CN105115444A - Detection device and detection method of off-axis parabolic mirror surface shape precision - Google Patents
Detection device and detection method of off-axis parabolic mirror surface shape precision Download PDFInfo
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- CN105115444A CN105115444A CN201510567241.9A CN201510567241A CN105115444A CN 105115444 A CN105115444 A CN 105115444A CN 201510567241 A CN201510567241 A CN 201510567241A CN 105115444 A CN105115444 A CN 105115444A
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Abstract
The invention relates to a detection device of off-axis parabolic mirror surface shape precision. The detection device is composed of a Fizeau interferometer, a standard spherical mirror, an auxiliary concave spherical column, a base disc, a five-dimensional adjusting frame, a standard plane mirror, a two-dimensional adjusting frame, a supporting fixing bottom plate, a first base and a second base; the Fizeau interferometer is provided with the standard spherical mirror; the standard spherical mirror is a light beam output window of the Fizeau interferometer; the base disc is located below the Fizeau interferometer; the base disc is provided with an off-axis parabolic mirror to be detected and the auxiliary concave spherical column; the base disc is located at the top surface of the five-dimensional adjusting frame; the standard plane mirror is arranged at the bottom surface of the two-dimensional adjusting frame; and the two-dimensional adjusting frame is located above the off-axis parabolic mirror to be detected. With the detection device of the off-axis parabolic mirror surface shape precision of the invention adopted, the surface shape precision of the off-axis parabolic mirror can be accurately and quickly detected.
Description
Technical field
The present invention relates to technical field of optical detection, particularly a kind of pick-up unit of the off axis paraboloidal mirror surface figure accuracy based on fizeau interferometer and detection method.
Background technology
The traditional detection method of optical element and technology have continued to use many decades.Optical detection relates to detected element material, bore, kind and measuring technology, instrument and equipment etc.Detected element of a great variety, includes parallel flat, sphere, aspheric surface, free form surface, diffraction grating, axicon lens, cylindrical lens etc., has special aspheric surface as parabola, ellipsoid, hyperboloid and other aspheric surface in addition in aspheric surface.Key instrument conventional in optical detection can be divided into interferometer class, surface profiler class, MTF tester class, precision spherometer class, focal length and eccentric testing instrument class and Other Instruments etc.
All developing and developing respective advanced instrument both at home and abroad.The domestic interferometer manufacturing firm that is representative with Institutes Of Technology Of Nanjing and Chengdu Tai Ke company, the product bore of all kinds of Digital interferometer has Φ 25mm ~ Φ 600mm; All kinds of interferometers from bore 4 " ~ 32 " that import is representative with Zygo company of the U.S.; The non-contact surface contourgraph that Zygo company develops for ultimate principle with 3D interference microscope, from early stage Maxim3D5700 to the ZemapperSystem etc. of latest modern technological; Britain Tayloy-Hobson contact pin type contourgraph; The three-coordinates measuring machine, 4D interferometer etc. of practical requirement.
But, on optical detecting instrument and technology application, still there is a lot of problem and shortage, such as use contourgraph cannot obtain the surface figure accuracy of whole, use plane mirror measurement to be then limited to the size of level crossing.
At present, the pick-up unit about off axis paraboloidal mirror surface figure accuracy and method is not yet had.
Summary of the invention
The object of the invention is to overcome the difficulty of at present off axis paraboloid mirror surface figure accuracy being carried out to accurately detection, a kind of pick-up unit and detection method of the off axis paraboloidal mirror surface figure accuracy based on fizeau interferometer are provided.
Technical solution of the present invention is as follows:
A pick-up unit for off axis paraboloidal mirror surface figure accuracy, this device is made up of fizeau interferometer, standard spherical mirror, auxiliary concave spherical surface post, pedestal disk, five dimension adjustment rack, standard flat mirror, two-dimension adjustment frame, support fixed base plate, the first base and the second bases;
Described fizeau interferometer is provided with described standard spherical mirror, and described standard spherical mirror is the light beam output window of described fizeau interferometer;
Described pedestal disk is positioned at the below of described fizeau interferometer, and described pedestal disk is provided with off axis paraboloidal mirror to be measured and auxiliary concave spherical surface post;
Described pedestal disk is located at described five dimension adjustment rack end faces;
The bottom surface of described two-dimension adjustment frame is located at by described standard flat mirror;
Described two-dimension adjustment chord position is in the top of described off axis paraboloidal mirror to be measured;
Described five dimension adjustment racks are fixed on described support fixed base plate;
Described support fixed head is located on described second base;
Described fizeau interferometer, two-dimension adjustment are set up on described first base.
