A kind of debugging device and Method of Adjustment of off-axis formula optical system light path
Technical field
The invention belongs to optical system alignment field, it is related to debugging device and the adjustment of a kind of off-axis formula optical system light path
Method, the optical path adjustment for optical system.
Background technique
Off-axis formula optical system refers to the difference of the optical axis in optical system between optical element, there is eccentric and inclination,
The adjustment of off-axis formula optical system light path refers to be guaranteed in optical path respectively by adjusting the spatial position of optical element and structural member
Accuracy of a optical element relative to structural member position.The optical path adjustment of off-axis formula optical system cannot achieve single light at present
The measurement and adjustment of element position in the optical path are learned, instrument is difficult to use and guarantees the accuracy of each optics member position in optical path simultaneously
Make the adjustment of out position to it.
Summary of the invention
Technical problems to be solved
In order to avoid the shortcomings of the prior art, the present invention proposes a kind of debugging device of off-axis formula optical system light path
And Method of Adjustment, realize the accurate positioning and adjustment of each position of optical element of off-axis formula optical system light path.
Technical solution
A kind of debugging device of off-axis formula optical system light path, it is characterised in that including centering machine 1, measuring mechanism 2, light
Learn element clamping mechanism 3, mechanical-optical setup part position adjusting mechanism 4 and control system 5;Mechanical-optical setup part position adjusting mechanism 4 is
The turntable of an adjustment mechanism is equipped on the three-dimensional guide rail translation mechanism of adjustment mechanism, the three-dimensional guide rail of adjustment mechanism translates machine
The bracket of the lower end of structure is flexibly connected with the guide rail 10 on the pillar of adjustment mechanism 4;Optical element clamping device 3 is located at adjustment machine
The three-dimensional guide rail translation mechanism of the turntable side of structure, clamping device is set on the column of optical element clamping device 3, clamping device
Three-dimensional guide rail translation mechanism be equipped with clamping device turntable and be located at adjustment mechanism turntable upper end;Centering machine 1 and survey
Measuring mechanism 2 is located at the side of optical element clamping device 3, and centering machine 1, which is equipped with, provides the interior focusing light pipe 9 of benchmark optical axis,
The optical path of interior focusing light pipe and the optical axis of optical element are in approximately the same plane;Measuring mechanism 2 is three coordinate measuring machine, measuring machine
Measuring head can be adjusted the positions of align optical components Yu mechanical-optical setup part;Control system 5 and measuring mechanism 2, optics member
Part clamping device 3 and mechanical-optical setup part position adjusting mechanism 4 realize electrical connection.
The centering machine 1, measuring mechanism 2, optical element clamping device 3 and mechanical-optical setup part position adjusting mechanism 4 are total
It is same to be placed on platform 6.
A method of adjustment optical element, feature are carried out using the debugging device of the off-axis formula optical system light path
It is that steps are as follows:
Step 1: mechanical-optical setup part 7 being fixed on the turntable of structural member position adjusting mechanism 4;
Step 2: optical element 8 is mounted on to the clamping end of optical element clamping device;
Step 3: adjustment optical element clamping device three-dimensional guide rail translation mechanism and turntable so that optical element optical axis with
The benchmark optical axis that the interior focusing light pipe 9 of centering machine issues is consistent;
Step 4: measuring mechanism measures the position of optical element and mechanical-optical setup part, obtains relative positional relationship and feeds back to
Control system;
Step 5: control system according to positional relationship be calculated mechanical-optical setup part should theoretical position, control structure part
The three-dimensional guide rail translation mechanism of position adjusting mechanism 4 is completed to form the adjustment of theoretical position, then along moving to light on guide rail 10
Learn element;
Step 6: optical element being fixed on mechanical-optical setup part according to the optical axis mixed up, completes the dress of the optical element
It adjusts.
Beneficial effect
The debugging device and Method of Adjustment of a kind of off-axis formula optical system light path proposed by the present invention, comprising: centering machine,
Clamping device, measuring mechanism, control system, structural member position adjusting mechanism.It is characterized in that centering machine is as debugging benchmark
For determining that the optical axis of optical element, clamping device and optical structure element position adjusting mechanism have the adjusting function of six degree of freedom
Can, measuring mechanism obtains the physical location of optical element and mechanical-optical setup and feeds back to control system, then passes through control system again
System completes the adjustment of optical path to adjust the position of optical element and mechanical-optical setup.Optical path debugging apparatus and tune provided by the invention
Method for testing can be realized the accurate positioning and adjust automatically of each position of optical element in the optical path, realize off-axis formula optical system
The controllability for optical path adjustment process of uniting, and can be improved working efficiency.
