CN103487929B - The method of adjustment of grenz ray and the compound telescope optic axis of extreme ultraviolet and focal plane - Google Patents
The method of adjustment of grenz ray and the compound telescope optic axis of extreme ultraviolet and focal plane Download PDFInfo
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- CN103487929B CN103487929B CN201310421130.8A CN201310421130A CN103487929B CN 103487929 B CN103487929 B CN 103487929B CN 201310421130 A CN201310421130 A CN 201310421130A CN 103487929 B CN103487929 B CN 103487929B
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Abstract
The method of adjustment of grenz ray and the compound telescope optic axis of extreme ultraviolet and focal plane relates to compound telescope field, the method comprises the steps: step one: use ZYGO interferometer debugging grazing incidence optics system, determine the optical axis of grazing incidence optics system and the position of focal plane; Step 2: align incident optical system and debug, determines the optical axis of normal incidence optical system and the position of focal plane; Step 3: by grazing incidence optics system together with normal incidence optical system assembling, is transferred to the optical axis of two optical systems and focal plane in the scope of error permission.The method by with grazing incidence optics system and coaxial and confocal of normal incidence optical system for means, realize grenz ray and the compound telescope of extreme ultraviolet uses same detector to the detection of two band images.
Description
Technical field
The present invention relates to compound telescope field, be specifically related to the method for adjustment of a kind of grenz ray and the compound telescope optic axis of extreme ultraviolet and focal plane.
Background technology
Grenz ray and the compound telescope of extreme ultraviolet are by grenz ray grazing incidence optics system and extreme ultraviolet normal incidence optics System's composition, and two optical systems have identical optical axis and focal plane, can with same detector to grenz ray and extreme ultraviolet waveband imaging.As shown in Figure 1, glancing incidence part adopts WolterI type structure to its structure, and normal incidence part adopts Cassegrain structure.In order to adopt same detector, needing adjustment grazing incidence optics system and normal incidence optical system, making it have identical optical axis and focal plane, realize using same detector to the detection of two band images.The present invention will propose the method for adjustment of this telescope optic axis a kind of and focal plane.
Summary of the invention
In order to solve problems of the prior art, the invention provides the method for adjustment of a kind of grenz ray and the compound telescope optic axis of extreme ultraviolet and focal plane, the method by with grazing incidence optics system and coaxial and confocal of normal incidence optical system for means, realize grenz ray and the compound telescope of extreme ultraviolet uses same detector to the detection of two band images.
The technical scheme that technical solution problem of the present invention adopts is as follows:
The present invention with glancing incidence system for reference, by align incidence system carry out adjustment make two parts optical system meet debug requirement.In order to reduce the amount that will adjust, will take primary mirror as benchmark in normal incidence part, only adjustment secondary mirror be relative to the inclination of the position of primary mirror, the bias of secondary mirror and secondary mirror.
The method of adjustment of grenz ray and the compound telescope optic axis of extreme ultraviolet and focal plane, the method comprises the steps:
Step one: the central ray that setting ZYGO interferometer sends directional light is the optical axis of system, go out placement one at glancing incidence system focal plane and accept screen, by accepting the center of the upper focus of screen, the optical axis of adjustment glancing incidence system overlaps with systematic optical axis, determines the position of the optical axis of glancing incidence system; The directional light sent by using ZYGO interferometer, through glancing incidence system, obtains interference image via the reflection of standard reflection mirror with reference light, by the position of Image Adjusting standard reflection mirror, determines the position of the focal plane of grazing incidence optics system;
Step 2: the spherical wave that ZYGO interferometer sends returns through the primary mirror reflects Hou Yuan road of normal incidence optical system, carry out interference with reference light and produce interference image, judged the inclination angle of primary mirror by interference image, the inclination angle of adjustment primary mirror, makes the optical axis of primary mirror overlap with systematic optical axis; According to design parameter installation secondary mirror and to secondary mirror coarse adjustment, the directional light sent by using ZYGO interferometer is through normal incidence system, via the interference image that the reflection of standard reflection mirror obtains with reference light, by the change of interferogram, judgement produces the source of error of imbalance, and by adjustment primary mirror and the centrifugal and inclination angle of time mirror spacing, secondary mirror, obtains best interference fringe, by the position of adjustment standard reflection mirror, determine the position of the focal plane of normal incidence optical system;
Step 3: by grazing incidence optics system together with normal incidence optical system assembling, is transferred to the optical axis of two optical systems and focal plane in the scope of error permission.
