CN210165929U

CN210165929U - Measuring machine

Info

Publication number: CN210165929U
Application number: CN201921468941.2U
Authority: CN
Inventors: 酈唯诚; 王金源
Original assignee: Quanyang Huangshi Material Technology Co Ltd; YUANTAI PRECISION TECHNOLOGY Co Ltd; Xu Hui Applied Material Co Ltd
Current assignee: Quanyang Huangshi Material Technology Co Ltd; YUANTAI PRECISION TECHNOLOGY Co Ltd; Xu Hui Applied Material Co Ltd
Priority date: 2019-09-05
Filing date: 2019-09-05
Publication date: 2020-03-20
Anticipated expiration: 2029-09-05

Abstract

The utility model provides a measuring machine, it sets firmly a square stone material platform mainly is the flat top surface of platform carrier in the board body, platform carrier and stone material platform all make the part that possesses 00 grades of precision for granite or marble at least, constitute the high loading of dual high accuracy, non-deformable's firm bearing structure, and can reach the holistic flatness of measuring machine, set up measuring device on the board body, measuring device's measurement subassembly can be driven in stone material platform top motion, and provide large-scale or heavy bearing part of waiting to measure the object with integral type square stone material platform, make it at the measurement in-process, the sag behind the control stone material platform load of ability accurate is in permissible coordinate measurement error range. The measuring machine can also embed a transparent carrier plate in the square stone platform to be used as a bearing part of a light or small object to be measured, so that the measuring machine can also be suitable for the measuring operation of the small or light object to be measured.

Description

Measuring machine

Technical Field

The present invention relates to a measurement platform, and more particularly to a non-contact image measurement platform.

Background

In order to quickly detect the micro-inspection of the contour, surface size, angle and position of various complex and precise components, the image inspection machine is used to perform the micro-inspection operation. Taking an image measuring machine table currently applied to a metal shielding (shadow mask) measuring operation in an Organic Light-Emitting Diode (OLED) display panel manufacturing process as an example, the image measuring machine table is mainly characterized in that a positioning frame made of steel frame rods is arranged on a carrier plate of a machine table body, a Light-permeable glass plate is fixed by the positioning frame, the glass plate is used as a carrier for placing an object to be measured, an image capturing device driven by a driving mechanism is arranged on the machine table body, and a bottom Light source which is arranged below the glass plate and can be driven by the driving mechanism is further matched, so that the machine table can be controlled to execute the image measuring operation on the object to be measured.

In the development trend of the metal shield (shadow mask) combined with a high-resolution Organic Light Emitting Diode (OLED) display panel, the precision of the metal shield, such as the pattern shape and size, is relatively improved. Therefore, the measurement machine must meet the measurement performance of high precision, and the supporting platform must have a predetermined overall flatness.

In order to achieve a predetermined overall flatness, a conventional metrology platform is constructed by combining multiple components, and the flatness of the existing metrology platform must be adjusted one by one during the combination, which makes it difficult to achieve the predetermined overall flatness. In addition, in the existing metrology tool products, a carrier made of granite is selected as a steel positioning frame and a stable bearing structure on the steel positioning frame and a glass plate, but the carrier made of granite has good bearing strength and stable material quality. However, when performing image measurement of an object, the object to be measured must be supported and positioned by a positioning frame made of metal material such as steel, or a bottom light source is further disposed below the positioning frame and above the carrier plate to provide an auxiliary light source.

However, the structure of the positioning frame is not easy to meet the requirement of the overall flatness, and when the positioning frame bears a large or heavy object to be measured for measurement, the positioning frame has limited load-bearing capacity and is deformed, so that the problem of large coordinate measurement error caused by large sagging amount of the bearing structure after load bearing is easy to occur. In order to achieve the measurement accuracy, the conventional measurement machine needs to be further improved.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a measurement board solves current measurement board and is difficult to reach predetermined whole flatness requirement to and when carrying out large-scale or heavy object of waiting to measurationing and measurationing operation, easily because of its sag of bearing the weight of the structure load heavy object is big on the left and results in its coordinate measurement error big on the left scheduling problem.

