CN112254938A - Off-axis parabolic mirror optical axis detection device and detection method - Google Patents
Off-axis parabolic mirror optical axis detection device and detection method Download PDFInfo
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- CN112254938A CN112254938A CN202011184052.0A CN202011184052A CN112254938A CN 112254938 A CN112254938 A CN 112254938A CN 202011184052 A CN202011184052 A CN 202011184052A CN 112254938 A CN112254938 A CN 112254938A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
Abstract
The invention belongs to the technical field of detection of aviation optical equipment, and particularly relates to an off-axis parabolic mirror optical axis detection device and a detection method. The detection method using the detection device comprises the steps of firstly completing the autocollimation of the autocollimation light tube and the laser interferometer, then carrying out the surface shape detection of the off-axis parabolic mirror, and finally carrying out the optical axis detection of the off-axis parabolic mirror.
Description
Technical Field
The invention belongs to the technical field of detection of aviation optical equipment, and particularly relates to an off-axis parabolic mirror optical axis detection device and a detection method.
Background
The off-axis parabolic mirror is widely applied to aviation and aerospace off-axis optical systems, the requirement on surface shape accuracy is continuously improved, and repeated grinding is needed during processing so as to meet the requirement on surface shape accuracy. In order to facilitate the adjustment of the optical machine of the off-axis parabolic mirror, the back surface of the off-axis parabolic mirror is often required to be used as an adjustment reference and form a 90-degree relation with the optical axis. In the process of polishing the surface shape of the off-axis parabolic mirror, the optical axis of the off-axis parabolic mirror changes, and a method for rapidly and accurately detecting the optical axis of the off-axis parabolic mirror is urgently needed to ensure the angular relation between the optical axis and the reference of the back optical axis.
At present, the institute of optical precision machinery and physics of the academy of sciences of china has published a method and a system for calibrating the optical axis direction of an off-axis parabolic mirror, patent application No. 201710880388.2, and patent publication No. CN 107817088A. The method disclosed by the patent has the defects of repeated conversion of the calibration standard, great influence of measurement on a measured calibration object, complex measurement method and the like, and further causes low measurement precision (fraction) and low measurement efficiency.
In order to facilitate the adjustment of the optical machine of the off-axis parabolic mirror, the back surface of the off-axis parabolic mirror is often required to be used as an adjustment reference and form a 90-degree relation with the optical axis. During processing, the surface shape and the back optical axis reference of the off-axis parabolic mirror need to be polished continuously, and the surface shape and the back optical axis reference of the off-axis parabolic mirror are difficult to finish at one time.
Disclosure of Invention
In view of this, an off-axis parabolic mirror optical axis detection apparatus and a detection method thereof have the characteristics of high measurement accuracy and high measurement efficiency.
In order to achieve the technical purpose, the invention adopts the following specific technical scheme:
an off-axis parabolic mirror optical axis detection device comprises a laser interferometer, a three-dimensional translation stage, a standard spherical reflector, an auto-collimation tube and a five-dimensional adjusting stage;
the laser interferometer is used for emitting parallel light to the off-axis parabolic mirror;
the off-axis parabolic mirror receives the parallel light to enable the parallel light to converge to form convergent light; the back of the off-axis parabolic mirror is processed as an installation and adjustment reference and forms a 90-degree relation with an optical axis of the off-axis parabolic mirror; the standard spherical reflector is arranged on the three-dimensional translation stage and used for reflecting the convergent light to form divergent light under the position adjustment of the three-dimensional translation stage, so that the divergent light is reflected back to the laser interferometer through the off-axis parabolic mirror;
the laser interferometer is also used for detecting the surface shape information of the off-axis parabolic mirror based on the light beam reflected by the off-axis parabolic mirror;
the five-dimensional adjusting platform is used for placing the off-axis parabolic mirror and adjusting the spatial position of the off-axis parabolic mirror based on the surface shape information by the five-dimensional adjusting platform, so that the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer;
the autocollimation light pipe is arranged in alignment with the laser interferometer and used for detecting the angle deviation between the back optical axis reference of the off-axis parabolic mirror and the optical axis of the off-axis parabolic mirror based on the surface shape information of the off-axis parabolic mirror when the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer.
