CN104317030A - Optical device capable of achieving quick centering assistance by means of axial chromatic aberration - Google Patents
Optical device capable of achieving quick centering assistance by means of axial chromatic aberration Download PDFInfo
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- CN104317030A CN104317030A CN201410613532.2A CN201410613532A CN104317030A CN 104317030 A CN104317030 A CN 104317030A CN 201410613532 A CN201410613532 A CN 201410613532A CN 104317030 A CN104317030 A CN 104317030A
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- interval
- eyeglass
- centrescope
- measured
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention discloses an optical device capable of achieving quick centering assistance by means of axial chromatic aberration and belongs to the technical field of optical system integrated assembly. To solve the technical problem of the prior art that efficiency is quite low when calibration of the optical axis of a distance measurement instrument and the rotation axis of an integration platform is conducted with the cyclic test iteration convergence method, the optical device comprises a centering instrument detection head component, a distance measuring instrument measuring head, a lens assembly with the distance to be measured, and a high-precision air floatation rotary table, wherein the centering instrument detection head component, the distance measuring instrument measuring head and the lens assembly with the distance to be measured are arranged coaxially from top to bottom, the optical axis of the lens assembly with the distance to be measured coincides with the rotation axis of the high-precision air floatation rotary table, a centering assisting device is arranged between the centering instrument detection head component and the lens assembly with the distance to be measured, a lens assembly composed of an eccentric monitoring lens and an inclined monitoring lens in the centering assisting device is arranged on a four-dimensional adjusting frame, and the distance measuring instrument measuring head is coaxially arranged at the lower end of the lens assembly. The optical device is especially suitable for quick calibration of the optical axis of a testing instrument and the optical axis of an object lens.
Description
Technical field
The present invention relates to a kind of axial chromatic aberration that utilizes to the optical devices carrying out quick auxiliary centering when interval/thickness measuring instrument and measurand optical axis alignment, belong to the integrated mounting technology field of optical system.
Background technology
The integrated assembling of high precision transmission type optical system, must have sub-micrometer scale eyeglass interval measuring accuracy, must use contactless interference class testing instrument--interval measuring instrument, and ensure optical axis and to be measured the optical axis coincidence of interval measuring instrument.Such interval measuring instrument adopts Michelson Interference Principle, uses short-coherence light source, can realize the measuring accuracy of sub-micron.At present conventional way be by interval measuring instrument and high-precision fixed admire integrate use, interval measuring instrument is placed on below centrescope, as long as interval measuring instrument optical axis and centrescope optical axis are regulated in advance after overlapping, the calibration without the need to carrying out above-mentioned two optical axises again in whole integration testing process can complete the high precision measurement at each eyeglass interval.
The maximum measurement range of existing interval measuring instrument is optical length 600mm, and large NA transmission-type object lens, such as photoetching projection objective lens, object lens length reaches more than 1000mm, exceedes measurement range, in order to realize the interval measurement of eyeglass in whole object lens integrating process, just must interval measuring instrument be placed on above object lens, in the continuous integrating process of object lens, the measuring head of interval measuring instrument only has continuous rising, can progressively test whole object lens integrated time each eyeglass interval.In order to not hinder centrescope measuring head, centering test is carried out to eyeglass, in the integrated centering process of eyeglass, the measuring head of interval measuring instrument is needed to shift out from centrescope light path, after eyeglass centering is integrated, by auxiliary mould, the installation of the measuring head of interval measurement instrument is fixed on the eyeglass of interval to be measured again, and after the optical axis of interval measuring instrument and integrated platform rotating shaft are calibrated, just can carry out the high-acruracy survey at interval.
