CN106441816B - Calculate detection device and detection method that holography method measures long-focus lens transmission wavefront - Google Patents
Calculate detection device and detection method that holography method measures long-focus lens transmission wavefront Download PDFInfo
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- CN106441816B CN106441816B CN201610951248.5A CN201610951248A CN106441816B CN 106441816 B CN106441816 B CN 106441816B CN 201610951248 A CN201610951248 A CN 201610951248A CN 106441816 B CN106441816 B CN 106441816B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0228—Testing optical properties by measuring refractive power
- G01M11/0235—Testing optical properties by measuring refractive power by measuring multiple properties of lenses, automatic lens meters
Abstract
The invention discloses detection devices and detection method that a kind of calculating holography method measures long-focus lens transmission wavefront, belong to field of optical measuring technologies.It mainly forms Feisuo optical interference circuit by interferometer, tested long-focus lens and Fresnel zone plate, when the collimation directional light of interferometer output is by standard flat mirror, a branch of to reflect to form canonical reference light beam by the standard flat mirror plane of reference, another beam transmits through tested long-focus lens, forms test beams along backtracking through zone plate reflection；Test beams are interfered with canonical reference light beam, are adjusted and are tested long-focus lens, keep interference fringe minimum, you can are measured and obtained the transmission wavefront of tested long-focus lens.The present invention is suitable for the detection of the transmission wavefront of long-focus lens.
Description
Technical field
The invention belongs to field of optical measuring technologies, are related to a kind of detection device, the detection method of lens transmission wavefront, especially
It is related to the detection device of the transmission wavefront of long-focus lens, detection method.
Background technology
With the development in the fields such as Aeronautics and Astronautics, astronomy and high power laser light, increase to optical system quality and essence
The requirement of degree, to ensure that optical system imaging quality, precise measuring optical lens transmission wavefront become more and more important.Heavy caliber
Long-focus lens is widely used in the large-scale Optical devices of the country such as inertial confinement fusion, astrosurveillance system.Transmission wavefront is
One important indicator of the class component, transmission wavefront is mismatched with design will directly affect beam quality and image quality.
Existing optical lens transmission wavefront test method mainly has spherical interference method, Ronchi grating method, Shack-Hartmann
Method.Spherical interference method is by comparing to obtain the wavefront of measured lens with one piece of standard spherical mirror.Interference pattern directly display by
Deviation between survey face and the plane of reference.It is with reference to what the surface quality of spherical mirror, the error of interferometer formed entire measuring device
System error.To the Wave-front measurement of large-aperture long-focus lens, since the mismachining tolerance and optical path of spherical mirror are too long, this method
Operability is poor.Ronchi grating method obtains lens wavefront information by calculating the offset of Moire fringe.Two cycle phases are same
Ronchi grating interval talbot distance put, wavefront gradients can measure by the translation of Moire fringe, obtain wavefront letter
Breath, but this method spatial resolution is relatively low.Shack-Hartmann method is provided each by the lenticule of the back focal plane placement in lens
The wavefront gradients of incident light, the wavefront that each lenticule obtains is by calculating its gradient information at Aili spot and utilizing minimum
Square law obtains the wavefront of whole surface.
In addition, application No. is 201510218238.6 applications for a patent for invention to disclose a kind of transmitted wave of meniscus lens
Preceding detection device and detection method, the detection device include the interferometer set gradually along light path, computed hologram, tested bent moon
Lens and spherical reflector；The light extraction end of interferometer is provided with standard lens, and interferometer is fixed on the 1st five dimension adjustment frame, meter
It calculates hologram to be fixed on the 2nd five dimension adjustment frame, tested meniscus lens is fixed on the 3rd five dimension adjustment frame, and spherical reflector is solid
It is scheduled on the 4th five dimension adjustment frame.The detection method includes obtaining spherical reflector global error, obtaining meniscus lens measurement totally
Error, processing three big steps of data.Using computed hologram, the alignment and compensation of hologram sheet and interferometer can be realized
The spherical aberration generated by meniscus lens and spherical reflector, makes entire detecting system realize zero testing.
