CN104317030B - The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration - Google Patents
The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration Download PDFInfo
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- CN104317030B CN104317030B CN201410613532.2A CN201410613532A CN104317030B CN 104317030 B CN104317030 B CN 104317030B CN 201410613532 A CN201410613532 A CN 201410613532A CN 104317030 B CN104317030 B CN 104317030B
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- interval
- microscope group
- centrescope
- eyeglass
- measured
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration，Belong to the integrated mounting technology field of optical system，In order to solve the technical problem that interval measuring instrument optical axis adopts the method efficiency for testing repeatedly iteration convergence very low with the calibration steps of integrated platform rotating shaft in prior art，The Optical devices include centrescope detection head assembly、Interval measuring instrument measurement head、Interval microscope group to be measured and high accuracy air-float turntable，Centrescope detects head assembly、Interval measuring instrument measurement head and interval microscope group to be measured are coaxially disposed from top to bottom，Interval microscope group optical axis to be measured is overlapped with the rotating shaft of centrescope high accuracy air-float turntable，Detect in centrescope and auxiliary centering device is set between head assembly and interval microscope group to be measured，In auxiliary centering device, the microscope group of monitoring of eccentricity eyeglass and inclination monitoring eyeglass composition is arranged in four-dimensional adjustment frame，Interval measuring instrument measurement head is co-axially located at the lower end of the microscope group；It is quickly calibrated with objective lens optical axis that the Optical devices are particularly well-suited to tester optical axis.
Description
Technical field
The present invention relates to one kind is carried out when utilizing axial chromatic aberration to interval/thickness measuring instrument with measurand optical axis alignment
The Optical devices of quick auxiliary centering, belong to the integrated mounting technology field of optical system.
Background technology
The integrated assembling of high accuracy transmission type optical system, it is necessary to have sub-micrometer scale eyeglass is spaced measuring accuracy, must make
With contactless interference class testing instrument -- interval measuring instrument, and ensure the optical axis and part optical axis weight to be measured of interval measuring instrument
Close.Such interval measuring instrument adopts Michelson Interference Principle, using short-coherence light source, can realize the measurement essence of sub-micron
Degree.At present conventional way be by interval measuring instrument with it is high-precision fixed admire integrate use, interval measuring instrument is placed on
Below centrescope, as long as after in advance interval measuring instrument optical axis and the regulation of centrescope optical axis overlap, in whole integration testing process
In can complete the high precision measurement that each eyeglass is spaced without the need for the calibration that carry out above-mentioned two optical axis again.
The maximum measurement range of existing interval measuring instrument is optical length 600mm, and big NA transmission-type object lens, such as light
Projection objective is carved, object lens length reaches more than 1000mm, more than measurement range, in order to can in whole object lens integrating process
The interval measurement of eyeglass is realized, just interval measuring instrument must be placed on above object lens, in the continuous integrating process of object lens, interval
The measurement head of measuring instrument is only constantly raised, progressively can test whole object lens it is integrated when each eyeglass interval.In order to there is no harm in
Hinder centrescope measurement head centering test to be carried out to eyeglass, in the integrated centering process of eyeglass, need the measurement of interval measuring instrument
Head is removed from centrescope light path, after eyeglass centering is integrated, then is pacified the measurement head of interval measurement instrument by auxiliary mould
Dress is fixed on interval eyeglass to be measured, and after the optical axis to interval measuring instrument is calibrated with integrated platform rotating shaft, ability
Enter the high-acruracy survey of between-line spacing.
Interval measuring instrument optical axis is as follows with the main process of the calibration steps of integrated platform rotating shaft at present：It is parallel with high accuracy
Flat board is combined into optical centering device with high-precision small, and the normal of parallel flat and high-precision small optical axis are adjusted flat
OK, the then optical axis of calibration intervals measuring instrument optical axis and above-mentioned optical centering device so as to consistent.Using centrescope measurement head
Move up and down the confocal image of bead is found respectively with " opal " of flat board as testing above-mentioned two picture respectively by rotating centrescope
Deviation, the as inclination of interval measuring instrument and centrescope rotating shaft and offset, then by four-dimensional governor motion, adjust successively and incline
Tiltedly and eccentric error.As adjustment for angle of inclination can produce eccentric coupling, need to move repeatedly centrescope gauge head measurement bead with
A middle imago is surveyed at the center of flat reflective picture partially, often, and being required for turntable to rotate carries out a destination sample calculating in, is changed using this
For mode, progressively control interval measuring instrument optical axis makes which coaxial with integrated platform rotating shaft.Per an integrated eyeglass, interval measuring instrument
Optical axis is required for being calibrated with turntable rotating shaft, and this method efficiency for testing repeatedly iteration convergence is very low.Increased many works
Measure and prover time.
