CN104359655A - Off-axis parabolic mirror focal length detection device and method - Google Patents
Off-axis parabolic mirror focal length detection device and method Download PDFInfo
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- CN104359655A CN104359655A CN201410620690.0A CN201410620690A CN104359655A CN 104359655 A CN104359655 A CN 104359655A CN 201410620690 A CN201410620690 A CN 201410620690A CN 104359655 A CN104359655 A CN 104359655A
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Abstract
An off-axis parabolic mirror focal length detection device comprises a Fizeau interferometer and a standard plane mirror thereof, a five dimension adjusting frame, a compensating ball and a three dimension adjusting frame thereof, a bearing and fixing base plate and a three coordinate measuring machine. The standard plane mirror serves as a light beam output window of the Fizeau interferometer, the top of the five dimension adjusting frame is fixed to a base, and the base is used for fixing an off-axis parabolic mirror to be measured and an auxiliary cylinder; the compensating ball and the three dimension adjusting frame are placed at the focus of the off-axis parabolic mirror; the five dimension adjusting frame, the off-axis parabolic mirror to be measured, the compensating ball and the three dimension adjusting frame thereof are fixed to the bearing and fixing base plate; the Fizeau interferometer is located above the base with the off-axis parabolic mirror to be measured; the three coordinate measuring machine is in other position. By the aid of the device, the focal length of the off-axis parabolic mirror to be measured can be measured accurately, and gaps of the existing technology are filled.
Description
Technical field
The present invention relates to technical field of optical detection, particularly a kind of pick-up unit of the off axis paraboloidal mirror focal length based on fizeau interferometer and detection method.
Background technology
The traditional detection method of optical element and technology have continued to use many decades.Optical detection relates to detected element material, bore, kind and measuring technology, instrument and equipment etc.Detected element of a great variety, includes parallel flat, sphere, aspheric surface, free form surface, diffraction grating, axicon lens, cylindrical lens etc., has special aspheric surface as parabola, ellipsoid, hyperboloid and other aspheric surface in addition in aspheric surface.Key instrument conventional in optical detection can be divided into interferometer class, surface profiler class, MTF tester class, precision spherometer class, focal length and eccentric testing instrument class and Other Instruments etc.
All developing and developing respective advanced instrument both at home and abroad.The domestic interferometer manufacturing firm that is representative with Institutes Of Technology Of Nanjing and Chengdu Tai Ke company, the product bore of all kinds of Digital interferometer has Φ 25mm ~ Φ 600mm; All kinds of interferometers from bore 4 " ~ 32 " that import is representative with Zygo company of the U.S.; The non-contact surface contourgraph that Zygo company develops for ultimate principle with 3D interference microscope, from early stage Maxim 3D 5700 to the Zemapper System etc. of latest modern technological; Britain Tayloy-Hobson contact pin type contourgraph; The three-coordinates measuring machine, 4D interferometer etc. of practical requirement.
But, on optical detecting instrument and technology application, still there is a lot of problem and shortage.At present, the method detected fast about off axis paraboloid mirror focal length or device is not yet had.Existing detecting instrument such as Zygo interferometer, newton's interferometer, 4D interferometer, Tayloy-Hobson etc. all cannot direct-detection off axis paraboloid mirror focal lengths.
Applicant is in patent " a kind of pick-up unit from axle ellipsoidal mirror and detection method thereof the " (application number: what record 201310422011.4) is a kind of device for detecting the face type from axle ellipsoid, cannot realize the focometry to off axis paraboloidal mirror of application in 2013.
Summary of the invention
The object of the invention is to overcome the difficulty detected off axis paraboloid mirror focal length at present, a kind of pick-up unit and detection method thereof of the off axis paraboloid mirror focal length based on fizeau interferometer and three coordinate measuring machine are provided, by introducing auxiliary cylinder and after tested off axis paraboloidal mirror, regulating device one are fixed on support fixed head, realizing by three coordinate machine the focal length surveying off axis paraboloidal mirror.
Technical solution of the present invention is as follows:
A pick-up unit for off axis paraboloidal mirror focal length, its feature is, this device is tieed up adjustment racks by fizeau interferometer and standard flat mirror, five thereof, compensate bead and three-dimensional trim holder thereof, assisted cylinder, support fixed base plate and three coordinate measuring machine to form;
Described standard flat mirror is the light beam output window of described fizeau interferometer;
The end face of five described dimension adjustment racks is fixed with a pedestal, and be fixed with off axis paraboloidal mirror to be measured in this pedestal one end, the other end is provided with the auxiliary cylinder that off axis paraboloidal mirror to be measured with this has same curved surface;
Described five dimension adjustment racks, compensation bead and three-dimensional trim holder thereof are fixed on support fixed base plate, and described fizeau interferometer is positioned at described pedestal and puts directly over off axis paraboloidal mirror to be measured.