In order to achieve the above object, the present invention provides a measuring apparatus, comprising:

the machine body is defined with an X axis, a Y axis and a Z axis which are mutually vertical, the X axis and the Y axis are positioned on an imaginary horizontal plane of the machine body, the Z axis is longitudinally vertical to the imaginary horizontal plane, the machine body comprises a platform carrier, the platform carrier is a stone component which is made of granite or marble and at least has the precision of 00 level, and the top surface of the platform carrier is a flat surface parallel to the imaginary horizontal plane;

the stone platform is fixedly arranged on the platform carrier of the machine table body, the stone platform is a component which is made of granite or marble and has at least 00-level precision, the top surface of the stone platform is a flat surface and is parallel to the imaginary horizontal plane, and a middle groove which penetrates through the stone platform along the Z-axis direction is arranged in the stone platform; and

the measuring device comprises at least one measuring component and a driving mechanism, wherein the measuring component can be movably arranged above the stone platform, and the driving mechanism is arranged on the machine table body, is connected with the measuring component and can drive the measuring component to move in a three-dimensional space.

With the aid of the creation of the measuring machine, it has at least the following features:

1. the method is suitable for large or heavy objects to be measured to perform high-precision measurement operation: the utility model discloses the board of measurationing mainly utilizes the stone material platform to set firmly in the dual firm combination structure of stone material platform carrier top structure, and all be the part that possesses 00 grades of precision at least with the help of integral type platform carrier and integral type mouth font stone material platform, regards as the bearing part of large-scale or heavy object of waiting to measurationing with integral type mouth font stone material platform, and places on the stone material platform and wait to measurationing the object in the operation process of measurationing, can control because of the drooping volume of load in the tolerable coordinate error range of measurationing accurately, consequently, the utility model discloses can provide high load, high accuracy and non-deformable's bearing platform of measurationing.

2. The requirement of the overall flatness of the measuring machine is easily met: the integrated platform carrier and the integrated square stone platform are integrated and at least have parts with 00-level precision, the top surface of the platform carrier and the top surface of the stone platform are flat surfaces and parallel to the imaginary horizontal plane, and the integrated square stone platform is fixedly arranged on the flat top surface of the platform carrier, so that the integrated square stone platform is easy to meet the requirement of measuring the integral flatness of a machine platform.

3. Providing a stable installation environment for components with high precision position control in the drive mechanism: bearing the above, the utility model discloses outside the platform carrier that measuration board utilized the integral type and possessed 00 grades of precisions at least provides the basis that this stone material platform bore, the top surface of platform carrier is the flat surface of high accuracy, and it can also be to providing the environment of installing of stable non-deformable to the subassembly (like high accuracy optical ruler subassembly etc.) that has high accuracy position control among the actuating mechanism, ensures actuating mechanism's high accuracy displacement control performance.

The utility model discloses the board of measurationing can also further include a printing opacity support plate, and the printing opacity support plate inlays the mesocarp of locating a mouthful font stone material platform, and the printing opacity support plate is on a parallel with this imaginary horizontal plane, makes the utility model discloses the board of measurationing can also utilize the printing opacity support plate to carry out the measurement operation as light-duty or miniature object of measurationing of treating as light-duty or heavy object of measurationing, makes except that the stone material platform provides large-scale or heavy object of measurationing, the utility model discloses the board of measurationing is general in large-scale or heavy object of treating measurationing to and the operation of. On the other hand, the light transmittance of the transparent carrier plate is utilized to enable the middle groove area of the stone platform to keep light passing, so that the light emitted by the bottom light source positioned at the bottom of the stone platform can still pass through the transparent carrier plate, and the image measurement operation is executed when the light is projected on the object to be measured positioned on the stone platform or the transparent carrier plate.

Drawings

Fig. 1 is a schematic perspective view of a preferred embodiment of the measuring apparatus of the present invention.

