CN109975820A - Synchronization polarization phase-shifting focus detection system based on Linnik type interference microscope - Google Patents
Synchronization polarization phase-shifting focus detection system based on Linnik type interference microscope Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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Abstract
The invention discloses a kind of synchronization polarization phase-shifting focus detection systems based on Linnik type interference microscope, including white light source, collimating mirror, the first quarter wave plate, laser light source, kohler's illumination system, devating prism, transflector mirror, cube Amici prism, two microcobjectives, reference planes, the second quarter wave plate, analyzer, condenser lens, Amici prism, the direction x line array CCD, the direction y line array CCD.White light source generates white light, it is collimated, the means such as polarization form linearly polarized light, after cube Amici prism light splitting, reference planes and sample are irradiated to through two microcobjectives respectively, return light is respectively radiated to x after Amici prism is divided, and the direction y line array CCD generates interference fringe image, is changed according to image defocus aberration and realizes focusing test.Laser uniform after Kohler illumination system is reflected through devating prism etc., through the direct writes sample such as cube Amici prism.The present invention has the advantages that fast data processing, real-time fixed-focus, obtains sample position and topographical information.
Description
Technical field
The invention belongs to field of optical detection, specifically design a kind of synchronous polarization phase based on Linnik type interference microscope
Move focus detection system.
Background technique
Auto-focusing is divided into two classes for principle: one kind is based on range measurement between camera lens and the target that is taken
Ranging auto-focusing；Another kind of is the focus detection auto-focusing based on imaging clearly image on focusing screen.Autofocus Technology
Realizing also has several different methods.
F.Murakami et al., in " Accuracy assessment of a laser triangulation
Sensor " optic triangle method that proposes in a text, when according to being moved up and down by side, semiconductor laser is in position sensitive detection
The position of imaging facula on device can move, and can be calculated by triangle relation formula by between side displacement and spot displacement
Relationship.Laser triangulation have many advantages, such as it is non-contact, be not easy injured surface, but because its precision is surveyed by measuring system itself
It measures error and is difficult to meet industrial development demand.
Q.Li proposes to utilize deviation laser focusing lens optical axis in " Autofocus system for microscope "
Auxiliary beam, realize detection to focusing error, referred to as eccentric pencil method, pass through received light intensity difference on detector
It focuses with the relationship of displacement.
E.Higurashi et al. is in " Nanometer-displacement detection of optically
trapped metallic particles based on critical angle method for small force
Detection " in propose to realize focusing using the abrupt change characteristic near the cirtical angle of total reflection, abbreviation critical angle method, utilization
When sample is focused, the light intensity being reflected on two detectors is equal, and when defocus, and light intensity not realize pair by equal phenomenon
It is burnt.
DG.Kocher proposes to utilize one in " Automated Foucault test for focus sensing "
The edge of a knife is inserted into the return light path from measured surface reflected light path, and is located at the focal point of the condenser lens of return light path, benefit
Light beam is divided into identical left and right two parts with the edge of a knife, introduces two detectors respectively, differential wave is formed, improves system
Sensitivity, this method are referred to as Foucault knife method.
KC.Fan et al. is in " Development of a low-cost autofocusing probe for profile
Measurement " in describe a kind of focusing method for being widely used in optical storage apparatus, referred to as method of astigmatism, utilize column
Lens are different with the focal length on sagitta of arc direction in meridian direction, and light beam projects the focal beam spot shape meeting on 4 quadrant detector
As the displacement of object changes, by the operation of four signal output ends on 4 quadrant detector, focusing error is obtained
Sample is adjusted to focal plane to drive voice coil motor by signal.
When above method multi-pass is excessively quasi- burnt and defocus, phenomenon and differential numerical value on detector are focused, but very
Few method is given focal plane, to calculate specific defocusing amount.
Summary of the invention
The purpose of the present invention is to provide a kind of synchronization polarization phase-shifting focus detection system based on Linnik type interference microscope,
Interference image can be quickly handled, realizes real-time focusing test, obtains sample position and topographical information.