The invention has the advantages that optical path debugging apparatus provided by the invention and adjustment method can be realized in the optical path each
The accurate positioning and adjust automatically of position of optical element realize the controllability of off-axis formula optical system light path adjustment process, drop
The low repair rate of off-axis formula optical system alignment, improves the adjustment efficiency of optical system light path.
Detailed description of the invention
Fig. 1 optical system light path debugging device schematic diagram
Fig. 2 embodiment optical system light path debugging device schematic diagram
1 centering machine, 2 measuring mechanisms, 3 optical element clamping devices, 4 mechanical-optical setup part position adjusting mechanisms, 5 control systems
System, 6 platforms, 7 mechanical-optical setup parts, 8 optical element to adjustment, 9 interior focusing light pipes, 10 guide rails.
Specific embodiment
Now in conjunction with embodiment, attached drawing, the invention will be further described:
Device includes: centering machine, clamping device, measuring mechanism, control system, structural member position adjusting mechanism.
1) centering machine mainly has interior focusing light pipe composition, is used to determine the light of optical element in optical path as debugging benchmark
Axis;
2) clamping device mainly has three-dimensional guide rail translation mechanism and turntable to constitute, and the regulatory function with six degree of freedom is used
In holding optical components and adjust the spatial position of optical element, the interior focusing light in the optical element optical axis made and centering machine
Pipe optical axis is consistent;
3) structural member position adjusting mechanism is mainly made of three-dimensional guide rail translation mechanism and turntable, the tune with six degree of freedom
Function is saved, for fixed structure piece and adjusts the relative position of structural member and optical element;
4) measuring mechanism is three coordinate measuring machine, for measuring the physical location of optical element and structural member and feeding back to
Control system;
5) control system receives the measurement data of measuring mechanism and controls clamping device and structural member position according to the data
The translation and rotation of adjustment mechanism realize the adjustment of optical path to adjust the position of optical element and structural member.
All parts positional relationship: mechanical-optical setup part position adjusting mechanism 4 is the three-dimensional guide rail translation machine in adjustment mechanism
Structure is equipped with the turntable of an adjustment mechanism, the bracket and adjustment mechanism 4 of the lower end of the three-dimensional guide rail translation mechanism of adjustment mechanism
Pillar on guide rail 10 be flexibly connected;Optical element clamping device 3 is located at the turntable side of adjustment mechanism, and the three of clamping device
It ties up guide rail translation mechanism to be set on the column of optical element clamping device 3, the three-dimensional guide rail translation mechanism of clamping device is equipped with
The turntable of clamping device and the turntable upper end for being located at adjustment mechanism;Centering machine 1 and measuring mechanism 2 are located at optical element clamping machine
The side of structure 3, centering machine 1, which is equipped with, provides the interior focusing light pipe 9 of benchmark optical axis, the optical path and optical element of interior focusing light pipe
Optical axis be in approximately the same plane;Measuring mechanism 2 is three coordinate measuring machine, and the measuring head of measuring machine can be adjusted to quasi-optics
The position of element and mechanical-optical setup part;Control system 5 and measuring mechanism 2, optical element clamping device 3 and mechanical-optical setup part position
Adjustment mechanism 4 realizes electrical connection.
Adjustment process:
Step 1: mechanical-optical setup part 7 being fixed on the turntable of structural member position adjusting mechanism 4;
Step 2: optical element 8 is mounted on to the clamping end of optical element clamping device;
Step 3: adjustment optical element clamping device three-dimensional guide rail translation mechanism and turntable so that optical element optical axis with
The benchmark optical axis that the interior focusing light pipe 9 of centering machine issues is consistent;
Step 4: measuring mechanism measures the position of optical element and mechanical-optical setup part, obtains relative positional relationship and feeds back to
Control system;
Step 5: control system according to positional relationship be calculated mechanical-optical setup part should theoretical position, control structure part
The three-dimensional guide rail translation mechanism of position adjusting mechanism 4 is completed to form the adjustment of theoretical position, then along moving to light on guide rail 10
Learn element;
Step 6: optical element being fixed on mechanical-optical setup part according to the optical axis mixed up, completes the dress of the optical element
It adjusts.
Step 2~step 6 is repeated, next optical element is installed, until the adjustment of optical element, is finally completed optical system
The adjustment for optical path of uniting.