CN201867495U - Three-dimensional space positioning device for static workpieces and special hand-held movable optical inverse reflector - Google Patents

Abstract

The utility model discloses a three-dimensional space positioning device with higher measurement precision for static workpieces and a special hand-held movable optical inverse reflector. The three-dimensional space positioning device is a multi-path laser interference tracing system, the multi-path laser interference tracing system consists of at least three laser interference trackers, a data processing system and the hand-held movable optical inverse reflector, wherein the data processing system is respectively connected with each laser interference tracker, and the hand-held movable optical inverse reflector is matched with at least three laser interference trackers to be used for carrying out three-dimensional space positioning on workpieces to be measured, the hand-held movable optical inverse reflector comprises a reflecting mirror and a positioning structure, and the positioning structure is connected with the reflecting mirror and is used for making the hand-held movable optical inverse reflector move on the reference surface of the workpieces to be measured in the specific direction. The device does not involve the angle measurement, the measurement uncertainty is only 5.5 mum, the measurement precision is much higher than that of the laser tracing measurement, and the high-precision three-dimensional workpiece positioning requirements of large-size workpieces can be completely met.

Description

A device for three-dimensional space positioning of static workpieces and a special hand-held movable optical retroreflector

technical field

The utility model relates to a laser tracking measuring device for three-dimensional spatial positioning of a static workpiece and a special hand-held movable optical retro-reflector. the

Background technique

Usually, the detection of small workpieces is directly completed on the detection machine tool, so determining the relative position between these workpieces and the detection machine tool is completely dependent on the workpiece positioning function of the detection machine tool itself. In the manufacture of special equipment, we often face the detection of large or even very large workpieces. Due to the large size of such workpieces, there is often no testing machine tool of the corresponding scale available, so it is necessary to place these workpieces directly on the processing site and set up testing equipment near them. At this time, determining the relative position of the detection equipment and the workpiece becomes the key to ensure the detection accuracy. Usually, to determine the relative position of the testing equipment and the workpiece, it is necessary to use a large-scale spatial coordinate measuring instrument such as a laser tracker, an indoor positioning system iGPS, a light pen measurement system, and a photogrammetry system to perform three-dimensional space positioning on the testing equipment and the workpiece. Take gear measurement as an example below:

In order to solve the problem of on-site detection of extra-large gears, the Chinese utility model patent application with the publication number CN101551240A discloses a large-scale gear measurement method based on laser tracking technology. 2) Determine the position of the measured gear and the three-coordinate measurement unit; 3) Adjust the position of the three-coordinate measurement unit relative to the measured gear and measure the parameters. This application essentially adopts a combined measurement system that combines large-scale spatial global measurement with distance front-end measurement. Specifically, the laser tracker is used as the global measurement device to realize the global measurement of the large-scale space, and the three-coordinate measurement unit is used as the front-end measurement device to realize the short-distance front-end measurement, because its step 2) can determine the gear under test and the three-coordinate measurement unit. position, which realizes the combination of global measurement and front-end measurement. the

而大型风力发电、大型锻压设备、大型冶金设备以及大型船舶传动装置所需齿轮大多是直径为3000～10000mm、最小模数为6mm、精度6级及以上的特大型 高精度齿轮。如下表所示，GB/T10095.1-2001中规定直径3000～10000mm，模数大于6mm的6级精度的齿轮精度要求为： Since the above-mentioned technology utilizes the laser tracker to respectively carry out the three-dimensional spatial positioning of the measured gear and the three-coordinate measurement unit, there are the following problems: the laser tracker adopts the spherical coordinate measurement principle combining angle sensing and length measurement (refer to the public No. CN101371160A Utility Model Patent Publication (the laser tracker and its measurement principle) are affected by the accuracy of angle measurement during long-distance measurement. As the distance increases, the accuracy of space coordinate measurement decreases significantly. Taking the latest Leica laser tracker AT901-LR with the highest precision as an example, when measuring the spatial point coordinates at 10m, the ranging uncertainty is 10 microns, and the angular uncertainty is ±10μm+5μm/m, then the total coordinate point The measurement uncertainty is