The diameter of described auxiliary cylinder is 5-15mm.
It is three-dimensional that described three-dimensional trim holder has X, Y, Z, and five described dimension adjustment racks have X, Y, Z, Tip & Tilt five dimension.
Described off axis paraboloidal mirror to be measured is concave mirror.
Utilize the pick-up unit of described off axis paraboloidal mirror focal length to detect a method for off axis paraboloidal mirror focal length to be measured, its feature is, the method comprises the following steps:
1. according to the size of off axis paraboloidal mirror to be measured, suitable standard flat mirror is selected to be installed on described fizeau interferometer, the selection of standard flat mirror, to utilize the outgoing luminous energy of fizeau interferometer to greatest extent, namely guarantees that the emergent light full illumination of fizeau interferometer is on this off axis paraboloidal mirror to be measured;
2. off axis paraboloidal mirror to be measured and auxiliary cylinder are fixed on five dimension adjustment racks;
3. five dimension adjustment racks, compensation bead and three-dimensional trim holder thereof are fixed on roughly on support fixed base plate, make the centre of sphere of compensation bead equal with the theoretical focal length of off axis paraboloidal mirror to be measured to the distance of the centre of surface point of auxiliary cylinder;
4. adjust five dimension adjustment racks, make the upper surface of pedestal be in level, the fizeau interferometer described in unlatching, the light beam that this fizeau interferometer sends is through the off axis paraboloidal mirror to be measured of described standard spherical mirror full illumination on pedestal;
The height of adjustment five dimension adjustment rack, the centre-height of the light beam that fizeau interferometer is sent is consistent with the centre-height of light path vertical direction with off axis paraboloidal mirror to be measured;
5. by making the centre of sphere of compensation bead be placed on the position of the focus of off axis paraboloidal mirror to be measured to the adjustment of three-dimensional trim holder, five dimension adjustment racks;
6. namely described fizeau interferometer obtains the face type of off axis paraboloidal mirror to be measured;
7. support fixed base plate and fixing off axis paraboloidal mirror to be measured, five dimension adjustment racks, compensation bead and three-dimensional trim holder entirety are placed on three coordinate measuring machine above, measure the summit of the off axis paraboloidal mirror to be measured obtained to the compensation centre of sphere distance of bead and the real focal length of off axis paraboloidal mirror to be measured.
Described off axis paraboloidal mirror to be measured and the job operation of auxiliary cylinder as follows:
To place one piece be turning axle at the theoretical apex place of off axis paraboloidal mirror to be measured with the normal on this off axis paraboloidal mirror summit to be measured, diameter is 5-15mm, the parabola of one of them cross section and tested off axis paraboloidal mirror is same paraboloidal auxiliary cylinder, together process with off axis paraboloidal mirror to be measured, guarantee that the cross section of this auxiliary cylinder and off axis paraboloid mirror to be measured are same parabola by process equipment, guarantee that the normal of the axle of this auxiliary cylinder and this off axis paraboloidal mirror to be measured overlaps simultaneously.
Compared with prior art, the invention has the beneficial effects as follows the focal length can measuring off axis paraboloid mirror to be measured rapidly and accurately, meet the demand of client.
Accompanying drawing explanation
Fig. 1 is the structural representation of the pick-up unit of off axis paraboloidal mirror focal length of the present invention.
Fig. 2 is the index path of the pick-up unit of off axis paraboloidal mirror of the present invention.
Fig. 3 is the front elevation compensating bead and three-dimensional trim holder and off axis paraboloidal mirror to be measured.
Fig. 4 is the side view of five dimension adjustment racks.
Fig. 5 is the three-view diagram of tested off axis paraboloid mirror, and (a) is front elevation, and (b) is right view, and (c) is vertical view.
Fig. 6 is the schematic diagram measured on three coordinate measuring machine.
