out the approximate image of spherical center of non-spherical reflector by focusing, observed the shaking volume of approximate image of spherical center by computer screen.Again internal focusing central deviation measuring instrument is accommodated to the position of focal length infinite distance, search out the autocollimation reflection image of plane mirror in space two-dimensional adjustment frock, by the shaking volume of computer viewed in plan autocollimation reflection image.Repeatedly revise the orientation of appearance four-dimensional state adjustment frock, pitching and upper and lower, left and right translation, approximate image of spherical center and autocollimation reflection image are not all rocked, now just think that the optical axis of non-spherical reflector determines, namely the optical axis of non-spherical reflector and precision lathe revolving shaft overlap completely, and what the rotating accuracy of precision lathe revolving shaft just represented aspheric surface reflector rocks precision.
Now carry out turning process to the cylindrical of the cooperation position of non-spherical reflector institutional framework and end face, then the right alignment of size and the verticality of turning end can obtain high-precision guarantee.
Debug step:
1. precision builds the autocollimation interference detection light path of non-spherical reflector parts, compensator, laser interferometer, obtains interference data accurately.Ensure the optical axis of laser interferometer and the optical axis coincidence of non-spherical reflector;
2. installing space pitching on non-spherical reflector parts, orientation two dimension fine setting frock;
3. the sphere standard lens of laser interferometer be replaced by flat normal camera lens and to opal, ensure that laser interferometer sends collimated light beam (parallel beam) and this parallel beam is parallel with the optical axis of non-spherical reflector;
4. adjust space pitching, two dimension fine setting frock in orientation ensures reflection ray former road return laser light interferometer, form interference fringe.Now must by pitching and orientation adjustment by interference fringe correction to minimum i.e. zero striped, this illustrates that space pitching, orientation two-dimension adjustment frock are completely vertical with the optical axis of laser interferometer, also completely vertical with the optical axis of non-spherical reflector with regard to explanation frock.
5. the non-spherical reflector parts with two dimension fine setting frock are fixed on the fine turning lathe revolving shaft with four-dimension adjustment frock and rotate.Lathe guide rail sets up internal focusing telescope.The image of spherical center of non-spherical reflector and the reflection image of two dimension fine setting frock can be found by telescope focusing, in lathe spindle turning course, adjust the pitching of four-dimensional pose adjustment frock, orientation and upper and lower, left and right translation, ensure the shaking volume of image of spherical center and reflection image minimum (be similar to and do not rock), now the optical axis of non-spherical reflector is determined, optical axis and the precision lathe revolving shaft of non-spherical reflector overlap completely.
6. with cylindrical and the end face of lathe tool turning non-spherical reflector structural framing cooperation place, the right alignment of size and optical axis can be ensured, ensure the verticality of turning end and optical axis.
Claims (2)
1. demarcate the system of aspheric surface reflector, it is characterized in that: comprise the first light path, the second light path and the 3rd light path,
Described first light path comprises framework, compensator, laser interferometer and the PC put successively, non-spherical reflector is fixed on framework, the light shaft coaxle of non-spherical reflector, compensator, laser interferometer, one end of described laser interferometer is camera lens and towards non-spherical reflector, the other end of described laser interferometer is connected with PC, described camera lens is sphere standard lens and matches with the R/D numerical value of non-spherical reflector, wherein R is the radius of non-spherical reflector, and D is the diameter of non-spherical reflector;
The structure of described second light path is: removed by the compensator in the first light path, is flat normal camera lens, is mounted and fixed on framework by adjustment System by the mesopore of non-spherical reflector by the lens changing of the laser interferometer in the first light path,
Described adjustment System comprises space pitching and orientation two dimension fine setting frock, installation shaft and pose adjustment frock,
The pitching of described space and orientation two dimension fine setting frock comprise three adjustment frock, flange plate-like fixture, optical module stationary installations, and optical module stationary installation is fixed with plane mirror, and plane mirror is towards flat normal camera lens;
Three adjustment frocks are divided equally and are fixed on flange plate-like fixture, optical element is fixed in optical module stationary installation, described adjustment frock comprises adjustment screw, external thread sleeve, upper bulb slide block and lower bulb slide block, described external thread sleeve, upper bulb slide block and lower bulb slide block are all sleeved on adjustment screw, described upper bulb slide block is positioned at one end of external thread sleeve, and described lower bulb slide block is positioned at the other end of external thread sleeve; Described external thread sleeve is fixedly connected with flange plate-like fixture, and described flange plate-like fixture is fixedly connected with one end of installation shaft, and described pose adjustment frock is fixing on the mounting shaft;
Described adjustment screw is fixed in optical module stationary installation, and described lower bulb slide block contacts with optical module stationary installation;
Plane mirror is vertical with the parallel beam of laser interferometer;
The structure of described 3rd light path is: be fixedly connected with lathe revolving shaft by the pose adjustment frock in the second light path, and the laser interferometer in the second light path is replaced with internal focusing telescope, one end of described internal focusing telescope is towards non-spherical reflector, and the other end of described internal focusing telescope is connected with PC.