Described pedestal disk is rounded, and the center of described pedestal disk is located at by described auxiliary concave spherical surface post, and described off axis paraboloidal mirror to be measured to be centrosymmetric distribution in the surrounding of described pedestal disk.
The concave spherical surface radius-of-curvature of described auxiliary concave spherical surface post is equal with the focal length of described off axis paraboloidal mirror to be measured.
The minimum point of described concave spherical surface overlaps with the summit of described off axis paraboloidal mirror to be measured.
Described auxiliary concave spherical surface column diameter is 20-50mm.
Described two-dimension adjustment frame has Tip and Tilt two-dimension adjustment.
Described five dimension adjustment racks have X, Y, Z, Tip and Tilt five and tie up adjustment.
Described off axis paraboloidal mirror is concave mirror.
Utilize above-mentioned detection device to detect a method for off axis paraboloidal mirror surface figure accuracy, the method comprises the steps:
(1) according to the f1 number of off axis paraboloidal mirror to be measured, select the standard spherical mirror of coupling to be installed on described fizeau interferometer, selection mode is as follows:
The bore D of the focal distance f/off axis paraboloidal mirror of f1 number=paraboloidal mirror,
Bore D=2* (radius from axle amount+off axis paraboloidal mirror)
The f2 number of selected standard spherical mirror is less than or equal to the f1 number of off axis paraboloidal mirror, is then located on pedestal disk by off axis paraboloidal mirror to be measured and auxiliary concave spherical surface post;
(2) adjusting five dimension adjustment racks makes the upper surface of pedestal disk be in level, and open described fizeau interferometer, the light beam that described fizeau interferometer sends is on the to be measured off axis paraboloidal mirror of described standard spherical mirror full illumination on described pedestal disk;
(3) adjust the X-direction of five dimension adjustment racks, make the line at the center of the center of standard spherical mirror and described auxiliary concave spherical mirror post perpendicular to pedestal disk;
(4) Z-direction of five dimension adjustment racks is adjusted, make to treat that the interferogram of auxiliary concave spherical surface post is zero striped, now the auxiliary centre of sphere of concave spherical surface post overlaps with the focal point F of standard spherical mirror, the spherical wave of now described fizeau interferometer output after off axis paraboloidal mirror to be measured reflects exiting parallel on standard flat mirror;
(5) two-dimension adjustment frame is regulated, the former road of directional light inciding standard flat mirror is made to turn back on tested metal off axis paraboloid mirror, light converges to focal point F through off axis paraboloidal mirror to be measured, gets back in interferometer and forms interference fringe, namely obtains the surface figure accuracy of off axis paraboloidal mirror to be measured;
(6) rotate described pedestal disk, the surface figure accuracy of each off axis paraboloidal mirror in dish is measured.
The job operation of described off axis paraboloidal mirror to be measured and auxiliary concave spherical surface post is as follows:
When processing off axis paraboloidal mirror, to place one piece at the theoretical apex place of off axis paraboloidal mirror to be measured be turning axle with the normal of parabola vertex, diameter 20-50mm, the radius-of-curvature of concave spherical surface is identical with the parabola focal length of off axis paraboloidal mirror to be measured, and its summit is positioned at the auxiliary concave spherical surface post at center, together process with off axis paraboloidal mirror to be measured, simultaneously overlapping of the minimum point of auxiliary concave spherical surface post and parabola vertex guaranteed by process equipment.
The invention has the beneficial effects as follows the off axis paraboloidal mirror by using various criterion spherical mirror to measure different size, expanding measurement range, and the surface figure accuracy of off axis paraboloidal mirror can be measured rapidly and accurately.
Accompanying drawing explanation
Fig. 1 is the structural representation of the pick-up unit of off axis paraboloidal mirror surface figure accuracy of the present invention;
Fig. 2 is the left view of the pick-up unit of off axis paraboloidal mirror surface figure accuracy of the present invention;
Fig. 3 is the index path of the pick-up unit of off axis paraboloidal mirror surface figure accuracy of the present invention;
Fig. 4 is the upward view of standard flat mirror and two-dimension adjustment frame thereof;
Fig. 5 is the three-view diagram of off axis paraboloidal mirror to be measured; Wherein, a is front elevation, and b is left view, and c is vertical view;
Fig. 6 is vertical view and the sectional view that pedestal disk comprises auxiliary concave spherical surface post and off axis paraboloidal mirror to be measured.