The main process of the calibration steps of current interval measuring instrument optical axis and integrated platform rotating shaft is as follows: be combined into optical centering device with high precision parallel flat and high-precision small, and the normal of parallel flat is regulated parallel with high-precision small optical axis, then the optical axis of calibration intervals measuring instrument optical axis and above-mentioned optical centering device, makes it consistent.Utilize centrescope measuring head move up and down the confocal image that finds bead respectively and dull and stereotyped " opal " as, departing from of above-mentioned two pictures is tested respectively by rotating centrescope, be inclination and the offset of interval measuring instrument and centrescope rotating shaft, again by four-dimensional governor motion, regulate successively and eccentric error.Because adjustment for angle of inclination can produce eccentric coupling, need repeatedly to move the center deviation that centrescope gauge head measures bead and flat reflective picture, often survey a middle imago, all need turntable to rotate and carry out a destination sample calculating in, utilize this iterative manner progressively control interval measuring instrument optical axis make it coaxial with integrated platform rotating shaft.An often integrated eyeglass, interval measuring instrument optical axis and turntable rotating shaft all need to calibrate, and this method efficiency of repeatedly testing iteration convergence is very low.Add a lot of workload and alignment time.
Summary of the invention
The present invention is the technical matters that the calibration steps in order to solve interval measuring instrument optical axis and integrated platform rotating shaft in prior art adopts the method efficiency of repeatedly testing iteration convergence very low, proposes a kind of optical devices utilizing axial chromatic aberration to carry out quick auxiliary centering.It is simple that these optical devices have structure, calibration efficiency high, is specially adapted to the quickly calibrated of testing tool optical axis and objective lens optical axis.
The scheme that the present invention solves the problems of the technologies described above is as follows:
Axial chromatic aberration is utilized to carry out the optical devices of quick auxiliary centering, comprise centrescope detecting head assembly, interval measuring instrument measuring head, interval to be measured mirror group and high precision air-float turntable, centrescope detecting head assembly, interval measuring instrument measuring head and interval to be measured mirror group are coaxially arranged from top to bottom, interval to be measured mirror group optical axis overlaps with the rotating shaft of centrescope high precision air-float turntable, it is characterized in that, between centrescope detecting head assembly and interval to be measured mirror group, auxiliary centering device is set, in auxiliary centering device, the mirror group of monitoring of eccentricity eyeglass and the monitoring eyeglass composition that tilts is arranged on four-dimensional adjustment rack, interval measuring instrument measuring head is coaxially arranged on the lower end of described mirror group.
Beneficial effect of the present invention:
The auxiliary centering optical devices that the present invention proposes, it can realize interval measuring instrument optical axis fast and treat integrated object lens optical axis calibrator, only eccentric and inclined reflection picture need be adjusted to the center good with calibration to overlap, do not need repeatedly traverse measurement head and repeatedly rotating table carry out the successive ignition of center deviation test, significantly improve centering efficiency.Owing to not needing to use high precision parallel flat, the requirement on machining accuracy therefore for monitoring eyeglass that is eccentric and that tilt in auxiliary centering optical devices also obviously reduces, and has saved frock processing and manufacturing cost.
Accompanying drawing explanation
Fig. 1 is that the present invention utilizes axial chromatic aberration to carry out the optical devices schematic diagram of quick auxiliary centering.
Fig. 2 is auxiliary centering device schematic diagram of the present invention.
Fig. 3 is the center deviation schematic diagram of centrescope Computer display.
In figure: 1, centrescope measuring head assembly, 11, the cross hair picture of white light source illumination, 12, switching light filter device, 121, infrared light optical filter, 122, green light optical filter, 13, half-reflection and half-transmission spectroscope, 14, wide spectrum response CCD, 15, collimator objective group, 16, condenser group, 2, auxiliary centering device, 21, monitoring of eccentricity eyeglass, 22, tilt monitoring eyeglass, 23, four-dimensional adjusting bracket, 231, adjustment for angle of inclination, 232, eccentric adjustable mechanism, 3, interval measuring instrument measuring head, 4, interval to be measured mirror group, 41, on show group of interval to be measured, 42, mirror group under interval to be measured, 5, high precision air-float turntable, 6, CCD monitor display.