Most of the gears required for large-scale wind power generation, large-scale forging equipment, large-scale metallurgical equipment, and large-scale ship transmissions are extra-large and high-precision gears with a diameter of 3000-10000 mm, a minimum modulus of 6 mm, and an accuracy of grade 6 or above. As shown in the table below, GB/T10095.1-2001 stipulates that the gear accuracy requirements for gears with a diameter of 3000-10000mm and a modulus greater than 6mm are as follows:

project The indexing circle diameter is 3m Index circle diameter 10m Limit deviation of single pitch ±f _pt ≥18μm ≥27μm Cumulative total tolerance of tooth pitch F _p ≥113μm ≥182μm

Total tooth profile tolerance F _a ≥31μm ≥47μm Tooth profile shape tolerance f _fa ≥24μm ≥36μm Limit deviation of tooth profile inclination±f _Ha ≥20μm ≥29μm Helix total tolerance F _β (tooth width 40mm or more) ≥21μm ≥29μm Helix shape tolerance f _fβ (tooth width 40mm or more) ≥15μm ≥20μm Helix tilt limit deviation ±f _Hβ (tooth width 40mm or more) ≥15μm ≥20μm Radial runout tolerance F _r ≥90μm ≥144μm

It can be seen that the accuracy of large-scale spatial coordinate measurement using a laser tracker cannot meet the measurement requirements of this type of gear. the

Through the example of gear measurement above, it can be found that when using a laser tracker to locate a workpiece in a static state (such as the gear under test) in three-dimensional space, if the size of the workpiece is too large, the laser tracker must For long-distance tracking, the measurement accuracy of the laser tracker will drop significantly. Faced with this situation, it is necessary to find a device that can replace the laser tracker to locate the workpiece in three-dimensional space. the

Utility model content

The technical problem to be solved by the utility model is to provide a device for three-dimensional spatial positioning of a static workpiece with high measurement accuracy. the

In order to solve the above-mentioned technical problems, the device is a multi-channel laser interference tracking system, the multi-channel laser interference tracking system consists of at least three laser interference trackers, a data processing system connected to each of the laser interference trackers, and It is composed of a hand-held movable optical retro-reflector that is used in conjunction with the at least three laser interferometers to position the measured workpiece in three-dimensional space; wherein, the hand-held movable optical retro-reflector includes a reflector and The reflector is connected and used as a positioning structure for moving the hand-held movable optical retroreflector along a specific direction on the reference plane of the workpiece to be measured. the

The measurement principle of the multi-channel laser interferometric tracking system is an existing technology. For details, please refer to "Research on the Multi-channel Laser Tracking Interferometry System, Zhang Guoxiong et al., Journal of Tianjin University, 2003, Volume 36, Issue 1". introduce. However, as far as the current multi-channel laser interferometric tracking system is concerned, the optical retroreflectors used in it are all fixed optical retroreflectors, that is, they must be rigidly fixed to the measured object through a coupling and Move together with the measured object. For example, the target reflector combination disclosed in the target spatial position and attitude laser tracking and measuring system disclosed in the utility model patent with the authorized notification number CN1078703C. Based on the above reasons, the existing multi-channel laser interference tracking system can only be used to track and measure moving objects, such as checking the movement trajectory of the machine tool spindle, etc. Measurement. For the utility model, in order to realize the application of the multi-channel laser interference tracking technology in the static workpiece measurement, the technical solution of the utility model also includes a hand-held movable optical retro-reflector. The optical retroreflector is operated by the measurer, and its structure includes a reflector and a positioning structure coupled with the reflector and used to move the hand-held movable optical retroreflector in a specific direction on the reference surface of the workpiece to be measured . Due to the appearance of the hand-held movable optical retro-reflector, the technical difficulty that the existing multi-channel laser interference tracking system cannot be used for spatial three-dimensional positioning of the static workpiece can be overcome. Therefore, the utility model has obvious substantive features compared with the prior art. the