In figure: 1-fizeau interferometer, 2-standard spherical mirror, 3-off axis paraboloidal mirror to be measured, 4-auxiliary concave spherical surface post, 5-standard flat mirror, 6-two-dimension adjustment frame, 7-five dimension adjustment racks, 8-pedestal disk, 9-support fixed base plate, the 10-the first base, the 101-the first reference field, 11-the second base, the 111-the second reference field;
The parallel spherical surfaces monochromatic light that 100-fizeau interferometer sends, 200-through the sphere light of standard spherical mirror transmission, 300-through assisting the light of concave spherical surface post reflection, 400-the parallel rays that reflects through off axis paraboloidal mirror to be measured, 500-the parallel rays that is again reflected back through standard flat mirror, 600-through the light of off axis paraboloidal mirror to be measured reflecting focal again, 700-through the light of standard spherical mirror bounce back interferometer;
The interior reflective surface of A-standard spherical mirror, the outside surface of A '-standard spherical mirror, B-off axis paraboloidal mirror to be measured, the surface of C-auxiliary concave spherical mirror, the central point (parabola vertex) of O-auxiliary concave spherical surface.
Embodiment
Below in conjunction with specific embodiment, set forth the present invention further.Should be understood that these embodiments are only not used in for illustration of the present invention to limit the scope of the invention.In addition should be understood that those skilled in the art can make various changes or modifications the present invention, and these equivalent form of values fall within the application's appended claims limited range equally after the content of having read the present invention's instruction.
Off axis paraboloidal mirror to be measured 3 described in the present embodiment is metal to be measured, and infra-red material in addition or plastics etc. all can be applicable to the present invention through the off axis paraboloidal mirror of the material of SPDT processing.
Refer to Fig. 1-6, a pick-up unit for off axis paraboloidal mirror surface figure accuracy, is tieed up adjustment rack 7, standard flat mirror 5, two-dimension adjustment frame 6, support fixed base plate 9, first base 10 and the second base 11 formed by fizeau interferometer 1, standard spherical mirror 2, auxiliary concave spherical surface post 4, pedestal disk 8, five;
Described fizeau interferometer 1 is provided with described standard spherical mirror 2, and described standard spherical mirror 2 is light beam output windows of described fizeau interferometer 1; Described pedestal disk 8 is positioned at the below of described fizeau interferometer 1, and described pedestal disk 8 is provided with off axis paraboloidal mirror 3 to be measured and auxiliary concave spherical surface post 4; Described pedestal disk 8 is located at described five dimension adjustment rack 7 end faces; The bottom surface of described two-dimension adjustment frame 6 is located at by described standard flat mirror 5; Described two-dimension adjustment frame 6 is positioned at the top of described off axis paraboloidal mirror to be measured 3; Described five dimension adjustment racks 7 are fixed on described support fixed base plate 9; Described support fixed head 9 is located on described second base 11; Described fizeau interferometer 1, two-dimension adjustment frame 6 are located on described first base 10.
Described pedestal disk 8 is rounded, and the center of described pedestal disk 8 is located at by described auxiliary concave spherical surface post 4, and described off axis paraboloidal mirror 3 to be measured to be centrosymmetric distribution in the surrounding of described pedestal disk 8.
The concave spherical surface radius-of-curvature of described auxiliary concave spherical surface post 4 is equal with the vertex curvature radius of described off axis paraboloidal mirror 3 to be measured, and the minimum point of described concave spherical surface overlaps with the summit of described off axis paraboloidal mirror 3 to be measured.
The diameter of described auxiliary concave spherical surface post 4 is 20mm.
Described two-dimension adjustment frame 6 has Tip and Tilt two-dimension adjustment; Five dimension adjustment racks 7 have X, Y, Z, Tip and Tilt five and tie up adjustment.
Fig. 2 is the index path of the pick-up unit of off axis paraboloidal mirror surface figure accuracy of the present invention, the interior reflective surface A of standard spherical mirror as a reference plane, its surface figure accuracy is less than λ/20, B is the parabola of the metal off axis paraboloidal mirror to be measured through single-point diamond lathe process, C and B is simultaneously through concave spherical surface and the off axis paraboloid mirror of single-point diamond lathe process, the minimum point O point of this concave spherical surface is parabola vertex, and its radius-of-curvature equals paraboloidal focal length.
