WO2018119730A1

WO2018119730A1 - Optical integrated testing platform

Info

Publication number: WO2018119730A1
Application number: PCT/CN2016/112582
Authority: WO
Inventors: 华洋洋; 倪明阳; 孙振; 李显凌; 杨怀江; 隋永新
Original assignee: 中国科学院长春光学精密机械与物理研究所
Priority date: 2016-12-28
Filing date: 2016-12-28
Publication date: 2018-07-05

Abstract

An optical integrated testing platform, comprising: a platform body frame used for supporting other components; a testing system used for testing an optical element or a mechanical element; an adjusting system used for adjusting the position of the optical element or the mechanical element on the basis of the testing; and an assembly system used for assembling the optical element or the mechanical element. The highly integrated and multifunctional optical integrated testing platform implements multiple measurements, adjustments and assemblies on one platform.

Description

Optical integrated inspection platform

Technical field

The invention relates to the field of optical devices, and in particular to an optical integrated detection platform, which can be used for detecting or integrating optical components, mirrors and lenses.

Background technique

The requirements for integrated assembly of optical equipment are complex and diverse, mainly reflecting the differences in integration accuracy and integration efficiency. With the continuous development and maturity of handheld optical devices in the commercial field, especially for camera phones and cameras, the precision of assembly and integration of optical components is not high, but the requirements for integration efficiency are high, which requires an integration. An integrated platform with a high degree of automation and automation.

With the continuous advancement of feature line width of integrated circuits and the continuous improvement of lithographic projection equipment nodes, the resolution of lithographic projection objectives, which is the core equipment required for the manufacture of very large scale integrated circuits, is also increasing, so the opticals of objective lenses The system also puts higher requirements on the integration precision and integration efficiency of each mirror group.

In the field of high-end lithographic projection objective assembly, higher mirror integration accuracy can improve the imaging quality of the lithographic projection objective integrated optical system, and also reduce the adjustment of the adjustment device for optical system optical performance compensation, reducing Adjust the design and processing difficulty of the device. The main objective of the optical lens assembly and lens assembly of the lithographic projection objective is to ensure the perpendicularity of the optical axis of the inner lens and the reference surface of the outer frame, thereby ensuring the coaxiality of the optical axis of the entire objective lens with the optical lens. A lithographic projection objective is generally composed of a plurality of sets of mirror segments and a lens barrel. Therefore, a highly integrated and versatile mirror integrated detection platform plays a decisive role in the integration efficiency of the objective lens.

In addition, in order to meet the requirements of different assembly precision and efficiency and the special assembly requirements of optical components, mirrors, and lens integration detection conditions, the integrated inspection platform needs to meet the customization requirements. Through the reasonable configuration of the integrated detection platform, To meet the individual needs of different working conditions.

Summary of the invention

In view of the above technical problems, in order to overcome the deficiencies of the above prior art, the present invention proposes an optical integrated detection platform.

According to an aspect of the present invention, an optical integrated detection platform is provided, comprising: a platform main body frame for supporting other components; and a detection system for feeding optical components or mechanical components Line detection; an adjustment system for positional adjustment of the optical or mechanical element based on the detection; and an assembly system for assembly of the optical element and/or mechanical element.

Preferably, the platform main body frame comprises: a base; and a rotary table disposed on the base and rotatable relative to the base about a rotation axis passing through the center of the rotary table.

Preferably, the detection system comprises a detachable: eccentricity detecting unit coaxial with the rotating table for eccentricity detection of the optical element; a thickness and interval detecting unit coaxial with the rotating table for detecting Thickness and spacing of optical components; mechanical contact detection units for rapid detection of optical or mechanical components; and/or mechanical non-contact detection units for fine inspection of optical or mechanical components.

Preferably, the platform main body frame further includes: a guide rail column disposed on the base, including a first rail and a second rail parallel to the rotating shaft; and a bracket, the first end being coupled by the first rail And the belt rail column, the second end portion is located above the rotation center of the rotating table; and the lifting platform is coupled to the belt rail column by a second rail parallel to the rotating shaft on the rail column, the eccentricity a detecting unit disposed at a second end of the bracket, the thickness and interval detecting unit being disposed at a lower portion of the base, wherein the mechanical contact detecting unit and the mechanical non-contact detecting unit are disposed on the lifting platform on.

Preferably, the eccentricity detecting unit includes a sensor, a light source, a collimator lens group, and a zoom lens which are disposed in close proximity to the turntable.

Preferably, the thickness and interval detecting unit comprises: a mechanical clamping mechanism disposed at a lower portion of the base; and a third rail disposed on an inner wall of the mechanical clamping mechanism in a direction parallel to the rotating shaft; The positioning sensor is coupled to the third rail and the mechanical clamping mechanism, and the base and the rotating table are respectively provided with a first through hole and a second through hole, and the detection light path of the thickness and interval detecting unit is also ensured. The first through hole and the second through hole are coaxial with the rotating table.