The invention has the beneficial effects as follows: resetting equipment is simple, operates easy.Separately debuging by glancing incidence with as the system of penetrating, avoiding two systems to interfere with each other when debuging, improve precision.
Accompanying drawing explanation
Grenz ray and the compound telescope configuration schematic diagram of extreme ultraviolet in Fig. 1 prior art.
Fig. 2 ZYGO interferometer measurement of the present invention grazing incidence optics system position of focal plane schematic diagram.
The position of focal plane schematic diagram of Fig. 3 ZYGO interferometer measurement of the present invention normal incidence system.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further details.
The first step, uses ZYGO interferometer debugging grazing incidence optics system, determines the optical axis of grazing incidence optics system and the position of focal plane.We send the axis of reference of central ray as system of directional light using ZYGO interferometer.Grazing incidence optics system is made up of the paraboloid of revolution of coaxial confocal and the hyperboloid of revolution, and parabola and hyperboloid processing are in same substrate, parabola and bi-curved coaxial confocal is ensured by optical manufacturing, the optical axis of glancing incidence system is the rotation axes of symmetry of lens barrel, the geometric center in the front end of lens barrel and lens barrel cross section, end is adjusted to close to systematic optical axis, the directional light that ZYGO interferometer sends through glancing incidence system finally at focal plane imaging, the receiving screen of an energy along the movement of systematic optical axis direction is placed at focal plane place, the movable change observing focus, if focus is size variation only, and focus center is constant all the time, then the optical axis of lens barrel with systematic optical axis close to parallel, otherwise, then not parallel.By adjustment, the optical axis of glancing incidence system is overlapped with axis of reference.Next, select F number to be less than the standard spherical reflector of optical system F number, carry out interference detection with ZYGO interferometer to system, the method for inspection is as Fig. 2.The directional light sent by ZYGO interferometer through standard spherical reflector, is again got back to interferometer and reference light through grazing incidence optics system and is launched and interfere, obtain interferogram after glancing incidence system.The front and back position of adjustment standard reflection mirror, when after interference pattern to zero order fringe, can record the position of focal plane of glancing incidence system.
Second step, aligns incident optical system and debugs, and determines the optical axis of normal incidence optical system and the position of focal plane.The beam center of the directional light sent with ZYGO interferometer is axis of reference.First the optical axis of primary mirror is adjusted, the spherical wave that ZYGO interferometer sends returns through the primary mirror reflects Hou Yuan road of normal incidence optical system, carry out interference with reference light and produce interference image, by the inclination angle of Image Adjusting primary mirror, the inclination angle of primary mirror is larger, and interference fringe is more, according to the inclination angle of the shape adjustments primary mirror of interference fringe, when interference fringe is zero order interference fringe, think primary mirror aclinal, and the optical axis of primary mirror overlaps with systematic optical axis; Again secondary mirror is installed, according to the spacing of primary mirror in design parameter and secondary mirror, secondary mirror is slightly debug.Select F number to be less than the standard spherical reflector of optical system F number, using ZYGO interferometer to align incidence system and carry out interference detection, by observing the change of interferogram, judging the source of alignment error.Reserved in error allowed band to aberration by adjustment primary mirror and the spacing of secondary mirror and the inclination angle of secondary mirror and centrifugal system wave aberration adjusted in design.More than align incidence system to debug, the position of focal plane of following use standard spherical reflector and ZYGO interferometer measurement normal incidence system, measuring method is as Fig. 3, the directional light that interferometer sends reflects through standard spherical reflector after normal incidence system again, again return through the former road of normal incidence system, interfere with reference light, produce interferogram.By adjustment standard reflection mirror, interferogram is adjusted to zero order fringe, the position of focal plane of normal incidence system can be recorded.
