CN105115444B - A kind of detection device and detection method of off axis paraboloidal mirror surface figure accuracy - Google Patents
A kind of detection device and detection method of off axis paraboloidal mirror surface figure accuracy Download PDFInfo
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- CN105115444B CN105115444B CN201510567241.9A CN201510567241A CN105115444B CN 105115444 B CN105115444 B CN 105115444B CN 201510567241 A CN201510567241 A CN 201510567241A CN 105115444 B CN105115444 B CN 105115444B
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Abstract
The present invention relates to a kind of detection devices of off axis paraboloidal mirror surface figure accuracy, are fixed bottom plate, first base and second base by fizeau interferometer, standard spherical mirror, auxiliary concave spherical surface column, pedestal disk, five dimension adjustment frames, standard flat mirror, two-dimension adjustment frame, support and are formed；The standard spherical mirror is installed, the standard spherical mirror is the light beam output window of the fizeau interferometer on the fizeau interferometer；The pedestal disk is located at the lower section of the fizeau interferometer, and the pedestal disk is equipped with off axis paraboloidal mirror to be measured and auxiliary concave spherical surface column；The pedestal disk is set to the five dimensions adjustment top of support；The standard flat mirror is set to the bottom surface of the two-dimension adjustment frame；The two-dimension adjustment frame is located at the top of the off axis paraboloidal mirror to be measured.The detection device of the off axis paraboloidal mirror surface figure accuracy of the present invention can rapidly and accurately measure the surface figure accuracy of off axis paraboloidal mirror.
Description
Technical field
The present invention relates to technical field of optical detection, especially a kind of off axis paraboloid mirror minute surface shape based on fizeau interferometer
The detection device and detection method of precision.
Background technology
The traditional detection method of optical element has continued to use many decades with technology.Optical detection be related to detected element material,
Bore, type and measuring technology, instrument and equipment etc..The type of detected element is various, includes parallel flat, spherical surface, non-
Spherical surface, free form surface, diffraction grating, axicon lens, cylindrical lens etc., have in aspherical it is special it is aspherical as paraboloid, ellipsoid,
Hyperboloid and in addition to this other aspherical.Common key instrument can be divided into interferometer class, surface profile in optical detection
Instrument class, MTF testers class, precision spherometer class, focal length and eccentric testing instrument class and Other Instruments etc..
All developing and developing respective advanced instrument both at home and abroad.The country is with Institutes Of Technology Of Nanjing and Chengdu Tai Ke companies
The product bore of the interferometer manufacturing firm of representative, all kinds of Digital interferometers has Φ 25mm~Φ 600mm；Import is with the U.S.
Zygo companies are all kinds of interferometers of the slave bore 4 "~32 " of representative；Zygo companies are sent out by basic principle of 3D interference microscopes
The non-contact surface contourgraph of exhibition, the Zemapper System etc. from the Maxim 3D 5700 of early stage to latest modern technological；English
State Tayloy-Hobson contact pin type contourgraphs；Meet three-coordinates measuring machine, the 4D interferometers etc. of actual demand.
However, in optical detecting instrument and technology using upper, there are still many problem and shortage, for example, using contourgraph without
Method obtains the surface figure accuracy of entire surface, and the size of plane mirror is then limited to using plane mirror measurement.
Currently, there has been no detection devices and method about off axis paraboloidal mirror surface figure accuracy.
Invention content
The purpose of the present invention is to overcome the difficulty accurately detected to off axis paraboloid mirror surface figure accuracy at present, provide one
The detection device and detection method of off axis paraboloidal mirror surface figure accuracy of the kind based on fizeau interferometer.
Technical solution of the invention is as follows：
A kind of detection device of off axis paraboloidal mirror surface figure accuracy, the device is by fizeau interferometer, standard spherical mirror, auxiliary
Concave spherical surface column, pedestal disk, five dimension adjustment frames, standard flat mirror, two-dimension adjustment frame, support fix bottom plate, first base and the
Two pedestals form；
The standard spherical mirror is installed, the standard spherical mirror is the fizeau interferometer on the fizeau interferometer
Light beam output window；
The pedestal disk is located at the lower section of the fizeau interferometer, the pedestal disk be equipped with off axis paraboloidal mirror to be measured and
Assist concave spherical surface column；
The pedestal disk is set to the five dimensions adjustment top of support；
The standard flat mirror is set to the bottom surface of the two-dimension adjustment frame；
The two-dimension adjustment frame is located at the top of the off axis paraboloidal mirror to be measured；
The five dimensions adjustment frame, which is fixed on the support, to be fixed on bottom plate；
The support fixed plate is set in the second base；
The fizeau interferometer, two-dimension adjustment are set up in the first base.
