CN106595471A - Adjusting method of off-axis aspheric surface - Google Patents
Adjusting method of off-axis aspheric surface Download PDFInfo
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- CN106595471A CN106595471A CN201611192873.2A CN201611192873A CN106595471A CN 106595471 A CN106595471 A CN 106595471A CN 201611192873 A CN201611192873 A CN 201611192873A CN 106595471 A CN106595471 A CN 106595471A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02097—Self-interferometers
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Abstract
The invention discloses an adjusting method of an off-axis aspheric surface. The adjusting method of the off-axis aspheric surface comprises the steps of S1, mounting the off-axis aspheric surface, and selecting a circular area on the off-axis aspheric surface; S2, adjusting the position of the off-axis aspheric surface so that data in the circular area can be detected; S3, performing translation of the off-axis aspheric surface, detecting a position after translation, and recording a zernike coefficient of a detecting result; S4, establishing a matrix equation between an adjusting amount and the zernike coefficient; S5, solving the matrix equation for obtaining a required adjusting amount in translating the off-axis aspheric surface to an ideal position; and S6, adjusting the off-axis aspheric surface through the adjusting amount which is obtained through calculation. The adjusting method of the off-axis aspheric surface has advantages of high speed and simple operation.
Description
Technical field
The present invention relates to superhigh precision aspheric surface detection field, and in particular to a kind of adjustment side of off-axis aspheric surface
Method.
Background technology
At present, aspherical optical element is widely applied in optical system, and aspherical optical element is to modern light
Learn processing and detection technique proposes challenge.Because the precision and efficiency of optics manufacture are largely dependent upon detection technique,
So high accuracy in-situ detection has very important meaning for aspheric surface and off-axis aspheric mirror manufacture.
Compensator method is traditional superhigh precision Aspherical-surface testing method.Needed using compensator method detection aspheric surface
The optical axis of the optical axis of aspheric surface tested surface and compensator system is worn into axle.
For coaxial aspheric surface, aspheric surface mirror is relative to the X of compensator system optical axis, the bias of Y-direction, X, Y-direction
Inclination it is related to the inclination in the zernike coefficients of testing result and coma.Therefore, it can by adjusting aspheric surface X, Y side
To bias, the distance of X, the inclination of Y-direction and range compensator is so as in the zernike coefficients by Aspherical-surface testing result
Inclination, coma and out of focus term coefficient be adjusted to 0, it is possible to aspheric surface is adjusted to into theoretical test position, i.e. aspheric surface tested
The optical axis in face wears axle with the optical axis of compensator system.Can typically there is the degree of freedom such as X, Y, Tilt X, Tilt Y in adjustment mechanism
Coupling, and adjust tested aspheric bias, incline inclination and the coma that can cause in measured result in Zernike items
Change.Zernike in the degree of freedom such as X, Y, Tilt X, Tilt Y dough-making powder shape testing result can typically be set up in adjustment mechanism
The matrix equation of the adjustment relation between inclination and coma in, by dematrix equation adjustment platform X, Y, Tilt are drawn
Adjustment amount needed for the degree of freedom such as X, Tilt Y.For off-axis aspheric surface, because it is generally not border circular areas, therefore can not be straight
Connect set up inclination in adjustment mechanism in the degree of freedom such as X, Y, Tilt X, Tilt Y dough-making powder shape testing result in Zernike items with
And the matrix equation of the adjustment relation between coma.
The content of the invention
It is contemplated that overcoming the defect that prior art is present, the present invention to employ the following technical solutions：
The invention provides a kind of method of adjustment of off-axis aspheric surface.The method of adjustment of the off-axis aspheric surface includes step
Suddenly：S1, installs off-axis aspheric surface, and a border circular areas are selected on off-axis aspheric surface；S2, adjusts the position of off-axis aspheric surface,
The data in border circular areas are enable to be detected；
S3, translates the position of off-axis aspheric surface, and the position after translation is detected, and records testing result
Zernike coefficients；S4, the matrix equation set up between adjustment amount and zernike coefficients；S5, dematrix equation, obtains river off-axis
Aspheric surface moves to the adjustment amount needed for ideal position；S6, by the adjustment amount for calculating off-axis aspheric surface is adjusted.