It adopts when measuring with the aforedescribed process, light path is more complex, and adjustment is complicated when measurement；To the wavefront of long-focus lens
For detection, this method optical path is longer, and the disturbances such as vibration, air-flow can reduce accuracy of detection；Detection to Large Aperture Lenses,
The size of spherical reflector is also required to very greatly, and the factors such as machining accuracy, clamping of high-precision spherical reflector can influence to detect
Precision.
Invention content
It is an object of the invention to：Detection device and detection that a kind of holography method measures long-focus lens transmission wavefront are provided
Method, the Feisuo using flat interferometer, measured lens and Fresnel zone plate composition interfere light path to long-focus lens
It is detected, realizes the high-acruracy survey to the transmission wavefront of long-focus lens.
The technical solution adopted by the present invention is as follows：
A kind of detection device for calculating holography method and measuring long-focus lens transmission wavefront, including interferometer, interferometer outside
It is disposed with tested long-focus lens, Fresnel zone plate along the direction far from interferometer；
When collimating standard flat mirror of the directional light by interferometer end of interferometer output, part collimation directional light warp
Standard flat mirror reflects to form canonical reference light beam, and another part collimates directional light and penetrates standard flat mirror, tested focal length successively
It is reflected and along backtracking formation test beams, test beams and canonical reference light away from being generated in Fresnel on piece after lens
Beam generates interference fringe.
Wherein, the first order diffraction radius of curvature R of Nie Er zone plates meets relationship with the focal length f of tested long-focus lens：f
The spacing of=R+ τ, wherein τ between zone plate and lens.
Wherein, the radius parameter of each annulus of Fresnel zone plate is rn：(2ρn- 2R=n (λ/
2)), wherein ρnFor the n-th annulus to the light path of focus F, R is the radius of curvature of zone plate, and n is natural number, and λ is collimation directional light
Wavelength.
Wherein, further include five times regualting frame and two-dimensional adjustment frame, tested long-focus lens is positioned on five times regualting frame, luxuriant and rich with fragrance
Nie Er zone plates are positioned on two-dimensional adjustment frame.
A kind of holography method measures the detection method of long-focus lens transmission wavefront, includes the following steps：
Step 1: making Fresnel zone plate
According to the radius parameter r of each annulus of Fresnel zone platenMake Fresnel zone plate；
Step 2: before measuring background wave
Build Feisuo interference light path, before 0 grade of back wave of the Fresnel zone plate made in measuring process one, and will
As before background wave before 0 grade of back wave of Fresnel zone plate；
Step 3: before measuring composite wave
Tested long-focus lens is placed into the light path that step 2 is built, it is flat positioned at standard to be tested long-focus lens
Between face mirror and Fresnel zone plate；It is τ, the value of τ to adjust the spacing between Fresnel zone plate and tested long-focus lens
Ranging from 200mm~600mm adjusts the posture for being tested long-focus lens, and before measuring composite wave；
Step 4: data processing
Before subtracting the background wave measured in step 2 before the composite wave measured in step 3, tested long-focus lens is obtained
Transmission wavefront.
Wherein, in step 1, in the first order diffraction radius of curvature for determining Fresnel zone plate, Fresnel zone plate
First order diffraction radius of curvature R and the focal length f of tested long-focus lens meet relationship：F=R+ τ, wherein τ are zone plate and lens
Between spacing.
Wherein, in step 1, the radius parameter r of each annulus of Fresnel zone platenCalculation formula be：2ρn- 2R=n (λ/2), wherein ρnFor the n-th annulus to the light path of focus F, R is the curvature half of zone plate
Diameter, n are natural number, and λ is the wavelength for collimating directional light.
Wherein, when making Fresnel zone plate, the method for first using laser direct-writing makes mask plate, then utilizes ultraviolet exposure
Light method will form photoresist mask in the pattern transfer on mask plate to quartz base plate surface, recycle ibl by light
In pattern transfer to quartz base plate on photoresist mask, the photoetching of the patterned surface on quartz base plate is washed after the completion of to be etched
Glue.
Wherein, in step 2, the light path built includes interferometer, on the outside of interferometer along the direction far from interferometer according to
It is secondary to be provided with tested long-focus lens, Fresnel zone plate；
When collimating standard flat mirror of the directional light by interferometer end of interferometer output, part collimation directional light warp
Standard flat mirror reflects to form canonical reference light beam, and another part collimates directional light and penetrates standard flat mirror, tested focal length successively
It is reflected and along backtracking formation test beams, test beams and canonical reference light away from being generated in Fresnel on piece after lens
Beam generates interference fringe.
