CN101408411A - Method for positioning relative position of off-axis aspherical mirror and zero compensation machine by four measuring bars - Google Patents
Method for positioning relative position of off-axis aspherical mirror and zero compensation machine by four measuring bars Download PDFInfo
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- CN101408411A CN101408411A CNA2008100514368A CN200810051436A CN101408411A CN 101408411 A CN101408411 A CN 101408411A CN A2008100514368 A CNA2008100514368 A CN A2008100514368A CN 200810051436 A CN200810051436 A CN 200810051436A CN 101408411 A CN101408411 A CN 101408411A
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Abstract
A method for positioning the relative position of an off-axis aspheric mirror and a zero compensator by adopting four measuring rods, which belongs to related methods in the optical measurement technology field and aims at providing the method for positioning the relative position of the off-axis aspheric mirror and the zero compensator by adopting four measuring rods. The technical proposal is as follows: firstly, a measurement apparatus is constructed; secondly, the preset positions of the four measuring rods on the off-axis aspheric mirror and the zero compensator are selected; thirdly, the four measuring rods are calculated and processed according to the optical design data of the off-axis aspheric mirror; fourthly, a compensator bracket is regulated to lead the zero compensator to be horizontal; fifthly, an aspheric mirror bracket is regulated to lead the off-axis aspheric mirror and the zero compensator to be positioned on the same height; sixthly, the aspheic mirror bracket is regulated to lead two ends of the four measuring rods to respectively contact with the preset positions on the off-axis aspheric mirror and the zero compensator; and seventhly, a measurement apparatus bracket is regulated to lead the measurement apparatus to output the surface shape information data of the off-axis aspheric mirror.
Description
Technical field
The invention belongs to a kind of scaling method that utilizes four measuring staff location off-axis aspheric mirrors and zero compensation machine relative position that relates in the optical detective technology field.
Background technology
Along with developing rapidly of China's national defense construction and space flight, aviation industry, higher more applications requirement has been proposed the aspherics element.The precise polished processing of aspherical mirror shape invariably accompanied to detect carry out, the result of detection provides the error with the optical design data, for further polishing processing provides foundation.At present detecting more to aspherical mirror shape is the autocollimation detection method that adopts zero compensation machine, as shown in Figure 1, comprises aspheric mirror 1, zero compensation machine 2, checkout equipment 3.Aspheric mirror 1 is a reflective optical devices; Zero compensation machine 2 is a round metal column casing, and several pieces optical lenses are equipped with in inside; Checkout equipment 3 generally can be interferometer or knife.At first checkout equipment 3 sends a plane wave or spherical wave, become required aspherical wavefront through behind the zero compensation machine 2, aspherical wavefront is returned according to former road by aspheric mirror 1 reflection back, get back to checkout equipment 3 through zero compensation machine 2,3 pairs of light waves that return of checkout equipment are analyzed, draw aspherical mirror shape control information, determine the face shape of aspheric mirror 1 is polished processing according to face shape error information.When choosing part use from aspheric mirror 1, aspheric mirror is called off-axis aspheric mirror, as shown in Figure 2, off-axis aspheric mirror 4, zero compensation machine 2, checkout equipment 3 constitute off-axis aspheric surface minute surface shape detection systems.The accuracy of detection key that autocollimatic is faced the shape detection method directly is to locate off-axis aspheric mirror 4 and zero compensation machine 2 relative position precision, and bearing accuracy directly influences the accuracy of detection and the polishing machining precision of 4 shapes of off-axis aspheric mirror.Location off-axis aspheric mirror 4 and zero compensation machine 2 relative positions mainly relied on the ruler measurement and positioning in the past.The method utilizes ruler to measure the interval of off-axis aspheric mirror 4 and zero compensation machine 2 several positions, adjusts both relative positions up to reaching required space requirement.The method operation poor repeatability, bearing accuracy is low.
Summary of the invention
In order to overcome the defective that existing method exists, the objective of the invention is to, off-axis aspheric mirror is being carried out the precise polished man-hour that adds, realize off-axis aspheric mirror curvature of centre radius, quadric surface coefficient, the isoparametric real-time control of high-order term coefficient.