In certain embodiments, step S3, translates the position of off-axis aspheric surface, and the position after translation is examined
Survey, and record the zernike coefficients of testing result and be specially：Tested aspheric surface X-direction translation Δ x microns are adjusted, is detected tested
Selected border circular areas on off-axis aspheric surface, obtain testing result, in the zernike coefficients of record testing result now
Incline (z2x ', z3x '), coma (z7x ', z8x ') coefficient；Adjust tested aspheric surface Y-direction translation Δ y microns, detect it is tested from
Selected border circular areas in axle aspheric surface, obtain testing result, inclining in the zernike coefficients of record testing result now
Tiltedly (z2y ', z3y '), coma (z7y ', z8y ') coefficient；Tested aspheric surface Tilt X freedom degree rotatings Δ u microradians are adjusted, is examined
Selected border circular areas on tested off-axis aspheric surface are surveyed, testing result is obtained, the zernike systems of testing result now are recorded
Inclination (z2u ', z3u ') in number, coma (z7u ', z8u ') coefficient；Adjust tested aspheric surface Tilt Y freedom degree rotatings Δ v micro-
Radian, detects selected border circular areas on tested off-axis aspheric surface, obtains testing result, record testing result now
Inclination (z2v ', z3v ') in zernike coefficients, coma (z7v ', z8v ') coefficient.In certain embodiments, the matrix side
Cheng Wei：
Z2x ' × x/ Δ x+z2y ' × y/ Δ y+z2u ' × u/ Δ u+z2v ' × v/ Δ v=z2 '
Z3x ' × x/ Δ x+z3y ' × y/ Δ y+z3u ' × u/ Δ u+z3v ' × v/ Δ v=z3 '
Z7x ' × x/ Δ x+z7y ' × y/ Δ y+z7u ' × u/ Δ u+z7v ' × v/ Δ v=z7 '
Z8x ' × x/ Δ x+z8y ' × y/ Δ y+z8u ' × u/ Δ u+z8v ' × v/ Δ v=z8 '
Wherein, it is arbitrarily not off-axis in the detection of theoretical test position that the z2 ', z3 ', z7 ', z8 ' are respectively tested aspheric surface
Aspheric surface in the border circular areas selected in aspheric surface, resulting inclination (z2 ', z3 ') and coma (z7 ', z8 ') system
Number；Described x, y, u, v are respectively adjustment mechanism X when aspheric surface is recalled to into theoretical test position, Y-direction translation, rotate around X-axis
(Tilt X) and rotate the adjustment amount of (Tilt Y) degree of freedom around Y-axis.
In certain embodiments, step S5, dematrix equation obtains off-axis aspheric surface and moves to needed for ideal position
Adjustment amount, specially：Z2 ', z3 ', z7 ', z8 ' are brought in the matrix equation and solves x, y, u, v, obtained from tested aspheric
Non- theoretical test position before appearance is recalled to X, the Y-direction translation required for theoretical test position, and around X-axis (Tilt is rotated
X) and around Y-axis the adjustment amount of (Tilt Y) degree of freedom is rotated.
In certain embodiments, step S1, installs off-axis aspheric surface, and a circle is selected on off-axis aspheric surface
Domain, specially：Off-axis aspheric surface is installed, centered on the center of off-axis aspheric surface, a circle is selected on off-axis aspheric surface
Domain.
In certain embodiments, the adjustment of the position of the off-axis aspheric surface is adjusted by adjustment mechanism.
In certain embodiments, the position after the off-axis aspheric surface translation is examined by interferometer and compensator system
Survey.
In certain embodiments, the off-axis aspheric surface is installed in detection gripper shoe.
The present invention provide off-axis aspheric surface method of adjustment centered on the center of off-axis aspheric surface, in off-axis aspheric surface
One border circular areas of upper selection.Only X, Y, Tilt X, Tilt Y in adjustment mechanism are set up during adjustment with the data in this border circular areas
The square of the adjustment relation between inclination and coma in the adjustment amount dough-making powder shape testing result of each degree of freedom in Zernike items
Battle array equation, when drawing and for tested aspheric surface to be adjusted to test position by dematrix equation platform X, Y, Tilt X, Tilt Y is adjusted
Required adjustment amount, detection desired position, Ke Yijie are adjusted to by so only need to once being adjusted by tested aspheric surface
Save substantial amounts of adjustment time.The method have the advantages that quickly, simple, Adjustment precision it is high.