FIG. 2 is a schematic perspective view of another viewing angle of the metrology tool of FIG. 1.

FIG. 3 is a schematic top plan view of the metrology tool of FIG. 1 in accordance with one embodiment.

FIG. 4 is a schematic side plan view of the metrology tool of FIG. 1 in accordance with one embodiment.

FIG. 5 is a schematic side plan view of the metrology tool of FIG. 1 in accordance with one embodiment.

Detailed Description

The following description of the preferred embodiments of the present invention will be made in conjunction with the drawings and the accompanying drawings to further illustrate the technical means adopted to achieve the objects of the present invention.

As shown in fig. 1 to 5, a preferred embodiment of the measuring machine of the present invention is disclosed, which can be seen from the drawings, and the measuring machine comprises a machine body 10, a stone platform 20 and a measuring device 40, or further comprises a transparent carrier 30.

As shown in fig. 1 to 5, the machine body 10 defines an X axis, a Y axis and a Z axis perpendicular to each other. The X axis and the Y axis are located on an imaginary horizontal plane of the machine body 10, the Z axis is vertical to the imaginary horizontal plane, the machine body 10 has a platform carrier 11 therein, and a top surface of the platform carrier 11 has a flat surface parallel to the imaginary horizontal plane. The platform carrier 11 is made of hard stone such as granite or marble, and has a precision of at least 00 level, and the hard stone such as granite or marble has the characteristics of large bearing weight, high hardness, no deformation and capability of maintaining the precision for a long time.

As shown in fig. 1 to 5, in the preferred embodiment, the platform carrier 11 is a complete rectangular stone plate, and a damping mechanism (not shown) may be further added to the bottom of the platform carrier 11 of the machine body 10 for reducing the influence of external vibration on the stability of the machine body 10. The shock absorbing mechanism may be a known mechanism, and its specific configuration is not described herein.

As shown in fig. 1 to 5, the stone platform 20 is fixedly disposed on the platform carrier 11 of the machine body 10, the top surface of the stone platform 20 is a flat surface and parallel to the imaginary horizontal plane, and the stone platform 20 is used as a bearing platform for a large or heavy object to be measured. The stone platform 20 is a flat plate made of hard stones such as granite or marble with at least 00-level precision, and the hard stones such as granite or marble have the characteristics of large bearing weight, high hardness, no deformation and capability of maintaining precision for a long time, and provides a measuring bearing platform with high load, high precision and difficult deformation by means of a double stable combination structure of the stone platform 20 and the platform carrier 11 of the stone. The area and thickness of the stone platform 20 are set according to the actual product load requirement.

As shown in fig. 1 to 5, in the above description, the stone platform 20 is provided with a middle groove 21 penetrating along the Z-axis direction, so that the stone platform 20 forms a square-shaped body, and the middle groove 21 provides a passage for light to pass through. The size of the middle groove 21 is set according to the load requirement of the actual product or the applicable object to be measured. The stone platform 20 forms a ring groove 22 on the top of the peripheral wall of the middle groove 21 and an annular bearing portion 23 located below the ring groove 22, i.e. the top surface of the annular bearing portion 23 is lower than the top surface of the stone platform 20.

As shown in fig. 1 to 5, in the preferred embodiment, the stone platform 20 is fixed on the top of the platform carrier 11, and the machine body 10 has a long groove 12 on two opposite sides of the stone platform 20 above the platform carrier 11 in the X-axis direction. The stone platform 20 forms hollow parts 24 at the bottom of the two opposite sides of the groove wall in the X-axis direction relative to the middle groove 21, the hollow parts 24 form a space above the platform carrier 11, and the hollow parts 24 are communicated with the long grooves 12 at the two sides of the machine body 10.