In figure: 1-fizeau interferometer, 2-standard flat mirror, 3-off axis paraboloidal mirror to be measured, 4-compensate bead, 5-three-dimensional trim holder, 6-five dimension adjustment racks, 7-support fixed base plate, 8-three coordinate measuring machine, 9-auxiliary cylinder, the collimated monochromatic ligth that 10-fizeau interferometer sends, 11-through the light of standard flat mirror transmission, 12-the light that reflects through off axis paraboloidal mirror to be measured, 13-through compensating the light of bead reflection, 14-through the light of off axis paraboloidal mirror to be measured secondary reflection again, 15-light of fizeau interferometer is returned through standard flat mirror surface refraction, the interior reflective surface of A-standard spherical mirror, the outside surface of A '-standard spherical mirror, B-off axis paraboloidal mirror to be measured, the surface of C-auxiliary cylinder, the central point (parabola vertex) of O-auxiliary cylinder.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but should not limit the scope of the invention with this.
Please first consult Fig. 1, Fig. 1 is the structural representation of the pick-up unit of off axis paraboloidal mirror focal length of the present invention, as shown in the figure, a kind of pick-up unit of off axis paraboloidal mirror focal length, by fizeau interferometer 1 and standard flat mirror 2 thereof, auxiliary cylinder 9, five dimension adjustment racks 6, compensate bead 4 and three-dimensional trim holder 5 thereof, three coordinate measuring machine 8 forms, standard flat mirror 2 is light beam output windows of described fizeau interferometer 1, the end face of five described dimension adjustment racks 6 fixes a pedestal, described three-dimensional trim holder 5 is fixed in one end of this pedestal, the other end is put for off axis paraboloidal mirror 3 to be measured and auxiliary cylinder 9, described fizeau interferometer 1 is positioned at described pedestal and puts to be measured directly over axle ellipsoidal mirror.
1, fizeau interferometer: the object lens corrected very well by a process collimate the light sent from pin hole.A spectroscope is placed, to observe interference fringe from the side between collimator objective and pin hole (spatial filter).The light that fizeau interferometer sends is collimated monochromatic ligth.
2, integrated off axis paraboloidal mirror to be measured, auxiliary cylinder and five dimension adjustment racks and compensation bead and three-dimensional trim holder.
Fig. 2 is the index path of the pick-up unit of off axis paraboloidal mirror of the present invention, and as a reference plane, off axis paraboloid mirror B to be measured is as sphere to be measured in the internal reflection A face of standard flat mirror.Determine in the character of focus the relative distance compensating bead and off axis paraboloidal mirror to be measured through off axis paraboloidal mirror post-concentration to be measured according to parallel plane light wave, and by tieing up the position repeatedly adjusting to find compensation bead of adjustment racks to three-dimensional trim holder and five, make the face type of off axis paraboloidal mirror to be measured minimum, now the position of the bead centre of sphere is exactly focal position.
The interior reflective surface A of standard spherical mirror as a reference plane, its surface precision is less than λ/20, off axis paraboloid mirror B to be measured is through the off axis paraboloid mirror of single-point diamond lathe process as tested surface, C face and B face be simultaneously through single-point diamond lathe process containing parabola vertex at axle parabola.Apparatus of the present invention index path as shown in Figure 2.After the collimated monochromatic ligth 10 that fizeau interferometer sends incides standard transmission plane, a part of light is reflected by the interior reflective surface A of standard spherical mirror, and this reflection ray carries standard ball ground roll information.Another part light is parallel after the interior reflective surface A transmission (being called light 11) of standard spherical mirror incides off axis paraboloid mirror B to be measured.According to paraboloidal optical property: parallel rays converges at paraboloidal focal point F after parabola, the position of F point is placed and compensates bead, the surface precision of bead is better than λ/10.Light reflects through off axis paraboloidal mirror to be measured the focus that (being called light 12) pool and overlaps with the centre of sphere point of bead, light reflects (being called light 13) through bead sphere by former road gets back to off axis paraboloid mirror to be measured, again through the outside surface A ' of parabolic reflector (being called light 14) exiting parallel to standard flat mirror, reflect (being called light 15) through the outside surface A ' of standard spherical mirror and get back in interferometer.Collimated monochromatic ligth 10 meets through reflection ray and the light 15 of the interior reflective surface A of standard spherical mirror that frequency is identical, direction of vibration consistent, constant phase difference three conditions, thus interferes phenomenon, produces interference fringe.Observe interference fringe by fizeau interferometer and interference fringe analyzed thus draws the face type measurement result on off axis paraboloid mirror surface, thus determining the position compensating bead.