Wherein, further include five times regualting frame and two-dimensional adjustment frame, tested long-focus lens is positioned on five times regualting frame, luxuriant and rich with fragrance
Nie Er zone plates are positioned on two-dimensional adjustment frame.
In conclusion by adopting the above-described technical solution, the beneficial effects of the invention are as follows：
1, in detection device of the invention, flat interferometer, tested long-focus lens and Fresnel zone plate are placed in together
One piece of vibration-isolating platform, form common optical axis detecting system, Fresnel zone plate can compensate tested long-focus lens aberration and
Reference corrugated needed for providing, thus no longer need to introduce other auxiliary elements such as compensating glass in detection device, structure of the detecting device
It simplifies, is easy to adjustment, and a kind of accurate new method of simplicity is provided for the measurement of long-focus lens transmission wavefront, and use
The accuracy of detection that the detection device carries out long-focus lens transmission wavefront detection is higher.
2, in detection device of the invention, Fresnel zone plate is equivalent to convex reflecting mirror, the center of curvature and tested length
Focal length lenses focus overlaps, and radius of curvature R meets relationship f=R+ τ with focal length f so that no matter is tested the focal length f of long-focus lens
It is much, it may make spacing detection light path to be less than 1 meter by rationally designing Fresnel zone plate, utmostly reduce air-flow, vibration
The influence of equal environmental perturbations, improves accuracy of detection.
3, in detection device of the invention, the radius parameter r of each annulus of Fresnel zone platenMeet relationship：2ρn- 2R=n (λ/2), wherein ρnFor the n-th annulus to the light path of focus F, R is the curvature half of zone plate
Diameter, n are natural number, and λ is test optical wavelength；Thus the girdle radius that relational expression determines so that Fresnel zone plate is equivalent to song
Rate radius is the convex mirror of R, and so as to effectively shorten light path, light path is more simplified, and is reduced and is introduced in detection process
Detection error, improve accuracy of detection.
4, in detection device of the invention, long-focus lens clamping is tested on five times regualting frame, Fresnel is on chip
It is clipped on two-dimensional adjustment frame, the high-precision such as translation, inclination, pitching, which can be achieved, by five times regualting frame, two-dimensional adjustment frame is adjusted, and is adjusted
The posture of whole tested long-focus lens, Fresnel zone plate, enable tested long-focus lens, Fresnel zone plate posture more
Add the demand for adapting to detect, reduce and adjust error, improves accuracy of detection.
5, it in detection method of the invention, places before being tested long-focus lens, Fresnel zone plate is equivalent to reflector plate,
Interference detection background error has been reacted before its back wave；It places after being tested long-focus lens, the diffraction that Fresnel zone plate generates
Wavefront is provided with reference to spherical wave for detecting lens transmission wavefront, by this transmission wavefront background correction error, deductible Fresnel
The transmission wavefront detection error that zone plate processing introduces, improves accuracy of detection.
6, in detection method of the invention, Fresnel zone plate is equivalent to convex reflecting mirror, the center of curvature and tested length
Focal length lenses focus overlaps, and radius of curvature R meets relationship f=R+ τ with focal length f so that no matter is tested the focal length f of long-focus lens
It is much, it may make spacing detection light path to be less than 1 meter by rationally designing Fresnel zone plate, utmostly reduce air-flow, vibration
The influence of equal environmental perturbations, improves accuracy of detection.
7, in detection method of the invention, the radius parameter r of each annulus of Fresnel zone platenMeet relationship：2ρn- 2R=n (λ/2), wherein ρnFor the n-th annulus to the light path of focus F, R is the curvature half of zone plate
Diameter, n are natural number, and λ is test optical wavelength；Thus the girdle radius that relational expression determines so that Fresnel zone plate is equivalent to song
Rate radius is the convex mirror of R, and so as to effectively shorten light path, light path is more simplified, and is reduced and is introduced in detection process
Detection error, improve accuracy of detection.
8, in detection method of the invention, the Fresnel zone plate prepared using the preparation method, Fresnel zone plate
High precision machining, it is possible to provide close to ideal reference light wave；Using Fresnel zone plate can aberration for compensation, be not required to additionally introduce
Compensating glass, and optical path can be made to foreshorten in 1 meter, environmental perturbation is reduced, accuracy of detection is improved.