Preferably, the mechanical contact detecting unit comprises a contact probe, a universal joint and a probe base, and the contact probe comprises an inductive probe, an LVDT linear displacement sensor probe or a dial indicator.

Preferably, the mechanical non-contact detecting unit comprises a non-contact probe, a probe rail and a probe mechanical base, the non-contact probe is disposed at a center of rotation of the rotary table, and is set along a rotation center of the rotary table The probe rail moves away from or near the center of rotation.

Preferably, the adjustment system is disposed on the rotating table, including: an eccentric adjustment mechanism, For eccentric adjustment of optical or mechanical components; tilt adjustment mechanism for tilt adjustment of optical components or mechanical components; and optical component support mechanism for supporting optical components.

Preferably, the eccentric adjustment mechanism comprises: an eccentric adjustment substrate disposed on the tilt adjustment mechanism; and an upper eccentric drive unit and/or a lower eccentric drive unit disposed on the eccentric adjustment substrate, for optical elements and/or The mechanical components are eccentrically adjusted.

Preferably, the upper eccentric drive unit and the lower eccentric drive unit each include: at least one radial displacement drive, and at least one drive post supporting the radial displacement drive, the at least one radial displacement drive being uniform along the circumference Interval distribution.

Preferably, the tilt adjustment mechanism comprises: a tilt adjustment substrate disposed on the rotary table; at least one ball and socket mating unit disposed on the tilt adjustment substrate and supporting the eccentric adjustment mechanism; and at least one tilt adjustment drive The unit is disposed on the corresponding ball and socket mating unit, including a radial displacement drive and an output reversing mechanism.

Preferably, the optical element supporting mechanism includes: an optical element lifting unit disposed on the tilt adjusting substrate for lifting and lowering in a rotation axis direction; and an optical element supporting unit disposed on the optical element lifting unit for supporting An optical element, the eccentric adjustment substrate is provided with a third through hole for avoiding interference with the optical element lifting unit and the optical element supporting unit, and the tilt adjusting substrate, the optical element supporting unit and the optical element lifting unit are both provided The through hole of the coaxial axis of the rotating shaft ensures the detection optical path of the interval detecting unit.

Preferably, the assembly system comprises a detachable component pick-and-place unit for picking and placing optical components and/or mechanical components; a glue injection and curing unit for injection molding and curing of the mirror assembly; a position marking unit, Used to provide an orientation reference and to positional relationships between component components; and/or a cleaning unit for obtaining a clean integrated inspection environment.

Preferably, the component pick-and-place unit is disposed on the base, and includes: a mechanical component pick-and-place tool, which is mechanically clamped to pick up and place the mechanical component; the optical component pick-and-place tool is mechanically clamped or vacuum-adsorbed. The optical component is taken and placed; and the mechanical arm is taken and supported to support the mechanical component pick-and-place tool and the optical component pick-and-place tool.

Preferably, the glue injection and curing unit is disposed on the lifting platform, and comprises: a glue pen for forming a point, line or surface structural adhesive form under pressure control; and a glue injection controller , the lower surface of the lifting platform is arranged to control the plastic pen; and the curing lamp is used for curing the glued optical component.

Preferably, the position marking unit is disposed on the lifting platform, comprising: a marking laser having an outgoing light aligned with the rotating shaft; and a support frame supporting the marking laser.

Preferably, the cleaning unit comprises: a cleaning tip disposed on a lower surface of the lifting platform to remove foreign matter by adsorption or blowing; and a cleaning controller disposed on the side wall of the abutment Clean the tip for control.

Preferably, the platform main body frame further comprises: a support leg for supporting the base, the support leg comprises: a mechanical leg for supporting, and a vibration isolator disposed on the mechanical leg and the base Between, used to shield vibration interference.

It can be seen from the above technical solutions that the present invention has the following beneficial effects:

(1) The integrated detection platform includes detection system and adjustment system, which realizes various measurement and adjustment of optical components or mechanical parts on the same platform. The highly integrated and versatile optical integrated detection platform enables various measurement and adjustment. Completed on one platform;

(2) The detection system includes an optical detecting mechanism and a mechanical detecting mechanism for performing eccentricity and thickness and interval measurement of the optical component, and measuring the position and flatness of the mechanical component;

(3) Adjusting the eccentricity adjustment mechanism and the tilt adjustment mechanism of the system to realize the adjustment of the eccentricity and tilt of the component to ensure the relative positional relationship among the multiple components;

(4) The assembly system realizes multiple functions such as safe pick-and-place, glue injection and curing, position marking and environmental cleaning to ensure the safe, clean and orderly process of the assembly process.