After the parallel spherical surfaces monochromatic light 100 that fizeau interferometer sends incides standard spherical mirror 2, a part of light is reflected by the interior reflective surface A of standard spherical mirror 2, and this reflection ray carries standard ball ground roll information.Another part light after the interior reflective surface A transmission (being called light 200) of standard spherical mirror 2, first converge to focal point F again diverging incident to the surface C of auxiliary concave spherical mirror and off axis paraboloid mirror B to be measured.According to paraboloidal optical property: the spherical light wave that focal point F sends exiting parallel after parabola, parallel light wave converges to focal point F through parabolic reflector.It is parallel with the optical axis of interferometer in order to paraboloidal optical axis is adjusted to, introduce an auxiliary concave spherical surface, the radius-of-curvature of this concave spherical surface equals paraboloidal focal length, and this sphere and parabola are together processed, central point (parabola vertex) O of this auxiliary concave spherical surface overlaps with paraboloidal summit.The position of adjustment five dimension adjustment rack, light 200 is made to be zero striped through assisting the light 300 of the surface C of concave spherical mirror reflection to get back to the interference fringe produced in interferometer, now paraboloidal optical axis namely with the optical axis coincidence of interferometer, the centre of sphere of auxiliary concave spherical surface post 4 overlaps with the focal point F of standard spherical mirror 2.The light wave (being still light 200) sent from F point after metal off axis paraboloidal mirror reflection (being called light 600) to be measured exiting parallel (light 400) to standard flat mirror 5, then the two-dimension adjustment frame 6 of standard flat mirror 5 is adjusted, directional light (light 500) former road is made to turn back on metal off axis paraboloidal mirror to be measured, again converge to the follow-up supervention of focal point F through parabolic reflector (light 600) and spill into the outside surface A ' being mapped to standard spherical mirror, reflect (light 700) through the outside surface A ' of standard spherical mirror and get back in interferometer.The parallel spherical surfaces monochromatic light 100 that fizeau interferometer sends meets through reflection ray and the light 700 of the interior reflective surface A of standard spherical mirror that frequency is identical, direction of vibration consistent, constant phase difference three conditions, thus interferes phenomenon, produces interference fringe.Observe interference fringe by fizeau interferometer and interference fringe analyzed thus draws the surface figure accuracy measurement result on off axis paraboloid mirror surface.
The detection method of off axis paraboloidal mirror surface figure accuracy of the present invention, comprises the steps:
(1) according to the f1 number of off axis paraboloidal mirror 3 to be measured, select the standard spherical mirror of coupling to be installed on described fizeau interferometer, concrete selection mode is as follows:
Such as: known, the radius=50.8mm of off axis paraboloidal mirror, from axle amount=20mm, focal length=110mm
Then, bore D=2* (the 20+50.8)=141.6mm of off axis paraboloidal mirror
The bore D=110/141.6=0.777mm of the focal distance f/off axis paraboloidal mirror of f1 number=paraboloidal mirror
So, f2 number < f1 number=0.777mm
Therefore, the f2=0.75mm of selected standard spherical mirror, is then located on pedestal disk 8 by off axis paraboloidal mirror 3 to be measured and auxiliary concave spherical surface post 4;
(2) adjusting five dimension adjustment racks 7 makes the upper surface of pedestal disk 8 be in level, and open described fizeau interferometer 1, the light beam that described fizeau interferometer 1 sends is on the to be measured off axis paraboloidal mirror 3 of described standard spherical mirror 2 full illumination on described pedestal disk 8;
(3) X-direction of five dimension adjustment racks 7 is adjusted, make the line at the center of the center of standard spherical mirror 2 and described auxiliary concave spherical mirror post 4 perpendicular to pedestal disk (8), even if the beam center that fizeau interferometer 1 sends is consistent to the distance h2 of the second reference field (111) with the center of described auxiliary concave spherical mirror post 4 to the distance h1 of the first reference field (101); Wherein, the first reference field (101) and the second reference field (111) are placed on same plane, for auxiliary positioning proving installation;
(4) Z-direction of five dimension adjustment racks 7 is adjusted, make to treat that the interferogram of auxiliary concave spherical surface post 4 is zero striped, now the centre of sphere of auxiliary concave spherical surface post 4 overlaps with the focal point F of standard spherical mirror 2, the spherical wave of now described fizeau interferometer 1 output after off axis paraboloid mirror 3 reflection to be measured exiting parallel on standard flat mirror 5;
(5) two-dimension adjustment frame 6 is regulated, the former road of directional light inciding standard flat mirror 5 is made to turn back on tested metal off axis paraboloid mirror 3, light converges to focal point F through metal parabola 3 to be measured, gets back in interferometer and forms interference fringe, namely obtains the surface figure accuracy of off axis paraboloidal mirror to be measured;
(6) rotate described pedestal disk 8, the surface figure accuracy of each off axis paraboloidal mirror in dish is measured.