可见，对于空间点坐标测量，由于激光跟踪仪角度测量误差的放大，导致测量不确定度较大，即使使用精度最高的Leica最新型号激光跟踪仪AT901-LR的测量不确定度仍为60.83μm，即测量系统的不确定度已经超过直径3000～10000mm，模数大于6mm的六级精度等级齿轮单齿距极限偏差、齿廓总公差、齿廓形状公差、齿廓倾斜极限偏差、螺旋线总公差、螺旋线形状公差、螺旋线倾斜极限偏差多项精度要求；而改由多路激光干涉测长系统测量，由于不涉及角度测量，测量不确定度为5.5μm，测量精度要大大高于激光跟踪测量，可完全满足测量要求。因此，本实用新型相比现有技术还具有显著的进步。 Since the multi-channel laser interferometric tracking system uses the spatial coordinate measurement method based on the length-measuring polygon, more than three laser interferometric trackers are used to track and measure the distance between the measured point and the laser interferometric tracker from different spatial positions at the same time. , calculate the spatial coordinates of the measured point by the distance polygon constraints. This method of measurement does not involve angle measurements and is therefore highly accurate. For example, at the same space point at 10m, the three-way laser tracking length measurement technology is used to measure the X, Y, and Z axes respectively. The distance measurement accuracy of a single unit is 0.2μm+0.3μm/m, and three laser interference length measurement coordinates are established by it. The measurement uncertainty is

It can be seen that for spatial point coordinate measurement, due to the amplification of the angle measurement error of the laser tracker, the measurement uncertainty is relatively large. Even if the latest Leica laser tracker AT901-LR with the highest precision is used, the measurement uncertainty is still 60.83 μm. That is, the uncertainty of the measurement system has exceeded the diameter of 3000 ~ 10000mm, the six-level accuracy grade gear with a modulus greater than 6mm limit deviation of single pitch, total tolerance of tooth profile, tolerance of tooth profile shape, limit deviation of tooth profile inclination, and total tolerance of helix , helix shape tolerance, and helix tilt limit deviation multiple precision requirements; instead of measuring by a multi-channel laser interferometric length measurement system, since angle measurement is not involved, the measurement uncertainty is 5.5 μm, and the measurement accuracy is much higher than that of laser tracking. Measurement can fully meet the measurement requirements. Therefore, the utility model also has remarkable progress compared with prior art.

A multi-channel laser interferometric tracking system requires at least three laser interferometric trackers. Theoretically, the more laser interferometric trackers, the higher the accuracy. However, the use of too many laser interferometers is not only expensive, but also more complicated in layout and configuration, with higher requirements and limited improvement in accuracy. Therefore, as a preferred configuration form, the multi-channel laser interference tracking system adopts four laser interference trackers, and these four laser interference trackers are respectively arranged near the measurement interval formed by these four laser interference trackers. For the positions of the four corners, the workpiece to be measured is located inside the measurement interval. According to the characteristics of the multi-channel laser interferometric tracking technology, the above-mentioned arrangement is conducive to using redundant data to complete self-calibration of the own coordinates of each laser interferometric tracker. the