DRAWINGS

1 is a schematic structural diagram of an optical integrated detection platform according to an embodiment of the present invention;

2 is a schematic structural view of the detection system of FIG. 1;

Figure 3 is a schematic structural view of the adjustment system of Figure 1;

Figure 4 is a plan view of the double eccentric drive unit of Figure 3;

Figure 5 is a schematic view showing the structure distribution of the assembly system of Figure 1;

6 is a schematic view showing the assembly of the optical integrated detection platform of FIG. 1 applied to a cemented mirror;

7 is a schematic diagram of the wedge angle measurement applied to the aspherical lens by the optical integrated detection platform of FIG. 1;

Figure 8 is a schematic view of the assembly of the optical integrated detection platform applied to the lens in Figure 1.

detailed description

Certain embodiments of the invention will be described more fully hereinafter with reference to the accompanying drawings, in which Some but not all of the embodiments will be shown. In fact, the various embodiments of the invention can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

The present invention will be further described in detail below with reference to the specific embodiments of the invention.

The invention aims to improve the integration efficiency and integration precision of the optical component, the lens group, the lens, etc., reduce the integration cost, and save the integration space. The optical integrated detection platform of the invention can be applied to different assembly precisions and efficiencies as well as special assembly requirements. The component to be assembled, the component to be tested and the component to be modulated which are involved in the invention may be optical components and/or mechanical components.

The structure and function of the optical integrated detection platform provided by the embodiment of the present invention are described in detail below with reference to the accompanying drawings.

FIG. 1 is a schematic structural diagram of an optical integrated detection platform according to an embodiment of the present invention. As shown in FIG. 1 , the optical integrated detection platform 100 mainly includes a platform main body frame 30 , a detection system 10 , an adjustment system 20 , and an assembly system 40 .

The platform main body frame 30 is configured to support other components in the platform optical integrated detection platform 100, including: a base 33, a support leg 34, a rotary table 35, a guide rail column 31, a lifting platform 32, and a bracket 36.

Referring to Figure 1, the base 33 is horizontally disposed, and the support legs 34 are used to support the base 33 to load all of the weight on the integrated inspection platform 100. Wherein, the support leg 34 includes two parts of the vibration isolator 341 and the mechanical leg 342. Mechanical legs 342 are used to support. The vibration isolator 341 is for shielding vibration interference, and the vibration isolator 341 may include an active vibration isolator and/or a passive vibration isolator or the like.

The rotary table 35 is disposed on the base 33. The rotary table 35 is rotatable relative to the base 33 about its center of rotation, providing rotation for detecting and integrating components, and is divided into two rotation modes, fast and slow, in the operation mode. They are used for fast coarse coarse adjustment and slow fine fine adjustment for the components to be assembled. The axis of rotation of the rotary table 35 is an eccentric reference of the integrated detection platform 100. The rotating table 35 is arranged in a hollow structure, and the detecting light of the detecting system 10 is facilitated to detect the optical component through the rotating table. The rotating table 35 can be a mechanical rotating table, an air floating type rotating table, a magnetic floating type rotating table, and a static pressure type rotating table. In various forms, the rotary table 35 preferably employs an air floating rotary table.

The guide rail column 31 is disposed at the end of the base 33, is disposed perpendicular to the base 33, and is provided with two guide rails, respectively a first guide rail 311 and a second guide rail 312, and the first guide rail 311 is a bracket 36. The support and the large stroke axial displacement guide drive are provided, and the second guide rail 312 provides support for the lift table 32 and axial displacement guide drive for relatively small strokes.

The lifting platform 32 is configured to drive the assembly of the supporting device to move up and down along the axial direction of the platform, and the first end portion thereof is coupled to the belt rail column 31 through the second rail 312, and is parallel with the base platform 33, and is always in a horizontal state, lifting The table 32 is configured as a hollow frame structure that does not interfere with the adjustment system 20 and optical and mechanical components during axial operation along the second rail 312 with the rail uprights 31.

The bracket 36 is configured to drive the assembly of the support thereof to move up and down along the axial direction of the platform, and the first end portion thereof is coupled to the belt rail 33 by the first rail 311, which is parallel to the base 33 and is always in a horizontal state. The two end portions are located directly above the center of rotation of the rotary table 35.

As shown in FIG. 2, the detection system 10 is used to implement a variety of detections, including an eccentricity detection unit 11, a thickness and spacing detection unit 12, a mechanical contact detection unit 13, and/or a mechanical non-contact detection unit 14.

The eccentricity detecting unit 11 is disposed at the second end of the bracket 36. The detecting center is coaxial with the center of rotation of the rotating table 35, and can be moved up and down in the vertical direction by the support 36. The eccentricity detecting unit 11 includes: The sensors, the light source 111, the collimator group 112, and the zoom lens 113, which are sequentially disposed, collect light by reflection of the optical lens and are received by the sensor to determine the amount of eccentricity of the optical lens.