Wherein, the job operation of described off axis paraboloidal mirror to be measured 3 and auxiliary concave spherical surface post 4 is as follows: first, when processing off axis paraboloidal mirror, to place one piece at the theoretical apex place of off axis paraboloidal mirror 3 to be measured be turning axle with the normal of parabola vertex, diameter 20mm, the radius-of-curvature of concave spherical surface is identical with the parabola focal length of off axis paraboloidal mirror 3 to be measured, and its summit is positioned at the auxiliary concave spherical surface post 4 at center, together process with off axis paraboloid mirror to be measured, simultaneously overlapping of the minimum point of auxiliary concave spherical surface post 4 and parabola vertex guaranteed by process equipment.
Fizeau interferometer is a kind of relatively more conventional equal thickness interferometer, is mainly used in inspection plane or spherical surface shape.The light that monochromatic source sends is focused on circular hole diaphragm by lens, and diaphragm is positioned on the focal plane of collimator objective.From the parallel beam of collimator objective outgoing, return at the lower plane of the reference planes with wedge degree and the upper plane reflection of tested plane, then on the focal plane of eyepiece, form two pictures of the aperture of circular hole diaphragm by collimator objective and object lens.Adjust the worktable at part place to be measured, two pictures are overlapped.If replace eyepiece with telescopic magnifier, just equal thick interference fringe can be seen in tested plane.Utilize the principle of work of above-mentioned fizeau interferometer, in the apparatus of the present, coherence stack is there is with the light 700 of the information carrying metal off axis paraboloid mirror B to be measured in the parallel spherical surfaces monochromatic light 100 that fizeau interferometer sends through the reflection ray of the interior reflective surface A of standard spherical mirror, produce interference fringe, and interference fringe is observed in fizeau interferometer, the surface figure accuracy of metal off axis paraboloidal mirror to be measured can be recorded.
Although preferred embodiment discloses as above by the present invention; so itself and be not used to limit content of the present invention; anyly be familiar with this those skilled in the art; not departing from main spirits of the present invention and context; when doing various change and retouching, the protection domain therefore invented should be as the criterion with the basic right claimed range applied for a patent.
Claims (10)
1. the pick-up unit of an off axis paraboloidal mirror surface figure accuracy, it is characterized in that, this device is made up of fizeau interferometer (1), standard spherical mirror (2), auxiliary concave spherical surface post (4), pedestal disk (8), five dimensions adjustment rack (7), standard flat mirror (5), two-dimension adjustment frame (6), support fixed base plate (9), the first base (10) and the second base (11);
Described fizeau interferometer (1) is provided with described standard spherical mirror (2), described standard spherical mirror (2) is the light beam output window of described fizeau interferometer (1);
Described pedestal disk (8) is positioned at the below of described fizeau interferometer (1), and described pedestal disk (8) is provided with off axis paraboloidal mirror to be measured (3) and auxiliary concave spherical surface post (4);
Described pedestal disk (8) is located at described five dimension adjustment rack (7) end faces;
Described standard flat mirror (5) is located at the bottom surface of described two-dimension adjustment frame (6);
Described two-dimension adjustment frame (6) is positioned at the top of described off axis paraboloidal mirror to be measured (3);
Described five dimensions adjustment rack (7) are fixed on described support fixed base plate (9);
Described support fixed head (9) is located on described second base (11);
Described fizeau interferometer (1), two-dimension adjustment frame (6) are located on described first base (10).
2. the pick-up unit of a kind of off axis paraboloidal mirror surface figure accuracy according to claim 1, it is characterized in that: described pedestal disk (8) is rounded, described auxiliary concave spherical surface post (4) is located at the center of described pedestal disk (8), and described off axis paraboloidal mirror to be measured (3) to be centrosymmetric distribution in the surrounding of described pedestal disk (8).