The technical problem to be solved in the present invention: the method that four measuring staff location off-axis aspheric mirrors of a kind of usefulness and zero compensation machine relative position are provided.
The technical scheme of technical solution problem is: the first step, build pick-up unit, as shown in Figure 3, comprise off-axis aspheric mirror 5, zero compensation machine 6, checkout equipment 7, aspheric mirror support 8, compensator support 9, checkout equipment support 10, optical stabilization platform 11, first measuring staff 12, second measuring staff, 13, the three measuring staffs, 14, the four measuring staffs 15.On optical stabilization platform 11, be arranged in order from left to right or from right to left and settle aspheric mirror support 8, compensator support 9, checkout equipment support 10, and off-axis aspheric mirror 5, zero compensation machine 6, checkout equipment 7 are installed in respectively on aspheric mirror support 8, compensator support 9, the checkout equipment support 10.Second step, choose first measuring staff 12, second measuring staff 13, the 3rd measuring staff 14, the precalculated position of the 4th measuring staff 15 on off-axis aspheric mirror 5 and zero compensation machine 6: establish first measuring staff 12 at off-axis aspheric mirror 5, predetermined contact point on the zero compensation machine 6 is respectively a, a ', second measuring staff 13 is at off-axis aspheric mirror 5, predetermined contact point on the zero compensation machine 6 is respectively b, b ', the 3rd measuring staff 14 is at off-axis aspheric mirror 5, predetermined contact point on the zero compensation machine 6 is respectively c, c ', the 4th measuring staff 15 is at off-axis aspheric mirror 5, predetermined contact point on the zero compensation machine 6 is respectively d, d '; Each predetermined contact point chosen position is: contact point a, b are positioned at the point midway of the right and left of off-axis aspheric mirror 5, contact point a ', b ' are positioned at the center position on the limit, the left and right sides of zero compensation machine 6, and contact point a, b and a ', b ' are in same level height; Contact point c, d are positioned at the point midway on off-axis aspheric mirror both sides about in the of 5, contact point c ', d ' are positioned at the following center position that goes up of zero compensation machine 6, the line quadrature of the line of contact point c, d and contact point a, b, the line quadrature of the line of contact point c ', d ' and contact point a ', b '.The 3rd step, optical design data computation first measuring staff 12 according to off-axis aspheric mirror 5, second measuring staff 13, the theoretical length of the 3rd measuring staff 14, the four measuring staffs 15, and make first measuring staff 12 according to theoretical length, second measuring staff 13, the 3rd measuring staff 14, the four measuring staffs 15, wherein the 3rd measuring staff 14 and the 4th measuring staff 15 are isometric.In the 4th step, adjust compensator support 9 and make zero compensation machine 6 both ends horizontal.The 5th step, adjust aspheric mirror support 8, make off-axis aspheric mirror 5 geometric center point and zero compensation machine 6 geometric center point be in same level height.The 6th step kept adjusting aspheric mirror support 8 under the prerequisite of step 5 establishment, made first measuring staff 12, second measuring staff 13, the 3rd measuring staff 14, the 4th measuring staff 15 two ends be contacted with the precalculated position with zero compensation machine 6 and off-axis aspheric mirror 5 respectively.The 7th step, adjust checkout equipment support 10, make checkout equipment 7 can export the face shape information data of off-axis aspheric mirror 5.