The thickness and interval detecting unit 12 is disposed at a lower portion of the center of the base 33. The detecting center is coaxial with the center of rotation of the rotating table 35, and includes: a positioning sensor 121, a third rail 122, and a mechanical clamping mechanism 123. The third rail 122 is disposed on the machine. On the inner wall of the clamping mechanism 123, the positioning sensor 121 is coupled to the mechanical clamping mechanism 123 by the third rail 122, and is movable up and down along the third rail 122 in the vertical direction to adjust the working height for detecting the center of the optical component. Thickness and spacing of adjacent optical components. The base 33 and the rotary table 35 are both hollow structures, and through

holes

331 and 351 are respectively provided at the center, allowing the detection light of the thickness and interval detecting unit 12 to pass, and the through holes 331 and the through holes 351 and the rotation center of the rotary table 35 Coaxial.

The mechanical contact detecting unit 13 is mounted on the lifting platform 32 and includes a contact probe 131, a universal joint 132 and a probe base 133. The contact type probe 131 includes: an inductive probe, an LVDT linear displacement sensor probe or a dial indicator, etc., which is in contact with the mechanical component to be tested, and the measurement is completed by the rapid rotation mode of the rotary table 35, and the mechanical contact type detecting unit 13 Low measurement accuracy, used for fast measurement of components to be tested, can be quickly adjusted according to the measurement results, and quickly determine the elements to be tested The amount of adjustment of the component enables the component to enter the non-contact detection process with high detection accuracy through rapid detection and rapid adjustment.

The mechanical non-contact detecting unit 14 includes a non-contact measuring head 141, a probe rail 142 and a probe mechanical base 143 mounted on the lifting platform 32, and the non-contact measuring head 141 is directed to the rotation center of the rotating table 35, and The probe rail 142 disposed along the center of rotation of the rotating table 35 moves away from or near the center of rotation, and the azimuth arrangement can be mounted on the X-axis or the Y-axis of the platform coordinates, so as to obtain the adjusted orientation vector of the component to be tested, mechanical non-contact The type detecting unit 14 performs precise measurement through the slow rotation mode of the rotary table 35, and precisely adjusts the mechanical component to be measured according to the measured adjusted orientation vector, thereby ensuring that the mechanical component is in an ideal position for adjustment. In addition, the mechanical non-contact detecting unit 14 aligns the mechanical reference surface to be tested on the upper side of the mechanical component, generates measurement data by using the rotation of the rotating table 35, and fits the flatness curve for completing the evaluation of the flatness of the mechanical component to be tested. In addition, the mechanical non-contact detecting unit 14 can also be used for wedge angle detection of an aspherical optical lens, contour detection of an optical element, and the like.

The adjustment system 20 is disposed on the rotary table 35 for eccentricity and tilt adjustment of the optical and mechanical components in conjunction with the detection system 10, so that the components to be adjusted meet the assembly requirements, thereby meeting the assembly index requirements.

As shown in FIG. 3, the adjustment system 20 includes an eccentric adjustment mechanism 21, a tilt adjustment mechanism 22, and an optical element support mechanism 23.

The eccentric adjustment mechanism 21 includes an eccentric adjustment substrate 211, an upper eccentric drive unit 212, and a lower eccentric drive unit 213. The eccentricity adjusting substrate 211 is a hollow substrate, and a through hole 2111 is provided in the center, and the optical element supporting mechanism 23 supports the optical element, for example, the lens L for assembly, through the through hole. The eccentric adjustment substrate 211 is also used to support a mechanical component, such as a frame F for assembly, etc., and the upper eccentric drive unit 212 and the lower eccentric drive unit 213 are disposed on the eccentric adjustment substrate 211, and respectively adjust the optical component and the mechanical component through the radial displacement output. The resulting eccentric movement pushes the component to be adjusted to the desired assembly position.

As shown in FIGS. 3 and 4, the upper eccentric drive unit 212 and the lower eccentric drive unit 213 constitute a double eccentric drive unit, and the upper eccentric drive unit 212 and the lower eccentric drive unit 213 each include three

radial displacement drivers

2121, 2131 and

Corresponding driver posts

2122, 2132, such as differential heads, linear motor drivers, servo motor drivers, voice coil motor drivers, piezoelectric actuators, etc., for the upper eccentric drive unit 212 or the lower eccentric drive unit 213 The three

drivers

2121, 2131 are evenly spaced at intervals of 120° in the circumferential direction, and the output end of each driver 2121 is directed to the center of rotation of the platform rotating table 35, and the

drivers

2121, 2131 are mounted on the

driver columns

2122, 2132. The height of the displacement output can be adjusted in the vertical axial direction according to the axial position of the component to be adjusted, and the upper and lower

radial displacement drivers

2121, 2131 have a phase difference of 60 in the circumferential direction.

Referring to FIG. 3, the tilt adjustment mechanism 22 includes a tilt adjustment substrate 221, a tilt adjustment drive unit 222, and a ball and socket mating unit 223. The ball and socket mating unit 223 is disposed on the tilt adjustment substrate 221, and the number is three in this embodiment. And for supporting the eccentric adjustment substrate 211, the number of the tilt adjustment driving unit 222 is consistent with the ball and socket matching unit 223, and is disposed on the ball and socket matching unit 223, including a radial displacement driver and an output reversing mechanism, and the radial displacement output is in the ball. With the cooperation of the socket matching unit 223, the output reversing mechanism is converted into an axial displacement output, and the adjustment of the tilting posture of the mechanical component to be adjusted is completed.