9, in detection method of the invention, flat interferometer, tested long-focus lens and Fresnel zone plate are placed in together
One piece of vibration-isolating platform, form common optical axis detecting system, Fresnel zone plate can compensate tested long-focus lens aberration and
Reference corrugated needed for providing, thus no longer need to introduce other auxiliary elements such as compensating glass in detection device, structure of the detecting device
It simplifies, is easy to adjustment, and a kind of accurate new method of simplicity is provided for the measurement of long-focus lens transmission wavefront, and use
The accuracy of detection that the detection device carries out long-focus lens transmission wavefront detection is higher.
10, in detection method of the invention, long-focus lens clamping is tested on five times regualting frame, Fresnel is on chip
It is clipped on two-dimensional adjustment frame, the high-precision such as translation, inclination, pitching, which can be achieved, by five times regualting frame, two-dimensional adjustment frame is adjusted, and is adjusted
The posture of whole tested long-focus lens, Fresnel zone plate, enable tested long-focus lens, Fresnel zone plate posture more
Add the demand for adapting to detect, reduce and adjust error, improves accuracy of detection.
Description of the drawings
Fig. 1 is the geometric representation of Fresnel zone plate in the present invention；
Fig. 2 is the light path schematic diagram before background wave in the present invention；
Fig. 3 is the light path schematic diagram before composite wave in the present invention；
Fig. 4 is the testing result figure of embodiment one (PV=0.309 λ, RMS=0.0719 λ)；
Fig. 5 is the testing result figure of embodiment two (PV=0.2692 λ, RMS=0.0285 λ)；
Fig. 6 is the testing result figure of embodiment two (PV=0.3376 λ, RMS=0.0393 λ)；
It is marked in figure：1- interferometers, 2- standard flats mirror, 3- are tested long-focus lens, 4- Fresnel zone plates, 5- cokes
Point.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
A kind of detection device for calculating holography method and measuring long-focus lens transmission wavefront comprising have interferometer, interfering
One end of instrument is provided with standard flat mirror, and standard flat mirror is structure as a whole with interferometer.It is additionally provided in the side of interferometer
Tested long-focus lens, Fresnel zone plate, interferometer, standard flat mirror, tested long-focus lens and Fresnel zone plate according to
Secondary setting, to form light path between interferometer and Fresnel zone plate.
When detection, first the Fresnel zone plate made is fitted into light path, opens interferometer, interferometer output is accurate
The collimation directional light of straight directional light, interferometer output first passes through standard flat mirror, through a part of standard after standard flat mirror
Straight directional light reflects to form canonical reference light beam through standard flat mirror rear surface, and another part collimates directional light and penetrates standard successively
Reflection is generated in Fresnel on piece and form test beams, test beams and canonical reference light along backtracking after plane mirror
Beam generates interference fringe, before which is background wave；Tested long-focus lens is fitted into light path again, is tested length
Between standard flat mirror and Fresnel zone plate, the collimation directional light of interferometer output first passes through standard and puts down focal length lenses
Face mirror reflects to form canonical reference light through the part collimation directional light after standard flat mirror through standard flat mirror rear surface
Beam, another part are collimated after directional light penetrates standard flat mirror, tested long-focus lens successively and are generated in Fresnel on piece
It reflects and forms test beams along backtracking, test beams generate interference fringe with canonical reference light beam, which is
Before composite wave；Then, the saturating of tested long-focus lens is obtained before the background wave measured before being subtracted before the composite wave measured
Before ejected wave.
Before making Fresnel zone plate, the first order diffraction radius of curvature of Fresnel zone plate and each annulus need to be determined
Radius parameter the two main parameters.Wherein, the first order diffraction radius of curvature R Yu tested long-focus of Fresnel zone plate
The focal length f of lens meets relationship：The spacing of f=R+ τ, wherein τ between zone plate and lens.Fresnel zone plate is equivalent to convex
Face speculum, the center of curvature are overlapped with tested long-focus lens focus, and radius of curvature R meets relationship f=R+ τ with focal length f, makes
The focal length f that long-focus lens no matter must be tested is much, may make spacing detection light path small by rationally designing Fresnel zone plate
In 1 meter, the influence of the environmental perturbations such as air-flow, vibration is utmostly reduced, improves accuracy of detection.