Fizeau interferometer is a kind of relatively more conventional equal thickness interferometer, is mainly used in inspection plane or spherical surface type.The light that monochromatic source sends is focused on circular hole diaphragm by lens, and diaphragm is positioned on the focal plane of collimator objective.From the parallel beam of collimator objective outgoing, return at the lower plane of the reference planes with wedge degree and the upper plane reflection of tested plane, then on the focal plane of eyepiece, form two pictures of the aperture of circular hole diaphragm by collimator objective and object lens.The worktable at adjustment tested part place, makes two pictures overlap.If replace eyepiece with telescopic magnifier, just equal thick interference fringe can be seen in tested plane.Utilize the principle of work of above-mentioned fizeau interferometer, in apparatus of the present invention, coherence stack is there is in collimated monochromatic ligth 10 through the reflection ray of the outside surface A of standard spherical mirror and light 15, produce interference fringe, and interference fringe is observed in fizeau interferometer, the measurement key clicking fizeau interferometer can obtain the result of face type.The sphere center position of the compensation bead when adjusting to face type and being minimum is exactly the position of parabolic focus.
Be placed on three coordinate measuring machine by comprising the whole support fixed base plate determining compensation bead sphere center position and off axis paraboloidal mirror to be measured and auxiliary cylinder, can measure the position of the sphere center position of bead and the upper parabola vertex of auxiliary cylinder, the distance between two positions and focal length can directly be provided by three coordinate measuring machine.
Claims (4)
1. the pick-up unit of an off axis paraboloidal mirror focal length, it is characterized in that, this device is tieed up adjustment rack (6) by fizeau interferometer (1) and standard flat mirror (2), five thereof, compensate bead (4) and three-dimensional trim holder (5) thereof, is assisted cylinder (9), support fixed base plate (7) and three coordinate measuring machine (8) to form;
Described standard flat mirror (2) is the light beam output window of described fizeau interferometer (1);
The end face of five described dimensions adjustment rack (6) is fixed with a pedestal, be fixed with off axis paraboloidal mirror to be measured (3) in this pedestal one end, the other end is provided with the auxiliary cylinder (9) that off axis paraboloidal mirror to be measured with this has same curved surface;
Five described dimensions adjustment rack (6), compensation bead (4) and three-dimensional trim holder (5) thereof are fixed on support fixed base plate (7), and described fizeau interferometer (1) is positioned at described pedestal and puts directly over off axis paraboloidal mirror to be measured.
2. the pick-up unit of off axis paraboloidal mirror focal length according to claim 1, is characterized in that, the diameter of described auxiliary cylinder (9) is 5-15mm.
3. utilize the pick-up unit of the off axis paraboloidal mirror focal length described in claim 1 to detect a method for off axis paraboloidal mirror focal length to be measured, it is characterized in that, the method comprises the following steps:
1. according to the size of off axis paraboloidal mirror to be measured, suitable standard flat mirror is selected to be installed on described fizeau interferometer, the selection of standard flat mirror, to utilize the outgoing luminous energy of fizeau interferometer to greatest extent, namely guarantees that the emergent light full illumination of fizeau interferometer is on this off axis paraboloidal mirror to be measured;
2. off axis paraboloidal mirror to be measured (3) and auxiliary cylinder (9) are fixed on five dimension adjustment racks (5);
3. five dimensions adjustment rack (6), compensation bead (4) and three-dimensional trim holder (5) thereof are fixed on roughly on support fixed base plate (7), make the centre of sphere of compensation bead (4) equal with the theoretical focal length of off axis paraboloidal mirror to be measured (3) to the distance of the centre of surface point of auxiliary cylinder (9);
4. five dimensions adjustment rack (6) are adjusted, the upper surface of pedestal is made to be in level, fizeau interferometer described in unlatching, the light beam that this fizeau interferometer sends is through the to be measured off axis paraboloidal mirror (3) of described standard spherical mirror full illumination on pedestal;
The height of adjustment five dimension adjustment rack (6), the centre-height of the light beam that fizeau interferometer is sent is consistent with the centre-height of light path vertical direction with off axis paraboloidal mirror to be measured (3);
5. by making the centre of sphere of compensation bead (4) be placed on the position of focus (F) of off axis paraboloidal mirror to be measured to the adjustment of three-dimensional trim holder (5), five dimensions adjustment rack (6);
6. namely described fizeau interferometer obtains the face type of off axis paraboloidal mirror to be measured;
7. support fixed base plate (7) and fixing off axis paraboloidal mirror to be measured (3), five dimensions adjustment rack (6), compensation bead (4) and three-dimensional trim holder (5) entirety are placed on three coordinate measuring machine above, measure the real focal length of summit to the centre of sphere distance and off axis paraboloidal mirror to be measured that compensate bead (4) of the off axis paraboloidal mirror to be measured (3) obtained.