In other embodiments of the present invention, the number of drivers in the upper eccentric drive unit 212 and the lower eccentric drive unit 213 is not limited to three, and the number of the tilt adjustment drive unit 222 and the ball and socket matching unit 223 is not limited to three, and may be Multiple, for example, 4 or 5, etc.

The optical element supporting mechanism 23 includes: an optical element supporting unit 231 and an optical element lifting unit 232 for protecting the optical element to be assembled or to be detected, and the supporting position selecting the optical element outside the light passing diameter To avoid scratching or contaminating the effective aperture of the optical element, the optical element supporting unit 231 provides rotation of the lens relative to the frame while supporting the lens, ensuring the relative position of the optical element and the mechanical element.

The optical element lifting unit 232 is disposed on the base tilt adjusting substrate 221, and the optical element supporting unit 231 is mounted on the column rail of the optical element lifting unit 232, and is electrically or manually driven by the optical element lifting unit 232 to provide axial displacement of the optical element. Cooperate with the lifting process of the optical components required to complete the assembly process.

The tilt adjustment substrate 221, the optical element supporting unit 231, and the optical element lifting unit 232 adopt a through hole designed to be coaxial with the rotating shaft of the rotating table 35 or other design to avoid the rotating shaft, and ensure the detection light of the thickness and interval detecting unit 12 is reached. The optical component completes the test.

In the present embodiment, the assembly system 40 is used to implement a plurality of auxiliary functions, as shown in FIG. 5, including: a component pick-and-place unit 41, a dispensing and curing unit 42, a position marking unit 43, and/or a cleaning unit 44.

Wherein, the component pick-and-place unit 41 is disposed on the base 33 to ensure safe access of the optical component and the mechanical component during the detecting and assembling process, including: the mechanical component pick-and-place tool 411, the optical component pick-and-place tool 412, and the pick-and-place arm 413, used to replace the human safety to smoothly pick and place optical components or mechanical components. The mechanical pick-and-place tooling 411 is used for picking up and placing mechanical components, such as a picture frame, etc., on which a mechanical clip is placed to facilitate holding the frame. The optical component pick-and-place tool 412 is used for picking up and placing optical components, and the optical components are fastened by vacuum suction or mechanical clamping. The pick-and-place robot arm 413 is a support mechanism of the component pick-and-place unit 41, and is provided with a rotating joint in the middle, which can be freely rotated and locked, and is internally provided with a metal wire and a gas path to provide pulling and attracting force for optical and mechanical components.

The glue injection and curing unit 42 is disposed on the lifting platform 32 for the injection molding and curing process of the mirror assembly, including the curing lamp 421, the glue pen 422 and the glue injection controller 423, and the curing lamp 421 is used for the structural glue. Uniform curing, curing lamp includes UV curing lamp and heating curing lamp, etc. The ultraviolet curing lamp provides the ultraviolet light required for curing of the photosensitive adhesive, and the heating curing lamp provides the energy required for curing the thermal adhesive; Under the pressure control, the glue is formed into a shape, a line shape or a surface shape with different structural adhesive forms; the glue injection controller 423 performs air pressure and glue injection according to the physical characteristics of the selected structural glue, the type of the glue pen and the amount of glue discharged. The glue injection controller 423 can be mounted on the lower side of the lifting platform 32 by parameter setting such as time.

The position marking unit 43 is disposed on the lifting platform 32, including a marking laser 431 and a support frame 432 supporting the marking laser 431, providing an orientation reference for the assembly and marking the positional relationship between the plurality of elements, such as the relative relationship between the optical element and the mechanical element. The angle or the calibration of the relative positional relationship between the sets of mirror groups, etc., the outgoing rays are aligned with the center of rotation of the rotary table 35.

The cleaning unit 44 is used for integrating the detection platform and the cleaning of the components to be assembled, and ensuring the environmental quality of the inspection and assembly, including: cleaning the suction head 441 and the cleaning controller 442, and controlling the cleaning of the cleaning nozzle 441 by the cleaning controller 442. The foreign matter such as particles ensures the cleanliness level required for assembly. The cleaning controller 442 is mounted on the side of the base 33 for convenient control. The cleaning controller 442 includes a switch button and an adsorption force adjustment knob to provide different adsorption forces for different foreign objects, and the cleaning tip is cleaned. The 441 is mounted on the lower side of the lifting platform 32 for easy operation.

In other embodiments of the present invention, the cleaning unit 44 may also replace the manner of adsorbing foreign matter in the present embodiment by means of injecting gas to remove foreign matter.

