CN109029935A - The spacing bias and wave front aberration integrated measurer of optical lens - Google Patents
The spacing bias and wave front aberration integrated measurer of optical lens Download PDFInfo
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- CN109029935A CN109029935A CN201811005917.5A CN201811005917A CN109029935A CN 109029935 A CN109029935 A CN 109029935A CN 201811005917 A CN201811005917 A CN 201811005917A CN 109029935 A CN109029935 A CN 109029935A
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention discloses a kind of spacing bias of optical lens and wave front aberration integrated measurers, comprising: detection platform, the air-float turntable being arranged in the detection platform, the four-dimensional adjustment frame being set on the air-float turntable, wave aberration measurement module, OCT measurement module and mirror face eccentric measurement module.The present invention realizes eccentric, three measurement modules of spacing and wave aberration and is blended in a test platform, realize the integrated testing that single set equipment completes eccentric, interval in optical lens adjustment detection process, wave front aberration, single can complete measurement of correlation to optical axis, mobile tested camera lens is avoided, and then repeated multiple times looks for systematic optical axis bring error；The present invention realizes the leap that online comprehensive detection is detected from traditional substep, reduces equipment cost, reduces cumulative errors, improves detection efficiency and precision.
Description
Technical field
The present invention relates to field of optical measurements, in particular to spacing bias and the wave front aberration integration of a kind of optical lens
Measuring device.
Background technique
The adjustment process of traditional optical lens is, after the completion of machining eyeglass, enters the assembly inspection of camera lens multiple step format
Flow gauge, it is necessary first to which centrescope guidance adjustment eccentricity of glasses lens makes itself and theoretical optical axis coincidence, eyeglass is then removed centrescope
Objective table control the airspace between eyeglass, and so on distance measurement instrument；The instrument of image quality evaluation is finally used,
Carry out the image quality measurement of entire camera lens.But due to needing three equipment, so being distribution off-line measurement between three, no
Only detection efficiency is low, but also introduces cumulative errors, brings spherical aberration, color difference, defocus, multiplying power variation, visual field offset etc., reduces
Image quality.Therefore, the present invention integrates three kinds of detection methods, develops the spacing bias and wave front aberration one of a kind of optical lens
Change measuring device.
Patent " optical surface center-spaced contactless measurement and measuring device in camera lens ", is only able to achieve mirror
The optical surface center-spaced non-contact measurement of head is not capable of measuring eccentric and wave front aberration.Paper " is based on Hartmann-summer
The wave-front detection method research of gram sensor " is only able to achieve the wave front aberration detection of camera lens.Paper is " based on mirror surface interval in
The research of the optical lens assistant resetting equipment of heart deviation measurement ", can not achieve the measurement of wave front aberration.
These devices can only all realize the measurement of part of function.Optical frames is measured respectively on multiple and different platforms
Centre deviation, mirror surface interval and the wave front aberration of head have the following disadvantages, first, tested camera lens is moved to from a measuring table
Another measuring table must readjust mechanical support platform every time, to reduce optical lens adjustment efficiency；Second,
In measurement process, using different reference axis, optical lens adjustment precision can be reduced；Third, in measuring device, there are identical
Functional module, separately measure, increase hardware cost.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing a kind of optical lens
Spacing bias and wave front aberration integrated measurer.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: a kind of the spacing bias and wave of optical lens
Preceding aberration integrated measurer, comprising: detection platform, the air-float turntable being arranged in the detection platform, be set to it is described
Four-dimensional adjustment frame, wave aberration measurement module, OCT measurement module on air-float turntable and can moving up and down is set to described four-dimensional adjust
Mirror face eccentric measurement module above whole frame；
Wherein, the OCT measurement integrated assembly and the wave aberration measurement module integration in the OCT measurement module
It is set to the lower section of the detection platform；
Wherein, the wave aberration measurement module and OCT measurement integrated assembly pass through converging lenses realization measuring beam conjunction beam.
Preferably, it is provided with column in the detection platform, is provided on the column for driving the mirror surface inclined
The high-precision electric translation stage that heart measurement module moves up and down.