A kind of technical solution of the object of the invention are as follows: synchronization polarization phase-shifting inspection based on Linnik type interference microscope
Burnt system, including white light source, collimating mirror, the first quarter wave plate, laser light source, kohler's illumination system, devating prism, transflector
Mirror, the first microcobjective, reference planes, the second microcobjective, the second quarter wave plate, analyzer, focuses thoroughly cube Amici prism
Mirror, Amici prism, the direction x line array CCD, the direction y line array CCD；Common optical axis sets gradually white light source, collimating mirror, the one 1/4 wave
Piece, devating prism and transflector mirror, optical axis where above-mentioned component are primary optic axis；Common optical axis sets gradually laser light source, and section strangles
Lighting system, devating prism, optical axis where above-mentioned component are the second optical axis；Common optical axis sets gradually sample, second micro-
Object lens, cube Amici prism, transflector mirror, the second quarter wave plate, analyzer, condenser lens, Amici prism, the direction x linear array
CCD, optical axis where above-mentioned component are third optical axis；Common optical axis sets gradually a cube Amici prism, the first microcobjective, with reference to flat
Face, optical axis where above-mentioned component are the 4th optical axis；Common optical axis sets gradually Amici prism, the direction y line array CCD, above-mentioned component institute
It is the 5th optical axis in optical axis；Wherein primary optic axis and the 4th optical axis, the 5th optical axis are parallel to each other, the second optical axis and third optical axis phase
It is mutually parallel, and primary optic axis and the 4th optical axis, the 5th optical axis are respectively perpendicular to the second optical axis and third optical axis, the first microcobjective
It is located on the reflected light path of cube Amici prism with reference planes, the second microcobjective and sample are located at cube Amici prism
Transmitted light path on, and the first microcobjective and the second microcobjective are identical.
White light source generates white light, and the first quarter wave plate that collimated mirror collimated incident is placed to 45 ° forms circularly polarized light,
The two orthogonal linearly polarized lights of beam direction of vibration are formed through devating prism, are reflected into cube Amici prism point through transflector mirror
Light, an a branch of warp cube Amici prism reflex to the first microcobjective transmissive illumination to reference planes, a branch of warp cube Amici prism
The second microcobjective transmissive illumination is projected to sample, the two-beam of return is transmitted to transflector through a cube Amici prism
Mirror is transmitted through transflector mirror, generates phase shift through the second quarter wave plate, after the analyzer placed through 45 °, the polarization direction of two-beam
Identical, light intensity is equal, interferes, and Amici prism light splitting is incident on after interference light line focus lens focus, a branch of through being divided rib
Mirror transmissive illumination is a branch of through Amici prism reflected illumination to the direction y line array CCD to the direction x line array CCD, by the direction x line array CCD
It is coupled with image on the line array CCD of the direction y, obtains two-dimentional interference image, using multinomial characterization wave aberration is matched to obtain, passed through
The variation of observation image defocus aberration is focused, and realizes focusing test.
After focusing test, laser light source generates laser, and the uniform after Kohler illumination system is reflected through devating prism, through saturating
Reflecting mirror reflection, transmits through cube Amici prism, transmits through the second microcobjective, laser direct-writing sample.
Wherein, the wavelength of white light source is 550nm, and the wavelength of laser light source is 532nm, is plated to a cube Amici prism
Film process makes it only have semi-transparent semi-reflecting function to white light source, and laser light source all transmits.Reference planes should use high-precision
Fixed-focus method is spent, herein using phase shift interference measuring technique (PSI), thus reference path is correctly focused on the coke of reference substance
On face.
Compared with prior art, the present invention its remarkable advantage is:
(1) compared with other detectors, in order to improve data processing speed in the present invention, using x, the line of y both direction
Battle array CCD, is superimposed two width interference patterns on computers；Since line array CCD real-time Transmission light-to-current inversion signal and self-scanning speed are fast,
Frequency response is high, can be realized dynamic and measures, so data processing speed of the present invention is fast.
(2) present invention when handle interference pattern image, data processing is fast, and pass through phase-shifting interferometry to reference path into
Fixed-focus is gone, given reference focal plane, it is possible to the defocusing amount of sample is obtained in real time, it can according to obtained defocusing amount
To focus, sample is made to be ultimately at focal plane, realizes real-time fixed-focus.
(3) in the present invention, CCD obtain interference pattern image information after, using match multinomial to wave aberration carry out table
Sign, by match the available sample of fitting of a polynomial tested surface position and its topographical information.
Detailed description of the invention
Fig. 1 is that the present invention is based on the index paths of the synchronization polarization phase-shifting focus detection system of Linnik type interference microscope.
Specific embodiment
Present invention is further described in detail with reference to the accompanying drawing.