Wherein, the radius parameter of each annulus of Fresnel zone plate is rn：2ρn- 2R=n (λ/2),
ρnFor the n-th annulus to the light path of focus F, R is the radius of curvature of zone plate, and n is natural number, and λ is the wavelength for collimating directional light.By
The girdle radius that this relational expression determines so that Fresnel zone plate is equivalent to the convex mirror that radius of curvature is R, so as to effectively contract
Short light path, light path are more simplified, and the detection error introduced in detection process is reduced, and improve accuracy of detection.
When making Fresnel zone plate, the method for first using laser direct-writing makes mask plate, then utilizes uv-exposure method
Photoresist mask will be formed in pattern transfer on mask plate to quartz base plate surface, recycle ibl by photoresist
In pattern transfer to quartz base plate on mask, the photoresist of the patterned surface on quartz base plate is washed after the completion of to be etched i.e.
It can.The Fresnel zone plate prepared using the preparation method, the high precision machining of Fresnel zone plate, it is possible to provide close to preferably
Reference light wave；Using Fresnel zone plate can aberration for compensation, be not required to additionally introduce compensating glass, and optical path can be made to foreshorten to
In 1 meter, environmental perturbation is reduced, improves accuracy of detection.
In addition, in order to preferably adjust the position of tested long-focus lens and Fresnel zone plate, the detection device is improved
Measurement accuracy, thus five times regualting frame and two-dimensional adjustment frame are additionally provided in the detection device, and tested long-focus is saturating
Mirror is positioned on five times regualting frame, and Fresnel zone plate is positioned on two-dimensional adjustment frame.Pass through five times regualting frame, two-dimensional adjustment
Frame can be achieved translation, inclination, pitching etc. high-precision adjust, adjust be tested long-focus lens, Fresnel zone plate posture, make by
Survey long-focus lens, Fresnel zone plate posture can more adapt to detection demand, reduce adjust error, improve detection essence
Degree.
A kind of detection method for calculating holography method and measuring long-focus lens transmission wavefront, includes the following steps：
Step 1: making Fresnel zone plate
According to the radius parameter r of each annulus of Fresnel zone platenMake Fresnel zone plate；
Wherein, before making Fresnel zone plate, need to determine Fresnel zone plate first collection diffraction radius of curvature and
The two main parameters of the radius parameter of each annulus.Wherein, the first order diffraction radius of curvature R of Fresnel zone plate with it is tested
The focal length f of long-focus lens meets relationship：The spacing of f=R+ τ, wherein τ between zone plate and lens.Wherein, Fresnel wave
The radius parameter of each annulus of strap is rn：2ρn- 2R=n (λ/2), ρnFor the n-th annulus to the light of focus F
Journey, R are the radius of curvature of zone plate, and n is natural number, and λ is test optical wavelength.
Wherein, when making Fresnel zone plate, the method for first using laser direct-writing makes mask plate, then utilizes ultraviolet
Exposure method will form photoresist mask in the pattern transfer on mask plate to quartz base plate surface, recycle ibl will
In pattern transfer to quartz base plate on photoresist mask, the light of the patterned surface on quartz base plate is washed after the completion of to be etched
Photoresist.
Step 2: before measuring background wave
Build Feisuo interference light path, before 0 grade of back wave of the Fresnel zone plate made in measuring process one, and will
As before background wave before 0 grade of back wave of Fresnel zone plate.
Step 3: before measuring composite wave
Tested long-focus lens is placed into the light path that step 2 is built, it is flat positioned at standard to be tested long-focus lens
Between face mirror and Fresnel zone plate；Adjust the value model of the spacing τ, τ between Fresnel zone plate and tested long-focus lens
It encloses for 200mm~600mm, adjusts the posture for being tested long-focus lens, and before measuring composite wave.
It is 200mm~600mm by the value range suggestion of τ, takes into account safety and the accuracy of detection of operation, spacing is shorter,
The influence of the environment such as flow perturbation, vibration is smaller, and accuracy of detection is higher.
Step 4: data processing
Before subtracting the background wave measured in step 2 before the composite wave measured in step 3, tested long-focus lens is obtained
Transmission wavefront.