Further, the invention provides a detection method based on the off-axis parabolic mirror optical axis detection device, which comprises the following steps:
1) collimating the autocollimation light pipe with a laser interferometer;
2) detecting the surface shape information of the off-axis parabolic mirror through the laser interferometer and the standard spherical mirror;
3) continuously adjusting the spatial position of the off-axis parabolic mirror and the standard spherical reflector based on the surface shape information to enable the optical axis of the off-axis parabolic mirror to be parallel to the optical axis of the laser interferometer;
4) and detecting the angle deviation between the back optical axis reference of the off-axis parabolic mirror and the optical axis of the off-axis parabolic mirror through the autocollimator based on the surface shape information of the off-axis parabolic mirror when the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer.
Further, the collimation method in the step 1) comprises the following steps: and after the auto-collimation light pipe is powered on, aligning the bright cross wire of the auto-collimation light pipe to the center of the picture cross of the laser interferometer.
Further, the method for measuring the surface shape of the off-axis parabolic mirror in the step 2) comprises the following steps: keeping the laser interferometer and the autocollimation light pipe still, fixing the off-axis parabolic mirror on a five-dimensional adjusting table, placing a standard spherical reflector near a light beam convergence point of the off-axis parabolic mirror, moving the spatial position of the standard spherical reflector by using a three-dimensional translation table, reflecting the converged light to the off-axis parabolic mirror, returning the light beam to the laser interferometer by using the off-axis parabolic mirror, and measuring the surface shape of the off-axis parabolic mirror by using the laser interferometer.
Further, in the step 3), the method for making the optical axis of the off-axis parabolic mirror parallel to the optical axis of the laser interferometer comprises: the surface shape of the off-axis parabolic mirror is measured by using the laser interferometer for the first time, the Zernike coefficient is read, the space positions of the off-axis parabolic mirror and the standard spherical reflector are adjusted by using the five-dimensional adjusting table and the three-dimensional translation table, the defocusing and coma terms of the Zernike coefficient are adjusted to be close to 0, and the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer.
Further, the angle deviation reading method in the step 4) includes:
and when the defocusing and coma terms of the Zernike coefficient are close to 0, directly reading the angular deviation between the reference of the optical axis at the back of the off-axis parabolic mirror and the optical axis of the off-axis parabolic mirror through the autocollimator.
By adopting the technical scheme, the invention can bring the following beneficial effects:
1) the invention can simultaneously measure the surface shape and the optical axis of the off-axis parabolic mirror at one time, and reduces the detection steps of the off-axis parabolic mirror.
2) The invention has high precision of the detection optical axis, and the measurement error is less than 2'.
3) The invention has high detection efficiency, and only 10 minutes are needed from the building of the test bench to the end of measurement after a plurality of times of experimental statistics.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings needed to be used in the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present disclosure, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of a detection apparatus of the present invention;
wherein: 1. a laser interferometer; 2. a three-dimensional translation stage; 3. a standard spherical mirror; 4. an auto-collimating light pipe; 5. an off-axis parabolic mirror; 6. five-dimensional adjusting table.
Detailed Description
The embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.
The embodiments of the present disclosure are described below with specific examples, and other advantages and effects of the present disclosure will be readily apparent to those skilled in the art from the disclosure in the specification. It is to be understood that the described embodiments are merely illustrative of some, and not restrictive, of the embodiments of the disclosure. The disclosure may be embodied or carried out in various other specific embodiments, and various modifications and changes may be made in the details within the description without departing from the spirit of the disclosure. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present disclosure, and the drawings only show the components related to the present disclosure rather than the number, shape and size of the components in actual implementation, and the type, amount and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.