In the above embodiments, the above components are not essential, and the components having independent functions may be detachably integrated on the optical integrated detection platform 100, for example, thickness and interval inspection. The measuring unit 12, the optical element supporting mechanism 23, the component pick-and-place unit 41, the dispensing and curing unit 42, the position marking unit 43, and the like are all detachably integrated on the optical integrated detecting platform 100, when the corresponding functions are not required. When you can remove the corresponding components.

The highly integrated and versatile optical integrated inspection platform enables multiple processes such as inspection and integration to be completed on one platform, improving assembly efficiency, saving integration space and reducing integration costs. In addition, the platform can be combined by selecting components of different forms or precisions to form an integrated detection platform that meets different precision requirements. It is suitable for integrated detection of optical components of other devices, and is also suitable for integration of glue mirrors composed of multiple lenses. For detection, for example, for different precision detection needs, the eccentricity detecting unit 11, the thickness and interval detecting unit 12 may select components of different precisions.

Several specific application examples of the optical integrated detection platform 100 in the embodiment of the present invention are described below:

First application example

This application example is an optical integrated detection platform 100 applied to an optical lens assembly integrated assembly in a lithographic projection objective.

In this application example, the precision of the mirror integrated detection platform required for the integrated assembly of the optical lens assembly in the lithographic projection objective lens is extremely high. For the high precision mirror integrated platform, the detection system 10 adopts an eccentricity detecting unit with a measurement accuracy of 0.1 to 1 μm. 11 and a thickness and interval detecting unit 12 having a measuring accuracy of ±0.5 to ±2 μm, the mechanical contact detecting unit 13 adopts an inductive lever table having a measuring accuracy of 0.5 to 5 μm, and the mechanical non-contact detecting unit 14 adopts a color difference of a measuring accuracy of 20 nm to 2 μm. Motion detector. The upper eccentric drive unit 212, the lower eccentric drive unit 213, and the tilt adjustment drive unit 222 in the adjustment system 20 are driven and adjusted by a manual differential head having a resolution of 0.5-2 μm or a higher resolution piezoelectric actuator; The air-floating guide rail is adopted, and the axial position is measured in real time by using a high-precision linear scale; the base material with the guide rail 31 and the base 33 is made of a marble material with stable comprehensive performance; the support leg 34 adopts an active vibration isolation level. Type vibration isolator; the rotary table 35 adopts an air floating turntable, and uses a high-precision angle grating to measure the rotary table information such as angle and speed in real time.

Second application example

This application example is an optical integrated detection platform 100 applied to an integrated assembly of ordinary optical mirrors.

In this application example, when the integrated detection accuracy of the mobile phone lens, the camera lens, and the like is not high, the relationship between the accuracy requirement, the efficiency, and the cost is comprehensively considered, and the integrated detection platform 100 is configured reasonably. For example, the detection system 10 employs an eccentricity detecting unit 11 having a relatively low measurement accuracy. And the interval detecting unit 12 can simply use the mechanical contact detecting unit 13; the upper eccentric driving unit 212, the lower eccentric driving unit 213, and the tilt adjusting driving unit 222 in the adjusting system 20 adopt a low resolution manual differential head or a common The motor drive mechanism is driven and adjusted; the guide rails for the guide rails 31 are guided and driven by a mechanical mechanism such as a linear guide and a ball screw; and the guide rails 31 and the base 33 can be made of cast iron or aluminum profiles; The support leg 34 can be directly supported by a passive vibration isolator with a low vibration isolation level or without vibration isolation; the rotary table 35 uses an ordinary mechanical turntable and a lower precision angular scale to measure the angle and speed.

Third application example

This application example is an assembly of an optical integrated inspection platform 100 for a glue mirror.

As shown in FIG. 6, in the application example, the optical axes of two or more optical lenses are detected and adjusted so that the optical axes of all the lenses are coaxial, and the relative angle between the optical axes of the lenses meets the assembly index requirements. In the setting of the integrated detection platform, the optical axis of each lens is mainly detected by the eccentricity detecting unit 11, and each of the to-be-adjusted lenses is respectively adjusted to be coaxial with the rotation center of the rotary table 35 by the eccentric adjustment mechanism 21, and is taken by the component. The discharge unit 41 and the glue injection and curing unit 42 cooperate to complete the injection and solidification steps between the lenses.

Fourth application example

This application example is an optical integrated detection platform 100 applied to the wedge angle measurement of an aspherical lens.

As shown in Fig. 7, in this application example, the wedge angle measurement of the aspherical lens measures the degree of deviation between the aspherical rotationally symmetric profile of the processed lens and the optical axis of the lens itself. The optical axis of the lens is detected by the eccentricity detecting unit 11, and the lens is eccentrically and tilted by the adjustment system 20, except that for the detection of a single lens, the eccentric drive unit only needs to be arranged in a single layer, three drivers It is evenly distributed at intervals of 120° in the circumferential direction. After the optical axis of the lens is adjusted, the aspherical lens is scanned by the mechanical non-contact detecting unit 14 under the cooperation of the rotating table 35, thereby completing the wedge angle measurement of the aspherical lens. The above approach is equally applicable to lens profile measurement needs.