In conjunction with Fig. 1, a kind of synchronization polarization phase-shifting focus detection system based on Linnik type interference microscope, including white light source
1, collimating mirror 2, the first quarter wave plate 3, laser light source 4, kohler's illumination system 5, devating prism 6, transflector mirror 7, cube light splitting rib
Mirror 8, the first microcobjective 9, reference planes 10, the second microcobjective 11, the second quarter wave plate 13, analyzer 14, condenser lens
15, Amici prism 16, the direction x linear array CCD17, y direction linear array CCD18；Primary optic axis sets gradually white light source 1, collimation altogether
Mirror 2, the first quarter wave plate 3, devating prism 6 and transflector mirror 7；Totally second optical axis sets gradually laser light source 4, kohler's illumination system
System 5, devating prism 6；Third optical axis sets gradually sample 12, the second microcobjective 11, cube Amici prism 8, transflection altogether
Penetrate mirror 7, the second quarter wave plate 13, analyzer 14, condenser lens 15, Amici prism 16, the direction x linear array CCD17；Totally fourth optical axis
Set gradually cube Amici prism 8, the first microcobjective 9, reference planes 10；Totally fiveth optical axis set gradually Amici prism 16,
The direction y linear array CCD18；Wherein primary optic axis, the 4th optical axis, the 5th optical axis are parallel to each other, and the second optical axis and third optical axis are mutual
In parallel, and primary optic axis and the 4th optical axis, the 5th optical axis are respectively perpendicular to the second optical axis, the first microcobjective 9 and reference planes
10 are located on the reflected light path of cube Amici prism 8, and the second microcobjective 11 and sample 12 are located at cube Amici prism 8
On transmitted light path.
White light source 1 generates white light, and the first quarter wave plate 3 that collimated 2 collimated incident of mirror is placed to 45 ° forms circular polarization
Light forms the two orthogonal linearly polarized lights of beam direction of vibration through devating prism 6, is reflected into a cube light splitting through transflector mirror 7
Prism 8 is divided, a branch of to reflex to 9 transmissive illumination of the first microcobjective to reference planes 10 through cube Amici prism 8, carries ginseng
The light for examining 10 information of plane returns to cube Amici prism 8, and another beam is transmitted through the second microcobjective 11 through cube Amici prism 8,
It is irradiated to sample 12 again, the light for carrying 12 information of sample returns to cube Amici prism 8, the two-beam warp cube of return
Amici prism 8 is transmitted to transflector mirror 7, is transmitted through the second quarter wave plate 13 through transflector mirror 7 and generates phase shift, the inspection placed through 45 °
After polariscope 14, the polarization direction of two-beam is identical, and light intensity is equal, interferes, and is incident on after interference light line focus lens 15 point
Light prism 16 is divided, and a branch of through 16 transmissive illumination of Amici prism to the direction x linear array CCD17, another beam is reflected through Amici prism 16
It is irradiated to the direction y linear array CCD18, the image on the linear array CCD18 of the direction the x direction linear array CCD17 and y is coupled, obtains two
Interference image is tieed up, using multinomial characterization wave aberration is matched to obtain, is focused by the variation of observation image defocus aberration, realizes inspection
It is burnt；
After focusing test, laser light source 4 generates laser, and the uniform after Kohler illumination system 5 is reflexed to through devating prism 6
Transflector mirror 7 is reflected into cube Amici prism 8 through transflector mirror 7, and is transmitted, then is transmitted through the second microcobjective 11, and laser is straight
Write sample 12.
The wavelength of the white light source 1 is 550nm, and the wavelength of the laser light source 4 is 532nm.
Cube Amici prism 8 carries out coating film treatment, it is made only to have semi-transparent semi-reflecting function to white light source 1, and
The all transmissions of laser light source 4.
The reference planes 10 should use high-precision fixed-focus method, herein using phase shift interference measuring technique
(PSI), thus reference path is correctly focused on the focal plane of reference substance.
First microcobjective 9 is identical with the second microcobjective 11.
The transflector mirror 7 is in 45 ° of angles with primary optic axis.
First quarter wave plate 3 is in 45 ° of angles with primary optic axis.
The analyzer 14 is in 45 ° of angles with third optical axis.
The present invention is compared with other detectors, in order to improve data processing speed, using x, and the line array CCD of y both direction,
It is superimposed two width interference patterns on computers；Since line array CCD real-time Transmission light-to-current inversion signal and self-scanning speed are fast, frequency is rung
Ying Gao can be realized dynamic and measure, so data processing speed is fast；When handling interference pattern image, pass through phase-shifting interferometry pair
Reference path has carried out fixed-focus, given reference focal plane, it is possible to the defocusing amount of sample is obtained in real time, according to obtaining
Defocusing amount can focus, so that sample is ultimately at focal plane, realize real-time fixed-focus；Interference pattern image letter is obtained in CCD
After breath, using match multinomial characterizes wave aberration, by matching to obtain the available sample of fitting of a polynomial tested surface
Position and its topographical information.