The pedestal disk is rounded, and the auxiliary concave spherical surface column is set at the center of the pedestal disk, described to be measured off-axis
Paraboloidal mirror is centrosymmetric distribution in the surrounding of the pedestal disk.
The concave spherical surface radius of curvature of the auxiliary concave spherical surface column is equal with the focal length of off axis paraboloidal mirror to be measured.
The minimum point of the concave spherical surface is overlapped with the vertex of the off axis paraboloidal mirror to be measured.
The auxiliary concave spherical surface column diameter is 20-50mm.
The two-dimension adjustment frame has Tip and Tilt two-dimension adjustments.
The five dimensions adjustment frame has the dimension adjustment of X, Y, Z, Tip and Tilt five.
The off axis paraboloidal mirror is concave mirror.
A method of off axis paraboloidal mirror surface figure accuracy being detected using above-mentioned detection device, this method includes following step
Suddenly：
(1) according to the f1 numbers of off axis paraboloidal mirror to be measured, matched standard spherical mirror is selected to be installed to the striking Suo Gan
In interferometer, selection mode is as follows：
The bore D of the focal length f/ off axis paraboloidal mirrors of f1 numbers=paraboloidal mirror,
Bore D=2* (radius of off-axis amount+off axis paraboloidal mirror)
The f2 numbers of selected standard spherical mirror are less than or equal to the f1 numbers of off axis paraboloidal mirror, then by off-axis parabolic to be measured
Face mirror and auxiliary concave spherical surface column are set on pedestal disk；
(2) five dimension adjustment frame of adjustment makes the upper surface of pedestal disk be in level, opens the fizeau interferometer, the striking rope
The light beam that interferometer is sent out is through the standard spherical mirror full illumination on off axis paraboloidal mirror to be measured on the pedestal disk；
(3) X-direction of five dimension adjustment frame of adjustment makes the center at the center and the auxiliary concave spherical mirror column of standard spherical mirror
Line perpendicular to pedestal disk；
(4) Z-direction of five dimension adjustment frame of adjustment, it is zero striped to make the interference pattern of concave spherical surface column to be assisted, and is assisted at this time recessed
The centre of sphere of spherical surface column is overlapped with the focus F of standard spherical mirror, and the spherical wave of fizeau interferometer output at this time is by be measured
After off axis paraboloidal mirror reflection on exiting parallel to standard flat mirror；
(5) two-dimension adjustment frame is adjusted, the directional light backtracking for being incident on standard flat mirror is made to be thrown off axis to tested metal
On object plane, light converges to focus F by off axis paraboloidal mirror to be measured, returns in interferometer and forms interference fringe to get to waiting for
Survey the surface figure accuracy of off axis paraboloidal mirror；
(6) pedestal disk is rotated, the surface figure accuracy of each off axis paraboloidal mirror in disk is measured.
The processing method of the off axis paraboloidal mirror to be measured and auxiliary concave spherical surface column is as follows：
When processing off axis paraboloidal mirror, one piece is placed at the theoretical apex of off axis paraboloidal mirror to be measured with paraboloid top
The normal of point is that rotary shaft, radius of curvature and the paraboloid of off axis paraboloidal mirror to be measured are burnt
Away from identical, and the centrally located auxiliary concave spherical surface column in its vertex, it is processed together with off axis paraboloidal mirror to be measured, while processing is set
It is standby to ensure to assist the minimum point of concave spherical surface column and overlapping for parabola vertex.
The beneficial effects of the invention are as follows measuring various sizes of off axis paraboloidal mirror by using various criterion spherical mirror,
Measurement range is expanded, and can rapidly and accurately measure the surface figure accuracy of off axis paraboloidal mirror.