Preferably, misalignment measurement module mounting frame, the misalignment measurement are provided on the high-precision electric translation stage
Runner is additionally provided on module mounting frame；Wave aberration reflecting mirror and multiple misalignment measurement object lens are provided on the runner.
Preferably, the OCT measurement integrated assembly and the wave aberration measurement module pass through mounting box integrated setting
In the lower section of the detection platform, the converging lenses are set in the mounting box by converging lenses mounting rack, the converging lenses
Lower section is additionally provided with OCT and integrates reflecting mirror.
Preferably, the OCT measurement integrated assembly includes incident lens barrel and the setting that the converging lenses side is arranged in
The measurement light of lens barrel regulating device on the incident lens barrel, the OCT measurement integrated assembly is incident on institute through incident lens barrel
It states OCT to integrate on reflecting mirror, transmits the converging lenses again after OCT integrates reflecting mirror reflection, be irradiated in the four-dimensional tune
On camera lens to be detected on whole frame.
Preferably, the other side of the converging lenses is additionally provided with beam expanding lens, the measurement light of the wave aberration measurement module
It is irradiated on the converging lenses after transmiting the beam expanding lens, then is reflexed on the four-dimensional adjustment frame by the converging lenses
It on camera lens to be detected, then is irradiated on the wave aberration reflecting mirror above camera lens to be detected, and reflects the road Hou Yanyuan through it and return
The wave aberration detector being back in the wave aberration measurement module.
Preferably, multiple mounting holes are provided on the runner, the wave aberration reflecting mirror passes through installation lens barrel setting
In the mounting hole；
Installation inner cylinder is provided in the installation lens barrel, the wave aberration reflecting mirror is arranged in the installation inner cylinder, institute
It states installation inner cylinder to connect by the screw in multiple connected units being arranged on its bottom periphery with the installation lens barrel, the company
Multiple jackscrews are additionally provided on consecutive.
Preferably, the mounting groove for accommodating the wave aberration reflecting mirror is provided on the inner wall of the installation inner cylinder,
It is additionally provided with the baffle for supporting patch with the bottom surface of the wave aberration reflecting mirror in the installation inner cylinder, is set in the installation lens barrel
It is equipped with the pressure ring of the upper surface for compressing the installation inner cylinder.
Preferably, the two sides of the mounting box are additionally provided with apparatus for adjusting position.
It preferably, further include the pedestal, electrically-controlled component and display for being used to support the detection platform, the detection is flat
Platform is marble vibration-isolating platform.
The present invention is include at least the following beneficial effects:
1. the present invention switches to reflecting mirror by runner, wave-front optical aberration measurement is realized；
2. the present invention realizes that wave front aberration and distance measurement close beam by converging lenses, integrated common platform measurement dress is realized
It sets；
3. the present invention realizes eccentric, three measurement modules of spacing and wave aberration and is blended in a test platform, realize
Single set equipment completes the integrated testing at eccentric, interval in optical lens adjustment detection process, wave front aberration, single to optical axis just
Measurement of correlation can be completed, mobile tested camera lens is avoided, and then repeated multiple times looks for systematic optical axis bring error；
The invention can avoid cumulative errors brought by eccentric in conventional method, interval, wave front aberration substep off-line measurement,
The drawbacks such as spherical aberration, color difference, defocus, multiplying power variation, visual field offset, image quality be low, realize and detect from traditional substep
The leap of line generalization detection, reduces equipment cost, reduces cumulative errors, improve detection efficiency and precision.
Detailed description of the invention
Fig. 1 is the spacing bias of optical lens of the invention and the structural schematic diagram of wave front aberration integrated measurer；
Fig. 2 is the spacing bias of optical lens of the invention and the structural schematic diagram of wave front aberration integrated measurer；
Fig. 3 is the partial structural diagram of mounting box of the invention；
Fig. 4 is the cross-sectional view of mounting box of the invention；
Fig. 5 is the structural schematic diagram of installation lens barrel of the invention；
Fig. 6 is the cross-sectional view of installation lens barrel of the invention；
Fig. 7 is the structural schematic diagram of runner of the invention.