Embodiment
As Fig. 1, shown in 2, axial chromatic aberration is utilized to carry out the optical devices of quick auxiliary centering, comprise centrescope detecting head assembly 1, interval measuring instrument measuring head 3, interval to be measured mirror group 4 and high precision air-float turntable 5, centrescope detecting head assembly 1, interval measuring instrument measuring head 3 and interval to be measured mirror group 4 are coaxially arranged from top to bottom, interval to be measured mirror group 4 optical axis overlaps with the rotating shaft of centrescope high precision air-float turntable 5, between centrescope detecting head assembly 1 and interval to be measured mirror group 4, auxiliary centering device 2 is set, the mirror group that in auxiliary centering device 2, monitoring of eccentricity eyeglass 21 and the monitoring eyeglass 22 that tilts form is arranged on four-dimensional adjustment rack 23, interval measuring instrument measuring head 3 is coaxially arranged on the lower end of described mirror group.
The optical devices of quick auxiliary centering of the present invention, it is by auxiliary centering device 2 and high-precision fixedly admire with the use of in order to complete interval to be measured mirror group 4 high precision eyeglass interval measurement.
Centrescope mainly comprises centrescope measuring head assembly 1 and high precision air-float turntable 5.
The mirror group that auxiliary centering device 2 comprises monitoring of eccentricity eyeglass 21 and the monitoring eyeglass 22 that tilts forms, and four-dimensional adjustment rack 23.Described mirror group is arranged on four-dimensional adjustment rack 23.Interval measuring instrument measuring head 3 is coaxially arranged on the lower end of described mirror group.
Monitoring of eccentricity eyeglass 21 is biconvex lens, and for detecting bias, biconvex lens upper surface 211 plates infrared light and increases anti-, green glow antireflective coating; Biconvex lens lower surface 212 plates green glow antireflective coating.The monitoring eyeglass 22 that tilts is concavees lens, and for detecting inclination, concavees lens upper surface 221 is concave surface, plating green glow antireflective coating; Concavees lens lower surface 222 is plane, and plating green glow increases anti-rete.
The high precision fixed core utilizing auxiliary centering device 2 can complete interval measuring instrument measuring head 3 and interval to be measured mirror group 4 fast adjusts, to obtain high precision mirror group interval test result.Auxiliary centering device 2 and interval measuring instrument measuring head 3 regulate coaxial in advance.Auxiliary centering device 2 is connected by screw and interval to be measured mirror group 4.
As Figure 1-3, axial chromatic aberration is utilized to realize bias and the inclination of control interval measuring instrument measuring head 3 optical axis and interval to be measured mirror group 4 optical axis respectively.Utilize centrescope to complete in interval to be measured mirror group 4 centering of mirror group 42 and interval to be measured under interval to be measured on show group 41 respectively, show that described interval to be measured mirror group 4 optical axis overlaps with the rotating shaft of high precision air-float turntable 5.
In centrescope measuring head assembly 1, the cross hair of white light source illumination only can make infrared light as 11 infrared light optical filters 121 in switching light filter device 12, infrared beam incides collimator objective group 15 through half-reflection and half-transmission spectroscope 13 and generates collimated light beam, collimated light beam produces convergent beam through condenser group 16 again, regulate the relative altitude position of centrescope measuring head assembly 1 and auxiliary centering device 2, the focus of the convergent beam produced by condenser group 16 is overlapped with the summit of the biconvex lens upper surface 211 of monitoring of eccentricity eyeglass 21 in auxiliary centering device 2 just, the reflection image calibration utilizing this summit to produce goes out the central vision position of CCD14, using the benchmark 65 regulated of feeling relieved as the present invention.Again regulate the relative altitude position of centrescope measuring head assembly 1 and auxiliary centering device 2, the focus of the convergent beam produced by condenser group 16 is overlapped with the centre of sphere of the biconvex lens upper surface 211 of monitoring of eccentricity eyeglass 21 in auxiliary centering device 2 just, namely incident beam is perpendicular to the biconvex lens upper surface 211 of monitoring of eccentricity eyeglass 21, and reflect on a surface, reflected light is successively through condenser group 16, collimator objective group 15 and half-reflecting half mirror 13, finally converge on wide spectrum response CCD14, the offset size 61 of auxiliary centering device 2 relative to centering adjustment benchmark can be shown on the display 6 by wide spectrum response CCD14, regulate the eccentric adjustable mechanism 231 of four-dimensional adjusting bracket 23, to make on display 6 display offset 61 minimum, now complete the eccentric adjusting of auxiliary centering device 2 and the rotating shaft of centrescope high precision air-float turntable 5, namely the eccentric adjusting of auxiliary centering device 2 and interval to be measured mirror group 4 optical axis is completed, also the eccentric adjusting of interval measuring instrument gauge head 3 optical axis and interval to be measured mirror group 4 optical axis is namely completed.