Description of the drawings
Fig. 1 is the off-axis aspheric surface test experience apparatus structure schematic diagram according to one embodiment of the invention；
Fig. 2 is to select border circular areas schematic diagram according to the off-axis aspheric surface of one embodiment of the invention；
Fig. 3 is the flow chart of the method for adjustment of the off-axis aspheric surface according to one embodiment of the invention.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with accompanying drawing and it is embodied as
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this
It is bright, and be not construed as limiting the invention.
It is a kind of method of adjustment of off-axis aspheric surface that the present invention is provided with reference to shown in Fig. 3.Methods described includes：
S1, installs off-axis aspheric surface, and a border circular areas are selected on off-axis aspheric surface；
S2, adjusts the position of off-axis aspheric surface, the data in border circular areas is detected；
S3, translates the position of off-axis aspheric surface, and the position after translation is detected, and records testing result
Zernike coefficients；
S4, the matrix equation set up between adjustment amount and zernike coefficients；
S5, dematrix equation obtains river off-axis aspheric surface and moves to adjustment amount needed for ideal position；
S6, by the adjustment amount for calculating off-axis aspheric surface is adjusted.
In certain embodiments, step S3, translates the position of off-axis aspheric surface, and the position after translation is examined
Survey, and record the zernike coefficients of testing result and be specially：Tested aspheric surface X-direction translation Δ x microns are adjusted, is detected tested
Selected border circular areas on off-axis aspheric surface, obtain testing result, in the zernike coefficients of record testing result now
Incline (z2x ', z3x '), coma (z7x ', z8x ') coefficient；Adjust tested aspheric surface Y-direction translation Δ y microns, detect it is tested from
Selected border circular areas in axle aspheric surface, obtain testing result, inclining in the zernike coefficients of record testing result now
Tiltedly (z2y ', z3y '), coma (z7y ', z8y ') coefficient；Tested aspheric surface Tilt X freedom degree rotatings Δ u microradians are adjusted, is examined
Selected border circular areas on tested off-axis aspheric surface are surveyed, testing result is obtained, the zernike systems of testing result now are recorded
Inclination (z2u ', z3u ') in number, coma (z7u ', z8u ') coefficient；Adjust tested aspheric surface Tilt Y freedom degree rotatings Δ v micro-
Radian, detects selected border circular areas on tested off-axis aspheric surface, obtains testing result, record testing result now
Inclination (z2v ', z3v ') in zernike coefficients, coma (z7v ', z8v ') coefficient.In certain embodiments, the matrix side
Cheng Wei：
Z2x ' × x/ Δ x+z2y ' × y/ Δ y+z2u ' × u/ Δ u+z2v ' × v/ Δ v=z2 '
Z3x ' × x/ Δ x+z3y ' × y/ Δ y+z3u ' × u/ Δ u+z3v ' × v/ Δ v=z3 '
Z7x ' × x/ Δ x+z7y ' × y/ Δ y+z7u ' × u/ Δ u+z7v ' × v/ Δ v=z7 '
Z8x ' × x/ Δ x+z8y ' × y/ Δ y+z8u ' × u/ Δ u+z8v ' × v/ Δ v=z8 '
Wherein, it is arbitrarily not off-axis in the detection of theoretical test position that the z2 ', z3 ', z7 ', z8 ' are respectively tested aspheric surface
Aspheric surface in the border circular areas selected in aspheric surface, resulting inclination (z2 ', z3 ') and coma (z7 ', z8 ') system
Number；Described x, y, u, v are respectively adjustment mechanism X when aspheric surface is recalled to into theoretical test position, Y-direction translation, rotate around X-axis
(Tilt X) and rotate the adjustment amount of (Tilt Y) degree of freedom around Y-axis.
In certain embodiments, step S5, dematrix equation obtains river off-axis aspheric surface and moves to ideal position institute
The adjustment amount for needing, specially：Z2 ', z3 ', z7 ', z8 ' are brought in the matrix equation and solves x, y, u, v, obtained from tested non-
The current non-theoretical test position of sphere is recalled to X, the Y-direction translation required for theoretical test position, is rotated around X-axis
(Tilt X) and rotate the adjustment amount of (Tilt Y) degree of freedom around Y-axis.