In one embodiment of the invention, an optical axis detection device of an off-axis parabolic mirror 5 is provided, which comprises a laser interferometer 1, a three-dimensional translation stage 2, a standard spherical reflector 3, an autocollimation light pipe 4 and a five-dimensional adjusting stage 6;
the laser interferometer 1 is used for emitting parallel light to the off-axis parabolic mirror 5;
the off-axis parabolic mirror 5 receives the parallel light to converge the parallel light to form convergent light; the back of the off-axis parabolic mirror 5 is processed as an adjusting reference and forms a 90-degree relation with the optical axis of the off-axis parabolic mirror; the standard spherical reflector 3 is arranged on the three-dimensional translation stage 2 and used for reflecting convergent light to form divergent light under the position adjustment of the three-dimensional translation stage 2, so that the divergent light is reflected back to the laser interferometer 1 through the off-axis parabolic mirror 5;
the laser interferometer 1 is also used for detecting the surface shape information of the off-axis parabolic mirror 5 based on the light beam reflected by the off-axis parabolic mirror 5;
the five-dimensional adjusting platform 6 is used for placing the off-axis parabolic mirror 5 and adjusting the spatial position of the off-axis parabolic mirror 5 through the five-dimensional adjusting platform based on surface shape information, so that the optical axis of the off-axis parabolic mirror 5 is parallel to the optical axis of the laser interferometer 1;
the autocollimation light pipe 4 is arranged in alignment with the laser interferometer 1 and used for detecting the angle deviation between the back optical axis reference of the off-axis parabolic mirror 5 and the optical axis of the off-axis parabolic mirror 5 based on the surface shape information of the off-axis parabolic mirror 5 when the optical axis of the off-axis parabolic mirror 5 is parallel to the optical axis of the laser interferometer 1.
In one embodiment, the present invention provides a detection method based on the above off-axis parabolic mirror 5 optical axis detection apparatus, including the following steps:
1) collimating the autocollimation light pipe 4 with the laser interferometer 1;
2) detecting the surface shape information of the off-axis parabolic mirror 5 through the laser interferometer 1 and the standard spherical reflector 3;
3) continuously adjusting the spatial position of the off-axis parabolic mirror 5 and the standard spherical reflector 3 based on the surface shape information to enable the optical axis of the off-axis parabolic mirror 5 to be parallel to the optical axis of the laser interferometer 1;
4) and detecting the angle deviation between the back optical axis reference of the off-axis parabolic mirror 5 and the optical axis of the off-axis parabolic mirror 5 through the autocollimator 4 based on the surface shape information of the off-axis parabolic mirror 5 when the optical axis of the off-axis parabolic mirror 5 is parallel to the optical axis of the laser interferometer 1.
In this embodiment, the collimation method in step 1) is as follows: after the auto-collimation light pipe 4 is powered on, the bright cross wire of the auto-collimation light pipe 4 is aligned with the center of the picture cross of the laser interferometer 1.
In this embodiment, the method for measuring the surface shape of the off-axis parabolic mirror 5 in step 2) includes: keeping the laser interferometer 1 and the autocollimation light pipe 4 still, fixing the off-axis parabolic mirror 5 on a five-dimensional adjusting table 6, placing a standard spherical reflector 3 near a light beam convergence point of the off-axis parabolic mirror 5, moving the spatial position of the standard spherical reflector 3 by using the three-dimensional translation table 2, reflecting and converging light to the off-axis parabolic mirror 5, returning the light beam to the laser interferometer 1 by using the off-axis parabolic mirror 5, and measuring the surface shape of the off-axis parabolic mirror 5 at the moment by using the laser interferometer 1.