Optical filter is switched to green glow only can be made to pass through, the crosshair of white light source illumination only can make green light as 11 green light optical filters 122 in switching light filter device 12, green beam incides collimator objective group 15 through half-reflecting half mirror 13, convergent beam is produced again through condenser group 16, by monitoring of eccentricity eyeglass 21 in appropriate design auxiliary centering device 2 and the interval tilting to monitor eyeglass 22, make when the biconvex lens upper surface 211 of aforementioned infrared beam and monitoring of eccentricity eyeglass 21 is confocal, due to the existence of axial chromatic aberration, do not need gauge head 1 on mobile centrescope, can make green beam successively through the biconvex lens upper surface 211 of monitoring of eccentricity eyeglass 21 and the plating green glow anti-reflection film of monitoring of eccentricity eyeglass 21 biconvex lens lower surface 212, and the recessed plano lens upper surface 221 of the plating green glow anti-reflection film of the monitoring eyeglass 22 that tilts, the plating green glow finally impinging perpendicularly on monitoring eyeglass 22 increases the recessed plano lens lower surface 222 of anti-film, green glow passes through reflection on this surface, successively through the recessed plano lens upper surface 221 of the monitoring eyeglass 22 that tilts, monitoring of eccentricity eyeglass 21, condenser group 16, collimator objective group 15 and half-reflecting half mirror 13, finally converge on wide spectrum response CCD14, the size 64 of auxiliary centering device 2 tilt quantity can be shown on the display 6 by wide spectrum response CCD14, regulate the adjustment for angle of inclination 232 of four-dimensional adjusting bracket 23, make auxiliary centering device 2 tilt quantity of display on display 6 minimum, complete the tilt adjustment of auxiliary centering device 2 and the rotating shaft of centrescope high precision air-float turntable 5, namely the tilt adjustment of auxiliary centering device 2 and interval to be measured mirror group 4 optical axis is completed, namely the tilt adjustment of interval measuring instrument gauge head 3 optical axis and interval to be measured mirror group 4 optical axis is completed.
Claims (4)
1. utilize axial chromatic aberration to carry out the optical devices of quick auxiliary centering, comprise centrescope detecting head assembly (1), interval measuring instrument measuring head (3), interval mirror group (4) to be measured and high precision air-float turntable (5), centrescope detecting head assembly (1), interval measuring instrument measuring head (3) and interval mirror group (4) to be measured are coaxially arranged from top to bottom, interval to be measured mirror group (4) optical axis overlaps with the rotating shaft of centrescope high precision air-float turntable (5), it is characterized in that, between centrescope detecting head assembly (1) and interval mirror group (4) to be measured, auxiliary centering device (2) is set, the mirror group that in auxiliary centering device (2), monitoring of eccentricity eyeglass (21) and monitoring eyeglass (22) of tilting form is arranged on four-dimensional adjustment rack (23), interval measuring instrument measuring head (3) is coaxially arranged on the lower end of described mirror group.
2. the optical devices utilizing axial chromatic aberration to carry out quick auxiliary centering according to claim 1, it is characterized in that, in centrescope detecting head assembly (1), switching light filter device (12) can switch two spectral coverage optical filters, be respectively infrared band and green light band, white light source can be realized to produce infrared light and green glow respectively.
3. the optical devices utilizing axial chromatic aberration to carry out quick auxiliary centering according to claim 1, it is characterized in that, monitoring of eccentricity eyeglass (21) is biconvex lens, biconvex lens upper surface (211) plating infrared light increases anti-film and green glow anti-reflection film, biconvex lens lower surface (212) plating green glow anti-reflection film; Monitoring eyeglass (22) of tilting is recessed plano lens, and recessed plano lens upper surface (221) is concave surface, plating green glow anti-reflection film; Recessed plano lens lower surface (222) is plane, and plating green glow increases anti-film.