4. the method for detection according to claim 3 off axis paraboloidal mirror focal length to be measured, is characterized in that, described off axis paraboloidal mirror to be measured (3) and the job operation of auxiliary cylinder (9) as follows:
To place one piece be turning axle at the theoretical apex place of off axis paraboloidal mirror to be measured (3) with the normal on this off axis paraboloidal mirror summit to be measured, diameter is 5-15mm, the parabola of one of them cross section and tested off axis paraboloidal mirror is same paraboloidal auxiliary cylinder (9), together process with off axis paraboloidal mirror to be measured, guarantee that the cross section of this auxiliary cylinder and off axis paraboloid mirror to be measured are same parabola by process equipment, guarantee that the axle of this auxiliary cylinder (9) overlaps with the normal of this off axis paraboloidal mirror to be measured simultaneously.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105115444A (en) * | 2015-09-08 | 2015-12-02 | 上海现代先进超精密制造中心有限公司 | Detection device and detection method of off-axis parabolic mirror surface shape precision |
| CN105157570A (en) * | 2015-03-31 | 2015-12-16 | 中国科学院上海技术物理研究所 | Off-axis paraboloid off-axis amount measurement device and method |
| CN105974579A (en) * | 2016-07-18 | 2016-09-28 | 西安交通大学 | Angle changing device for large-aperture parallel beams based on off-axis parabolic mirror |
| CN107462402A (en) * | 2017-08-09 | 2017-12-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of detection scaling method of off-axis parabolic mirror geometric parameter |
| CN111189386A (en) * | 2020-01-13 | 2020-05-22 | 中国科学院上海光学精密机械研究所 | Correction method for surface shape projection distortion of off-axis parabolic reflector interferometry |
| CN112254938A (en) * | 2020-10-29 | 2021-01-22 | 中国航空工业集团公司洛阳电光设备研究所 | Off-axis parabolic mirror optical axis detection device and detection method |
| CN113933029A (en) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric element processing detection system and manufacturing method |
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- 2014-11-06 CN CN201410620690.0A patent/CN104359655A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105157570A (en) * | 2015-03-31 | 2015-12-16 | 中国科学院上海技术物理研究所 | Off-axis paraboloid off-axis amount measurement device and method |
| CN105157570B (en) * | 2015-03-31 | 2017-10-13 | 中国科学院上海技术物理研究所 | Measurement apparatus and method that a kind of off axis paraboloid mirror is measured off axis |
| CN105115444A (en) * | 2015-09-08 | 2015-12-02 | 上海现代先进超精密制造中心有限公司 | Detection device and detection method of off-axis parabolic mirror surface shape precision |
| CN105115444B (en) * | 2015-09-08 | 2018-09-07 | 上海现代先进超精密制造中心有限公司 | A kind of detection device and detection method of off axis paraboloidal mirror surface figure accuracy |
| CN105974579A (en) * | 2016-07-18 | 2016-09-28 | 西安交通大学 | Angle changing device for large-aperture parallel beams based on off-axis parabolic mirror |
| CN105974579B (en) * | 2016-07-18 | 2018-03-02 | 西安交通大学 | Angle altering arrangement based on off axis paraboloidal mirror heavy caliber collimated light beam |
| CN107462402A (en) * | 2017-08-09 | 2017-12-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of detection scaling method of off-axis parabolic mirror geometric parameter |
| CN111189386A (en) * | 2020-01-13 | 2020-05-22 | 中国科学院上海光学精密机械研究所 | Correction method for surface shape projection distortion of off-axis parabolic reflector interferometry |
| CN111189386B (en) * | 2020-01-13 | 2021-07-27 | 中国科学院上海光学精密机械研究所 | Correction method for surface shape projection distortion of off-axis parabolic reflector interferometry |
| CN112254938A (en) * | 2020-10-29 | 2021-01-22 | 中国航空工业集团公司洛阳电光设备研究所 | Off-axis parabolic mirror optical axis detection device and detection method |
| CN113933029A (en) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric element processing detection system and manufacturing method |
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Application publication date: 20150218 |