CN110174758A - A kind of measuring table microscope and its localization method - Google Patents

A kind of measuring table microscope and its localization method Download PDF

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Publication number
CN110174758A
CN110174758A CN201910445395.9A CN201910445395A CN110174758A CN 110174758 A CN110174758 A CN 110174758A CN 201910445395 A CN201910445395 A CN 201910445395A CN 110174758 A CN110174758 A CN 110174758A
Authority
CN
China
Prior art keywords
fixing piece
measuring table
changeover panel
camera lens
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910445395.9A
Other languages
Chinese (zh)
Inventor
胡进
胡彧
陈铭勇
仲崇明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hezhi Technology Suzhou Co ltd
Original Assignee
Suzhou Billion Photoelectric Technology Co Ltd Billiton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Billion Photoelectric Technology Co Ltd Billiton filed Critical Suzhou Billion Photoelectric Technology Co Ltd Billiton
Priority to CN201910445395.9A priority Critical patent/CN110174758A/en
Publication of CN110174758A publication Critical patent/CN110174758A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/248Base structure objective (or ocular) turrets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/26Stages; Adjusting means therefor

Abstract

The invention discloses a kind of measuring table microscopes, including microscope stand;Changeover panel is rotatably mounted on bracket, and a plurality of lenses of different multiplying are distributed in annular array on the changeover panel;Location structure, including relatively turnable fixing piece and locating piece, the fixing piece is set on the changeover panel or microscope stand, multiple grooves are distributed in annular array on the fixing piece, each groove respectively corresponds the camera lens, the groove is cooperated to be provided with elastic component on the locating piece, it further includes sensor and power device which, which acts on fixing piece and can slide along fixing piece surface,.The invention also discloses above-mentioned microscopical localization methods simultaneously.The present invention controls size of current by sensor sensing, cooperates location structure, is able to achieve camera lens postrotational precise positioning automatically.

