CN117405358B - Separated optical lens eccentric instrument - Google Patents
Separated optical lens eccentric instrument Download PDFInfo
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- CN117405358B CN117405358B CN202311095363.3A CN202311095363A CN117405358B CN 117405358 B CN117405358 B CN 117405358B CN 202311095363 A CN202311095363 A CN 202311095363A CN 117405358 B CN117405358 B CN 117405358B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 20
- 238000009434 installation Methods 0.000 claims description 7
- 238000005286 illumination Methods 0.000 claims 1
- 210000001503 joint Anatomy 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
- G01M11/0214—Details of devices holding the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention discloses a separated optical lens eccentric instrument, which comprises a centering jig and a pyramid prism, wherein the centering jig is internally used for placing a lens to be detected, an adjustable lens, a cross reticle and a light source are sequentially arranged at the bottom of the centering jig from top to bottom, a positive lens, a negative lens and a cube beam splitter prism are sequentially arranged above the centering jig from bottom to top, the light source irradiates the cross reticle and emits cross light through the cross reticle, the cross light changes a converging angle to the lens to be detected through the adjustable lens, the lens to be detected forms converging light which becomes tiny parallel light after passing through the negative lens and is transmitted or reflected to the pyramid prism, and the pyramid prism reflects the parallel light back to the cube beam splitter prism and is transmitted or reflected to a CCD or an eyepiece. The invention can effectively increase the length of the light path and greatly improve the precision.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a separated optical lens eccentric instrument.
Background
In an optical system, a lens decentration error is an important optical index, which affects the coaxiality of the optical system, so that decentration aberration is generated, and the imaging quality is affected. The method for detecting the center deviation error of the lens by an optical method mainly comprises a transmission type and a reflection type, wherein the reflection type detects the inclination degree of the surface of the lens, and the transmission type detects the deviation degree of light rays from a theoretical emergent direction after passing through the lens.
The existing light path of the main body of the transmission type eccentric instrument is as follows: the light irradiates on the cross reticle, emits cross light, converges the light through the adjustable lens, passes through the detected lens to form a cross real image above, and the real image is observed by a microscope. The microscope is internally provided with a scale plate, and the human eye observes imaging and the position of the imaging on the scale plate through an ocular lens of the microscope. Or the scale plate and the ocular lens are replaced by CCD and are displayed by a display.
When the lens to be detected is rotated, if the lens has a bias error, the cross image formed will move. The lens rotates for one circle, the center of the cross image rotates a circle on the scale plate, the diameter 2C of the circle is read on the scale plate, and the radius of the circle is C. The radius C of the circle is divided by the distance L from the measured lens to the microscope, and the transmitted eccentric radian value of the measured lens is obtained. The longer the distance L, the higher the grid accuracy; the shorter the distance L, the lower the grid accuracy.
The greatest defect of the eccentric instrument with the structure is that the cross image seen by the microscope with a long distance L is thick when the focal length of the lens is small, and the position of the cross image cannot be accurately determined. The cross image can be thinned only by shortening the distance L, but the grid value precision is low, and the eccentric error measurement with higher precision requirement cannot be realized.
Disclosure of Invention
The invention aims to solve the technical problem of providing a separated optical lens eccentric instrument, which can effectively increase the length of an optical path and greatly improve the precision.
In order to solve the technical problems, the invention provides a separated optical lens eccentric instrument which comprises a centering jig and a pyramid prism, wherein the centering jig is internally used for placing a lens to be detected, an adjustable lens, a cross reticle and a light source are sequentially arranged at the bottom of the centering jig from top to bottom, a positive lens, a negative lens and a cube beam splitter prism are sequentially arranged above the centering jig from bottom to top, the light source irradiates the cross reticle and emits cross light through the cross reticle, the cross light changes a converging angle to the lens to be detected through the adjustable lens, the lens to be detected forms converging light into tiny parallel light after passing through the negative lens, the tiny parallel light enters the cube beam splitter prism and is transmitted or reflected to the pyramid prism, and the cube beam splitter prism reflects the parallel light back to the cube beam splitter prism and is transmitted or reflected to a CCD or an eyepiece.
Further, the pyramid prism is a corner cube prism.