In this embodiment, in step 3), the method for making the optical axis of the off-axis parabolic mirror 5 parallel to the optical axis of the laser interferometer 1 includes: the surface shape of the off-axis parabolic mirror 5 is measured by using the laser interferometer 1 for the first time, the Zernike coefficient is read, the space positions of the off-axis parabolic mirror 5 and the standard spherical reflector 3 are adjusted by using the five-dimensional adjusting table 6 and the three-dimensional translation table 2, the defocusing and coma terms of the Zernike coefficient are adjusted to be close to 0, and the optical axis of the off-axis parabolic mirror 5 is parallel to the optical axis of the laser interferometer 1.
In this embodiment, the method for reading the angular deviation in step 4) includes:
when the defocusing and coma terms of the Zernike coefficient are close to 0, the angular deviation between the optical axis reference of the back of the off-axis parabolic mirror 5 and the optical axis of the off-axis parabolic mirror 5 is directly read through the autocollimator 4.
In the embodiment, the autocollimation light pipe 4 and the laser interferometer 1 are autocollimated, the laser interferometer 1 emits a parallel light beam to irradiate the off-axis parabolic mirror 5, the off-axis parabolic mirror 5 reflects the light beam to the standard spherical reflector 3, the standard spherical reflector 3 reflects the light beam back in the original path, the laser interferometer 1 is used for measuring the surface shape of the off-axis parabolic mirror 5, the spatial positions of the off-axis parabolic mirror 5 and the standard spherical reflector 3 are adjusted according to the Zernike coefficient measured by the laser interferometer 1, and when the surface shape measurement of the off-axis parabolic mirror is the best, the reading of the autocollimation light pipe 4 is the angular relation between the optical axis of the off-axis parabolic mirror 5 and the reference of the back optical axis of the off-axis parabolic mirror.
The laser interferometer 1 emits plane waves and is detection equipment for the surface shape of the off-axis parabolic mirror 5. The standard spherical reflector 3 is fixed on the three-dimensional translation stage 2, the three-dimensional translation stage 2 is used for adjusting the spatial position of the standard spherical reflector 3, and the standard spherical reflector 3 is used for measuring the surface shape and the optical axis of the off-axis parabolic mirror 5. The autocollimation light pipe 4 is used for measuring the angle relation between the optical axis of the off-axis parabolic mirror 5 and the optical axis reference of the back surface of the off-axis parabolic mirror. The off-axis parabolic mirror 5 is fixed on the five-dimensional adjusting platform 6, and the five-dimensional adjusting platform 6 is used for adjusting the spatial position and the posture of the off-axis parabolic mirror 5.
The autocollimation light pipe 4 is connected with a power supply, and the crosshair of the autocollimation light pipe 4 is aligned with the center of the cross of the picture of the laser interferometer 1. Keeping the laser interferometer 1 and the autocollimation light pipe 4 still, fixing the off-axis parabolic mirror 5 on the five-dimensional adjusting table 6, placing the standard spherical reflector 3 near the light beam convergence point of the off-axis parabolic mirror 5, moving the spatial position of the standard spherical reflector 3 by using the three-dimensional translation table 2, and returning the image point to be imaged in the laser interferometer 1. The surface shape of the off-axis parabolic mirror 5 at this time is measured by the laser interferometer 1, and the Zernike coefficients thereof are read. And adjusting the spatial positions of the off-axis parabolic mirror 5 and the standard spherical reflector 3 to adjust the defocusing and coma terms of the Zernike coefficient to be close to 0, wherein the optical axis of the off-axis parabolic mirror 5 is parallel to the optical axis of the laser interferometer 1, and the optical axis of the off-axis parabolic mirror 5 is parallel to the optical axis of the autocollimation light pipe 4. At this time, the reading of the autocollimator 4 is the angular relationship between the optical axis of the off-axis parabolic mirror 5 and the back optical axis reference.