Description

A kind of measuring table microscope and its localization method
Technical field
The present invention relates to field of optical measurements, more particularly to the microscope and its localization method of a kind of measuring table.
Background technique
Measuring microscope, using making accurate measurement to Workpiece length and angle thoroughly, by the way of reflection, especially suitable for video The test of magnetic head, large scale integrated circuit line width and other precision components, be widely applicable for measuring room, production operation line and The departments such as scientific research, workbench can also make 360 degree of rotation in addition to the movement for making X, Y coordinates, can also carry out height side It is a kind of ideal fixed-site miniature precision measuring instrument to the measurement for doing Z coordinate;Measuring microscope instrument can further connect CCD television camera is connect, the profile amplification of workpiece is made;Also computer can be connected and carry out the measurement such as data processing.
But current existing measuring microscope, the wheel measuring of different multiplying camera lens is all manually to go to rotate Debugging, it is easy to cause hand to touch workpiece or article to be measured, cause the pollution or abrasion of workpiece or article, and rotation manually Transposable lens are also easy to cause the problems such as alignment lens precision is inaccurate, and scanning survey error is larger.
In view of this, it is necessary to provide a kind of measuring tables for being able to achieve precise positioning, can automatically switching camera lens with micro- Mirror.
Summary of the invention
The purpose of the present invention is to provide a kind of measuring tables for being able to achieve precise positioning, can automatically switching camera lens with micro- Mirror.
To achieve the above object, the invention provides the following technical scheme:
The embodiment of the present application discloses a kind of measuring table microscope, comprising:
Microscope stand;
Changeover panel is rotatably mounted on bracket, and multiple mirrors of different multiplying are distributed in annular array on the changeover panel Head;
Location structure, including relatively turnable fixing piece and locating piece, the fixing piece be set to the changeover panel or On microscope stand, multiple grooves are distributed in annular array on the fixing piece, and each groove respectively corresponds the camera lens, The groove is cooperated to be provided with elastic component on the locating piece, which acts on fixing piece and can be sliding along fixing piece surface It is dynamic.
It preferably, further include the motor with changeover panel transmission connection in a kind of above-mentioned measuring table microscope.
Preferably, in a kind of above-mentioned measuring table microscope, 1 sense is respectively arranged between the adjacent camera lens Piece is answered, the induction chip arrays are set to the surrounding of changeover panel,
It further include sensor corresponding with the sensing chip.
Point as a further improvement of the present invention, in a kind of above-mentioned measuring table microscope, the elastic component includes Spring and the hoodle for being set to spring end, the hoodle and the groove cooperate.
Preferably, in a kind of above-mentioned measuring table microscope, the fixing piece be fixed on above changeover panel and with turn Removable disk coaxial arrangement,
The locating piece and microscope stand are relatively fixed.
The embodiment of the present application also discloses a kind of microscopical localization method of measuring table, comprising:
S1, motor act on changeover panel and camera lens are driven to rotate;
The sensing chip that s2, sensor real-time perception are passed through, and will test signal and be sent to control unit;
S3, control unit reduce the electric current of motor, and electric current satisfaction may make elastic component to slide along fixing piece surface, still It can not make elastic component that can not skid off from groove.
Preferably, in above-mentioned measuring table in microscopical localization method, the elastic component slides into groove it Afterwards, with the specific frequency jitter specific time.
Preferably, in above-mentioned measuring table in microscopical localization method, step further include:
Input Shot change instruction;
The electric current for increasing motor, so that elastic component is skidded off from groove.
Compared with the prior art, the advantages of the present invention are as follows: lens ratio may be implemented in this measuring table microscope Automatically switch, and size of current is controlled by sensor, after cooperating power device and location structure to realize that camera lens rotates automatically Precise positioning, realize the convenient measurement of large format product.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The some embodiments recorded in application, for those of ordinary skill in the art, without creative efforts, It is also possible to obtain other drawings based on these drawings.
Fig. 1 show a kind of perspective view for being measured microscopically platform in a specific embodiment of the invention;
Fig. 2 show a kind of camera lens automatic switching control equipment structure for being measured microscopically platform in a specific embodiment of the invention Figure;
Fig. 3 show a kind of right view of camera lens automatic switching control equipment for being measured microscopically platform in a specific embodiment of the invention Figure;
Fig. 4 is the microscopical inner detail diagram of a kind of measuring table in a specific embodiment of the invention;
Fig. 5 show the synchronous drive mechanism structure chart in a specific embodiment of the invention in camera lens automatic switching control equipment;
Fig. 6 show the microscopical location structure schematic diagram of a kind of measuring table in a specific embodiment of the invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out detailed retouch It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention In embodiment, those of ordinary skill in the art's every other implementation obtained without making creative work Example, shall fall within the protection scope of the present invention.
Refering to what is shown in Fig. 1, providing one kind in one embodiment is measured microscopically platform, including pony sill 1, it is placed in Measuring table 2 on pony sill 1 and slidably in the microscopic structure on measuring table 2.
The material of pony sill 1 is granite, is cased with platinum outer cover outside pony sill 1, is equipped between pony sill 1 and measuring table 2 Air spring 11 is additionally provided with the castor 12 that can be used for being moved easily on pony sill 1.
In the technical scheme, air spring 11 can isolated environment vibration, it is ensured that microscope during scanning survey, All directions displacement will not occur between camera lens and surface to be measured.
Microscopic structure includes the column 31 for being set to 2 two sides of measuring table along the z-axis direction, is fixed at along the x-axis direction vertical Crossbeam 32 on column 31 is set on crossbeam 32, the x-axis slide unit substrate 33 that can slidably reciprocate along crossbeam 32 and to be fixed on x-axis sliding It on stylobate plate 33, can be moved up and down along z-axis, for the measuring table microscope scanning observation, camera lens can be automatically switched 30。
31 material of column is granite, and column 31 can be simultaneously along the boundary slip of measuring table 2.
With reference to shown in Fig. 2-6, a kind of camera lens automatic switchover for being measured microscopically platform is provided in one embodiment Device and its detail view, including bracket 301, changeover panel 302, synchronous drive mechanism, power device 304, sensor 305 and solid Determine frame 306.
Bracket 301 is used for fixation of the microscope on measuring table 2 and x-axis slide unit substrate 33, while being also used to microscope The installation of internal optical, bracket 301 include a stand base bottom surface 3011 for being parallel to measuring table 2 and camera lens peace An obtuse angle is presented in dress face 3012, camera lens mounting surface 3012 and stand base bottom surface 3011, convenient for single camera lens to underlying workpiece Measurement.