The content of the invention
The present invention is adopted with the calibration steps of integrated platform rotating shaft to solve interval measuring instrument optical axis in prior art
The very low technical problem of the method efficiency of iteration convergence is tested repeatedly, proposes that one kind carries out quick auxiliary centering using axial chromatic aberration
Optical devices.The Optical devices have simple structure, the features such as calibration efficiency is high, are particularly well-suited to tester optical axis and thing
Mirror optical axis it is quickly calibrated.
The scheme that the present invention solves above-mentioned technical problem is as follows：
The Optical devices of quick auxiliary centering, including centrescope detection head assembly, interval measurement are carried out using axial chromatic aberration
Instrument measurement head, interval microscope group to be measured and high accuracy air-float turntable, centrescope detection head assembly, interval measuring instrument measurement head and to be measured
Interval microscope group is coaxially disposed from top to bottom, and interval microscope group optical axis to be measured is overlapped with the rotating shaft of high accuracy air-float turntable, be it is characterized in that,
Detect in centrescope and auxiliary centering device is set between head assembly and interval microscope group to be measured, monitoring of eccentricity mirror in auxiliary centering device
The microscope group of piece and inclination monitoring eyeglass composition is arranged in four-dimensional adjustment frame, and it is fixed that interval measuring instrument measurement head is co-axially located at auxiliary
The lower end of the microscope group in center device.
Beneficial effects of the present invention：
Auxiliary centering Optical devices proposed by the present invention, which can quickly be realized interval measuring instrument optical axis and treat integrated object lens
Eccentric and inclined reflection picture only need to be adjusted to the center good with calibration and be overlapped, it is not necessary to be moved repeatedly by optical axis calibrator
Dynamic measurement head and repeatedly rotating table carry out the successive ignition of center bias testing, hence it is evident that improve centering efficiency.Due to not needing
Will using the machining accuracy for being used for monitoring in high accuracy parallel flat, therefore auxiliary centering Optical devices eccentric and inclined eyeglass
Ask and be significantly reduced, saved frock processing and manufacturing cost.
Description of the drawings
Fig. 1 is the Optical devices schematic diagram that the present invention carries out quick auxiliary centering using axial chromatic aberration.
Fig. 2 is auxiliary centering device schematic diagram of the present invention.
Center inclined schematic diagrames of the Fig. 3 for centrescope Computer display.
In figure：1st, centrescope detection head assembly, 11, the cross hair picture of white light source illumination, 12, switching light filter device,
121st, infrared light optical filter, 122, green light optical filter, 13, half-reflection and half-transmission spectroscope, 14, wide spectrum response CCD,
15th, collimation object microscope group, 16, optically focused microscope group, 2, auxiliary centering device, 21, monitoring of eccentricity eyeglass, 22, incline monitoring eyeglass, 23,
Four-dimensional adjusting bracket, 231, adjustment for angle of inclination, 232, eccentric adjustable mechanism, 3, interval measuring instrument measurement head, 4, interval mirror to be measured
Group, 41, microscope group on interval to be measured, 42, microscope group under interval to be measured, 5, high accuracy air-float turntable, 6, CCD monitor displays.
Specific embodiment
As shown in Figure 1, 2, the Optical devices of quick auxiliary centering, including centrescope detecting head group are carried out using axial chromatic aberration
Part 1, interval measuring instrument measurement head 3, interval microscope group 4 to be measured and high accuracy air-float turntable 5, centrescope detection head assembly 1, interval are surveyed
Amount instrument measurement head 3 and interval microscope group 4 to be measured are coaxially disposed from top to bottom, to be measured to be spaced 4 optical axis of microscope group and high accuracy air-float turntable 5
Rotating shaft overlap, centrescope detect head assembly 1 and it is to be measured interval microscope group 4 between arrange auxiliary centering device 2, auxiliary centering dress
The microscope group for putting monitoring of eccentricity eyeglass 21 and the inclination monitoring composition of eyeglass 22 in 2 is arranged in four-dimensional adjustment frame 23, interval measuring instrument
Measurement head 3 is co-axially located at the lower end of microscope group described in auxiliary centering device 2.