3. the pick-up unit of a kind of off axis paraboloidal mirror surface figure accuracy according to claim 1, is characterized in that: the concave spherical surface radius-of-curvature of described auxiliary concave spherical surface post (4) is equal with the focal length of described off axis paraboloidal mirror to be measured (3).
4. the pick-up unit of a kind of off axis paraboloidal mirror surface figure accuracy according to claim 3, is characterized in that: the minimum point of described concave spherical surface overlaps with the summit of described off axis paraboloidal mirror to be measured (3).
5. the pick-up unit of a kind of off axis paraboloidal mirror surface figure accuracy according to claim 1, is characterized in that: described auxiliary concave spherical surface post (4) diameter is 20-50mm.
6. the pick-up unit of a kind of off axis paraboloidal mirror surface figure accuracy according to claim 1, is characterized in that: described two-dimension adjustment frame (6) has Tip and Tilt two-dimension adjustment.
7. the pick-up unit of a kind of off axis paraboloidal mirror surface figure accuracy according to claim 1, is characterized in that: described five dimensions adjustment rack (7) have X, Y, Z, Tip and Tilt five and tie up adjustment.
8. the pick-up unit of a kind of off axis paraboloidal mirror surface figure accuracy according to claim 1, is characterized in that: described off axis paraboloidal mirror is concave mirror.
9. utilize the pick-up unit described in any one of claim 1-8 to detect a method for off axis paraboloidal mirror surface figure accuracy, it is characterized in that, the method comprises the steps:
(1) according to the f1 number of off axis paraboloidal mirror to be measured (3), select the standard spherical mirror of coupling to be installed on described fizeau interferometer, selection mode is as follows:
The bore D of the focal distance f/off axis paraboloidal mirror of f1 number=paraboloidal mirror,
Bore D=2* (radius from axle amount+off axis paraboloidal mirror)
The f2 number of selected standard spherical mirror is less than or equal to the f1 number of off axis paraboloidal mirror, is then located on pedestal disk (8) by off axis paraboloidal mirror to be measured (3) and auxiliary concave spherical surface post (4);
(2) adjusting five dimensions adjustment rack (7) makes the upper surface of pedestal disk (8) be in level, open described fizeau interferometer (1), the light beam that described fizeau interferometer (1) sends is on the to be measured off axis paraboloidal mirror (3) of described standard spherical mirror (2) full illumination on described pedestal disk (8);
(3) adjust the X-direction of five dimensions adjustment rack (7), make the line at the center of the center of standard spherical mirror (2) and described auxiliary concave spherical mirror post (4) perpendicular to pedestal disk (8); (4) Z-direction of five dimensions adjustment rack (7) is adjusted, the interferogram treating auxiliary concave spherical surface post (4) is made to be zero striped, now the centre of sphere of auxiliary concave spherical surface post (4) overlaps with the focal point F of standard spherical mirror (2), the spherical wave that the fizeau interferometer (1) now exports after off axis paraboloidal mirror to be measured (3) reflects exiting parallel on standard flat mirror (5);
(5) two-dimension adjustment frame (6) is regulated, the former road of directional light inciding standard flat mirror (5) is made to turn back on tested metal off axis paraboloid mirror (3), light converges to focal point F through off axis paraboloidal mirror to be measured (3), get back in interferometer and form interference fringe, namely obtain the surface figure accuracy of off axis paraboloidal mirror to be measured;
(6) rotate described pedestal disk (8), the surface figure accuracy of each off axis paraboloidal mirror in dish is measured.
10. the method for detection off axis paraboloidal mirror surface figure accuracy according to claim 9, is characterized in that: the job operation of described off axis paraboloidal mirror to be measured (3) and auxiliary concave spherical surface post (4) is as follows:
When processing off axis paraboloidal mirror, to place one piece at the theoretical apex place of off axis paraboloidal mirror to be measured (3) be turning axle with the normal of parabola vertex, diameter 20-50mm, the radius-of-curvature of concave spherical surface is identical with the parabola focal length of off axis paraboloidal mirror to be measured (3), and its summit is positioned at the auxiliary concave spherical surface post (4) at center, together process with off axis paraboloidal mirror to be measured (3), simultaneously overlapping of the minimum point of auxiliary concave spherical surface post (4) and parabola vertex guaranteed by process equipment.
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