Further, the corner cube is installed on an indoor roof or an indoor wall.
Further, the adjustable lens and the negative lens can be axially adjusted and moved along the irradiation direction of the light source.
Further, the centering jig is arranged on the horizontal two-axis adjusting mechanism, and a rotating mechanism is further arranged between the centering jig and the horizontal two-axis adjusting mechanism.
Further, still include the equipment base, be provided with the fixed column on the equipment base, fixed column one side is provided with down the platform, centering fixture sets up on the platform down, the platform bottom still is provided with down the module down, adjustable lens, cross reticle and light source all set up in the module down, the platform top is provided with the upper table down, be provided with lift adjustment subassembly between upper table and the fixed column, be provided with the upper die set on the upper table, positive lens, negative lens and cube beam prism all set up in the upper die set, the cube corner prism sets up on the light path direction that the upper die set penetrated.
Furthermore, the pyramid prism is fixedly arranged on the mounting chassis.
Further, the installation chassis includes locking dish and sliding tray, locking dish surface is provided with the forked tail spout, sliding tray surface is provided with the forked tail slider, the forked tail slider sets up in the forked tail spout, be provided with the rotary disk on the sliding tray another surface, be provided with arc spacing hook portion on the rotary disk periphery, the rotary disk passes through arc spacing hook portion and sliding tray peripheral spacing to be connected and can follow sliding tray circumferential rotation, the rotary disk middle part is provided with dodges the hole, dodges and be provided with first locking screw on the sliding tray that the hole corresponds, first locking screw and rotary disk threaded connection can with the inside butt of forked tail spout, the pyramid prism is fixed on the rotary disk and eccentric setting.
Further, the rotary disk includes mounting panel and fixed plate, all be provided with arc spacing hook on mounting panel and the fixed plate, be provided with first connecting block on the mounting panel, be provided with the second connecting block on the fixed plate, be provided with two guide posts and a screw hole on the first connecting block, be provided with the guiding hole on the second connecting block that the guide post corresponds, be provided with fixed via hole on the second connecting block that the screw hole corresponds, be provided with second locking screw in the fixed via hole, second locking screw passes fixed via hole and screw hole threaded connection.
The invention has the beneficial effects that:
1. the beam shrinking system is adopted, so that the received light spots are thinned and clear, and the accuracy and reliability of reading are improved;
2. The beam splitting prism and the pyramid prism are adopted to greatly lengthen the measurement distance, improve the accuracy of the grid value and eliminate the need of designing complex light paths.
3. The pyramid prism is separately arranged on a wall or other supports and separated from the eccentric instrument, so that the size of the instrument is unchanged or smaller while the light path distance is increased.
Drawings
FIG. 1 is a schematic diagram of a top-mounted inspection configuration of the present invention;
FIG. 2 is a schematic illustration of a detection configuration employing a side-mounting in accordance with the present invention;
FIG. 3 is a schematic view of the apparatus of the present invention;
FIG. 4 is a schematic view of the mounting chassis structure of the present invention;
fig. 5 is a schematic view of a portion of the structure of a sliding tray according to the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Referring to fig. 1 and 2, an embodiment of the split optical lens decenter of the present invention includes a centering jig 1 and a pyramid prism 2, the pyramid prism may be selected as a corner cube prism, an adjustable lens 4, a cross reticle 5 and a light source 6 are sequentially disposed in the centering jig from top to bottom, a positive lens 7, a negative lens 8 and a cube beam prism 9 are sequentially disposed above the centering jig from bottom to top, the adjustable lens and the negative lens can be axially adjusted and moved along the light source irradiation direction, the centering jig is disposed on a horizontal two-axis adjusting mechanism, a rotating mechanism is further disposed between the centering jig and the horizontal two-axis adjusting mechanism, through adjustment, the use of different lenses to be detected is satisfied, the light source irradiates the cross reticle and emits cross light through the cross reticle, the cross light changes the convergence angle to the lens to be detected through the adjustable lens, the cross light of the convergence angle is formed by the lens, the cube light becomes parallel light after passing through the negative lens and is transmitted through or reflected back to the cube prism, and the parallel light is transmitted through the cube prism or reflected back to the pyramid prism or the pyramid prism 11.