As a specific way of the positioning structure in the handheld movable optical retroreflector, when the reference surface of the workpiece to be measured is a stepped structure formed by the intersection of a reference cylinder and a reference end surface, the handheld movable optical retroreflector The positioning structure of the retroreflector adopts the following design, that is: the positioning structure includes a positioning body for contacting the reference cylinder, and a positioning seat arranged on the upper end of the positioning body and equipped with the reflector. When the positioning body leans against the reference cylinder and moves along the intersection of the reference cylinder and the reference end surface, the lower end surface of the positioning seat remains in close contact with the reference end surface. Numerous workpieces all have the datum plane of the stepped structure formed by the intersecting of a datum cylindrical surface and a datum end face, such as gears, large cylindrical parts, large cylindrical parts and the like. When the positioning body leans against the reference cylindrical surface of the workpiece to be measured and moves along the intersection line of the reference cylindrical surface and the reference end surface, the reflector on the hand-held movable optical retro-reflector is monitored by at least three laser interference trackers mentioned above. Laser tracking can simultaneously establish the central axis of the reference cylindrical surface of the measured workpiece and the reference end surface of the measured workpiece. As long as the intersection point of the central axis of the reference cylinder and the reference end surface of the measured workpiece is defined as the coordinate center point of the measured workpiece coordinate system, the three-dimensional positioning of the measured workpiece is completed. It can be seen that the advantage of the above positioning structure is that the central axis of the reference cylindrical surface of the measured workpiece and the reference end surface of the measured workpiece can be established simultaneously through its movement, so the measurement efficiency is high. the

Of course, the structural design of the positioning body should be considered to minimize the measurement error. Therefore, the utility model also carries out the following specific design on the above-mentioned positioning body. That is, the positioning body includes a support rod on which the positioning seat is installed on the upper end, and a rotating body arranged at the lower end of the supporting rod, the positioning body contacts the reference cylindrical surface of the workpiece through the rotating body, and the The rotating body is arranged coaxially with the reflector. The advantages of this design are: 1) The contact area between the positioning body and the workpiece to be measured can be reduced by setting the rotating body, so that it is possible to avoid accidents caused by the excessive contact area between the positioning body and the workpiece to be measured. The manufacturing error of the positioning body has a significant impact on the measurement results; 2) Since the rotating body is coaxially arranged with the reflector, even if the positioning body rotates during the movement, the center point of the reflector will not deviate from its position. The scheduled running trajectory will not affect the laser tracking and ranging of at least three laser interferometric trackers. the

The utility model also provides a hand-held movable optical retro-reflector specially used in the above system, the hand-held movable optical retro-reflector includes a mirror and is connected with the mirror and used A positioning structure that moves in a specific direction on the reference surface of the workpiece. the

As a specific way of the positioning structure in the handheld movable optical retroreflector, when the reference surface of the workpiece to be measured is a stepped structure formed by the intersection of a reference cylinder and a reference end surface, the handheld movable optical retroreflector The positioning structure of the retroreflector adopts the following design, that is: the positioning structure includes a positioning body for contacting the reference cylinder, and a positioning seat arranged on the upper end of the positioning body and equipped with the reflector. When the positioning body leans against the reference cylinder and moves along the intersection of the reference cylinder and the reference end surface, the lower end surface of the positioning seat remains in close contact with the reference end surface. the

The specific design of the above-mentioned positioning body is: the positioning body includes a support rod with the positioning seat installed on the upper end, and a rotating body arranged at the lower end of the supporting rod. The reference cylinder is in contact, and the rotating body is arranged coaxially with the mirror. the

As a further improvement of this specific design, the rotating body is disc-shaped. the

The beneficial effects of the utility model are: the device does not involve angle measurement, the measurement uncertainty is only 5.5 μm, the measurement accuracy is much higher than the laser tracking measurement, and can fully meet the high-precision three-dimensional workpiece positioning requirements of large workpieces. the

Description of drawings

Fig. 1 is a working state diagram of the device for three-dimensional space positioning of a static workpiece according to the present application. the

Fig. 2 to Fig. 7 are diagrams of the use state of various hand-held movable optical retroreflectors in this application. the

The marks in the figure are: laser interference tracker 1, measured workpiece 2 (reference cylinder 201, reference end surface 202), hand-held movable optical retroreflector 3 (mirror 301, positioning seat 302, support rod 303, positioning body 304 , rotating body 305, rotating body 306). the

Detailed ways

Below in conjunction with accompanying drawing and embodiment the utility model is described further. the