As shown in fig. 1 to 5, when the measuring platform of the present invention is additionally provided with the transparent carrier plate 30, the transparent carrier plate 30 is embedded in the middle groove 21 of the stone platform 20, the periphery of the transparent carrier plate 30 is embedded in the ring groove 22 and abuts against the ring-shaped supporting portion 23, the top surface of the transparent carrier plate 30 is a flat surface and is parallel to the imaginary horizontal plane, so that the transparent carrier plate 30 provides a small or light-duty supporting platform for the object to be measured.

The top surface of the transparent carrier 30 can be flush with the top surface of the stone platform 20, or the top surface of the transparent carrier 30 is slightly lower than the top surface of the stone platform 20, the transparent carrier 30 can be a pure glass plate or a laminated glass plate or other transparent plates, when the transparent carrier 30 is a glass plate, the thickness is preferably greater than or equal to 12mm, so that the transparent carrier 30 has better bearing strength and is not easy to deform, and the sagging amount of the transparent carrier 30 due to load is within the allowable measurement error range.

As shown in fig. 1 to 5, the measuring device 40 is movably mounted on the machine body 10 in a controlled manner, the measuring device 40 includes at least one measuring component 41 and a driving mechanism 42, the measuring component 41 is movably mounted above the stone platform 20 with the middle trough 21, and the driving mechanism 42 is mounted on the machine body 10 and connected to the measuring component 41, and can drive the measuring component 41 to perform high-precision three-dimensional spatial movement.

As shown in fig. 1 to 5, the measuring component 41 may be a photographing lens, a laser ranging head, a contact probe or a combination thereof, and the photographing lens, the laser ranging head and the contact probe are known products and the detailed structure thereof is not repeated. When the measuring component 41 is a high-resolution optical zoom lens, the measuring device 40 further includes an upper light source mounted around the high-resolution optical zoom lens for projecting light to the object to be measured, the upper light source is preferably a cold light source to avoid measurement errors caused by thermal expansion of the object to be measured, and the upper light source is preferably a brightness-adjustable light source to select proper light source brightness according to measurement requirements.

In addition, the measuring device 40 may further include a bottom light source 46 driven by the driving mechanism 42, the bottom light source 46 is a known product, the bottom light source 46 is disposed between the platform carrier 11 of the machine body 10 and the stone platform 20 and located right below the camera lens type measuring device 41 for providing an auxiliary light source, and the bottom light source 46 is vertically opposite to the camera lens type measuring device 41 and can be driven by the driving mechanism 42 to move synchronously. When the measuring machine of the present invention has the transparent carrier plate 30, the bottom light source 46 is disposed between the platform carrier 11 of the machine body 10 and the transparent carrier plate 30 embedded in the stone platform 20.

When the measurement component 41 is a high-resolution optical zoom lens, it can combine the upper light source and the computer to perform the image measurement operation of the contour, surface dimension, angle or position of the precision part, or the micro-detection of the precision part, and the measurement component 41 can also combine the bottom light source 46 to perform the bottom light measurement; when the measuring component 41 is a laser ranging head, it has a plane measuring function; when the measurement component 41 is a contact probe, it has a function of performing full-scale precise shape measurement on precise parts.

As shown in fig. 1 to 5, the driving mechanism 42 has a driving mechanism with a function of high-precision three-dimensional space motion, and the driving mechanism 42 may be made of a known product, and detailed specific configurations thereof are not described in detail. Generally, the driving mechanism 42 mainly includes an X-axis power assembly 43, a Y-axis power assembly 44 and a Z-axis power assembly 45, the X-axis power assembly 43 and the Y-axis power assembly 44 can be linear motors or precise linear rails, the Z-axis power assembly 45 can be a combination of servo motors and ball screws or linear slide rails, and the X-axis power assembly 43, the Y-axis power assembly 44 and the Z-axis power assembly 45 all combine with high precision optical ruler assemblies or other equivalent components to provide high precision position control in the X-axis direction, the Y-axis direction and the Z-axis direction. The high precision optical scale assembly is a known product and includes a high precision optical scale and an optical scale readhead.