Taking the pyramid prism installed on the indoor roof as an example, referring to fig. 1, the light emitted by the light source irradiates on the cross reticle, the cross reticle emits cross light, the convergence angle of the cross light is changed by the adjustable lens, the light becomes divergent light through the detected lens, the divergent light forms convergent light through the positive lens, after the convergent light passes through the negative lens with a small focal length, the object focus of the convergent light is near the convergent point, the light becomes tiny nearly parallel light after passing through the negative lens, part of the light irradiates on the pyramid prism through the cube beam splitter prism, the pyramid prism reflects the light back according to the light path and irradiates on the reflecting inclined plane of the cube beam splitter prism, and part of the light is reflected to irradiate on the ocular lens or the CCD. The adjustable lens and the negative lens are adjusted, so that the line of the cross light spot received by the ocular lens or the CCD is adjusted to be the thinnest, and the measured lens can be rotated to measure the eccentricity.
Taking the pyramid prism installed on the indoor wall as an example, referring to fig. 2, the light emitted by the light source is on the cross reticle, the cross reticle emits cross light, the convergence angle of the cross light is changed by the adjustable lens, the light becomes divergent light through the detected lens, the divergent light forms convergent light through the positive lens, the convergent light forms tiny nearly parallel light near the convergent point through the object focus after passing through the negative lens, part of the light is reflected on the reflecting inclined plane of the cube beam splitter prism, part of the light is reflected on the pyramid prism, the pyramid prism reflects the light back according to the light path, and part of the light shines on the ocular lens or the CCD through the cube beam splitter prism. The adjustable lens and the negative lens are adjusted, so that the line of the cross light spot received by the ocular lens or the CCD is adjusted to be the thinnest, and the measured lens can be rotated to measure the eccentricity.
In the two installation modes, when the deviation of the installation direction of the pyramid prism is smaller than 5 degrees, the deviation of the angle of incident light under reflected light is smaller than 0.5 seconds, and the requirement on split installation is not high, so that as long as light irradiates on the inclined plane of the pyramid prism, the pyramid prism has inclined and vibration returned light spots are stable. The transmittance and the reflectivity of the cube beam splitter prism are less than 100%, the final light energy is about 20% of the light emitted by the cross reticle, and the light source generally adopts LED lamp beads with strong light energy. At this time, the eccentricity measurement distance l=l1+2×l2+l3.
Lattice value [ second ] =103 x lattice width [ millimeter ]/measurement distance L [ meter ]
The cell width of the scale plate of the eccentric is typically 0.1 mm, and the cell values of the readings at the different measuring distances L are shown in the following table:
| Measuring distance L [ meters ] | 1 | 2 | 3 | 4 | 5 | 10 | 20 |
| Lattice value [ seconds ] | 10.3 | 5.2 | 3.4 | 2.6 | 2.1 | 1.0 | 0.5 |
The invention uses the light beam shrinkage to make the light spot tiny, and the reflecting prism (comprising the pyramid prism) to lengthen the light path distance L, so that the transmission type eccentric accuracy is greatly improved. The pyramid prism may be separately mounted on a wall or other support by an eccentric to increase the optical path distance while the instrument itself is unchanged or reduced in size.
In an embodiment, the above structure is embodied in a device structure, referring to fig. 3 to 5, the device structure includes a device base 12, a fixed upright 13 is provided on the device base, a lower platform 14 is provided on one side of the fixed upright, a centering fixture is provided on the lower platform, a lower module 15 is further provided at the bottom of the lower platform, an adjustable lens, a cross reticle and a light source are all provided in the lower module, an upper platform 16 is provided above the lower platform, a lifting adjusting component is provided between the upper platform and the fixed upright, an upper module 10 is provided on the upper platform, a positive lens, a negative lens and a cube beam prism are all provided in the upper module, and a pyramid prism is provided in the direction of the light path emitted by the upper module. Be provided with XY axle translation adjustment frame on the centering tool to the position is adjusted in the horizontal direction of being convenient for. The structure forms a whole, the pyramid prism is arranged in a split mode, and when the structure is used, the operation can be carried out by only arranging the detected lens in the centering jig, and the structure is convenient and reliable.