Description of the drawings
Fig. 1 is the structural schematic diagram of the detection device of off axis paraboloidal mirror surface figure accuracy of the present invention；
Fig. 2 is the left view of the detection device of off axis paraboloidal mirror surface figure accuracy of the present invention；
Fig. 3 is the index path of the detection device of off axis paraboloidal mirror surface figure accuracy of the present invention；
Fig. 4 is the upward view of standard flat mirror and its two-dimension adjustment frame；
Fig. 5 is the three-view diagram of off axis paraboloidal mirror to be measured；Wherein, a is front view, and b is left view, and c is vertical view；
Fig. 6 is the vertical view and sectional view that pedestal disk includes auxiliary concave spherical surface column and off axis paraboloidal mirror to be measured.
In figure：1-fizeau interferometer, 2-standard spherical mirrors, 3-off axis paraboloidal mirrors to be measured, 4-auxiliary concave spherical surface columns,
5-standard flat mirrors, 6-two-dimension adjustment framves, 7-five dimension adjustment frames, 8-pedestal disks, 9-supports fixation bottom plate, 10-the first
Pedestal, the 101-the first reference plane, 11-second bases, the 111-the second reference plane；
The parallel spherical surfaces monochromatic light that 100-fizeau interferometers are sent out, the 200-spherical surface light transmitted through standard spherical mirror,
300-the light through assisting concave spherical surface column to reflect, the 400-parallel rays reflected through off axis paraboloidal mirror to be measured, 500-through mark
The parallel rays that directrix plane mirror is reflected back again, the 600-light through off axis paraboloidal mirror to be measured reflecting focal again, 700-
Light through standard spherical mirror bounce back interferometer；
The interior reflective surface of A-standard spherical mirror, the outer surface of A '-standard spherical mirrors, B-off axis paraboloidal mirrors to be measured,
The surface of C-auxiliary concave spherical mirror, the central point (parabola vertex) of O-auxiliary concave spherical surface.
Specific implementation mode
Present invention will be further explained below with reference to specific examples.It should be understood that these embodiments are merely to illustrate the present invention
Rather than it limits the scope of the invention.In addition, it should also be understood that, after reading the content taught by the present invention, people in the art
Member can make various changes or modifications the present invention, and such equivalent forms equally fall within the application the appended claims and limited
Range.
Off axis paraboloidal mirror to be measured 3 described in the present embodiment is metal to be measured, infra-red material or plastics in addition to this etc.
The off axis paraboloidal mirror that the material of SPDT processing can be passed through can be applied to the present invention.
- 6 are please referred to Fig.1, a kind of detection device of off axis paraboloidal mirror surface figure accuracy, by fizeau interferometer 1, standard spherical surface
Mirror 2, auxiliary concave spherical surface column 4, pedestal disk 8, five tie up adjustment frame 7, standard flat mirror 5, two-dimension adjustment frame 6, support fix bottom plate 9,
First base 10 and second base 11 form；
The standard spherical mirror 2 is installed, the standard spherical mirror 2 is the Fizeau interference on the fizeau interferometer 1
The light beam output window of instrument 1；The pedestal disk 8 is located at the lower section of the fizeau interferometer 1, and the pedestal disk 8 is equipped with to be measured
Off axis paraboloidal mirror 3 and auxiliary concave spherical surface column 4；The pedestal disk 8 is set to described five and ties up 7 top surface of adjustment frame；The standard flat
Mirror 5 is set to the bottom surface of the two-dimension adjustment frame 6；The two-dimension adjustment frame 6 is located at the top of the off axis paraboloidal mirror 3 to be measured；
The five dimensions adjustment frame 7, which is fixed on the support, to be fixed on bottom plate 9；The support fixed plate 9 is set in the second base 11；
The fizeau interferometer 1, two-dimension adjustment frame 6 are set in the first base 10.
The pedestal disk 8 is rounded, and the auxiliary concave spherical surface column 4 is set at the center of the pedestal disk 8, it is described it is to be measured from
Axis paraboloidal mirror 3 is centrosymmetric distribution in the surrounding of the pedestal disk 8.
The concave spherical surface radius of curvature of the auxiliary concave spherical surface column 4 and the vertex curvature half of the off axis paraboloidal mirror 3 to be measured
Diameter is equal, and the minimum point of the concave spherical surface is overlapped with the vertex of the off axis paraboloidal mirror 3 to be measured.
A diameter of 20mm of the auxiliary concave spherical surface column 4.
