CN215676862U

CN215676862U - Detection device

Info

Publication number: CN215676862U
Application number: CN202121258769.5U
Authority: CN
Inventors: 周广梅; 尚振华; 朱强铭
Original assignee: Raintree Scientific Instruments Shanghai Corp
Current assignee: Raintree Scientific Instruments Shanghai Corp
Priority date: 2021-06-07
Filing date: 2021-06-07
Publication date: 2022-01-28
Anticipated expiration: 2031-06-07

Abstract

The utility model aims to provide a detection device. The detection device includes: the device comprises a laser interferometer, a parabolic reflector, an adjusting frame, a standard small ball adjusting frame, a plane reflector and a transmission plane standard mirror; the method comprises the following steps that firstly, a parabolic reflector is installed on an adjusting frame, so that the surface type information of the parabolic reflector is obtained by adjusting the position of a standard small ball and the angle of a paraboloid relative to the optical axis of a laser interferometer; next, the parabolic mirror is removed and the plane mirror is mounted on the adjustment frame on the same mounting reference surface, so that the mechanical positioning reference is obtained based on the position of the spot of the laser interferometer reflected by the plane mirror. The utility model has the following advantages: by sequentially installing the parabolic reflector and the plane reflector, the detection device can obtain the characteristics of the plane type of the parabolic reflector, the mechanical positioning reference, the angle of the optical axis of the parabolic mirror and the like.

Description

Detection device

Technical Field

The utility model relates to the field of optical equipment, in particular to a detection device for detecting geometric characteristics of a parabolic reflector.

Background

In the prior art, in the field of semiconductor detection, a parabolic reflector is widely applied in the technical field of ultra-wide spectrum due to the advantages of no spherical aberration and no chromatic aberration, typically a Spectroscopic Ellipsometer (SE) and a Spectroscopic Reflectometer (SR). The surface shape and optical axis alignment of the parabolic mirror greatly affect aberration, and an apparatus capable of detecting the surface shape and optical axis alignment reference of the parabolic mirror is very important for optical path alignment of semiconductor devices. The detection device for the parabolic reflector is generally only used for surface type detection at present, and is divided into a contact type and a non-contact type, and the method cannot obtain the spatial position relation between the optical axis of the parabolic reflector and a mechanical positioning reference.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a detection device.

The embodiment of the application provides a detection device, its characterized in that, detection device includes: the device comprises a laser interferometer, a parabolic reflector, an adjusting frame, a standard small ball adjusting frame, a plane reflector and a transmission plane standard mirror; the method comprises the following steps that firstly, a parabolic reflector is installed on an adjusting frame, so that the surface type information of the parabolic reflector is obtained by adjusting the position of a standard small ball and the angle of a paraboloid relative to the optical axis of a laser interferometer; next, the parabolic mirror is removed and the plane mirror is mounted on the adjustment frame on the same mounting reference surface, so that the mechanical positioning reference is obtained based on the position of the spot of the laser interferometer reflected by the plane mirror.

According to an embodiment of the present application, the profile information of the parabolic mirror is obtained by performing the following operations: adjusting the position of the standard small ball to make the standard small ball concentric with the focus of the paraboloid focusing light beam; measuring the wavefront reflected by the standard small ball to the laser interferometer; and repeating the steps until the wave front reflected by the standard small ball to the laser interferometer cannot be reduced continuously, thereby obtaining the surface type information.

According to an embodiment of the application, the off-axis angle of the parabolic mirror is 45 degrees. .

Compared with the prior art, the utility model has the following advantages: the detection device of the utility model is provided with the parabolic reflector and the plane reflector in sequence, the surface type of the parabolic reflector is obtained after the parabolic reflector is installed, and the mechanical positioning reference is obtained after the plane reflector is installed, so that the detection device can obtain the characteristics of the surface type of the parabolic reflector, the mechanical positioning reference, the angle of the optical axis of the parabolic reflector and the like.

Drawings

Other features, objects and advantages of the utility model will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:

fig. 1(a) shows a schematic structural diagram of a detection apparatus according to an embodiment of the present application;

FIG. 1(b) is a schematic structural diagram of a detection device according to an embodiment of the present application;

FIG. 2 shows a schematic diagram of a spot of a laser interferometer according to an embodiment of the present application.

The same or similar reference numbers in the drawings identify the same or similar elements.

Detailed Description

Before discussing exemplary embodiments in greater detail, it should be noted that the specific structural and functional details disclosed herein are merely representative and are for purposes of describing exemplary embodiments of the present application. This application may, however, be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element may be termed a second element, and, similarly, a second element may be termed a first element, without departing from the scope of example embodiments. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present. Other words used to describe the relationship between elements (e.g., "between" versus "directly between", "adjacent" versus "directly adjacent to", etc.) should be interpreted in a similar manner.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used herein, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It should also be noted that, in some alternative implementations, the functions/acts noted may occur out of the order noted in the figures. For example, two figures shown in succession may, in fact, be executed substantially concurrently, or the figures may sometimes be executed in the reverse order, depending upon the functionality/acts involved.

Embodiments of the present application are described in further detail below with reference to the accompanying drawings.

Fig. 1(a) and 1(b) show schematic structural diagrams of a detection apparatus according to an embodiment of the present application.

Referring to fig. 1(a) and 1(b), the detection device comprises a laser interferometer 1, a parabolic reflector 4, an adjusting frame 5, a standard bead 2, a standard bead adjusting frame 3, a plane reflector 6 and a transmission plane standard mirror 7.

Referring to FIG. 1(a), a transmission plane standard mirror 7 is mounted on the laser interferometer 1. The collimated light beam emitted from the transmission plane standard mirror 7 is incident approximately along the optical axis direction of the paraboloid. Wherein the parabolic mirror 4 is used for converging the collimated light beam.