Description of symbols:
1-detection platform；2-air-float turntables；3-four-dimensional adjustment frames；4-wave aberration measurement modules；5-OCT measure mould
Block；6-mirror face eccentric measurement modules；7-mounting boxs；8-converging lenses；9-tested camera lenses；10-columns；11-high precision electros
Dynamic translation stage；12-misalignment measurement module mounting frames；13-runners；14-wave aberration reflecting mirrors；15-misalignment measurement object lens；
16-pedestals；17-electrically-controlled components；18-displays；50-OCT measure integrated assembly；51-incident lens barrels；52-lens barrel tune
Regulating device；70-OCT integrate reflecting mirror；71-beam expanding lens；72-apparatus for adjusting position；130-mounting holes；131-installation mirrors
Cylinder；132-installation inner cylinders；133-connected units；134-screws；135-jackscrews；136-baffles；137-pressure rings；138-peaces
Fill end.
Specific embodiment
The present invention will be further described in detail below with reference to the embodiments, to enable those skilled in the art referring to specification
Text can be implemented accordingly.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein are not precluded one or more
The presence or addition of a other elements or combinations thereof.
As shown in figs. 1-7, the spacing bias and wave front aberration integrated measurer of a kind of optical lens of the present embodiment,
It include: detection platform 1, the air-float turntable being arranged in detection platform 12, four-dimensional adjustment frame 3, the wave being set on air-float turntable 2
Aberration measurement module 4, can move up and down the mirror face eccentric measurement module for being set to four-dimensional 3 top of adjustment frame at OCT measurement module 5
6, the pedestal 16, electrically-controlled component 17 and display 18 of detection platform 1 are used to support, wherein detection platform 1 be preferably marble every
Shake platform.
Wherein, the OCT measurement integrated assembly 50 in OCT measurement module 5 and 4 integration of wave aberration measurement module are arranged
In the lower section of detection platform 1；OCT measurement module 5 further includes OCT reference arm, OCT for carrying out mirror surface center interval measurement
Optical interference circuit etc..The principle that OCT carries out mirror surface center interval measurement can refer to patent " optics table in CN102494623B- camera lens
Face center-spaced contactless measurement and measuring device ".
Wherein, wave aberration measurement module 4 and OCT measurement integrated assembly 50 pass through the realization measuring beam conjunction beam of converging lenses 8.
In one embodiment, it is provided with column 10 in detection platform 1, is provided on column 10 for driving mirror face eccentric
The high-precision electric translation stage 11 that measurement module 6 moves up and down.Misalignment measurement module is provided on high-precision electric translation stage 11
Mounting rack 12 is additionally provided with runner 13 on misalignment measurement module mounting frame 12；14 He of wave aberration reflecting mirror is provided on runner 13
Multiple misalignment measurement object lens 15.Runner 13 is for switching using suitable misalignment measurement object lens 15 or carrying out wave aberration measurement
When switching use wave aberration reflecting mirror 14.
When equipment works, tested camera lens 9 (eyeglass) is placed on four-dimensional adjustment platform, each by adjusting four-dimension adjustment platform
Knob is adjusted, so that the mechanical axis of camera lens (eyeglass) is overlapped with 2 shaft of air-float turntable (systematic optical axis).Mirror face eccentric measurement module
6 are placed in high-precision electric translation stage 11, switch suitable misalignment measurement object lens 15 by rotating wheel 13, pass through high-precision electric
Translation stage 11 adjusts 6 height and position of mirror face eccentric measurement module, realizes by adjusting itself focal length of mirror face eccentric measurement module 6 poly-
Coke, to complete the measurement of mirror face eccentric；Then mirror surface center interval distance measurement is carried out by OCT measurement module 5, completes mirror
After group adjustment, object lens runner 13 is rotated, the measuring standard reflection mirror of wave aberration is switched in right above tested camera lens 9,
Carry out wave aberration detection.
The device belongs to adjustment measurement integrated detection system, when carrying out object lens assembly, first by align measurement head light
Axis is aligned with accurate 2 shaft of air-float turntable, and measures the centre deviation of lens, and adjustment lens position is until centering error of lens quilt
Control is in the margin of tolerance；Each optical surface interval inside camera lens is measured using OCT measurement module 5 later, adjustment lens are axial
Position, until lens separation control errors are in the margin of tolerance.Carry out precision iterative repeatedly, until centering error of lens and
The adjustment of the piece lens is then completed in the margin of tolerance in mirror surface interval.Object lens runner 13 is rotated later, carries out system wavefront picture
Difference measurements.