Fifth application example

This application example is an optical integrated detection platform 100 applied to the assembly of a lens.

As shown in FIG. 8, in this application example, a plurality of mirror groups are assembled, and the relative eccentric position between the mirror groups, the relative angular position adjustment, and the measurement of the lens spacing in the plurality of mirror groups are completed. Eccentric Under the measurement of the detecting unit 11, the lowermost first stage mirror is leveled by the adjustment system 20 and the optical axis of the mirror is adjusted to the rotation center of the rotary table 35, and the second stage lens is placed in the first stage mirror. Above the group, the optical axis of the second stage lens set is adjusted to the center of rotation by the eccentric adjustment mechanism 21, and is coaxial with the optical axis of the first stage lens group. Under the direction of the position marking unit 43, the relative angle adjustment between the two stages of mirrors is completed. The thickness of the lens groups of the two mirror groups and the separation distance between the two lenses are measured by the thickness and interval detecting unit 12, and so on, so that the assembly of the entire lens under the integrated inspection platform is achieved.

Heretofore, various embodiments of the present invention have been described in detail in conjunction with the drawings. Based on the above description, those skilled in the art should have a clear understanding of the optical integrated detection platform of the present invention.

It should be noted that the shapes and sizes of the various components in the drawings do not reflect the true size and proportions, but merely illustrate the contents of the embodiments of the present invention.

The directional terms mentioned in the embodiments, such as "upper", "lower", "front", "back", "left", "right", etc., are merely referring to the directions of the drawings, and are not intended to limit the invention. protected range. The above embodiments may be used in combination with other embodiments or based on design and reliability considerations, that is, the technical features in different embodiments may be freely combined to form more embodiments.

It should be noted that the implementations that are not shown or described in the drawings or the text of the specification are all known to those of ordinary skill in the art and are not described in detail. In addition, the above definitions of the various elements and methods are not limited to the specific structures, shapes or manners mentioned in the embodiments, and those skilled in the art can simply modify or replace them.

The specific embodiments of the present invention have been described in detail in the foregoing detailed description of the embodiments of the present invention. All modifications, equivalents, improvements, etc., made within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims

An optical integrated detection platform (100), comprising:

a platform body frame (30) for supporting other components;

a detection system (10) for detecting an optical component or a mechanical component;

An adjustment system (20) for positionally adjusting the optical or mechanical component based on the detecting;

Assembly system (40) for assembly of optical components and/or mechanical components.
The optical integrated inspection platform of claim 1 wherein said platform body frame (30) comprises:

Abutment (33);

The rotary table (35) is disposed on the base (33) and is rotatable relative to the base (33) about a rotation axis passing through the center of the rotary table (35).
The optical integrated inspection platform of claim 2 wherein said detection system (10) comprises a detachable:

An eccentricity detecting unit (11) coaxial with the rotating table (35) for performing eccentricity detection on the optical component;

a thickness and interval detecting unit (12) coaxial with the rotating table (35) for detecting the thickness and spacing of the optical element;

Mechanical contact detection unit (13) for rapid detection of optical or mechanical components; and/or

A mechanical non-contact detection unit (14) for fine inspection of optical or mechanical components.
The optical integrated detection platform of claim 3, wherein the platform body frame (30) further comprises:

a guide rail (31), disposed on the base (33), comprising a first rail and a second rail parallel to the rotating shaft;

a bracket (36), the first end portion is coupled to the belt rail column (31) through the first rail, and the second end portion is located above a rotation center of the rotating table (35);

a lifting platform (32) passing through a second rail parallel to the rotating shaft on the rail column (31) (312) coupled to the rail-mounted column (31),

The eccentricity detecting unit (11) is disposed at a second end of the bracket (36), and the thickness and interval detecting unit (12) is disposed at a lower portion of the base (33), the mechanical contact detecting unit (13) and the mechanical non-contact detecting unit (14) are disposed on the lifting platform (32).
The optical integrated detection platform according to claim 4, wherein

The eccentricity detecting unit (11) includes a sensor, a light source (111), a collimator lens group (112), and a zoom lens (113) which are disposed in close proximity to the rotary table (35).
The optical integrated detection platform according to claim 4, wherein said thickness and interval detecting unit (12) comprises:

a mechanical clamping mechanism (123) disposed at a lower portion of the base (33);

a third rail (122) disposed on an inner wall of the mechanical clamping mechanism (123) in a direction parallel to the rotation axis;

a positioning sensor (121) coupled to the third rail (122) and the mechanical clamping mechanism (123),