The parabolic reflector 4 is first mounted on the adjusting frame 5, so that the surface type information of the parabolic reflector 4 can be obtained by adjusting the position of the standard small ball 2 and the angle of the paraboloid relative to the optical axis of the laser interferometer 1.

Specifically, the surface type information of the parabolic mirror is obtained by performing the following operations: adjusting the position of the standard small ball 2 to make the standard small ball 2 concentric with the focus of the paraboloid focusing light beam; measuring the wavefront reflected by the standard small ball 2 to the laser interferometer 1; and repeating the steps until the wavefront reflected by the standard small ball 2 to the laser interferometer 1 cannot be reduced continuously, thereby obtaining the surface type information.

Wherein the off-axis angle of the parabolic mirror 4 is 90 degrees.

Referring to fig. 1(b), the parabolic mirror is removed and the plane mirror 6 is mounted on the adjustment frame 5 on the same mounting reference surface, so that the mechanical positioning reference is obtained based on the position of the spot reflected by the plane mirror 6 to the laser interferometer 1.

Preferably, after the plane mirror 6 is mounted, the angle between the mechanical positioning reference and the optical axis of the parabolic mirror is obtained based on the offset information of the spot reflected by the plane mirror 6 back to the laser interferometer 1 with respect to the center of the reticle of the laser interferometer 1.

According to one embodiment, reference is made to fig. 1(a) and fig. 1(b) and fig. 2. FIG. 2 shows a schematic diagram of a spot of a laser interferometer according to an embodiment of the present application.

The off-axis parabolic mirror is detected by using the detection device shown in fig. 1(a) and 1(b), and the parabolic mirror 4 is first attached to the adjustment frame 5 so that the off-axis angle θ of the parabolic mirror 4 becomes 90 °. The laser interferometer 1 is provided with a transmission plane standard mirror 7. The positioning reference surface of the object plane reflecting mirror 4 is superposed on the mounting reference surface of the adjusting frame 5, and the collimated light beam emitted from the laser interferometer 1 is made to enter substantially along the optical axis direction of the paraboloid by performing the pre-alignment. Wherein the parabolic mirror 4 focuses the straight light beam to converge.

Obtaining facet information of the parabolic mirror by performing the following operations: adjusting the position of the standard small ball 3 to make the standard small ball 3 concentric with the focus of the paraboloid focusing light beam; measuring the wave front reflected by the standard small ball 3 to the laser interferometer 1; if the astigmatism exceeds a preset threshold value, finely adjusting the angle of the paraboloid relative to the optical axis of the laser interferometer 1, and adjusting the standard small ball 3 to be concentric with the focus of the light beam again and measuring; repeating the steps until the astigmatism can not be reduced continuously, and at the moment, the optical axis of the laser interferometer 1 is considered to be coincident with the optical axis of the paraboloid, and the standard small ball 3 is considered to be coincident with the focus of the paraboloid, so that the surface type information measured by the laser interferometer is read.

The parabolic mirror is removed, the plane mirror 6 is mounted on the same mounting reference surface, and the position of the spot of the laser interferometer 1 is reflected by the plane mirror 6, and the position of the spot is shown in FIG. 2. Referring to FIG. 2, the angle between the mechanical positioning reference plane and the optical axis of the parabolic mirror is calculated based on the deviation distances X and Y of the spot from the center of the reticle of the laser interferometer 1 and the relationship between the spot deviation and the angle calibrated in advance.

According to the detection device, the paraboloid reflector and the plane reflector are sequentially installed, the surface type of the paraboloid reflector is obtained after the paraboloid reflector is installed, and the mechanical positioning reference is obtained after the plane reflector is installed, so that the detection device can obtain the characteristics of the surface type of the paraboloid reflector, the mechanical positioning reference, the angle of the optical axis of the parabolic mirror and the like. .

Details of embodiments of the present invention will be readily apparent to those skilled in the art, and the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned. Furthermore, it is obvious that the word "comprising" does not exclude other elements or steps, and the singular does not exclude the plural. A plurality of units or means recited in the system claims may also be implemented by one unit or means in software or hardware. The terms first, second, etc. are used to denote names, but not any particular order.

Claims

1. A detection device, characterized in that the detection device comprises:

the device comprises a laser interferometer, a parabolic reflector, an adjusting frame, a standard small ball adjusting frame, a plane reflector and a transmission plane standard mirror;

the method comprises the following steps that firstly, a parabolic reflector is installed on an adjusting frame, so that the surface type information of the parabolic reflector is obtained by adjusting the position of a standard small ball and the angle of a paraboloid relative to the optical axis of a laser interferometer; next, the parabolic mirror is removed and the plane mirror is mounted on the adjustment frame on the same mounting reference surface, so that the mechanical positioning reference is obtained based on the position of the spot of the laser interferometer reflected by the plane mirror.

2. The inspection apparatus of claim 1, wherein the profile information of the parabolic mirror is obtained by performing the following operations:

adjusting the position of the standard small ball to make the standard small ball concentric with the focus of the paraboloid focusing light beam;

measuring the wavefront reflected by the standard small ball to the laser interferometer;

and repeating the steps until the wave front reflected by the standard small ball to the laser interferometer cannot be reduced continuously, thereby obtaining the surface type information.

3. The detecting device for detecting the rotation of a motor rotor as claimed in claim 1, wherein the angle between the mechanical positioning reference and the optical axis of the parabolic mirror is obtained based on the information about the deviation of the spot of the light reflected by the plane mirror back to the laser interferometer with respect to the center of the reticle of the laser interferometer after the plane mirror is installed.