As shown in Figure 1, the device for three-dimensional positioning of a static workpiece is a multi-channel laser interference tracking system, which consists of at least three laser interference trackers 1, and each A data processing system connected to two laser interferometers 1 respectively, and a hand-held movable optical retroreflector 3 used in conjunction with the at least three laser interferometers 1 to perform three-dimensional spatial positioning of the measured workpiece 2; wherein, The hand-held movable optical retro-reflector 3 includes a reflector 301 and a positioning device coupled with the reflector 301 and used to make the hand-held movable optical retro-reflector 3 move along a specific direction on the reference plane of the workpiece 2 to be measured. structure. Reflector 3 preferably adopts "cat's eye" reflector, but corner cube, corner cube or plane reflector etc. can also be used. the

Although the data processing system is not shown in Fig. 1, its function in the multi-channel laser interferometric tracking system is obviously known. The measurement principle of the multi-channel laser interference tracking system is also a prior art. However, the limitation of the multi-channel laser interferometric tracking system in the prior art is that it can only track and measure moving objects, and the reason has been explained in the previous part of this specification. The utility model realizes the application of multi-channel laser interference tracking technology in static workpiece measurement by providing a novel hand-held movable optical retro-reflector 3, and overcomes that the existing multi-channel laser interference tracking system cannot be used for static workpiece measurement. The technology of three-dimensional positioning in space is difficult, so the utility model has outstanding substantive features. the

Many workpieces have a step-shaped datum surface formed by the intersection of a datum cylinder and a datum end surface, such as gears, large cylinders, large cylinders, and the like. In order to perform three-dimensional workpiece positioning on such workpieces, when the reference surface of the measured workpiece 2 is a stepped structure formed by the intersection of a reference cylinder 201 and a reference end surface 202, the hand-held movable optical retro-reflector 3 The positioning structure adopts the following design, that is: the positioning structure includes a positioning body 304 for contacting the reference cylinder 201, and a positioning seat 302 arranged on the upper end of the positioning body 304 and equipped with the reflector 301, When in use, when the positioning body 304 leans against the reference cylindrical surface 201 and moves along the intersection line of the reference cylindrical surface 201 and the reference end surface 202, the lower end surface of the positioning seat 302 is kept tight to the reference end surface 202. post status. the

Wherein, when the positioning body 304 leans against the reference cylindrical surface 201 of the measured workpiece 2 and moves along the intersection line of the reference cylindrical surface 201 and the reference end surface 202, the aforementioned at least three laser interference trackers 1 pair of hand-held movable optical The reflector 3 on the retroreflector 3 performs laser tracking, and the central axis of the reference cylindrical surface 201 of the workpiece 2 under test and the reference end surface 202 of the workpiece 2 under test can be established simultaneously. As long as the intersection point of the central axis of the reference cylinder 201 and the reference end surface 202 of the workpiece 2 to be measured is defined as the coordinate center point of the workpiece coordinate system, the three-dimensional positioning of the workpiece 2 in space has been completed. It can be seen that the advantage of the above positioning structure is that the central axis of the reference cylindrical surface of the measured workpiece and the reference end surface of the measured workpiece can be established simultaneously through its movement, so the measurement efficiency is high. the

In addition, the positioning body 304 includes a support rod 303 on which the positioning seat 302 is installed at the upper end, and a rotating body 305 arranged at the lower end of the supporting rod 303. The positioning body 304 is connected to the workpiece 2 through the rotating body 305 The reference cylinder 201 is in contact with, and the rotating body 305 is arranged coaxially with the reflector 301 . the

Example 1

As shown in FIG. 4 , the positioning body 304 is provided with the positioning seat 302 on one upper end and is coaxial with the mirror 301 to form a long cylindrical structure. In use, the outer cylindrical surface of the long cylindrical structure is tangent to the reference cylindrical surface 201 of the measured workpiece 2 to perform radial positioning. Since the tangent between the outer cylindrical surface of the long cylindrical structure and the reference cylindrical surface 201 of the central hole 17 of the workpiece 2 is in most cases a straight line, the straightness error will have a certain impact on the measurement results. the