In certain embodiments, step S1, installs off-axis aspheric surface, and a circle is selected on off-axis aspheric surface
Domain, specially：Off-axis aspheric surface is installed, centered on the center of off-axis aspheric surface, a circle is selected on off-axis aspheric surface
Domain.
In certain embodiments, the adjustment of the position of the off-axis aspheric surface is adjusted by adjustment mechanism.
In certain embodiments, the position after the off-axis aspheric surface translation is examined by interferometer and compensator system
Survey.
In certain embodiments, the off-axis aspheric surface is installed in detection gripper shoe.
It is described in detail with reference to the method for adjustment of off-axis aspheric surface of the specific embodiment to provide the present invention.
As shown in figure 1, being the experimental provision of the method for adjustment for realizing a kind of off-axis aspheric surface of the invention, it includes interferometer
1, compensator 2, tested aspheric surface 3 detects the adjustment mechanism 5 of gripper shoe 4.Tested off-axis aspheric surface 3 is installed by detection gripper shoe 4
On adjustment mechanism 5.Adjustment mechanism 5 is used to adjust the inclination of tested off-axis aspheric surface 3, eccentric and out of focus.The interferometer 1
The light for sending is incided on off-axis aspheric surface compensator 2 after the reference plane mirror of interferometer 1, and reason is formed after compensated device 2
The aspherical wavefront thought to be incided and be reflected back interferometer 1 by tested off-axis aspheric surface 3 behind the surface of tested off-axis aspheric surface 3.Dry
Interference fringe is formed on the CCD of interferometer 1.
Described adjustment mechanism 5 is electric or hand five degree of freedom adjustment mechanism.Adjustment mechanism 5 be used for adjust it is tested from
The inclination of axle aspheric surface 3, eccentric and out of focus.
Female mirror of the tested off-axis aspheric surface 3 for being detected is rotational symmetric aspheric, and its expression formula can be written as
Wherein r2=x2+y2, c=1/R0, R0 is the vertex curvature radius of tested off-axis aspheric surface mother mirror, and k is quadratic surface
Constant.K values represent different types of aspheric surface when different.
Off-axis aspheric surface selects border circular areas schematic diagram to refer to shown in Fig. 2, has on the tested off-axis aspheric surface 3
Off-axis aspheric surface 31, selects off-axis aspheric surface center 32 as the center of the border circular areas 33 of detection.As shown in Fig. 2 will be off-axis
The off-axis amount of aspheric surface 31 is denoted as label 34.
A kind of adjustment of aspheric method of adjustment is comprised the following steps that：
(1) tested off-axis aspheric surface is installed on the experimental provision, and is substantially adjusted aspheric surface by adjustment mechanism
To theoretical test position.As shown in Fig. 2 centered on the off-axis aspheric surface center 32 of off-axis aspheric surface 31, in off-axis aspheric surface
One border circular areas 33 of upper selection.Only with the data in this border circular areas during adjustment.In the zernike coefficients of record testing result
Out of focus (z4), inclines (z2, z3), coma (z7, z8) coefficient.
(2) tested aspheric surface X-direction translation Δ x microns are adjusted using adjustment mechanism 5, is using interferometer 1 and compensator 2
Selected border circular areas on the tested off-axis aspheric surface of system detection, obtain testing result, record testing result now
Inclination (z2x ', z3x ') in zernike coefficients, coma (z7x ', z8x ') coefficient.
(3) tested aspheric surface Y-direction translation Δ y microns are adjusted using adjustment mechanism 5, is using interferometer 1 and compensator 2
Selected border circular areas on the tested off-axis aspheric surface of system detection, obtain testing result, record testing result now
Inclination (z2y ', z3y ') in zernike coefficients, coma (z7y ', z8y ') coefficient.
(4) tested aspheric surface Tilt X freedom degree rotatings Δ u microradians are adjusted using adjustment mechanism 5, using interferometer 1 and
Selected border circular areas on the tested off-axis aspheric surface of the system detectio of compensator 2, obtain testing result, record detection knot now
Inclination (z2u ', z3u ') in the zernike coefficients of fruit, coma (z7u ', z8u ') coefficient.
(5) tested aspheric surface Tilt Y freedom degree rotatings Δ v microradians are adjusted using adjustment mechanism 5, using interferometer 1 and
Selected border circular areas on the tested off-axis aspheric surface of the system detectio of compensator 2, obtain testing result, record detection knot now
Inclination (z2v ', z3v ') in the zernike coefficients of fruit, coma (z7v ', z8v ') coefficient.