Principle of work of the present invention: utilize the six-freedom degree of the relative position of six incoherent term restriction off-axis aspheric mirrors 5 and zero compensation machine 6, reach and locate the purpose of relative position between the two fully, coordinate system as shown in Figure 4.Wherein, off-axis aspheric mirror 5 geometric center point and zero compensation machine 6 geometric center point are positioned at the Y-axis translation freedoms of same level height qualification off-axis aspheric mirror 5 with respect to zero compensation machine 6; Predetermined contact point a, b are positioned at same level height and limit the Z axle rotary freedom of off-axis aspheric mirror 5 with respect to zero compensation machine 6; The 3rd measuring staff 14 and the 4th measuring staff 15 isometric qualification off-axis aspheric mirrors 5 are with respect to the X-axis rotation of zero compensation machine 6; The location of first measuring staff 12, second measuring staff 13 can have the Y-axis rotation of one group off-axis aspheric mirror 5 to cooperate upward X-axis translation to satisfy, when needs satisfied the location of the 3rd measuring staff 14, the 4th measuring staff 15, off-axis aspheric mirror 5 all was defined with respect to Y-axis rotation, two degree of freedom of X-axis translation of zero compensation machine 6; Off-axis aspheric mirror 5 limits together with respect to the Z axle translation freedoms of zero compensation machine 6 length by four measuring staffs.Like this, off-axis aspheric mirror 5 all is defined with respect to the six-freedom degree of zero compensation machine 6, and relative position between the two can be definite fully.
Good effect of the present invention: improve the work efficiency and the precision of location off-axis aspheric mirror 5 and zero compensation machine 6, make checkout equipment 7 can accurately detect the face shape error of off-axis aspheric mirror 5, provide condition for the face shape to off-axis aspheric mirror 5 is polished processing.
Description of drawings
Fig. 1 is the synoptic diagram that put the used checkout equipment of aspherical mirror shape autocollimation detection method, aspheric mirror position.
Fig. 2 is the synoptic diagram that put the used checkout equipment of off-axis aspheric surface minute surface shape autocollimation detection method, off-axis aspheric mirror position.
Fig. 3 is the synoptic diagram that utilizes four measuring staff location off-axis aspheric mirrors and the used checkout equipment of zero compensation machine relative position enforcement detection method, off-axis aspheric mirror position to put.
Fig. 4 is the synoptic diagram that coordinate system is adopted in the principle of work explanation of off-axis aspheric mirror and zero compensation machine relative position.
Embodiment
The inventive method is implemented according to seven one step process that propose in the technical scheme, and wherein, the first step is in building pick-up unit, and it is enough big that the area of employed optical stabilization platform 11 is wanted, and can put down all devices on table top; Aspheric mirror support 8, compensator support 9 and checkout equipment support 10 threes should have the adjustment function of six-freedom degree; First measuring staff 12, second measuring staff 13, the 3rd measuring staff 14, the 4th measuring staff 15 materials are quartz glass, have very little temperature expansion coefficient, reduce temperature difference influences such as hand temperature; Bulb is made at first measuring staff 12, second measuring staff 13, the 3rd measuring staff 14, the 4th measuring staff 15 two ends, makes four measuring staffs and off-axis aspheric mirror 5 and zero compensation machine be contacted with each precalculated position at 6, improves operation repeatability; The 4th step of technical scheme and the 5th step utilize surveyor's staff to adjust the levelness and off-axis aspheric mirror 5 level heights of zero compensation machine 6.