For ease of installation, the corner cube is fixedly mounted on the mounting base 17. The installation chassis includes locking plate 18 and sliding tray 19, locking plate surface is provided with dovetail chute 20, sliding tray surface is provided with dovetail slider 21, the dovetail slider sets up in the dovetail chute, be provided with rotary disk 22 on the sliding tray another surface, be provided with arc spacing hook 23 on the rotary disk periphery, the rotary disk passes through arc spacing hook and sliding tray peripheral spacing to be connected and can follow sliding tray circumferential rotation, the rotary disk middle part is provided with dodges hole 24, dodges and be provided with first locking screw 25 on the sliding tray that the hole corresponds, first locking screw and rotary disk threaded connection and can with the inside butt of dovetail chute, the pyramid prism is fixed on the rotary disk and eccentric setting.
The locking disc is used for being locked on the roof or the wall in the house, the sliding disc can slide in the dovetail sliding groove through the dovetail sliding block, when the locking disc needs to be fixed, the locking disc is screwed through the first locking screw, the first locking screw stretches out and is abutted with the bottom of the dovetail sliding groove, so that the dovetail sliding block is lifted and is abutted with the inner wall of the dovetail sliding groove, and the locking effect is achieved. The rotary disk can rotate around the circumference direction of the sliding disk through the design of the arc limiting hook part, and the pyramid prism is eccentrically designed and can be adjusted in position in the rotating process, so that the purpose of XY axis movement is achieved through the two adjusting modes, and the pyramid prism is installed simply.
Specifically, the rotary disk needs to be fixed after determining the position, rotation is avoided, the rotary disk is designed to comprise a mounting plate 26 and a fixed plate 261, arc-shaped limiting hook parts are arranged on the mounting plate and the fixed plate, a first connecting block 27 is arranged on the mounting plate, a second connecting block 28 is arranged on the fixed plate, two guide posts 29 and a threaded hole are arranged on the first connecting block, guide holes are formed in the second connecting block corresponding to the guide posts, a fixed through hole is formed in the second connecting block corresponding to the threaded hole, and a second locking screw 30 is arranged in the fixed through hole and penetrates through the fixed through hole to be in threaded connection with the threaded hole.
The mounting panel and the fixed plate set up relatively, establish on the sliding tray through the hook that respective arc spacing hook portion can be fine, and do not influence and rotate, through the cooperation of guide post and guiding hole, stability when guaranteeing mounting panel and fixed plate relative movement can not warp, screw through the second locking screw after rotating in place for first connecting block is close to with the second connecting block mutually, and the final arc spacing hook portion that makes on mounting panel and the fixed plate firmly presss from both sides tightly on the sliding tray, reaches the unable pivoted purpose of rotary disk.
In the structure, the sliding disc can be fixed through the first locking screw, the rotating disc can be fixed through the second locking screw, the operation is simple, the adjustment can be fast and simply performed after the locking disc is installed, the operation difficulty is small, and the use is convenient.
The above embodiments are merely preferred embodiments for fully explaining the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutions and modifications will occur to those skilled in the art based on the present invention, and are intended to be within the scope of the present invention. The protection scope of the invention is subject to the claims.