Example 2

As shown in Figure 5, the positioning body 304 includes a support rod 303 with the positioning seat 302 installed on the upper end, and a rotating body 305 arranged at the lower end of the supporting rod 303, the positioning body 304 communicates with the rotating body 305 through the The reference cylindrical surface 201 of the measured workpiece 2 is in contact, and the rotating body 305 is arranged coaxially with the reflector 3; wherein, the rotating body 305 is spherical. During measurement, the rotating body 305 is in contact with the reference cylindrical surface 201 of the workpiece 2 to be measured, so the contact point may be located at the contour peak or contour valley of the surface roughness of the reference cylindrical surface 201, so the reference cylinder of the measured workpiece 2 The surface roughness of the surface 201 will have certain influence on the measurement result. The rotating body 305, the support rod 303 and the reflector 3 are preferably coaxially arranged. the

Example 3

As shown in Figure 2, the positioning body 304 includes a support rod 303 with the positioning seat 302 installed on the upper end, and a rotating body 305 arranged at the lower end of the supporting rod 303, the positioning body 304 communicates with the rotating body 305 through the positioning body 304. The reference cylindrical surface 201 of the measured workpiece 2 is in contact, and the rotating body 305 is arranged coaxially with the reflector 301; wherein, the rotating body 305 is disc-shaped. In this way, the surface contact between the rotating body 305 and the reference cylindrical surface 201 of the workpiece 2 with a small contact area can not only avoid the influence of the straightness error on the measurement results in the first embodiment, but also avoid the influence of the second embodiment. The impact of the contact surface roughness on the measurement results. the

Example 4

The above-mentioned embodiments 1 to 3 are all aimed at the situation that the reference cylindrical surface 201 of the workpiece 2 to be measured is vertically arranged so as to be perpendicular to the reference end surface 202 of the workpiece 2 to be measured. When the included angle between the reference cylindrical surface 201 and the reference end surface 202 of the measured workpiece 2 is less than 90 degrees, the handheld movable optical retroreflector 3 shown in FIG. 6 can be used. As shown in FIG. 6 , two spherical rotating bodies 11 coaxial with the reflector 301 and spherical rotating bodies 305 and 306 are connected in series on the supporting rod 303 , and the diameter of the lower rotating body 305 is larger than that of the upper rotating body 306 . Like this, according to the size of the included angle between the reference cylindrical surface 201 and the reference end surface 202, the rotating body 305 or the rotating body 306 can be selected to contact the reference cylindrical surface 201 of the workpiece 3 to be measured. However, the hand-held movable optical retroreflector 3 also has the problem of affecting the measurement result due to the roughness of the contact surface; The rotating body 305 is in contact with the reference cylindrical surface 201 of the workpiece 2 to be measured, and the rotating body 306 is in contact with the reference cylindrical surface 201 of the workpiece 2 to be measured again, causing measurement errors. the

Example 5

As shown in FIG. 7 , the handheld movable optical retroreflector 3 changes the rotating body 305 and the rotating body 306 into disk shapes on the basis of Embodiment 4, which can avoid the influence of the roughness of the contact surface on the measurement results. However, when the same reference cylindrical surface 201 and reference end surface 202 are measured multiple times, it may occur that the rotating body 305 contacts the reference cylindrical surface 201 of the workpiece 2 once, and the rotating body 306 contacts the measured workpiece 2 again. The problem of contact with the reference cylinder 201 of the workpiece 2 causes the problem of measurement error. the