The Optical devices of quick auxiliary centering of the present invention, its by auxiliary centering device 2 with it is high-precision fixed admire match somebody with somebody
Close using to complete interval 4 high accuracy eyeglass interval measurement of microscope group to be measured.
Centrescope mainly detects head assembly 1 and high accuracy air-float turntable 5 comprising centrescope.
Auxiliary centering device 2 includes monitoring of eccentricity eyeglass 21 and inclines the microscope group of the monitoring composition of eyeglass 22, and the four-dimension is adjusted
Whole frame 23.The microscope group is arranged in four-dimensional adjustment frame 23.Interval measuring instrument measurement head 3 is co-axially located under the microscope group
End.
Monitoring of eccentricity eyeglass 21 is biconvex lens, for detecting bias, the plating infrared light of biconvex lens upper surface 211 increase it is anti-,
Green glow antireflective coating；Biconvex lens lower surface 212 plates green glow antireflective coating.It is concavees lens to incline monitoring eyeglass 22, for detecting
Incline, concavees lens upper surface 221 is concave surface, plates green glow antireflective coating；Concavees lens lower surface 222 is plane, plates green glow Anti-reflective coating
Layer.
The high accuracy of interval measuring instrument measurement head 3 and interval microscope group 4 to be measured can be rapidly completed using auxiliary centering device 2
Centering adjustment, to obtain high accuracy microscope group interval test result.Auxiliary centering device 2 is prior with interval measuring instrument measurement head 3
Adjust coaxial.Auxiliary centering device 2 is connected with interval microscope group 4 to be measured by screw.
As Figure 1-3,3 optical axis of control interval measuring instrument measurement head and interval mirror to be measured respectively are realized using axial chromatic aberration
The bias of 4 optical axises of group and inclination.Using centrescope be respectively completed in interval microscope group 4 to be measured under interval to be measured microscope group 42 and it is to be measured between
Every the centering of upper microscope group 41, show that described microscope group 4 optical axis in interval to be measured is overlapped with the rotating shaft of high accuracy air-float turntable 5.
In centrescope detection head assembly 1, the cross hair of white light source illumination is as 11 in switching light filter device 12
Infrared light optical filter 121 be only capable of making infrared light, infrared beam incide collimation through half-reflection and half-transmission spectroscope 13
Objective lens 15 generate collimated light beam, and collimated light beam produces convergent beam through optically focused microscope group 16 again, adjusts centrescope detecting head group
The relative altitude position of part 1 and auxiliary centering device 2 so that the focus of the convergent beam produced by optically focused microscope group 16 just with it is auxiliary
The summit of the biconvex lens upper surface 211 of monitoring of eccentricity eyeglass 21 in centring means 2 is helped to overlap, the reflection produced using the summit
As calibration goes out the central vision position of CCD 14, using the benchmark 65 adjusted as present invention centering.Centrescope detection is adjusted again
The relative altitude position of head assembly 1 and auxiliary centering device 2 so that the focus of the convergent beam produced by optically focused microscope group 16 is lucky
Overlap with the centre of sphere of the biconvex lens upper surface 211 of monitoring of eccentricity eyeglass 21 in auxiliary centering device 2, i.e., incident beam perpendicular to
The biconvex lens upper surface 211 of monitoring of eccentricity eyeglass 21, and there is reflection on a surface, reflected light sequentially passes through optically focused microscope group
16th, collimation object microscope group 15 and half-reflecting half mirror 13, finally converge on wide spectrum response CCD 14, respond CCD by wide spectrum
14 can show that auxiliary centering device 2 adjusts the offset size 61 of benchmark relative to centering on the display 6, adjust four-dimensional regulation
The eccentric adjustable mechanism 231 of frame 23, makes the offset 61 shown on display 6 minimum, now complete auxiliary centering device 2 with
The eccentric adjusting of 5 rotating shaft of centrescope high accuracy air-float turntable, that is, complete auxiliary centering device 2 with interval 4 optical axis of microscope group to be measured
Eccentric adjusting, namely complete the eccentric adjusting of 3 optical axis of interval measuring instrument gauge head and interval 4 optical axis of microscope group to be measured.