3rd step, by grazing incidence optics system together with normal incidence optical system assembling, is transferred to the optical axis of two optical systems and focal plane in the scope of error permission.First be the adjustment of systematic optical axis, the central ray of the directional light sent using light source is equally as the axis of reference of system, and the optical axis of adjustment grazing incidence optics system and normal incidence optical system, makes the optical axis of two systems overlap with axis of reference.Then, the normal incidence system recorded according to the first step and second step and the position of focal plane of glancing incidence system, draw the spacing of two system positions of focal plane.Structural parameters according to system can be calculated, under the condition that wavelength is identical, the depth of focus of glancing incidence system is less, the depth of focus of normal incidence system is larger, therefore using the position of focal plane of glancing incidence system as benchmark, make normal incidence system along optical axis direction translation, when the focal depth range of the focal depth range covering glancing incidence system of normal incidence system, think that the position of focal plane of two optical systems overlaps, complete the adjustment work of compound telescope optic axis and focal plane.
In the present embodiment, after the central shaft of adjustment glancing incidence system overlaps with axis of reference, we use standard spherical reflector and ZYGO interferometer to carry out interference to system and detect, after interferogram is adjusted to zero order fringe, measure the position of focal plane of glancing incidence system, recording system surfaces focal length is f=653mm, as Fig. 2.Measurement result is consistent in error allowed band with the focus design value of glancing incidence system, shows that glancing incidence systematic optical axis adjusts successfully.
The optical axis of standard reflection mirror adjustment normal incidence system primary mirror is used to overlap with axis of reference; Then secondary mirror is installed, uses standard spherical reflector and ZYGO interferometer to align incidence system and carry out interferences and detect, according to interference image adjustment primary mirror and secondary mirror spacing, secondary mirror inclination angle and centrifugal; Finally by the system wave aberration that records in conjunction with Zemax simulation result, display is debug result and can be met systemic resolution requirement.Measure the position of focal plane of normal incidence system, recording system focal plane to the distance on secondary mirror summit is L=576mm, as Fig. 3.
By glancing incidence system together with normal incidence system assembles, adjust two systematic optical axis and overlap.Again according to the spacing of glancing incidence lens barrel and normal incidence secondary mirror, show that there is the distance of about 7mm the position of focal plane of normal incidence system relative to the position of focal plane of glancing incidence system, the optical system depth of focus computing formula of blocking according to there being annular calculates, under phase co-wavelength, the depth of focus of normal incidence system is approximately 4 times of glancing incidence system depth of focus, using the position of focal plane of glancing incidence system as benchmark, normal incidence system is made to do translation along optical axis, translational movement is approximately 7mm, when the focal depth range of the focal depth range covering glancing incidence system of normal incidence system, can think that the position of focal plane of two optical systems overlaps in error allowed band.
Claims (4)
1. the method for adjustment of grenz ray and the compound telescope optic axis of extreme ultraviolet and focal plane, it is characterized in that, the method comprises the steps:
Step one: the central ray that setting ZYGO interferometer sends directional light is the optical axis of system, and glancing incidence part adopts WolterI type structure, and normal incidence part adopts Cassegrain structure; Place one at glancing incidence system focal plane place and accept screen, by accepting the center of the upper focus of screen, the optical axis of adjustment glancing incidence system overlaps with systematic optical axis, determines the position of the optical axis of glancing incidence system; The directional light sent by using ZYGO interferometer, through glancing incidence system, obtains interference image via the reflection of standard reflection mirror with reference light, by the position of Image Adjusting standard reflection mirror, determines the position of the focal plane of grazing incidence optics system;
Step 2: the spherical wave that ZYGO interferometer sends returns through the primary mirror reflects Hou Yuan road of normal incidence optical system, carry out interference with reference light and produce interference image, judged the inclination angle of primary mirror by interference image, the inclination angle of adjustment primary mirror, makes the optical axis of primary mirror overlap with systematic optical axis; According to design parameter installation secondary mirror and to secondary mirror coarse adjustment, the directional light sent by using ZYGO interferometer is through normal incidence system, via the interference image that the reflection of standard reflection mirror obtains with reference light, by the change of interferogram, judgement produces the source of error of imbalance, and by adjustment primary mirror and the centrifugal and inclination angle of time mirror spacing, secondary mirror, obtains best interference fringe, by the position of adjustment standard reflection mirror, determine the position of the focal plane of normal incidence optical system;
Step 3: by grazing incidence optics system together with normal incidence optical system assembling, is transferred to the optical axis of two optical systems and focal plane in the scope of error permission.