(6) data obtained in the step of (1)-(5) are utilized to set up matrix equation, it is as follows
Z2x ' × x/ Δ x+z2y ' × y/ Δ y+z2u ' × u/ Δ u+z2v ' × v/ Δ v=z2 '
Z3x ' × x/ Δ x+z3y ' × y/ Δ y+z3u ' × u/ Δ u+z3v ' × v/ Δ v=z3 '
Z7x ' × x/ Δ x+z7y ' × y/ Δ y+z7u ' × u/ Δ u+z7v ' × v/ Δ v=z7 '
Z8x ' × x/ Δ x+z8y ' × y/ Δ y+z8u ' × u/ Δ u+z8v ' × v/ Δ v=z8 ' (formula 1)
It is arbitrarily off-axis not non-in the detection of theoretical test position that wherein z2 ', z3 ', z7 ', z8 ' are respectively tested off-axis aspheric surface
Aspheric surface, the inclination for obtaining (z2 ', z3 ') and coma (z7 ', z8 ') coefficient in the border circular areas selected on sphere, x,
Y, u, v are respectively adjustment mechanism X when off-axis aspheric surface is recalled to into theoretical test position, Y-direction translation, and around X-axis (Tilt is rotated
X) and around Y-axis the adjustment amount of degree of freedom such as (Tilt Y) is rotated.
(7) z2 ', z3 ', z7 ', z8 ' are brought in matrix equation (formula 1) and solve x, y, u, v, you can obtain from it is tested from
The current non-theoretical test position of axle aspheric surface is recalled to X, the Y-direction translation required for theoretical test position, is rotated around X-axis
(Tilt X) and rotate the adjustment amount of degree of freedom such as (Tilt Y) around Y-axis.
The present invention provide off-axis aspheric surface method of adjustment centered on the center of off-axis aspheric surface, in off-axis aspheric surface
One border circular areas of upper selection.Only X, Y, Tilt X, Tilt Y in adjustment mechanism are set up during adjustment with the data in this border circular areas
The square of the adjustment relation between inclination and coma in the adjustment amount dough-making powder shape testing result of each degree of freedom in Zernike items
Battle array equation, when drawing and for tested aspheric surface to be adjusted to test position by dematrix equation platform X, Y, Tilt X, Tilt Y is adjusted
Required adjustment amount, detection desired position, Ke Yijie are adjusted to by so only need to once being adjusted by tested aspheric surface
Save substantial amounts of adjustment time.The method have the advantages that quickly, simple, Adjustment precision it is high.
In describing the invention, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or
Position relationship, is for only for ease of the description present invention and simplifies description, rather than indicates or imply that the device or element of indication must
With specific orientation, with specific azimuth configuration and operation, therefore must be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include at least one this feature.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or it is integral；Can be that machinery connects
Connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements, unless otherwise clearly restriction.For one of ordinary skill in the art
For, can as the case may be understand above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be with
It is the first and second feature directly contacts, or the first and second features are by intermediary mediate contact.And, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or spy that the embodiment or example are described
Point is contained at least one embodiment of the present invention or example.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be with office
Combine in an appropriate manner in one or more embodiments or example.Additionally, in the case of not conflicting, the skill of this area
Art personnel can be tied the feature of the different embodiments or example described in this specification and different embodiments or example
Close and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
The specific embodiment of present invention described above, does not constitute limiting the scope of the present invention.Any basis
Various other corresponding change and deformation done by the technology design of the present invention, should be included in the guarantor of the claims in the present invention
In the range of shield.
Claims (8)
1. a kind of method of adjustment of off-axis aspheric surface, it is characterised in that comprise the following steps：
S1, installs off-axis aspheric surface, and a border circular areas are selected on off-axis aspheric surface；
S2, adjusts the position of off-axis aspheric surface, the data in border circular areas is detected；
S3, translates the position of off-axis aspheric surface, and the position after translation is detected, and records the zernike of testing result
Coefficient；
S4, the matrix equation set up between adjustment amount and zernike coefficients；
S5, dematrix equation obtains river off-axis aspheric surface and moves to adjustment amount needed for ideal position；
S6, by the adjustment amount for calculating off-axis aspheric surface is adjusted.