The base (33) and the rotating table (35) are respectively provided with a first through hole (331) and a second through hole (351), and the detection light path of the thickness and interval detecting unit (12) is also ensured. The first through hole (331) and the second through hole (351) are coaxial with the rotating table (35).
The optical integrated detection platform according to claim 4, wherein said mechanical contact detecting unit (13) comprises a contact type probe (131), a universal joint (132), and a probe base (133), said contact The probe (131) includes an inductive probe, an LVDT linear displacement sensor probe or a dial indicator.
The optical integrated detection platform according to claim 4, wherein said mechanical non-contact detecting unit (14) comprises a non-contact probe (141), a probe rail (142) and a probe mechanical base (143). The non-contact probe (141) is pointed toward the center of rotation of the rotary table (35) and is movable away from or near the center of rotation along the probe rail (142) disposed toward the center of rotation of the rotary table (35).
The optical integrated detection platform according to claim 2, wherein the adjustment system (20) is disposed on the rotating table (35), comprising:

An eccentric adjustment mechanism (21) for eccentrically adjusting an optical component or a mechanical component;

a tilt adjustment mechanism (22) for tilting an optical component or a mechanical component;

An optical element supporting mechanism (23) for supporting the optical element.
The optical integrated detection platform according to claim 9, wherein the eccentricity adjustment mechanism (21) comprises:

An eccentric adjustment substrate (211) disposed on the tilt adjustment mechanism (22);

An upper eccentric drive unit (212) and/or a lower eccentric drive unit (213) are disposed on the eccentric adjustment substrate (211) to eccentrically adjust the optical element and/or the mechanical element.
The optical integrated detection platform according to claim 10, wherein the upper eccentric drive unit (212) and the lower eccentric drive unit (213) each comprise:

At least one radial displacement drive (2121, 2131), and at least one drive post (2122, 2132) supporting the radial displacement drive (2121, 2131), the at least one radial displacement drive (2121, 2131) along The circumferential direction is evenly spaced.
The optical integrated detection platform of claim 10, wherein the tilt adjustment mechanism (22) comprises:

Tilting the adjustment substrate (221), disposed on the rotating table (35);

At least one ball and socket fitting unit (223) disposed on the tilt adjustment substrate (221) and supporting the eccentric adjustment mechanism (21);

At least one tilt adjustment drive unit (222) is disposed on the corresponding ball and socket mating unit (223), including a radial displacement drive and an output reversing mechanism.
The optical integrated detection platform according to claim 12, wherein the optical element supporting mechanism (23) comprises:

An optical element lifting unit (232) disposed on the tilt adjustment substrate (221) for lifting in a direction of a rotation axis;

An optical element supporting unit (231) disposed on the optical element lifting unit (232) for supporting the optical element,

The eccentric adjustment substrate (211) is provided with a third through hole (2111) for avoiding interference with the optical element lifting unit (232) and the optical element supporting unit (231), the tilt adjusting substrate (221), the optical element The support unit (231) and the optical element lifting unit (232) are each provided with a detection optical path of the through hole security interval detecting unit (12) coaxial with the rotating shaft.
The optical integrated inspection platform of claim 4 wherein said assembly system (40) comprises a detachable:

a component pick-and-place unit (41) for picking up and placing optical components and/or mechanical components;

Injection molding and curing unit (42) for injection molding and curing of the mirror assembly;

a position marking unit (43) for providing an orientation reference and a positional relationship between the components; and/or

A cleaning unit (44) for obtaining a clean integrated detection environment.
The optical integrated detection platform according to claim 14, wherein the component pick-and-place unit (41) is disposed on the base (33), and includes:

a mechanical component pick-and-place tool (411) for picking up and placing the mechanical component by mechanical clamping;

An optical component pick-and-place tool (412) for picking up the optical component by mechanical clamping or vacuum suction;

The pick-and-place robot arm (413) supports the mechanical component pick-and-place tool (411) and the optical component pick-and-place tool (412).
The optical integrated detection platform according to claim 14, wherein the glue injection and curing unit (42) is disposed on the lifting platform (32), comprising:

A glue pen (422) for forming a point, line or surface structural adhesive form under pressure control;

a glue injection controller (423) disposed on a lower surface of the lifting platform (32) for controlling the injection molding pen (422);

A curing lamp (421) for curing the glued optical component.
The optical integrated detection platform according to claim 14, wherein

The position marking unit (43) is disposed on the lifting platform (32) and includes:

Marking a laser (431) with an exiting ray directed at the axis of rotation;

A support frame (432) supports the marking laser (431).
The optical integrated inspection platform of claim 14 wherein said cleaning unit (44) comprises:

a cleaning tip (441) disposed on a lower surface of the lifting platform (32) to remove foreign matter by adsorption or blowing;

a cleaning controller (442) disposed on a side wall of the base (33) for the cleaning tip (441) Control.
The optical integrated detection platform of claim 2, wherein the platform body frame (30) further comprises:

A support leg (34) for supporting the abutment (33), the support leg (34) comprising:

Mechanical legs (342) for supporting purposes;

A vibration isolator (341) is disposed between the mechanical leg (342) and the base (33) for shielding vibration interference.