2. the method for adjustment of grenz ray as claimed in claim 1 and the compound telescope optic axis of extreme ultraviolet and focal plane, it is characterized in that, determine that the position of the optical axis of glancing incidence system is realized by following steps: the optical axis of glancing incidence system is the rotation axes of symmetry of lens barrel, the geometric center in the front end of lens barrel and lens barrel cross section, end is adjusted to close to systematic optical axis, the directional light that ZYGO interferometer sends through glancing incidence system finally at focal plane imaging, the receiving screen of an energy along the movement of systematic optical axis direction is placed at focal plane place, the movable change observing focus, if focus is size variation only, and focus center is constant all the time, then the optical axis of lens barrel with systematic optical axis close to parallel, otherwise, then not parallel.
3. the method for adjustment of grenz ray as claimed in claim 1 and the compound telescope optic axis of extreme ultraviolet and focal plane, it is characterized in that, the primary mirror optical axis of adjustment normal incidence optical system is realized by following steps: the spherical wave that ZYGO interferometer sends returns through the primary mirror reflects Hou Yuan road of normal incidence optical system, carry out interference with reference light and produce interference image, by the inclination angle of Image Adjusting primary mirror, the inclination angle of primary mirror is larger, interference fringe is more, according to the inclination angle of the shape adjustments primary mirror of interference fringe, when interference fringe is zero order interference fringe, think primary mirror aclinal, and the optical axis of primary mirror overlaps with systematic optical axis.
4. the method for adjustment of grenz ray as claimed in claim 1 and the compound telescope optic axis of extreme ultraviolet and focal plane, is characterized in that, described glancing incidence system is made up of the paraboloid of revolution of coaxial confocal and the hyperboloid of revolution, is fixed on same pedestal with optical axis.
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| CN107132652B (en) * | 2017-06-08 | 2019-06-11 | 同济大学 | The compact nested type plane orthogonal type structure of X-ray focusing telescope and design method |
| CN111006644A (en) * | 2019-12-26 | 2020-04-14 | 中国科学院长春光学精密机械与物理研究所 | Spatial solar X-ray and extreme ultraviolet dual-resolution imager |
| CN116699864B (en) * | 2023-07-31 | 2023-10-20 | 中国科学院长春光学精密机械与物理研究所 | Reference-free adjustment method, device, equipment and medium for space-based large optical system |
| CN117054053B (en) * | 2023-08-16 | 2024-03-12 | 同济大学 | Device and method for calibrating focal plane of reflecting telescope |
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|---|---|---|---|---|
| US4370750A (en) * | 1981-05-15 | 1983-01-25 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Extended range X-ray telescope |
| CN1477420A (en) * | 2002-08-21 | 2004-02-25 | 中国科学院长春光学精密机械与物理研 | Optical system of soft X-ray-extreme ultraviolet waveband combined imaging telescope |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4370750A (en) * | 1981-05-15 | 1983-01-25 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Extended range X-ray telescope |
| CN1477420A (en) * | 2002-08-21 | 2004-02-25 | 中国科学院长春光学精密机械与物理研 | Optical system of soft X-ray-extreme ultraviolet waveband combined imaging telescope |
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| 一种复合型空间软X射线——极紫外波段望远镜设计;陈波等;《光学技术》;20040331;第30卷(第2期);第242-244页 * |
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