Example 6

In order to overcome the problems of Embodiment 4 and Embodiment 5, Embodiment 6 has adopted the hand-held movable optical retroreflector 3 with the same structure as Embodiment 3 but the length dimension of the support rod 303 has increased to measure the reference cylinder 201 The measured workpiece 2 when the included angle with the reference end surface 202 is less than 90 degrees. For the problem that the included angle between the reference cylinder 201 and the reference end surface 202 is different, a series of different sizes but structures such as the handheld movable optical retro-reflector 3 described in Embodiment 3 can be made, which can meet the requirements of the reference cylinder 201 and the reference end surface 202. Various angles between the end faces 202 are required. the

Claims (8)

1. be used for static workpiece is carried out the device of three-dimensional fix, this device is that a multi-path laser is interfered tracing system, it is characterized in that: the data handling system that this multi-path laser interferes tracing system to be connected respectively by at least three laser interference trackers (1), with described each laser interference tracker (1), and with described at least three laser interference trackers (1) thus be used hand-held movable optics inverse reflector (3) composition that measured workpiece (2) is carried out three-dimensional fix; Wherein, described hand-held movable optics inverse reflector (3) comprises catoptron (301) and connects and be used to make the location structure of this hand-held movable optics inverse reflector (3) in the motion of the reference field upper edge of measured workpiece (2) specific direction with described catoptron (301).

2. the device that is used for static workpiece is carried out three-dimensional fix as claimed in claim 1, it is characterized in that: when the reference field of measured workpiece (2) for by the crossing formed step-like structure of a benchmark cylinder (201) and a datum end face (202) time, the location structure of described hand-held movable optics inverse reflector (3) adopts following design, that is: this location structure comprises and being used for and described benchmark cylinder (201) contacted location body (304), and be arranged on the upper end of this location body (304) and the positioning seat (302) of described catoptron (301) is installed, be close to this benchmark cylinder (201) and during along the intersection motion of this benchmark cylinder (201) and described datum end face (202), state is close to described datum end face (202) maintenance in the lower surface of described positioning seat (302) when described location body (304) during use.

3. the device that is used for static workpiece is carried out three-dimensional fix as claimed in claim 2, it is characterized in that: described location body (304) comprises that the upper end is equipped with the support bar (303) of described positioning seat (302), and the rotary body (305) that is arranged on this support bar (303) lower end, this location body (304) contacts with the benchmark cylinder (201) of measured workpiece (2) by described rotary body (305), and this rotary body (305) and the coaxial setting of described catoptron (301).

4. the device that is used for static workpiece is carried out three-dimensional fix as claimed in claim 3 is characterized in that: described rotary body (305) is in the form of annular discs.

5. be exclusively used in the hand-held movable optics inverse reflector of said apparatus, it is characterized in that: the location structure that this hand-held movable optics inverse reflector comprises catoptron (301) and connects and be used to make this hand-held movable optics inverse reflector to move at the reference field upper edge of measured workpiece (2) specific direction with described catoptron (301).

6. hand-held movable optics inverse reflector as claimed in claim 5, it is characterized in that: when the reference field of measured workpiece (2) for by the crossing formed step-like structure of a benchmark cylinder (201) and a datum end face (202) time, the location structure of described hand-held movable optics inverse reflector (3) adopts following design, that is: this location structure comprises and being used for and described benchmark cylinder (201) contacted location body (304), and be arranged on the upper end of this location body (304) and the positioning seat (302) of described catoptron (301) is installed, when described location body (304) during against this benchmark cylinder (201) and along the intersection motion of this benchmark cylinder (201) and described datum end face (202), state is close to described datum end face (202) maintenance in the lower surface of described positioning seat (302) during use.

7. hand-held movable optics inverse reflector as claimed in claim 6, it is characterized in that: described location body (304) comprises that the upper end is equipped with the support bar (303) of described positioning seat (302), and the rotary body (305) that is arranged on this support bar (303) lower end, this location body (304) contacts with the benchmark cylinder (201) of measured workpiece (2) by described rotary body (305), and this rotary body (305) and the coaxial setting of described catoptron (301).

8. hand-held movable optics inverse reflector as claimed in claim 7, it is characterized in that: described rotary body (305) is in the form of annular discs.

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