Claims (6)
1. The split type optical lens eccentric instrument is characterized by comprising a centering jig and a pyramid prism, wherein the centering jig is internally used for placing a lens to be detected, an adjustable lens, a cross reticle and a light source are sequentially arranged at the bottom of the centering jig from top to bottom, a positive lens, a negative lens and a cube beam splitter prism are sequentially arranged above the centering jig from bottom to top, the light source irradiates the cross reticle and emits cross light through the cross reticle, the cross light changes a converging angle to the lens to be detected through the adjustable lens, the lens to be detected forms converging light, the converging light becomes tiny parallel light after passing through the negative lens and enters the cube beam splitter prism to be transmitted or reflected to the pyramid prism, and the pyramid prism reflects the parallel light back to the cube beam splitter prism to be transmitted or reflected to a CCD or an eyepiece;
The device comprises a device base, and is characterized in that the device base is provided with a fixed upright, one side of the fixed upright is provided with a lower platform, the centering jig is arranged on the lower platform, a lower module is further arranged at the bottom of the lower platform, an adjustable lens, a cross reticle and a light source are all arranged in the lower module, an upper platform is arranged above the lower platform, a lifting adjusting component is arranged between the upper platform and the fixed upright, an upper module is arranged on the upper platform, and a positive lens, a negative lens and a cube beam prism are all arranged in the upper module, and the cube beam prism is arranged in the direction of a light path emitted by the upper module;
the pyramid prism is fixedly arranged on the mounting chassis;
The installation chassis comprises a locking disc and a sliding disc, wherein a dovetail sliding groove is formed in the surface of the locking disc, a dovetail sliding block is arranged on one surface of the sliding disc, the dovetail sliding block is arranged in the dovetail sliding groove, a rotating disc is arranged on the other surface of the sliding disc, an arc-shaped limiting hook is arranged on the periphery of the rotating disc, the rotating disc is in limiting connection with the periphery of the sliding disc through the arc-shaped limiting hook and can circumferentially rotate along the sliding disc, an avoidance hole is formed in the middle of the rotating disc, a first locking screw is arranged on the sliding disc corresponding to the avoidance hole, the first locking screw is in threaded connection with the rotating disc and can be in butt joint with the inside of the dovetail sliding groove, and the pyramid prism is fixed on the rotating disc and eccentrically arranged.
2. The split optical lens decentration apparatus of claim 1 wherein the corner cube prism is a corner cube prism.
3. The split optical lens decenter of claim 1, wherein the corner cube is mounted on an indoor roof or an indoor wall.
4. The split optical lens decenter of claim 1, wherein the adjustable lens and the negative lens are axially adjustable in a direction of illumination by the light source.
5. The split optical lens decentering apparatus of claim 1, wherein the centering jig is provided on a horizontal two-axis adjustment mechanism, and a rotation mechanism is further provided between the centering jig and the horizontal two-axis adjustment mechanism.
6. The split optical lens eccentric instrument according to claim 1, wherein the rotating disc comprises a mounting plate and a fixing plate, arc-shaped limiting hooks are arranged on the mounting plate and the fixing plate, a first connecting block is arranged on the mounting plate, a second connecting block is arranged on the fixing plate, two guide posts and a threaded hole are arranged on the first connecting block, guide holes are arranged on the second connecting block corresponding to the guide posts, fixing through holes are arranged on the second connecting block corresponding to the threaded hole, and second locking screws are arranged in the fixing through holes and penetrate through the fixing through holes to be in threaded connection with the threaded holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311095363.3A CN117405358B (en) | 2023-08-29 | 2023-08-29 | Separated optical lens eccentric instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311095363.3A CN117405358B (en) | 2023-08-29 | 2023-08-29 | Separated optical lens eccentric instrument |
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| CN117405358A CN117405358A (en) | 2024-01-16 |
| CN117405358B true CN117405358B (en) | 2024-07-19 |
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| CN202311095363.3A Active CN117405358B (en) | 2023-08-29 | 2023-08-29 | Separated optical lens eccentric instrument |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009053166A (en) * | 2007-08-29 | 2009-03-12 | Nikon Corp | Measuring interferometer and eccentricity device for |
| CN203811868U (en) * | 2014-01-11 | 2014-09-03 | 长春理工大学光电信息学院 | Photoelectric centering instrument using PSD |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4774332B2 (en) * | 2006-06-06 | 2011-09-14 | 富士フイルム株式会社 | Eccentricity measurement method |
| CN204831226U (en) * | 2015-08-14 | 2015-12-02 | 西安工业大学 | A optics light path for detection lens center is inclined to one side and optical detection device thereof |
| CN107339955B (en) * | 2017-01-07 | 2020-11-13 | 深圳市灿锐科技有限公司 | High-precision lens center deviation detection instrument and measurement method thereof |
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2023
- 2023-08-29 CN CN202311095363.3A patent/CN117405358B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009053166A (en) * | 2007-08-29 | 2009-03-12 | Nikon Corp | Measuring interferometer and eccentricity device for |
| CN203811868U (en) * | 2014-01-11 | 2014-09-03 | 长春理工大学光电信息学院 | Photoelectric centering instrument using PSD |
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| CN117405358A (en) | 2024-01-16 |
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