The light path built includes interferometer, is disposed with along the direction far from interferometer on the outside of interferometer tested
Long-focus lens, Fresnel zone plate；
When collimating standard flat mirror of the directional light by interferometer end of interferometer output, part collimation directional light warp
Standard flat mirror reflects to form canonical reference light beam, and another part collimates directional light and penetrates standard flat mirror, tested focal length successively
It is reflected and along backtracking formation test beams, test beams and canonical reference light away from being generated in Fresnel on piece after lens
Beam generates interference fringe.
When detection, taken out in step 2 before tested long-focus lens is detected and obtains background wave, in step 3
In be put into before tested long-focus lens is detected and obtains composite wave.
In addition, in order to preferably adjust the position of tested long-focus lens and Fresnel zone plate, the detection device is improved
Measurement accuracy, thus five times regualting frame and two-dimensional adjustment frame are additionally provided in the detection device, and tested long-focus is saturating
Mirror is positioned on five times regualting frame, and Fresnel zone plate is positioned on two-dimensional adjustment frame..
Embodiment 1
Wavelength X=632.8nm of interferometer output collimation directional light, the size for being tested long-focus lens is Φ 80mm, quilt
The focal length f=1.5m of long-focus lens is surveyed, clear aperture is Φ 70mm, the first order diffraction radius of curvature R of Fresnel zone plate
=1.2m, size are Φ 80mm, spacing τ=0.3m of Fresnel zone plate and tested long-focus lens, are tested long-focus lens
With the spacing about 0.3m of the standard flat mirror of interferometer, total light path is about 0.6m.Testing result is as shown in Fig. 4.
Embodiment 2
Wavelength X=632.8nm of interferometer output collimation directional light, the size for being tested long-focus lens is Φ 430mm, quilt
The focal length f=31.25m of long-focus lens is surveyed, clear aperture is Φ 420mm, the first order diffraction curvature half of Fresnel zone plate
Diameter R=30.75m, size are Φ 430mm, spacing τ=0.5m of Fresnel zone plate and tested long-focus lens, are tested focal length
The spacing about 0.4m of standard flat mirror away from lens and interferometer, total light path are about 0.9m.Testing result such as 5 institute of attached drawing
Show.
Embodiment 3
Wavelength X=632.8nm of interferometer output collimation directional light, the size for being tested long-focus lens is Φ 430mm, quilt
The focal length f=13.5m of long-focus lens is surveyed, clear aperture is Φ 420mm, the first order diffraction radius of curvature of Fresnel zone plate
R=13mm, size are Φ 430mm, spacing τ=0.5m between Fresnel zone plate and tested long-focus lens, are tested focal length
The spacing about 0.4m of standard flat mirror away from lens and interferometer, total light path are about 0.9m.Testing result such as 6 institute of attached drawing
Show.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.
Claims (8)
1. a kind of holography method measures the detection device of long-focus lens transmission wavefront, it is characterised in that：Including interferometer (1), do
On the outside of interferometer (1) tested long-focus lens (3), Fresnel zone plate (4) are disposed with along the direction far from interferometer (1)；
When the collimation directional light of interferometer (1) output is by standard flat mirror (2) of interferometer (1) end, part collimation is flat
Row light reflects to form canonical reference light beam through standard flat mirror (2), and another part collimates directional light and penetrates standard flat mirror successively
(2), it is tested after long-focus lens (3) and generates reflection on Fresnel zone plate (4) and form test beams along backtracking, survey
It tries light beam and generates interference fringe with canonical reference light beam；
First order diffraction radius of curvature R of Fresnel zone plate (4) meets relationship with the focal length f of tested long-focus lens (3)：f
The spacing of=R+ τ, wherein τ between zone plate and lens；
The radius parameter of each annulus of Fresnel zone plate (4) is rn：(2ρn- 2R=n (λ/2)), wherein
ρnFor the n-th annulus to the light path of focus F, R is the radius of curvature of zone plate, and n is natural number, and λ is the wavelength for collimating directional light.
2. a kind of holography method as described in claim 1 measures the detection device of long-focus lens transmission wavefront, it is characterised in that：
Further include five times regualting frame and two-dimensional adjustment frame, tested long-focus lens (3) is positioned on five times regualting frame, Fresnel zone plate
(4) it is positioned on two-dimensional adjustment frame.