Changeover panel 302 is rotatably mounted on the camera lens mounting surface 3012 of bracket 301, is offered on changeover panel 302 multiple Mounting hole 3023, refering to what is shown in Fig. 6, mounting hole 3023 divides between adjacent camera lens for detachably installing the camera lens of different multiplying It is not provided with 1 sensing chip (not shown), induction chip arrays are set to the surrounding of changeover panel 302, and sensing chip can be with sensor 305 Cooperation control rotation of lens precision, is equipped with above changeover panel 302 and the integrally formed fixing piece 3021 of changeover panel 302, fixing piece 3021 are coaxially disposed with changeover panel 302, and fixing piece 3021 is cylinder, and central hollow passes through for rotating shaft, fixing piece Multiple grooves 30211 are distributed in annular array on 3021, and each groove 30211 respectively corresponds a camera lens.
In other embodiments, fixing piece may also be disposed on microscope stand.
In bracket 301, the side of fixing piece 3021 is additionally provided with a locating piece 3022 that can be relatively rotated with fixing piece, positioning The elastic component 30221 of mating groove 30211 is provided on part 3022 along its axial direction, which acts on fixing piece 3021, and can be slided along 3021 surface of fixing piece.Elastic component 30221 includes spring and the hoodle for being set to spring end, bullet Pearl and groove 30211 cooperate, in unresisted situation, hoodle under the action of the spring, 3022 surface of locating piece of slightly emerging, bullet The size of pearl matches with the groove 30211 on fixing piece 3021, and when changeover panel 302 rotates, spring is compressed, and hoodle is solid Determine the sliding of 3021 surface of part, when going to required multiplying power camera lens, hoodle under the pressure of the spring, springs back into groove 30211, carries out The precise positioning of camera lens.
In the above-mentioned technical solutions, groove can also be set to fixing piece upper surface, and corresponding, locating piece is also set to solid Determine above part, the elastic component-spring and hoodle in locating piece convexedly stretch in downwards locating piece lower surface, engage with groove realization.
Power device 304 is installed on bracket 301, provides power for the rotation of changeover panel 302, power device 304 is mixed Stepper motor is closed, the connecting rod (not shown) including motor body 3041 and with motor body transmission connection, with reference to shown in Fig. 4.
Synchronous drive mechanism is set between changeover panel 302 and power device 304, can future ultromotivity device 304 it is dynamic Power is transferred to changeover panel 302, comprising: camera lens support plate 3031, synchronous pulley 3032 and synchronous belt 3032.
Camera lens support plate 3031 is fixed on 301 lower section of changeover panel, throws face structure for one, radian is slightly larger than changeover panel 302 Radian, through-hole 30311 corresponding with changeover panel mounting hole 3023 is offered in camera lens support plate 3031, for buckling difference The camera lens of multiplying power, camera lens support plate 3031 throw face edge and are uniformly provided with screw hole 30312, and camera lens support plate 3032 can pass through screw It is fixedly connected with changeover panel 302,3031 outer of camera lens support plate is equipped with the transverse groove 30313 being equally spaced.
In the above-mentioned technical solutions, the hole size in camera lens support plate is different, in order to engage different model size Camera lens.
Synchronous pulley 3032 is fixedly installed on the drive rod of power device 304.
Synchronous belt 3033, synchronous belt 3033 can be synchronous toothed belt, which is provided with and camera lens support plate In the corresponding transverse teeth (not shown) of transverse groove 30313 of 3031 outers, 3033 one end of synchronous belt and camera lens support plate The engaging of 30313 phase grinding tooth of transverse groove, the other end fastens with the synchronous pulley 3032 in power device 304.
In one embodiment, the material of camera lens support plate 302 is metal material, and the material of synchronous belt 3033 is Neoprene, surface are covered with nylon canvas.
In other embodiments, synchronous belt can be common transmission belt, with camera lens support plate and power device Between by powerful frictional force realize Synchronous Transmission.
Sensor 305, sensor 305 is photoelectric sensor, corresponding with sensing chip set on the side of changeover panel 302, is led to The sensing chip crossed on induction changeover panel 302 determines the conversion position of camera lens, while control software control being cooperated to flow through power dress The size of electric current is set, to control the revolving speed of power device.
Fixed frame 306 is set to 301 side of bracket, for Hybrid stepping motor to be fixed on bracket 301.
The invention discloses a kind of above-mentioned microscopical localization methods of measuring table, comprising:
S1, motor act on changeover panel and camera lens are driven to rotate;
The sensing chip that s2, sensor real-time perception are passed through, and will test signal and be sent to control unit;
S3, control unit reduce the electric current of motor, and electric current satisfaction may make elastic component to slide along fixing piece surface, still It can not make elastic component that can not skid off from groove;
After s4, elastic component slide into groove, with the specific frequency jitter specific time, accurate engaging is completed;
When s5, cutaway, input Shot change instruction;
S6, the electric current for increasing motor return to step s1 so that elastic component is skidded off from groove.
A kind of camera lens automatic switching control equipment being measured microscopically platform provided by the invention, its working principle is that: it is carrying out When camera lens is converted, increase electric current, motor driven synchronous pulley, so that synchronous belt drives the rotation of camera lens support plate, changeover panel On spring hoodle forced contraction, while sensor carries out continual induction, when sense it is next needed for camera lens i.e. future Temporarily, it is gradually become smaller by controlling software control electric current, changeover panel rotation is slack-off, and spring hoodle encounters and required shots match After groove, rebound blocks groove, sensing chip is exactly in sensor centre at this time, and the electric current of size is insufficient to allow bullet at this time Spring hoodle is skidded off from groove, and changeover panel stops operating, and completes the automatic switchover of camera lens, when needing to carry out next round Shot change When, increase electric current.
In order to which spring hoodle can engage completely with groove, realization is more accurately positioned, and it is complete in sensing chip that motor can be set When full proximity sensor present a high dither state so that spring hoodle under high dither can it is seamless snap-fit into it is recessed Slot, more accurate positioning.
A kind of camera lens automatic switching control equipment being measured microscopically platform provided by the invention supports software control lens ratio Switching, realizes the convenient measurement of large format product, mechanical device intelligent precise, locks parfocalization after Shot change, microscopical Rigidity and measurement accuracy are unaffected.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that There is also other identical elements in process, method, article or equipment including the element.
The above is only the specific embodiment of the application, it is noted that for the ordinary skill people of the art For member, under the premise of not departing from the application principle, several improvements and modifications can also be made, these improvements and modifications are also answered It is considered as the protection scope of the application.