In the preferred embodiment, the Y-axis power assembly 44 includes two Y-axis driving guide rods 441 capable of being controlled and driven, the two Y-axis driving guide rods 441 respectively extend into the machine body 10 from the upper side of the platform carrier 11 through the long slots 12 on the two opposite sides of the X-axis, a linking frame 442 is connected between the two Y-axis driving guide rods 441 and can synchronously move in parallel, the linking frame 442 is located above the platform carrier 11 and moves in the hollow portions 24 at the bottoms of the two opposite side slot walls in the X-axis direction of the stone platform 20. The X-axis power assembly 43 is located above the transparent carrier plate 30 and the stone platform 20 and connected to the upper ends of the two Y-axis driving guide rods 441, the Z-axis power assembly 45 is located above the stone platform 20 (or the transparent carrier plate 30) and connected to the X-axis power assembly 43, and the Z-axis power assembly 45 is connected to the measurement assembly 41 and the upper light source.

In the driving mechanism 42, the X-axis power assembly 43, the Y-axis power assembly 44 and the Z-axis power assembly 45 are all combined with a high-precision optical scale assembly, which is a known product and has a high-precision optical scale and an optical scale reading head, so as to have a high-precision position displacement control function. Wherein, the X axial power assembly 43 and the Z axial power assembly 45 are provided with high precision optical scale assemblies, the X axial power assembly 43 is combined with the high precision optical scale assemblies and is arranged above the stone platform 20, the X axial power assembly 43 is connected to the upper ends of the two Y axis driving guide rods 441, and the Z axial power assembly 45 is combined with another high precision optical scale assembly and is connected to the measuring assembly 41. In the high-precision optical scale assembly combined with the Y-axis power assembly 44, the high-precision optical scale 443 is disposed on the flat top surface of the platform carrier 11 and parallel to the Y-axis, and the optical scale reading head 444 is mounted on the linking frame 442 connecting the two Y-axis driving guide rods 441 and can move along the direction of the high-precision optical scale 443, so that the platform carrier 11 made of hard and non-deformable high-precision stone provides a stable mounting environment for the high-precision optical scale 443, and the Y-axis power assembly 44 has high-precision displacement control performance.

When the measuring device 40 includes a bottom light source 46, the bottom light source is driven by an X-axis power assembly 43 and a Y-axis power assembly 44 of the driving mechanism 42 and is vertically opposite to the measuring assembly 41. In the preferred embodiment, the bottom light source 46 is mounted on the linking frame 442 connected between the two Y-axis driving guide rods 441 in the Y-axis power assembly 44, and is connected to the X-axis power assembly 43, so that the bottom light source 46 can vertically face the camera lens type measuring assembly 41, and move along with the linking frame 442 in the Y-axis direction, and be driven by the X-axis power assembly 43 to move in the X-axis direction.

Regarding the usage of the measuring machine of the present invention, when the object to be measured is a large or heavy object, the object to be measured is placed and positioned on the stone platform 20; when the object to be measured is a small or light object, the object to be measured can be placed and positioned on the transparent carrier 30 in the stone platform 20. Taking an image measurement operation of the profile of the object to be measured as an example, the driving mechanism is used to drive the measuring component in the form of a photographic lens and the upper light source to move above the object to be measured on the transparent carrier plate, and the upper light source is used to project light to the object to be measured, the measuring component uses the photographic lens with high resolution and adjustable magnification to capture image data of the object to be measured, and transmits the image data to the computer to perform the image measurement operation. In addition, the bottom light source can be used for providing auxiliary light source which is projected on the surface of the object to be measured from bottom to top through the middle groove (or the transparent carrier plate positioned in the middle groove) below the stone platform, so that the operation of capturing the image data of the object to be measured can be executed.