The two-dimension adjustment frame 6 has Tip and Tilt two-dimension adjustments；Five dimension adjustment frames 7 have X, Y, Z, Tip and Tilt five
Dimension adjustment.
Fig. 2 is the index path of the detection device of off axis paraboloidal mirror surface figure accuracy of the present invention, the internal reflection of standard spherical mirror
As a reference plane, surface figure accuracy is less than λ/20 to face A, B be through metal to be measured made of single-point diamond lathe process from
The paraboloid of axis paraboloidal mirror, C and B are to be somebody's turn to do simultaneously through concave spherical surface and off axis paraboloid mirror made of single-point diamond lathe process
The minimum point O points of concave spherical surface are parabola vertex, and its radius of curvature is equal to paraboloidal focal length.
After the parallel spherical surfaces monochromatic light 100 that fizeau interferometer is sent out is incident on standard spherical mirror 2, a part of light is by standard ball
The interior reflective surface A reflections of face mirror 2, the reflection light carry standard spherical wave information.Another part light is through in standard spherical mirror 2
After reflecting surface A transmission (being known as light 200), first converge to focus F again diverging incident to the surface C that assists concave spherical mirror and to be measured
Off axis paraboloid mirror B.According to paraboloidal optical property：The spherical light wave that focus F is sent out exiting parallel after paraboloid, directional light
Wave converges to focus F through parabolic reflector.In order to which paraboloidal optical axis is adjusted to parallel with the optical axis of interferometer, it is auxiliary to introduce one
Concave spherical surface is helped, the radius of curvature of the concave spherical surface is equal to paraboloidal focal length, and the spherical surface is processed together with paraboloid, the auxiliary
Central point (parabola vertex) O of concave spherical surface is overlapped with paraboloidal vertex.The position of five dimension adjustment frame of adjustment, makes light 200
It is zero striped by assisting the light 300 of the surface C reflection of concave spherical mirror to return to the interference fringe generated in interferometer, throws at this time
The optical axis of object plane is the optical axis coincidence with interferometer, and the centre of sphere of auxiliary concave spherical surface column 4 is overlapped with the focus F of standard spherical mirror 2.From
The light wave (remaining as light 200) that F points are sent out exiting parallel after metal off axis paraboloidal mirror to be measured reflects and (is known as light 600)
(light 400) arrives standard flat mirror 5, then adjusts the two-dimension adjustment frame 6 of standard flat mirror 5 so that directional light (light 500) is former
Road returns on metal off axis paraboloidal mirror to be measured, again passes by parabolic reflector (light 600) and converges to the subsequent superventions of focus F
The outer surface A ' for being mapped to standard spherical mirror is spilt into, the outer surface A ' refractions (light 700) through standard spherical mirror return in interferometer.
The reflection light of interior reflective surface A of the parallel spherical surfaces monochromatic light 100 that fizeau interferometer is sent out through standard spherical mirror is full with light 700
Sufficient frequency is identical, direction of vibration is consistent, three conditions of constant phase difference, to interfere phenomenon, generates interference fringe.Pass through
Fizeau interferometer observes interference fringe and is analyzed to obtain that the surface figure accuracy on off axis paraboloid mirror surface is surveyed to interference fringe
Measure result.