3. a kind of holography method measures the detection method of long-focus lens transmission wavefront, which is characterized in that include the following steps：
Step 1: making Fresnel zone plate (4)
According to the radius parameter r of each annulus of Fresnel zone plate (4)nMake Fresnel zone plate (4)；
Step 2: before measuring background wave
Build Feisuo interference light path, before 0 grade of back wave of the Fresnel zone plate (4) made in measuring process one, and will
As before background wave before 0 grade of back wave of Fresnel zone plate (4)；
Step 3: before measuring composite wave
Tested long-focus lens (3) is placed into the light path that step 2 is built, tested long-focus lens (3) is located at standard
Between plane mirror (2) and Fresnel zone plate (4)；Between adjusting between Fresnel zone plate (4) and tested long-focus lens (3)
Away from most τ, the value range of τ is 200mm~600mm, adjusts the posture for being tested long-focus lens (3), and before measuring composite wave；
Step 4: data processing
Before subtracting the background wave measured in step 2 before the composite wave measured in step 3, tested long-focus lens (3) is obtained
Transmission wavefront.
4. a kind of holography method as claimed in claim 3 measures the detection method of long-focus lens transmission wavefront, it is characterised in that：
In step 1, when determining the first order diffraction radius of curvature of Fresnel zone plate (4), the first order of Fresnel zone plate (4)
Diffraction radius of curvature R and the focal length f of tested long-focus lens (3) meet relationship：F=R+ τ, wherein τ be zone plate and lens it
Between spacing.
5. a kind of holography method as claimed in claim 3 measures the detection method of long-focus lens transmission wavefront, it is characterised in that：
In step 1, the radius parameter r of each annulus of Fresnel zone plate (4)nCalculation formula be：2ρn-2R
=n (λ/2), wherein ρnFor the n-th annulus to the light path of focus F, R is the radius of curvature of zone plate, and n is natural number, and λ is collimation
The wavelength of directional light.
6. a kind of holography method as claimed in claim 3 measures the detection method of long-focus lens transmission wavefront, it is characterised in that：
When making Fresnel zone plate (4), the method for first using laser direct-writing makes mask plate, then utilizes uv-exposure method by mask
Photoresist mask is formed in pattern transfer to quartz base plate surface on plate, recycles ibl will be on photoresist mask
Pattern transfer to quartz base plate on, the photoresist of patterned surface on quartz base plate is washed after the completion of to be etched.
7. a kind of holography method as claimed in claim 3 measures the detection method of long-focus lens transmission wavefront, it is characterised in that：
In step 2, the light path built includes interferometer (1), is set successively along the direction far from interferometer (1) on the outside of interferometer (1)
It is equipped with tested long-focus lens (3), Fresnel zone plate (4)；
When the collimation directional light of interferometer (1) output is by standard flat mirror (2) of interferometer (1) end, part collimation is flat
Row light reflects to form canonical reference light beam through standard flat mirror (2), and another part collimates directional light and penetrates standard flat mirror successively
(2), it is tested after long-focus lens (3) and generates reflection on Fresnel zone plate (4) and form test beams along backtracking, survey
It tries light beam and generates interference fringe with canonical reference light beam.
8. a kind of holography method as claimed in claim 7 measures the detection method of long-focus lens transmission wavefront, it is characterised in that：
Further include five times regualting frame and two-dimensional adjustment frame, tested long-focus lens (3) is positioned on five times regualting frame, Fresnel zone plate
(4) it is positioned on two-dimensional adjustment frame.
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| CN111238363B (en) * | 2018-11-28 | 2021-09-07 | 中国科学院光电技术研究所 | Multi-wave radial shearing interferometer based on Fresnel zone plate |
| CN111256959B (en) * | 2020-03-12 | 2022-02-11 | 中国工程物理研究院激光聚变研究中心 | Method for measuring focal length of lens based on calculation holography |
| CN112611548B (en) * | 2021-01-07 | 2023-03-21 | 昆明理工大学 | Lens focal length measuring device and method based on digital holography |
| CN113049228B (en) * | 2021-03-22 | 2023-03-24 | 中国科学院上海光学精密机械研究所 | Objective wave aberration detection device and detection method |
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