And wherein, 6 optical path of mirror face eccentric measurement module and reference axis be must assure that when 6 adjustment of mirror face eccentric measurement module
(2 central axis of air-float turntable) alignment.It must assure that wave aberration and middle heart septum are surveyed when wave aberration and OCT 5 adjustment of measurement module
Amount optical path is aligned with reference axis (2 central axis of air-float turntable).That is between mirror face eccentric measurement, wave aberration measurement, center
It is required to guarantee its test macro optical axis and air floating table central axis every measurement, is tested 9 optical axis alignment of camera lens.
In one embodiment, referring to Fig. 3-4, OCT measurement integrated assembly 50 and wave aberration measurement module 4 pass through mounting box
7 integrated settings are set in mounting box 7 in the lower section of detection platform 1, converging lenses 8 by 8 mounting rack of converging lenses, converging lenses 8
Lower section is additionally provided with OCT and integrates reflecting mirror 70；
Further, it includes that the incident lens barrel 51 that 8 side of converging lenses is arranged in and setting are entering that OCT, which measures integrated assembly 50,
The lens barrel regulating device 52 on lens barrel 51 is penetrated, the measurement light of OCT measurement integrated assembly 50 is incident on OCT integration through incident lens barrel 51
It on reflecting mirror 70, is integrated after reflecting mirror 70 reflects through OCT and transmits converging lenses 8 again, be irradiated to be checked on four-dimensional adjustment frame 3
On the camera lens of survey, to carry out mirror surface distance measurement.
Further, the other side of converging lenses 8 is additionally provided with beam expanding lens 71, the measurement light transmission of wave aberration measurement module 4
It is irradiated to after beam expanding lens 71 on converging lenses 8, then is reflexed on the camera lens to be detected on four-dimensional adjustment frame 3 by converging lenses 8,
Be irradiated on the wave aberration reflecting mirror 14 on the runner 13 above camera lens to be detected again, and through its reflection after along backtracking extremely
Wave aberration detector in wave aberration measurement module, to carry out wave aberration measurement.
Further, the two sides of mounting box 7 are additionally provided with apparatus for adjusting position 72, for realizing X, the translation tune of Y-direction
It saves and adjusts (using 2 central axis of air-float turntable as the Z-direction of reference) around the rotation of X, Y-axis.
In one embodiment, referring to Fig. 5-7, multiple mounting holes 130 are provided on runner 13, wave aberration reflecting mirror 14 is logical
Installation lens barrel 131 is crossed to be arranged in mounting hole 130；The installation for being inserted into mounting hole 130 is provided on installation lens barrel 131
End 138.
Further, it installs and is provided with installation inner cylinder 132 in lens barrel 131, the setting of wave aberration reflecting mirror 14 is in installation inner cylinder
In 132, installation inner cylinder 132 passes through the screw 134 and installation lens barrel in multiple connected units 133 being arranged on its bottom periphery
131 connect, and are additionally provided with multiple jackscrews 135 in connected unit 133.It is screwed by screw 134 (drawing) and unscrewing for jackscrew 135 (top)
The adjusting of 14 mirror angle of wave aberration reflecting mirror can be realized.
Further, the mounting groove being provided on the inner wall of inner cylinder 132 for accommodating wave aberration reflecting mirror 14, installation are installed
It is additionally provided with the baffle 136 for supporting patch with the bottom surface of wave aberration reflecting mirror 14 in inner cylinder 132, installs and is provided in lens barrel 131
For compressing the pressure ring 137 of the upper surface of installation inner cylinder 132.When installation, wave aberration reflecting mirror 14 is fitted to installation inner cylinder
It in 132 mounting groove, and is compressed by the baffle 136 of installation 132 bottom of inner cylinder, installation inner cylinder 132 is then installed on installation
In lens barrel 131, and screw 134 and jackscrew 135 are adjusted, then pressure ring 137 is installed, installation inner cylinder 132 is compressed.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details.