Claims (8)

1. a kind of measuring table microscope characterized by comprising
Microscope stand;
Changeover panel is rotatably mounted on bracket, and a plurality of lenses of different multiplying are distributed in annular array on the changeover panel;
Location structure, including relatively turnable fixing piece and locating piece, the fixing piece are set to the changeover panel or micro- On mirror support, multiple grooves are distributed in annular array on the fixing piece, and each groove respectively corresponds the camera lens, described The groove is cooperated to be provided with elastic component on locating piece, which acts on fixing piece and can slide along fixing piece surface.
2. a kind of measuring table microscope according to claim 1, which is characterized in that further include being driven to connect with changeover panel The motor connect.
3. a kind of measuring table microscope according to claim 2, which is characterized in that divide between the adjacent camera lens It is not provided with 1 sensing chip, the induction chip arrays are set to the surrounding of changeover panel,
It further include sensor corresponding with the sensing chip.
4. a kind of measuring table microscope according to claim 1, which is characterized in that the elastic component include spring with And it is set to the hoodle of spring end, the hoodle and the groove cooperate.
5. a kind of measuring table microscope according to claim 1, which is characterized in that the fixing piece is fixed on conversion It is coaxially disposed above disk and with changeover panel,
The locating piece and microscope stand are relatively fixed.
6. the microscopical localization method of measuring table as claimed in claim 3, comprising:
S1, motor act on changeover panel and camera lens are driven to rotate;
The sensing chip that s2, sensor real-time perception are passed through, and will test signal and be sent to control unit;
S3, control unit reduce the electric current of motor, and electric current satisfaction may make elastic component to slide along fixing piece surface, but can not So that elastic component can not be skidded off from groove.
7. the microscopical localization method of measuring table according to claim 6, which is characterized in that the elastic component sliding After in groove, with the specific frequency jitter specific time.
8. the microscopical localization method of measuring table according to claim 6 characterized by comprising
Input Shot change instruction;
The electric current for increasing motor, so that elastic component is skidded off from groove.
CN201910445395.9A 2019-05-27 2019-05-27 A kind of measuring table microscope and its localization method Pending CN110174758A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110596876A (en) * 2019-09-26 2019-12-20 杭州科洛码光电科技有限公司 Multifunctional objective lens turntable
CN111067477A (en) * 2019-12-28 2020-04-28 山东第一医科大学(山东省医学科学院) Anterior segment image analysis system for angle of eye of ophthalmology

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CN109557651A (en) * 2018-11-28 2019-04-02 贵州大学 A kind of scanning freeze-drying microscope
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US4999495A (en) * 1988-08-31 1991-03-12 Seiko Instruments Inc. Scanning tunneling microscope
JPH1195087A (en) * 1997-09-22 1999-04-09 Olympus Optical Co Ltd Objective lens switch device
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CN110596876A (en) * 2019-09-26 2019-12-20 杭州科洛码光电科技有限公司 Multifunctional objective lens turntable
CN111067477A (en) * 2019-12-28 2020-04-28 山东第一医科大学(山东省医学科学院) Anterior segment image analysis system for angle of eye of ophthalmology

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