The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present disclosure should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (6)
1. An off-axis parabolic mirror optical axis detection device is characterized by comprising a laser interferometer, a three-dimensional translation stage, a standard spherical reflector, an autocollimation light pipe and a five-dimensional adjusting stage;
the laser interferometer is used for emitting parallel light to the off-axis parabolic mirror;
the off-axis parabolic mirror receives the parallel light to enable the parallel light to converge to form convergent light; the back of the off-axis parabolic mirror is processed as an installation and adjustment reference and forms a 90-degree relation with an optical axis of the off-axis parabolic mirror; the standard spherical reflector is arranged on the three-dimensional translation stage and used for reflecting the convergent light to form divergent light under the position adjustment of the three-dimensional translation stage, so that the divergent light is reflected back to the laser interferometer through the off-axis parabolic mirror;
the laser interferometer is also used for detecting the surface shape information of the off-axis parabolic mirror based on the light beam reflected by the off-axis parabolic mirror;
the five-dimensional adjusting platform is used for placing the off-axis parabolic mirror and adjusting the spatial position of the off-axis parabolic mirror based on the surface shape information by the five-dimensional adjusting platform, so that the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer;
the autocollimation light pipe is arranged in alignment with the laser interferometer and used for detecting the angle deviation between the back optical axis reference of the off-axis parabolic mirror and the optical axis of the off-axis parabolic mirror based on the surface shape information of the off-axis parabolic mirror when the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer.
2. A method of inspection of an off-axis parabolic mirror optical axis inspection device according to claim 1, comprising the steps of:
1) collimating the autocollimation light pipe with a laser interferometer;
2) detecting the surface shape information of the off-axis parabolic mirror through the laser interferometer and the standard spherical mirror;
3) continuously adjusting the spatial position of the off-axis parabolic mirror and the standard spherical reflector based on the surface shape information to enable the optical axis of the off-axis parabolic mirror to be parallel to the optical axis of the laser interferometer;
4) and detecting the angle deviation between the back optical axis reference of the off-axis parabolic mirror and the optical axis of the off-axis parabolic mirror through the autocollimator based on the surface shape information of the off-axis parabolic mirror when the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer.
3. The detection method according to claim 2, wherein the collimation method of step 1) is: and after the auto-collimation light pipe is powered on, aligning the bright cross wire of the auto-collimation light pipe to the center of the picture cross of the laser interferometer.
4. The inspection method according to claim 2, wherein the method for measuring the surface shape of the off-axis parabolic mirror in the step 2) is as follows: keeping the laser interferometer and the autocollimation light pipe still, fixing the off-axis parabolic mirror on a five-dimensional adjusting table, placing a standard spherical reflector near a light beam convergence point of the off-axis parabolic mirror, moving the spatial position of the standard spherical reflector by using a three-dimensional translation table, reflecting the converged light to the off-axis parabolic mirror, returning the light beam to the laser interferometer by using the off-axis parabolic mirror, and measuring the surface shape of the off-axis parabolic mirror by using the laser interferometer.
5. The inspection method as claimed in claim 4, wherein in the step 3), the method for making the optical axis of the off-axis parabolic mirror parallel to the optical axis of the laser interferometer comprises: the surface shape of the off-axis parabolic mirror is measured by using the laser interferometer for the first time, the Zernike coefficient is read, the space positions of the off-axis parabolic mirror and the standard spherical reflector are adjusted by using the five-dimensional adjusting table and the three-dimensional translation table, the defocusing and coma terms of the Zernike coefficient are adjusted to be close to 0, and the optical axis of the off-axis parabolic mirror is parallel to the optical axis of the laser interferometer.
6. The detection method according to claim 5, wherein the angle deviation reading method in step 4) is:
and when the defocusing and coma terms of the Zernike coefficient are close to 0, directly reading the angular deviation between the reference of the optical axis at the back of the off-axis parabolic mirror and the optical axis of the off-axis parabolic mirror through the autocollimator.
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| CN114252242A (en) * | 2021-11-23 | 2022-03-29 | 中国航空工业集团公司洛阳电光设备研究所 | Optical axis calibration tool and method for telescopic system and optical system comprising front telescope |
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