Claims (10)
1. the spacing bias and wave front aberration integrated measurer of a kind of optical lens characterized by comprising detection is flat
Platform, the air-float turntable being arranged in the detection platform, the four-dimensional adjustment frame being set on the air-float turntable, wave aberration measurement
Module, OCT measurement module and can moving up and down are set to the mirror face eccentric measurement module above the four-dimensional adjustment frame；
Wherein, the OCT measurement integrated assembly in the OCT measurement module and the wave aberration measurement module integration are arranged
In the lower section of the detection platform；
Wherein, the wave aberration measurement module and OCT measurement integrated assembly pass through converging lenses realization measuring beam conjunction beam.
2. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 1 exist
In being provided with column in the detection platform, be provided on the column for driving the mirror face eccentric measurement module or more
Mobile high-precision electric translation stage.
3. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 2 exist
In being provided with misalignment measurement module mounting frame on the high-precision electric translation stage, on the misalignment measurement module mounting frame also
It is provided with runner；Wave aberration reflecting mirror and multiple misalignment measurement object lens are provided on the runner.
4. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 1 exist
In the OCT measurement integrated assembly and the wave aberration measurement module pass through mounting box integrated setting in the detection platform
Lower section, the converging lenses are set in the mounting box by converging lenses mounting rack, are additionally provided with OCT below the converging lenses
Integrate reflecting mirror.
5. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 4 exist
In the OCT measurement integrated assembly includes the incident lens barrel that the converging lenses side is arranged in and setting in the incident lens barrel
On lens barrel regulating device, the measurement light of OCT measurement integrated assembly, which is incident on the OCT through incident lens barrel, integrates reflecting mirror
On, the converging lenses are transmitted again after OCT integrates reflecting mirror reflection, are irradiated to be detected on the four-dimensional adjustment frame
On camera lens.
6. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 5 exist
In the other side of the converging lenses is additionally provided with beam expanding lens, beam expanding lens described in the measurement light transmission of the wave aberration measurement module
After be irradiated on the converging lenses, then reflex to the camera lens to be detected on the four-dimensional adjustment frame by the converging lenses
On.
7. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 3 exist
In, be provided with multiple mounting holes on the runner, the wave aberration reflecting mirror by the setting of installation lens barrel in the mounting hole；
Installation inner cylinder is provided in the installation lens barrel, the wave aberration reflecting mirror is arranged in the installation inner cylinder, the peace
Dress inner cylinder is connect by the screw in multiple connected units being arranged on its bottom periphery with the installation lens barrel, the connected unit
On be additionally provided with multiple jackscrews.
8. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 7 exist
In mounting groove for accommodating the wave aberration reflecting mirror being provided on the inner wall of the installation inner cylinder, in the installation inner cylinder
It is additionally provided with the baffle for supporting patch with the bottom surface of the wave aberration reflecting mirror, is provided in the installation lens barrel for compressing
State the pressure ring of the upper surface of installation inner cylinder.
9. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 6 exist
In the two sides of the mounting box are additionally provided with apparatus for adjusting position.
10. the spacing bias and wave front aberration integrated measurer, feature of optical lens according to claim 1 exist
In further including the pedestal, electrically-controlled component and display for being used to support the detection platform, the detection platform is marble vibration isolation
Platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811005917.5A CN109029935B (en) | 2018-08-30 | 2018-08-30 | Integrated measuring device for distance decentration and wave front aberration of optical lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811005917.5A CN109029935B (en) | 2018-08-30 | 2018-08-30 | Integrated measuring device for distance decentration and wave front aberration of optical lens |
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| Publication Number | Publication Date |
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| CN109029935A true CN109029935A (en) | 2018-12-18 |
| CN109029935B CN109029935B (en) | 2024-02-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811005917.5A Active CN109029935B (en) | 2018-08-30 | 2018-08-30 | Integrated measuring device for distance decentration and wave front aberration of optical lens |
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| CN110657957A (en) * | 2019-09-23 | 2020-01-07 | 程宏 | Inclined cylindrical lens eccentricity measuring instrument |
| CN111044259A (en) * | 2019-12-12 | 2020-04-21 | 中国科学院苏州生物医学工程技术研究所 | Distance, eccentricity and wavefront aberration integrated measuring system of optical lens |
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| CN109029935B (en) | 2024-02-27 |
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