Claims (8)
1. a kind of synchronization polarization phase-shifting focus detection system based on Linnik type interference microscope, it is characterised in that: including white light light
Source (1), collimating mirror (2), the first quarter wave plate (3), laser light source (4), kohler's illumination system (5), devating prism (6), transflector
Mirror (7), cube Amici prism (8), the first microcobjective (9), reference planes (10), the second microcobjective (11), the 2nd 1/4 wave
Piece (13), analyzer (14), condenser lens (15), Amici prism (16), the direction x linear array CCD(17), the direction y line array CCD
(18)；Primary optic axis sets gradually white light source (1), collimating mirror (2), the first quarter wave plate (3), devating prism (6) and transflection altogether
Penetrate mirror (7)；Totally second optical axis sets gradually laser light source (4), kohler's illumination system (5), devating prism (6)；Third optical axis altogether
Set gradually sample (12), the second microcobjective (11), cube Amici prism (8), transflector mirror (7), the second quarter wave plate
(13), analyzer (14), condenser lens (15), Amici prism (16), the direction x linear array CCD(17)；Totally fourth optical axis is set gradually
Cube Amici prism (8), the first microcobjective (9), reference planes (10)；Totally fiveth optical axis sets gradually Amici prism (16), y
Direction linear array CCD(18)；Wherein primary optic axis, the 4th optical axis, the 5th optical axis are parallel to each other, and the second optical axis and third optical axis are mutual
In parallel, and primary optic axis and the 4th optical axis, the 5th optical axis are respectively perpendicular to the second optical axis, and the first microcobjective (9) and reference are flat
Face (10) is located on the reflected light path of cube Amici prism (8), and the second microcobjective (11) and sample (12) are located at cube
On the transmitted light path of Amici prism (8)；
White light source (1) generates white light, and collimated mirror (2) collimated incident to the first quarter wave plate (3) forms circularly polarized light, through inclined
Shake the two orthogonal linearly polarized lights of beam direction of vibration of prism (6) formation, is reflected into a cube Amici prism through transflector mirror (7)
(8) it is divided, it is a branch of to reflex to the first microcobjective (9) transmissive illumination to reference planes (10) through cube Amici prism (8), it carries
The light of reference planes (10) information returns to cube Amici prism (8), and it is micro- that another beam warp cube Amici prism (8) is transmitted through second
Object lens (11), then sample (12) are irradiated to, the light for carrying sample (12) information returns to cube Amici prism (8), returns
The two-beam returned is transmitted to transflector mirror (7) through cube Amici prism (8), is transmitted through the second quarter wave plate through transflector mirror (7)
(13) phase shift is generated, after analyzer (14), the polarization direction of two-beam is identical, and light intensity is equal, interferes, and interference light is through poly-
Amici prism (16) light splitting is incident on after focus lens (15), it is a branch of through Amici prism (16) transmissive illumination to the direction x line array CCD
(17), another beam is through Amici prism (16) reflected illumination to the direction y line array CCD (18), by the direction x linear array CCD(17) and the direction y
Image on line array CCD (18) is coupled, and two-dimentional interference image is obtained, and using multinomial characterization wave aberration is matched to obtain, passes through sight
The variation for examining image defocus aberration is focused, and realizes focusing test；
After focusing test, laser light source (4) generates laser, and the uniform after Kohler illumination system (5) is reflected through devating prism (6)
It to transflector mirror (7), reflects through transflector mirror (7) into a cube Amici prism (8), and transmits, then through the second microcobjective (11)
Transmission, laser direct-writing sample (12).
2. the synchronization polarization phase-shifting focus detection system according to claim 1 based on Linnik type interference microscope, feature
Be: the central wavelength of the white light source (1) is 550nm, and the central wavelength of the laser light source (4) is 532nm.
3. the synchronization polarization phase-shifting focus detection system according to claim 1 based on Linnik type interference microscope, feature
Be: described cube of Amici prism (8) carries out coating film treatment, it is made only to have semi-transparent semi-reflecting function to white light source (1), and swashs
Radiant (4) all transmits.
4. the synchronization polarization phase-shifting focus detection system according to claim 1 based on Linnik type interference microscope, feature
Be: thus the reference planes (10) are referred to using high-precision fixed-focus method herein using phase shift interference measuring technique
Optical path is correctly focused on the focal plane of reference planes (10).
5. the synchronization polarization phase-shifting focus detection system according to claim 1 based on Linnik type interference microscope, feature
Be: the first microcobjective (9) is identical with the second microcobjective (11).
6. the synchronization polarization phase-shifting focus detection system according to claim 1 based on Linnik type interference microscope, feature
Be: the transflector mirror (7) and primary optic axis are in 45 ° of angles.
7. the synchronization polarization phase-shifting focus detection system according to claim 1 based on Linnik type interference microscope, feature
Be: first quarter wave plate (3) and primary optic axis are in 45 ° of angles.
8. the synchronization polarization phase-shifting focus detection system according to claim 1 based on Linnik type interference microscope, feature
Be: the analyzer (14) and third optical axis are in 45 ° of angles.
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| CN115655154B (en) * | 2022-12-26 | 2023-03-10 | 常州微亿智造科技有限公司 | High-resolution phase measurement deflection technique dynamic defect detection device and method |
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