2. demarcate the method for aspheric surface reflector, comprise the following steps:
1] build the first light path, adjustment compensator, make the face type index of face type index and the non-spherical reflector that PC shows consistent, then the optical axis of laser interferometer just can represent the optical axis of non-spherical reflector;
2] build the second light path, the flat normal camera lens of laser interferometer, to opal, ensures that laser interferometer sends parallel beam parallel with the optical axis of non-spherical reflector;
3] parallel beam that space pitching and orientation two dimension fine setting frock ensure that laser interferometer the sends reflection ray after plane mirror is adjusted along former road return laser light interferometer, interference zero striped of formation:
Adjustment space pitching and orientation two dimension fine setting frock adjustment plane mirror, and in PC, observe interference fringe correction to minimum i.e. zero striped, now the plane of plane mirror and the optical axis of laser interferometer completely vertical, namely also just illustrate space pitching and orientation two dimension fine setting frock completely vertical with the optical axis of non-spherical reflector;
4] the 3rd light path is built, the image of spherical center of non-spherical reflector and the autocollimation reflection image of space pitching and orientation two dimension fine setting frock midplane mirror is found by internal focusing telescope focusing, in lathe spindle turning course, adjust the pitching of pose adjustment frock, orientation and upper and lower, left and right translation, ensure that the shaking volume of image of spherical center and autocollimation reflection image is minimum until do not rock, now the optical axis of non-spherical reflector is determined, optical axis and the lathe revolving shaft of non-spherical reflector overlap completely.
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| CN106767471A (en) * | 2016-09-28 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Optical interval measurement system and method in a kind of Aspherical-surface testing light path |
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| CN106767471B (en) * | 2016-09-28 | 2022-12-27 | 中国科学院西安光学精密机械研究所 | Optical interval measuring system and method in aspheric surface detection light path |
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| CN106908961A (en) * | 2017-04-24 | 2017-06-30 | 上海航天控制技术研究所 | Optical module adjustment method and instrument based on infrared imaging |
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| CN106990502B (en) * | 2017-06-14 | 2019-11-22 | 上海航天控制技术研究所 | Cattell optical module Method of Adjustment |
| CN110887637A (en) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | Coaxial collimator optical axis leading-out device and method |
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| CN112596259A (en) * | 2020-12-18 | 2021-04-02 | 北京空间机电研究所 | High-precision off-axis aspheric reflector optical axis leading-out method and system |
| CN113776455A (en) * | 2021-08-30 | 2021-12-10 | 中国科学院西安光学精密机械研究所 | Off-axis aspheric reflector zero compensation detection nonlinear error correction method |
| CN114326068A (en) * | 2022-01-05 | 2022-04-12 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric beam expanding assembly adjustment method |
| CN117451324A (en) * | 2023-12-22 | 2024-01-26 | 中国科学院合肥物质科学研究院 | Secondary concave curved surface detection light path system for large relative caliber and design method |
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Application publication date: 20150930 |