Optical filter is switched to and is only capable of passing through green glow, the crosshair of white light source illumination is as 11 through changeable optical filtering
Green light optical filter 122 in sheet devices 12 is only capable of making green light, green beam incide standard through half-reflecting half mirror 13
Straight objective lens 15, then convergent beam is produced through optically focused microscope group 16, by monitoring of eccentricity mirror in appropriate design auxiliary centering device 2
Piece 21 and the interval for inclining monitoring eyeglass 22 so that in aforementioned infrared beam and the biconvex lens upper surface of monitoring of eccentricity eyeglass 21
211 it is confocal when, due to the presence of axial chromatic aberration, be not required to move centrescope detection head assembly 1, green beam can be made to sequentially pass through partially
The biconvex lens upper surface 211 of heart monitoring eyeglass 21 and the biconvex lens following table of the plating green glow anti-reflection film of monitoring of eccentricity eyeglass 21
Face 212, and the recessed plano lens upper surface 221 of the plating green glow anti-reflection film of monitoring eyeglass 22 is inclined, finally impinge perpendicularly on inclination
The recessed plano lens lower surface 222 of the plating green glow Anti-reflective coating of monitoring eyeglass 22, green glow through reflection, are passed through successively and are inclined on the surface
The recessed plano lens upper surface 221 of monitoring eyeglass 22, monitoring of eccentricity eyeglass 21, optically focused microscope group 16, collimation object microscope group 15 and half anti-half
Lens 13, finally converge on wide spectrum response CCD 14, respond CCD 14 by wide spectrum and can show auxiliary on the display 6
The size 64 of 2 tilt quantity of centring means, adjusts the adjustment for angle of inclination 232 of four-dimensional adjusting bracket 23, and make to show on display 6 is auxiliary
Help 2 tilt quantity of centring means minimum, complete the tilt adjustment of auxiliary centering device 2 and 5 rotating shaft of centrescope high accuracy air-float turntable,
Complete auxiliary centering device 2 and it is to be measured interval 4 optical axis of microscope group tilt adjustment, that is, complete 3 optical axis of interval measuring instrument gauge head with
The tilt adjustment of interval 4 optical axis of microscope group to be measured.
Claims (4)
1. the Optical devices of quick auxiliary centering, including centrescope detection head assembly (1), interval measurement are carried out using axial chromatic aberration
Instrument measurement head (3), interval microscope group (4) to be measured and high accuracy air-float turntable (5), centrescope detection head assembly (1), interval measuring instrument
Measurement head (3) and interval microscope group (4) to be measured are coaxially disposed from top to bottom, and interval microscope group (4) optical axis to be measured is turned with high accuracy air supporting
The rotating shaft of platform (5) overlaps, and it is characterized in that, it is fixed between centrescope detection head assembly (1) and interval microscope group (4) to be measured to arrange auxiliary
Center device (2), the microscope group that monitoring of eccentricity eyeglass (21) and inclination monitoring eyeglass (22) are constituted in auxiliary centering device (2) are arranged on
On four-dimensional adjustment frame (23), interval measuring instrument measurement head (3) is co-axially located under the microscope group in auxiliary centering device (2)
End.
2. utilization axial chromatic aberration according to claim 1 carries out the Optical devices of quick auxiliary centering, it is characterised in that fixed
In admiring detection head assembly (1), switching light filter device (12) can switch two spectral coverage optical filters, respectively infrared band
And green light band, it is capable of achieving white light source is produced infrared light and green glow respectively.
3. utilization axial chromatic aberration according to claim 1 carries out the Optical devices of quick auxiliary centering, it is characterised in that partially
Heart monitoring eyeglass (21) is biconvex lens, and biconvex lens upper surface (211) plate infrared light and increase anti-and green glow anti-reflection film, biconvex lens
Lower surface (212) plates green glow anti-reflection film；It is recessed plano lens to incline monitoring eyeglass (22), and recessed plano lens upper surface (221) is concave surface,
Plating green glow anti-reflection film；Recessed plano lens lower surface (222) is plane, plates green glow Anti-reflective coating.