2. a kind of method of adjustment of off-axis aspheric surface as claimed in claim 1, it is characterised in that step S3, translate from
The aspheric position of axle, and the position after translation is detected, and record the zernike coefficients of testing result and be specially：
Tested aspheric surface X-direction translation Δ x microns are adjusted, selected border circular areas on tested off-axis aspheric surface are detected, is obtained
Testing result, the inclination (z2x ', z3x ') in the zernike coefficients of record testing result now, coma (z7x ', z8x ') system
Number；
Tested aspheric surface Y-direction translation Δ y microns are adjusted, selected border circular areas on tested off-axis aspheric surface are detected, is obtained
Testing result, the inclination (z2y ', z3y ') in the zernike coefficients of record testing result now, coma (z7y ', z8y ') system
Number；
Tested aspheric surface Tilt X freedom degree rotatings Δ u microradians are adjusted, selected circle on tested off-axis aspheric surface is detected
Region, obtains testing result, the inclination (z2u ', z3u ') in the zernike coefficients of record testing result now, coma
(z7u ', z8u ') coefficient；
Tested aspheric surface Tilt Y freedom degree rotatings Δ v microradians are adjusted, selected circle on tested off-axis aspheric surface is detected
Region, obtains testing result, the inclination (z2v ', z3v ') in the zernike coefficients of record testing result now, coma
(z7v ', z8v ') coefficient.
3. a kind of method of adjustment of off-axis aspheric surface as claimed in claim 1, it is characterised in that the matrix equation is：
Z2x ' × x/ Δ x+z2y ' × y/ Δ y+z2u ' × u/ Δ u+z2v ' × v/ Δ v=z2 '
Z3x ' × x/ Δ x+z3y ' × y/ Δ y+z3u ' × u/ Δ u+z3v ' × v/ Δ v=z3 '
Z7x ' × x/ Δ x+z7y ' × y/ Δ y+z7u ' × u/ Δ u+z7v ' × v/ Δ v=z7 '
Z8x ' × x/ Δ x+z8y ' × y/ Δ y+z8u ' × u/ Δ u+z8v ' × v/ Δ v=z8 '
Wherein, the z2 ', z3 ', z7 ', z8 ' are respectively tested aspheric surface arbitrarily not in the off-axis aspheric of theoretical test position detection
Aspheric surface in the border circular areas selected on face, resulting inclination (z2 ', z3 ') and coma (z7 ', z8 ') coefficient；
Described x, y, u, v are respectively adjustment mechanism X when aspheric surface is recalled to into theoretical test position, Y-direction translation, rotate around X-axis
(Tilt X) and rotate the adjustment amount of (Tilt Y) degree of freedom around Y-axis.
4. a kind of method of adjustment of off-axis aspheric surface as claimed in claim 3, it is characterised in that step S5, dematrix
Equation, obtains river off-axis aspheric surface and moves to adjustment amount needed for ideal position, specially：Z2 ', z3 ', z7 ', z8 ' are brought into
X, y, u, v are solved in the matrix equation, obtains being recalled to theoretical inspection from the current non-theoretical test position of tested aspheric surface
Location puts required X, Y-direction translation, rotates (Tilt X) around X-axis and rotates the adjustment of (Tilt Y) degree of freedom around Y-axis
Amount.
5. a kind of method of adjustment of off-axis aspheric surface as claimed in claim 1, it is characterised in that step S1, install from
Axle aspheric surface, and a border circular areas are selected on off-axis aspheric surface, specially：Off-axis aspheric surface is installed, with off-axis aspheric surface
Centered on center, a border circular areas are selected on off-axis aspheric surface.
6. a kind of method of adjustment of off-axis aspheric surface as claimed in claim 1, it is characterised in that the position of the off-axis aspheric surface
The adjustment put is adjusted by adjustment mechanism.
7. a kind of method of adjustment of off-axis aspheric surface as claimed in claim 1, it is characterised in that the off-axis aspheric surface translation
Detected by interferometer and compensator system position afterwards.
8. a kind of method of adjustment of off-axis aspheric surface as claimed in claim 1, it is characterised in that the off-axis aspheric surface is pacified
It is mounted in detection gripper shoe.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN114593671B (en) * | 2022-01-25 | 2023-10-20 | 华南师范大学 | Implanted on-axis and off-axis digital holographic switching device based on parallel flat plate |
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