Claims (1)
1, the method for four measuring staffs location off-axis aspheric mirror and zero compensation machine relative position is by zero compensation machine and the checkout equipment face shape with autocollimatic way detection off-axis aspheric mirror; It is characterized in that the first step, build pick-up unit, comprise off-axis aspheric mirror (5), zero compensation machine (6), checkout equipment (7), aspheric mirror support (8), compensator support (9), checkout equipment support (10), optical stabilization platform (11), first measuring staff (12), second measuring staff (13), the 3rd measuring staff (14), the 4th measuring staff (15); On optical stabilization platform (11), be arranged in order from left to right or from right to left and settle aspheric mirror support (8), compensator support (9), checkout equipment support (10), and off-axis aspheric mirror (5), zero compensation machine (6), checkout equipment (7) are installed in respectively on aspheric mirror support (8), compensator support (9), the checkout equipment support (10); Second step, choose first measuring staff (12), second measuring staff (13), the 3rd measuring staff (14), the precalculated position of the 4th measuring staff (15) on off-axis aspheric mirror (5) and zero compensation machine (6): establish first measuring staff (12) in off-axis aspheric mirror (5), predetermined contact point on the zero compensation machine (6) is respectively a, a ', second measuring staff (13) is in off-axis aspheric mirror (5), predetermined contact point on the zero compensation machine (6) is respectively b, b ', the 3rd measuring staff (14) is in off-axis aspheric mirror (5), predetermined contact point on the zero compensation machine (6) is respectively c, c ', the 4th measuring staff (15) is in off-axis aspheric mirror (5), predetermined contact point on the zero compensation machine (6) is respectively d, d '; Each predetermined contact point chosen position is: contact point a, b are positioned at the point midway of the right and left of off-axis aspheric mirror (5), contact point a ', b ' are positioned at the center position on the limit, the left and right sides of zero compensation machine (6), and contact point a, b and a ', b ' are in same level height; Contact point c, d are positioned at off-axis aspheric mirror (5) point midway on both sides up and down, contact point c ', d ' are positioned at the following center position that goes up of zero compensation machine (6), the line quadrature of the line of contact point c, d and contact point a, b, the line quadrature of the line of contact point c ', d ' and contact point a ', b '; The 3rd step, optical design data computation first measuring staff (12) according to off-axis aspheric mirror (5), second measuring staff (13), the 3rd measuring staff (14), the theoretical length of the 4th measuring staff (15), and make first measuring staff (12) according to theoretical length, second measuring staff (13), the 3rd measuring staff (14), the 4th measuring staff (15), wherein the 3rd measuring staff (14) is isometric with the 4th measuring staff (15); In the 4th step, adjust compensator support (9) and make zero compensation machine (6) both ends horizontal; The 5th step, adjust aspheric mirror support (8), make off-axis aspheric mirror (5) geometric center point and zero compensation machine (6) geometric center point be in same level height; The 6th step, keep under the prerequisite of step 5 establishment, adjust aspheric mirror support (8), make first measuring staff (12), second measuring staff (13), the 3rd measuring staff (14), the 4th measuring staff (15) two ends be contacted with the precalculated position with zero compensation machine (6) and off-axis aspheric mirror (5) respectively; The 7th step, adjust checkout equipment support (10), make checkout equipment (7) can export the face shape information data of off-axis aspheric mirror (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100514368A CN101408411B (en) | 2008-11-18 | 2008-11-18 | Method for positioning relative position of off-axis aspherical mirror and zero compensation machine by four measuring bars |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008100514368A CN101408411B (en) | 2008-11-18 | 2008-11-18 | Method for positioning relative position of off-axis aspherical mirror and zero compensation machine by four measuring bars |
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| CN101408411A true CN101408411A (en) | 2009-04-15 |
| CN101408411B CN101408411B (en) | 2010-08-11 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101592478B (en) * | 2009-06-15 | 2011-05-18 | 浙江大学 | Device and method for non-zero compensating mirror precise interference positioning and adjustment in non-spherical non-zero detection |
| CN104950420A (en) * | 2015-06-25 | 2015-09-30 | 中国科学院西安光学精密机械研究所 | System and method for calibrating optical axis of non-spherical reflecting mirror |
| CN113776455A (en) * | 2021-08-30 | 2021-12-10 | 中国科学院西安光学精密机械研究所 | Off-axis aspheric reflector zero compensation detection nonlinear error correction method |
-
2008
- 2008-11-18 CN CN2008100514368A patent/CN101408411B/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101592478B (en) * | 2009-06-15 | 2011-05-18 | 浙江大学 | Device and method for non-zero compensating mirror precise interference positioning and adjustment in non-spherical non-zero detection |
| CN104950420A (en) * | 2015-06-25 | 2015-09-30 | 中国科学院西安光学精密机械研究所 | System and method for calibrating optical axis of non-spherical reflecting mirror |
| CN113776455A (en) * | 2021-08-30 | 2021-12-10 | 中国科学院西安光学精密机械研究所 | Off-axis aspheric reflector zero compensation detection nonlinear error correction method |
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| CN101408411B (en) | 2010-08-11 |
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Granted publication date: 20100811 Termination date: 20111118 |