The detection method of the off axis paraboloidal mirror surface figure accuracy of the present invention, includes the following steps：
(1) according to the f1 numbers of off axis paraboloidal mirror 3 to be measured, matched standard spherical mirror is selected to be installed to the striking Suo Gan
In interferometer, specific choice mode is as follows：
Such as：It is known that radius=50.8mm of off axis paraboloidal mirror, off-axis amount=20mm, focal length=110mm
Then, bore D=2* (20+50.8)=141.6mm of off axis paraboloidal mirror
The bore D=110/141.6=0.777mm of the focal length f/ off axis paraboloidal mirrors of f1 numbers=paraboloidal mirror
So f2 number ＜ f1 numbers=0.777mm
Therefore, the f2=0.75mm of selected standard spherical mirror, then by off axis paraboloidal mirror 3 to be measured and auxiliary concave spherical surface column
4 are set on pedestal disk 8；
(2) five dimension adjustment frame 7 of adjustment makes the upper surface of pedestal disk 8 be in level, opens the fizeau interferometer 1, described
To be measured off axis paraboloid mirror of the light beam that fizeau interferometer 1 is sent out through 2 full illumination of the standard spherical mirror on the pedestal disk 8
On mirror 3；
(3) X-direction of five dimension adjustment frame 7 of adjustment makes center and the auxiliary concave spherical mirror column 4 of standard spherical mirror 2
The line at center perpendicular to pedestal disk (8), even if the beam center that sends out of fizeau interferometer 1 to the first reference plane (101) away from
It is consistent to the second reference plane (111) distance h2 from h1 and the center of the auxiliary concave spherical mirror column 4；Wherein, the first reference plane
(101) it is placed on same plane with the second reference plane (111), is used for auxiliary positioning test device；
(4) Z-direction of five dimension adjustment frame 7 of adjustment, it is zero striped to make the interference pattern of concave spherical surface column 4 to be assisted, and is assisted at this time
The centre of sphere of concave spherical surface column 4 is overlapped with the focus F of standard spherical mirror 2, and the spherical wave that the fizeau interferometer 1 exports at this time passes through
After off axis paraboloid mirror 3 to be measured reflects on exiting parallel to standard flat mirror 5；
(5) two-dimension adjustment frame 6 is adjusted, keeps the directional light backtracking for being incident on standard flat mirror 5 off-axis to tested metal
On paraboloid 3, light converges to focus F by metal paraboloid 3 to be measured, return in interferometer formed interference fringe to get to
The surface figure accuracy of off axis paraboloidal mirror to be measured；
(6) pedestal disk 8 is rotated, the surface figure accuracy of each off axis paraboloidal mirror in disk is measured.
Wherein, the processing method of the off axis paraboloidal mirror to be measured 3 and auxiliary concave spherical surface column 4 is as follows：First, processing from
When axis paraboloidal mirror, it is rotation that one piece of normal with parabola vertex is placed at the theoretical apex of off axis paraboloidal mirror 3 to be measured
Axis, radius of curvature is identical as the paraboloid focal length of off axis paraboloidal mirror 3 to be measured, and it is pushed up
The centrally located auxiliary concave spherical surface column 4 of point, is processed together with off axis paraboloid mirror to be measured, while process equipment ensures to assist concave spherical surface
The minimum point of column 4 is overlapped with parabola vertex.
Fizeau interferometer is a kind of more commonly used equal thickness interferometer, is mainly used for examining plane or spherical surface shape.It is monochromatic
The light that light source is sent out is focused at by lens on circular hole diaphragm, and diaphragm is located on the focal plane of collimator objective.Go out from collimator objective
The collimated light beam penetrated returns in the lower plane of the reference planes with wedge degree and the upper plane reflection of tested plane, then passes through standard
Straight object lens and object lens form two pictures of the aperture of circular hole diaphragm on the focal plane of eyepiece.Adjust the work where part to be measured
Platform makes two pictures overlap.If replacing eyepiece with telescopic magnifier, so that it may to see equal thick interference fringe in tested plane.Profit
With the operation principle of above-mentioned fizeau interferometer, in the apparatus of the present, the parallel spherical surfaces monochromatic light 100 that fizeau interferometer is sent out
The reflection light of interior reflective surface A through standard spherical mirror and the light 700 for the information for carrying metal off axis paraboloid mirror B to be measured are sent out
Raw coherent superposition, generates interference fringe, and interference fringe is observed in fizeau interferometer, you can measure the off-axis parabolic of metal to be measured
The surface figure accuracy of face mirror.
Although the present invention discloses preferred embodiment as above, the content that however, it is not to limit the invention is any ripe
Know this those skilled in the art, do not departing from the present invention main spirits and context in, when can make it is various change and retouch, because of the invention
Protection domain should be subject to the actual claim range applied for a patent.