4. the optical devices utilizing axial chromatic aberration to carry out quick auxiliary centering according to claim 3, it is characterized in that, monitoring of eccentricity eyeglass (21) with the spaced relationship tilting to monitor eyeglass (22) is: when infrared light is measured, biconvex lens upper surface (211) the convex surface centre of sphere of monitoring of eccentricity eyeglass (21) and centrescope measuring beam confocal, do not need mobile centrescope measuring head (1) position, when switching to green glow measurement, namely realize the plane of centrescope measuring beam perpendicular to monitoring eyeglass (22) recessed plano lens lower surface (222) of tilting.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410613532.2A CN104317030B (en) | 2014-10-31 | 2014-10-31 | The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration |
| PCT/CN2015/000679 WO2016065731A1 (en) | 2014-10-31 | 2015-10-08 | Optical device for quick auxiliary centering utilizing axial chromatic aberration |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410613532.2A CN104317030B (en) | 2014-10-31 | 2014-10-31 | The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration |
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| CN104317030A true CN104317030A (en) | 2015-01-28 |
| CN104317030B CN104317030B (en) | 2017-04-05 |
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| WO (1) | WO2016065731A1 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016065731A1 (en) * | 2014-10-31 | 2016-05-06 | 中国科学院长春光学精密机械与物理研究所 | Optical device for quick auxiliary centering utilizing axial chromatic aberration |
| WO2018119730A1 (en) * | 2016-12-28 | 2018-07-05 | 中国科学院长春光学精密机械与物理研究所 | Optical integrated testing platform |
| CN108801178A (en) * | 2017-05-04 | 2018-11-13 | 北京理工大学 | Differential confocal auto-collimation center is partially and curvature radius measurement method and device |
| CN111077627A (en) * | 2019-12-27 | 2020-04-28 | 焦作天裕精密光学有限公司 | Rapid centering gluing device and method for micro lens |
| CN112697054A (en) * | 2020-12-10 | 2021-04-23 | 无锡鑫巨宏智能科技有限公司 | Microlens rise measuring device and method |
| CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
| CN114199730A (en) * | 2022-02-15 | 2022-03-18 | 中国科学院大气物理研究所 | Airtight packaging type multidirectional adjusting structure for laser calibration |
| TWI777876B (en) * | 2021-12-21 | 2022-09-11 | 亞泰影像科技股份有限公司 | Lens centering module and its centering method, scanning device |
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| CN109916344A (en) * | 2019-04-08 | 2019-06-21 | 天津中精微仪器设备有限公司 | Air-flotation type link rod measuring appliance |
| CN110561540B (en) * | 2019-08-23 | 2024-04-05 | 中国科学院西安光学精密机械研究所 | Adjusting device for optical centering instrument |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2016065731A1 (en) * | 2014-10-31 | 2016-05-06 | 中国科学院长春光学精密机械与物理研究所 | Optical device for quick auxiliary centering utilizing axial chromatic aberration |
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| CN108801178A (en) * | 2017-05-04 | 2018-11-13 | 北京理工大学 | Differential confocal auto-collimation center is partially and curvature radius measurement method and device |
| CN111077627A (en) * | 2019-12-27 | 2020-04-28 | 焦作天裕精密光学有限公司 | Rapid centering gluing device and method for micro lens |
| CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
| CN112697054A (en) * | 2020-12-10 | 2021-04-23 | 无锡鑫巨宏智能科技有限公司 | Microlens rise measuring device and method |
| TWI777876B (en) * | 2021-12-21 | 2022-09-11 | 亞泰影像科技股份有限公司 | Lens centering module and its centering method, scanning device |
| CN114199730A (en) * | 2022-02-15 | 2022-03-18 | 中国科学院大气物理研究所 | Airtight packaging type multidirectional adjusting structure for laser calibration |
| CN114199730B (en) * | 2022-02-15 | 2022-05-27 | 中国科学院大气物理研究所 | Airtight packaging type multidirectional adjusting structure for laser calibration |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104317030B (en) | 2017-04-05 |
| WO2016065731A1 (en) | 2016-05-06 |
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