4. utilization axial chromatic aberration according to claim 3 carries out the Optical devices of quick auxiliary centering, it is characterised in that partially
The heart is monitored eyeglass (21) and with the spaced relationship for inclining monitoring eyeglass (22) is：During infrared photo measure, monitoring of eccentricity eyeglass (21)
Biconvex lens upper surface (211) the convex surface centre of sphere is confocal with centrescope measuring beam, it is not necessary to mobile centrescope detection head assembly (1)
Position, when switching to green glow measurement, that is, realizes centrescope measuring beam perpendicular to the recessed plano lens following table of inclination monitoring eyeglass (22)
The plane in face (222).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410613532.2A CN104317030B (en) | 2014-10-31 | 2014-10-31 | The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration |
| PCT/CN2015/000679 WO2016065731A1 (en) | 2014-10-31 | 2015-10-08 | Optical device for quick auxiliary centering utilizing axial chromatic aberration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410613532.2A CN104317030B (en) | 2014-10-31 | 2014-10-31 | The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration |
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| Publication Number | Publication Date |
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| CN104317030A CN104317030A (en) | 2015-01-28 |
| CN104317030B true CN104317030B (en) | 2017-04-05 |
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| WO (1) | WO2016065731A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104317030B (en) * | 2014-10-31 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration |
| WO2018119730A1 (en) * | 2016-12-28 | 2018-07-05 | 中国科学院长春光学精密机械与物理研究所 | Optical integrated testing platform |
| CN108801178B (en) * | 2017-05-04 | 2020-07-10 | 北京理工大学 | Differential confocal auto-collimation center deviation and curvature radius measuring method and device |
| CN109916344A (en) * | 2019-04-08 | 2019-06-21 | 天津中精微仪器设备有限公司 | Air-flotation type link rod measuring appliance |
| CN110561540B (en) * | 2019-08-23 | 2024-04-05 | 中国科学院西安光学精密机械研究所 | Adjusting device for optical centering instrument |
| CN111077627A (en) * | 2019-12-27 | 2020-04-28 | 焦作天裕精密光学有限公司 | Rapid centering gluing device and method for micro lens |
| CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
| CN112697054A (en) * | 2020-12-10 | 2021-04-23 | 无锡鑫巨宏智能科技有限公司 | Microlens rise measuring device and method |
| TWI777876B (en) * | 2021-12-21 | 2022-09-11 | 亞泰影像科技股份有限公司 | Lens centering module and its centering method, scanning device |
| CN114199730B (en) * | 2022-02-15 | 2022-05-27 | 中国科学院大气物理研究所 | Airtight packaging type multidirectional adjusting structure for laser calibration |
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| JPH04208514A (en) * | 1990-11-30 | 1992-07-30 | Toshiba Corp | Device and method of determining optical axis of alignment optical system |
| DE4433763A1 (en) * | 1994-09-22 | 1996-05-23 | Hell Ag Linotype | Beam splitting device |
| TWI264523B (en) * | 2005-09-06 | 2006-10-21 | Instr Technology Res Ct | Method and instrument for measuring decenter and tilt of lens by interferometer |
| CN101226344B (en) * | 2008-01-31 | 2010-06-02 | 上海微电子装备有限公司 | Apparatus and method for measuring optical system parameter |
| KR101034183B1 (en) * | 2008-10-14 | 2011-05-12 | 재영솔루텍 주식회사 | Apparatus and method for measuring displacement and tilt of lens module |
| CN103064195B (en) * | 2011-12-17 | 2015-01-07 | 中国航空工业集团公司洛阳电光设备研究所 | Adjustment method of non-coaxial optical system |
| CN102538689B (en) * | 2011-12-29 | 2014-02-12 | 中国科学院上海光学精密机械研究所 | Centering and locating device of optical system and using method thereof |
| US20150362718A1 (en) * | 2013-01-31 | 2015-12-17 | Danmarks Tekniske Universitet | Infrared up-conversion telescope |
| CN203365782U (en) * | 2013-06-27 | 2013-12-25 | 中国科学院西安光学精密机械研究所 | Pyramid prism horizontal type optical axis fixing system |
| CN203811868U (en) * | 2014-01-11 | 2014-09-03 | 长春理工大学光电信息学院 | Photoelectric centering instrument using PSD |
| CN104317030B (en) * | 2014-10-31 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | The Optical devices of quick auxiliary centering are carried out using axial chromatic aberration |
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- 2014-10-31 CN CN201410613532.2A patent/CN104317030B/en active Active
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| CN104317030A (en) | 2015-01-28 |
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Effective date of registration: 20190829 Address after: Room 601-10, 6th floor, No. 2, Jingyuan Beijie, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |
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