Claims (6)
1. a kind of detection device of off axis paraboloidal mirror surface figure accuracy, which is characterized in that the device is by fizeau interferometer (1), mark
Director sphere mirror (2), auxiliary concave spherical surface column (4), pedestal disk (8), five dimension adjustment frames (7), standard flat mirror (5), two-dimension adjustment frame
(6), support fixes bottom plate (9), first base (10) and second base (11) composition；
The standard spherical mirror (2) is installed, the standard spherical mirror (2) is the striking Suo Gan on the fizeau interferometer (1)
The light beam output window of interferometer (1)；
The pedestal disk (8) is located at the lower section of the fizeau interferometer (1), and the pedestal disk (8) is equipped with off-axis parabolic to be measured
Face mirror (3) and auxiliary concave spherical surface column (4), the pedestal disk (8) is rounded, and the auxiliary concave spherical surface column (4) is set to the pedestal
At the center of disk (8), the off axis paraboloidal mirror (3) to be measured is centrosymmetric distribution in the surrounding of the pedestal disk (8), described
Assist the concave spherical surface radius of curvature of concave spherical surface column (4) equal with the focal length of off axis paraboloidal mirror (3) to be measured, the auxiliary is recessed
The minimum point of spherical surface column (4) is overlapped with the vertex of the off axis paraboloidal mirror (3) to be measured；
The pedestal disk (8) is set to described five and ties up adjustment frame (7) top surface；
The standard flat mirror (5) is set to the bottom surface of the two-dimension adjustment frame (6)；
The two-dimension adjustment frame (6) is located at the top of the off axis paraboloidal mirror (3) to be measured；
The five dimension adjustment frame (7), which is fixed on the support, to be fixed on bottom plate (9)；
The support fixed plate (9) is set in the second base (11)；
The fizeau interferometer (1), two-dimension adjustment frame (6) are set in the first base (10).
2. a kind of detection device of off axis paraboloidal mirror surface figure accuracy according to claim 1, it is characterised in that：It is described auxiliary
Help concave spherical surface column (4) a diameter of 20-50mm.
3. a kind of detection device of off axis paraboloidal mirror surface figure accuracy according to claim 1, it is characterised in that：Described two
Tieing up adjustment frame (6) has Tip and Tilt two-dimension adjustments.
4. a kind of detection device of off axis paraboloidal mirror surface figure accuracy according to claim 1, it is characterised in that：Described five
Tieing up adjustment frame (7) has the dimension adjustment of X, Y, Z, Tip and Tilt five.
5. a kind of detection device of off axis paraboloidal mirror surface figure accuracy according to claim 1, it is characterised in that：It is described from
Axis paraboloidal mirror is concave mirror.
6. a kind of method detecting off axis paraboloidal mirror surface figure accuracy using claim 1-5 any one of them detection devices,
It is characterized in that, this method comprises the following steps：
(1) according to the f1 numbers of off axis paraboloidal mirror to be measured (3), matched standard spherical mirror is selected to be installed to the Fizeau interference
On instrument, selection mode is as follows：
The bore D of the focal length f/ off axis paraboloidal mirrors of f1 numbers=paraboloidal mirror,
Bore D=2* (radius of off-axis amount+off axis paraboloidal mirror)
The f2 numbers of selected standard spherical mirror are less than or equal to the f1 numbers of off axis paraboloidal mirror, then by off axis paraboloidal mirror to be measured
(3) it is set on pedestal disk (8) with auxiliary concave spherical surface column (4)；
(2) five dimension adjustment frame (7) of adjustment makes the upper surface of pedestal disk (8) be in level, opens the fizeau interferometer (1), institute
State the light beam that fizeau interferometer (1) is sent out be radiated at it is to be measured off-axis on the standard spherical mirror (2) and the pedestal disk (8)
On paraboloidal mirror (3)；
(3) X-direction of five dimension adjustment frame (7) of adjustment, makes the center of standard spherical mirror (2) and the auxiliary concave spherical mirror column (4)
Center line perpendicular to pedestal disk (8)；
(4) Z-direction of five dimension adjustment frame (7) of adjustment, it is zero striped to make the interference pattern of concave spherical surface column (4) to be assisted, and is assisted at this time
The centre of sphere of concave spherical surface column (4) is overlapped with the focus F of standard spherical mirror (2), the spherical surface of the fizeau interferometer (1) output at this time
Wave is after off axis paraboloidal mirror to be measured (3) reflection on exiting parallel to standard flat mirror (5)；
(5) two-dimension adjustment frame (6) is adjusted, keeps the directional light backtracking for being incident on standard flat mirror (5) off-axis to tested metal
On paraboloid (3), light converges to focus F by off axis paraboloidal mirror to be measured (3), returns to and forms interference fringe in interferometer,
Obtain the surface figure accuracy of off axis paraboloidal mirror to be measured；
(6) pedestal disk (8) is rotated, the surface figure accuracy of each off axis paraboloidal mirror in disk is measured.
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