It can be seen from the foregoing description that the utility model discloses measuration board mainly utilizes the stone material platform to set firmly in the dual firm joint construction that stone material platform carrier top constructed, and all be the part that possesses 00 grades of precision at least with the help of integral type platform carrier and integral type mouth font stone material platform, and the mouth font stone material platform of this integral type sets firmly in the flat top surface of this platform carrier, consequently, makes it easily reach the requirement of measuration board holistic flatness. And the measuring machine can also provide a flat top surface by utilizing a platform carrier of stone materials with high precision and difficult deformation, provides stable installation environments such as a high-precision optical ruler in the driving mechanism and the like, and ensures the high-precision displacement control performance of the driving mechanism.

Furthermore, the utility model discloses the board of measurationing utilizes integral type square stone material platform as large-scale or heavy the bearing part who treats the object of measurationing, places on the stone material platform and treats the object of measurationing and measure the operation in-process, can control accurately because of the flagging volume of load in the tolerable coordinate error range of measurationing, makes the utility model discloses can provide the bearing platform of measurationing of high load, high accuracy and non-deformable.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and although the present invention has been disclosed with reference to the above preferred embodiment, but not to limit the present invention, any person skilled in the art can make modifications or changes to equivalent embodiments without departing from the scope of the present invention, and any simple modification, equivalent change and modification made to the above embodiments by the technical spirit of the present invention still fall within the scope of the present invention.

Claims

1. A metrology tool, comprising:

2. The apparatus of claim 1, wherein a transparent carrier is embedded in the middle groove of the stone platform, and the transparent carrier is parallel to the imaginary horizontal plane.

3. The measuring apparatus as claimed in claim 2, wherein the stone platform forms a ring groove on a top of a peripheral wall of the middle groove and an annular supporting portion located below the ring groove, and the periphery of the transparent carrier plate is embedded in the ring groove and abuts against the annular supporting portion.

4. The apparatus of claim 3, wherein the transparent carrier is a glass plate with a thickness greater than or equal to 12mm, and a top surface of the transparent carrier is flush with or lower than a top surface of the stone platform.

5. The measurement apparatus of claim 1, further comprising a bottom light source driven by the driving mechanism, the bottom light source being located between the platform carrier of the apparatus body and the stone platform and directly below the measurement assembly.

6. The measurement apparatus as claimed in claim 2, 3 or 4, further comprising a bottom light source driven by the driving mechanism, the bottom light source being located between the platform carrier and the transparent carrier of the apparatus body and directly under the measurement component.

7. The measurement machine of any one of claims 1 to 4, wherein the machine body has a long groove on the platform carrier and on two opposite sides of the stone platform with respect to the X-axis direction, the stone platform forms a hollow portion on the platform carrier at the bottom of the groove walls on the two opposite sides of the stone platform with respect to the X-axis direction, and the hollow portion communicates with the long grooves on the two sides of the machine body;

the driving mechanism comprises an X-axis power assembly, a Y-axis power assembly and a Z-axis power assembly, the Y-axis power assembly comprises two Y-axis driving guide rods capable of being driven, the two Y-axis driving guide rods respectively extend into the space of the machine body from the upper part of the platform carrier through long grooves on two opposite sides of the X-axis direction, a linkage frame is connected between the two Y-axis driving guide rods and can synchronously move in parallel, the linkage frame can move in the hollow parts at the bottoms of the groove walls on two opposite sides of the stone platform in the X-axis direction, a high-precision optical ruler is arranged on the top surface of the platform carrier, an optical ruler reading head is arranged on the linkage frame and matched with the high-precision optical ruler, the X-axis power assembly is combined with the high-precision optical ruler assembly and is arranged above the stone platform, and the X-axis power assembly is connected to the upper ends of the two Y-axis driving guide rods, the Z-axis power assembly is positioned above the stone platform and connected with the X-axis power assembly, and the Z-axis power assembly is combined with another high-precision optical scale assembly to be connected with the measuring assembly.

8. The measurement apparatus of claim 7, further comprising a bottom light source disposed between the platform carrier of the apparatus body and the stone platform, wherein the bottom light source is capable of being driven by the X-axis power assembly and the Y-axis power assembly of the driving mechanism and disposed directly below the measurement assembly.